JP2009134775A - Rotary driving unit and electron beam irradiating unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve durability by supplying electric power from a fixed side to a rotational side in a noncontact manner by transformer mechanism through electromagnetic induction. <P>SOLUTION: A clamp voltage is supplied from a housing side to a clamp electrode which rotates together with a rotational shaft set within a turntable by a rotary transformer, and a substrate mounted on the turntable is held by static electricity of the clamp electrode. Herewith electric power can be provided in a noncontact manner by supplying with the transformer mechanism through the electromagnetic induction so that durability can be improved without incurring abrasion. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a rotary drive device used when a disk master is manufactured by irradiating a substrate with an electron beam, and an electron beam irradiation device including the same.

  In recent years, various recording media capable of recording large-capacity image / audio data and digital data have been developed. For example, high-density disks such as CDs (Compact Disks) and DVDs (Digital Versatile Disks) are manufactured by irradiating a substrate with a laser beam by a disk master manufacturing apparatus, but recording density will increase in the future. Therefore, it is considered to shift to electron beam irradiation.

  For example, Patent Document 1 discloses an electron beam emitting unit (electron beam emitting unit) that emits an electron beam and a rotation driving unit (rotation driving unit) that rotationally drives a substrate irradiated with the electron beam from the electron beam emitting unit. ) And moving means (translation driving unit) for moving the rotation driving unit relative to the electron beam emitting unit is disclosed. The rotation driving means includes a housing (spindle housing) that rotatably supports a rotating shaft (spindle shaft), an insulating turntable that rotates together with the rotating shaft and mounts a base, and is provided in the turntable. The clamp electrode (chucking electrode), a rotary connector for supplying a clamp voltage to the clamp electrode while allowing relative rotation between the clamp electrode and the casing accompanying the rotation of the rotation shaft, and the rotation shaft are driven to rotate. And a motor.

JP 2003-36569 A

  In the prior art described above, rotational drive means having a rotary connector is used. A rolling bearing is used for the rotary connector, and mercury is used for the connecting portion (contact point) of the rotating portion and the fixed portion. When the rotary connector having such a configuration is used, friction is generated between the fixed portion and the rotating portion by the rolling bearing and the contact. As a result, there is a possibility that wear occurs in a portion where friction occurs, and there is room for improvement in terms of durability.

  The problem to be solved by the present invention includes the above-described problem as an example.

  In order to solve the above-mentioned problems, an invention according to claim 1 is a housing that rotatably supports a rotating shaft, an insulating turntable that is provided so as to rotate together with the rotating shaft, and on which a substrate is placed. And a clamp electrode provided in the turntable, and a rotary transformer for supplying a clamp voltage to the clamp electrode while allowing relative rotation between the clamp electrode and the casing accompanying the rotation of the rotating shaft. .

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a block diagram showing the overall configuration of a master disk manufacturing apparatus 1 according to this embodiment.

  First, the outline of the manufacturing process of the optical disc master will be described below. The electron beam is used in a vacuum atmosphere because it has a characteristic of being significantly attenuated in the air atmosphere. Therefore, a turntable or the like on which a substrate for producing an electron gun or an optical disc master is placed in a vacuum atmosphere. For manufacturing an optical disc master, for example, a silicon (Si) substrate is used. The silicon substrate is coated with an electron beam resist on its main surface. The substrate coated with the electron beam resist is rotated and irradiated with an electron beam modulated by an information data signal in the disk master production apparatus, and a latent image of a fine concavo-convex pattern such as pits and grooves is spirally formed. Formed.

  After the electron beam exposure is completed, the substrate is taken out from the disc master manufacturing apparatus and subjected to development processing. Next, patterning and resist removal processes are performed to form a fine uneven pattern on the substrate. A conductive film is formed on the main surface of the patterned substrate, and an electroforming process is performed to manufacture an optical disc master (stamper).

  As shown in FIG. 1, the disk master manufacturing apparatus 1 includes a vacuum chamber 2, a rotation driving device 3 that drives a disk substrate disposed in the vacuum chamber 2, and an electron beam optical system attached to the vacuum chamber 2. An electronic column 4 is provided. An optical disk substrate (hereinafter simply referred to as a disk substrate) 5 for an optical disk master is placed on a turntable 6. The turntable 6 is rotationally driven with respect to the vertical axis of the main surface of the disk substrate by a spindle housing 11 that rotatably supports a spindle shaft 7 connected thereto. The rotation drive device 3 is installed on a feed stage (hereinafter simply referred to as a stage) 8. The stage 8 is coupled to a feed motor 9 which is a translation drive device via a ball screw 10, and the rotary drive device 3 including the spindle housing 11 and the turntable 6 is moved in a predetermined direction in a plane parallel to the main surface of the disk substrate 5. It is possible to move in translation. Note that the turntable 6 is made of an insulating material such as ceramic, and the disk substrate 5 is clamped on the turntable 6 by an electrostatic clamp mechanism described later.

  In the vacuum chamber 2 (or outside thereof), a laser length measuring device 15 for detecting the translational movement position of the main surface of the disk substrate 5 is provided. The laser length measuring device 15 includes a light emitter, a light receiver, and a detector (not shown). The laser beam emitted from the light emitter and reflected by the reflecting mirror 19 provided on the stage 8 is received by the light receiver. Then, the position of the main surface of the disk substrate 5 in the translational movement direction is detected by the interference of the light wave. Then, the detection result is output to the feed motor control circuit 20. The feed motor control circuit 20 calculates an error in the position of the stage 8 based on the input result, and controls the drive of the feed motor 9 so as to correct the error. Further, the calculated stage position error is output to an irradiation position adjustment circuit 33 described later.

  The vacuum chamber 2 is installed via a vibration isolator (not shown) such as an air damper, and transmission of vibration from the outside is suppressed. Further, a vacuum pump 22 is connected to the vacuum chamber 2, and the interior of the chamber is set to a vacuum atmosphere of a predetermined pressure by exhausting from the chamber by the vacuum pump 22.

  In the electron column 4 for emitting an electron beam, an electron beam source 25, a converging lens 26, a beam modulator 27, an aperture 28, a beam deflector 29, and an objective lens 30 are arranged in this order from the upstream side to the downstream side of the beam. It is arranged toward the. The electron column 4 is attached to the ceiling surface of the vacuum chamber 2 so that an electron beam injection port 31 provided at the tip of the electron column 4 is located in the vacuum chamber 2. At this time, the electron beam exit 31 is disposed to face a position close to the main surface of the disk substrate 5 on the turntable 6.

  The electron beam source 25 emits an electron beam accelerated to, for example, several tens of KeV by a cathode (not shown) to which a high voltage supplied from a power source (not shown) is applied. The converging lens 26 converges the emitted electron beam and guides it to the aperture 28. The beam modulator 27 operates on the basis of the signal from the recording signal generator 32 and performs on / off control of the electron beam. That is, for example, when the beam is turned off, a voltage is applied between the electrodes of the beam modulator 27 to greatly deflect the passing electron beam. As a result, the electron beam is not converged in the aperture hole of the aperture 28 and is prevented from passing through the aperture 28. As a result, the beam can be turned off.

  In response to the control signal from the irradiation position adjustment circuit 33, the beam deflector 29 applies a voltage to the electrode to deflect the passing electron beam. Thereby, the position of the electron beam spot with respect to the disk substrate 5 is controlled. As described above, the irradiation position adjustment circuit 33 controls the voltage applied to the electrode of the beam deflector 29 based on the position error of the stage 8 input from the feed motor control circuit 20.

  FIG. 2 is a cross-sectional view schematically showing an internal configuration of the spindle housing 11 of the disc master manufacturing apparatus 1 shown in FIG. 1 in order to explain the overall configuration of the rotary drive device 3.

  The spindle housing 11 accommodates a spindle shaft 7 rotatably supported, a spindle motor 35 for rotating the spindle shaft 7, a rotary transformer 42, a rectifier circuit 43, and the like. The spindle shaft 7 is rotatably supported by the spindle housing 11 via a gas bearing 36. The gas bearing 36 is supplied with bearing air from the outside via a valve (not shown), and the air is ejected from the gas bearing 36 into the gap to rotatably support the spindle shaft 7. This air is exhausted from the spindle housing 11 to the outside of the vacuum chamber 2 via a pipe (not shown). Further, one end side (the upper side in FIG. 2) of the spindle shaft 7 passes through the opening 11a of the spindle housing 11, and the turntable 6 is fixed to the tip portion thereof. The radial gap between the opening 11a and the spindle shaft 7 is sealed by a vacuum seal 37, so that the airtightness inside the spindle housing 11 is maintained. A differential exhaust seal portion may be used instead of the vacuum seal portion.

  A magnetic member 35 </ b> A for rotationally driving the spindle shaft 7 is attached to a portion below the gas bearing 36 in the spindle shaft 7. The spindle motor 35 includes the magnetic member 35A and a coil 35B provided around the magnetic member 35A. The spindle motor 35 rotates the spindle shaft 7 using an electromagnetic force generated by passing a current through the coil 35B. As a result, the turntable 6 fixed to one end side of the spindle shaft 7 is rotated. The spindle motor 35 is driven and controlled by the spindle motor control circuit 21 (see FIG. 1).

  A rotary encoder 39 is provided below the spindle motor 35 in the spindle shaft 7. The rotary encoder 39 includes a light emitting unit and a light receiving unit (not shown), and the spindle shaft 7 is driven by a pulse of light (for example, infrared rays) passing through a slit (not shown) formed in a disk 39 a provided on the spindle shaft 7. The rotation angle of is detected. The rotation angle of the spindle shaft 7 detected by the rotary encoder 39 is output to a control device (not shown).

  On the other hand, a coaxial cable 38 for supplying a high voltage to the disk substrate 5 and the turntable 6 is provided in the spindle shaft 7. The coaxial cable 38 has an inner conductor (core wire) 38 A and an outer conductor 38 B, and is provided in a through hole 7 a formed at the center of the spindle shaft 7. One end side (upper side in FIG. 2) of the internal conductor 38A is connected to the electrostatic clamp electrode 50 provided in the turntable 6, and the other end side (lower side in FIG. 2) is connected to the rectifier circuit 43. Further, one end side of the external conductor 38 </ b> B is connected to the disk substrate 5 through the contact member 51, and the other end side is connected to the rectifier circuit 43. A supply voltage from the AC power supply 40 is supplied to the coaxial cable 38 via a terminal 41 provided on the spindle housing 11, a rotary transformer 42, and a rectifier circuit 43.

  The rotary transformer 42 has a rotating portion 42A that is fixed to the tip of the other end side (the lower side in FIG. 2) of the spindle shaft 7 and rotates together with the shaft, and a fixing portion 42B that is fixed to the spindle housing 11 side. The rotating portion 42A and the fixed portion 42B are provided so as to face each other in a non-contact manner. A through hole 42a is provided at a substantially central portion of the rotary transformer 42 so as to be substantially along the shaft axial direction. The through hole 42a is provided so as to protrude from the tip of the other end side of the spindle shaft 7. The earth shaft 7A is inserted. On the other hand, the rectifying circuit 43 is provided on the other end side of the spindle shaft 7, is connected to the rotating portion 42 </ b> A of the rotary transformer 42, and is supplied from the AC power supply 40 via the terminal 41 and the rotary transformer 42. Converts voltage to DC voltage.

  Note that an electromagnetic shield member 44 is provided in a portion where an alternating current flows in the spindle housing 11, that is, around the rotary transformer 42 and the rectifier circuit 43. Thereby, the magnetic field generated from the rotary transformer 42 and the rectifier circuit 43 through which an alternating current flows is attenuated, the magnetic field affects the trajectory of the electron beam irradiated from the electron column 4 to the disk substrate 5, and the recording accuracy is deteriorated. Can be prevented.

  The tip of the earth shaft 7a is in contact with a contact member 52 provided on the spindle housing 11 side, and slides at the contact portion when the spindle shaft 7 rotates. The sliding portion 54 is positioned on the substantially axial line X of the spindle shaft 7. The contact member 52 is grounded via a terminal 53, whereby the potential of the spindle shaft 7 is grounded. As described above, a voltage is supplied between the disk substrate 5 and the electrostatic clamp electrode 50 from the AC power source 40 via the rectifier circuit 43 and the coaxial cable 38, but the external conductor 38B and the spindle shaft 7 are electrically connected. Therefore, the output on the side of the external conductor 38B of the rectifier circuit 43 is connected to the disk substrate 5 and grounded.

  Next, the electrostatic clamping mechanism of the disk substrate 5 will be described with reference to FIG. FIG. 3 is a circuit diagram in which a portion related to the electrostatic clamping function is extracted from the electric circuit of the disc master manufacturing apparatus 1.

  As shown in this figure, the AC power supply 40 is connected to a primary coil 55 provided in the fixed portion 42 </ b> B of the rotary transformer 42. On the other hand, the secondary coil 56 provided in the rotary part 42 </ b> A of the rotary transformer 42 is connected to the rectifier circuit 43. With such a configuration, when the switch 57 of the AC power supply 40 is turned ON, the secondary coil 56 is excited by the primary current flowing through the primary coil 55, and an induced current is generated by the electromagnetic induction. This induced current is rectified by the rectifier circuit 43, and a DC voltage generated thereby is applied between the electrostatic clamp electrode 50 and the disk substrate 5. As a result, an electrostatic force is generated between the electrostatic clamp electrode 50 and the disk substrate 5, and the disk substrate 5 is attracted to the turntable 6 by this electrostatic force and can be clamped. When the switch 57 of the AC power supply 40 is turned off, the electric charge charged between the electrostatic clamp electrode 50 and the disk substrate 5 flows as a current through the parallel resistor 58 of the rectifier circuit 43. The electrostatic clamp electrode 50 and the disk substrate 5 are at the same potential so that the attractive force disappears. In FIG. 3, a typical circuit is shown as an example of the rectifier circuit 43. However, the rectifier circuit 43 is not limited to this, and another type of rectifier circuit may be used.

  As described above, the rotation drive device 3 according to the present embodiment rotates together with the housing 11 (spindle housing in this example) 11 that rotatably supports the rotation shaft (spindle shaft in this example) 7 and the rotation shaft 7. An insulating turntable 6 on which a substrate (disk substrate in this example) 5 is placed, a clamp electrode (electrostatic clamp electrode in this example) 50 provided in the turntable 6, and a rotating shaft And a rotary transformer 42 for supplying a clamp voltage to the clamp electrode 50 while allowing relative rotation between the clamp electrode 50 and the housing 11 in accordance with the rotation of 7.

  In the rotary drive device 3 of the present embodiment, the substrate 5 placed on the turntable 6 is gripped (clamped) by the electrostatic force of the clamp electrode 50 provided in the turntable 6. Then, a clamp voltage is supplied via the rotary transformer 42 from the casing 11, that is, the fixed side, to the clamp electrode 50 on the rotating body that rotates together with the rotating shaft 7. Thus, by supplying power by the transformer mechanism via electromagnetic induction, it is possible to supply electric power in a non-contact manner while allowing relative rotation between the clamp electrode 50 and the housing 11. As a result, it is possible to improve durability without causing wear as in the case of supplying power while allowing relative rotation between the clamp electrode 50 and the housing 11 at the contact portion.

  An electron beam irradiation apparatus (disc original disk manufacturing apparatus in this example) 1 according to this embodiment is an electron beam irradiation apparatus 1 that irradiates a substrate 5 with an electron beam, and an electron beam emission means (in this example) that emits an electron beam. An electron column) 4, a decompression chamber 2 (in this example, a vacuum chamber) 2 for introducing an electron beam from the electron beam emitting means 4, a housing 11 that rotatably supports the rotating shaft 7, and the rotating shaft 7 And an insulating turntable 6 on which the substrate 5 is placed, a clamp electrode 50 provided in the turntable 6, a clamp electrode 50 and a housing accompanying the rotation of the rotary shaft 7. A rotary transformer 42 for supplying a clamp voltage to the clamp electrode 50 while allowing relative rotation with the body 11 and a motor for rotating the rotary shaft 7 (in this example) A rotation driving means (in this example, a rotation driving device) 3 including a pindle motor) 35 and a moving means (in this example, a stage) 8 for moving the rotation driving means 3 relative to the electron beam emitting means 4. Features.

  In the electron beam irradiation apparatus 1 of the present embodiment, the electron beam emitted from the electron beam emitting means 4 is introduced into the decompression chamber 2 and is incident on the substrate 5 placed on the turntable 6 of the rotation driving means 3. The At this time, the rotation driving means 3 is moved relative to the electron beam emitting means 4 by the moving means 8, and the turntable 6 is rotated by driving the rotating shaft 7 by the motor 35 in the rotation driving means 3. A predetermined drawing is performed on the substrate 5.

  At this time, the substrate 5 is gripped (clamped) by being placed on the turntable 6 by the electrostatic force of the clamp electrode 50 provided in the turntable 6, but the rotating body side clamp that rotates together with the rotating shaft 7 is clamped. A clamp voltage is supplied to the electrode 50 from the casing 11, that is, the fixed side, via the rotary transformer 42. Thus, by supplying power by the transformer mechanism via electromagnetic induction, it is possible to supply electric power in a non-contact manner while allowing relative rotation between the clamp electrode 50 and the housing 11. As a result, it is possible to improve durability without causing wear as in the case of supplying power while allowing relative rotation between the clamp electrode 50 and the housing 11 at the contact portion.

  In the rotary drive device 3 in the above-described embodiment, the rotary transformer 42 includes a primary side fixing part (in this example, a fixing part) 42B provided on the housing 11 side and supplied with an AC power supply voltage, and a primary side fixing part. 42A is provided on the rotating shaft 7 side so as to be opposed to and non-contact with 42B, and is provided with a secondary rotating portion (rotating portion in this example) 42A that is excited by electromagnetic induction from the primary fixing portion 42B. It is characterized by.

  Based on the AC power supply voltage supplied to the primary side fixing portion 42B on the housing 11 side, the secondary side rotating portion 42A disposed on the rotating shaft 7 side opposite to the AC power supply voltage is contactlessly caused by electromagnetic induction. By inducing electric power, electric power can be supplied to the clamp electrode 50 in a non-contact manner while allowing relative rotation between the clamp electrode 50 and the housing 11.

  In the electron beam irradiation apparatus 1 according to the above-described embodiment, the rotary transformer 42 provided in the rotation driving unit 3 includes a primary side fixing portion 42B provided on the housing 11 side and supplied with an AC power supply voltage, and a primary side. It is provided on the rotating shaft 7 side so as to face the fixed portion 42B in a non-contact manner, and includes a secondary side rotating portion 42A that is excited by electromagnetic induction from the primary side fixed portion 42B.

  Based on the AC power supply voltage supplied to the primary side fixing portion 42B on the housing 11 side, the secondary side rotating portion 42A disposed on the rotating shaft 7 side opposite to the AC power supply voltage is contactlessly caused by electromagnetic induction. By inducing electric power, electric power can be supplied to the clamp electrode 50 in a non-contact manner while allowing relative rotation between the clamp electrode 50 and the housing 11.

  In the rotary drive device 3 in the above embodiment, a rectifying means (in this example) is provided to rotate together with the rotary shaft 7 and rectifies the AC voltage excited by the secondary side rotating portion 42A and supplies a clamp voltage. A rectifier circuit) 43.

  As a result, the AC voltage induced in the secondary side rotating unit 42A can be rectified and converted to DC based on the AC power supply voltage of the primary side fixing unit 42B, and supplied to the clamp electrode as a clamp voltage.

  In the electron beam irradiation apparatus 1 in the above-described embodiment, the rotation driving unit 3 is provided so as to rotate together with the rotating shaft 7, and rectifies the AC voltage excited by the secondary side rotation unit 42A and supplies a clamp voltage. The rectifying means 43 is provided.

  As a result, the AC voltage induced in the secondary side rotation unit 42A can be rectified and converted into a DC based on the AC power supply voltage of the primary side fixing unit 42B, and supplied to the clamp electrode 50 as a clamp voltage.

  In the rotary drive device 3 in the above embodiment, the sliding portion 54 for grounding the potential of the rotary shaft 7 while allowing the relative rotation between the rotary shaft 7 and the housing 11 is provided as a substantially axial center line of the rotary shaft 7. It is provided on X.

  By allowing the rotary shaft 7 to be grounded while allowing the relative rotation between the rotary shaft 7 and the housing 11 via the sliding portion 54, incident electrons are applied to the substrate 5 when used in, for example, an electron beam irradiation apparatus. Charging can be prevented. Further, the ground resistance can be reduced as compared with the case of conducting conductive connection using a conductive fluid.

  In the electron beam irradiation apparatus 1 in the above embodiment, the rotation driving means 3 rotates the sliding portion 54 for grounding the potential of the rotating shaft 7 while allowing the relative rotation between the rotating shaft 7 and the housing 11. It has it on the substantially axial center line X of the axis | shaft 7, It is characterized by the above-mentioned.

  Electrons incident from the electron beam emitting means 4 are charged on the substrate 5 by allowing the rotation shaft 7 to be grounded while allowing the rotation of the rotation shaft 7 and the housing 11 through the sliding portion 54. Can be prevented. Further, the ground resistance can be reduced as compared with the case of conducting conductive connection using a conductive fluid.

  In the electron beam irradiation apparatus 1 according to the above-described embodiment, the rotation driving unit 3 includes an electromagnetic shielding unit (in this example, an electromagnetic shielding member) 44 that attenuates a magnetic field generated from at least one of the rotary transformer 42 and the rectifying unit 43. It is characterized by.

  As a result, the magnetic field generated from the rotary transformer 42 and the rectifying unit 43 through which an alternating current flows is attenuated, and the magnetic field affects the trajectory of the electron beam irradiated from the electron beam emitting unit 4 to the substrate 5 to deteriorate the recording accuracy. Etc. can be prevented.

  In addition, this embodiment is not restricted above, A various deformation | transformation is possible. Hereinafter, such modifications will be described in order.

(1) In the case where the earth shaft and the casing are made conductive with the conductive magnetic fluid In the above embodiment, the potential of the spindle shaft 7 is grounded by sliding the earth shaft 7A and the contact member 52. The structure is not limited to this, and the earth shaft 7A and the spindle housing 11 may be electrically connected by a conductive magnetic fluid.

  FIG. 4 is a cross-sectional view schematically showing an internal configuration of the spindle housing 11 in this modification, and corresponds to FIG. 2 described above. Components similar to those in FIG. 2 are denoted by the same reference numerals and description thereof is omitted.

  As shown in this figure, the earth shaft 7 A protruding from the other end of the spindle shaft 7 is connected to a connecting member 60 provided on the spindle housing 11 via a conductive magnetic fluid 61. As a result, the potential of the spindle shaft 7 is grounded via the earth shaft 7A, the conductive magnetic fluid 61, the connecting member 60, and the spindle housing 11.

  In the rotation drive device 3 in this modification, a conductive fluid connection portion (conductive magnetic fluid in this example) for grounding the potential of the rotary shaft 7 while allowing relative rotation between the rotary shaft 7 and the housing 11. 61 is provided.

  By setting the rotating shaft 7 to the ground potential while allowing the relative rotation between the rotating shaft 7 and the housing 11 through the conductive fluid connecting portion 61, for example, when used in an electron beam irradiation apparatus, incident electrons are transferred to the substrate. 5 can be prevented from being charged. Further, the contact resistance is small and wear can be suppressed as compared with the case where the conductive connection is made via the sliding portion.

  In the electron beam irradiation apparatus 1 according to this modification, the rotation driving means 3 includes a conductive fluid connection 61 for grounding the potential of the rotation shaft 7 while allowing the rotation of the rotation shaft 7 and the housing 11. It is characterized by having.

  Electrons incident from the electron beam emitting means 4 are charged on the substrate 5 by setting the rotating shaft 7 to the ground potential while allowing the relative rotation between the rotating shaft 7 and the housing 11 via the conductive fluid connecting portion 61. Can be prevented. Further, the contact resistance is small and wear can be suppressed as compared with the case where the conductive connection is made via the sliding portion.

(2) When a conductive magnetic fluid is used instead of the vacuum seal portion In the above embodiment, the radial gap between the opening 11a of the spindle housing 11 and the spindle shaft 7 is sealed by the vacuum seal portion 37. However, the present invention is not limited to this, and the spindle shaft and the spindle housing 11 may be electrically connected while performing sealing using a conductive magnetic fluid instead of the vacuum seal portion.

  FIG. 5 is a cross-sectional view schematically showing an internal configuration of the spindle housing 11 in this modification, and corresponds to FIG. 2 described above. Components similar to those in FIG. 2 are denoted by the same reference numerals and description thereof is omitted.

  As shown in this figure, in this modification, a conductive magnetic fluid 62 is provided in the radial gap between the opening 11 a of the spindle housing 11 and the spindle shaft 7. As a result, the gap between the opening 11a and the spindle shaft 7 can be sealed by the conductive magnetic fluid 62, and the airtightness inside the spindle housing 11 can be maintained. Further, the potential of the spindle shaft 7 is grounded via the spindle housing 11 via the conductive magnetic fluid 62.

  In the rotation drive device 3 in this modification, a conductive fluid connection portion (conductive magnetic fluid in this example) for grounding the potential of the rotary shaft 7 while allowing relative rotation between the rotary shaft 7 and the housing 11. 62 is provided.

  By setting the rotating shaft 7 to the ground potential while allowing the relative rotation between the rotating shaft 7 and the housing 11 through the conductive fluid connecting portion 62, for example, when used in an electron beam irradiation apparatus, incident electrons are transferred to the substrate. 5 can be prevented from being charged. Further, the contact resistance is small and wear can be suppressed as compared with the case where the conductive connection is made via the sliding portion.

  In the electron beam irradiation apparatus 1 according to this modification, the rotation driving unit 3 includes the conductive fluid connection portion 62 for grounding the potential of the rotating shaft 7 while allowing the relative rotation between the rotating shaft 7 and the housing 11. It is characterized by having.

  Electrons incident from the electron beam emitting means 4 are charged on the substrate 5 by setting the rotating shaft 7 to the ground potential while allowing the relative rotation between the rotating shaft 7 and the housing 11 via the conductive fluid connecting portion 62. Can be prevented. Further, the contact resistance is small and wear can be suppressed as compared with the case where the conductive connection is made via the sliding portion.

  The rotational drive device 3 in the above embodiment includes a spindle housing 11 that rotatably supports the spindle shaft 7, an insulating turntable 6 that is provided so as to rotate together with the spindle shaft 7, and on which the disk substrate 5 is placed, A clamp voltage is supplied to the electrostatic clamp electrode 50 while allowing relative rotation between the electrostatic clamp electrode 50 provided in the turntable 6 and the electrostatic clamp electrode 50 and the spindle housing 11 accompanying the rotation of the spindle shaft 7. A rotary transformer 42.

  In the rotary drive device 3 of the present embodiment, the disk substrate 5 placed on the turntable 6 is gripped (clamped) by the electrostatic force of the electrostatic clamp electrode 50 provided in the turntable 6. Then, a clamp voltage is supplied from the spindle housing 11, that is, the fixed side, to the electrostatic clamp electrode 50 on the rotating body rotating together with the spindle shaft 7 through the rotary transformer 42. In this way, power can be supplied in a non-contact manner while allowing relative rotation between the electrostatic clamp electrode 50 and the spindle housing 11 by supplying power with a transformer mechanism via electromagnetic induction. As a result, it is possible to improve durability without causing wear as in the case of supplying power while allowing relative rotation between the electrostatic clamp electrode 50 and the spindle housing 11 at the contact portion.

  The disk master manufacturing apparatus 1 in the above embodiment is a disk master manufacturing apparatus 1 that irradiates a disk substrate 5 with an electron beam, and an electron column 4 that emits an electron beam and an electron beam from the electron column 4. A vacuum chamber 2 introduced into the interior, a spindle housing 11 that rotatably supports the spindle shaft 7, and an insulating turn that is provided in the vacuum chamber 2 so as to rotate together with the spindle shaft 7 and on which the disk substrate 5 is placed. A clamp voltage is applied to the electrostatic clamp electrode 50 while allowing relative rotation between the table 6, the electrostatic clamp electrode 50 provided in the turntable 6, and the electrostatic clamp electrode 50 and the spindle housing 11 as the spindle shaft 7 rotates. The rotary transformer 42 for supplying power and the spindle shaft 7 With a rotary drive unit 3 including a spindle motor 35 for rotating, and a stage 8 for the rotary driving device 3 is moved relative electron column 4.

  In the disc master manufacturing apparatus 1 of the present embodiment, an electron beam emitted from the electron column 4 is introduced into the vacuum chamber 2 and is incident on the disc substrate 5 placed on the turntable 6 of the rotary drive device 3. . At this time, the rotary drive device 3 is moved relative to the electron column 4 by the stage 8, and the spindle shaft 7 is driven by the spindle motor 35 in the rotary drive device 3 to rotate the turntable 6, so that the disk substrate 5 is rotated. Predetermined drawing is performed.

  At this time, the disk substrate 5 is gripped (clamped) by being placed on the turntable 6 by the electrostatic force of the electrostatic clamp electrode 50 provided in the turntable 6, but rotates together with the spindle shaft 7. A clamp voltage is supplied to the body-side electrostatic clamp electrode 50 from the spindle housing 11, that is, the fixed side, via the rotary transformer 42. In this way, power can be supplied in a non-contact manner while allowing relative rotation between the electrostatic clamp electrode 50 and the spindle housing 11 by supplying power with a transformer mechanism via electromagnetic induction. As a result, it is possible to improve durability without causing wear as in the case of supplying power while allowing relative rotation between the electrostatic clamp electrode 50 and the spindle housing 11 at the contact portion.

1 is a block diagram showing an overall configuration of a disc master manufacturing apparatus according to an embodiment of the present invention. It is sectional drawing which shows typically the structure inside the spindle housing shown in FIG. It is the circuit diagram which extracted the part in connection with an electrostatic clamp function among the electric circuits of the disc original disc manufacturing apparatus. It is sectional drawing which shows typically the structure inside the spindle housing in the modification which conducts an earth shaft and a housing | casing with a conductive magnetic fluid. It is sectional drawing which shows typically the structure inside the spindle housing in the modification which uses an electroconductive magnetic fluid instead of a vacuum seal part.

Explanation of symbols

1 Disc master production equipment (electron beam irradiation equipment)
2 Vacuum chamber (decompression chamber)
3 Rotation drive device (Rotation drive means)
4 Electron column (electron beam injection means)
5 Disc substrate (substrate)
6 Turntable 7 Spindle shaft (Rotating shaft)
8 Stage (moving means)
11 Spindle housing (housing)
35 Spindle motor (motor)
42 Rotary transformer 42A Rotating part (secondary rotating part)
42B fixed part (primary side fixed part)
43 Rectifier circuit (rectifier means)
50 Electrostatic clamp electrode (clamp electrode)
61 Conductive magnetic fluid (conductive fluid connection)
62 Conductive magnetic fluid (conductive fluid connection)

Claims (11)

A housing that rotatably supports the rotating shaft;
An insulating turntable that is provided so as to rotate together with the rotating shaft, and on which the substrate is placed;
A clamp electrode provided in the turntable;
A rotary drive device comprising: a rotary transformer for supplying a clamp voltage to the clamp electrode while allowing relative rotation between the clamp electrode and the casing accompanying the rotation of the rotary shaft. The rotary drive device according to claim 1, wherein
The rotary transformer is
A primary side fixing portion provided on the housing side and supplied with an AC power supply voltage;
And a secondary side rotating part that is provided on the rotating shaft side so as to face the primary side fixing part in a non-contact manner and is excited by electromagnetic induction from the primary side fixing part. Rotation drive device. The rotary drive device according to claim 2, wherein
A rotary drive device, comprising: a rectifying unit that is provided so as to rotate together with the rotating shaft and that rectifies an AC voltage excited by the secondary side rotating unit and supplies the clamp voltage. In the rotation drive device according to any one of claims 1 to 3,
A rotary drive device, wherein a sliding portion for grounding the potential of the rotary shaft while allowing relative rotation between the rotary shaft and the housing is provided on a substantially axial line of the rotary shaft. In the rotation drive device according to any one of claims 1 to 3,
A rotary drive device comprising a conductive fluid connection portion for grounding the potential of the rotary shaft while allowing relative rotation between the rotary shaft and the casing. An electron beam irradiation apparatus for irradiating a substrate with an electron beam,
Electron beam emitting means for emitting the electron beam;
A decompression chamber for introducing the electron beam from the electron beam emitting means into the interior;
A housing that rotatably supports a rotating shaft, an insulating turntable that is provided in the decompression chamber so as to rotate together with the rotating shaft, and on which a substrate is placed, a clamp electrode provided in the turntable, and the rotating shaft A rotary transformer for supplying a clamp voltage to the clamp electrode while allowing a relative rotation between the clamp electrode and the housing in accordance with the rotation of the clamp electrode, and a rotation drive means including a motor for rotating the rotation shaft;
An electron beam irradiation apparatus comprising: a moving means for moving the rotation driving means relative to the electron beam emitting means. The electron beam irradiation apparatus according to claim 6.
The rotary transformer provided in the rotation driving means is
A primary side fixing portion provided on the housing side and supplied with an AC power supply voltage;
And a secondary side rotating part that is provided on the rotating shaft side so as to face the primary side fixing part in a non-contact manner and is excited by electromagnetic induction from the primary side fixing part. Electron beam irradiation device. The electron beam irradiation apparatus according to claim 7.
The rotation driving means includes
An electron beam irradiation apparatus, comprising: a rectifying unit which is provided so as to rotate together with the rotating shaft and which rectifies an alternating voltage excited by the secondary rotating unit and supplies the clamp voltage. The electron beam irradiation apparatus according to any one of claims 6 to 8,
The rotation driving means includes
An electron beam irradiation apparatus, comprising: a sliding portion for grounding the potential of the rotating shaft while allowing relative rotation between the rotating shaft and the housing on a substantially axial line of the rotating shaft. The electron beam irradiation apparatus according to any one of claims 6 to 8,
The rotation driving means includes
An electron beam irradiation apparatus comprising: a conductive fluid connecting portion for grounding the potential of the rotating shaft while allowing relative rotation between the rotating shaft and the casing. The electron beam irradiation apparatus according to any one of claims 6 to 10,
The rotation driving means includes
An electron beam irradiation apparatus comprising electromagnetic shielding means for attenuating a magnetic field generated from at least one of the rotary transformer and the rectifying means.

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