JP2009133410A - Reciprocating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reciprocating device and its driving means capable of coping with this high speed reciprocating motion, a stably driving source and its control means, and a vibration damping means for restraining high speed violent vibration, by providing the reciprocating device and its driving means capable of reciprocating at a high speed exceeding several hundred times per minute. <P>SOLUTION: This purpose is attained by the reciprocating device having a guide way, a moving base reciprocating by being supported by this guide way and having a driving groove formed on an under surface orthogonally to the guide way, two rotary arms having respectively driving pins fitted in this driving groove, and the driving source for synchronously mutually rotating these two rotary arms in the inverse direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a reciprocating device, and more particularly, to a pair of guide ways and a reciprocating device in which a moving table reciprocates supported by the guide ways.

  Such a reciprocating device is used in various mechanical devices. For example, in a machine tool, as shown in Patent Document 1 and Patent Document 2, a tool table or the like is moved or a workpiece is moved. It is used to let However, these reciprocating tables are usually moved relatively slowly at a constant speed, and rarely reciprocate at a high speed exceeding several hundred times per minute.

  Such a reciprocating device that reciprocates at a high speed has a feed rate that is significantly insufficient in a feed device using a feed screw as shown in Patent Document 1 or Patent Document 2. For this reason, it has been required to develop a reciprocating device that can cope with a faster reciprocating motion.

  For this purpose, it is necessary to develop a reciprocating device and its driving means that can cope with high-speed reciprocating movement, a driving source that stably drives this driving means and its control means, and a high-speed reciprocating movement. We must also develop a vibration control method that suppresses vibration.

JP 2003-94277 A Japanese Utility Model Publication No. 5-63754

  SUMMARY OF THE INVENTION An object of the present invention is to solve all the problems of the prior art as described above and to provide a reciprocating device capable of reciprocating at a high speed exceeding several hundred times per minute and its driving means. A reciprocating device capable of coping with this high-speed reciprocating movement and its driving means, a driving source for stably driving this driving means and its control means, and a damping means for suppressing intense vibrations caused by high-speed reciprocating movement Is to provide.

  In order to solve the above-described problems, the present invention provides a guide way, a movable table that is supported by the guide way and reciprocates, and has a drive groove formed on the lower surface perpendicular to the guide way, and the drive groove. A reciprocating device characterized in that it has two rotating arms each having a driving pin fitted into the shaft, and a driving source that rotates the two rotating arms in opposite directions in synchronization with each other. is there.

  Here, it is desirable that the guide way is composed of two guide bars parallel to each other and a slide bearing for fitting and supporting the guide bar, and the slide bearing is a hydrostatic bearing. It is desirable.

  The drive groove preferably has no gap with the drive pin at both ends in the movement range of the drive pin and a slight gap with the drive pin at the center. It is desirable that the pin is configured so that the drive pin itself can rotate.

  Further, the two rotary arms are driven to rotate in opposite directions by a single drive source, and the position of the drive pin passes through the center of the two rotary arms and to the guideway. It is desirable that they are arranged so that they are symmetrical with respect to each other about a parallel line, or the two rotating arms are reversed from each other by two servo motors that are driven independently. The servo is driven such that the position of the drive pin is symmetrical with respect to each other about a line passing through the center of the two rotary arms and parallel to the guideway. It is desirable to have control means for controlling the motor.

  Preferably, one of the two servo motors is a master motor and the other is a slave motor, and the control means has a correction means for matching the rotation angle of the slave motor with the rotation angle of the master motor. Alternatively, it is preferable that one of the two servo motors is a master motor and the other is a slave motor, and the control means includes a correction means for matching the output torque of the slave motor with the output torque of the master motor.

  The moving table is supported by a first guide way disposed on the intermediate table, and further, the intermediate table is moved by the second guide way having substantially the same structure that moves in the same direction as the moving table. It is desirable to be supported by a base, and it is desirable that the intermediate base has a damping means for eliminating vibrations generated by the reciprocating movement of the mobile base. Preferably, the damping means is a damper and a damping spring arranged between the intermediate base and the base, or the damping means moves in an opposite phase to the intermediate base. A weight is desirable. The counterweight is preferably connected to each other by a pinion provided on the base and a rack provided on each of the intermediate base and the counterweight.

  Further, it is desirable that at least one of the two parallel guide bars constituting the guide way is a hollow pipe, and the inside of the hollow pipe is a route for wiring or piping.

  Since the present invention is configured as described above, it is possible to provide driving means for a reciprocating device capable of reciprocating at a high speed exceeding several hundred times per minute, and cope with this high-speed reciprocating movement. It is possible to provide a drive unit for a reciprocating device that can be driven, a drive source that stably drives the drive unit, a control unit for the drive source, and a damping unit that suppresses severe vibration due to high-speed reciprocation.

  Hereinafter, the present invention will be described with reference to the drawings illustrating the best embodiment. FIG. 1 is a perspective view showing an example of a reciprocating device of the present invention, FIG. 2 is an exploded perspective view of the embodiment of FIG. 1, and FIG. 3 is provided in a driving groove and a rotating arm of the moving table. FIG. 4 is a sectional view taken along the line AA of FIG. 3 showing a driving source of the rotary arm, and FIG. 5 is an explanatory diagram exaggeratingly showing a gap between the driving groove and the driving pin. FIG. 6 is a perspective view showing another embodiment of the drive source as seen from the lower side, and FIG. 7 is a perspective view showing a rack device arranged between the intermediate base and the base.

  The reciprocating device 1 of the present invention fixes a moving object (not shown) such as a tool or a workpiece to a carriage 2 and moves the carriage 2 at a high speed along a guideway. In order to implement this, the guideway in this example showing an embodiment of the reciprocating device 1 of the present invention is a base of a moving table 2 on which a tool, a workpiece or the like is mounted as shown in FIGS. An intermediate base 3 having a U-shape with an open top composed of side walls 3a and connecting portions 3b on both sides, and slide bearings 4 provided on the side walls 3a on both sides of the intermediate base 3, Two parallel guide bars 5 fixed to the movable table 2 and supported by being fitted to and supported by the slide bearing 4, and two parallel guides fixed to the movable table 2. A bar 5 is inserted and fitted into a slide bearing 4 provided in the intermediate base 3 to form a guide way, and the guide base is used to reciprocate the movable base 2 with respect to the intermediate base 3. It is configured.

  However, the structure of the guide way is not limited to this, and any guide way such as a commonly used slide mechanism can be used. However, since the movable table 2 moves at a high speed, it is necessary to reduce the weight in order to suppress vibration and reduce the driving force, and it is necessary to move the posture of the movable table 2 stably. For this reason, in this embodiment, the guide way is fixed to the movable base 2 with two guide bars 5 parallel to each other, and the slide bearings 4 are arranged on the side walls 3a on both sides of the intermediate base 3, and this slide bearing 4, the guide bar 5 is fitted and supported, thereby increasing the interval between the slide bearings 4 and minimizing the change in the posture of the movable table 2.

  Although this embodiment is configured in this way, on the other hand, as will be described later, it is desirable that the guide bar 5 does not move with the movable table 2 when wiring or piping is passed through the guide bar 5. It is also possible to select that the two guide bars 5 are fixed to the intermediate base 3 and the slide base 4 is provided on the movable base 2 so that the guide bar 5 does not move.

  The slide bearing 4 may be a sliding bearing using a bearing bush or an arbitrary rolling bearing using a ball bush. However, in this embodiment, a hydrostatic bearing having a low frictional resistance and having a damping effect is adopted. . By comprising in this way, the effect of making the rigidity of a guideway high and reducing the change of the attitude | position of the mobile stand 2 by a vibration etc. can be acquired.

  As shown in FIG. 3, a drive groove 6 is formed on the lower surface of the movable table 2 so as to be orthogonal to the guideway. From below, a drive pin 8 provided on the rotary arm 7 is formed in the drive groove 6. It is inserted. In the illustrated embodiment, the two rotary arms 7 provided on the drive pin 8 have a disk shape in order to prevent the occurrence of vibration as much as possible. However, since only the drive pin 8 needs to be rotated, a lever shape is required. There is no problem even if it is an arm.

  As shown in FIG. 3, the drive pin 8 is disposed so as to be symmetrical with respect to the line B passing through the center of the two rotating arms and parallel to the guideway. For example, as shown in FIG. 4, the two rotary arms 7 are rotated by a gear 9 via a rotary shaft 11. These are configured to mesh with each other, and are driven to rotate in opposite directions by a motor 10 which is a single drive source.

  The drive mechanism of the rotating arm 7 will be described in more detail. The rotating shaft 11 of the rotating arm 7 is rotatably supported by a ball bearing 13 on a frame 12 fixed to the connecting portion 3b of the intermediate base 3. The gears 9 fixed to the two rotating shafts 11 supported by the ball bearings 13 are engaged with each other, and the gear 9 is driven by the gear 14 fixed to the motor 10.

  At this time, the positions of the drive pins 8 provided on both rotary arms 7 are symmetrical with respect to each other about a line B passing through the center of the two rotary arms and parallel to the guideway, as shown in FIG. If the gears 9 having the same number of teeth are engaged with each other and assembled, it is not necessary to consider the change in the position of the drive pin 8 and the drive pin 8 is connected to the line B. On the other hand, it can be driven so as to reversely rotate synchronously while always maintaining a line-symmetric position.

  Therefore, the reciprocating device 1 in this embodiment includes a guide way, a movable table 2 that is supported by the guide way and reciprocates, and has a drive groove 6 formed on the lower surface perpendicular to the guide way, and this drive. Two rotary arms 7 each having a drive pin 8 fitted in the groove 6 and a motor 10 as a drive source for rotating the two rotary arms 7 in opposite directions in synchronization with each other are provided.

  The guide way is composed of two guide bars 5 parallel to each other and a slide bearing 4 that fits and supports the guide bars 5. In this embodiment, the static pressure is used as the slide bearing 4. A bearing is used. As is well known, a hydrostatic bearing injects high-pressure lubricating oil into an oil pocket and supports the shaft with the pressure of this lubricating oil. The frictional resistance is smaller than the load that can be supported, and there is a damping effect. Therefore, it is known to be suitable for supporting a vibrating object.

  As shown in FIG. 5, the groove width w of the drive groove 6 of the moving base 2 and the outer diameter d of the drive pin 8 penetrating into the drive groove 6 should be set to d = w so as not to cause vibration. It is desirable to have a slight dip. However, when d = w or simmering, the both sides of the drive groove 6 of the moving table 2 are always in contact with the outer diameter of the drive pin 8, so that the drive pin 8 itself can rotate. Whether it is a pin-like one that does not rotate, it inevitably slips and wears.

  Once wear has occurred, if the drive pin 8 itself can rotate, the worn surface will be most stable when it hits the side surface of the drive groove 6 of the movable table 2, so the drive pin 8 always wears. Thus, only the same worn surface comes into contact with the side surface of the driving groove 6 of the movable table 2 and only the surface is further worn. On the other hand, when the drive pin 8 itself is a pin-like thing that does not rotate, wear occurs because a slip always occurs between the drive groove 6 and the drive pin 8. For this reason, in any case, wear occurs between the drive groove 6 and the drive pin 8, and a gap is generated between the drive groove 6 and the drive pin 8, and this gap causes vibration.

  In order to prevent this, in this embodiment, as shown exaggeratedly in FIG. 5, outside of the drive pin 8 at both ends in the moving range in which the drive pin 8 moves in the drive groove 6 by the rotation of the rotary arm 7. There is no gap between the diameter d and the width w of the drive groove 6, and a slight gap s is provided between the outer diameter d of the drive pin 8 and the width w ′ of the drive groove 6 at the center. Actually, this gap is very small and is preferably about 0.01 to 0.5 mm. The gap s may be provided only on one side as indicated by a solid line in FIG. 5, or may be provided on both sides as indicated by an imaginary line.

  In order to facilitate the process of providing the slight gap s, a spacer 6a is provided at least on the side surface of the drive groove 6 on the side where the gap s is provided, and the spacer 6a is provided with the slight gap s. Can be pasted. 3 and 4, the drive pin 8 is depicted as if it is a pin-shaped member that does not rotate. In this embodiment, the drive pin 8 has a central portion (a portion with a gap) in the movement range of the drive groove 6. ), The drive pin 8 itself is configured to be rotatable as shown in FIGS. 1 and 2 so that frictional resistance does not occur when the drive pin 8 moves along the drive groove 6. Yes.

  The moving table 2 has a moving speed of moving in the moving direction (vertical direction) of the moving table 2 along the guideway when the drive pin 8 is at the position shown in FIG. When the driving pin 8 is rotated 90 degrees and positioned at the upper end or the lower end, the moving speed becomes zero, and the moving direction is reversed at this position. That is, the moving speed of the moving table 2 is a sine curve whose origin is when the drive pin 8 is located at the upper end or the lower end, and the acceleration is a cosine curve obtained by differentiating this.

  This means that the force (acceleration) applied to the movable table 2 is zero when the drive pin 8 is at the position (left and right end positions) depicted in FIG. Or, when the position is at the lower end, that is, when the drive pin 8 is located at the center of the movement range of the drive groove 6, the maximum value is shown. Accordingly, the drive pin 8 is positioned at the center of the movement range of the drive groove 6 when the maximum acceleration is applied to the moving base 2, and the drive groove 6 and the drive pin 8 are pressed with the maximum force. Shows when it comes to.

  For this reason, even if there is a gap of s at the maximum between the drive groove 6 and the drive pin 8, the drive pin 8 is pressed against the side surface of the drive groove 6 with the maximum force. 8 does not leave and vibration does not occur. On the other hand, there is no gap between the drive groove 6 and the drive pin 8 at the position where the acceleration is zero (the positions of the left and right ends depicted in FIG. 3), and therefore no vibration is generated here.

  In order to prevent only a specific position of the drive pin 8 from being worn, this means that the relationship between the drive groove 6 and the drive pin 8 is determined at both ends in the rotation range of the drive pin 8 as shown in FIG. Then, there is no gap between the outer diameter d of the drive pin 8 and the width w of the drive groove 6, and a slight gap s between the outer diameter d of the drive pin 8 and the width w ′ of the drive groove 6 at the center. This indicates that this configuration does not cause vibration even if it is configured to be provided.

  In order to reduce the frictional resistance between the drive groove 6 and the drive pin 8 and prevent partial wear, in this embodiment, the drive pin 8 itself is rotatable. As this rotatable drive pin, it is desirable to use a commercially available cam follower, or to use a needle bearing as it is or with a highly wear-resistant outer cylinder fitted to the needle bearing. In particular, in this embodiment, in order to minimize the deformation of the outer cylinder caused by making the outer cylinder thin, a flange is formed on the outer cylinder fitted to the needle bearing, and the rigidity of the outer cylinder is formed by this flange. It is configured to cover the shortage.

  Thus, when adopting the rotatable drive pin 8, in the present embodiment, since the gap s is provided between the drive groove 6 and the drive pin 8, except for both ends of the drive groove 6, The drive pin 8 can rotate freely. As a result of this rotation, the position of the drive pin 8 that contacts at the portion where there is no gap between the both ends of the drive groove 6 does not become the same position, and it does not occur that only a specific position is worn.

  FIG. 6 shows another embodiment of the drive source of the rotary arm 7. In this embodiment, the two rotary arms 7 are provided on two servo motors 15 (also shown in FIG. 2) that drive each independently, and the servo motor 15 and the rotary shaft 11 of the rotary arm 7. And bevel gears 16 and 17 meshing with each other. It is desirable that the bevel gears 16 and 17 are spiral bevel gears so as to continuously mesh with each other.

  At this time, the two servo motors 15 need to rotate completely synchronously, and the position of the drive pin 8 of the rotary arm 7 is a line-symmetrical position with respect to the moving direction of the movable table 2 by the guide way. Must be controlled to be in For this reason, the details are controlled so as to rotate synchronously by a control means described later.

  As shown in FIGS. 1 and 2, the intermediate table 3 on which the moving table 2 is arranged is further guided by a guideway having substantially the same structure so that it can move in the same direction as the moving direction of the moving table 2. It is supported by the base 21. Specifically, a slide bearing 22 is provided on the base 21, and two guide bars 23 that are fixed to the intermediate base 3 and are parallel to each other are inserted into the slide bearing 22.

  Two combinations of the slide bearing 22 and the guide bar 23 are provided to constitute a guide way. However, this guideway is not limited to this structure, as is the case with the movable table 2 disposed on the intermediate table 3 described above.

  The intermediate platform 3 is provided with a vibration damping means for eliminating vibrations generated by the reciprocating movement of the movable platform 2. The vibration damping means in this embodiment includes a set of a vibration damping spring 25 shown in FIGS. 1 and 2 and a damper device 26 disposed between the intermediate base 3 and the base 21 shown in FIG. A counter weight 27 shown in FIG. 2 and a set of a rack device 28 arranged between the intermediate base 3 and the base 21 shown in FIG. 7 and meshing with each other are provided, and the movable base 2 reciprocates. Thus, the vibration generated in the intermediate table 3 can be efficiently eliminated so that the vibration is not transmitted to the base 21.

  Here, the damping spring 25 is a compression coil spring disposed between the intermediate base 3 and the stopper plate 29, and is between the sink hole 3 c of the intermediate base 3 and the guide pin 30 provided in the stopper plate 29. The two stopper plates 29 are held in a compressed state between them, and the two stopper plates 29 are connected to each other by a connecting pipe 31.

  Further, the damper device 26 is a normal oil damper, and is fixed to the lower side of the intermediate platform 3 toward both sides as shown in FIG. 2, and the tip corresponds to the base 21. It is provided in contact with two stoppers 32 (only one is shown in FIG. 2) provided at the position. Since the set of the damping spring 25 and the damper device 26 is configured as described above, a mechanical CR damper is configured to efficiently eliminate the vibration generated in the intermediate table 3.

  As shown in FIGS. 1 and 2, one counter weight 27 is arranged on each side of the base 21, and two counterweights 27 are set to have substantially the same mass as the intermediate base 3. It is connected to. The rack device 28 is a mechanism for moving the counterweight 27 in the opposite direction to the intermediate table 3, and as shown in FIG. 7, the pinion 33 provided on the base 21, the intermediate table 3, and the counterweight The rack 34 fixed to the intermediate base 3 is fixed to the counterweight 27 from above on the pinion 33 rotatably attached to the base 21. The rack 35 is engaged from below, so that the intermediate base 3 and the counterweight 27 are always moved in the opposite directions with respect to the base 21.

  The pair of the counter weight 27 and the rack device 28 arranged between the intermediate base 3 and the base 21 and meshing with each other is configured in this way. Is transmitted to the counter weight 27 and the counter weight 27 set to have almost the same mass as the intermediate base 3 is moved, so that the movement of the intermediate base 3 and the counter weight 27 is canceled out, and the entire vibration is Can be erased.

  In this embodiment, as a damping means for eliminating the vibration of the intermediate table 3 generated by the reciprocating movement of the movable table 2, a set of a damping spring and a damper device, and a set of a counterweight and a rack device are used. Two sets of vibration control means are used, but in this embodiment, two sets of vibration control means are used to eliminate vibrations to the maximum in order to perform precise machining while moving the moving table. It is obvious that it is not essential to employ these two sets of vibration damping means, and any one of the vibration damping means is sufficiently effective. Further, the vibration damping means is not limited to the combination of the vibration damping spring and the damper device illustrated here or the pair of the counterweight and the rack device, and other arbitrary vibration damping means can naturally be adopted. is there.

  In this embodiment, as shown in FIG. 1, the guide bar 5 is a hollow pipe, and a connection pipe 31 of the hollow pipe is also disposed in the guide bar 5. Wirings 36 and 37 are passed through. As shown in FIG. 2, the wirings 36 and 37 are wirings for the left servo motor 15. Thus, at least one of the two parallel guide bars 5 constituting the guide way can be used as a hollow pipe, and the inside of the hollow pipe can be used as a wiring or piping path.

  At this time, if the hollow pipe serving as the wiring or piping path moves, the internal wiring or piping is also shaken by this movement, which is not preferable. Therefore, in this embodiment, the connection pipe 31 which is a hollow pipe is further passed inside the moving guide bar 5 and the wirings 36 and 37 are passed inside the connection pipe 31 to solve this problem. Yes.

  As described above, as shown in FIG. 6, when the rotary arm 7 is driven to rotate in the opposite directions by the two servo motors that are independently driven, the two servo motors 15 are completely And the drive pin 8 of the rotary arm 7 is positioned symmetrically about the line B passing through the center of the two rotary arms 7 and parallel to the guideway. It must be controlled so that

  For this reason, in this embodiment, one of the two servo motors 15 is a master motor and the other is a slave motor, and the control means is provided with a correction means for making the rotation angle of the slave motor coincide with the rotation angle of the master motor. It has been.

  FIG. 8 is a block diagram showing an example of control means when one of the two servo motors 15 is a master motor and the other is a slave motor. When the start command 41 is input, a drive pin position detection mechanism (not shown) drives the drive pin 8 at a predetermined position, and the two drive pins 8 pass through the centers of the two rotary arms 7 and are parallel to the guideway. After confirming that the positions are symmetrical with respect to each other about the line B, the control pulse generator 42 outputs the first control pulse 43.

  The first control pulse 43 is divided into a circuit for driving the master motor 46 (upper side) and a circuit for driving the slave motor 47 (lower side). 45, and is input to the master motor 46 and the slave motor 47 to rotate the master motor 46 and the slave motor 47, respectively.

  The rotation of the master motor 46 and the slave motor 47 is based on a sensor that detects the movement of the driven body 48 driven by the master motor 46 and the slave motor 47, for example, the output from the servo motor as in this embodiment. When the signal is transmitted by a transmission means that does not cause a phase shift like a gear train by a gear, it is detected by an encoder 48 provided in the master motor 46 and the slave motor 47, and the drive pin 8 of each rotary arm 7 is detected. The position rotation angles 49 and 50 are input to the comparison device 51.

  The comparison device 51 compares the respective rotation angles 49 and 50 to calculate a phase difference 52, and a correction pulse that is correction means for making the phase difference 52 coincide with the rotation angle of the master motor 46. The signal is input to the generator 53, converted into a correction pulse 54 by the correction pulse generator 53, and output. The correction pulse 54 is added to the first control pulse 43 on the slave motor 47 side by the adder 55, becomes the second control pulse 56, is amplified by the amplifier 44, becomes the drive pulse 45, and corrects the slave motor 47. Rotate.

  The movement of the driven body 48 driven by the rotation of the master motor 46 and the corrected rotation of the slave motor 47 is transmitted to the moving table 2 via the drive pin 8 of the rotating arm 7. When the rotation is corrected by the correcting means, the positions of the drive pins 8 of the rotary arm 7 are symmetrical with respect to each other about the line B passing through the center of the two rotary arms 7 and parallel to the guideway. The reciprocating movement controlled to become is performed.

  FIG. 9 is a block diagram showing another example of the control means when one of the two servomotors is a master motor and the other is a slave motor. When the start command 61 is input, a drive pin position detection mechanism (not shown) drives the drive pin 8 at a predetermined position, and the two drive pins 8 pass through the center of the two rotary arms 7 and are parallel to the guideway. The first control current 63 is output from the motor controller 62 after confirming that the positions are symmetrical with respect to each other about the line B. The first control current 63 is divided into a circuit on the side that drives the master motor 68 (upper side) and a circuit on the side that drives the slave motor 69 (lower side), and is amplified by the amplifiers 64 and 65, respectively. Drive currents 66 and 67 are input to the master motor 68 and the slave motor 69, respectively, and the master motor 68 and the slave motor 69 are driven to rotate.

  At this time, output torques of the master motor 68 and the slave motor 69 are detected by torque detection devices 70 and 71 such as ammeters, and the detected output torques (current values) 72 and 73 are input to the comparison device 74. . The comparison device 74 compares the output torques (current values) 72 and 73 to calculate a difference 75 in the output torque (current value) of the slave motor 69 relative to the master motor 68, and the difference 75 in the output torque (current value). Thus, the correction value generator 76 calculates the correction value 77.

  The adder 78 calculates the current output to the slave motor 69 by adding / subtracting the correction value 77, and outputs the second control current 79 in which the output torque of the slave motor 69 matches the output torque of the master motor 68. Then, the output torque of the slave motor 69 and the output torque of the master motor 68 are matched.

  Also in this embodiment, the movement of the rotating arm 7 driven by the rotation of the master motor 68 and the corrected rotation of the slave motor 69 is transmitted to the moving table 2 via the drive pin 8, and the moving table 2 is When the rotation of the motor is corrected by the correcting means, the position of the drive pin 8 of the rotary arm 7 is symmetrical with respect to each other about the line B passing through the center of the two rotary arms 7 and parallel to the guideway. The reciprocating movement is controlled so as to be in the position.

  Since the reciprocating device of the present invention is configured as described above, it can provide a reciprocating device capable of reciprocating at a high speed exceeding several hundred times per minute and its driving means. Provided are a reciprocating device and its driving means capable of coping with this high speed reciprocating movement, a driving source for stably driving this driving means and its control means, and a damping means for suppressing intense vibration due to high speed reciprocating movement. can do.

It is a perspective view which shows one example of the reciprocating device of this invention. It is a disassembled perspective view of the Example of FIG. It is sectional drawing which shows the relationship between the drive groove | channel of a moving stand, and the drive pin provided in the rotation arm. It is the sectional view on the AA line of FIG. 3 which shows the drive source of a rotation arm. It is explanatory drawing which exaggerated and drew the clearance gap between a drive groove and a drive pin. It is the perspective view seen from the lower side which shows the other Example of a drive source. It is a perspective view which shows the rack apparatus arrange | positioned between an intermediate | middle base and a base. It is a block diagram which shows an example of a control means when one of two servo motors 15 is a master motor and the other is a slave motor. It is a block diagram which shows the other example of a control means when one of two servomotors is a master motor and the other is a slave motor.

Explanation of symbols

1 Reciprocating device 2 Moving table (reciprocating table)
DESCRIPTION OF SYMBOLS 3 Intermediate stand 3a Side wall 3b Connecting part 3c Sink hole 4 Slide bearing 5 Guide bar 6 Drive groove 6a Spacer 7 Rotating arm 8 Drive pin 9, 14 Gear 10 Motor 11 Rotating shaft 12 Frame 13 Ball bearing 15 Servo motor 16, 17 Bevel gear 21 Base 22 Slide Bearing 23 Guide Bar 25 Damping Spring 26 Damper Device 27 Counter Weight 28 Rack Device 29 Stopper Plate 30 Guide Pin 31 Connection Pipe 32 Connection Rod 33 Pinion 34, 35 Rack 36, 37 Wiring 41 Start Command 42 Control Pulse Generator 43 First control pulse 44 Amplifier 45 Drive pulse 46 Master motor 47 Slave motor 48 Driven body (encoder)
49, 50 Rotation angle 51 Comparison device 52 Phase difference 53 Correction pulse generator 54 Correction pulse 55 Adder 56 Second control pulse 61 Start command 62 Motor control device 63 First control current 64, 65 Amplifier 66, 67 Drive current 68 Master motor 69 Slave motor 70, 71 Torque detector 72, 73 Output torque (current value)
74 Comparison device 75 Difference in output torque (current value) 76 Correction value generator 77 Correction value 78 Adder 79 Second control current

Claims (15)

A guideway,
A reciprocating motion supported by the guideway, and a moving table having a drive groove formed on the lower surface perpendicular to the guideway;
Two rotating arms each having a drive pin that fits into the drive groove;
A reciprocating device characterized by having a drive source for synchronously rotating the two rotating arms in opposite directions.   The reciprocating device according to claim 1, wherein the guide way includes two guide bars parallel to each other and a slide bearing that fits and supports the guide bars.   The reciprocating device according to claim 2, wherein the slide bearing is a hydrostatic bearing.   2. The drive groove is characterized in that there are no gaps between the drive pins at both ends in the movement range of the drive pins and a slight gap between the drive pins and the drive pins at the center. The reciprocating device according to any one of items 3 to 3.   The reciprocating device according to any one of claims 1 to 4, wherein the drive pin is configured such that the drive pin itself is rotatable.   The two rotating arms are driven to rotate in opposite directions by a single driving source, and the position of the driving pin passes through the center of the two rotating arms and is parallel to the guideway. The reciprocating device according to any one of claims 1 to 3, wherein the reciprocating device is disposed so as to be symmetrical with each other about a line.   The two rotary arms are driven to rotate in opposite directions by two servo motors that are independently driven, and the position of the drive pin passes through the center of the two rotary arms and 4. The control device according to claim 1, further comprising a control unit configured to control the servo motor so that the servo motors are positioned symmetrically with respect to each other about a line parallel to the guide way. 5. Reciprocating device.   The one of the two servo motors is a master motor and the other is a slave motor, and the control means has correction means for matching the rotation angle of the slave motor with the rotation angle of the master motor. Item 8. The reciprocating device according to Item 7.   The one of the two servo motors is a master motor and the other is a slave motor, and the control means has correction means for matching the output torque of the slave motor with the output torque of the master motor. Item 8. The reciprocating device according to Item 7.   The moving table is supported by a first guide way disposed on the intermediate table, and further, the intermediate table is moved by the second guide way having substantially the same structure that moves in the same direction as the moving table. The reciprocating device according to claim 1, wherein the reciprocating device is supported by the reciprocating device.   The reciprocating device according to claim 10, wherein the intermediate table includes a vibration control unit that eliminates vibration generated by the reciprocating movement of the moving table.   The reciprocating device according to claim 11, wherein the vibration damping means is a damper and a vibration damping spring disposed between the intermediate base and the base.   The reciprocating device according to claim 11, wherein the vibration damping means is a counterweight that moves in a phase opposite to that of the intermediate platform.   The reciprocating device according to claim 13, wherein the counterweight is connected to each other by a pinion provided on a base and a rack provided on each of the intermediate base and the counterweight.   At least one of two mutually parallel guide bars constituting the guide way is a hollow pipe, and the inside of the hollow pipe is a route for wiring or piping. Item 4. The reciprocating device according to Item 2 or 3.

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