CN105537973B - Table device - Google Patents

Table device Download PDF

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Publication number
CN105537973B
CN105537973B CN201510697967.4A CN201510697967A CN105537973B CN 105537973 B CN105537973 B CN 105537973B CN 201510697967 A CN201510697967 A CN 201510697967A CN 105537973 B CN105537973 B CN 105537973B
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CN
China
Prior art keywords
workbench
weight member
table device
linear guide
crank
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Application number
CN201510697967.4A
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Chinese (zh)
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CN105537973A (en
Inventor
下川雅史
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KURODA PREC Inc Ltd
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KURODA PREC Inc Ltd
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Filing date
Publication date
Priority claimed from JP2015163520A external-priority patent/JP6308985B2/en
Application filed by KURODA PREC Inc Ltd filed Critical KURODA PREC Inc Ltd
Publication of CN105537973A publication Critical patent/CN105537973A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001Arrangements compensating weight or flexion on parts of the machine

Abstract

A kind of table device is provided, can be realized the miniaturization of the table device with weight member.The weight member (24) moved back and forth round about with workbench (20) has an opposite side counterweight (26,28), when from moving back and forth direction, which is configured in the left and right of workbench (20).

Description

Table device
Technical field
The present invention relates to table devices, are more specifically related to being mainly used for work mechanism and have to move back and forth Workbench table device.
Background technique
The table device for moving back and forth workbench on base station can be because of the moving direction of the workbench at stroke end Inertia when reversion and generate vibration.Propose following method to reduce the vibration: on base station setting and workbench to The weight member that opposite direction moves back and forth, the inertia of workbench is offset using the inertia of weight member (for example, patent document 1、2)。
Patent document 1: Japanese Unexamined Patent Publication 2002-120146 bulletin
Patent document 2: Japanese Unexamined Patent Publication 2003-53663 bulletin
As the weight member in previous table device, configured in order to avoid the interference with workbench remote Position from workbench, and it is set not with the duplicate reciprocating movement range of the reciprocating movement range of workbench.
Therefore, in previous table device, base station enlargement, and move back and forth workbench and weight member Driving device is also enlarged, it is difficult to realize miniaturization.
Summary of the invention
The problem to be solved by the present invention is that providing a kind of table device, the workbench with weight member can be realized The miniaturization of device.
Table device of the invention includes base station 12, with what is extended parallel to relative to defined axis direction 1st Linear guide 14 and the 2nd Linear guide 16;Workbench 20, can by the 1st Linear guide 14 guide and It is mobile;Weight member 24 can be guided by the 2nd Linear guide 16 and be moved;And driving device 50,90, make The workbench 20 and the weight member 24 move back and forth round about each other, and the weight member 24, which has, works as from described An opposite side counterweight 26,28 of the configuration in the left and right of the workbench 20 when axis direction is observed.
According to this structure, the reciprocating movement range (area of the reciprocating movement range (section) of side counterweight 26,28 and workbench 20 Between) repeat.Thereby, it is possible to minimize base station 12.
Table device of the invention is preferably, and the weight member 24 also has a pair of end counterweight 30,32, when from described Axis direction observe when a pair of end counterweight 30,32 configuration before and after the workbench 20, and by the pair of side counterweight 26, 28 is connected to each other.
According to this structure, end counterweight 30,32 undertakes a part of the weight of weight member 24, can make side counterweight 26,28 Miniaturization.
Table device of the invention is preferably, and the weight member 24 passes through the pair of side counterweight 26,28 and described A pair of end counterweight 30,32 and be formed as the frame-shaped that there is opening 34 in central portion, the workbench 20 is can move back and forth Mode is configured at the opening 34.
According to this structure, the balance around workbench 20 of weight member 24 configures well, workbench can be made to fill Set miniaturization.
Table device of the invention is preferably that the upper surface 20A of the workbench 20 is upper with the weight member 24 Surface 24A, which is compared, is located at upside.
According to this structure, the tool being machined on workbench 20 will not interfere with weight member 24.
Table device of the invention is preferably the 1st Linear guide 14 and 16 essence of the 2nd Linear guide It is upper to be located on the same face.
According to this structure, highly different situation phases is configured to from the 1st Linear guide 14 and the 2nd Linear guide 16 Than the height dimension of base station 20 can be reduced.
The driving device of table device of the invention is preferably to include crank axle 50, and have has each other 1st crank-pin 54 of the rotational phase difference of 180 degree and the 2nd crank-pin 58;1st connecting rod 70, by the 1st crank-pin 54 and institute State the connection of workbench 20;2nd connecting rod 78 links the 2nd crank-pin 58 with the weight member 24;And actuator 90, rotation driving is carried out to the crank axle 50.
According to this structure, driving device can be made to minimize.
The driving device of table device of the invention is preferably to include crank mechanism 122, makes the work Make the reciprocating movement of platform 20;Belt mechanism 137, it includes endless belt 136, which is hanged up in multiple belt wheels 133,134 Between, and two bands extension 136A, 136B are formed between the belt wheel 133,134, this two with extension 136A, 136B It is upwardly extended and parallel to each other in side identical with the moving direction of the workbench 20, in described two one in extension It is linked with the workbench 20 on square 136A and is linked with the weight member 24 on another party 136B;And actuator 124, It drives the crank mechanism 122.
According to this structure, it drives crank mechanism 122 to move back and forth workbench 20 by actuator 124, passes through work Platform 20 drives belt mechanism 137 and moves back and forth weight member 24, reciprocating movement and the weight member 24 of workbench 20 Move back and forth accurate synchronization always.
The crank mechanism 122 of table device of the invention is preferably to include rotary part 102, described The rotation driving of actuator 90;Variable crank-pin 116, with the side that can be shifted on the radial direction of the rotary part 102 Formula setting;And connecting rod 118, the variable crank-pin 116 is linked with the workbench 20.
According to this structure, the reciprocating movement stroke of workbench 20 can be set in a variable manner.
Table device according to the present invention, due at least part and workbench of the reciprocating movement range of side counterweight It moves back and forth range to repeat, therefore base station can be made to realize miniaturization.
Detailed description of the invention
Fig. 1 is the perspective view for showing the embodiment 1 of table device of the invention.
Fig. 2 is the top view of the table device of embodiment 1.
Fig. 3 is the longitudinal section view of the table device of embodiment 1.
Fig. 4 is the perspective view for being observed from the right the embodiment 2 of table device of the invention.
Fig. 5 is the perspective view from the table device of left sides embodiment 2.
Fig. 6 is the perspective view of the table device of embodiment 2 from downside.
Label declaration
10: table device;12: base station;14: inboard track;16: follower rail;18: rolling guiding piece;20: work Platform;22: rolling guiding piece;24: weight member;26: side counterweight;28: side counterweight;30: end counterweight;32: end counterweight;34: opening; 50: crank axle;54: the 1 crank-pins;58: the 2 crank-pins;70: the 1 connecting rods;78: the 2 connecting rods;90: motor (actuator); 100: central axis;102: rotary part;104: sliding block;106: nut;108: screw rod;110: runner gear;112: worm gear; 116: variable crank-pin;118: connecting rod;120: pin;122: crank mechanism;123: motor (actuator);133: belt wheel;134: Belt wheel;136: endless belt;136A: band extension;136B: band extension;137: belt mechanism;144: tension adjustment piece; 148: adjusting screw.
Specific embodiment
Hereinafter, referring to Fig.1~Fig. 3 is illustrated the embodiment 1 of table device of the invention.In addition, saying below X-axis, Y-axis, Z axis in bright according to work mechanism standard coordinate axis.
Table device 10 is the device for being used in grinding disc etc., base station (lathe bed) 12 with box-shaped.In base station 12 Top is equipped with the inboard track that linearly extends in parallel relative to an axis direction (Z-direction), and (the 1st linearly draws Guiding element) 14 and follower rail (the 2nd Linear guide) 16.Follower rail 16 are compared when inboard track 14 is from Z-direction In the inside of left and right directions.Inboard track 14 and follower rail 16 are placed separately in the X-axis direction respectively and respectively formed on the same face A pair, respective extension section repeat in whole region.
The rolling guiding piece 18 with ball that the workbench 20 of rectangular shape is kept by not shown retainer Engaged in a manner of it can move in the Z-axis direction with a pair of inside guide rail 14.
Weight member 24 is by the rolling guiding piece 22 with ball that not shown retainer is kept with can be in Z The mode moved in axis direction engages with a pair of outside guide rail 16.
Weight member 24 is made of a plate body, includes longer opposite side counterweight 26 and 28 in the Z-axis direction, it From Z-direction when configuration in the left and right of workbench 20;And a pair of end counterweight 30 and 32, they are from Z-direction When configuration before and after workbench 20, and it is side counterweight 26 and 28 is connected to each other.The weight of weight member 24 is preferably and comprising setting Set being equal in weight for the workbench 20 including the chuck assembly on workbench 20, it is contemplated that the weight of machined object, counterweight part The weight of part 24 can also be greater than the weight of workbench 20.
Weight member 24 becomes the opening for having rectangle in central portion by side counterweight 26,28 and end counterweight 30,32 The frame-shaped of 34 rectangle.The configuration work platform 20 in opening 34.Interior cun in the X-direction of opening 34 is slightly more than workbench 20 X-direction outer cun, and the reciprocating movement of the X-direction for being slightly more than workbench 20 that is open interior cun of Z-direction of 34 Range (setting stroke).Although workbench 20 is configured at opening 34 and (can also do not conflicting with weight member 24 as a result, Relate to) in the case where move back and forth in the X-axis direction.
As shown in figure 3, the size (height dimension) in the Y direction of workbench 20 is greater than weight member 24, although thus Inboard track 14 and follower rail 16 are formed on the same face, and the upper surface 20A of workbench 20 also is located at the upper of weight member 24 The upside of surface 24A (referring to Fig. 3).The machining tools such as the grinding wheel of the grinding carried out on workbench 20 as a result, (are not schemed Show) it can not also interfere with weight member 24.In this case, since inboard track 14 and follower rail 16 are formed in the same face On, therefore compared with inboard track 14 and follower rail 16 to be arranged to the different situation of height, the Y-axis of base station 12 can be reduced Size on direction.
As shown in figure 3, the wall portion 12A of a side (left side) for base station 12 is by multiple row ball bearing 40 can revolve around X-axis The mode turned supports central axis 38, which is inserted into the bearing hole extended in the X-axis direction for being formed in wall portion 12A In 36.The wall portion 12B of another party of the base station 12 opposite with wall portion 12A is by multiple row ball bearing 46 can rotate around X-axis Mode support central axis 44, which is inserted into the bearing hole 42 extended in the X-axis direction for being formed in wall portion 12B In.Central axis 38 and 44 is concentric in X-axis.
Inner space between the wall portion 12A and 12B of base station 12 is configured with crank axle 50.Crank axle 50 is in X axis direction Upper extension, becoming from left side to right side successively has crank arm 52, the 1st crank-pin 54, crank arm 56, the 2nd crank-pin 58, crank The Construction integration of arm 60.The crank arm 52 in left side is fixed on central axis 38, and the crank arm 60 on right side is fixed on central axis 44.By This, crank axle 50 can be by two supports on base station 12 and around central axis 44 and using 44 axle center as the X-axis of rotation center The axis in direction rotates.
1st crank-pin 54 is located between the crank arm 52 in left side and the crank arm 56 of centre, during the 2nd crank-pin 58 is located at Between crank arm 56 and right side crank arm 60 between.The rotation center of 1st crank-pin 54 and the 2nd crank-pin 58 around crank axle 50 The eccentricity (Crank arm length) of rotational phase difference with 180 degree, both sides is mutually the same.
The end of one side of the 1st connecting rod 70 via ball bearing 72 by can in a manner of relative rotation with the 1st crank-pin 54 Connection.The end of another party of 1st connecting rod 70 in a manner of being relatively rotatable to each other and is set to workbench 20 connecting pin 76 Bottom protrusion tab 74 link (referring to Fig.1).The end of one side of the 2nd connecting rod 78 is via ball bearing 80 opposite can revolve The mode turned and the 2nd crank-pin 58 link.The end of another party of 2nd connecting rod 78 is by connecting pin 84 (referring to Fig.1) with can The mode of relative rotation and the protrusion tab 82 for the bottom for being set to weight member 24 link.The bar of 1st connecting rod 70 and the 2nd connecting rod 78 Length is mutually the same.
The outer end of central axis 38 is prominent to the foreign side of base station 12.Driven pulley 86 is fixed on the protrusion.It is electronic Machine 90 is installed on base station 12 by mounting plate 88.Driving pulley 94 is fixed on the output shaft 92 of motor 90.In driving band Endless belt 96 is hanged up on wheel 94 and driven pulley 86.It is rotated and is driven around the axis of X-direction by motor 90 as a result, Dynamic crank axle 50.
Crank axle 50 is driven by rotation, and makes workbench 20 and weight member 24 synchronously with one another on base station 12 along Z Direction moves back and forth.1st crank-pin 54 and the 2nd crank-pin 58 have 180 degree of rotatable phase around the rotation center of crank axle 50 Difference, thus carries out the reciprocating movement in the opposite direction each other, and the eccentricity of the 1st crank-pin 54 and the 2nd crank-pin 58 that This is identical, thus carries out the reciprocating movement in a manner of with identical stroke.The inertia of workbench 20 when stroke end as a result, It is cancelled at the time of synchronized with each other with the inertia of weight member 24, the vibration of base station 12 caused by can reduce because of inertia.
Due to when side counterweight 26,28 is from Z-direction configuration in the left and right sides of workbench 20, side counterweight 26, 28 reciprocating movement range and the reciprocating movement range of workbench 20 repeat.In other words, due to the reciprocating movement model of workbench 20 It encloses be overlapped in the Z-axis direction with the reciprocating movement range of side counterweight 26,28, therefore base can be reduced compared with nonoverlapping situation Size in the Z-direction of platform 12.
Since side counterweight 26,28 is located at the outside of workbench 20, side counterweight 26,28 will not give the ruler of workbench 20 Very little setting affects.Thereby, it is possible to after the minimal size needed for be set to the size of workbench 20, according to required The weight of the weight set side counterweight 26,28 of the workbench 20 of minimal size.
Due to 1/2 point of reciprocating movement range (move back and forth stroke) of workbench 20 and the reciprocating movement of weight member 24 1/2 point of (move back and forth stroke) of range is the same position in Z-direction, therefore can be by based on crank axle 50 Crank mechanism synchronizes driving to workbench 20 and weight member 24.Hereby it is achieved that 20 He of workbench comprising crank mechanism The miniaturization of the driving device of weight member 24.
Since the size reduction in end counterweight 30,32 and the Z-direction of base station 12 is on the contrary, the therefore ruler of preferred Z-direction It is very little as small as possible.But since end counterweight 30,32 can be such that the overall weight of weight member 24 increases, end counterweight 30,32 has Help the size reduction in the X-direction of side counterweight 26,28.The size design of the Z-direction and X-direction of base station 12 as a result, Freedom degree increase, reduce base station 12 Z-direction on size in the case where, as long as much as possible reduce end counterweight 30, Size in 32 Z-direction and the required weight that weight member 24 is compensated by side counterweight 26,28 are reducing base station In the case where size in 12 X-direction, as long as reducing the size in the X-direction of side counterweight 26,28 as much as possible and leading to Cross the required weight that end counterweight 30,32 compensates weight member 24.
Since side counterweight 26,28 is symmetrical in the left and right sides of workbench 20 when from Z-direction, counterweight 30,32 is held It is symmetrical in the front and rear sides of workbench 20 when from Z-direction, therefore can inhibit to load partially by weight member 24 and make For base station 12, the reduction of mechanical precision caused by the deformation because of base station 12 is avoided.
Then, it is illustrated referring to embodiment 2 of Fig. 4~Fig. 6 to table device of the invention.In addition, Fig. 4~ Label identical with the label marked in FIG. 1 to FIG. 3 is marked to part corresponding with FIG. 1 to FIG. 3 in Fig. 6, the description thereof will be omitted.
Identical as embodiment 1, weight member 24 is become by side counterweight 26,28 and end counterweight 30,32 in central portion The frame-shaped of rectangle with rectangular aperture 34.The configuration work platform 20 in opening 34.
Discoid rotary part 102 is installed in a manner of it can rotate the central axis 100 extended in the Y-axis direction In base station 12.Sliding block 104 is installed on rotary part 102 in a manner of it can move on the radial direction of rotary part 102.? Feed nut 106 is fixed on sliding block 104.The feed screw 108 screwed togather with feed nut 106 is pacified in a manner of it can rotate Loaded on rotary part 102.Sliding block 104 by being moved on the radial direction for being rotated in rotary part 102 of feed screw 108, and Determine the position of sliding block 104.Runner gear 110 is fixed on feed screw 108, the worm gear 112 engaged with runner gear 110 Rotary part 102 is installed in a manner of it can rotate.Hexagon ring 114 is formed in the end of worm gear 112, worm gear 112 by with Hexagon ring 114 engage hexagonal wrench (not shown) operation and rotate.
Variable crank-pin 116 is fixed on sliding block 104.Variable crank-pin 116 extends in the Y-axis direction, due to sliding block 104 It is shifted on the radial direction of rotary part 102, i.e. change allocation position.One end of connecting rod 118 in a manner of it can rotate with Variable crank-pin 116 links.Pin of the other end of connecting rod 118 in a manner of it can rotate with the lower bottom part for being fixed on workbench 20 120 connections.
The crank mechanism 122 for moving back and forth workbench 20 is constituted in this way.The Crank arm length of crank mechanism 122 Change because can be changed the displacement of crank-pin 116.Because of the variation of the Crank arm length of crank mechanism 122, the reciprocal shifting of workbench 20 Dynamic stroke changes.That is, crank mechanism 122 can quantitatively can be changed the reciprocating movement stroke of setting workbench 20.Pass through six Angle wrench (not shown) carries out the trip adjusting to the rotation process of worm gear 11.
Motor 123 is installed on base station 12.Driving pulley 125 is fixed on the output shaft 124 of motor 123.? Driven pulley 130 is fixed on central axis 100.Endless belt 132 is hanged up on driving pulley 125 and driven pulley 130. Driving rotary part 102 is rotated around central axis by motor 123 as a result,.
On base station 12, along 2 separated positions of Z-direction be fixed with the axis 127 extended along the y axis respectively, 128.The belt wheel 133,134 of same outer diameter is installed on axis 127,128 in a manner of it can rotate.It is opened between belt wheel 133,134 Endless belt 136 is hung, belt mechanism 137 is constituted by belt wheel 133,134 and endless belt 136.
Endless belt 136 between belt wheel 133,134 have with the moving direction same direction of workbench 20, i.e. the axis side Z It upwardly extends and parallel to each other two with extension 136A, 136B.It is the belt wheel linearly extended with extension 136A, 136B Between path, these Y direction length with extension 136A, 136B be weight member 24 reciprocating movement range with On.
One side's is linked with extension 136A by the lower bottom part of connecting piece 138 and workbench 20.The band of another party extends Portion 136B is linked by the connecting piece 140 and the side counterweight 26 of a side of weight member 24.It is realized by connecting piece 138 It is proceeded as follows with extension 136A and the connection of workbench 20: when workbench 20 is located at the reciprocating movement stroke of itself When 1/2 point of state, 1/2 position and workbench 20 in the Z-direction with extension 136A link.Pass through connecting piece 140 And that realizes proceeds as follows with extension 136B and the connection of weight member 24: when weight member 24 is located at the past of itself When 1/2 point of state of multiple shift motion, 1/2 position of the Z-direction with extension 136A and workbench 20 link.
On with extension 136B be fixed with fixinig plate 142 in connecting piece 140 in the Z-axis direction adjacent position. Tension adjustment piece 144 is fixed on fixinig plate 142, the tension adjustment piece 144 include towards connecting piece 140 extend and with even The part that sheeting 140 is overlapped in the X-axis direction.
Adjusting screw 148 with head is installed on connecting piece 140 block 146 in a manner of it can rotate.Adjust spiral shell Nail 148 engages with threaded hole (not shown) screw thread for being formed in tension adjustment piece 144, is made in a manner of feed screw rotating Tension adjustment piece 144 moves in the Z-axis direction.Endless belt is adjusted by the movement in the Z-direction of tension adjustment piece 144 136 tension.The tension adjustment is carried out in the case where not hindering the required straight trip with extension 136B.
In tension adjustment piece 144, it is formed through longer multiple long holes 150 in the Z-axis direction along the x axis.? Bolt 152 is configured in each long hole 150, each bolt 152 engages with threaded hole (not shown) screw thread of connecting piece 140, thus complete It is fixed at the tension adjustment piece 144 of tension adjustment by long hole 150.
When through the rotation driving rotary part 102 of motor 123, make workbench 20 in base station by crank mechanism 122 It is moved back and forth on 12 along Z-direction.Endless belt 136, band extension 136A and 136B are driven by the reciprocating movement of workbench 20 It moves back and forth in the opposite directions to each other in the Z-axis direction.Since endless belt 136 is driven in the reciprocating movement of workbench 20, because This reciprocating movement stroke with extension 136A, 136B is identical as the reciprocating movement stroke of workbench 20.
Weight member 24 is synchronous with the reciprocating movement of workbench 20 and with the reciprocating movement stroke with workbench 20 as a result, Identical reciprocating movement stroke, and moved on the direction opposite with the moving direction of workbench 20 along Z-direction.With embodiment party Formula 1 is identical, and by the action, the inertia of the workbench 20 when stroke end and the inertia of weight member 24 are synchronized with each other Moment is cancelled, because the vibration of base station 12 caused by inertia reduces.
In embodiment 2, since weight member 24 is driven in the reciprocating movement of workbench 20, workbench 20 It moves back and forth and the reciprocating movement of weight member 24 accurate synchronization always.
Equally in embodiment 2, due to configuring when side counterweight 26,28 is from Z-direction in the left and right of workbench 20 Two sides, therefore the reciprocating movement range of workbench 20 and the reciprocating movement range of side counterweight 26,28 are be overlapped in Z axis direction, with Nonoverlapping situation compares the size in the Z-direction that can reduce base station 12.
More than, using the preferred embodiment, the present invention is described, but as long as being those skilled in the art's energy Enough readily comprehensible modes, the present invention is not limited to present embodiments, without departing from the spirit and scope of the invention can be appropriate Change.
For example, the driving device for moving back and forth workbench 20 and weight member 24 is not limited to the dress based on crank mechanism It sets, is also possible to the device based on transmission belt etc..Need workbench 20 reciprocating movement and weight member 24 reciprocating movement that This synchronizes and is opposite direction, but reciprocating movement and the weight member of workbench 20 can also be carried out by independent driving device 24 reciprocating movement.In addition, workbench 20 also may not necessarily be identical with the stroke of weight member 24.
It is also possible to omit end counterweight 30,32 without by the structure connected to each other of side counterweight 26,28.In this case, make The driving device driven synchronously with one another with opposite side counterweight 26,28.
Also, structural element shown in above embodiment is simultaneously not all essential, is not departing from purport of the invention In the range of can suitably accept or reject selection.

Claims (4)

1. a kind of table device, which is characterized in that the table device includes
Base station has the 1st Linear guide and the 2nd Linear guide extended parallel to relative to defined axis direction;
Workbench can be guided by the 1st Linear guide and be moved;
Weight member can be guided by the 2nd Linear guide and be moved;And
Driving device moves back and forth the workbench and the weight member round about each other,
The weight member is formed as the frame-shaped for having opening in central portion by an opposite side counterweight and a pair of end counterweight, described Workbench is configured at the opening in a manner of it can move back and forth, and when from the axis direction, the pair of side is matched It reconfigures in the left and right of the workbench, when from the axis direction, the pair of end, which is matched, to be reconfigured in the work The front and back of platform, and two side counterweights are interconnected,
The driving device has multiple belt wheels, and the multiple belt wheel configuration is under the workbench and the weight member Side, the multiple belt wheel can be around the axis rotation vertically extended, and the driving device only has a ring-type Band, the endless belt are hanged up between the belt wheel, and two band extensions are formed between the belt wheel, and described two bands prolong Extending portion upwardly extends and parallel to each other in side identical with the moving direction of the workbench,
Described two one in extension link with extension in the lower section of the workbench and the workbench,
The lower section of a side counterweight of another described two in extension with extension in the pair of side counterweight with One side counterweight connection.
2. table device according to claim 1, wherein
The table device is the table device of grinding disc, the 1st Linear guide and the 2nd Linear guide edge Horizontal direction extends,
The upper surface of the workbench is located at upside compared with the upper surface of the weight member.
3. table device according to claim 1 or 2, wherein
1st Linear guide and the 2nd Linear guide are located on the same face.
4. table device according to claim 1 or 2, wherein
The driving device includes
Crank mechanism moves back and forth the workbench;And
Actuator drives the crank mechanism,
The crank mechanism includes
Rotary part is rotated by the actuator and is driven;
Variable crank-pin, is arranged in a manner of it can shift on the radial direction of the rotary part;And
Connecting rod links the variable crank-pin and the workbench.
CN201510697967.4A 2014-10-28 2015-10-23 Table device Active CN105537973B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-219702 2014-10-28
JP2014219702 2014-10-28
JP2015-163520 2015-08-21
JP2015163520A JP6308985B2 (en) 2014-10-28 2015-08-21 Work table device

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CN105537973A CN105537973A (en) 2016-05-04
CN105537973B true CN105537973B (en) 2019-03-12

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CN114043335B (en) * 2021-11-12 2022-09-20 哈尔滨职业技术学院 Robot part cleaning and deburring device

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EP1486824A1 (en) * 2003-06-11 2004-12-15 ASML Netherlands B.V. A movable stage system for in a lithographic projection apparatus, lithographic projection apparatus and device manufacturing method
TW200849451A (en) * 2007-01-30 2008-12-16 Yaskawa Denki Seisakusho Kk Stage device and exposure device

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