JP2009115463A - Inspection socket - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily and certainly form insulated coat layers on a support hole. <P>SOLUTION: This inspection socket is employed for inspecting an inspection body by putting the inspection body on the socket and connecting electrodes of this inspection body to POGO pins 26 electrically. The socket includes a housing 27 for supporting the POGO pins 26. This housing 27 is constituted by piling up a plurality of plates. Support holes 35 which pierce the plurality of plates and support the POGO pins 26 are prepared. The support holes 35 in plates at their at least top and bottom ends out of the plurality are tapered through-holes. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection socket used for testing an object to be inspected such as an IC device.

  The inspection socket is an apparatus for inspecting by placing an IC device or the like and electrically connecting the electrode of the IC device or the like and the electrode of the wiring board connected to the tester. There exists a thing like patent document 1 as such a test | inspection socket. This inspection socket (electrical connection device) is shown in FIG. The inspection socket 1 in the figure is mainly a contact for electrically connecting a guide plate 4 having a guide opening 3 into which an object 2 to be inspected 2 is inserted, an electrode 5 of the object 2 to be inspected, and a wiring board 8 described later. And a wiring board 8 for exchanging electrical signals and test signals for testing with the device under test 2 via the contact 6. Yes. An inspected object 2 such as an IC device is inserted into the guide opening 3 of the guide plate 4, and an electric signal is transmitted to the inspected object 2 when the electrode of the inspected object 2 and the contact 6 come into contact with each other. A test is conducted. The inspection socket 1 having such a configuration corresponds to an IC device or the like in which electrodes are arranged on the edge of the object to be inspected, but an IC in which electrodes are arranged in a matrix like a ball grid array (BGA). It is not compatible with devices.

  For this reason, an inspection socket that can be used for an object to be inspected 2 such as an IC device using a ball grid array has been proposed. An example of this is shown in FIG. The inspection socket 11 in the figure mainly electrically connects a guide plate 14 provided with a guide opening 13 into which the inspection object 12 is inserted, a bump electrode 15 of the inspection object 12 and a wiring board 18 described later. The pogo pin 16, a housing 17 that supports the pogo pin 16, and a wiring board 18 that exchanges electrical signals and detection signals for testing with the device under test 12 via the pogo pin 16. A pogo pin seat 19 and a GND solid 20 that are in contact with the pogo pin 16 are provided on the upper side surface of the wiring board 18. The guide plate 14 and the housing 17 are made of a metal material. The guide plate 14 and the housing 17 are connected to the GND solid 20 of the wiring board 18 and are kept at the GND potential.

  An inspected object 12 such as an IC device is inserted into the guide opening 13 of the guide plate 14, and the bump electrode 15 and the pogo pin 16 of the inspected object 12 come into contact with each other, so that an electrical signal is transmitted to the inspected object 12. Test.

With the recent high integration and high density of IC devices and the like, the density of the pogo pins 16 has increased, and the diameter of one pogo pin 16 has been reduced to about 0.3 mm. Further, an upper contact plate 17B is provided on the upper side of the housing 17, and a lower contact plate 17C is provided on the lower side.
JP 2006-351474 A

  In the conventional inspection socket, the pogo pin hole 17A of the housing 17 into which the pogo pin 16 is inserted is plated or coated to form an insulating coating layer on the inner wall thereof.

  In this case, there is no particular problem when the diameter of the pogo pin 16 is large. However, as described above, when the diameter is reduced to about 0.3 mm, it becomes difficult to apply the insulating coating layer. That is, it is difficult to ensure an inner diameter into which the pogo pin 16 can be inserted by uniformly applying an insulating coating layer to the inner wall of a thin hole of about 0.3 mm. This is because the hole becomes thin and it is difficult for the plating solution or coating material to enter.

  For this reason, even if the diameter of the pogo pin 16 is reduced, a measure that can ensure the state in which the pogo pin 16 can be inserted and reliably apply the insulating coating layer to the inner wall of the hole of the housing 17 is desired.

The present invention has been made in view of the above-described problems.
An inspection socket for performing inspection by placing an object to be inspected so that an electrode of the object to be inspected and a pogo pin are electrically connected to each other, and the housing includes a housing that supports the pogo pin, and the housing includes a plurality of plate members. And a support hole for supporting the pogo pin through the plurality of plate members, and a support hole for at least the upper and lower end plate members of the plurality of plate members is tapered. It is characterized by being.

  As described above, according to the present invention, by providing a taper in the through hole of the plate member of the housing that supports the pogo pin, it is easy to perform plating or coating, and the insulating coating layer can be reliably formed. .

  Hereinafter, an inspection socket according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[First Embodiment]
The inspection socket according to the first embodiment will be described below. 1 is a cross-sectional view showing the main part of an inspection socket according to the first embodiment of the present invention, FIG. 4 is a perspective view showing the inspection socket according to the first embodiment of the present invention, and FIG. 5 is the first embodiment of the present invention. The top view which shows the test | inspection socket which concerns on a form, FIG. 6 is a partially broken perspective view which shows the test | inspection socket concerning 1st Embodiment of this invention, FIG. 7 is side sectional drawing which shows the test | inspection socket concerning 1st Embodiment of this invention FIG. 8 is a partial cross-sectional view showing the main part of the inspection socket according to the first embodiment of the present invention.

  The inspection socket according to this embodiment will be described with reference to FIGS. The overall configuration of the inspection socket 21 of the present embodiment is substantially the same as the above-described inspection socket. That is, the inspection socket 21 of the present embodiment mainly electrically connects the guide plate 24 having the guide opening 23 into which the inspection object 22 is inserted, the bump electrode 25 of the inspection object 22, and a wiring board 28 described later. And a wiring board 28 connected to a tester for exchanging electrical signals and test signals for testing with the inspected object 22 via the pogo pin 26. Has been.

  An inspected object 22 such as an IC device is inserted into the guide opening 23 of the guide plate 24, and an electric signal is transmitted to the inspected object 22 when the bump electrode 25 and the pogo pin 26 of the inspected object 22 come into contact with each other. Test.

  The guide plate 24 is formed in a substantially square shape with a wall thickness. The guide plate 24 is made of aluminum. Fixing screws 31 are provided at four corners of the guide plate 24, and the guide plate 24 and other members are integrally fixed by the four fixing screws 31. A substantially square guide opening 23 is formed at the center of the guide plate 24. The guide opening 23 is formed with a taper 32 formed at an upper portion thereof, and the dimension above the guide opening 23 is widened. The taper 32 is an inclined surface that allows the device under test 22 to be easily inserted into the guide opening 23.

  The pogo pins 26 are members for exchanging electrical signals and detection signals by making electrical contact with the bump electrodes 25 of the device under test 22. The pogo pin 26 is formed so as to be expandable and contractible by an internal spring 34, and is elastically brought into contact with the bump electrode 25 so as to be securely connected electrically. As many pogo pins 26 as the number of bump electrodes 25 are mounted on the housing 27 at positions corresponding to the bump electrodes 25 of the inspection object 22.

  The housing 27 is a plate material for supporting each pogo pin 26 at a set position. The housing 27 is provided with support holes 35 for inserting and supporting each pogo pin 26 one by one, as many as the number of bump electrodes 25 of the object 22 to be inspected. Further, each support hole 35 is provided at a position corresponding to the bump electrode 25 of the device under test 22. The housing 27 is formed in a thick plate shape. The thickness of the housing 27 is set to be slightly shorter than the entire length of the pogo pin 26. As a result, the pogo pin 26 inserted into the support hole 35 slightly protrudes from the top and bottom of the housing 27. The housing 27 is overlapped with the guide plate 24 and is integrally fixed together with the wiring board 28 by a fixing screw 31.

  Furthermore, the housing 27 is configured by overlapping two upper and lower plate materials. That is, the housing 27 includes an upper housing portion 37, an upper contact plate 38, a lower housing portion 39, and a lower contact plate 40, as shown in FIGS. The upper housing part 37 and the lower housing part 39 are made of aluminum. The support hole 35 is provided through two plate members (an upper housing part 37 and a lower housing part 39). The support hole 35 is vertically divided into an upper housing part 37 and a lower housing part 39. That is, the support hole 35 is divided into an upper support hole portion 35 </ b> A located in the upper housing portion 37 and a lower support hole portion 35 </ b> B located in the lower housing portion 39.

  Each support hole (upper support hole 35A and lower support hole 35B) of the upper housing part 37 and the lower housing part 39 is provided with a taper. The upper support hole portion 35 </ b> A of the upper housing portion 37 is a hole portion that covers the upper portion of the pogo pin 26. The upper support hole 35A is formed in a conical shape with a taper so as to expand downward. The reason why the upper support hole 35A is formed in a conical shape is to facilitate processing when plating or coating is performed for insulation. When the diameter of the pogo pin 26 is about 0.3 mm or smaller, the support hole 35 also becomes smaller accordingly, and it becomes difficult to apply plating or coating to the inner wall of the support hole 35. In order to solve this problem, the upper support hole 35A is tapered to form a cone. As a result, the vicinity of the upper end of the pogo pin 26 or the vicinity thereof and the vicinity of the uppermost support hole portion 35A (the vicinity of the upper end) or the vicinity thereof are in contact with each other. Thereby, it is comprised so that the contact part of the pogo pin 26 and 35 A of upper side support holes may become the annular | circular shaped line contact A. FIG. As a result, even if there is some unevenness in the thickness of the insulating coating layer, the unevenness is absorbed, and the pogo pin 26 can be reliably inserted into the upper support hole portion 35A, so that the contact can be reliably made.

  A concave portion 37 </ b> A having the same size and depth (thickness) as the upper contact plate 38 is formed on the upper side surface of the upper housing portion 37. The upper housing portion 37 is subjected to insulation plating or the like on other portions except the upper side surface and the lower side surface.

  The upper contact plate 38 is a sheet-like insulating resin material that covers the upper side surface of the upper housing portion 37. The upper contact plate 38 is fitted into the recess 37 </ b> A on the upper side surface of the upper housing part 37 to cover the upper support hole part 35 </ b> A of the upper housing part 37. The upper contact plate 38 is provided with through holes 38 </ b> A at positions corresponding to the upper support hole portions 35 </ b> A of the upper housing portion 37. Each pogo pin 26 is provided with an upper contact pin protruding from each through hole 38 </ b> A so as to come into contact with the bump electrode 25 of the device under test 22.

  The lower support hole 35 </ b> B of the lower housing part 39 is a hole that covers the lower portion of the pogo pin 26. The lower support hole 35B is formed in a conical shape with a taper so as to spread upward. The reason why the lower support hole 35B is formed in a conical shape is to facilitate the processing when plating or coating is performed for insulation, as in the case of the upper support hole 35A. That is, since the diameter of the support hole 35 becomes small and it is difficult to plate the inner wall of the support hole 35, in order to solve this problem, the lower support hole 35B is tapered and formed in a conical shape. As a result, the vicinity of the lower end of the pogo pin 26 or the vicinity thereof and the vicinity of the innermost part of the lower support hole 35B (near the lower end) or the vicinity thereof are in contact with each other to form an annular line contact. Yes. As a result, even if there is some unevenness in the thickness of the insulating coating layer, the unevenness is absorbed and the pogo pin 26 can be reliably inserted into the lower support hole portion 35B so that it can be contacted reliably.

  As described above, the pogo pin 26 is reliably supported by the support hole 35 by reliably contacting the vicinity of the end portion of the pogo pin 26 with the upper support hole portion 35A and the lower support hole portion 35B. In addition, the pogo pin 26 and the support hole 35 are usually insulated by an insulating coating layer, but may be energized like a grounding (GND) pogo pin. In this case, the vicinity of the end of the pogo pin 26 and the upper support hole 35A and the lower support hole 35B are reliably in contact with each other, so that the electrical connection can be reliably established.

  On the lower surface of the lower housing portion 39, a recess 39A having the same size and the same depth (thickness) as the lower contact plate 40 is formed. The lower housing portion 39 is provided with an insulating coating layer on other portions except the upper side surface and the lower side surface.

  The lower contact plate 40 is a sheet-like insulating resin material that covers the lower surface of the lower housing portion 39. The lower contact plate 40 is fitted into a recess 39A on the lower surface of the lower housing part 39 to cover the lower support hole 35B of the lower housing part 39. The lower contact plate 40 is provided with through holes 40 </ b> A at positions corresponding to the lower support holes 35 </ b> B of the lower housing part 39. Each pogo pin 26 is provided with a lower contact pin protruding from each through hole 40A, and is in contact with a pogo pin seat 42 of a wiring board 28 described later.

  The wiring board 28 is a wiring board connected to a tester that exchanges test electrical signals and detection signals with the device under test 22 via the pogo pins 26 for processing. As with the above-described conventional inspection socket, the wiring board 28 is provided with a pogo pin seat 42 and a GND solid 43 on the upper surface thereof in contact with the pogo pin 26. The guide plate 24 and the housing 27 are connected to the GND solid 43 and kept at the GND potential. As a result, the guide plate 24 and the housing 27 are electrically stable and a good test can be performed.

  The usage mode of the inspection socket 21 configured as described above is the same as that of the conventional inspection socket.

  And in the test | inspection socket 21 of this embodiment, the material of the housing 27 is aluminum and an insulating film is hard alumite plating. When hard alumite plating is applied to the support hole 35 of the housing 27, it is applied separately to the upper housing portion 37 and the lower housing portion 39. At this time, since the upper support hole 35A of the upper housing part 37 and the lower support hole 35B of the lower housing part 39 are both tapered, the plating solution easily enters the taper, so that the plating is reliably performed. A layer can be formed.

  At this time, since the upper support hole portion 35A and the lower support hole portion 35B are tapered, the pogo pin 26 can be easily and reliably attached to the support hole 35 even if the plating layer has uneven thickness. it can.

  Since the middle portion of the support hole 35 is inflated and is not in contact with the pogo pin 26, it can be reliably insulated. On the other hand, when it is desired to make an electrical connection, the support hole 35 is reliably contacted in an annular shape in the vicinity of the upper and lower ends of the pogo pin 26, so that the electrical connection can be made reliably.

  Since the material of the upper housing part 37 and the lower housing part 39 is aluminum having conductivity, it is possible to form a fine support hole 35 that can reliably support the thin pogo pin 26 corresponding to the miniaturization of the pogo pin 26. Further, the upper housing portion 37 and the lower housing portion 39 are formed of conductive aluminum, and the upper housing portion 37 and the lower housing portion 39 are connected to the ground pattern of the wiring board 28 and kept at the GND potential. Therefore, when it is desired to directly connect the pogo pin 26 to the GND potential, the pogo pin 26 can be surely kept at the GND potential by bringing the pogo pin 26 into direct contact with one or both of the upper housing portion 37 and the lower housing portion 39.

[Second Embodiment]
Next, an inspection socket according to a second embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 9 is a cross-sectional view showing the main part of the inspection socket according to the second embodiment of the present invention, and FIG. 10 is a partial cross-sectional view showing the main part of the inspection socket according to the second embodiment of the present invention.

  The overall configuration of the inspection socket of this embodiment is the same as that of the inspection socket 21 of the first embodiment, and the housing portion is different. For this reason, the housing which is the difference between the two will be described here.

  The inspection socket according to the present embodiment has a housing divided into three parts. In the first embodiment, the housing 27 of the inspection socket 21 is divided into the upper housing portion 37 and the lower housing portion 39, but in this embodiment, as shown in FIGS. The upper housing part 46, the intermediate housing part 47, and the lower housing part 48 were divided into three parts. That is, the housing 45 is configured by superimposing three plate members (an upper housing portion 46, an intermediate housing portion 47, and a lower housing portion 48). The upper housing part 46 and the lower housing part 48 are made of aluminum. Similar to the upper housing part 46 and the lower housing part 48, the intermediate housing part 47 may be made of aluminum or synthetic resin.

  The support hole 49 is formed through three plate members (upper housing portion 46, intermediate housing portion 47, and lower housing portion 48). Thereby, the support hole 49 is divided into three parts by the upper housing part 46, the intermediate housing part 47, and the lower housing part 48. That is, the support holes 49 are formed in an upper support hole portion 49A located in the upper housing portion 46, an intermediate support hole portion 49B located in the intermediate housing portion 47, and a lower support hole portion 49C located in the lower housing portion 48. Divided into three.

  Similarly to the upper support hole 35A of the upper housing part 37 of the first embodiment, the upper support hole 49A of the upper housing part 46 is formed in a conical shape with a taper so as to spread downward.

  The intermediate support hole portion 49 </ b> B of the intermediate housing portion 47 is set to have an inner diameter larger than the outer diameter of the pogo pin 26. That is, the inner diameter of the intermediate support hole portion 49B of the intermediate housing portion 47 which is the other plate material excluding the upper housing portion 46 and the lower housing portion 48 which are the upper and lower end plate materials is set larger than the outer diameter of the pogo pin 26. Has been. Specifically, the inner diameter of the intermediate support hole 49B is set to the larger diameter of the upper support hole 49A and the lower support hole 49C provided with the taper of the upper housing part 46 and the lower housing part 48 (upper support hole). The diameter is set equal to or larger than the diameter of the lower end portion of the portion 49A and the diameter of the upper end portion of the lower support hole portion 49C. Thus, the support hole 49 constituted by the upper support hole portion 49A, the intermediate support hole portion 49B, and the lower support hole portion 49C is formed by expanding the central portion thereof. When there is a sufficient gap between the inner diameter of the intermediate support hole 49B and the outer diameter of the pogo pin 26, the inner diameter of the intermediate support hole 49B is set to a smaller diameter than the larger diameter of the lower support hole 49C. May be.

  The plated layer is applied to at least the upper support hole 49A and the lower support hole 49C having a taper. Since the intermediate support hole 49B does not contact the pogo pin 26, the plating layer may or may not be formed.

  Also in this case, the same operation and effect as the first embodiment can be obtained.

  Further, in this embodiment, since it is not necessary to form a plating layer in the intermediate support hole 49B, the plating process work can be omitted by omitting the formation of the plating layer in the intermediate support hole 49B. Reduction can be achieved.

[Third Embodiment]
Next, an inspection socket according to a third embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 11 is a cross-sectional view showing the main part of the inspection socket according to the third embodiment of the present invention, and FIG. 12 is a partial cross-sectional view showing the main part of the inspection socket according to the third embodiment of the present invention.

  The overall configuration of the inspection socket of this embodiment is the same as that of the inspection socket 21 of the first embodiment, and the housing portion is different. For this reason, here, as in the second embodiment, the housing which is the difference between the two will be described.

  The inspection socket according to the present embodiment has a housing divided into four parts. In the first embodiment, the housing 27 of the inspection socket 21 is divided into an upper housing part 37 and a lower housing part 39. In the second embodiment, the housing 45 is divided into an upper housing part 46 and an intermediate housing part. Although the housing portion 47 and the lower housing portion 48 are divided into three, in this embodiment, as shown in FIGS. 11 and 12, the housing 51 is divided into an upper housing portion 52, an intermediate upper housing portion 53, and an intermediate lower portion. The housing part 54 and the lower housing part 55 were divided into four parts. That is, the housing 51 is configured by stacking four plate members (an upper housing portion 52, an intermediate upper housing portion 53, an intermediate lower housing portion 54, and a lower housing portion 55). The upper housing part 52 and the lower housing part 55 are made of aluminum. The middle upper housing portion 53 and the middle lower housing portion 54 may be made of aluminum or may be made of synthetic resin, like the upper housing portion 52 and the lower housing portion 55.

  The support hole 56 is formed through the four plate materials. Thereby, the support hole 56 is divided into four parts by the upper housing part 52, the intermediate upper housing part 53, the intermediate lower housing part 54, and the lower housing part 55. In other words, the support hole 56 is formed of an upper support hole portion 56A located in the upper housing portion 52, an intermediate upper support hole portion 56B located in the intermediate upper housing portion 53, and an intermediate lower support portion located in the intermediate lower housing portion 54. The hole portion 56C and the lower support hole portion 56D located in the lower housing portion 55 are divided into four.

  Similarly to the upper support hole portion 35A of the upper housing portion 37 of the first embodiment, the upper support hole portion 56A of the upper housing portion 52 is formed in a conical shape with a taper so as to spread downward.

  Both the intermediate upper support hole portion 56B located in the intermediate upper housing portion 53 and the intermediate lower support hole portion 56C located in the intermediate lower housing portion 54 are set to have an inner diameter larger than the outer diameter of the pogo pin 26. Yes. That is, it is located in the middle upper support hole portion 56B and the middle lower housing portion 54 which are located in the middle upper housing portion 53 which is the other plate material excluding the upper housing portion 52 and the lower housing portion 55 which are plate materials at the upper and lower end portions. The inner diameter of the intermediate lower support hole portion 56 </ b> C is set larger than the outer diameter of the pogo pin 26. More specifically, the inner upper support hole portion 56B and the intermediate lower support hole portion 56C have the inner diameters equal to the upper support hole portion 56A and the lower support hole portion 56D in which the upper housing portion 52 and the lower housing portion 55 are tapered. Is set equal to or larger than the larger diameter (the diameter of the lower end of the upper support hole 56A and the diameter of the upper end of the lower support hole 56D). Thereby, the support hole 56 constituted by the upper support hole portion 56A, the intermediate upper support hole portion 56B, the intermediate lower support hole portion 56C, and the lower support hole portion 56D is formed by expanding the central portion thereof. ing. When there is a sufficient gap between the inner diameters of the intermediate upper support hole part 56B and the intermediate lower support hole part 56C and the outer diameter of the pogo pin 26, the inner diameters of the intermediate upper support hole part 56B and the intermediate lower support hole part 56C. May be set to a diameter smaller than the larger diameter of the upper support hole portion 56A and the lower support hole portion 56D.

  The plated layer is applied to at least the upper support hole 49A and the lower support hole 49C having a taper. Since the intermediate support hole 49B does not contact the pogo pin 26, the plating layer may or may not be formed.

  The plated layer is applied to at least the upper support hole 56A and the lower support hole 56D having a taper. Since the intermediate upper support hole 56B and the intermediate lower support hole 56C do not contact the pogo pin 26, the plating layer may or may not be formed.

  Also in this case, the same operation and effect as the second embodiment can be obtained.

It is sectional drawing which shows the principal part of the test | inspection socket which concerns on 1st Embodiment of this invention. It is side surface sectional drawing which shows the conventional test | inspection socket. It is side surface sectional drawing which shows the conventional test | inspection socket. It is a perspective view showing the inspection socket concerning a 1st embodiment of the present invention. It is a top view which shows the test | inspection socket which concerns on 1st Embodiment of this invention. It is a partially broken perspective view which shows the test | inspection socket which concerns on 1st Embodiment of this invention. It is side surface sectional drawing which shows the test | inspection socket which concerns on 1st Embodiment of this invention. It is a fragmentary sectional view which shows the principal part of the test | inspection socket which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the principal part of the test | inspection socket which concerns on 2nd Embodiment of this invention. It is a fragmentary sectional view which shows the principal part of the test | inspection socket which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows the principal part of the test | inspection socket which concerns on 3rd Embodiment of this invention. It is a fragmentary sectional view which shows the principal part of the test | inspection socket which concerns on 3rd Embodiment of this invention.

Explanation of symbols

  21: Inspection socket, 22: Inspected object, 23: Guide opening, 24: Guide plate, 25: Bump electrode, 26: Pogo pin, 27: Housing, 28: Wiring board, 31: Fixing screw, 32: Taper, 34: Spring, 35: support hole, 35A: upper support hole, 35B: lower support hole, 37: upper housing part, 38: upper contact plate, 39: lower housing part, 40: lower contact plate, 45: Housing: 46: Upper housing part, 47: Intermediate housing part, 48: Lower housing part, 49: Support hole, 49A: Upper support hole part, 49B: Intermediate support hole part, 49C: Lower support hole part, 51: Housing: 52: Upper housing part, 53: Middle upper housing part, 54: Middle lower housing part, 55: Lower housing part, 56: Support hole, 56A: Upper Supporting hole, 56B: middle upper support hole, 56C: intermediate lower support hole, 56D: lower support hole.

Claims (8)

By placing the object to be inspected, an inspection socket for performing an inspection by electrically connecting the electrode of the object to be inspected and the pogo pin,
A housing for supporting the pogo pin;
The housing is configured by stacking a plurality of plate materials, and provided with a support hole that supports the pogo pin through the plurality of plate materials,
The inspection socket, wherein the support holes provided in at least the upper and lower end plate materials among the plurality of plate materials are through holes provided with a taper. The inspection socket according to claim 1,
The plurality of plate members are composed of two upper and lower plates, the support holes are divided by the upper and lower plate members, and each support hole portion of the upper and lower plate members is formed by providing a taper that opens in a direction facing each other, and inflating the central portion. Inspection socket characterized by that. The inspection socket according to claim 1,
The inner diameter of the support hole portion of the other plate material excluding the upper and lower end portions of the plurality of plate materials is equal to or larger than the larger diameter of the support hole having the tapered upper and lower end portions. And inspection socket. The inspection socket according to claim 1,
The inspection socket characterized in that a material of the plurality of plate members of the housing is metal. The inspection socket according to claim 1,
An inspection socket, wherein an insulation treatment is applied to inner walls of support holes provided in a plurality of plate members of the housing. The inspection socket according to claim 1,
The inspection socket characterized in that, among the plurality of plate members of the housing, the plate members at the upper and lower ends are made of metal, and the other plate members are insulators. The inspection socket according to claim 1,
The inspection socket is characterized in that the plate of the housing is connected to the ground pattern of the wiring board and kept at the GND potential. By placing the object to be inspected, an inspection socket for performing an inspection by electrically connecting the electrode of the object to be inspected and the pogo pin,
A guide plate having a guide opening into which the object to be inspected is inserted;
A pogo pin that electrically connects the electrode of the device under test and the electrode of the wiring board;
A housing that supports the pogo pin;
A wiring board for exchanging electrical signals and test signals for testing with the test object via the pogo pins;
The housing is configured by stacking a plurality of plate materials, and provided with a support hole that supports the pogo pin through the plurality of plate materials,
The inspection socket, wherein the support holes of at least the upper and lower end plate members among the plurality of plate members are through holes provided with a taper.

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