JP2009103303A - Fluid device connecting structure and fluid device unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simply and reliably couple first and second fluid devices. <P>SOLUTION: This fluid device connecting structure 1 is arranged to couple first and second connection parts 4 and 5 by using a coupling member 7, by arranging a resin seal member 6 in seal grooves 4a and 5a formed in the first and second connection parts 4 and 5 of the first and second fluid devices 2 and 3. The first connection part 4 has a first mounting groove 4f for attaching a jig 15 and a first fitting groove 4c provided between the first mounting groove 4f and an end face of the first connection part 4 and fitting the coupling member 7. The second connection part 5 has a second mounting groove 5f for attaching the jig 15 and a second fitting groove provided between the second mounting groove 5f and an end face of the second connection part 5 and fitting the coupling member 7. The coupling member 7 is arranged by engaging a plurality of split members 8 and 9 of arranging first projecting portions 8j and 9j in contact with an end-face-side inside surface 4d of the first fitting groove 4c and second projecting portions 8k and 9k in contact with an end-face-side inside surface of the second fitting groove 5c, at a predetermined interval. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fluid device connection structure and a fluid device unit that connect first and second fluid devices using a connecting member.

  Conventionally, for chemical control in semiconductor manufacturing processes and liquid crystal manufacturing processes, valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, piping such as joint blocks and flow path blocks Fluid devices such as blocks are used. In recent years, in order to make the apparatus compact, connecting portions of these fluid devices are directly connected using a connecting member to form a unit.

FIG. 45 is a cross-sectional view of a conventional fluid device connection structure 1100.
In the conventional fluid device connection structure 1100, seal grooves 1105 and 1106 are formed in the connection portions 1103 and 1104 of the first fluid device 1101 and the second fluid device 1102, and a seal member 1107 is mounted between the seal grooves 1105 and 1106. In this state, the connecting member 1108 is attached to the outer periphery of the connection portion of the connection portions 1103 and 1104.

  The connecting member 1108 includes a cylindrical nut 1109 and a split ring 1110. The cylindrical nut 1109 has a cylindrical shape that opens to one side. An insertion hole 1109a is formed in the closing surface so that the locking convex portion 1104a of the connection portion 1104 can be inserted. The split ring 1110 has a ring shape in which the inner peripheral surface is in contact with the outer peripheral surface of the connecting portion 1104 and the outer peripheral surface is in contact with the inner peripheral surface of the cylindrical nut 1109 so that it can be attached to the outer peripheral surface of the connecting portion 1104. It is divided into multiple parts.

  In such a connecting member 1108, after inserting the end of the connection portion 1104 of the second fluid device 1102 into the insertion hole 1109 a of the cylindrical nut 1109, the connection portion 1104 is exposed to the outside as shown by a dashed line in the figure. Thus, the cylindrical nut 1109 is shifted to the second fluid device 1102 side, and the split ring 1110 is attached to the outer peripheral surface of the connecting portion 1104. Thereafter, as shown by a solid line in the figure, the cylindrical nut 1109 is slid toward the first fluid device 1101, and the female thread portion 1109 b formed on the inner peripheral surface of the cylindrical nut 1109 is connected to the connection portion 1103 of the first fluid device 1101. And screwed into a male threaded portion 1103a formed on the outer peripheral surface of the. The cylindrical nut 1109 is screwed into the connection portion 1103 until the split ring 1110 hits the locking projection 1104a of the connection portion 1104. By this screw feed, the seal member 1107 is mounted in the seal grooves 1105 and 1106 and seals the connection portions of the connection portions 1103 and 1104 (see, for example, Patent Document 1).

JP 2006-64080 A

  However, the conventional fluid device connection structure 1100 requires a space for moving the cylindrical nut 1109 and a space for screwing the cylindrical nut 1109 into the connection portion 1103 in order to mount the split ring 1110. It takes time and work space to connect each other. Therefore, when the conventional fluid device connection structure 1100 is applied to, for example, a semiconductor manufacturing apparatus in which a large number of fluid devices are arranged in a complicated manner, a space for shifting the cylindrical nut 1109 or tightening the connection portion 1103 cannot be secured. It takes time and effort to properly tighten the cylindrical nut 1109 to the connection portion 1103 so as to obtain a predetermined sealing force.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a fluid device connection structure and a fluid device unit capable of easily and reliably connecting the first and second fluid devices. To do.

The fluid device connection structure and the fluid device unit according to the present invention are configured as follows.
(1) The first fluid device and the second fluid device each include a first connection portion and a second connection portion made of resin, and around a flow path that opens at end surfaces of the first and second connection portions. In the fluid device connection structure in which a seal groove is formed, a resin seal member is disposed between the seal grooves, and the first connection portion and the second connection portion are connected using a resin connection member. The first connecting portion is provided between a first mounting groove formed on an outer peripheral surface of the first connecting portion, and between the first mounting groove and an end surface of the first connecting portion, and the connecting member is mounted. A second mounting groove formed on an outer peripheral surface of the second connecting portion; and the second mounting groove and an end surface of the second connecting portion. A second mounting groove that is provided between the first mounting groove and the second mounting groove. The second mounting groove is provided on the inner surface of the first mounting groove. A first projection which is in contact, the second projections abutting against the end face side in the side surface of the second mounting groove in which is engaged a plurality of divided pieces which are provided at predetermined intervals.

(2) In the invention described in (1), the end surface side inner surface of the first mounting groove, the end surface side inner surface of the first mounting groove, the end surface side inner surface of the second mounting groove, and the second The end surface side inner surface of the mounting groove is parallel to the end surface of the first connection portion and the end surface of the second connection portion, respectively.

(3) In the invention described in (1) or (2), the first mounting groove and the second mounting groove have a connection-side taper formed on the back side from the opening of the inner surface on the end surface side, The connecting member has a connecting side taper corresponding to the connecting portion side taper provided at the tip of the first protrusion and the second protrusion, and the sealing force of the first and second connecting parts is reduced. In this case, by pulling the plurality of divided pieces closer to each other, the connecting side taper is slid along the connecting portion side taper to generate and maintain a force for pulling the first and second connecting portions. It has a paring member.
The attracting member may be separate from the first and second divided pieces, or may be integrated with the first or second divided piece.

(4) In the invention according to any one of (1) to (3), the connection member includes a first divided piece and a second divided piece, and the first divided piece and the second divided piece. A rotation connecting portion that rotatably connects one end of the piece, a locking claw provided on the first divided piece so as to be elastically deformable, and provided on the second divided piece, wherein the locking claw is elastically deformed. And an insertion hole which is restored after being inserted in the state and is locked to the outer periphery of the opening.

(5) In the fluid device connection structure described in (4), the rotation coupling portion includes an engagement protrusion and an engagement recess provided on the first divided piece and the second divided piece, respectively. When the engagement protrusion and the engagement recess are fitted and engaged with each other, the engagement protrusion is locked to the inner wall of the engagement recess in a different direction.

(6) In the invention described in (4), the rotation connecting portion is provided with a rotation shaft on the first divided piece, and a U-shaped rotation engagement portion that engages with the rotation shaft on the second divided piece. The rotation engaging portion is open on the opposite side to the surface where the second divided piece abuts on the first divided piece.

(7) In the invention according to any one of (4) to (6), the connection member is in the initial state in which the connection member is attached to the first and second connection portions. There is a gap between the divided pieces, and the attracting member connects the first and second divided pieces so as to close the gap.

(8) In the invention described in (3), the connection member is provided with a mounting portion on which the attraction member is mounted on the split piece, and the attraction member is mounted on the mounting portion in a non-rotatable manner. A clip member; a nut member screwed to the clip member; and a rotation stopping mechanism that prevents the nut member from rotating with respect to the clip member.

(9) In the invention described in (3), the attraction member is rotatably attached to a connecting portion of the divided pieces, and when the attraction member is rotated, one of the divided pieces is attached to the other of the divided pieces. The abutting member is provided with a cam portion that receives a repulsive force from the one divided piece after being brought into contact with the divided piece.

(10) In the invention described in (3), the attraction member is rotatably attached to a connecting portion of the divided pieces, and the connecting member is configured to rotate one of the attraction members when the attraction member is rotated. A cam portion that receives a repulsive force from the attraction member after the divided piece comes into contact with the other divided piece is provided on the one divided piece.

(11) In the invention according to any one of (1) to (10), in the first and second connection portions, the seal groove includes an annular unevenness, and the seal member includes the annular unevenness. An annular ridge is press-fitted into the shape.

(12) In the invention according to (11), the first and second connection portions include a convex portion projecting outward on an outer periphery of the end surface, and the seal member is a main body portion on which the annular convex and concave stripes are formed. And an overhanging portion projecting outward from the outer peripheral surface of the main body, and a gripping portion that is connected to the outer edge of the overhanging portion and hooked to the convex portion is provided inward. Have.

(13) A fluid device unit, wherein a plurality of fluid devices are connected using the fluid device connection structure according to any one of (1) to (12).

  In the fluid device connection structure having the above-described configuration, for example, a jig is attached to the first and second attachment grooves, and the first and second connection portions are the end face side inner surface of the first attachment groove and the end face of the second attachment groove. A force is applied in a direction in which the first and second connection portions are brought closer to each other until the width of the side inner surface reaches the width between the first protrusion and the second protrusion of the connecting member. As a result, the seal member is mounted in the seal grooves of the first and second connection portions, and a predetermined sealing force is obtained. In this state, the plurality of divided pieces are arranged around the first and second connecting portions and engaged so that the first and second projecting portions abut on the inner surfaces of the first and second mounting grooves. The ring-shaped connecting member is mounted around the first and second connecting portions. Thereby, even if a jig | tool is removed from the 1st and 2nd attachment groove | channel, the connection state of a 1st and 2nd connection part is maintained by a connection member. Therefore, according to the fluid device connection structure of the present invention, the first and second fluid devices can be connected easily and reliably.

  In addition, the fluid device connection structure of the present invention includes an end surface side inner surface of the first mounting groove, an end surface side inner surface of the first mounting groove, an end surface side inner surface of the second mounting groove, and an end surface side of the second mounting groove. Since the inner side surfaces are parallel to the end surface of the first connection portion and the end surface of the second connection portion, respectively, when the first and second connection portions are drawn by a jig, When connecting the second connection part, the end face of the first connection part and the end face of the second connection part can be pressed substantially uniformly, and the seal member can be uniformly sealed in the circumferential direction.

  In the fluid device connection structure of the present invention, the first and second connection portions and the seal member are made of resin. Therefore, when the first and second connection portions are creep deformed, the sealing force may be reduced. In this case, the plurality of divided pieces are brought close to each other by the attracting member. Thereby, the connection side taper of the connection member slides along the connection part side taper of the first and second connection parts, generates a force that draws the first and second connection parts, and improves the sealing force. Here, the plurality of divided pieces tend to be separated from each other by the repulsive force generated between the first and second connecting portions and the seal member. However, since the attracting member maintains the engaged state of the plurality of divided pieces, the connecting member can maintain the state in which the attracting force is generated. Therefore, according to the fluid device connection structure of the present invention, it is possible to easily improve the sealing force even when the first and second connection portions are creep-deformed.

  Further, in the fluid device connection structure of the present invention, the connecting member is composed of the first divided piece and the second divided piece, and the rotary connection connects the one end of the first divided piece and the second divided piece so as to be rotatable. Part, a locking claw provided on the first divided piece so as to be elastically deformable, and provided on the second divided piece, the locking claw being elastically deformed and then restored and locked to the outer periphery of the opening An insertion hole. Therefore, the fluid device connection structure of the present invention is configured to rotate the first divided piece with respect to the second divided piece even when the fluid device is complicated and there is only a narrow space between the fluid devices. The connecting member can be easily attached to the connecting portion of the first and second connecting portions simply by pushing the claw into the insertion hole.

  In the fluid device connection structure of the present invention, the rotation connecting portion is configured by an engagement protrusion and an engagement recess provided on the first divided piece and the second divided piece, respectively. When they are fitted and engaged with each other, the engaging protrusions are locked to the inner wall of the engaging recess in different directions. Therefore, according to the fluid device connection structure of the present invention, for example, when the locking claw is elastically deformed and inserted into the insertion hole, or something collides with the connecting member attached to the first and second connection portions. Even if forces in different directions act on the first and second divided pieces, the first and second divided pieces are not separated.

  Moreover, the fluid apparatus connection structure of this invention has a clearance gap between the 1st and 2nd division | segmentation piece at the time of the initial state in which the connection member was attached to the 1st and 2nd connection part. The attracting member generates a force that draws the first and second connecting portions closer to the first and second divided pieces so as to close the gap. Therefore, according to the fluid device connection structure of the present invention, the sealing force can be easily improved by the attracting member.

  In the fluid device connection structure of the present invention, the rotation connecting portion is configured by providing the first divided piece with a rotation shaft and the second divided piece with a U-shaped rotation engagement portion that engages with the rotation shaft. The rotation engaging portion opens on the opposite side to the surface where the second divided piece comes into contact with the first divided piece. Therefore, according to the fluid device connection structure of the present invention, even if a force in a different direction acts on the first and second divided pieces, for example, when something collides with the connecting member, the first and second divided portions The pieces do not separate.

  Further, in the fluid device connection structure of the present invention, the connecting member is provided with a mounting portion on which the attraction member is mounted on the split piece, and the attraction member is mounted on the mounting portion in a non-rotatable manner. A nut member that is screwed to the clip member, and a rotation stop mechanism that prevents the nut member from rotating relative to the clip member. Therefore, in the fluid device connection structure of the present invention, even when the first and second connection portions and the connecting member are creep-deformed, the rotation preventing mechanism prevents the rotation of the nut member. The connection state can be maintained.

  In the fluid device connecting structure of the present invention, when the attracting member is rotatably attached to the connecting portion of the split pieces, when the attracting member is rotated, one split piece is brought into contact with the other split piece. After the contact, the attracting member is provided with a cam portion that receives a repulsive force from one of the divided pieces. Therefore, in the fluid device connection structure of the present invention, even if the first and second connection portions and the connecting member receive a force in the direction of separating the split pieces due to thermal deformation, fluid pressure, or the like, the attracting member The repulsive force applied to the cam mechanism by the divided pieces is prevented from reversing from the attracting force generation position to the initial position, and the state where the sealing force is improved can be maintained.

  Further, in the fluid device connection structure of the present invention, the attracting member is rotatably attached to the connecting portion of the split piece. When the attracting member rotates the attracting member, one split piece is the other of the split pieces. A cam portion that receives a repulsive force from the attracting member after contacting the divided piece is provided on one of the divided pieces. For this reason, the fluid device connection structure of the present invention is such that the first and second connection portions and the connecting member receive the force in the direction of separating the divided pieces due to thermal deformation, fluid pressure, etc. By the repulsive force generated between the first and second positions, the reversal from the attracting force generation position to the initial position is prevented, and the state in which the sealing force is improved can be maintained.

  In addition, the fluid device connection structure of the present invention requires a large force (for example, 200 N or more) in order to press-fit the annular ridges of the first and second connection portions and the annular ridges of the seal member. In this respect, since the fluid device connection structure of the present invention applies a force in a direction to bring the first and second connection portions closer to each other using a jig, it is possible to easily and surely press-fit the seal member into the seal groove. it can.

  In the fluid device connection structure of the present invention, the first and second connection portions are connected in a state where the hook portion of the grip portion is hooked on the convex portion of the first or second connection portion to prevent the seal member from falling off. Therefore, it is possible to improve the handleability of the seal member and reduce the labor involved in connecting the first and second fluid devices.

  Moreover, since the fluid apparatus unit of this invention connects a some fluid apparatus using the said fluid apparatus connection structure, each fluid apparatus can be connected easily and reliably.

  Next, an embodiment of a fluid device connection structure and a fluid device unit according to the present invention will be described with reference to the drawings.

(First embodiment)
<Overall configuration of fluid equipment unit>
FIG. 13 is an external perspective view of a fluid device unit 50 using the fluid device connection structure 1 of the present invention.
The fluid device connection structure 1 of the first embodiment is applied to, for example, a fluid device unit 50 used in a semiconductor manufacturing process. The fluid device unit 50 is disposed, for example, on the upstream side of a processing chamber used in a semiconductor manufacturing process, and controls the flow rate of the chemical solution supplied to the wafer. The fluid device unit 50 uses the fluid device connection structure 1 to be described later, branch pipes 61A and 61B, joints 62A and 62B, air operated valves 63A and 63B, and flow meters 64A and 64B, which are examples of “fluid devices”. The manual valves 65A and 65B and the joints 66A and 66B are connected. The fluid device unit 50 is attached to attachment shafts 53, 53 installed on two support columns 52, 52 erected on the attachment plate 51, and the fluid devices are arranged three-dimensionally.

  Such a fluid device unit 50 diverts the chemical liquid flowing from the joint 62A to the joint 62B via the branch pipes 61A and 61B to the air operated valves 63A and 63B from the branch pipes 61A and 61B, and the flow meters 64A and 64B. After passing, the chemicals are output from the joints 66A and 66B via the manual valves 65A and 65B, respectively.

  The fluid device unit 50 may use a highly corrosive chemical solution. Therefore, the fluid devices constituting the fluid device unit 50, that is, the air operated valves 63A and 63B, the flow meters 64A and 64B, the manual valves 65A and 65B, the branch pipes 61A and 61B, and the joints 62A, 62B, 66A, and 66B, Except for parts that need to be made of metal or rubber functionally, PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PTFE (polytetrafluoroethylene), PP (polypropylene), PPS (polyphenylene sulfide), etc. Use parts made of resin with high corrosion resistance.

<Overall configuration of fluid equipment connection structure>
FIG. 1 is a cross-sectional view of a fluid device connection structure 1 according to a first embodiment of the present invention. FIG. 2 is an exploded perspective view of the fluid device connection structure 1 shown in FIG.
In the fluid device connection structure 1, a resin seal member 6 is disposed between the first and second connection portions 4 and 5 of the first and second fluid devices 2 and 3, and the first and second fluid device connection structures 1 are connected to each other using the connecting member 7. The 2nd connection parts 4 and 5 are connected. The first and second fluid devices 2 and 3 include branch pipes 61A and 61B, joints 62A and 62B, air operated valves 63A and 63B, flow meters 64A and 64B, manual valves 65A and 65B, joints shown in FIG. It corresponds to 66A and 66B.

<Configuration of first and second connection portions>
FIG. 5 is an exploded sectional view of the first and second connecting portions 4 and 5 and the seal member 6 shown in FIG.
The first and second connection parts 4 and 5 are made of a heat-resistant or corrosion-resistant fluororesin such as PTFE. The first and second connection parts 4 and 5 have the same structure.

  Specifically, the first and second connection parts 4 and 5 are cylindrical, and the flow paths 4h and 5h are open at the end faces. Seal grooves 4a and 5a are formed on the end surfaces of the first and second connection portions 4 and 5 around the flow path opening. In the seal grooves 4a and 5a, annular protrusions 4b and 5b, which are examples of “annular uneven strips”, are provided so as to protrude concentrically with the flow paths 4h and 5h. The first and second connecting portions 4 and 5 are provided with protruding portions 4g and 5g projecting outward along the outer periphery of the end surface.

  On the outer peripheral surfaces of the first and second connection portions 4 and 5, first and second attachment grooves 4f and 5f to which a jig 15 described later is attached are formed in an annular shape, respectively. The inner surface 4i, 5i on the end face side of the first and second mounting grooves 4f, 5f is formed in parallel to the end faces of the first and second connection portions 4, 5, and is perpendicular to the axis of the flow paths 4h, 5h. Form a flat shape.

  The first and second connection portions 4 and 5 are provided between the first and second mounting grooves 4f and 5f and the end surfaces of the first and second connection portions 4 and 5, respectively. Are each formed in an annular shape. The first and second mounting grooves 4c and 5c are formed to a depth corresponding to the annular protrusions 4b and 5b. The end surface side inner surfaces 4d and 5d of the first and second mounting grooves 4c and 5c are formed in parallel with the end surfaces of the first and second connection portions 4 and 5, and are perpendicular to the axes of the flow paths 4h and 5h. Form a flat shape. The first and second mounting grooves 4c and 5c are formed with connecting portion side tapers 4e and 5e on the back side from the openings of the end surface side inner side surfaces 4d and 5d. The connecting portion side tapers 4e and 5e are formed so as to narrow the groove widths of the first and second mounting grooves 4c and 5c toward the back side of the first and second mounting grooves 4c and 5c.

<Seal member>
FIG. 3 is a plan view of the seal member 6 shown in FIG. 4 is a cross-sectional view of the seal member 6 shown in FIG.
The seal member 6 is made of a hard and corrosion-resistant resin such as PFA, and includes a main body portion 11, a grip portion 12, and an overhang portion 13.

  As shown in FIGS. 3 and 4, the main body 11 is formed in a short cylindrical shape. The main body 11 has annular grooves 11a and 11b (an example of an annular ridge) that fit into the annular protrusions 4b and 5b of the first and second connection parts 4 and 5 formed on both end surfaces, and has an H-shaped cross section. The cross section is line symmetrical. As shown in FIG. 5, the annular grooves 11 a and 11 b are formed so that the groove width is the same as or slightly larger than the width dimension of the annular protrusions 4 b and 5 b of the first and second connection portions 4 and 5. The annular grooves 11a and 11b are respectively provided with press-fitting allowances 11c and 11d on the inner inner wall and the outer inner wall on the back side from the opening. As shown in FIG. 5, the grooves on the back side from the openings of the annular grooves 11a and 11b. The width is smaller than the width dimension in the thickness direction of the annular protrusions 4b and 5b. As shown in FIG. 4, the seal member 6 is provided with an inclination on the inner peripheral surface and the outer peripheral surface so as to correspond to the inclination (see FIG. 5) provided at the bottom of the seal grooves 4a and 5a. When the annular protrusions 4b and 5b of the first and second connecting portions 4 and 5 are press-fitted into the annular grooves 11a and 11b, the width of the annular grooves 11a and 11b of the seal member 6 is widened to prevent the sealing force from being reduced. is doing.

  As shown in FIG. 3 and FIG. 4, an overhanging portion 13 protrudes outward on the outer peripheral surface of the seal member 6. The overhang portion 13 is formed in an annular shape along the outer peripheral surface of the main body portion 11. A plurality of gripping portions 12 are integrally connected to the outer edge portion of the overhang portion 13 with a predetermined interval. Each gripping portion 12 is provided with a hooking portion 12a that hooks and engages with the convex portions 4g and 5g of the first and second connecting portions 4 and 5 so as to protrude inward (toward the center).

<Connecting member>
6 is an external perspective view of the connecting member 7 shown in FIG. FIG. 7 is a side view showing an initial assembly state of the connecting member 7 shown in FIG.
As shown in FIG. 7, the connecting member 7 has a ring shape and is divided into a first divided piece 8 and a second divided piece 9. As shown in FIG. 6, the 1st division | segmentation piece 8 and the 2nd division | segmentation piece 9 are integrated by the connection strip | belt 14 which is thin and deformable. The first divided piece 8, the second divided piece 9 and the connecting band 14 are integrally formed by injection molding, cutting, or the like with a fluororesin having strength and corrosion resistance such as PVDF (polyvinylidene fluoride (vinylidene difluoride)). ing.

  As shown in FIG.6 and FIG.7, the 1st and 2nd division | segmentation pieces 8 and 9 make | form the block shape of a semicircular arc. The first and second divided pieces 8 and 9 are provided with extending portions 8a and 9a extending from one of end surfaces in contact with each other toward the right side (radial direction). Bolt holes 8b and 9b for fastening the attracting member 10 which is a fluorine resin screw are formed in the extending portions 8a and 9a. The extending portion 8a is provided with a locking claw 8c protruding so as to be elastically deformable. The locking claw 8c has a thick tip 8d. The second divided piece 9 is formed with an insertion hole 9c through which the locking claw 8c is inserted. The insertion hole 9c is inserted so that the locking claw 8c is inserted while elastically deforming the distal end portion 8d. When the distal end portion 8d is restored by passing through the insertion hole 9c, the outer periphery of the opening is caught by the distal end portion 8d and engaged. Is provided.

  As shown in FIGS. 6 and 7, a first engagement protrusion 8 e and a first engagement recess 8 i are provided on the other end surface of the first divided piece 8 that contacts the second divided piece 9. Further, on the other end surface of the second divided piece 9 that contacts the first divided piece 8, a second engaging recessed portion 9 e into which the first engaging protrusion 8 e is fitted, and a second fitted into the first engaging recessed portion 8 i. An engagement protrusion 9d is provided.

  The first engaging recess 8 i is formed so as to extend in the radial direction of the first divided piece 8. The first engagement protrusion 8e is provided in a direction protruding from the end face of the first divided piece 8 (a direction orthogonal to the direction in which the first engagement recess 8i is formed). Further, the second engaging protrusion 9 d is provided so that the tip end portion extends in the radial direction of the second divided piece 9. The second engagement recess 9e is formed in a direction perpendicular to the end surface of the second divided piece 9 (a direction orthogonal to the tip of the second engagement protrusion 9d). Therefore, when the first and second engagement protrusions 8e and 9d are fitted in the first and second engagement recesses 8i and 9e, the inner walls of the first and second engagement recesses 8i and 9e are in different directions. (A direction in which the first and second divided pieces 8 and 9 are divided and a direction perpendicular to the direction in which the first and second divided pieces 8 and 9 are divided) is brought into contact and locked. The first and second engagement protrusions 8e and 9d and the first and second engagement recesses 8i and 9e constitute a rotation connecting portion 20.

  The first and second divided pieces 8 and 9 are formed with holding grooves 8f and 9f along the inner peripheral surface. The first protrusions 8j and 9j and the first protrusions 8j and 9j are formed on both ends of the first and second divided pieces 8 and 9, respectively. Two protrusions 8k and 9k are provided at a predetermined interval. Here, the “predetermined interval” refers to the end surface side inner side surface 4d of the first mounting groove 4c and the second mounting groove when the first and second connecting portions 4 and 5 are pulled together so as to obtain a predetermined sealing force. The distance from the end surface side inner surface 5d of 5c is said. The first protrusions 8j, 9j and the second protrusions 8k, 9k are formed with connecting side tapers 8h, 9h on the inner periphery of the tip, and in the radial direction of the first and second divided pieces 8, 9 on the inner side. Extending straight surfaces 8g, 9g are formed.

<Jig>
The fluid device connection structure 1 according to the first embodiment uses the jig 15 to pull the first and second connection portions 4 and 5 and attach the connecting member 7 around the first and second connection portions 4 and 5. To do. Therefore, the jig 15 will be described.

FIG. 8 is an external perspective view of the jig 15 used when assembling the components in the fluid device connection structure 1 shown in FIG.
The jig 15 is made of a rigid metal (stainless steel or the like) to prevent deformation when transmitting force. The jig 15 connects the two handles 16A and 16B at the intersection 17 so as to be rotatable. In the handles 16A and 16B, the tip ends are bent inward, and the support shafts 18 are arranged so as to be perpendicular to the rotation direction of the handles 16A and 16B. A supporting portion 19b of the pressure plate 19 is rotatably held on each spindle 18. The pressure plate 19 is formed with a U-shaped groove 19 a that is fitted into the first and second attachment grooves 4 f and 5 f of the first and second connection portions 4 and 5. The handles 16A and 16B are arranged so that the handles 16A and 16B have an intersection portion rather than a length between each support shaft 18 and the intersection portion 17 in order to facilitate the pulling of the first and second connection portions 4 and 5. The length from 17 to the gripping portion is increased.

<Connection method of fluid equipment>
Next, a method for connecting the first and second fluid devices 2 and 3 will be described.
First, as shown in FIG. 5, for example, the hook portion 12 a of the seal member 6 is hooked on the convex portion 5 g of the second connection portion 5, and the seal member 6 is mounted on the outer periphery of the second connection portion 5. Since the seal member 6 is provided with the grip portion 12 divided, the inner diameter formed by the grip portion 12 can be easily changed and can be easily attached to the second connection portion 5. In this case, the tip of the annular protrusion 5 b of the second connection portion 5 is lightly inserted into the annular groove 11 b of the seal member 6.

  Then, the first connection portion 4 is inserted into the grip portion 12 and pushed into the second connection portion 5 side along the grip portion 12. Thereby, the tip of the annular protrusion 4 b of the first connection portion 4 is lightly inserted into the annular groove 11 a of the seal member 6.

FIG. 9 is an assembly explanatory diagram of the fluid device connection structure 1 shown in FIG. 1 and particularly shows a drawing method using the jig 15.
As shown in FIG. 9, the first and second connecting portions 4 and 5 are inserted into the U-shaped grooves 19a and 19a formed in the pressure plates 19 and 19 of the jig 15, and the pressure plates 19 and 19 are inserted. It arrange | positions in the 1st and 2nd attachment grooves 4f and 5f. At this time, the width W1 between the end surface side inner surfaces 4d and 5d of the first and second mounting grooves 4c and 5c is equal to the width of the holding groove 8f of the connecting member 7 (first protrusion 8j and second protrusion 8k). The connecting member 7 cannot be attached to the first and second connecting portions 4 and 5 because it is wider than W2.

  Therefore, the handles 16A and 16B of the jig 15 are gripped, and the first and second connecting portions 4 and 5 are pressed and pulled in directions approaching each other as indicated by arrows in the drawing. At this time, the pressure plates 19 and 19 rotate with the support shafts 18 and 18 as base points. In addition, the end surface side inner surfaces 4i, 5i of the first and second mounting grooves 4f, 5f are parallel to the end surfaces of the first and second connection portions 4, 5 (perpendicular to the axes of the flow paths 4h, 5h). It is. For this reason, the first and second connection portions 4 and 5 are formed so that the pressure plates 19 and 19 have the end surface side inner side surfaces 4i and 5i of the first and second mounting grooves 4f and 5f along the axis of the flow paths 4h and 5h. Continue to be pressurized. As a result, the annular protrusions 4b and 5b of the first and second connecting portions 4 and 5 are uniformly pressed into the annular grooves 11a and 11b of the seal member 6 in the circumferential direction.

  When the width W1 is larger than the width W2, the amount by which the annular protrusions 4b and 5b are press-fitted into the annular grooves 11a and 11b is small, and a predetermined sealing force is not obtained. In this case, the jig 15 is gripped more strongly, and the first and second connection portions 4 and 5 are pulled closer together.

FIG. 10 is an assembly explanatory diagram of the fluid device connection structure 1 shown in FIG. 1, and particularly shows a mounting method of the connecting member 7.
When the first and second connection portions 4 and 5 are pulled together until the width W1 becomes equal to or less than the width W2, the annular protrusions 4b and 5b of the first and second connection portions 4 and 5 are formed in the annular grooves 11a and 11b of the seal member 6. A predetermined sealing force is obtained by press-fitting into the press-fitting allowances 11c and 11d. Therefore, the connecting member 7 is mounted around the first and second connection portions 4 and 5 with the jig 15 holding the first and second connection portions 4 and 5.

  The connecting member 7 has the first and second engaging protrusions 8e and 9d engaged with the first and second engaging recesses 8i and 9e to form a rotating connecting portion 20, and the rotating connecting portion 20 is a fulcrum. As described above, the first protrusions 8j and 9j and the second protrusions 8k and 9k of the first and second divided pieces 8 and 9 are connected to the first and second mounting grooves 4c and 5c of the first and second connection parts 4 and 5, respectively. The first and second divided pieces 8 and 9 are rotated so as to be fitted to each other. And the front-end | tip part 8d of the latching claw 8c provided in the 1st division | segmentation piece 8 abuts on the edge of the insertion hole 9c of the extension part 9a, and it is elastic so that the latching claw 8c may bend inside the insertion hole 9c. While being deformed, the locking claw 8c is inserted into the insertion hole 9c of the second divided piece 9 from the tip 8d. When the distal end portion 8d penetrates the insertion hole 9c, the locking claw 8c is restored to its original shape, and the distal end portion 8d is locked to the extending portion 9a of the second divided piece 9. As a result, in the connecting member 7, the locking claw 8 c does not come out of the insertion hole 9 c, and the first and second divided pieces 8 and 9 are engaged around the first and second connection portions 4 and 5.

  Here, the connecting member 7 is extended when the first and second divided pieces 8 and 9 are attached to the first and second connecting portions 4 and 5, or the locking claw 8c is elastically deformed in the insertion hole 9c. When engaging with the installation portion 9a, forces in different directions act on the first and second divided pieces 8,9. Since the connecting band 14 can be deformed to facilitate mounting of the connecting member 7, when forces in different directions act on the first and second divided pieces 8, 9, the first and second divided pieces It is difficult to engage 8, 9 in place.

  In this regard, the connecting member 7 is configured so that the first and second engaging protrusions 8e and 9d are connected to the first and second engaging recesses 8i and 8d on the end surfaces connected to the connecting bands 14 of the first and second divided pieces 8 and 9, respectively. It is engaged with the inner wall of 9e so as to be locked in a different direction. Therefore, the engaging portions of the first and second engaging protrusions 8e and 9d and the first and second engaging recesses 8i and 9e are subjected to forces in different directions on the first and second divided pieces 8 and 9. Also, the first and second divided pieces 8 and 9 are kept engaged at the fixed positions. Therefore, the connecting member 7 has the first and second divided pieces with the pivot connecting portion 20 engaged with the first and second engaging protrusions 8e and 9d and the first and second engaging recesses 8i and 9e as fulcrums. Opening and closing 8 and 9 and elastically deforming the locking claw 8c, it is inserted into the insertion hole 9c and engaged with the extending portion 9a, so that it can be easily attached to the first and second connection portions 4 and 5. .

  When the jig 15 is removed from the first and second mounting grooves 4f and 5f, a repulsive force generated by the press-fitting portions of the seal member 6 and the first and second connection portions 4 and 5 is generated, and the first and second connections are generated. The portions 4 and 5 try to move in directions away from each other along the axis of the connecting portion.

  As shown in FIG. 1, in the initial assembly, the connection member 7 has the connection side tapers 8 h and 9 h that are not in contact with the connection part side tapers 4 e and 5 e of the first and second connection parts 4 and 5. Only the straight surfaces 8g, 9g of the first and second protrusions 8j, 9j, 8k, 9k are formed in the first and second mounting grooves 4c, 5c parallel to the end surfaces of the first and second connection portions 4, 5. It is in contact with the end surface inner surfaces 4d and 5d. For this reason, at the time of initial assembly, the connecting member 7 has only the force in the direction of separating the connecting portions along the axis of the connecting portions of the first and second connecting portions 4, 5 to be the first and second projecting portions 8j, 9j. , 8k, 9k. The connecting member 7 receives the force acting from the first and second connection portions 4 and 5 at the first and second protrusions 8j, 9j, 8k, and 9k, and the connection state of the first and second connection portions 4 and 5 To maintain.

  At this time, the coupling member 7 has a predetermined gap S formed between the extending portions 8a and 9a as shown in FIG.

  Incidentally, the width W1 between the end surface side inner surfaces 4d and 5d of the first and second mounting grooves 4c and 5c is the width of the holding groove 8f of the connecting member 7 (between the first protrusion 8j and the second protrusion 8k). In the case where the first and second connecting portions 4 and 5 are pulled toward each other until the width becomes smaller than W2, the sealing force becomes excessive. However, in this case, the first and second connection grooves 4 and 5 are formed in the first and second mounting grooves by the repulsive force generated by the press-fitting portions of the seal member 6 and the first and second connection parts 4 and 5. The first and second connecting portions 4, 5 until the end surface side inner side surfaces 4 d, 5 d of 4 c, 5 c are brought into contact with and locked with the first and second protrusions 8 j, 9 j, 8 k, 9 k of the connecting member 7. It is pushed back along the axis line of the connecting portion, and the sealing force is automatically adjusted to an appropriate value.

  As described above, in the fluid device connection structure 1 of the first embodiment, the amount of the first and second connection portions 4 and 5 attracted by the first and second protrusions 8j, 9j, 8k, and 9k of the connecting member 7 is constant. Therefore, the first and second connection portions 4 and 5 can be easily and reliably positioned so as to be in an appropriate connection state.

  Here, for example, after the connecting member 7 is attached to the first and second connection portions 4 and 5, something collides with each other, or the first and second connection portions 4 and 5 are thermally expanded due to the temperature of the fluid. When the heat shrinkage is repeated, the forces in different directions act on the first and second divided pieces 8 and 9. The connecting member 7 engages the engaging claw 8c with the extending portion 9a and the first and second engaging protrusions 8e and 9d with the first and second engaging recesses 8i and 9e. The first and second divided pieces 8 and 9 are integrated with the rotation connecting portion 20. Therefore, the connecting member 7 includes an engaging portion for engaging the engaging claw 8c with the extending portion 9a, and a first and second engaging member that apply forces acting on the first and second divided pieces 8 and 9 in different directions. The mating projections 8e and 9d are received by the rotation connecting portion 20 that engages the first and second engaging recesses 8i and 9e, and the engagement state of the first and second divided pieces 8 and 9 is maintained. And the 2nd connection parts 4 and 5 can be kept connected.

<Method for generating a force for pulling the first and second connection portions>
In the fluid device connection structure 1, the first and second connection portions 4, 5, the seal member 6, the coupling member 7, and the drawing member 10 are resin molded products. Therefore, for example, if the operation of flowing cold pure water through the flow paths 4h and 5h is repeated after the high-temperature chemical solution flows through the flow paths 4h and 5h, the first and second fluid devices 2 and 3 repeatedly expand and contract. May cause creep deformation and reduce the sealing force.

FIG. 11 is a side view showing a state in which an attractive force is generated by the connecting member 7 shown in FIG.
Even in this case, as shown in FIG. 11, the fluid device connection structure 1 fastens the attracting member 10 to the bolt holes 8b and 9b. Then, the gap S (see FIG. 7) formed between the extending portions 8a and 9a at the time of initial assembly becomes narrow, and the inner diameter R2 becomes smaller than the inner diameter R1 at the time of initial assembly.

FIG. 12 is a cross-sectional view showing an attractive force generation state of the fluid device connection structure 1 shown in FIG. 1.
At this time, as shown in FIG. 12, the connecting member 7 includes the first and second divided pieces 8 and 9, the connecting side tapers 8h and 9h, and the end surface side inner surface of the first and second mounting grooves 4c and 5c. It is made to slide on the connection part side taper 4e, 5e provided in 4d, 5d. Then, the first and second connection portions 4 and 5 receive a force in a direction approaching each other from the connecting member 7, and the annular protrusions 4 b and 5 b of the first and second connection portions 4 and 5 are caused to move into the annular groove of the seal member 6. Further press-fitting into 11a and 11b improves the sealing force.

  However, in this case, a repulsive force is generated at the press-fitted portion between the first and second connecting portions 4 and 5 and the seal member 6. This repulsive force acts at right angles to the connecting side tapers 8h and 9h, and acts on the connecting member 7 in a manner of being divided into a vertical component and a horizontal component. In the following description, “horizontal” refers to the axial direction of the first and second connecting portions 4, 5, and “vertical” refers to the axial direction of the first and second connecting portions 4, 5. The vertical direction.

  In the connecting member 7, the first and second protrusions 8j, 9j, 8k, and 9k are in contact with the end surface side inner side surfaces 4d and 5d or the connection portion side tapers 4e and 5e of the first and second mounting grooves 4c and 5c. The horizontal component of the force acting on the connecting member 7 from the first and second connecting portions 4 and 5 is received.

  On the other hand, the first and second connecting portions 4 and 5 act on the connecting member 7 at the engaging portions between the first and second engaging protrusions 8e and 9d and the first and second engaging recesses 8i and 9e. The vertical component of force acts. Even in this case, in the connecting member 7, the second engaging protrusion 9 d is engaged with the first engaging recess 8 i in the horizontal direction so as to press the first divided piece 8, and receives the force of the vertical component.

  Further, when the attracting member 10 is fastened to the bolt holes 8b and 9b, the locking claw 8c is not locked to the extending portion 9a. However, the attracting member 10 holds the extending portions 8a and 9a. Therefore, when the first and second connecting portions 4 and 5 are pulled by the attracting member 10, the connecting member 7 receives the force of the vertical component of the force received from the first and second connecting portions 4 and 5. Receive at 10.

  Thus, the connecting member 7 receives the force of the vertical component by the engaging member 10, the second engaging protrusion 9d, and the engaging portion of the first engaging recess 8i, so the first and second divided pieces. 8,9 separation is prevented.

  Therefore, even if the connecting member 7 generates a force that draws the first and second connecting portions 4 and 5 by the drawing member 10, it can continue to maintain the sealing force after the drawing force is generated.

<The effect of the fluid apparatus connection structure which concerns on 1st Embodiment>
As described above, in the fluid device connection structure 1 of the first embodiment, the pressure plates 19 and 19 of the jig 15 are attached to the first and second attachment grooves 4f and 5f, and the first and second connection portions 4 are attached. 5, the width W1 of the end surface side inner surface 4d of the first mounting groove 4c and the end surface side inner surface 5d of the second mounting groove 5c is such that the first protrusions 8j and 9j and the second protrusion 8k of the connecting member 7 A force is applied in a direction in which the first and second connection portions 4 and 5 are brought closer to each other until the width W2 is between 9k. Thereby, the seal member 6 is attached to the seal grooves 4a and 5a of the first and second connection portions 4 and 5, and a predetermined sealing force is obtained.

  In this state, the first and second engaging protrusions 8e and 9d are engaged with the first and second engaging recesses 8i and 9e, and the tip 8d of the locking claw 8c is extended from the second divided piece 9. The first and second divided pieces 8 and 9 are fitted around the first and second connecting portions 4 and 5 by being engaged with the portion 9a. Thereby, even if the jig | tool 15 is removed from the 1st and 2nd attachment grooves 4f and 5f, the connection state of the 1st and 2nd connection parts 4 and 5 is maintained by the connection member 7. FIG. Therefore, according to the fluid device connection structure 1 of the first embodiment, the first and second connection portions 4 and 5 are drawn together to connect the first and second divided pieces 8 and 9 to the first and second connection portions 4 and 5. The first and second fluid devices 2 and 3 can be connected easily and reliably without securing a space for moving the cylindrical nut as in the prior art, as long as there is a space for mounting around the .

  Moreover, the fluid device connection structure 1 of the first embodiment includes the first and second protrusions 8j, 9j, 8k, 9k of the connecting member 7 (first and second divided pieces 8, 9) having a U-shaped cross section. The connecting member 7 is fitted into the first and second mounting grooves 4c and 5c, and the first and second connecting portions 4 and 5 are sandwiched between the first and second divided pieces 8 and 9, and the connecting member 7 is connected to the first and second connecting portions. Attach to 4 and 5 connecting parts. Therefore, according to the fluid device connection structure 1 of the first embodiment, the connection structure of the first and second connection portions 4 and 5 can be made compact.

  In addition, the fluid device connection structure 1 according to the first embodiment includes an end surface side inner surface 4i of the first mounting groove 4f, an end surface side inner surface 4d of the first mounting groove 4c, and an end surface side inner surface of the second mounting groove 5f. 5i and the end surface side inner surface 5d of the second mounting groove 5c are parallel to the end surface of the first connection portion 4 and the end surface of the second connection portion 5, respectively. When the two connecting portions 4 and 5 are pulled together or when the first and second connecting portions 4 and 5 are connected by the connecting member 7, the end surface of the first connecting portion 4 and the end surface of the second connecting portion 5 are substantially uniform. The sealing member 6 can be uniformly sealed in the circumferential direction.

  Further, in the fluid device connection structure 1 according to the first embodiment, when the first and second connection portions 4 and 5 are creep-deformed, the first and second divided pieces 8 and 9 are brought close to each other by the attracting member 10. . Thereby, the connection side taper 8h, 9h of the connection member 7 slides along the connection part side taper 4e, 5e of the first and second connection parts 4, 5, and the first and second connection parts 4, 5 Generates a pulling force and improves the sealing force. Here, the first and second divided pieces 8 and 9 tend to be separated by the repulsive force generated between the first and second connecting portions 4 and 5 and the seal member 6. However, the connecting member 7 maintains the sealing force after the first and second connecting portions 4 and 5 are drawn because the attracting member 10 maintains the engaged state of the first and second divided pieces 8 and 9. it can. Therefore, according to the fluid device connection structure 1 of the first embodiment, the sealing force can be easily improved even when the first and second connection portions 4 and 5 are creep-deformed.

  Further, in the fluid device connection structure 1 according to the first embodiment, the connecting member 7 is composed of the first divided piece 8 and the second divided piece 9, and one end of the first divided piece 8 and the second divided piece 9 is rotated. In a state in which the rotation connecting portion 20 that is movably connected, the locking claw 8c provided in the first divided piece 8 so as to be elastically deformable, and the second divided piece 9 are elastically deformed. And an insertion hole 9c that is restored after being inserted and locked to the outer periphery of the opening. Therefore, in the fluid device connection structure 1 of the first embodiment, for example, even when the fluid device is complicated and there is only a narrow space between the fluid devices, the first divided piece 8 is rotated with respect to the second divided piece 9. The connecting member 7 can be easily attached to the connecting portions of the first and second connecting portions 4 and 5 simply by moving the locking claw 8c into the insertion hole 9c.

  Further, in the fluid device connection structure 1 according to the first embodiment, the first and second engaging protrusions 8e and 9d provided on the first divided piece 8 and the second divided piece 9 are respectively connected to the rotary connecting portion 20 and the first divided pieces 8 and 9d. And the second engagement recesses 8i, 9e, and the first and second engagement protrusions 8e, 9d and the first and second engagement recesses 8i, 9e are engaged with each other, The first and second engagement protrusions 8e and 9d are in different directions on the inner walls of the first and second engagement recesses 8i and 9e (the direction in which the first and second divided pieces 8 and 9 are divided and perpendicular to the direction of the division) Direction). Therefore, according to the fluid device connection structure 1 of the first embodiment, for example, when the locking claw 8c is elastically deformed and inserted into the insertion hole 9c and engaged with the extending portion 9a, the first and second Even if a force in a different direction acts on the first and second divided pieces 8 and 9 due to something colliding with the connecting member 7 attached to the connecting portions 4 and 5, the first and second divided pieces 8 and 9 9 does not separate.

  In addition, the fluid device connection structure 1 of the first embodiment is configured so that the connecting member 7 is between the first and second divided pieces 8 and 9 when the connecting member 7 is attached to the first and second connection portions 4 and 5. There is a gap S. The attracting member 10 connects the first and second divided pieces 8 and 9 so as to close the gap S, and generates a force that draws the first and second connecting portions 4 and 5. Therefore, according to the fluid device connection structure 1 of the present invention, the sealing member 10 can easily improve the sealing force.

  Further, in the fluid device connection structure 1 of the first embodiment, the first and second divided pieces 8 and 9 are integrated by the connecting band 14, so that the first or second divided pieces 8 and 9 can be eliminated, The labor for combining the first and second divided pieces 8 and 9 can be saved and workability can be improved.

  In the fluid device connection structure 1 of the first embodiment, the annular protrusions 4b and 5b of the first and second connection portions 4 and 5 are press-fitted into the press-fitting margins 11c and 11d of the annular grooves 11a and 11b of the seal member 6. Requires a large force (for example, 200 N or more). In such a case, when the conventional fluid device connection structure 1100 (see FIG. 45) is applied, it is difficult to manually rotate the cylindrical nut 1109. Therefore, the cylindrical nut 1109 is used as a fluid device with a long spanner. It is necessary to tighten. However, as shown in FIG. 13, in the fluid device unit 50 in which fluid devices are densely packed, the rotation space of the spanner cannot be secured between the fluid devices, and the fluid device cannot be connected by the conventional fluid device connection structure 1100. There is. On the other hand, in the fluid device connection structure 1 according to the first embodiment, if there is a gap between the fluid devices in which the pressure plates 19 and 19 of the jig 15 can be inserted, the first and second connection portions 4 and 4 are formed by the jig 15. 5, the connecting member 7 is mounted by engaging the first and second divided pieces 8 and 9 around the connecting portion of the first and second connecting portions 4 and 5. Therefore, according to the fluid device connection structure 1 of the first embodiment, even when there is only a small empty space around the fluid device to be connected, the seal member 6 can be easily press-fitted and fitted into the seal grooves 4a and 5a. it can.

  Further, the fluid device connection structure 1 of the first embodiment holds the jig 15 in which the pressure plates 19, 19 are arranged in the first and second mounting grooves 4f, 5f, and the first and second connection portions 4, When the first and second divided pieces 8 and 9 are engaged around the first and second connection portions 4 and 5, the first and second fluid devices 2 are sufficiently pulled. , 3 can be connected, so that the connection time of the first and second connection parts 4, 5 can be shortened compared to the case where the cylindrical nut 1109 is rotated as in the prior art.

  Further, the fluid device unit 50 of the first embodiment uses the fluid device connection structure 1 to provide a plurality of fluid devices 61A, 61B, 62A, 62B, 63A, 63B, 64A, 64B, 65A, 65B, 66A, 66B. Since it connects, each fluid apparatus 61A, 61B, 62A, 62B, 63A, 63B, 64A, 64B, 65A, 65B, 66A, 66B can be connected easily and reliably. In addition, the fluid device unit 50 has the same shape as the connection portion of each fluid device, and is integrally formed with a flow path block, a pipe, or the like of the fluid device, and also uses the same connecting member 7 to connect the fluid device connection portion. Since these are connected, the cost can be reduced by sharing parts.

  In addition, since the fluid device unit 50 of the first embodiment connects the fluid devices using the fluid device connection structure 1 having a compact structure, the foot space of the entire unit can be reduced.

(Second Embodiment)
Next, a second embodiment of the fluid device connection structure of the present invention will be described.
The fluid device connection structure of the second embodiment has the same configuration as the fluid device connection structure 1 of the first embodiment except for the connecting member 7A. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and abbreviate | omits description suitably about the point which is common in 1st Embodiment.

<Configuration of connecting member>
FIG. 14 is a side view of the connecting member 7A used in the fluid device connection structure according to the second embodiment of the present invention, and shows an initial assembly state. FIG. 15 is a side view of the connecting member 7A shown in FIG. 14 and shows a state where an attractive force is generated. 16 is a cross-sectional view of the connecting member 7A shown in FIG.
The connecting member 7A is obtained by integrally molding the first divided piece 8A, the second divided piece 9A, and the connecting band 14 by injection molding a fluororesin. The first and second divided pieces 8A and 9A are provided with extending portions 71 and 72, respectively. As shown in FIG. 15, the first and second divided pieces 8A and 9A make the extending portions 71 and 72 come into contact with each other without a gap when a force for pulling the first and second connecting portions 4 and 5 is generated. In addition, as shown in FIG. 14, the surfaces of the extending portions 71 and 72 that are in contact with each other are inclined. Therefore, in the first and second divided pieces 8A and 9A, a gap S1 having a predetermined angle is provided between the extending portions 71 and 72 during the initial assembly shown in FIG.

  As shown in FIG. 16, the extending portion 72 is a surface that comes into contact with the extending portion 71 and has an external thread portion 75 (which constitutes a part of the “drawing member”) standing outside the insertion hole 9 c. Has been. The male screw portion 75 is against a surface that abuts on the female screw member 77 of the extending portion 71 (a part of the “drawing member”) when generating a force to draw the first and second connecting portions 4 and 5. It is inclined with respect to the end surface of the extending portion 72 so as to be vertical. The extending portion 71 is formed with a through hole 76 through which the male screw portion 75 passes. The through-hole 76 is provided larger than the radial cross-sectional area of the male screw portion 75 so that the first and second divided pieces 8A and 9A do not hinder the operation of opening and closing with the rotation connecting portion 20 as a fulcrum. The male screw portion 75 has a tip portion penetrating through the through hole 76 and projecting upward from the extending portion 71, and a female screw member 77 made of resin is fastened. A hexagonal hole 78 for attaching a tool for rotating the female screw member 77 is formed on the end surface of the female screw member 77.

<Connection method of fluid equipment>
Such a connecting member 7A is formed by pulling the first and second connection parts 4 and 5 of the first and second fluid devices 2 and 3 with the jig 15 and then the first and second connection parts 4 and 5. The first and second mounting grooves 4c and 5c are mounted. At this time, the connecting member 7A is arranged around the first and second connection portions 4 and 5 in a state where the first and second engagement protrusions 8e and 9d are engaged with the first and second engagement recesses 8i and 9e. The locking claw 8c is inserted into the insertion hole 9c, and the distal end portion 8d is locked to the extending portion 72 as shown in FIG. Accordingly, the connecting member 7A is engaged with the locking claw 8c of the first divided piece 8A and the extending portion 72 of the second divided piece 9A to form a ring shape, and the first and second connecting portions 4 and 5 are connected. Maintain the connection status.

  When the sealing force of the first and second connection portions 4 and 5 becomes weak, the extension portion 71 is attached so that a tool is attached to the hexagonal hole 78 and the female screw member 77 is screwed into the male screw portion 75 and the gap S1 is closed. , 72 are brought into close contact with each other. Then, as shown in FIGS. 15 and 16, the extending portions 71 and 72 are brought into close contact with each other, and the inner diameter R12 is made smaller than the inner diameter R11 (see FIG. 14) at the time of initial assembly. At this time, since the male screw portion 75 is erected on the extending portion 72 so as to be perpendicular to the surface of the extending portion 71 that contacts the female screw member 77, the connecting member 7A includes the male screw portion 75 and the female screw member. The extended portions 71 and 72 are tightly adhered to and sandwiched between the first and second divided pieces 8A and 9A. Since the sealing force can be improved by reducing the inner diameter of the connecting member 7A as described in the first embodiment, the description thereof is omitted here.

<The effect of the fluid apparatus connection structure which concerns on 2nd Embodiment>
In such a fluid device connection structure according to the second embodiment, when a force that draws the first and second connection portions 4 and 5 is generated, the connection portion side taper of the first and second connection portions 4 and 5 is increased. The repulsive force of the first and second connecting portions 4 and 5 acting on the surface where 4e, 5e and the connecting side taper 8h, 9h of the connecting member 7A are in contact with each other causes the first and second divided pieces 8A, 9A of the connecting member 7A. Acts in a direction perpendicular to the direction of dividing the direction. However, in the fluid device connection structure according to the second embodiment, since the connecting member 7A fastens the female screw member 77 to the male screw portion 75 so that the extending portions 71 and 72 are in contact with no gap, The screw fastening force of the male screw portion 75 is difficult to loosen. Therefore, according to the fluid device connection structure according to the second embodiment, it is possible to stably maintain the sealing force obtained by generating the force that draws the first and second connection portions 4 and 5.

  In addition, in the fluid device connection structure according to the second embodiment, for example, when the first and second connection portions 4 and 5 are creep-deformed, the female screw member 77 is screwed into the male screw portion 75 to be divided into the first and second portions. The pieces 8 </ b> A and 9 </ b> A are brought close to each other to generate a force that draws the first and second connecting portions 4 and 5. Here, the first and second divided pieces 8A and 9A tend to be separated from each other by the repulsive force generated between the first and second connecting portions 4 and 5 and the seal member 6. However, since the connecting member 7A maintains the engaged state of the first and second divided pieces 8A and 9A by the screwing of the female screw member 77 and the male screw portion 75, the attracting force generating state can be maintained. Therefore, according to the fluid device connection structure according to the second embodiment, it is possible to easily improve the sealing force even when the first and second connection portions 4 and 5 are creep-deformed.

(Third embodiment)
Next, a third embodiment of the fluid device connection structure of the present invention will be described. FIG. 17 is an exploded view of a connecting member 7B used in the fluid device connection structure according to the third embodiment of the present invention. FIG. 18 is a diagram in which the first divided piece 8B and the second divided piece 9B constituting the connecting member 7B shown in FIG. 17 are combined. FIG. 19 is an external perspective view of the connecting member 7B and the drawing member 100 shown in FIG. FIG. 20 is a view showing a state in which the attracting member 100 is attached to the connecting member 7B shown in FIG. FIG. 21 is a diagram illustrating a state in which an attractive force is generated by the connecting member 7B illustrated in FIG. 22 is a central longitudinal sectional view of the drawing member 100 shown in FIG. 23 is a cross-sectional view taken along the line BB in FIG.

  The fluid device connection structure of the third embodiment has the same configuration as the fluid device connection structure 1 of the first embodiment except for the connecting member 7B and the drawing member 100. Therefore, here, the connecting member 7B and the attracting member 100 different from the first embodiment will be mainly described, and the points in common with the first embodiment will be denoted by the same reference numerals as those of the first embodiment and will be described as appropriate. Omitted.

<Configuration of connecting member>
As shown in FIG. 17, the connecting member 7B is provided with a first divided piece 8B and a second divided piece 9B separately. The first and second divided pieces 8B and 9B extend so that the extending portions 8a and 9a abut against each other without a gap when an attracting force is generated that generates a force for attracting the first and second connecting portions 4 and 5. A slope is provided on the surfaces of the mounting portions 8a and 9a that are in contact with each other. Therefore, in the first and second divided pieces 8B and 9B, a gap S1 having a predetermined angle is provided between the extending portions 8a and 9a at the time of initial assembly shown in FIG. As shown in FIGS. 17 and 18, the extending portions 8 a and 9 a are formed with mounting holes 81 and 85 (an example of a “mounting portion”) for mounting the attracting member 100 in a square shape.

  As shown in FIG. 17, the first divided piece 8 </ b> B has a pair of support walls 82 and 83 provided in parallel on the opposite side of the extending portion 8 a, and a rotating shaft 84 is installed between the support walls 82 and 83. ing. On the other hand, the second divided piece 9B is provided with a U-shaped rotation engaging portion 86 on the side opposite to the extending portion 9a. The rotation engaging portion 86 is open on the opposite side to the divided surface where the second divided piece 9B contacts the first divided piece 8B. The opening of the rotation engaging portion 86 is formed with a width smaller than the diameter of the rotation shaft 84. The connecting member 7 </ b> B is configured such that the rotating connecting portion 87 is formed by press-fitting and inserting the rotating shaft 84 into the rotation engaging portion 86. In such a connecting member 7B, since the rotation shaft 84 is unlikely to come off from the rotation engaging portion 86, the first divided piece 8B and the second divided piece 9B are integrally connected without being separated.

<Structure of the attracting member>
As shown in FIG. 19, the attracting member 100 includes a resin clip member 101 and a resin nut member 102. The attracting member 100 is configured to be attached to the connecting member 7B by one-touch by pushing the clip member 101 into the mounting holes 81 and 85 of the connecting member 7B. A rotation stop mechanism 104 is provided between the nut member 102 and the clip member 101 so that the nut member 102 does not rotate and loosen with respect to the clip member 101.

  As shown in FIG. 22, the clip member 101 is mounted in the mounting holes 81 and 85 in a state where rotation is stopped. The clip member 101 has a groove 101a formed in the axial direction from the lower end portion, the lower end portion is bifurcated, and a pair of flexible pieces 101b and 101b are provided. A locking portion 101c is provided at the tip of each flexible piece 101b so as to protrude in the opposite direction to the groove 101a. A cylindrical part 101 d is provided in a cylindrical shape at the upper end of the clip member 101. A male screw 101e is formed on the outer peripheral surface of the cylindrical portion 101d. The clip member 101 has a bottomed hole 101f formed in the upper end surface of the cylindrical portion 101d. As shown in FIG. 23, valleys 101g and peaks 101h are alternately provided along the circumferential direction on the inner surface of the bottomed hole 101f.

  As shown in FIG. 22, the nut member 102 has a cup shape including a hollow portion 102 a that opens to one side. As for the nut member 102, the internal thread 102b is formed in the internal peripheral surface of the hollow part 102a. The female screw 102 b is screwed with the male screw 101 e of the clip member 101 to form the screw portion 103. The nut member 102 has a pair of engaging pieces 102c and 102c suspended from the bottom of the hollow portion 102a. When the nut member 102 is rotated with respect to the clip member 101, the engaging pieces 102c and 102c are not elastically deformed at the position where the nut member 102 is engaged with the valley 101g, but are elastically deformed at the position where the engaging member 102c is in sliding contact with the peak 101h. It is arranged to create a resistance. Therefore, the engagement pieces 102c and 102c constitute the rotation stop mechanism 104 together with the valley portion 101g and the peak portion 101h. The nut member 102 has a tool mounting hole 102d formed on the outer periphery of the upper end surface.

<The effect of the fluid apparatus connection structure which concerns on 3rd Embodiment>
As shown in FIGS. 17 and 18, the connecting member 7 </ b> B is integrated with the first and second divided pieces 8 </ b> B and 9 </ b> B by press-fitting the rotary shaft 84 into the opening of the rotary engaging portion 86. . Then, as shown by the arrow in FIG. 18, the first divided piece 8B is turned into the second divided piece 9B with the rotation connecting portion 87 as a fulcrum, as shown by the arrows in FIG. Rotate against. Then, the locking claw 8c is inserted into the insertion hole 9c while being bent. As shown in FIG. 19, the locking claw 8c is restored when it passes through the insertion hole 9c, and hooks the tip 8d to the outer periphery of the opening of the insertion hole 9c. Thereby, both ends of the first and second divided pieces 8B and 9B are connected by the rotation connecting portion 87 and the locking claw 8c. At this time, the connecting member 7B is attached to the connecting portion of the first and second connecting portions 4 and 5 with a gap S1 between the extending portions 8a and 9a.

  As described above, in the fluid device connection structure of the third embodiment, the connecting member 7B is configured by the first divided piece 8B and the second divided piece 9B, and one end of the first divided piece 8B and the second divided piece 9B is provided. Rotating connecting portion 87 that is rotatably connected, a locking claw 8c that is elastically deformable on the first divided piece 8B, and a state in which the locking claw 8c is elastically deformed provided on the second divided piece 9B And an insertion hole 9c that is restored after being inserted through and locked to the outer periphery of the opening. Therefore, the fluid device connection structure of the third embodiment rotates the first divided piece 8B with respect to the second divided piece 9B even when the fluid device is complicated and there is only a narrow space between the fluid devices. Then, the connecting member 7B can be easily attached to the connecting portion of the first and second connecting portions 4 and 5 with one touch only by pushing the locking claw 8c into the insertion hole 9c.

  Further, in the fluid device connection structure of the third embodiment, the rotation connecting portion 87 is provided with a rotation shaft 84 in the first divided piece 8B, and a U-shaped rotation engagement unit engaged with the rotation shaft 84 in the second divided piece 9B. The rotation part 86 is configured to be provided with a joint part 86, and the second engagement piece 86 is open on the opposite side to the surface where the second division piece 9 </ b> B contacts the first division piece 8 </ b> B. Therefore, according to the fluid device connection structure of the third embodiment, for example, even if something collides with the connecting member 7B and a force in a different direction acts on the first and second divided pieces 8B and 9B, The first and second divided pieces 8B and 9B are not separated.

  As shown in FIGS. 19 and 20, the attracting member 100 is attached to the connecting member 7 </ b> B in advance during initial assembly. The attracting member 100 is inserted toward the mounting hole 81 with the lower ends of the pair of flexible pieces 101 b and 101 b aligned with the mounting hole 81. At this time, the taper formed on the outer surface of the locking portions 101c and 101c is pressed against the inner wall of the mounting hole 81, and the flexible pieces 101b and 101b bend toward the groove 101a. When the locking portions 101c and 101c pass through the mounting holes 81 and 85 and the pressing force from the extending portions 8a and 9a is released, the flexible pieces 101b and 101b are restored to lock the locking portions 101c and 101c. It is hooked on the extending portion 9a, and the attracting member 100 is made difficult to be removed from the mounting holes 81 and 85.

  Therefore, in the fluid device connection structure of the third embodiment, if the clip member 101 of the attracting member 100 is pushed into the mounting holes 81 and 85, the attracting member 100 can be easily mounted on the connecting member 7B with one touch. Is good. In particular, when the fluid device unit is assembled in a wafer cleaning apparatus including a large number of fluid devices, for example, the fluid device unit may be disposed on the back side of other fluid devices. Even in this case, the attracting member 100 can be easily mounted on the connecting member 7B simply by being pushed into the mounting holes 81 and 85 without using a tool.

  Thereafter, when the sealing force of the first and second connecting portions 4 and 5 is reduced, as shown in FIG. 20, a tool (hexagon wrench or the like) not shown is attached to the tool attachment hole 102d and the nut member 102 is rotated. Let As shown in FIG. 21, the nut member 102 pulls the clip member 101 to the nut member 102 side by screw feed of the screw portion 103. As a result, the distance between the nut member 102 and the locking portions 101c, 101c is shortened, so that the connecting member 7B has the extension portions 8B. Move 9B closer. As a result, in the connecting member 7B, the diameter of the space formed between the holding groove 8f of the first divided piece 8B and the holding groove 9f of the second divided piece 9B is reduced, and the first and second connecting portions 4, 4B are reduced. A force to draw 5 is generated. Thereby, the sealing force of the first and second connection portions 4 and 5 is improved.

  Thus, in the fluid device connection structure of the third embodiment, for example, when the first and second connection portions 4 and 5 are creep-deformed, the first and second divided pieces 8B and 9B are attracted by the attracting member 100. Are brought close to each other to generate a force that draws the first and second connecting portions 4 and 5 together. Here, the first and second divided pieces 8B and 9B tend to be separated from each other by the repulsive force generated between the first and second connecting portions 4 and 5 and the seal member 7. However, since the attracting member 100 maintains the engaged state of the first and second divided pieces 8B and 9B, the connecting member 7B can maintain the attracting force generating state. Therefore, according to the fluid device connection structure of the third embodiment, the sealing force can be easily improved even when the first and second connection portions 4 and 5 are creep-deformed.

  Further, the fluid device connection structure of the third embodiment has a gap between the first and second divided pieces 8B and 9B in the initial state in which the connecting member 7B is attached to the first and second connection portions 4 and 5. S1 is included. The attracting member 100 connects the first and second divided pieces 8B and 9B so as to close the gap S1, and generates a force that draws the first and second connecting portions 4 and 5. Therefore, according to the fluid device connection structure of the third embodiment, the sealing member 100 can easily improve the sealing force.

  By the way, the attracting member 100 has a repulsive force of the seal member 6, heat transmitted from the first and second connecting portions 4 and 5 through the connecting member 7B, heat of the atmosphere used, vibration of the device, and the like. As a result, the nut member 102 may loosen and rotate. If the nut member 102 is loosened and rotated, the force with which the connecting member 7B holds the first and second connecting portions 4 and 5 is reduced, and the sealing force may be reduced.

  In this regard, as shown in FIG. 23, the attracting member 100 constitutes a rotation stopping mechanism 104 between the nut member 102 and the clip member 101. When the nut member 102 rotates relative to the clip member 101 and loosens and tries to rotate, the nut member 102 is elastically deformed and generates resistance when the engaging piece 102c is in sliding contact with the mountain portion 101h. This resistance prevents the nut member 102 from rotating.

  Thus, in the fluid device connection structure of the third embodiment, the connecting member 7B is provided with the mounting holes 81 and 85 in which the drawing member 100 is mounted in the first and second divided pieces 8B and 9B, and the drawing member 100 is a clip member 101 that is non-rotatably mounted in the mounting holes 81, 85, a nut member 102 that is screwed to the clip member 101, and a rotation that prevents the nut member 102 from rotating relative to the clip member 101. And a stop mechanism 104. Therefore, in the fluid device connection structure of the third embodiment, even when the first and second connection portions 4 and 5 and the connecting member 7B are subjected to creep deformation or the like, the rotation stopping mechanism 104 prevents the nut member 102 from rotating. The connection state of the first and second connection parts 4 and 5 can be maintained.

  Here, as for the connection member 7B, the rotation engaging part 86 is opened in the opposite direction to the division surface of the 2nd division | segmentation piece 9B. Therefore, even if the connecting member 7B receives a force in the direction of separating the first and second divided pieces 8B and 9B due to thermal deformation or fluid pressure of the first and second connecting portions 4 and 5, the rotating shaft 84 is The rotation engagement portion 86 is supported in a different direction and does not come off the rotation engagement portion 86.

(Fourth embodiment)
Next, a fluid device connection structure according to a fourth embodiment of the invention will be described. FIG. 24 is an external perspective view of the connecting member 7B and the attracting member 110 used in the fluid device connection structure according to the fourth embodiment of the present invention. 25 to 27 are cross-sectional views of the attracting member 110 shown in FIG. In particular, FIG. 25 shows a state before the initial construction, FIG. 26 shows a state after the initial construction, and FIG. 27 shows an attractive force generation state.
The fluid device connection structure of the fourth embodiment has the same configuration as that of the third embodiment except for the attracting member 110. Therefore, here, the description will focus on the attracting member 110 different from the third embodiment, the same points as in the third embodiment will be given the same reference numerals as in the third embodiment, and the description will be omitted as appropriate.

<Structure of the attracting member>
As shown in FIG. 24, the attracting member 110 is mounted in the mounting holes 81 and 85 of the connecting member 7B. The attracting member 110 includes a clip member 111, a nut member 112, and a rod member 113. The clip member 111, the nut member 112, and the rod member 113 are made of resin.

  As shown in FIGS. 25 to 27, in the clip member 111, a pair of flexible pieces 111b and 111b are erected on a cylindrical portion 111a. The pair of flexible pieces 111b and 111b are mounted in the mounting holes 81 and 85 in a state where the rotation is stopped. A locking portion 111c that is locked to the extending portion 9a is provided at the distal end portion of each flexible piece 111b so as to protrude laterally. A taper is provided on the outer surface of each locking portion 111c so that the flexible piece 111b is pressed by the inner walls of the mounting holes 81 and 85 to bend easily. As shown in FIG. 25, a guide groove 111g for guiding the rod member 113 is formed on the surfaces where the flexible pieces 111b and 111b face each other.

  A male screw 111d is formed on the outer peripheral surface of the cylindrical portion 111a. The cylindrical portion 111a has a bottomed hole 111e on a surface facing the surface on which the flexible pieces 111b and 111b are erected. At the bottom of the bottomed hole 111e, a pair of positioning protrusions 111f and 111f are erected outside the opening of the through hole through which the rod member 113 is slidably inserted. The positioning projections 111f and 111f have their tip portions bent inward.

  The nut member 112 has a cup shape in which a hollow portion 112a is formed from one end surface. A female screw 112b is formed on the inner peripheral surface of the hollow portion 112a. The female screw 112b constitutes a screw part 114 together with the male screw 111d. A rod insertion hole 112 c for inserting the rod member 113 is formed in the upper end surface of the nut member 112. The rod insertion hole 112c is formed in a polygonal shape (in this embodiment, a hexagonal shape).

  The rod member 113 is slidably held by the nut member 112 and the clip member 111. On the outer peripheral surface of the rod member 113, a tuning surface 113a is formed in a polygonal shape corresponding to the rod insertion hole 112c.

  The rod member 113 has a first positioning groove 113b formed in an annular shape on the tuning surface 113a. Further, the rod member 113 has a second positioning groove 113c formed in an annular shape below the tuning surface 113a. The first and second positioning grooves 113b and 113c are formed in parallel so as to be orthogonal to the axis, and are provided so that the tips of the positioning protrusions 111f and 111f provided on the clip member 111 are in sliding contact with the groove bottom. . The groove bottoms of the first and second positioning grooves 113b and 113c are polygonal or elliptical. In this embodiment, the groove bottoms of the first and second positioning grooves 113b and 113c are hexagonal.

  The positioning protrusion 111f is not elastically deformed while the tip end abuts on the flat surface center of the groove bottom of the first positioning groove 113b. When the nut member 112 is rotated, the rod member 113 rotates in synchronization. At this time, the positioning protrusion 111f is elastically deformed as it approaches the top from the center of the flat surface of the groove bottom of the first positioning groove 113b, and generates resistance between the groove bottom. Therefore, when the nut member 112 is rotated, the attracting member 110 generates resistance at regular intervals. In such an attracting member 110, a rotation stop mechanism 115 is configured by the positioning protrusion 111f and the first positioning groove 113b.

<The effect of the fluid apparatus connection structure which concerns on 4th Embodiment>
When the attracting member 110 is attached to the connecting member 7B, as shown in FIGS. 24 and 25, the rod member 113 is first pulled out from the nut member 112, and the tip of the positioning protrusion 111f is hooked in the second positioning groove 113c. (The position of the rod member 113 is referred to as a “second position”). Accordingly, the flexible pieces 111b and 111b are allowed to elastically deform so as to fall inward.

  Then, the engaging portions 111 c of the flexible pieces 111 b and 111 b are aligned with the mounting hole 81, and the attracting member 110 is pushed into the mounting hole 81. The flexible pieces 111b and 111b are inserted into the mounting holes 81 and 85 while the taper of the locking portion 111c is pressed against the inner wall of the mounting hole 81 and bent inward. When the locking portions 111c and 111c pass through the mounting holes 81 and 85 and the pressing force is released, the flexible pieces 111b and 111b are deformed outward and restored, and the locking portions 111c and 111c are inserted into the insertion holes 9c. Lock to the outer periphery of the opening.

  Then, as shown in FIGS. 24 and 26, the rod member 113 is pushed into the nut member 112, and the positioning projection 111f is engaged with the first positioning groove 113b (the position of the rod member 113 in this case is referred to as “first position”). And). At this time, the rod member 113 is guided by the rod insertion hole 112c and the guide groove 111g and descends without rotating the nut member 112. Thus, the flexible pieces 111b and 111b are prevented from being deformed inward by the rod member 113 being inserted deeply into the vicinity of the locking portions 111c and 111c. Therefore, even if the attracting member 110 is pulled up strongly, the flexible pieces 111b and 111b are not deformed, so that the clip portion 111 does not come out of the mounting holes 81 and 85.

  Thus, in the fluid device connection structure of the fourth embodiment, the flexible pieces 111b and 111b of the attracting member 110 are aligned with the mounting holes 81 and 85 of the connecting member 7B, and the attracting member 110 is attached to the mounting holes 81 and 85, respectively. By simply inserting it into 85, the attracting member 110 can be easily attached to the connecting member 7B with one touch.

  On the other hand, when the sealing force of the first and second connecting portions 4 and 5 is reduced, as shown in FIGS. 24 and 27, the nut member is kept engaged with the positioning protrusion 111f in the first positioning groove 113b. 102 is rotated in the direction of the arrow in the figure. Then, the clip portion 111 is pulled up into the hollow portion 112 a of the nut member 112 by screw feeding of the screw portion 114. For this reason, the distance between the nut member 112 and the locking portions 111c and 111c is shortened, and the extending portions 8a and 9a are brought closer to close the gap S1 shown in FIG. As a result, the connecting member 7B can generate a force that draws the first and second connecting portions 4 and 5 and can improve the sealing force.

  Even if the clip member 111 is strongly pulled upward by tightening the nut member 112 to the rod member 113, the attracting member 110 places the rod member 113 in the first position, so that the flexible pieces 111b and 111b Since the deformation is prevented, the mounting holes 81 and 85 cannot be removed.

  Moreover, when the rod member 113 is disposed at the first position, when disposed at the second position, and when the force that pulls the first and second connection portions 4 and 5 is generated, The amount protruding from the nut member 112 is different. Therefore, the operator visually observes the protruding amount of the rod member 113 to arrange the rod member 113 at the first position to prevent the pulling member 110 from coming off, or the first and second connecting portions 4 and 4. It is possible to easily determine whether or not a force that draws 5 is generated.

  By the way, as for the attracting member 110, the front-end | tip part of the positioning protrusion 111f is made to slidably contact with the polygonal groove bottom of the 1st positioning groove 113b. The clip member 111 provided with the positioning projection 111f is inserted into the mounting holes 81 and 85 in a state where the flexible pieces 111b and 111b are prevented from rotating. When the nut member 112 rotates integrally with the rod member 113, the positioning protrusion 111f is not elastically deformed while the center of the flat surface of the groove bottom contacts the positioning protrusion 111f. Does not occur. On the other hand, since the nut member 112 elastically deforms the positioning projection 111f outward while the surface from the center of the flat surface of the groove bottom to the top contacts the positioning projection 111f, resistance is generated between the nut member 112 and the positioning projection 111f. . Therefore, even if the nut member 112 tries to loosen due to deformation or the like, the pulling member 110 is prevented from rotating by the resistance generated between the positioning projection 111f and the groove bottom of the first positioning groove 113b.

  As described above, in the fluid device connection structure of the fourth embodiment, the connecting member 7B is provided with the mounting holes 81 and 85 in which the attracting member 110 is mounted in the first and second divided pieces 8B and 9B, and the attracting member 110, a clip member 111 that is non-rotatably mounted in the mounting holes 81, 85, a nut member 112 that is screwed to the clip member 111, and a rotation that prevents the nut member 112 from rotating relative to the clip member 111. And a stop mechanism 115. Therefore, in the fluid device connection structure of the fourth embodiment, even when the first and second connection portions 4 and 5 and the connecting member 7B are creep-deformed or the like, the rotation prevention mechanism 115 prevents the rotation of the nut member 112. The connection state of the first and second connection parts 4 and 5 can be maintained.

(Fifth embodiment)
Next, a fifth embodiment of the fluid device connection structure of the present invention will be described. FIG. 28 is an exploded perspective view of the attracting member 120 used in the fluid device connection structure according to the fifth embodiment of the present invention. FIG. 29 is a cross-sectional view of the attracting member 120 shown in FIG.
The fluid device connection structure of the fifth embodiment has the same configuration as that of the third embodiment except for the attracting member 120. Therefore, here, the drawing member 120 different from that of the third embodiment will be mainly described, and description of points that are the same as those of the third embodiment will be omitted as appropriate.

<Structure of the attracting member>
As shown in FIGS. 28 and 29, the attracting member 120 includes a resin clip member 121 and a resin nut member 122. The attracting member 120 is mounted on the connecting member 7B by inserting the clip member 121 into the mounting holes 81 and 85 of the connecting member 7B. As shown in FIG. 29, a rotation stop mechanism 125 is provided between the clip member 121 and the nut member 122.

  The clip member 121 has a female screw hole 121e formed at the center of the cylindrical portion 121a. The cylindrical portion 121a has a pair of flexible pieces 121b and 121b standing outside the opening where the female screw hole 121e opens. Each flexible piece 121b is provided with a locking portion 121c protruding sideways. A taper is provided on the outer surface of the locking portion 121c. A lower end portion is chamfered on the outer peripheral surface of the cylindrical portion 121a, and a locking portion 121d is formed in a polygonal shape.

  As shown in FIG. 29, the nut member 122 is formed in a cup shape by forming a hollow portion 122a from one end face. In the nut member 122, a rod portion 122b that is screwed into the female screw hole 121e protrudes from the bottom surface of the hollow portion 122a in the axial direction. The male screw 122c formed on the outer peripheral surface of the rod portion 122b constitutes a screw portion 124 together with the female screw hole 121e.

  On the inner periphery of the opening of the hollow portion 122a, a slidable contact portion 122d slidably contacting the loosening prevention portion 121d is formed to protrude inward. 122 d of sliding contact parts are formed in the polygonal shape corresponding to 121 d of loosening prevention parts. A plurality of cuts 122e are formed in the side surface of the nut member 122 along the axial direction from the end surface where the hollow portion 122a opens, and the nut member 122 is rotated with respect to the clip member 121 while changing the opening area of the nut member 122. It is supposed to be. A tool mounting hole 122f for mounting a tool is provided on the outer wall of the closing surface of the nut member 122.

<The effect of the fluid apparatus connection structure which concerns on 5th Embodiment>
When the attracting member 120 is attached to the connecting member 7 </ b> B, the screw portion 124 is loosened and the clip member 121 is lowered with respect to the nut member 122. Thereby, the rod part 122b raises relatively between the flexible pieces 121b and 121b, and accepts the elastic deformation to the inner side of the flexible pieces 121b and 121b.

  Then, the clip member 121 is aligned with the mounting holes 81 and 85 of the connecting member 7B, and the attracting member 120 is inserted into the mounting holes 81 and 85. The clip member 121 is inserted into the mounting holes 81 and 85 while the flexible pieces 121b and 121b are pressed against the inner wall of the mounting hole 81 by the taper provided in the locking portions 121c and 121c and elastically deformed inward. The When the locking portions 121c and 121c pass through the mounting holes 81 and 85, the flexible pieces 121b and 121b are deformed outward and restored, and the locking portions 121c and 121c are locked to the extending portion 9a.

  Thereafter, the attracting member 120 screws the nut member 122 into the clip member 121. The clip member 121 is pulled up to the nut member 122 side by screw feeding of the screw portion 124. As a result, the nut member 122 and the locking portions 121c and 121c sandwich the extending portions 8a and 9a with a gap S1 therebetween.

  When the nut member 122 is screwed into the clip member 121, the rod portion 122b relatively descends between the flexible pieces 121b and 121b, and the flexible pieces 121b and 121b cannot be elastically deformed inward. Therefore, even if the attracting member 120 is strongly pulled upward, the flexible pieces 121b and 121b are not elastically deformed and do not come out of the mounting holes 81 and 85.

  When the sealing force of the first and second connection portions 4 and 5 is reduced, the tool is attached to the tool attachment hole 122 f of the nut member 120 and the nut member 122 is screwed into the clip member 121. As a result, the distance between the nut member 120 and the locking portions 121c and 121c is reduced, and the extending portions 8a and 9a are brought closer to close the gap S1. As a result, the connecting member 7B can generate a force that draws the first and second connecting portions 4 and 5 and can improve the sealing force.

  In addition, when the nut member 122 is rotated, the attracting member 120 generates resistance when the contact surface between the sliding contact portion 122d and the locking portion 121d is changed. Therefore, even if the nut member 122 tries to loosen due to deformation or the like, the pulling member 120 is prevented from rotating by the resistance generated between the sliding contact portion 122d and the locking portion 121d.

  Thus, in the fluid device connection structure of the fifth embodiment, the connecting member 7B is provided with the mounting holes 81 and 85 in which the attracting member 120 is mounted in the divided pieces 8B and 9B, and the attracting member 120 is mounted on the mounting hole. A clip member 121 that is non-rotatably attached to 81, 85, a nut member 122 that is screwed to the clip member 121, and a rotation stop mechanism 125 that prevents the nut member 122 from rotating relative to the clip member 121. Have. Therefore, in the fluid device connection structure of the fifth embodiment, even when the first and second connection portions 4 and 5 and the connecting member 7B are subjected to creep deformation or the like, the rotation stopping mechanism 125 prevents the rotation of the nut member 122. The connection state of the first and second connection parts 4 and 5 can be maintained.

(Sixth embodiment)
Next, a sixth embodiment of the fluid device connection structure of the present invention will be described. FIG. 30 is a view showing a state in which the attracting member 130 is attached to the connecting member 7B used in the fluid device connection structure according to the sixth embodiment of the present invention. FIG. 31 is an exploded view of the attraction member 130 shown in FIG. 32 is a longitudinal sectional view of the attracting member 130 shown in FIG.
The fluid device connection structure of the sixth embodiment has the same configuration as that of the third embodiment except for the attracting member 130. Therefore, here, the description will focus on the attracting member 130 different from that of the third embodiment, and description of points common to the third embodiment will be omitted as appropriate.

<Structure of the attracting member>
The attracting member 130 has a resin nut member 132 screwed onto a resin clip member 131. The attracting member 130 is provided with a rotation stop mechanism 135 for preventing the rotation of the nut 132 by disposing a resin rotation stop plate 133 between the nut member 132 and the clip member 131.

  As shown in FIG. 30, the clip member 131 has a main body 131b having a quadrangular cross section so that it does not rotate when inserted into the mounting holes 81 and 85. The main body portion 131b is provided with a leg portion 131c with the lower end portion being narrowed. The leg 131c is provided so as to protrude from the mounting hole 85 to the outside when the attracting member 131 is mounted on the connecting member 7B. A support portion 131d provided with a width equal to or slightly smaller than the width of the main body portion 131b is connected to the lower end portion of the leg portion 131c.

  A pair of flexible pieces 131e and 131e are erected at both ends of the support portion 131d so as to protrude toward the main body portion 131a. Claw portions 131g that are hooked on the inner peripheral wall of the opening of the mounting hole 85 when the attracting member 130 is mounted on the connecting member 7B are provided at the distal ends of the flexible pieces 131e and 131e, respectively.

  As shown in FIG. 31, a cylindrical portion 131a is integrally formed at the upper end portion of the main body portion 131b. The cylindrical portion 131a has a male screw portion 131h formed on the outer peripheral surface.

  As shown in FIG. 32, the nut member 132 has a cup shape including a hollow portion 132a that opens to one side. A female screw part 132b is formed on the inner peripheral surface of the hollow part 132a. The female screw portion 132 b is screwed into the male screw portion 131 h of the clip member 131 to constitute a screw portion 134.

  As shown in FIG. 31, an engagement surface 132 c that is locked to the rotation stop plate 133 is provided on the outer peripheral surface of the lower end portion of the nut member 132. The engaging surface 132c has a polygonal shape and makes surface contact with the rotation stop plate 133. A tool mounting hole 132d is formed on the upper end surface of the nut member 132.

  The rotation stop plate 133 has a disk shape. The rotation stop plate 133 is formed with a fitting groove 133a extending from the outer peripheral edge. The rotation stop plate 133 is attached to the clip member 131 by fitting the main body 131b of the clip member 131 into the fitting groove 133a. The anti-rotation plate 133 has a pair of anti-rotation portions 133b and 133b provided upright on both sides of the fitting groove 133a. The rotation preventing portion 133 b is provided so as to prevent the rotation of the nut member 132 by making surface contact with the flat surface of the engaging surface 132 c provided on the nut member 132.

<The effect of the fluid apparatus connection structure which concerns on 6th Embodiment>
When attaching the attracting member 130 to the connecting member 7B, the support portion 131d of the clip member 131 is aligned with the mounting hole 81 of the connecting member 7B, and the attracting member 130 is pressed toward the mounting hole 81. The flexible pieces 131e, 131e are pressed against the inner wall of the mounting hole 81 and elastically deformed so as to fall to the leg portions 131c, 131c, and are inserted into the mounting holes 81, 85. When the flexible pieces 131e and 131e pass through the mounting holes 81 and 85, the flexible pieces 131e and 131e are deformed and restored in the outward direction away from the leg portions 131c and 131c, and are abutted against the extending portion 9a outside the mounting hole 85. At this time, the claw portions 131g and 131g are hooked on the inner wall of the mounting hole 85 to prevent the flexible pieces 131e and 131e from being excessively fallen outward and being deformed or damaged.

  The attracting member 130 holds the rotation stop plate 133 and the extending portions 8a and 9a of the connecting member 7B between the nut member 132 and the flexible pieces 131e and 131e. At this time, the extending portions 8a and 9a are held with a gap S1.

  When the nut member 132 tries to loosen due to deformation or the like, the engaging surface 132c of the nut member 132 tries to change the portion of the rotation stop plate 133 that contacts the rotation preventing portion 133b from the flat surface to the apex portion. The nut member 132 attempts to rotate together with the rotation stop plate 133 with the apex portion of the engagement surface 132 c in contact with the rotation stop portion 133 b.

  However, the rotation stop plate 133 is locked to rotation by fitting the fitting groove 133a into the main body 131b of the clip member 131. The clip member 131 is inserted in a state where the main body portion 133 b is rotationally stopped in the mounting holes 81 and 85. For this reason, even if the nut member 132 tries to rotate loosely, the engaging surface 132c has the extension portions 8a and 9a of the connecting member 7B via the rotation stop portion 133b of the rotation stop plate 133 and the main body portion 131b of the clip member 131. And is prevented from rotating.

  Thus, in the fluid device connection structure of the sixth embodiment, the connecting member 7B is provided with the mounting holes 81 and 85 in which the drawing member 130 is mounted in the first and second divided pieces 8B and 9B, and the drawing member 130, a clip member 131 that is non-rotatably mounted in the mounting holes 81, 85, a nut member 132 that is screwed to the clip member 131, and a rotation that prevents the nut member 132 from rotating relative to the clip member 131. And a stop mechanism 135. Therefore, in the fluid device connection structure of the sixth embodiment, even when the first and second connection portions 4 and 5 and the connecting member 7B are subjected to creep deformation or the like, the rotation stopping mechanism 135 prevents the nut member 132 from rotating. The connection state of the first and second connection parts 4 and 5 can be maintained.

  By the way, when the nut member 132 is screwed into the clip member 131, the distance between the nut member 132 and the flexible piece 131e is reduced, and the extending portions 8a and 9a of the connecting member 7B are brought close to each other so as to close the gap S1. . At this time, the flexible piece 131e is strongly pressed against the extending portion 9a and tends to fall outward. However, since the flexible piece 131e hooks the claw portions 131g and 131g provided at the tip portion on the inner wall of the mounting hole 85, the flexible piece 131e is restricted from falling outward. Therefore, in the attracting member 130, when the attracting force that generates the force for attracting the first and second connecting portions 4 and 5 is generated, the flexible piece 131e does not fall down and be deformed or damaged.

(Seventh embodiment)
Next, a fluid device connection structure according to a seventh embodiment of the invention will be described. FIG. 33 is an external perspective view of the connecting member 7C and the drawing member 140 used in the fluid device connection structure according to the seventh embodiment of the present invention. FIG. 34 is an external perspective view showing a state where the attracting member 140 shown in FIG. 33 is attached to the connecting member 7C.
The fluid device connection structure of the seventh embodiment has the same configuration as that of the fluid device connection structure of the third embodiment, except for the connecting member 7C and the drawing member 140. Therefore, here, the connecting member 7C and the attracting member 140, which are different from those in the third embodiment, will be mainly described, and the description in common with the third embodiment will be omitted as appropriate.

<Configuration of connecting member>
The connecting member 7 </ b> C is formed with mounting grooves 91 and 92 (an example of a mounting portion) for mounting the attracting member 140 opened on the side surfaces of the extending portions 8 a and 9 a.

<Structure of the attracting member>
In the pulling member 140, the nut member 102 is screwed and connected to the clip member 141. The clip member 141 is formed in a rectangular parallelepiped shape so that the clip member 141 is attached to the attachment grooves 91 and 92 while being rotated. At the lower end of the clip member 141, a pair of locking portions 141a and 141a that are locked to the extending portions 9a on both sides of the mounting groove 92 are provided so as to extend sideways. The clip member 141 prevents the nut member 102 from being loosened by the rotation stop mechanism 104 as in the third embodiment.

<The effect of the fluid apparatus connection structure which concerns on 7th Embodiment>
The connecting member 7C rotates the first divided piece 8C with respect to the second divided piece 9C with the rotation connecting portion 87 as a fulcrum, inserts the locking claw 8c into the insertion hole 9c, and extends the tip 8d. Hook 9a. At this time, in the first and second divided pieces 8C and 9C, a gap S1 is formed between the extending portions 8a and 9a.

  When the attracting member 140 is mounted on the connecting member 7C, the clip member 141 is inserted from the opening of the mounting grooves 91 and 92 provided in the extending portions 8a and 9a of the extending portions 8a and 9a, and the connecting member 7C is inserted. It is attached to.

  As described above, in the fluid device connection structure according to the seventh embodiment, the attracting member 140 can be easily attached to the connecting member 7 </ b> C simply by inserting the clip member 141 from the opening of the attachment grooves 91 and 92.

  Thereafter, when the sealing force of the first and second connecting portions 4 and 5 is reduced, the nut member 102 is rotated with respect to the clip member 141. As a result, the distance between the nut member 102 and the locking portions 141a and 141a is reduced, and the extending portions 8a and 9a are brought closer to close the gap S1. At this time, since the lower end portion of the clip member 141 is not bifurcated, even if the nut member 102 is tightened, the lower end portion of the clip member 141 is deformed, and the engagement between the locking portions 141a and 141a and the extending portion 9a. The stop state is not released.

(Eighth embodiment)
Next, an eighth embodiment of the fluid device connection structure of the present invention will be described. FIG. 35 is an external perspective view of the connecting member 7D and the drawing member 150 used in the fluid device connection structure according to the eighth embodiment of the present invention. 36 is an external perspective view showing a state in which the attracting member 150 is attached to the connecting member 7D shown in FIG. 37 is a cross-sectional view taken along the line CC of FIG. FIG. 38 is an external perspective view showing an attracting force generation state in which the connecting member 7 </ b> D shown in FIG. 35 is caused to generate an attracting force by the attracting member 150. 39 is a cross-sectional view taken along the line DD of FIG.
The fluid device connection structure of the eighth embodiment has the same configuration as the fluid device connection structure of the third embodiment, except for the extending portions 8a and 9a of the connecting member 7D and the drawing member 150. Therefore, here, it demonstrates centering on a different part from 3rd Embodiment, and attaches | subjects the same code | symbol to a drawing and the point which is common in 3rd Embodiment, and abbreviate | omits description suitably.

<Configuration of connecting member>
The connecting member 7D shown in FIG. 35 is made of resin. The extending portions 8a and 9a of the connecting member 7D are provided with locking claws 8c and insertion holes 9c. As shown in FIG. 37, a fitting groove 95 into which the clip member 151 of the drawing member 150 is fitted is formed on the outer surface of the extending portion 9a.

<Structure of the attracting member>
In the drawing member 150 shown in FIG. 35, a resin-made rotating member 152 is rotatably held by a resin-made clip member 151. The clip member 151 is a U-shaped frame that opens to one side. As shown in FIG. 37, the clip member 151 is provided with a support shaft 151a for pivotally supporting the rotation member 152 on the inner circumferential surface of the opening end.

  The rotating member 152 is formed in a substantially arc shape. The rotating member 152 is provided with a cam portion 152a at an end portion held by the support shaft 151a. The cam portion 152a rises to the end portion side supported by the support shaft 151a and one surface side of the rotating member 152 in order to change the distance between the support shaft 151a and the extending portion 8a. The rotating member 152 has a thick shape so as not to protrude toward the other surface. The turning member 152 has cut grooves 152b and 152b formed on both sides of the cam portion 152a so that the cam portion 152a can be elastically deformed independently. In the present embodiment, the cam portion 152a and the extending portion 8a constitute a “cam mechanism”.

  As shown in FIGS. 36 and 37, the cam portion 152a has an extension portion of the cam portion 152a from the center of the support shaft 151a when the attracting member 150 is attached to the extension portions 8a and 9a with a gap S1. The distance X to the contact surface with 8a is minimized (the posture of the rotating member 150 at this time is referred to as a “first posture”). As shown by the arrows in FIGS. 36 and 37, the cam portion 152a extends from the center of the support shaft 151a when the rotating member 152 is rotated from the first posture toward the connecting member 7D. The distance X to the surface up to the abutting surface is gradually increased to press the extended portion 8a toward the extended portion 9a.

  The cam portion 152a extends from the center of the support shaft 151a so as to be bent by receiving the repulsive force of the extending portion 8a by further rotating the rotating member 152 after the extending portion 8a and the extending portion 9a contact each other. The distance X to the contact surface with the installation portion 8a is designed to be long. As shown in FIGS. 38 and 39, the cam portion 152a has a flat surface that makes surface contact with the extending portion 8a so that the rotating member 152 maintains the second posture in which the cam portion 152a is bent. Is provided.

<Operational Effects of Fluidic Device Connection Structure According to Eighth Embodiment>
As shown in FIG. 35, the connecting member 7D rotates the first divided piece 8D toward the second divided piece 9D with the rotation connecting portion 87 as a fulcrum, and inserts the locking claw 8c into the insertion hole 9c. Thus, the first and second connection portions 4 and 5 are attached to the connection portions. The attracting member 150 is attached to the connecting member 7D when the sealing force of the first and second connecting portions 4 and 5 is reduced.

  When the attracting member 150 is mounted, the rotating member 152 is set to the first posture as shown in FIG. 36 and 37, the extending portions 8a and 9a are inserted between the clip member 151 and the rotating member 152, and the clip member 151 is fitted into the fitting groove 95. Then, as indicated by an arrow in the figure, the turning member 152 is turned to the connecting member 7D side. The rotating member 152 rotates while the cam portion 152a is in sliding contact with the extended portion 8a.

  When the extended portion 8a is pushed down by the cam portion 152a and comes into contact with the extended portion 9a, the rotating member 152 is less likely to rotate due to the repulsive force from the extended portion 8a. However, the rotating member 152 is further rotated to the connecting member 7D side to bend the cam portion 152a. Then, the rotating member 152 is rotated to the connecting member 7D side until the flat surface of the cam portion 152a is brought into surface contact with the extending portion 8a. Thereby, the rotating member 152 is held in the second posture.

  The attracting member 150 is in pressure contact with the extended portion 8a by bending the cam portion 152a. Therefore, in the attracting member 150, even if the connecting member 7D is deformed, the rotating member 152 does not return from the second posture to the first posture. As a result, the connecting member 7D is maintained in a state where a force that draws the first and second connection portions 4 and 5 is generated, and the sealing force can be improved.

  Such a fluid device connection structure of the eighth embodiment can draw the first and second connection portions 4 and 5 simply by rotating the attracting member 150 without using a tool.

  In addition, the fluid device connection structure of the eighth embodiment is such that the attracting member 150 is rotatably attached to the connecting portion of the first and second divided pieces 8D and 9D, and the attracting member 150 is rotated. After the first divided piece 8D is brought into contact with the second divided piece 9D, the attracting member 150 is provided with a cam portion 152a that receives a repulsive force from the first divided piece 8D. Therefore, in the fluid device connection structure of the eighth embodiment, the first and second connection portions 4 and 5 and the connecting member 7D are arranged in a direction in which the first and second divided pieces 8D and 9D are separated by thermal deformation, fluid pressure, or the like. Even if the force is received, the attracting member 150 is prevented from reversing from the attracting force generating position where the force for attracting the first and second connecting portions 4 and 5 is generated to the initial position, thereby improving the sealing force. Can be maintained.

(Ninth embodiment)
Next, a ninth embodiment of the fluid device connection structure of the present invention will be described. FIG. 40 is an external perspective view of the connecting member 7E and the attracting member 160 used in the fluid device connection structure according to the ninth embodiment of the present invention. 41 to 44 are cross-sectional views for explaining a process of attaching the attracting member 160 shown in FIG. 40 to the connecting member 7E. In particular, FIG. 41 shows a state in which the attracting member 160 is disposed at the initial position. FIG. 42 shows a state in which the attracting member 160 is disposed at the rotation limit position. FIG. 43 shows a state in which the attracting member 160 is disposed at the pressing start position. FIG. 44 shows a state in which the attracting member 160 is disposed at the attracting force generation position.

  The fluid device connection structure of the ninth embodiment has the same configuration as the fluid device connection structure of the eighth embodiment, except for the connecting member 7E and the drawing member 160. Therefore, here, the description will focus on parts that are different from the eighth embodiment, and the same points as in the eighth embodiment will be denoted by the same reference numerals in the drawings, and description thereof will be omitted as appropriate.

<Configuration of connecting member>
The connecting member 7E is a member in which a first divided piece 8E provided with a cam portion 96 is connected to a second divided piece 9D so as to be rotatable via a rotating connecting portion 87. The extending portion 8a of the first divided piece 8E is provided with a cam portion 96 on the side surface facing the side surface on which the locking claw 8c is provided.

  In the cam portion 96, the extending portion 8a is pressed by the attracting member 160 while the attracting member 160 is rotated from the initial position shown in FIG. 41 to the attracting force generating position shown in FIG. It is provided so as to contact 9a. The cam portion 96 is provided so as to prevent the attracting member 160 from returning from the attracting force generating position to the initial position by pressing the attracting member 160 disposed at the attracting force generating position shown in FIG. It has been. The cam portion 96 holds the attracting member 160 at the attracting force generation position, the inclined surface 96a that allows the attracting member 160 to rotate, the raised surface 96b that generates resistance between the attracting member 160, and the like. The concave surface 96c forms a cam surface.

<Structure of the attracting member>
As shown in FIG. 40, the attracting member 160 has an arc shape made of resin. Support walls 161 and 161 are provided at both ends of the attracting member 160. The support walls 161 and 161 further extend from the end portion of the attracting member 160, and a support shaft 162 is installed at the tip portion. Therefore, a space for inserting the extending portions 8a and 9a is formed between the attracting member 160, the support shaft 162, and the support walls 161 and 161.

  In the drawing member 160, cut grooves 163 and 163 are formed from the end on the support shaft 162 side, and a flexible piece 164 is formed between the cut grooves 163 and 163 so as to be elastically deformable. As shown in FIGS. 41 to 44, a sliding contact convex portion 165 slidably contacting the cam portion 96 is provided at the distal end portion of the flexible piece 164.

<Operational effects of the invention according to the ninth embodiment>
The connecting member 7E shown in FIG. 40 rotates the first divided piece 8E with respect to the second divided piece 9D with the rotation connecting portion 87 as a fulcrum. Then, as shown in FIG. 41, the locking claw 8c is inserted into the insertion hole 9c, and the distal end portion 8d is locked to the extending portion 9a. As a result, the connecting member 7E is attached to the connecting portion of the first and second connecting portions 4 and 5. The attracting member 160 is attached to the connecting member 7E when the sealing force of the first and second connecting portions 4 and 5 is reduced.

  As shown in FIG. 41, the extending portions 8 a and 9 a are inserted between the attracting member 160 and the support shaft 162. Then, the support shaft 162 is fitted into the fitting groove 95 of the extending portion 9a, and the attracting member 160 is positioned with respect to the connecting member 7E. Then, as shown in the direction of the arrow in the figure, the attracting member 160 is rotated toward the connecting member 7E with the support shaft 162 as a fulcrum.

  At this time, as shown in FIG. 42, the attracting member 160 rotates while sliding the sliding contact convex portion 165 against the inclined surface 96a, and presses the extending portion 8a toward the extending portion 9a. Thereby, the extension part 8a approaches the extension part 9a so as to close the gap S1.

  As shown in FIG. 43, the attracting member 160 generates resistance when the sliding contact convex portion 165 passes through the raised surface 96b, and the flexible piece 164 bends. At this time, the extended portion 8a abuts on the extended portion 9a to make the gap S1 zero.

  As shown in FIG. 44, the attracting member 160 is further rotated thereafter, and the sliding contact convex portion 165 is fitted into the concave surface 196c. Thereby, the attracting member 160 is arranged at the attracting force generation position. At this time, the attracting member 160 bends in a state where the flexible piece 164 presses the sliding projection 165 on the slope between the raised surface 196b and the concave surface 196c, and the extending portion 8a toward the extending portion 9A. Press. The pressing force at this time becomes maximum at the end of the raised surface 196b (before the concave surface 196c) and slightly decreases at the same time as it fits into the concave surface, so that the attracting member 160 does not return from the attracting force generating position to the initial position. .

  As described above, in the fluid device connection structure according to the ninth embodiment, when the connecting member 7E is rotated by attaching the attracting member 160 to the extending portions 8a and 9a, the extending portion 8a is changed to the extending portion 9a. A cam portion 96 that is brought into pressure contact with the attraction member 160 after being brought into contact is provided in the extending portion 8a. Therefore, according to the fluid device connection structure of the ninth embodiment, the first and second connection portions 4 and 5 can be drawn without using a tool.

  Further, in the fluid device connection structure of the ninth embodiment, the attraction member 160 is rotatably attached to the connecting portion of the first and second divided pieces 8E and 9D, and the connecting member 7E has the attraction member 160 attached thereto. When rotating, the cam part 96 which receives a repulsive force from the attracting member 160 after the first divided piece 8E comes into contact with the second divided piece 9D is provided in the first divided piece 8E. For this reason, the fluid device connection structure of the ninth embodiment is capable of pulling even if the first and second connection portions 4, 5 and the connecting member 7E receive a force in the direction of separating the divided pieces due to thermal deformation, fluid pressure, or the like. It is possible to maintain the state in which the sealing member 160 is prevented from reversing from the attracting force generation position to the initial position and the sealing force is improved.

In addition, this invention is not limited to the said embodiment, Various application is possible.
(1) For example, in the said embodiment, although the connection members 7 and 7A were divided into two, you may divide into three or more. Further, the plurality of divided pieces do not necessarily have to be integrated with the connecting band 14, and may be separated.
(2) For example, in the above-described embodiment, the first and second connecting portions 4 and 5 are provided with the annular protrusions 4 b and 5 b, and the annular groove 11 a and 11 b are formed in the seal member 6. On the other hand, an annular protrusion may be provided on the seal member, and an annular groove in which the annular protrusion is press-fitted into the first and second connection portions may be formed. In this case, it is preferable to provide a press-fitting allowance on the annular projection side.
(3) For example, in the first embodiment, the attracting member 10 is attached to the bolt holes 8 b and 9 b of the first and second divided pieces 8 and 9 from the initial assembly of the connecting member 7. On the other hand, after the first and second connecting portions creep and need to improve the sealing force, the attracting member 10 is lost by attaching the attracting member 10 to the bolt holes 8b and 9b. May be prevented.
(4) For example, in the above embodiment, the engaging portion in which the locking claw 8c is engaged with the extending portion 72, and the first and second engaging protrusions 8e and 9d are connected to the first and second engaging recesses 8i. The first and second divided pieces 8 and 9 are engaged with the engaging portions engaged with the first and second engaging projections 8e and 9d and the first and second engaging recesses. The engaging portion with 8i, 9e may be changed to a structure in which the engaging claw is inserted through the insertion hole and engaged. In addition, when the connecting member is divided into multiple parts, the divided pieces are connected to each other by a rotating shaft to form a chain, and at least one of the engaging part and the engaged part provided at both ends is elastically deformed to form the engaging part. You may make it engage with an to-be-engaged part and comprise an annular connection member.
(5) In the above embodiment, the outer shape of the first and second divided pieces 8 and 9 is a semicircular arc shape, but the outer shape of the first and second divided pieces may be a rectangular parallelepiped shape or the like.
(6) In the above embodiment, the locking claw 8c is inserted into the insertion hole 9c and engaged with the extending portion 9a. However, the insertion hole 9c may be a bottomed hole having an L-shaped cross section. Further, a locking claw may be provided instead of the insertion hole 9c, and the locking claws (corresponding to the engaging portion and the engaged portion) may be engaged with each other while being elastically deformed.
(7) In the fourth embodiment, the groove bottom of the second positioning groove 113c has a polygonal shape. On the other hand, the groove bottom of the second positioning groove 113c may be circular.
(8) For example, the attracting member is not limited to one that generates a force that draws the first and second connecting portions 4 and 5 close to each other by the screw structure or the cam structure. For example, the first and second divided pieces 8 and 9 are attached to the extended portions 8a and 9a or the outer periphery of the first and second divided pieces 4 and 5 in a state where the first and second divided pieces 8 and 9 are brought close by a jig so as to close the gaps S and S1. The attracting member may be configured by a band, a formwork, or the like.

It is sectional drawing of the fluid apparatus connection structure which concerns on 1st Embodiment of this invention. It is a disassembled perspective view of the fluid apparatus connection structure shown in FIG. It is a top view of the sealing member shown in FIG. It is AA sectional drawing of the sealing member shown in FIG. FIG. 2 is an exploded cross-sectional view of first and second connecting portions and a seal member shown in FIG. 1. It is an external appearance perspective view of the connection member shown in FIG. It is a side view which shows the initial assembly state of the connection member shown in FIG. It is an external appearance perspective view of the jig | tool used at the time of component assembly in the fluid apparatus connection structure shown in FIG. It is assembly explanatory drawing in the fluid apparatus connection structure shown in FIG. 1, Comprising: The drawing method by a jig | tool is shown especially. It is assembly explanatory drawing in the fluid apparatus connection structure shown in FIG. 1, Comprising: The mounting method of a connection member is shown especially. The side view which shows the attracting force generation | occurrence | production state of the connection member shown in FIG. 1 is shown. It is sectional drawing which shows the attraction force generation | occurrence | production state of the fluid apparatus connection structure shown in FIG. It is an external appearance perspective view of the fluid apparatus unit using the fluid apparatus connection structure shown in FIG. It is a side view of the connection member used for the fluid apparatus connection structure which concerns on 2nd Embodiment of this invention, Comprising: An initial stage assembly state is shown. It is a side view of the connection member shown in FIG. 14, Comprising: The attracting force generation | occurrence | production state is shown. It is sectional drawing of the connection member shown in FIG. It is an exploded view of the connection member used for the fluid apparatus connection structure which concerns on 3rd Embodiment of this invention. It is the figure which combined the 1st division | segmentation piece and 2nd division | segmentation piece which comprise the connection member shown in FIG. FIG. 18 is an external perspective view of the connecting member and the drawing member shown in FIG. 17. It is a figure which shows the state which attached the attracting member to the connection member shown in FIG. It is a figure which shows the attraction force generation | occurrence | production state of the connection member shown in FIG. It is a center longitudinal cross-sectional view of the drawing member shown in FIG. It is BB sectional drawing of FIG. It is an external appearance perspective view of the connection member and drawing member used for the fluid apparatus connection structure which concerns on 4th Embodiment of this invention. It is sectional drawing of the drawing member shown in FIG. 24, Comprising: The state which has arrange | positioned the rod member in the 2nd position is shown. It is sectional drawing of the drawing member shown in FIG. 24, Comprising: The state which has arrange | positioned the rod member in the 1st position is shown. It is sectional drawing of the attracting member shown in FIG. 24, Comprising: The attracting force generation | occurrence | production state is shown. It is a disassembled perspective view of the attracting member used for the fluid apparatus connection structure which concerns on 5th Embodiment of this invention. It is sectional drawing of the drawing member shown in FIG. It is a figure which shows the state which attached the attracting member to the connection member used for the fluid apparatus connection structure which concerns on 6th Embodiment of this invention. FIG. 31 is an exploded view of the attracting member shown in FIG. 30. It is a longitudinal cross-sectional view of the drawing member shown in FIG. It is a disassembled external appearance perspective view of the connection member and attracting member which are used for the fluid apparatus connection structure concerning 7th Embodiment of this invention. FIG. 34 is an external perspective view showing a state where the attracting member shown in FIG. 33 is attached to the connecting member. It is an external appearance perspective view of the connection member and drawing member used for the fluid apparatus connection structure which concerns on 8th Embodiment of this invention. It is an external appearance perspective view which shows the state which mounted | wore the attracting member with the connection member shown in FIG. It is CC sectional drawing of FIG. It is an external appearance perspective view which shows the attraction force generation | occurrence | production state of the connection member shown in FIG. It is DD sectional drawing of FIG. It is an external appearance perspective view of the connection member and drawing member which are used for the fluid apparatus connection structure concerning 9th Embodiment of this invention. It is sectional drawing for demonstrating the process of mounting | wearing the connection member shown in FIG. 40 to a connection member, Comprising: The state which has arrange | positioned the attraction member in the initial position is shown. It is sectional drawing for demonstrating the process of mounting | wearing the connection member shown in FIG. 40 to a connection member, Comprising: The state which has arrange | positioned the attraction member in the rotation restriction position is shown. It is sectional drawing for demonstrating the process of mounting | wearing the connection member shown in FIG. 40 to a connection member, Comprising: The state which has arrange | positioned the attraction member in the press start position is shown. It is sectional drawing for demonstrating the process of mounting | wearing the connection member shown in FIG. It is sectional drawing of the conventional fluid apparatus connection structure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fluid equipment connection structure 2 1st fluid equipment 3 2nd fluid equipment 4 1st connection part 4a Sealing groove 4b Annular protrusion (annular uneven | corrugated strip)
4c 1st installation groove | channel 4d End surface side inner surface 4e Connection part side taper 4f 1st attachment groove | channel 4g Projection part 4h Flow path 5 2nd connection part 5a Seal groove 5b Annular protrusion
5c Second mounting groove 5d End side inner surface 5e Connection side taper 5f Second mounting groove 5g Protrusion 5h Flow path 6 Seal members 7, 7A, 7B, 7C, 7D, 7E Connecting members 8, 8A, 8B, 8C, 8D, 8E First divided piece 8h Connection side taper 8j First protrusion 8k Second protrusion 9, 9A, 9B, 9C, 9D Second division piece 9h Connection side taper 9j First protrusion 9k Second protrusion 10, 100, 110, 120, 130, 140, 150, 160 Attraction member 11 Body 11a, 11b Annular groove (annular ridge)
12 Grasping part 12a Hook part 13 Overhang part 14 Rotating connection part 75 Male thread part (attraction member)
81, 85 Mounting hole 87 Rotating connecting portion 91, 92 Mounting groove

Claims (11)

The first fluid device and the second fluid device each include a first connection portion and a second connection portion made of resin, and a seal groove is formed around a flow path that opens at an end surface of the first and second connection portions. In the fluid device connection structure that is formed and a resin sealing member is disposed between the seal grooves and the first connection portion and the second connection portion are connected using a resin connection member,
The first connection part is:
A first mounting groove formed on the outer peripheral surface of the first connection portion;
A first mounting groove provided between the first mounting groove and an end surface of the first connection portion, to which the connecting member is mounted;
The second connection portion is
A second mounting groove formed on the outer peripheral surface of the second connection portion;
A second mounting groove provided between the second mounting groove and an end surface of the second connection portion, to which the connecting member is mounted;
The connecting member is
A plurality of divided pieces in which a first protrusion that contacts the inner surface of the first mounting groove and a second protrusion that contacts the inner surface of the second mounting groove are provided at a predetermined interval. A fluid device connection structure characterized by being engaged with each other. In the fluid device connection structure according to claim 1,
The end surface side inner surface of the first mounting groove, the end surface side inner surface of the first mounting groove, and the end surface side inner surface of the second mounting groove and the end surface side inner surface of the second mounting groove, respectively, A fluid device connection structure, wherein the fluid device connection structure is parallel to an end surface of the first connection portion and an end surface of the second connection portion. In the fluid device connection structure according to claim 1 or 2,
In the first mounting groove and the second mounting groove, a connection portion side taper is formed on the back side from the opening of the inner surface on the end surface side,
The connecting member is
A connection side taper corresponding to the connection side taper is provided at the tip of the first protrusion and the second protrusion,
When the sealing force of the first and second connection portions is reduced, the plurality of divided pieces are brought closer to each other, thereby sliding the connection side taper along the connection portion side taper. A fluid device connection structure comprising an attracting member that generates and maintains a force for attracting the second connection portion. In the fluid device connection structure according to any one of claims 1 to 3,
The connecting member is composed of a first divided piece and a second divided piece, a turning connecting portion for rotatably connecting one end of the first divided piece and the second divided piece, and the first divided piece. A locking claw provided on the second divided piece, and an insertion hole provided in the second divided piece and restored after the locking claw is elastically deformed and locked to the outer periphery of the opening. And a fluid device connection structure. In the fluid device connection structure according to claim 4,
The rotation connecting portion is composed of an engaging protrusion and an engaging recess provided on the first divided piece and the second divided piece, respectively, and the engaging protrusion and the engaging recess are engaged with each other. The fluid device connection structure according to claim 1, wherein, when combined, the engaging protrusion is locked to the inner wall of the engaging recess in a different direction. In the fluid device connection structure according to claim 4,
The rotation connecting portion is configured by providing a rotation shaft on the first divided piece and providing a U-shaped rotation engagement portion on the second divided piece for engaging the rotation shaft,
The fluid device connection structure, wherein the rotation engaging portion is opened on a side opposite to a surface where the second divided piece abuts on the first divided piece. In the fluid device connection structure according to claim 3,
The connecting member is provided with a mounting portion to which the attraction member is mounted on the split piece,
The attraction member includes a clip member that is non-rotatably attached to the attachment portion, a nut member that is screwed to the clip member, and a rotation stopper that prevents the nut member from rotating relative to the clip member. A fluid device connection structure characterized by comprising a mechanism. In the fluid device connection structure according to claim 3,
The attraction member is rotatably attached to the connecting portion of the divided pieces,
When the attracting member is rotated, a cam portion that receives a repulsive force from the one divided piece after the one divided piece is brought into contact with the other divided piece is provided in the attracting member. Fluidic device connection structure characterized by In the fluid device connection structure according to claim 3,
The attraction member is rotatably attached to the connecting portion of the divided pieces,
The connecting member has a cam portion that receives a repulsive force from the attracting member after the one split piece comes into contact with the other split piece when the attracting member is rotated. A fluid device connection structure characterized by being provided. In the fluid device connection structure according to any one of claims 1 to 9,
In the first and second connection portions, the seal groove has an annular ridge,
The fluid device connection structure according to claim 1, wherein the seal member includes an annular ridge that is press-fitted into the annular concavo-convex shape.   A fluid device unit, wherein a plurality of fluid devices are connected using the fluid device connection structure according to any one of claims 1 to 10.

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