JP2010216507A - Fluid device connecting structure and fluid device unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact fluid device connecting structure. <P>SOLUTION: The fluid device connecting structure 50 is maintained to couple first and second connection parts 8, 9 through an annular seal member 31 using a coupling member 51. The first and second connection parts 8, 9 have first connection side tapered surfaces 24, 25 on the outer periphery of end-face-side inside surfaces 20, 21 of first and second fitting grooves 18, 19 in which the coupling member 51 is disposed. The coupling member 51 has split members 52, 53. The split members 52, 53 have first projecting portions 54, 56 in contact with the end-face-side inside surface 20, and second projecting portions 55, 57 in contact with the end-face-side inside surface 21. When drawing the split members 52, 53, the first projecting portions 54, 56 include first connecting side tapered surfaces 69, 74 coming into slidable contact with the first connecting side tapered surface 24. When drawing the split members 52, 53, the second projecting portions 55, 57 include second connecting side tapered surfaces 70, 75 coming into slidable contact with the second connecting side tapered surface 25. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a fluid device connection structure and a fluid device unit that connect first and second fluid devices using a connecting member.

  Conventionally, for chemical control in semiconductor manufacturing processes and liquid crystal manufacturing processes, valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, piping such as joint blocks and flow path blocks Fluid devices such as blocks are used. In recent years, in order to make the apparatus compact, connecting portions of these fluid devices are directly connected using a connecting member to form a unit.

FIG. 12 is a cross-sectional view of a conventional fluid device connection structure 100.
In the conventional fluid device connection structure 100, seal grooves 105 and 106 are formed in the connection portions 103 and 104 of the first fluid device 101 and the second fluid device 102, and a seal member 107 is mounted between the seal grooves 105 and 106. In this state, the connecting member 108 is attached to the outer periphery of the connection portion of the connection portions 103 and 104.

  The connecting member 108 includes a cylindrical nut 109 and a split ring 110. The cylindrical nut 109 has a cylindrical shape that opens to one side. An opening 109a is formed on the closing surface so that the locking convex portion 104a of the connecting portion 104 can be inserted. The split ring 110 has a ring shape in which the inner peripheral surface is in contact with the outer peripheral surface of the connecting portion 104 and the outer peripheral surface is in contact with the inner peripheral surface of the cylindrical nut 109 so that the split ring 110 can be attached to the outer peripheral surface of the connecting portion 104. It is divided into multiple parts.

  In such a connecting member 108, after inserting the end of the connecting portion 104 of the second fluid device 102 into the opening 109 a of the cylindrical nut 109, the connecting portion 104 is exposed to the outside as shown by a two-dot chain line in the figure. The cylindrical nut 109 is shifted to the second fluid device 102 side so as to be exposed, and the split ring 110 is attached to the outer peripheral surface of the connecting portion 104. Then, the cylindrical nut 109 is slid to the first fluid device 101 side, and the female screw 109b formed on the inner peripheral surface of the cylindrical nut 109 is replaced with the male screw 103a formed on the outer peripheral surface of the connection portion 103 of the first fluid device 101. Screwed on. The cylindrical nut 109 is screwed into the connecting portion 103 until the split ring 110 hits the locking convex portion 104a of the connecting portion 104. By this screw feed, the seal member 107 is mounted in the seal grooves 105 and 106 and seals the connection portions of the connection portions 103 and 104 (see, for example, Patent Document 1).

JP 2006-64080 A

  However, the conventional fluid device connection structure 100 requires a space for moving the cylindrical nut 109 and a space for screwing the cylindrical nut 109 into the connection portion 103 in order to mount the split ring 110. It takes time and work space to connect each other. Therefore, for example, when the conventional fluid device connection structure 100 is applied to a semiconductor manufacturing apparatus in which a large number of fluid devices are arranged in an intricate manner, a space for shifting the cylindrical nut 109 or tightening the connection portion 103 cannot be secured. It takes time and effort to properly tighten the cylindrical nut 109 to the connecting portion 103 so as to obtain a predetermined sealing force.

  Therefore, the applicant has proposed a fluid device connection structure 200 shown in the sectional views of FIGS. 13 to 16 in Japanese Patent Application No. 2008-180545. In the fluid device connection structure 200, the first and second connection portions 203 and 204 of the first and second fluid devices 201 and 202 are connected via an annular seal member 205, and the first and second connection portions 203 and 204 are connected. The connecting member 206 is attached to the outer periphery of the rim to maintain the connection state. The connecting member 206 is configured by engaging both end portions of the first divided piece 207 and the second divided piece 208.

  As shown in FIG. 13, the first segment 207 is formed on the outer periphery of the first protrusion 207 a disposed in the first mounting groove 203 a formed on the outer periphery of the first connection portion 203 and on the outer periphery of the second connection portion 204. And a second protrusion 207b disposed in the second mounting groove 204a. Moreover, the 2nd division | segmentation piece 208 has the 1st protrusion 208a arrange | positioned at the 1st mounting groove 203a, and the 2nd protrusion 208b arrange | positioned at the 2nd mounting groove 204a. As shown in FIG. 14, one end of each of the first and second divided pieces 207 and 208 is engaged via a support shaft 211 so as to be rotatable. On the other hand, the other ends of the first and second divided pieces 207 and 208 are provided with locking claws 207e protruding from the first extending portion 207i of the first divided piece 207 and second extending portions 208i of the second divided piece 208. After being inserted into the insertion hole 208e formed in the elastic member while being elastically deformed, the engaging claw 207e is restored and engaged with the second extending portion 208i to be engaged.

  Such a connecting member 206 rotates the first divided piece 207 with respect to the second divided piece 208 with the support shaft 211 as a base point, and inserts the locking claw 207e into the insertion hole 208e to form the second extending portion. The first and second projecting portions 207a, 207b, 208a, 208b of the first and second divided pieces 207, 208 are locked to the first and second connecting portions 203, 204 by engaging with 208i. It arrange | positions to the mounting grooves 203a and 204a. The first and second connecting portions 203 and 204 try to move away from each other due to the repulsive force of the annular seal member 205, but as shown in FIG. 13, the end surfaces of the first and second mounting grooves 203a and 204a The inner surface is supported by the first and second protrusions 207a, 207b, 208a, and 208b of the connecting member 206, the movement is restricted, and the connected state is maintained. Therefore, according to the fluid device connection structure 200 shown in FIGS. 13 and 14, the connecting member 206 can be easily attached to the connection portions of the first and second connection portions 203 and 204 in a small space.

  The first and second connecting portions 203 and 204, the annular seal member 205, and the first and second divided pieces 207 and 208 shown in FIG. 13 are made of resin. Therefore, for example, when a high-temperature chemical solution and low-temperature pure water are alternately passed through the first and second connection portions 203 and 204, the first and second connection portions 203 and 204 are creep-deformed and the sealing force is reduced. There is. Therefore, as shown in FIGS. 13 and 15, the connecting member 206 has first and second protrusions 207 a, 207 b, 208 a, 208 b at the front ends of the first and second divided pieces 207, 208. Two connecting side taper surfaces 207f, 207g, 208f, 208g are provided. The first and second connection portions 203 and 204 have first and second connection-side tapered surfaces 203b and 204b in sliding contact with the first and second connection-side tapered surfaces 207f, 207g, 208f, and 208g, respectively. And provided at the bottom of the second mounting grooves 203a, 204a. Further, as shown in FIG. 16, the connecting member 206 is increased to bring the first and second divided pieces 207 and 208 closer to each other and draw the first and second connecting portions 203 and 204 together to increase the sealing force. A fastening member 210 is attached.

  Therefore, as shown in FIG. 16, the fluid device connection structure 200 is inserted into the insertion hole 207h of the first divided piece 207 and tightened into the bolt hole 208h of the second divided piece 208, as shown in FIG. As shown in FIG. 1, the first and second divided pieces 207 and 208 are pulled close to bring the first and second connection-side tapered surfaces 207f, 207g, 208f, and 208g into the first and second connection portions 203 and 204, respectively. The two connection side taper surfaces 203b and 204b are brought into sliding contact, and the first and second connection portions 203 and 204 are brought close to each other. Therefore, the fluid device connection structure 200 shown in FIGS. 13 to 16 can improve the sealing force by tightening the additional tightening member 210.

  However, in recent years, it is known that semiconductor manufacturing apparatuses are becoming more compact. For this reason, the semiconductor industry demands that the fluid device connection structure 200 be further compact.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a compact fluid device connection structure.

The fluid device connection structure and the fluid device unit according to the present invention have the following configurations.
The first fluid device and the second fluid device each include a first connection portion and a second connection portion made of resin, and a first annular seal groove around a flow path that opens at a first end surface of the first connection portion. Is formed, and a second annular seal groove is formed around the flow path opened in the second end surface of the second connection portion, and the resin-made annular seal is formed between the first and second annular seal grooves. In the fluid device connection structure in which a connecting member made of resin is attached to the first connection portion and the second connection portion, which are arranged and connected, and the connection state of the first and second connection portions is maintained. The first connection part is formed on the outer peripheral surface of the first connection part, and the first connection groove is formed on the outer periphery of the inner surface of the first mounting groove. And the second connecting portion is formed on an outer peripheral surface of the second connecting portion, and the connecting portion And a second connection side taper surface formed on the outer periphery of the inner surface of the end surface of the second mounting groove, and the connecting member is on the end surface side of the first mounting groove. The first protrusion that contacts the inner surface and the second protrusion that contacts the inner surface on the end face side of the second mounting groove are engaged with a plurality of divided pieces provided at a predetermined interval. Then, when the sealing force is reduced, the plurality of divided pieces are pulled and tightened in a direction to bring the first connecting portion and the second connecting portion closer together, and the first protrusion includes the plurality of divided pieces. A first connecting side taper surface that slidably contacts the first connection side taper surface when pulling, and the second projecting portion slidably contacts the second connection side taper surface when pulling the plurality of divided pieces; It has 2 connection side taper surfaces.

  In the fluid device connection structure, it is desirable that the connecting member has a retightening member for pulling the plurality of divided pieces.

  In the fluid device connection structure, the plurality of divided pieces are provided with arc-shaped tips in the protruding direction of the first protrusion and the second protrusion, and the first protrusion has the first mounting groove. A first straight surface that is parallel to the inner surface of the first end surface and abuts against the inner surface of the first mounting groove is provided in the outer diameter direction from the tip in the protruding direction, and the first connecting side tapered surface is The second protrusion is provided on the outer side in the radial direction of the first straight surface, and is parallel to the inner surface of the second mounting groove and contacts the inner surface of the second mounting groove. It is desirable that the second straight surface that comes into contact is provided in the outer radial direction from the tip in the protruding direction, and the second connection-side tapered surface is provided on the outer side in the radial direction of the second straight surface.

  In the fluid device connection structure, the coupling member includes a first divided piece and a second divided piece arranged so as to sandwich a connecting portion of the first and second connecting portions, and the first and second One end and the other end of each of the two split pieces are disposed at opposite positions across the connection portion of the first and second connection portions, the one ends are rotatably engaged with each other, and the other ends are predetermined A gap formed between the first and second divided pieces and the connection portion of the first and second connecting portions is spaced apart from the predetermined distance. In the initial state in which the first and second divided pieces are engaged with each other, it is formed between one end engaging portion where the one ends are engaged with each other and a connecting portion of the first and second connecting portions. The gap portion, the other end engaging portion where the other ends are engaged with each other, and the connecting portion between the first and second connecting portions When the gap between the first and second divided pieces is pulled close and the predetermined gap is closed, the radial width dimension is uniform at the minimum gap in the initial state. It is desirable to have a perfect circle shape.

  In the fluid device connection structure, at least one of the engaging portions that engage the plurality of divided pieces has one divided piece provided with a locking claw so as to be elastically deformable, and an insertion through which the locking claw can be inserted. The first claw is engaged with the other divided piece having a portion, and the locking claw inserted through the insertion portion follows the outer peripheral surface formed in the arc shape of the other divided piece. And it is desirable to be locked at a position near the connecting portion of the second connecting portion.

  In the fluid device connection structure, the annular seal member is provided integrally with the main body portion that is mounted in the first and second annular seal grooves, and the first end surface and the second end surface are provided. It is desirable that the exposed portion is exposed to the outside of the connecting portion of the first and second connecting portions from the gap, and the connecting member is provided with an exposed portion capable of exposing the exposed portion.

  In the fluid device connection structure, it is preferable that at least a position corresponding to the exposed portion of the annular seal member is distinguishable from the first and second connection portions.

  The fluid device unit of the present invention connects the first fluid device and the second fluid device using any one of the fluid device connection structures described above.

  In the fluid device connection structure and the fluid device unit of the present invention, the first connection portion of the first fluid device is provided with the first connection side taper surface on the outer periphery of the inner surface on the end surface side of the first mounting groove. Moreover, the 2nd connection part of a 2nd fluid apparatus is provided with the 2nd connection side taper surface in the outer periphery of the end surface side inner surface of a 2nd mounting groove. On the other hand, the connecting member includes a plurality of divided pieces, and first and second protrusions that are mounted in the first and second mounting grooves are provided in each divided piece. The first protrusion is provided with a first connection side taper surface that is in sliding contact with the first connection side taper surface when the plurality of divided pieces are pulled together. Moreover, the 2nd connection side taper surface which slidably contacts the 2nd connection side taper surface is provided in the 2nd protrusion part, when a several division | segmentation piece is drawn near. When the sealing force is reduced and the plurality of divided pieces are pulled together, the first and second connection-side tapered surfaces of the divided pieces are brought into sliding contact with the first and second connection-side tapered surfaces of the first and second connection portions. Retighten the first and second connecting portions in a direction to bring them closer. In such a fluid device connection structure and fluid device unit, since the tapered surface is not provided at the bottom of the first and second mounting grooves, the space for providing the tapered surface at the bottom of the first and second mounting grooves is reduced. The connecting member and the first and second connecting portions can be made compact. Therefore, according to the fluid device connection structure and the fluid device unit of the present invention, the fluid device connection structure can be made compact.

  The fluid device connection structure and the fluid device unit of the present invention can be tightened in a direction in which a plurality of divided pieces are pulled together using a tightening member to bring the first and second connection portions closer.

  In the fluid device connection structure and the fluid device unit of the present invention, at the initial stage of attaching the connecting member to the first and second connection portions, the first attachment from the front end in the protruding direction of the first protrusion of each divided piece to the outer diameter direction The first straight surface provided so as to be parallel to the inner surface of the groove on the end surface is in contact with the inner surface of the first mounting groove on the end surface side, and the outer diameter direction from the front end in the protruding direction of the second protrusion of each divided piece The second straight surface provided so as to be parallel to the inner surface of the second mounting groove is in contact with the inner surface of the second mounting groove. For this reason, as for the 1st and 2nd connection part, the end surface side inner surface of a 1st and 2nd mounting groove is supported by the 1st and 2nd straight surface provided in the 1st and 2nd protrusion part of each division | segmentation piece. The connection state is maintained. When the first and second divided pieces are pulled together, the first and second connecting side tapered portions provided on the first and second connecting portions are provided on the first and second connecting side tapered surfaces provided radially outside the first and second straight surfaces. The two connection-side tapered surfaces are brought into sliding contact with each other, and a force for tightening the first and second connection portions close to each other is generated. Therefore, the fluid device connection structure and the fluid device unit of the present invention can be tightened with a compact structure.

  In the fluid device connection structure and the fluid device unit of the present invention, the first and second divided pieces are arranged so as to sandwich the connection portion of the first and second connection portions, and one ends of the first and second divided pieces are rotated. The first and second divided pieces are mounted around the connection portions of the first and second connection portions by engaging with each other and engaging the other ends with a predetermined gap therebetween. In this case, the gap formed between the first and second divided pieces and the connecting portion of the first and second connecting portions is the one end engaging portion of the first and second divided pieces and the first and second connecting portions. The gap formed between the connecting portion of the first portion and the other end engaging portion of the first and second divided pieces and the gap formed between the first and second connecting portions. And minimize. When the first and second divided pieces are drawn so as to close a predetermined gap, the first and second connection sides are brought into sliding contact with the first and second connection side taper surfaces. Close the parts and tighten them. At this time, the gap formed between the first and second divided pieces and the connection portions of the first and second connection portions is narrowed to become a perfect circle. In the perfect circular gap, the radial width dimension becomes uniform at the minimum interval in the initial state. That is, the gap between the one end engaging portion of the first and second divided pieces and the connecting portion of the first and second connecting portions, and the other end engagement of the first and second divided pieces. The interval of the gap formed between the portion and the connection portion of the first and second connection portions does not change before and after the tightening. According to such a fluid device connection structure and a fluid device unit, the first and second divided pieces are disposed in the gap formed between the first and second divided pieces and the connection portions of the first and second connection portions. Since unnecessary gaps are not included in the drawing, the first and second divided pieces can be made compact.

  In the fluid device connection structure and the fluid device unit according to the present invention, at least one of the engaging portions that engage the plurality of divided pieces is provided with a locking claw provided on one divided piece so as to be elastically deformable on the other divided piece. By inserting the locking claw in a position close to the connecting portion of the first and second connecting portions in a form along the outer peripheral surface formed in the arc shape of the other divided piece, The divided piece and the other divided piece are engaged. Such a fluid device connection structure and fluid device unit need not provide a region for locking the locking claw at a position away from the connection portion of the first and second connection portions of the other divided piece, The first and second divided pieces can be made compact.

  In the fluid device connection structure and the fluid device unit of the present invention, the main body portion of the annular seal member is attached to the first and second annular seal grooves of the first and second connection portions to connect the first and second connection portions. The exposed portion of the annular seal member is exposed to the outside from between the first and second end surfaces. The connecting member attached to the connection portion of the first and second connection portions is provided with an exposed portion that can expose the exposed portion. Therefore, according to the fluid device connection structure and the fluid device unit of the present invention, even after the first and second fluid devices are coupled, the first and second connection portions depend on whether or not the exposed portion is exposed to the exposure portion. Since it can be confirmed whether or not the annular seal member is mounted between the two, the forgetting to attach the annular seal member can be prevented.

  In the fluid device connection structure and the fluid device unit according to the present invention, the annular seal member is configured so that the position corresponding to the exposed portion of the connecting member can be distinguished from the first and second connected portions. It is easy to confirm the presence or absence.

It is a side view of a fluid equipment unit to which a fluid equipment connection structure according to an embodiment of the present invention is applied. It is a top view of a fluid apparatus unit. It is sectional drawing of a fluid apparatus connection structure, Comprising: An initial state is shown. It is AA sectional drawing of FIG. It is sectional drawing of a fluid apparatus connection structure, Comprising: The tightening state is shown. It is BB sectional drawing of FIG. It is an external appearance perspective view of an annular seal member. It is a disassembled external appearance perspective view of a fluid apparatus unit. It is sectional drawing of the fluid apparatus connection structure of 2nd Embodiment. It is a modification of an annular seal member. It is a modification of a fluid apparatus connection structure. It is sectional drawing of the fluid apparatus connection structure disclosed by Unexamined-Japanese-Patent No. 2006-64080. It is sectional drawing of the fluid apparatus connection structure proposed by Japanese Patent Application No. 2008-180545, Comprising: An initial state is shown. It is CC sectional drawing of FIG. It is sectional drawing of the fluid apparatus connection structure proposed by Japanese Patent Application No. 2008-180545, Comprising: The tightening state is shown. It is DD sectional drawing of FIG.

  Hereinafter, preferred embodiments of a fluid device connection structure and a fluid device unit according to the present invention will be described with reference to the drawings.

(First embodiment)
<Schematic configuration of fluid equipment unit>
FIG. 1 is a side view of a fluid device unit 1 to which a fluid device connection structure 50 according to an embodiment of the present invention is applied. FIG. 2 is a top view of the fluid device unit 1.
The fluid equipment unit 1 includes various fluid equipment such as valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, and piping blocks such as joint blocks and flow path blocks. The connection structure 50 is used for connection. In the present embodiment, the first air operated valve 2 is used as an example of the first fluid device, and the second air operated valve 3 is used as an example of the second fluid device.

  As shown in FIG. 1, the first and second air operated valves 2 and 3 are two-port valves in which the drive units 6 and 7 are attached to the upper surfaces of the valve bodies 4 and 5 with bolts (not shown). The valve bodies 4 and 5 are made of a corrosion-resistant resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PTFE (polytetrafluoroethylene), PP (polypropylene), PPS (polyphenylene sulfide), etc. And A first connection portion 8 for connecting the internal flow path to an external fluid device is provided on the side surface of the valve body 4 so as to protrude in two directions by integral molding or cutting. A second connection portion 9 for connecting the internal flow path to an external fluid device is provided on the side surface of the valve body 5 so as to protrude in two directions by integral molding or cutting. The first and second connection portions 8 and 9 have the same shape.

<Configuration of fluid equipment connection structure>
FIG. 3 is a cross-sectional view of the fluid device connection structure 50 and shows an initial state. 4 is a cross-sectional view taken along the line AA in FIG. FIG. 5 is a cross-sectional view of the fluid device connection structure 50 and shows a retightened state. FIG. 6 is a BB cross-sectional view of FIG. In FIG. 5, the first and second connection-side tapered surfaces 69, 70, 74, 75 and the first and second connection-side tapered surfaces 24, 25 are in contact with each other, and the tapered support walls 28, 29 are collapsed. The press-contact portion with the taper surfaces 42 and 43 for prevention, and the press-fit portion where the first and second annular protrusions 16 and 27 are press-fitted into the press-fit allowances 38 to 41 in FIGS. 3 and 5 are compared with the contact portion. For the sake of simplicity, the descriptions are overlapped although they are different from the reality.
As shown in FIGS. 3 and 5, the fluid device connection structure 50 connects the first and second connection portions 8 and 9 via the annular seal member 31, and as shown in FIGS. And the connection state of the 1st and 2nd connection parts 8 and 9 is comprised by mounting | wearing the connection member 51 around the connection part of the 2nd connection parts 8 and 9. As shown in FIG.

  The first and second connecting portions 8 and 9 shown in FIGS. 3 and 5 are provided in a cylindrical shape. A flow path 12 is opened in the first end face 10 of the first connection portion 8. On the first end face 10, a first annular seal groove 14 for mounting the annular seal member 31 is formed around the opening of the flow path 12. On the bottom surface of the first annular seal groove 14, a first annular protrusion 16 is provided concentrically with the first annular seal groove 14, thereby forming an uneven line. The bottom of the first annular seal groove 14 is inclined from both sides of the first annular protrusion 16 in the inner circumferential direction and the outer circumferential direction of the annular seal member 31, and a tapered support wall 28 is provided.

  A first mounting groove 18 for mounting the connecting member 51 is formed in an annular shape on the outer peripheral surface of the first connection portion 8. The first mounting groove 18 is provided so that the end surface side inner surface 20 on the first end surface 10 side is parallel to the first end surface 10. The first connecting portion 8 is provided with a first flange portion 22 between the first end face 10 and the first mounting groove 18. The first connection portion 8 is a first connection side taper along the outer periphery of the end surface side inner surface 20 of the first mounting groove 18, in other words, along the outer peripheral end portion of the first flange portion 22 on the first mounting groove 18 side. A surface 24 is provided. The first connection-side tapered surface 24 is provided so as to increase in diameter from the end surface side inner surface 20 of the first mounting groove 18 to the first end surface 10 side. The 1st flange part 22 is provided with the 1st latching convex part 26 along the edge part outer periphery at the 1st end surface 10 side. The first connection portion 8 is provided with a first attachment groove 46 for attaching a jig for pulling the first and second connection portions 8 and 9 in parallel with the first mounting groove 18.

  The second connection portion 9 includes a second end surface 11, a flow path 13, a second annular seal groove 15, a second annular protrusion 17, a second mounting groove 19, an end surface side inner surface 21, a second flange portion 23, and a second connection. The side tapered surface 25, the second locking convex portion 27, the tapered support wall 29, and the second mounting groove 47 are the first end surface 10 of the first connecting portion 8, the flow path 12, the first annular seal groove 14, and the first. The annular protrusion 16, the first mounting groove 18, the end surface side inner surface 20, the first flange portion 22, the first connection side tapered surface 24, the first locking convex portion 26, the tapered support wall 28, and the first mounting groove 46. It is provided similarly. Therefore, a specific description of the second connection unit 9 is omitted.

FIG. 7 is an external perspective view of the annular seal member 31.
The annular seal member 31 is made of a hard and corrosion-resistant fluororesin such as PFA. The annular seal member 31 is colored in a color different from that of the first and second connection portions 8 and 9 by mixing a colorant with a fluororesin so that the annular seal member 31 can be distinguished from the first and second connection portions 8 and 9. The annular seal member 31 includes a main body portion 32 mounted in the first and second annular seal grooves 14, 15, an overhang portion 33 projecting from the outer peripheral surface of the main body portion 32 in the outer diameter direction, and the overhang portion 33. And a grip portion 34 provided on the outer peripheral edge portion.

  As shown in FIGS. 3, 5, and 7, the main body 32 has a short cylindrical shape. A first annular groove 36 that fits into the first annular protrusion 16 and a second annular groove 37 that fits into the second annular protrusion 17 are formed in an annular shape on both end faces of the main body portion 32, thereby forming an uneven groove. Has been. The first annular groove 36 is substantially the same as the radial width dimension of the first annular protrusion 16. In the first annular groove 36, press-fitting allowances 38 and 39 are provided thickly in the thickness direction of the main body 32 on the inner peripheral surface and the outer peripheral surface on the back side of the opening, and the back side of the opening is narrower than the opening. ing. As shown in FIGS. 3 and 5, the second annular groove 37 is substantially the same as the radial width dimension of the second annular protrusion 17. In the second annular groove 37, press-fitting allowances 40 and 41 are provided thickly in the thickness direction of the main body 32 on the inner peripheral surface and the outer peripheral surface on the back side of the opening, and the back side of the opening is narrower than the opening. ing. Such a main body 32 has the fall-preventing tapered surfaces 42, 43 supported on the tapered support walls 28, 28, 29, 29 of the first and second connecting portions 8, 9 on both end surfaces. It is provided along the circumference and the outer circumference, respectively.

  As shown in FIGS. 3 to 7, the overhang portion 33 has a ring-shaped film shape, and connects the main body portion 32 and the grip portion 34.

  As shown in FIG. 7, the grip portion 34 extends from the outer edge portion of the overhang portion 33 in the axial direction of the main body portion 32 (the first and second annular protrusions 16 and 17 are inserted into the first and second annular grooves 36 and 37. It is provided so as to protrude in the press-fitting allowance 38 to 41). As shown in FIGS. 3 and 5, the grip portion 34 is slidably provided on the outer peripheral surfaces of the first and second flange portions 22 and 23 provided in the first and second connection portions 8 and 9. The first and second annular grooves 36 and 37 of the portion 32 are positioned with respect to the first and second annular protrusions 16 and 17 of the first and second connection portions 8 and 9. On the inner peripheral surface of one end of the grip portion 34, there is provided a hook portion 44 that protrudes toward the main body portion 32 and is hooked on the first or second locking projections 26, 27 of the first or second connection portion 8, 9. ing.

  As shown in FIG. 3, the connecting member 51 includes a first divided piece 52 and a second divided piece 53 that are arranged so as to sandwich the connecting portions of the first and second connecting portions 8 and 9. In the connecting member 51, the first protrusion 54 of the first divided piece 52 and the first protrusion 56 of the second divided piece 53 are arranged in the first mounting groove 18, and the second protrusion 55 of the first divided piece 52 and By disposing the second projecting portion 57 of the second divided piece 53 in the second mounting groove 19, the second projecting portion 57 resists the repulsive force of the annular seal member 31 mounted between the first and second connecting portions 8, 9. The connection state of the first and second connection portions 8 and 9 is maintained. As shown in FIG. 4, the connecting member 51 is mounted with a gap S <b> 10 between the first and second divided pieces 52 and 53 and the connection portions of the first and second connection portions 8 and 9. The gap S10 is such that the gap between the gaps S11 and S12 formed between the engagement portion of the first and second divided pieces 52 and 53 and the connection portion of the first and second connection portions 8 and 9 is minimized. Is provided.

FIG. 8 is an exploded external perspective view of the fluid device unit 1.
The first divided piece 52 and the second divided piece 53 of the connecting member 51 shown in FIG. 8 are made of a fluororesin having strength and corrosion resistance such as PVDF (polyvinylidene fluoride (vinylidene difluoride)). The first divided piece 52 and the second divided piece 53 are provided in an arc shape so as to be attached around the first and second connecting portions 8 and 9. A first hinge part 58 provided at one end of the first divided piece 52 and a second hinge part 59 provided at one end of the second divided piece 53 are engaged with each other via a support shaft 60 so as to be rotatable. And the one end engaging part of the 2nd division | segmentation piece 52,53 is comprised.

  As for the 1st and 2nd division | segmentation pieces 52 and 53, the 1st and 2nd extension parts 61 and 62 are extended outwardly by the other end outer peripheral surface opposite to an end engagement part. A locking claw 63 protrudes from the second extending portion 62 so as to be elastically deformable. On the other hand, the first extending portion 61 is formed with an insertion hole 64 (an example of an insertion portion) through which the locking claw 63 is inserted while being elastically deformed. The first divided piece 52 is used for hooking and stopping the distal end portion of the locking claw 63 inserted into the insertion hole 64 on the outer peripheral surface close to the connection hole of the first and second connection portions 8 and 9 and the insertion hole 64. A step 77 is provided. The locking claw 63 has a full length longer than the thickness of the first extending portion 61, and the tip portion has a step when the connecting member 51 is attached to the connecting portion of the first and second connecting portions 8 and 9. 77, a predetermined gap S3 is formed between the first and second extending portions 61 and 62 (see FIGS. 2 and 4). The first and second divided pieces 52, 53 are detachably engaged with the step 77 of the first divided piece 52 by detachably engaging the locking claws 63 of the second divided piece 53. The other end engaging part which engages the other ends of 52 and 53 is constituted.

  Retightening members 78 are attached to the first and second extending portions 61 and 62, and the first and second extending members 78 are closed by the retightening members 78 so as to close the predetermined gap S3 as shown in FIGS. The first and second divided pieces 52 and 53 are drawn closer by bringing the installation portions 61 and 62 closer to each other. Specifically, the first extending portion 61 is provided with an insertion groove 65 through which the additional fastening member 78 is inserted, and the second extending portion 62 is provided with a bolt hole 66 to which the additional fastening member 78 is fastened. It has been.

  The first projecting portion 54 and the second projecting portion 55 of the first divided piece 52 have opposing surfaces parallel to each other as shown in FIGS. 3 and 5, and as shown in FIG. It has become. As shown in FIGS. 3 and 5, the first protrusion 54 has a first straight surface 67 that is in contact with the inner surface 20 on the end surface side of the first mounting groove 18. Is formed. The first protrusion 54 is provided with a first connection side taper surface 69 that is slidable in contact with the first connection side taper surface 24 on the radially outer side (base end side) of the first straight surface 67. On the other hand, in the second protrusion 55, a second straight surface 68 that abuts on the end surface side inner surface 21 of the second mounting groove 19 is formed in the outer diameter direction from the protrusion direction tip of the second protrusion 55. The second protrusion 55 is provided with a second connection-side tapered surface 70 slidably contactable with the second connection-side tapered surface 25 on the radially outer side (base end side) of the second straight surface 68. The first divided piece 52 including the first and second protrusions 54 and 55 is between the first protrusion 54 and the second protrusion 55, and the first and second connection parts 8 and 9 are provided. The 1st exposure part 71 is provided in the position corresponding to the connection part to connect.

  On the other hand, the first projecting portion 56 and the second projecting portion 57 of the second divided piece 53 are parallel to each other as shown in FIGS. 3 and 5, and as shown in FIG. It has an arc shape. In the first protrusion 56, a first straight surface 72 that comes into contact with the inner surface 20 on the end surface side of the first mounting groove 18 is formed in the outer diameter direction from the front end in the protrusion direction of the first protrusion 56. The first protrusion 56 is provided with a first connection-side tapered surface 74 that can slide in contact with the first connection-side tapered surface 24 on the radially outer side (base end side) of the first straight surface 72. On the other hand, in the second protrusion 57, a second straight surface 73 that abuts on the inner surface 21 on the end surface side of the second mounting groove 19 is formed in the outer diameter direction from the protrusion direction tip of the second protrusion 57. The second protrusion 57 is provided with a second connection-side tapered surface 75 that can slide in contact with the second connection-side tapered surface 25 on the radially outer side (base end side) of the second straight surface 73. As shown in FIGS. 1, 3, and 5, the second divided piece 53 including the first and second protrusions 56 and 57 is disposed between the first protrusion 56 and the second protrusion 57. A second exposing portion 76 is provided at a position corresponding to the connecting portion to which the first and second connecting portions 8 and 9 are connected.

  As shown in FIGS. 1, 3, and 5, the annular seal member 31 includes an outer edge portion of the overhang portion 33 and a grip portion 34, and the first and second end faces 10 of the first and second connection portions 8 and 9. , 11 is exposed to the outside (configured as an example of an exposed portion), and the exposed portion is exposed from the first and second exposed portions 71, 76.

<Development process of fluid equipment connection structure>
Next, in order to reduce the size of the fluid device connection structure, the development process performed in the present invention will be described.
The fluid device connection structure 200 shown in FIG. 13 and FIG. 14 is an end face side connection surface of the first and second mounting grooves 203a and 204a in the initial state where the connecting member 206 is mounted on the first and second connection portions 203 and 204. Is in surface contact with the first and second protrusions 207a, 207b, 208a, 208b of the first and second divided pieces 207, 208, and the connection state of the first and second connection portions 203, 204 is maintained. After that, when the first and second connection portions 203 and 204 are creep-deformed and the sealing force is lowered, the first and second divided pieces 207 and 208 are pulled toward each other as shown in FIGS. The first and second connection side taper surfaces 203b and 204b and the first and second connection side taper surfaces 207f, 207g, 208f, and 208g are slidably contacted, and the first and second connection portions 203 and 204 are tightened in a direction closer to each other. . That is, in the initial state in which the connecting member 206 is attached to the first and second connection portions 203 and 204, the first and second connection-side tapered surfaces 207f, 207g, and 208f are added to the first and second connection-side tapered surfaces 203b and 204b. , 208 g need not be contacted.

  On the other hand, as shown in FIG. 16, in order to draw the first and second divided pieces 207, 208 from the support shaft 211, the first and second protruding portions 207a of the first and second divided pieces 207, 208 are drawn. , 207b, 208a, 208b, a gap S2 is required between the projecting direction tips and the bottoms of the first and second mounting grooves 203a, 204a. Further, a gap S1 that is approximately the same as the gap S2 is also required between the inner peripheral surface of the connecting member 206 and the connection portions of the first and second connection portions 203 and 204.

  Therefore, the inventors remove the first and second connection-side tapered surfaces 207f, 207g, 208f, 208g from the first and second divided pieces 207, 208 while leaving gaps S1, S2, as shown in FIG. The distance in the protruding direction of the first and second protrusions 207a, 207b, 208a, 208b was shortened by H. In response to this, the inventors remove the first and second connection-side tapered surfaces 203b, 204b from the first and second connection portions 203, 204, and the first mounting groove 203a and the first connection portion 203 are removed. The radial dimension of the first flange part 203c between the first flange part 203c and the second flange part 204c between the second mounting groove 204a and the end face of the second connection part 204 is reduced by H. Accordingly, the radial dimension Y2 of the first and second divided pieces 207, 208 and the radial dimension X2 of the first and second flange portions 203c, 204c are reduced by H, and the first and second divided pieces 207, 208 and the first and second flange portions 203i and 204i can be made compact.

  Then, the inventors, as shown in FIGS. 3 to 6, radially outside the first and second straight surfaces 67, 68, 72, 73 (first and second protrusions 54, 55, 56, 57). 1st and 2nd connection side taper surface 69,70,74,75 was provided so that it might continue to the base end part side). Accordingly, it is not necessary to lengthen the first and second protrusions 54, 55, 56, and 57 in the protruding direction in order to provide the first and second connection side tapered surfaces 69, 70, 74, and 75. The second divided pieces 52 and 53 can be made compact. Then, the inventors connect the first connection side taper surface 24 corresponding to the first connection side taper surfaces 69 and 74 of the first and second divided pieces 52 and 53 to the end surface side inner surface 20 of the first mounting groove 18. It was provided on the outer periphery. Further, the inventors set the second connection side taper surface 25 corresponding to the second connection side taper surfaces 70 and 75 of the first and second divided pieces 52 and 53 to the end surface side inner side surface 21 of the second mounting groove 19. It was provided on the outer periphery. This eliminates the need to provide the first and second connection-side tapered surfaces 24, 25 at the bottoms of the first and second mounting grooves 18, 19, and shortens the radial dimensions of the first and second flange portions 22, 23. Thus, the first and second connecting portions 8 and 9 can be made compact.

  Then, as shown in FIG. 3, the inventors act on the first and second divided pieces 52 and 53 at the initial time when the connecting member 51 is attached to the connection portion of the first and second connection portions 8 and 9. The first and second protrusions 54, 55, 56, 57 and the first and second mounting grooves 18, 19 required to obtain the repulsive force of the annular seal member 31 and generate the reaction force against the repulsive force. Of the first and second straight surfaces 67, 68, 72, 73 in the radial direction X3 (first and second protrusions 54, 55, 56, 57). The length (width) from the tip in the protruding direction to the outer diameter direction was determined. As a result, the fluid device connection structure 50 has the radial length X3 of the first and second straight surfaces 67, 68, 72, 73 shown in FIG. 3 as the length in the conventional fluid device connection structure 200 shown in FIG. The first and second divided pieces 52 and 53 can be made smaller than X4.

  In response to this, the inventors consider the height X3 of the first straight surfaces 67, 72, the gap S2, and the dimensions of the first connection-side tapered surface 24, as shown in FIG. While adjusting the height X1 at which the portion 22 rises from the first mounting groove 18, the height X3 of the second straight surfaces 68 and 73, the clearance S2, and the dimensions of the second connection side taper surface 25 are taken into account. The height X1 at which the portion 23 rises from the second mounting groove 19 was adjusted. As a result, in the fluid device connection structure 50 shown in FIG. 3, the height X1 of the first and second flange portions 22 and 23 is such that the first and second flange portions 203c of the conventional fluid device connection structure 200 shown in FIG. , 204c is lower than the height X2, and the outer diameter of the first and second flange portions 22, 23 can be reduced.

  The inventors also examined the gap S10 formed between the first and second divided pieces 52 and 53 and the connection portions of the first and second connection portions 8 and 9. That is, in the fluid device connection structure 200 shown in FIG. 14, the gap S110 formed between the first and second divided pieces 207 and 208 and the connection portions of the first and second connection portions 203 and 204 is in the initial state. Occasionally, it was a perfect circle with a constant interval in the circumferential direction. Then, as shown in FIG. 16, the clearance S <b> 110 is obtained by tightening the first and second connection portions 203 and 204 closer together by pulling the first and second divided pieces 207 and 208 with the support shaft 211 as a base point. The gap S111 on the one end engagement portion side and the gap S112 on the other end engagement portion side of the first and second divided pieces 207, 208 hardly change before and after the tightening, and the one end engagement portion and the other end engagement It has been found that the gap S1 at a position having a phase difference of 90 degrees with respect to the portion is narrower after tightening than before tightening. Accordingly, the inventors of the present invention have found that the coupling member 206 of the fluid device connection structure 200 shown in FIGS. 13 to 16 includes gaps S111 and S112 that are unnecessary for pulling the first and second divided pieces 207 and 208 together. I realized that

  Therefore, as shown in FIG. 4, the inventors divide the gap S11 formed between the one end engaging portion and the connecting portion of the first and second connecting portions 8 and 9, and the other end engaging portion. 14 and the connecting member 206 shown in FIG. 14 within a range in which the gap S12 formed between the first and second connecting portions 8 and 9 is not hindered from attracting the first and second divided pieces 52 and 53. The gaps S111 and S112 are made narrower. Therefore, as shown in FIG. 4, in the initial state, the connecting member 51 is a gap formed between the first and second divided pieces 52 and 53 and the connection portions of the first and second connection portions 8 and 9. The outer periphery of S10 has a shape in which the first piece connecting the one end engaging portion and the other end engaging portion is made shorter than the second piece orthogonal to the one piece at the center of the one piece, resulting in the retightening state shown in FIG. In this case, the shapes of the first and second divided pieces 52 and 53 were adjusted so that the gap S10 had a perfect circular shape having a constant interval in the circumferential direction. Thereby, there is no unnecessary gap in the gap S11 on the one end engaging portion side and the gap S12 on the other end engaging portion side so that the first and second divided pieces 52, 53 are attracted, and the first and second divided pieces 52, 53 can be made compact.

  Further, as shown in FIG. 4, the inventors set the locking claw 63 to the second extending portion 62 of the second divided piece 53 so as to be inclined toward the connecting portion side of the first and second connecting portions 8 and 9. And an insertion hole 64 for inserting the locking claw 63 into the first extending portion 61 of the first divided piece 52 was opened. And the level | step difference 77 is provided in the outer peripheral surface of the 1st division | segmentation piece 52 near the connection part of the 1st and 2nd connection parts 8 and 9 and the penetration hole 64, and the latching claw 63 is made into the 1st and 2nd connection parts 8 and 9. The first divided piece 52 is hooked and stopped at a position close to the connecting portion. Such a connecting member 51 has a space for hooking the locking claw 207e at a position far from the connecting portion of the first and second connecting portions 203 and 204, like the connecting member 206 shown in FIG. The first and second extension portions 61 and 62 shown in FIG. 4 are made smaller than the first and second extension portions 207i and 208i shown in FIG. The pieces 52 and 53 can be made compact.

  Accordingly, the fluid device connection structure 50 shown in FIG. 3 is configured so that the radial dimension Y1 of the first and second divided pieces 52 and 53 and the radial dimension X1 of the first and second flange portions 22 and 23 are the same as those shown in FIG. The radial dimension Y2 of the first and second divided pieces 207, 208 of the device connection structure 200 is made smaller than the radial dimension X2 of the first and second flange portions 203c, 204c, and the connecting member 51 and the first and second flange portions are made. 22 and 23 can be made compact. Therefore, in the fluid device connection structure 50 shown in FIGS. 3 to 6, the side projection area seen from the first protrusions 54 and 56 side has a first protrusion 207 a of the fluid device connection structure 200 shown in FIGS. 13 to 16. , 208a side, and more compact than the side projection area. Therefore, as shown in FIGS. 1 and 2, the fluid device connection structure 50 has a side surface of the side surface provided with the first and second connection portions 8 and 9 of the first and second air operated valves 2 and 3. Since it can be provided within the range of the projected area, the arrangement pitch P for arranging the first and second air operated valves 2 and 3 can be reduced. If a large number of air operated valves are integrated using such a fluid device connection structure 50, the arrangement pitch P of each air operated valve can be reduced, and the foot space of the fluid device unit can be reduced.

<Fluid device connection method>
Next, a method for connecting the first and second air operated valves 2 and 3 will be described.
As shown in FIG. 8, the annular seal member 31 is attached to the first connection portion 8 of the first air operated valve 2. In the annular seal member 31, the grip portion 34 is guided on the outer periphery of the first flange portion 22 provided in the first connection portion 8, and the first annular groove 36 is positioned on the first annular protrusion 16 of the first connection portion 8. The At this time, since the hooking portion 44 is hooked on the first locking projection 26 and held by the first connecting portion 8, the annular sealing member 31 can prevent the annular sealing member 31 from being dropped and forgotten to be attached. Then, the second air operated valve 3 is installed next to the first air operated valve 2 so that the second flange portion 23 provided in the second connection portion 9 is inserted into the grip portion 34.

  Then, a jig (not shown) is attached to the first and second attachment grooves 46 and 47, and the first and second connection portions 8 and 9 are pulled in a direction in which the first and second end faces 10 and 11 are brought closer. At this time, the first and second annular protrusions 16 and 17 are press-fitted into the press-fitting margins 38 to 41 of the first and second annular grooves 36 and 37. The annular seal member 31 has the taper surfaces 42 and 43 for preventing the collapse to contact the tapered support walls 28 and 29, and both sides of the first and second annular grooves 36 and 37 are collapsed outward during press-fitting to reduce the sealing force. It prevents it from being made.

  In the annular seal member 31, even after the first and second connection portions 8 and 9 are drawn, the outer edge portion of the overhang portion 33 and the overhang portion 33 are exposed to the outside from between the first and second end surfaces 10 and 11. is doing. Therefore, whether or not the annular seal member 31 is mounted between the first and second connecting portions 8 and 9 can be confirmed by whether or not the outer edge portion of the overhang portion 33 and the grip portion 34 are visible. You can prevent forgetting.

  Until the distance between the end surface side inner surfaces 20 and 21 of the first and second mounting grooves 18 and 19 is smaller than the separation distance between the first protrusions 54 and 56 and the second protrusions 55 and 57 of the connecting member 51, The first and second connecting portions 8 and 9 are pulled together, and the connecting member 51 is attached to the first and second flange portions 22 and 23. The connecting member 51 rotates the first divided piece 52 with respect to the second divided piece 53 with the support shaft 60 as a base point, and inserts the locking claw 63 into the insertion hole 64. The locking claw 63 is elastically deformed by being pushed by the inner peripheral surface of the insertion hole 64 while the tip part passes through the insertion hole 64, and the tip part passes through the insertion hole 64 and acts on the tip part. When the pressing force that has been released is released, the original shape is restored and the tip is locked to the step 77. As a result, the first and second divided pieces 52 and 53 are engaged with each other at both ends, and are not separated.

  As shown in FIG. 3, in the first and second divided pieces 52 and 53, the first protrusions 54 and 56 and the second protrusions 55 and 57 are arranged in the first and second mounting grooves 18 and 19. . When a jig (not shown) is removed from the first and second mounting grooves 46 and 47 after the connecting member 51 is mounted, the first and second connection portions 8 and 9 are press-fitted into the first and second annular protrusions 16 and 17. It tries to leave | separate by the press-fit to the allowances 38-41, and the repulsive force by contact | abutting of the taper surfaces 42 and 43 for fall-down prevention, and the taper-shaped support walls 28 and 29. However, the first and second connecting portions 8 and 9 are configured such that the first and second mounting grooves 18 and 19 have the first and second straight portions of the first and second divided pieces 52 and 53 on the end surface side inner surfaces 20 and 21. It abuts on the surfaces 67, 68, 72 and 73 and is restricted from moving. Therefore, the first and second connection portions 8 and 9 are in a state where the first and second annular protrusions 16 and 17 are press-fitted into the press-fitting margins 38 to 41 and the connection portions of the flow paths 12 and 13 are sealed in the radial direction. The connection state is maintained.

  In this initial state, as shown in FIGS. 2 and 4, the connecting member 51 hooks the locking claw 63 on the step 77 of the first divided piece 52, and between the first and second extending portions 61 and 62. A predetermined gap S3 is formed. In this case, as shown in FIG. 3, the connecting member 51 has the first and second connecting portions formed by connecting the first and second connecting-side tapered surfaces 69, 70, 74, and 75 of the first and second divided pieces 52 and 53. The first and second connection-side tapered surfaces 24 and 25 of 8 and 9 are not in contact with each other. Therefore, the connecting member 51 forms a gap S2 between the projecting direction tips of the first and second divided pieces 52 and 53 and the bottoms of the first and second mounting grooves 18 and 19, and the annular seal member 31. A gap S <b> 1 is formed between the grip portion 34 and the inner peripheral surfaces of the first and second divided pieces 52 and 53.

  In the present embodiment, since the first and second connection parts 8 and 9 and the connecting member 51 are both made of fluororesin, the first and second connection parts 8 and 9 are connected even if expansion occurs due to heat. The member 51 is similarly deformed (when the first and second connecting portions 8 and 9 extend in the axial direction of the flow paths 12 and 13, the connecting member 51 also extends in the axial direction of the flow paths 12 and 13). On the other hand, when the connecting member is made of a material having a smaller linear expansion coefficient than that of resin, such as metal, the connecting member made of metal is not affected even if the first and second connecting portions 8 and 9 made of resin expand. The metal connection member does not contract even if the first and second connection parts 8 and 9 made of resin are thermally contracted without expanding. In this case, the first and second connecting portions 8 and 9 made of resin increase the stress of the first and second flange portions 22 and 23 sandwiched between the metal connecting members, and the creep deformation increases. When large creep deformation occurs in the first and second flange portions 22 and 23, a gap is generated between the first and second flange portions 22 and 23 and the metal connecting member, and a predetermined sealing force cannot be obtained. For this reason, there arises a problem that the first and second connection portions 8 and 9 cannot be reused when the device is replaced. Since the fluid device connection structure 50 of the present embodiment uses the connecting member 51 made of a fluororesin, the creep deformation of the first and second flange portions 22 and 23 is reduced as compared with the case where a metal connecting member is used. The first and second connection portions 8 and 9 can be reused when replacing the device.

  However, the creep deformation of the first and second connecting portions 8 and 9 cannot be completely removed. Therefore, when the first and second connection portions 8 and 9 cause creep deformation or the like to reduce the sealing force, the tightening member 78 is screwed into the bolt hole 66 from the insertion groove 65 as shown in FIG. The first and second extending portions 61 and 62 are drawn. Thereby, the 1st and 2nd division | segmentation pieces 52 and 53 rotate centering on the spindle 60, and are pulled near. The first and second divided pieces 52 and 53 hardly change the distance between the gap S11 on the one end engaging portion side and the gap S12 on the other end engaging portion side, and 90 degrees between the one end engaging portion and the other end engaging portion. As shown in FIG. 5, the first and second connection side taper surfaces 69, 70, 74, and 75 are made to draw the first and second connection side taper as shown in FIG. The surfaces 24 and 25 are brought into sliding contact. The first and second segment pieces 52 and 53 are first and second connection side taper surfaces 69, 70, 74 and 75, and the first and second connection side taper surfaces 24 and 25 are changed to the first and second end surfaces 10 and 70. The pressure is applied so that the first and second connecting portions 8 and 9 are brought closer to each other.

  As a result, the first and second annular protrusions 16 and 17 are press-fitted into the press-fitting margins 38 to 41, and the tapered support walls 28 and 29 are pressed against the fall-preventing tapered surfaces 42 and 43 of the annular seal member 31. The gap formed between the first and second annular seal grooves 14 and 15 and the annular seal member 31 is filled to improve the sealing force.

  When the tightening member 78 is screwed into the bolt hole 66 until the first and second extending portions 61 and 62 come into contact with each other, the connection between the first and second divided pieces 52 and 53 and the first and second connection portions 8 and 9 is established. The gap S10 between the portions changes to a perfect circle. When the first and second extending portions 61 and 62 come into contact with each other, the first and second divided pieces 52 and 53 can no longer be drawn. Therefore, the distance between the gap S11 on the one end engaging portion side and the gap S12 on the other end engaging portion side of the first and second divided pieces 52, 53 shown in FIG. 4 is set as the first and second divided pieces shown in FIG. Even if narrower than 207, 208, the first and second divided pieces 52, 53 do not crush and deform the first and second connecting portions 8, 9.

  By the way, the fluid device connection structure 50 has the inside of the connection member 51 via the first and second exposed portions 71 and 76 even after the connection member 51 is attached to the connection portion of the first and second connection portions 8 and 9. Can peek. The connecting member 51 is provided with first and second exposing portions 71 and 76 at positions corresponding to the connecting portions of the first and second connecting portions 8 and 9. When the first and second connecting portions 8 and 9 are connected via the annular seal member 31, an overhang portion 33 is disposed between the first and second end surfaces 10 and 11, and the first and second A grip portion 34 is disposed on the outer periphery of the two flange portions 22 and 23. Therefore, even after the operator assembles the fluid device unit 1 using the fluid device connection structure 50, the operator looks into the inside of the connecting member 51 from the first and second exposed portions 71 and 76, and the overhang portion 33 or the grip portion. Whether or not the annular seal member 31 is mounted between the first and second connecting portions 8 and 9 can be confirmed by whether or not 34 is visible. Therefore, according to the fluid device connection structure 50, forgetting to attach the annular seal member 31 can be prevented.

  In particular, since the annular seal member 31 is colored so as to be distinguishable from the first and second connection portions 8 and 9, can the colored color be seen on the annular seal member 31 from the first and second exposed portions 71 and 76? Whether or not the annular seal member 31 is mounted between the first and second connecting portions 8 and 9 can be easily confirmed.

  In the case where the connection of the first and second connection portions 8 and 9 is released and maintenance of the first and second air operated valves 2 and 3 is performed, the procedure may be performed in the reverse order of the above connection procedure. At this time, the connecting member 51 puts a finger between the first divided piece 52 and the tip of the locking claw 63 to bend the locking claw 63 outward, remove the locking claw 63 from the step 77, By removing from the insertion hole 64, the first and second connection portions 8 and 9 are removed. Therefore, the connecting member 51 can be easily detached from the first and second connecting portions 8 and 9 and the workability is good.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 9 is a cross-sectional view of the fluid device connection structure 80.
The fluid device connection structure 80 of the second embodiment is different from the first embodiment in that a positioning projection 82 is provided on the outer peripheral surface of the grip portion 34 of the annular seal member 81, and the rest is the same as the first embodiment. is there. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and a common point attaches | subjects the same code | symbol as 1st Embodiment to drawing, and abbreviate | omits description suitably.

  The annular seal member 81 protrudes so that the positioning protrusion 82 is fitted to the first and second exposed portions 71 and 76 of the connecting member 51. The positioning protrusion 82 is provided in a different color from the other portions of the annular seal member 81 and the first and second connection portions 8 and 9 by two-color molding.

In such a fluid device connection structure 80, if the positioning protrusion 82 is not engaged with the first and second exposed portions 71 and 76, the connecting member 51 is attached to the connection portion of the first and second connecting portions 8 and 9. Can not. Therefore, according to the fluid device connection structure 80, forgetting to attach the annular seal member 81 can be prevented.
Moreover, since the positioning protrusion 82 can be visually recognized from the 1st and 2nd exposure parts 71 and 76, the forgetting to attach the annular seal member 81 can be prevented.
Further, since the positioning projection 82 is colored so as to be distinguishable from the first and second connection portions 8 and 9, whether or not the annular seal member 81 is attached is determined via the first and second exposure portions 71 and 76. Easy to check.

<Modification>
In addition, this invention is not limited to the said embodiment, Various application is possible.
For example, in the first embodiment, the entire annular seal member 31 is colored, but at least portions corresponding to the first and second exposed portions 71 and 76 may be colored. For example, as shown in FIG. 10, a band-shaped coloring member 86 such as a heat-shrinkable tube may be mounted in the mounting groove 87 of the annular seal member 85. Further, the positions corresponding to the first and second exposed portions 71 and 76 of the annular seal member 31 may be partially colored by coating, painting, or two-color molding.
For example, in the said embodiment, the 1st and 2nd exposure parts 71 and 76 were made into the through-hole. On the other hand, the first and second exposed portions 71 and 76 may be formed into thin films so that the first and second exposed portions 71 and 76 can be seen through. According to this, the mounting state of the annular seal members 31 and 81 can be visually recognized from the outside while preventing foreign matter from entering the inside of the connecting member 51 from the first and second exposed portions 71 and 76.
For example, in the above-described embodiment, the annular seal members 31, 81, 85 are formed by the overhang portion 33 provided annularly on the outer periphery of the main body portion 32 and the grip portion 34 provided on the outer edge portion of the overhang portion 34. An exposed portion exposed to the outside from between the first and second end faces 10 and 11 was provided. On the other hand, an exposed piece extending outward from a part of the outer peripheral surface of the main body 32 is exposed to the outside from between the first and second end faces 10 and 11, and the exposed piece is first and You may make it visually confirm from the 2nd exposure parts 71 and 76 and confirm the mounting state of an annular seal member.
For example, in the above embodiment, the insertion portion through which the locking claw 63 is inserted is formed by a hole, but may be formed by a groove.
For example, in the second embodiment, the positioning protrusions 82 are provided on the outer periphery of the annular seal member 81 so as to be distinguishable. In contrast, as in the fluid device connection structure 90 shown in FIG. 11, the positioning projection 92 can protrude from the first and second exposed portions 71 and 72 on the grip portion 34 or the overhang portion 33 of the annular seal member 91. It may be provided. In this case, the positioning projection 92 is formed by injection molding together with the annular seal member 91. Even when the positioning projection 92 is not colored, the annular seal is determined depending on whether the positioning projection 92 protrudes from the first and second exposed portions 71 and 76. It can be confirmed whether or not the member 91 is mounted between the first and second connecting portions 8 and 9.
For example, in the above embodiment, the annular seal members 31, 81, 85 can be distinguished from the first and second connection portions 8, 9 by coloring. On the other hand, patterns such as knurls, stitches, letters, etc. are provided on the outer periphery of the annular seal members 31, 81, 85 to distinguish the annular seal members 31, 81, 85 from the first and second connecting portions 8, 9. It may be possible.
For example, in the above-described embodiment, the first and second divided pieces 52 and 53 are attracted using the screw-shaped retightening member 78. On the other hand, for example, a cam is provided on the first divided piece, and a lever that can slide on the cam is provided on the second divided piece as an example of a tightening member, and the lever is rotated while being brought into sliding contact with the cam. The first and second divided pieces 52 and 53 may be attracted.

1 Fluid equipment units 2 and 3 First and second air operated valves (an example of first and second fluid equipment)
8,9 1st, 2nd connection part 10,11 1st, 2nd end surface 12,13 Flow path 14,15 1st, 2nd annular seal groove 18,19 1st, 2nd mounting groove 20,21 Inner side surface Side end surfaces 24, 25 First and second connection side tapered surfaces 31, 81, 85 Annular seal member 32 Main body portion 33 Overhang portion 34 Grip portions 50, 80 Fluidic device connection structures 52, 53 First and second divided pieces 54 , 55 First projection 55, 57 Second projection 65 Connection member 67, 72 First straight surface 68, 73 Second straight surface 69, 74 First connection side taper surface 70, 75 Second connection side taper surface 71, 76 1st, 2nd exposure part 86 Coloring member

Claims (8)

The first fluid device and the second fluid device each include a first connection portion and a second connection portion made of resin, and a first annular seal groove around a flow path that opens at a first end surface of the first connection portion. Is formed, and a second annular seal groove is formed around the flow path opened in the second end surface of the second connection portion, and the resin-made annular seal is formed between the first and second annular seal grooves. In the fluid device connection structure in which a connecting member made of resin is attached to the first connection portion and the second connection portion that are arranged and connected, and the connection state of the first and second connection portions is maintained.
The first connection part is formed on the outer peripheral surface of the first connection part and the first mounting groove on which the connecting member is mounted, and the first connection groove is formed on the outer periphery of the inner surface on the end surface side of the first mounting groove. A connecting side taper surface,
The second connecting portion is formed on the outer peripheral surface of the second connecting portion to be mounted with the connecting member, and the second connecting portion is formed on the outer periphery of the inner surface on the end surface side of the second mounting groove. A connecting side taper surface,
The connecting member includes a first protrusion that contacts the inner surface of the first mounting groove and a second protrusion that contacts the inner surface of the second mounting groove with a predetermined interval. A plurality of divided pieces are engaged, and when the sealing force is reduced, the plurality of divided pieces are pulled and tightened in a direction to bring the first connection portion and the second connection portion closer to each other,
The first protrusion has a first connection side taper surface that is in sliding contact with the first connection side taper surface when the plurality of divided pieces are drawn.
The fluid device connection structure according to claim 1, wherein the second protrusion has a second connection side taper surface that is slidably contacted with the second connection side taper surface when the plurality of divided pieces are attracted. In the fluid device connection structure according to claim 1,
The fluid device connection structure according to claim 1, wherein the connecting member has a retightening member for drawing the plurality of divided pieces. In the fluid device connection structure according to claim 1 or 2,
The plurality of divided pieces are provided such that the protruding ends of the first protrusion and the second protrusion are provided in an arc shape,
The first protrusion has a first straight surface that is parallel to the inner surface of the first mounting groove and is in contact with the inner surface of the first mounting groove. Provided in the direction, the first connecting side taper surface is provided radially outside the first straight surface,
The second protrusion has a second straight surface that is parallel to the inner surface on the end surface side of the second mounting groove and contacts the inner surface on the end surface side of the second mounting groove. The fluid device connection structure according to claim 1, wherein the second connecting side tapered surface is provided radially outward of the second straight surface. In the fluid device connection structure according to any one of claims 1 to 3,
The connecting member has a first divided piece and a second divided piece that are arranged so as to sandwich a connecting portion of the first and second connecting portions,
One end and the other end of the first and second divided pieces are arranged at opposite positions across the connection portion of the first and second connection portions, and the one end is rotatably engaged. The other ends are engaged with a predetermined gap between them,
A gap formed between the first and second divided pieces and a connection portion of the first and second connecting portions engages the first and second divided pieces with a predetermined interval. In the initial state, the gap between the one end engaging portion where the one ends are engaged with each other and the connecting portion of the first and second connecting portions is related to the other end. The gap formed between the joined other end engaging portion and the connecting portion of the first and second connecting portions is the smallest, and the first and second divided pieces are pulled toward the predetermined portion. When the gap is closed, the fluid device connection structure is characterized in that the radial width dimension becomes a uniform perfect circle shape at the minimum interval in the initial state. In the fluid device connection structure according to any one of claims 1 to 3,
At least one of the engaging portions that engage the plurality of divided pieces has one divided piece provided with a locking claw so as to be elastically deformable, and the other divided piece having an insertion portion through which the locking claw can be inserted. And to engage
The locking claw inserted through the insertion portion is locked at a position close to the connection portion of the first and second connection portions along the outer peripheral surface formed in the arc shape of the other divided piece. A fluid device connection structure characterized by that. In the fluid device connection structure according to any one of claims 1 to 3,
The annular seal member is provided integrally with the main body portion mounted in the first and second annular seal grooves, and between the first and second end surfaces, and the first and the second end surfaces. An exposed portion exposed outside the connection portion of the second connection portion,
The fluid device connection structure according to claim 1, wherein the connecting member is provided with an exposed portion capable of exposing the exposed portion. In the fluid device connection structure according to claim 4,
The fluid device connection structure according to claim 1, wherein the annular seal member is configured so that at least a position corresponding to the exposed portion is distinguishable from the first and second connection portions.   A fluid device unit that connects the first fluid device and the second fluid device using the fluid device connection structure according to any one of claims 1 to 7.

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