JP2010060107A - Compound seal member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compound seal member having vacuum sealing performance, resistance to plasma, corrosion proof gas performance or the like and capable of easily separating a first fastening member from a second fastening member even when fitted between the first fastening member and the second fastening member and used for a long time at high temperature-high pressure. <P>SOLUTION: A first seal member 6 arranged on a seal groove bottom face 2a side of a one-sided dovetail groove 2 and a second seal member 8 arranged on an opening end face side of the one-sided dovetail groove 2 are detachably integrated in a projection/recess fitting part 10. The projection/recess fitting part 10 is constituted on a face approximately parallel with the seal groove bottom face 2a. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a composite seal member used in, for example, an ultra-vacuum state, and more particularly to a composite seal member suitable for use in a semiconductor manufacturing apparatus or a gate valve incorporated in a semiconductor manufacturing apparatus.

With the progress of semiconductor manufacturing equipment, the demands on members used in semiconductor manufacturing equipment have become more severe, and the demands have also become various.
For example, a sealing material used in a semiconductor manufacturing apparatus such as a dry etching apparatus or a plasma CVD apparatus needs a vacuum sealing performance as a basic performance. And it is requested | required to have performances, such as plasma resistance and corrosion-gas resistance, with the installation location of the apparatus and sealing material to be used.

Thus, in the seal portion where plasma resistance and corrosion gas resistance are required in addition to the vacuum seal performance, fluororubber which has been hardly affected by the fluid has been used so far.
However, as usage conditions become severe, fluororubbers are insufficient in performance such as plasma resistance and corrosion gas resistance, and new materials are being demanded.

To meet these requirements, it has properties such as vacuum sealing performance, plasma resistance, and corrosion gas resistance, and even after repeated use, the vacuum sealing performance will not deteriorate, and metal particles may be generated during use. For example, Patent Document 1 has been proposed as a sealing material that is easy to manufacture and can be manufactured at low cost.
As shown in FIG. 4, the composite seal member 20 of Patent Document 1 includes, for example, a first seal member 22 having plasma resistance and corrosion gas resistance, and a second seal member having seal properties. 24.
Such a composite seal member 20 includes, for example, a first fastening member 28 having a dovetail groove 26 and a second fastening member 30 fastened to the first fastening member 28 in an integrated state by an adhesive. Installed between.
JP 2005-164027 A

By the way, in the composite sealing member 20 described in Patent Document 1, as shown in FIG. 5, when the space between the first fastening member 28 and the second fastening member 30 is tightened, the first sealing member 22. And the second seal member 24 are in pressure contact with each other.
If this state continues for a long time under high temperature and high pressure, the first seal member 22 and the second seal member 24 adhere to the second member 30 and cannot be peeled off.
As a result, when the second fastening member 30 needs to be separated from the first fastening member 28, it may not be possible to do so.

  In view of such a situation, the present invention provides a composite seal member having performances such as vacuum seal performance, plasma resistance, and corrosion gas resistance, at a high temperature and high pressure between the first fastening member and the second fastening member. Even if it is used for a long time, it aims at providing the composite sealing member which can pull apart easily between a 1st fastening member and a 2nd fastening member.

To achieve the above object, the present invention provides:
The first seal member 6 disposed on the seal groove bottom surface 2 a side of the grooved groove 2 and the second seal member 8 disposed on the opening end surface side of the grooved groove 2 are the uneven fitting portion 10. The concave / convex fitting portion 10 is configured so as to be detachable and integrated with a surface substantially parallel to the bottom surface 2a of the seal groove.

  According to this configuration, since the first seal member 6 and the second seal member 8 are detachable, the composite seal member composed of the two members is not fixed. Therefore, even if it is interposed between the first fastening member and the second fastening member and used for a long time under high temperature and high pressure, if the first fastening member is separated from the second fastening member, it is easily separated. Can do.

Furthermore, in the present invention, the inner wall surface 8a of the second seal member 8 that abuts on the inclined radially inner side wall surface 2b of the grooved groove 2 is inclined by the inclined inner wall surface 2b of the grooved groove 2. It is preferable to incline at an inclination angle α corresponding to the angle α.
If it is inclined at such an angle, the initial mounting property of the composite seal member is good.

  According to the composite seal member of the present invention, the engagement between the first seal member and the second seal member is easily released. Therefore, even if the composite seal member is used for a long time at high temperature and high pressure, the first fastening member and the second fastening member to which the composite seal member is attached can be easily separated.

  Hereinafter, the composite seal member according to the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows a single cross section of a composite seal member 40 according to one embodiment of the present invention, and FIG. 2 is a single cross sectional view of a single groove 2 in which the composite seal member 40 of FIG. 1 is mounted. .

  The one-sided groove 2 is formed, for example, in a joint portion of a semiconductor manufacturing apparatus such as a dry etching apparatus or a plasma CVD apparatus, and the width on the bottom side of the seal groove 2a is on the opening side of the one-sided groove 2. It is wider than the width. Moreover, the radially inner side wall surface 2b of the grooved groove 2 is an inclined surface, and the radially outer side wall surface of the grooved groove 2 is a vertical surface 2c. The inclination angle of the radially inner side wall surface 2b with respect to the seal groove bottom surface 2a is α.

In the composite seal member 40 shown in FIG. 1, the first seal member 6 is mounted on the seal groove bottom surface 2a side of the grooved groove 2, and the second seal member 8 is mounted on the opening end surface side. That is, the composite seal member 40 is mounted in the one-side groove 2 of FIG. 2 in the posture of FIG.
The first seal member 6 of the composite seal member 40 is made of, for example, synthetic resin, and the surface in contact with the seal groove bottom surface 2a is formed flat, and the surface in contact with the second seal member 8 is uneven. A convex portion 10a that forms one side of the fitting portion 10 is formed. The convex portions 10a may be formed in an annular shape over the entire circumference of the first seal member 6, but may be formed like protrusions at predetermined intervals.
On the other hand, the second seal member 8 is formed to have a substantially triangular cross section, and the surface of the concave and convex fitting portion 10 is formed on the surface in contact with the first seal member 6, that is, the surface substantially parallel to the seal groove bottom surface 2a. A recess 10b constituting the other is formed.
The concave portions 10b of the second seal member 8 correspond to the convex portions 10a of the first seal member 6. If the convex portions 10a are annular, the concave portions 10b are also annular, and the convex portions 10a are formed at predetermined intervals. If so, the recesses 10b are also formed at predetermined intervals. Note that the first seal member 6 may be formed with a recess 10 b and the second seal member 8 may be formed with a protrusion 10 a. Further, the concave / convex fitting portion 10 composed of the concave portion 10b and the convex portion 10a can be assembled without a gap if they are assembled to each other, but can be easily released by pulling in a direction away from each other.
That is, in the composite seal member 40 of the present embodiment, the first seal member 6 and the second seal member 8 can be detachably fitted.

The lower end 8b of the second seal member 8 in FIG. 1 is formed in a substantially arc shape. As shown in FIG. 3, in the composite seal member 40, only the lower surface side distal end portion 8 b of the second seal member 8 comes into contact with the second fastening member 30 when compressed.
The inner wall surface 8 a of the second seal member 8 is inclined at the same angle as the inclination angle α of the radially inner side wall surface 2 b of the one-side groove 2. That is, the inclination angle α of the inner wall surface 8a is the same as the inclination angle α of the one-side groove 2. As described above, by providing the second seal member 8 with the inclination angle α equal to the inclination angle α of the single groove 2, the initial mounting property of the composite seal member 40 to the first fastening member 28 is improved.

The second seal member 8 is preferably made of rubber which is an elastic member. As the rubber, either natural rubber or synthetic rubber can be used.
When the composite seal member 40 is compressed, the second seal member 8 made of such a material is applied with a reaction force from the first seal member 6, so that the lower end portion on the lower surface side of the second seal member 8. 8b is press-contacted by the 2nd fastening member 30, and, thereby, high sealing performance can be provided. Further, it is more desirable that the rubber constituting the second seal member 8 is made of fluororubber.

  Fluoro rubber includes binary vinylidene fluoride such as vinylidene fluoride / hexafluoropropylene copolymer, vinylidene fluoride / trifluorochloroethylene copolymer, and vinylidene fluoride / pentafluoropropylene copolymer. Rubber, vinylidene fluoride / tetrafluoroethylene / hexafluoropropylene copolymer, vinylidene fluoride / tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, vinylidene fluoride / tetrafluoroethylene / propylene copolymer, etc. These ternary vinylidene fluoride rubbers, tetrafluoroethylene / propylene copolymers, tetrafluoroethylene perfluoroalkyl vinyl ether copolymers, thermoplastic fluororubbers, and the like can be used.

  Thus, if the rubber which comprises the 2nd sealing member 8 is comprised from the fluoro rubber, even if the 2nd sealing member 8 contacts corrosive gas and plasma, it will be exposed to corrosive gas, plasma, etc. Durability is good and sealing performance does not deteriorate.

  The first seal member 6 is preferably made of a synthetic resin harder than the second seal member 8, and is preferably a fluororesin, a polyimide resin, a polyamideimide resin, a polyetherimide resin, or a polyamideimide resin. It is desirable to use one or more synthetic resins selected from polyphenylene sulfide resin, polybenzimidazole resin, and polyether ketone resin.

  As described above, if the first seal member 6 is made of a hard material, an appropriate reaction force can be applied to the second seal member 8 when compressed.

In this case, the fluororesin includes polytetrafluoroethylene (PTFE) resin, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) resin, tetrafluoroethylene-hexafluoropropylene copolymer (FEP) resin, tetrafluoro Ethylene-ethylene copolymer (ETFE) resin, polyvinylidene fluoride (PVDF) resin, polychlorotrifluoroethylene (PCTFE) resin, chlorotrifluoroethylene-ethylene copolymer (ECTFE) resin, polyvinyl fluoride (PVF) Among them, PTFE is preferable in view of heat resistance, corrosion resistance gas, plasma resistance, and the like.

The composite seal member 40 of the present embodiment is configured as described above, and the operation thereof will be described below.
Now, the composite seal member 40 composed of the first seal member 6 and the second seal member 8 is fitted only by the concave-convex fitting portion 10. Therefore, it can be easily released by pulling in directions away from each other.
Moreover, since the inclination angle α of the grooved groove 2 and the inclination angle α of the second seal member 8 are the same, the mounting property of the composite seal member 40 to the grooved groove 2 is good.
When the space between the first fastening member 28 and the second fastening member 30 is tightened with the composite seal member 40 mounted, the lower end 8b of the second seal member 8 comes into contact with the second fastening member 30, where The sealing function is demonstrated. At this time, a reaction force is transmitted from the first seal member 6 to the second seal member 8 side.
It is assumed that such a composite seal member 40 has been used for a long time under high temperature and high pressure. When it is necessary to remove the first fastening member 28 and the second fastening member 30 from this state, the fastening means such as a bolt is released, and the second fastening member 30 is pulled away from the first fastening member 28. At this time, airtightness is maintained between the first fastening member 28 and the second fastening member 30 by the composite seal member 40. On the other hand, the first seal member 6 and the second seal member 8 are simply fitted with the concave / convex fitting portion 10, so that when the force in the pulling direction is applied, the fitting is promptly performed. Canceled. Therefore, the 1st fastening member 28 and the 2nd fastening member 30 can be pulled apart.
As mentioned above, although one Example of this invention was described, this invention is not limited to the said Example at all.
For example, in the said Example, the shape of the uneven | corrugated fitting part 10 is not limited to the said Example, A cross-sectional triangle shape etc. may be sufficient. Further, the materials of the first seal member 6 and the second seal member 8 are not limited.

FIG. 1 is a cross-sectional view of a composite seal member according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of a dovetail groove in which the composite seal member shown in FIG. 1 is mounted. FIG. 3 is a schematic cross-sectional view when the composite seal member according to one embodiment of the present invention is mounted in a single groove. FIG. 4 is a schematic view of a conventional composite sealing member disclosed in Japanese Patent Application Laid-Open No. 2005-164027. FIG. 5 is a cross-sectional view when the composite seal member shown in FIG. 4 is compressed.

Explanation of symbols

2 Single groove 2a Seal groove bottom surface 2b Diameter inner side wall surface 6 First seal member 8 Second seal member 8a Inner wall surface 10 Concave / concave fitting portion 28 First fastening member 30 Second fastening member α Inclination angle

Claims (2)

  A first seal member (6) disposed on the seal groove bottom surface (2a) side of the grooved groove (2), and a second seal member (8) disposed on the opening end surface side of the grooved groove (2). ) Is detachably integrated at the concave / convex fitting portion (10), and the concave / convex fitting portion (10) is formed on a surface substantially parallel to the bottom surface of the seal groove (2a). A composite seal member.   The inner wall surface (8a) of the second seal member (8) that abuts the inclined inner wall surface (2b) of the inclined groove (2) is radially inward of the grooved groove (2). The composite seal member according to claim 1, wherein the composite seal member is inclined at an inclination angle (α) corresponding to the inclination angle (α) of the wall surface (2b).

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