JP2009101253A - Sponge roller brush - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sponge roller brush capable of washing a substrate with high purity and high quality by fixing a tubular sponge member to a spindle without using an adhesive to eliminate influences to a washing liquid. <P>SOLUTION: The sponge roller brush is rotatively driven around an axis in parallel with the material to be washed and washes the material to be washed by sliding up to the material to be washed that the washing liquid is supplied. The brush is provided with a spindle 10 consisting of a rigid body having a cross-sectional circle configuration and having a predetermined length to the axis direction, and a tubular sponge member 11 inserted into the outer peripheral surface of the spindle elastically deformed to increase the inner diameter and pressed and fixed to the outer peripheral surface of the spindle by means of elastic force of itself. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sponge roller brush used in a substrate cleaning apparatus for cleaning, for example, a glass substrate or a semiconductor wafer constituting a flat display device as an object to be cleaned.

  In recent years, liquid crystal displays (LCDs) and plasma displays (PDPs) have been supplied in large quantities instead of cathode ray tubes (CRTs). In the manufacturing process of a glass substrate or a semiconductor wafer (hereinafter collectively referred to as “substrate”) constituting such a flat display device, the surface of the substrate may be contaminated due to various causes.

  In general, a foreign substance having a size of about several μm is called a particle, and it is a stain caused by the particle adhering to the substrate surface. Therefore, when the circuit pattern is formed in each step, the substrate is washed so as to be in a clean state in which particles do not adhere to the substrate surface.

  In the substrate cleaning apparatus, in the single wafer cleaning method in which the substrates are cleaned one by one, a disk-shaped or roll-shaped brush is used, and the brush is brought into sliding contact with the substrate to physically “rub” the substrate for cleaning. Is going. For example, [Patent Document 1] describes a brush roll, which is used in a lithographic printing plate processing apparatus.

  However, various coatings such as metal films such as ITO and Cr, and soft films such as organic films for color filters are formed on the main surface of the substrate. These soft coated surfaces can be scratched by the "rubbing" of the brush roll.

JP-A-6-148900

  Therefore, when a soft coating surface is to be cleaned, a sponge roller brush in which a cylindrical sponge member having elasticity is attached to a support shaft that is a rigid body tends to be frequently used. As the material of the sponge, for example, a polymer synthetic resin material such as PVA (polyvinyl amir) or PVF (polyvinyl feminine), or polyurethane is used.

  In manufacturing this type of sponge roller brush, an adhesive is applied to the outer peripheral surface of the support shaft in advance. Then, the cylindrical sponge member can be bonded and fixed to the support shaft by inserting the inner diameter portion of the cylindrical sponge member on the outer peripheral surface of the support shaft, positioning it, temporarily fixing it and leaving it for a predetermined time. Adhesive is applied in a sufficient amount to securely attach the cylindrical sponge member to the support shaft.

Usually, the adhesive often protrudes from the side end of the cylindrical sponge member, and the adhesive is easily wetted by the cleaning liquid (chemical). Depending on the conditions, components constituting the adhesive are eluted into the cleaning liquid, and the composition of the cleaning liquid is changed.
Further, during cleaning, the cleaning liquid impregnates the entire cylindrical sponge member and penetrates to the deepest part, and wets the adhesive applied to the support shaft. Even if the adhesive does not protrude from the cylindrical sponge member, the cleaning liquid eventually comes into contact with the adhesive, and the phenomenon that the adhesive elutes into the cleaning liquid cannot be prevented.

  The present invention has been made on the basis of the above circumstances, and its object is to attach and fix a cylindrical sponge member to a support shaft without using an adhesive, eliminating the influence on the cleaning liquid, and having high purity and high quality. It is an object of the present invention to provide a sponge roller brush that can clean a substrate.

  In order to satisfy the above-mentioned object, the present invention is a sponge roller brush that is driven to rotate with the object to be cleaned in parallel with the central axis, and that is slidably contacted with the object to be cleaned and supplied with the cleaning liquid. It is fitted in the outer periphery of the support shaft in a state of elastic deformation so that the inner diameter is forcedly expanded, and the outer periphery of the support shaft by its own elastic force. A cylindrical sponge member that is pressure-bonded to the surface.

  According to the present invention, the sponge member is attached and fixed to the support shaft without using an adhesive, and there is an effect of eliminating the influence of the adhesive and performing high-purity and high-quality cleaning.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1A is a perspective view of the sponge roller brush R1 according to the first embodiment seen through, FIG. 1B is a diagram for explaining the manufacturing process of the sponge roller brush R1, and FIG. 1C is completed. It is the side view of the same sponge roller brush R1.

  As shown in FIG. 1 (A), the sponge roller brush R1 is formed of a hollow cylinder (may be solid), and is fixed to the support shaft 10 which is a rigid body and the outer peripheral surface of the support shaft 10 by pressure bonding. It is comprised from the cylindrical sponge member 11 which has elasticity.

  The total axial length of the cylindrical sponge member 11 is formed shorter than the total axial length of the support shaft 10 so that both ends of the support shaft 10 protrude from both end faces of the cylindrical sponge member 11. Both ends of the support shaft 10 projecting from the cylindrical sponge member 11 are supported by a drive unit, and the sponge roller brush R1 is driven to rotate with the substrate being cleaned and the central axis in parallel.

  As the material of the cylindrical sponge member 11, a polymer synthetic resin material such as PVA or PVF, or polyurethane is used as in the conventional case. The support shaft 10 can be made of a synthetic resin material that can use an adhesive such as PVC or ABS, or a synthetic resin material that cannot use an adhesive such as UPE (ultra high molecular weight polyethylene), PE, or PP.

  Conventionally, since an adhesive was used to attach the cylindrical sponge member to the support shaft, the material of the support shaft was limited to PVC, ABS, or the like. Here, as will be described later, the support material is used without using an adhesive. Since the cylindrical sponge member 11 is attached and fixed to the shaft 10, not only a synthetic resin material that can use an adhesive but also a wide range of synthetic resin materials that cannot use an adhesive can be selected.

  Further, the sponge roller brush R1 including the support shaft 10 made of these synthetic resin materials may be used in a substrate cleaning apparatus using a cleaning liquid that has been found to cause a metal reaction. When the cleaning liquid causes a metal reaction, it adversely affects the film formed on the liquid crystal glass substrate that is the object to be cleaned.

  In some cases, it is used in a substrate cleaning apparatus using a cleaning liquid that has been found not to cause a metal reaction. Under this condition, a stainless steel (SUS) material is used for the spindle 10 of the sponge roller brush R1, and a stainless steel flange, screw, and screws are used to attach the completed sponge roller brush R1 to the substrate cleaning apparatus. .

As shown in FIG. 1B, a tapered guide portion 10a having a gradually increasing cross-sectional diameter is provided at one side end portion of the support shaft 10 from the end surface to the outer peripheral surface. The taper guide portion 10a is notched obliquely from the inner diameter portion of the pipe-shaped support shaft 10 to the outer peripheral surface.
The cylindrical sponge member 11 is shown in a broken line in FIG. 1B and in a state before being fitted into the support shaft 10 as shown by a two-dot chain line in FIG. It is formed smaller than the diameter (outer diameter).

In order to manufacture the sponge roller brush R1 by attaching and fixing the cylindrical sponge member 11 to the outer peripheral surface of the support shaft 10, the following method is used.
An opening that opens to one side end of the cylindrical sponge member 11 is applied to the tapered guide portion 10 a of the support shaft 10. At this time, it is necessary to correctly align the axis of the support shaft 10 and the axis of the cylindrical sponge member 11.

  Then, the side end portion of the cylindrical sponge member 11 is forcibly pushed in along the axial direction of the support shaft 10. The opening of the cylindrical sponge member 11 slides with respect to the taper guide portion 10a, and the inner diameter is forcibly elastically deformed and expanded. Further, by pushing the cylindrical sponge member 11, the side end portion moves from the tapered guide portion 10 a to the outer peripheral surface of the cylindrical sponge member 11.

  The pushing of the cylindrical sponge member 11 is continued, and the side end portion is forcibly moved along the axial direction from the outer peripheral surface of the end portion of the support shaft 10. Finally, as shown in FIG. 1A, the cylindrical sponge member 11 covers substantially the entire length of the outer peripheral surface of the support shaft 10. The cylindrical sponge member 11 is pressure-bonded and fixed to the outer peripheral surface of the support shaft 10 by its own elastic force to complete the sponge roller brush R1.

In particular, in the specification that requires the outer diameter accuracy of the sponge roller brush R1, the peripheral surface of the sponge roller brush R1 is polished to match the specification.
As a result, the cylindrical sponge member 11 can be reliably attached and fixed to the support shaft 10 without using any adhesive. Even if the completed sponge roller brush R1 is attached to the substrate cleaning apparatus to perform the substrate cleaning operation, high-purity and high-quality cleaning is performed without affecting the cleaning liquid.

In addition, the optimal setting of the fitting with respect to the spindle 10 of the cylindrical sponge member 11 is as follows.
For example, when the outer diameter of the support shaft 10 is φ50 mm, the cylindrical sponge member 11 having an inner diameter of φ45 mm is used. In the state completed as the sponge roller brush R, the cylindrical sponge roller brush R is pressure-bonded and fixed to the support shaft 10 in an optimum state.

  When the ratio of the outer diameter of the support shaft 10 to the difference between the outer diameter of the support shaft 10 and the inner diameter of the cylindrical sponge member 11 is referred to as “fit rate”, the outer diameter of the support shaft 10 is φ50 mm, and the cylindrical sponge member 11. The fitting rate when the inner diameter is 45 mm is “10%”. It is necessary to adjust the inner diameter of the cylindrical sponge member 11 according to the outer diameter of the support shaft 10 and to select the fitting rate as appropriate.

When the support shaft 10 has a small outer diameter, the fitting rate is adjusted within a range of 3 to 10%. When the outer diameter of the support shaft 10 is a large diameter of about φ75 to 100 mm, the fitting rate is set to about 10 to 20%. Thus, the fitting rate increases as the diameter of the support shaft 10 increases.
Moreover, as the sponge roller brush R1, the cylindrical sponge member 11 that actually performs the cleaning action may increase the hardness or decrease the hardness depending on the substrate that is the object to be cleaned. To increase the hardness of the cylindrical sponge member 11, the fitting rate is set to a large value, and to reduce the hardness, the fitting rate is set to a small value.

The relationship between the inner diameter of the cylindrical sponge member 11 and the hardness of the cylindrical sponge member 11 in the state completed as the sponge roller brush R1 is related to the “pressure” received by the cylindrical sponge member 11 when cleaning the substrate. is there.
When a strong pressure is applied to the cylindrical sponge member 11 during the cleaning of the substrate, the fitting rate is set large to increase the hardness. When only a weak pressure is applied to the cylindrical sponge member 11, the fitting rate is set small to lower the hardness. All of them need to be adjusted appropriately according to the cleaning status of the object to be cleaned.

FIG. 2A is a perspective view of the sponge roller brush R2 according to the second embodiment, and FIG. 2B is a cross-sectional view of the support shaft 10 constituting the sponge roller brush R2.
As shown in FIG. 2A, the sponge roller brush R <b> 2 includes a support shaft 10 and a cylindrical sponge member 11 that is pressure-bonded and fixed to the outer peripheral surface of the support shaft 10. The structure of the support shaft 10 and the cylindrical sponge member 11 is exactly the same as that described above, and a new description is omitted here.

  A plurality of (eight) anti-rotation protrusions 12 are provided along the outer peripheral surface of the support shaft 10 with a predetermined distance from each other along the axial direction of the support shaft 10. For example, when the outer diameter of the support shaft 10 is φ50 mm, the cross-sectional dimension of the detent projection 12 is preferably 5 mm in length and width.

  The total length of the rotation-preventing protrusion 12 is smaller than the total length (axial length) of the cylindrical sponge member 11. Therefore, as described later, in the state in which the cylindrical sponge member 11 is fitted on the support shaft 10, the anti-rotation protrusion 12 is covered with the cylindrical sponge member 11 and does not protrude from the end surface.

When the support shaft 10 is formed of a synthetic resin material, the rotation preventing protrusion 12 is formed integrally with the support shaft 10. Alternatively, when the support shaft 10 is selected from among synthetic resin materials, in particular, a PVC material is used, the non-rotating projection 12 made of PVC material is manufactured separately from the support shaft 10, and subsequently, by means such as partial welding. Stick.
When the support shaft 10 is formed of a stainless steel material, the anti-rotation ridge 12 made of the same material is manufactured separately from the support shaft 10, and is subsequently made of the same material as the support shaft 10 and the anti-rotation ridge 12. Fix and fix using a fastener such as a machined screw.

As described above, even if either a synthetic resin material or a stainless steel material is selected as the material of the support shaft 10, it is not possible to use an adhesive when attaching and fixing the rotation-preventing protrusion 12 to the support shaft 10. Of course.
FIG. 3 is a perspective view showing a part of the process of fitting the cylindrical sponge member 11 to the support shaft 10 provided with the rotation preventing protrusion 12.

  The taper guide portion 10a is provided at one side end (not shown) of the support shaft 10. The inner diameter of the cylindrical sponge member 11 is smaller than the outer diameter of the support shaft 10, and the one end opening of the cylindrical sponge member 11 is pressed against the taper guide portion 10a to forcibly push it in. The inner diameter of the cylindrical sponge member 11 is expanded by elastic deformation, and this end is fitted into the outer peripheral surface of the support shaft 10.

  Further, when the cylindrical sponge member 11 is forcibly pushed in along the axial direction of the support shaft 10, the anti-rotation protrusion 12 is fitted into the cylindrical sponge member 11 as shown in FIG. 3. If the action on the cylindrical sponge member 11 is continued, finally, as shown in FIG. 2A again, the cylindrical sponge member 11 is pressure-fixed to the outer peripheral surface of the support shaft 10 by its own elastic force.

  The cylindrical sponge member 11 has a predetermined thickness and hardness, and the outer peripheral surface has a perfect circle shape while the anti-rotation protrusion 12 is fitted. In other words, even if the cylindrical sponge member 11 is fitted to the support shaft 10 provided with the anti-rotation ridge 12, the roundness of the anti-rotation ridge 12 is maintained so that the roundness of the cylindrical sponge member 11 is not impaired. A cross-sectional dimension is set, and the hardness of the cylindrical sponge member 11 is selected.

Since the roundness of the cylindrical sponge member 11 is ensured, when actually cleaning the substrate, the contact pressure of the cylindrical sponge member 11 with respect to the substrate is uniform over the entire circumference, and thus high purity and high quality. Cleaning is performed.
Since the plurality of anti-rotation protrusions 12 are provided on the peripheral surface of the support shaft 10, the cylindrical sponge member 11 is displaced in the circumferential direction of the support shaft 10 even if cleaning is performed with an increased contact pressure on the substrate. There is nothing, and a higher quality and higher quality cleaning is performed.

FIG. 4A is a partial perspective view of the support shaft 10 provided with the anti-rotation protrusion 12A having a different structure, and FIG. 4B is a cross-sectional view of the support shaft 10.
The number, the overall length, and the mounting structure for the support shaft 10 of the rotation preventing protrusions 12A may be the same as those described above. Here, the protruding end of the rotation-preventing protrusion 12 </ b> A is formed in a triangular shape, and is attached in a state of being twisted in a substantially spiral shape with respect to the axial direction of the support shaft 10.

When the support shaft 10 is formed of a synthetic resin material, these anti-rotation protrusions 12A are integrally formed on the outer peripheral surface of the support shaft 10, or after being manufactured of the same material, partial welding, etc. It is mounted and fixed by means that do not use an adhesive or metal fixture.
When the support shaft 10 is formed of a stainless steel material, the anti-rotation protrusion 12A is also formed of a stainless steel material and is attached and fixed with a stainless steel fixture. Also in this case, the rotation preventing protrusion 12A is attached and fixed by means that does not use an adhesive.

Since the rotation-preventing protrusion 12A is attached to the support shaft 10 by being spirally twisted, the tubular sponge member 11 is fitted to the support shaft 10 while being twisted. Accordingly, the cylindrical sponge member 11 can be smoothly attached to the outer peripheral surface of the support shaft 10, and the triangular tip of the rotation preventing protrusion 12 </ b> A bites into the inner peripheral surface of the cylindrical sponge member 11.
Even when the sponge roller brush R is subjected to pressure in the circumferential direction orthogonal to the axial direction in a state where the cleaning action is actually performed, the provision of the anti-rotation protrusion 12A allows the cylindrical sponge member 11 to There is no misalignment, and cleaning with higher purity and higher accuracy is possible.

FIG. 5A is a partial perspective view of the support shaft 10 provided with the rotation-preventing protrusion 12B having a further different structure, and FIG. 5B is a cross-sectional view of the support shaft 10. FIG.
The rotation-preventing protrusions 12 </ b> B are spaced apart from each other along the outer peripheral surface of the support shaft 10, and a plurality of rotation-preventing protrusions 12 </ b> B are provided along the axial direction of the support shaft 10. Each of the rotation preventing protrusions 12B is divided into a plurality of parts in the axial direction of the support shaft 10, and the divided parts are attached with a gap.

When the support shaft 10 is formed of a synthetic resin material, the anti-rotation protrusions 12B are formed integrally with the peripheral surface of the support shaft 10 or manufactured separately from the support shaft 10 with the same material. Then, it is fixed by means such as partial welding without using an adhesive or metal fixture.
When the support shaft 10 is formed of a stainless steel material, the anti-rotation protrusion 12B is formed of a stainless steel material, and is attached and fixed with a stainless steel fixture (screws). Also in this case, it is fixed by means without using an adhesive.

The support shaft 10 provided with the anti-rotation protrusions 12, 12 </ b> A, 12 </ b> B described above is provided with a taper guide portion 10 a at one side end, and the cylindrical sponge member 11 is also provided on the anti-rotation protrusion itself. Means for improving the working efficiency at the time of fitting are provided.
FIG. 6 is a diagram illustrating an operation of fitting the cylindrical sponge member 11 into the support shaft 10.
One side end portion of the support shaft 10 is provided with a tapered guide portion 10a having a cross-sectional diameter that gradually increases from the end surface toward the outer peripheral surface. A notch guide portion 13 that is notched at substantially the same inclination angle as that of the taper guide portion 10a is also provided at a side end portion of the rotation preventing protrusion 12B (may be 12, 12A).

From this, in order to manufacture the sponge roller brush R3, the tapered guide part 10a of the support shaft 10 is applied with an opening that opens at one side end of the cylindrical sponge member 11, and the above-mentioned side of the cylindrical sponge member 11 is applied. The end is forcibly pushed in along the axial direction of the support shaft 10.
Since the inner diameter of the cylindrical sponge member 11 is elastically deformed and expanded by the tapered guide portion 10a, the side end portion of the cylindrical sponge member 11 is moved from the tapered guide portion 10a to the outer peripheral surface of the support shaft 10.

Further, the side end portion of the cylindrical sponge member 11 is forcibly moved along the axial direction from the outer peripheral surface of the side end portion of the support shaft 10 and is fitted into the notch guide portion 13 of the rotation preventing protrusion 12B. And the side edge part of the cylindrical sponge member 11 is forcibly moved, and finally the cylindrical sponge member 11 is crimped and fixed over substantially the entire length of the outer peripheral surface of the support shaft 10.
Therefore, it is possible to improve the working efficiency for manufacturing the sponge roller brush R3.

The above is performed directly by fitting the cylindrical sponge member 11 to the support shaft 10 by providing the support shaft 10 with the tapered guide portion 10a. However, the present invention is not limited to this, and an auxiliary tool (jig) may be used.
7A is a side view of the guide member 15 as an auxiliary tool according to the third embodiment, FIG. 7B is a front view of the guide member 15, and FIG. It is a figure explaining the operation | work which fits the cylindrical sponge member 11 in the support shaft 10. FIG.

The guide member 15 is a conical portion 16 having a circular cross section and a sharp tip. A first same-diameter portion 17 is formed that is smaller than the outer diameter of the support shaft 10 and has the same diameter by a predetermined distance from the base end of the distal cone portion 16.
Further, a taper guide portion 18 whose diameter is gradually increased along the axial direction from the base end of the first same-diameter portion 17 is provided, and the diameter of the base end of the taper guide portion 18 is outside the support shaft 10. It is formed larger than the diameter.

From the base end of the taper guide part 18, it becomes the 2nd same diameter part 19 formed in the same diameter only for predetermined distance. The end surface of the second same diameter portion 19 is provided with a fitting hole 20 that is the same as the outer diameter of the support shaft 10 and that allows the end portion of the support shaft 10 to be freely attached and detached.
The depth dimension of the fitting hole 20 is set to be equal to the distance from the end surface of the support shaft 10 to the end surface of the rotation preventing projection 12. With this dimension setting, the guide member 15 can be used for both the support shaft 10 provided with the anti-rotation protrusion 12 and the support shaft 10 not provided with the anti-rotation protrusion 12.

Next, a method for manufacturing the sponge roller brush R using the guide member 15 will be described.
Here, the support shaft 10 provided with the anti-rotation protrusion 12 is applied, but the support shaft 10 provided with the anti-rotation protrusion 12A, 12B of another structure may be used. The support shaft 10 which is not provided may be used. In any case, it is not necessary to provide the tapered guide portion 10a at the side end portion of the support shaft 10, and it is not necessary to provide the notch guide portion 13 at the side end portion of the rotation preventing projection 12B.

  First, the fitting hole 20 provided in the end surface of the second same-diameter portion 19 of the guide member 15 is fitted to the end portion of the support shaft 10 to connect the support shaft 10 and the guide member 15 on the same axis. . An opening that opens at one side end of the cylindrical sponge member 11 is fitted to the distal end conical portion 16 of the guide member 15.

  At this time, even if the axial position of the cylindrical sponge member 11 is slightly deviated from the axial position of the guide member 15, the opening of the cylindrical sponge member 11 follows the distal end conical portion 16 of the guide member 15. Inevitably, the axis positions of each other coincide.

  Then, the side end portion of the tubular sponge member 11 is pushed in along the axial direction of the guide member 15, and the end portion on the tubular sponge member 11 side is tapered from the guide member conical portion via the first same-diameter portion 17. Move to 18 forcibly. The cylindrical sponge member 11 is gradually elastically deformed and expands, and moves to the second same-diameter portion 19.

  Furthermore, if the end portion on the cylindrical sponge member 11 side is forcibly moved along the axial direction of the support shaft 10, the cylindrical sponge member 11 covers the rotation preventing protrusion 12. Finally, the cylindrical sponge member 11 is fitted over substantially the entire axial direction of the support shaft 10, and the cylindrical sponge member 11 is pressure-fixed to the outer peripheral surface of the support shaft 10 by its own elastic force.

  That is, by using the guide member 15, the work of fitting the cylindrical sponge member 11 to the support shaft 10 can be facilitated and workability can be improved. There is no need to provide the taper guide portion 10a at the end of the support shaft 10, and even if the anti-rotation protrusion 12 is provided, the notch guide portion 13 need not be provided.

In any case, when manufacturing the sponge roller brush R, the processing effort can be reduced, which contributes to the reduction of man-hours. The guide member 15 can be used repeatedly and does not affect the cost.
As described above, the cylindrical sponge member 11 constituting the sponge roller brush R is attached to the support shaft 10 in an “non-adhesive” manner without using an adhesive. Therefore, whether the material of the support shaft 10 is a synthetic resin material or a stainless steel material, the tubular sponge member 11 is pulled out from the support shaft 10 or peeled off when the use limit as the sponge roller brush R has passed. The work to take can be done relatively easily.

  If a new cylindrical sponge member 11 is attached to the remaining spindle 10 without bonding, it can be put into practical use as a new sponge roller brush R. Since the spindle 10 can be used repeatedly any number of times, it is extremely effective from the viewpoint of recycling resources. Of course, when the spindle 10 is reused, the spindle 10 must be thoroughly inspected and confirmed to be free of damage, and the contaminants previously used must be reliably removed so that it is in a state similar to a new one. Don't be.

  Note that the present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements without departing from the scope in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments.

The perspective view of the sponge roller brush which concerns on 1st Embodiment in this invention, the figure explaining the middle of manufacture, and the side view of a sponge roller brush. The perspective view of the sponge roller brush based on 2nd Embodiment in this invention, and sectional drawing of a spindle. The figure explaining the manufacture middle of the sponge roller brush based on the embodiment. The partial perspective view of the spindle provided with the protrusion for rotation prevention of a different structure based on the embodiment, and sectional drawing of a spindle. The partial perspective view of the spindle based on the embodiment, and sectional drawing of a spindle. The figure explaining the middle of manufacture of the sponge roller brush provided with the protrusion for rotation prevention of a still different structure based on the embodiment. The figure explaining the front view of the guide member based on 3rd Embodiment in this invention, a side view, and the manufacture middle of a sponge roller brush.

Explanation of symbols

  R ... sponge roller brush, 10 ... spindle, 11 ... cylindrical sponge member, 10a ... taper guide part, 12 ... anti-rotation ridge.

Claims (3)

A sponge roller brush that is driven to rotate with the object to be cleaned in parallel with the central axis, and that is in sliding contact with the object to be cleaned to which the cleaning liquid is supplied to clean the object to be cleaned.
A support shaft made of a rigid body having a circular cross section and having a predetermined length in the axial direction;
And a cylindrical sponge member that is fitted to the outer peripheral surface of the support shaft in an elastically deformed state so as to forcibly increase the inner diameter, and is crimped and fixed to the outer peripheral surface of the support shaft by its own elastic force. Sponge roller brush.   2. The sponge roller brush according to claim 1, wherein a taper guide portion having a gradually increasing cross-sectional diameter from the end surface to the outer peripheral surface is provided at one side end portion of the support shaft. A plurality of anti-rotation ridges are provided along the outer circumferential surface of the support shaft, each having a predetermined interval along the axial direction of the support shaft,
The anti-rotation ridges are integrally formed on the outer peripheral surface of the support shaft, or are attached and fixed by means such as partial welding and screwing, etc., without using an adhesive. Item 3. The sponge roller brush according to any one of Items 2 to 3.

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