JP2009099612A5 - - Google Patents

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Publication number
JP2009099612A5
JP2009099612A5 JP2007267025A JP2007267025A JP2009099612A5 JP 2009099612 A5 JP2009099612 A5 JP 2009099612A5 JP 2007267025 A JP2007267025 A JP 2007267025A JP 2007267025 A JP2007267025 A JP 2007267025A JP 2009099612 A5 JP2009099612 A5 JP 2009099612A5
Authority
JP
Japan
Prior art keywords
substrate
processed
insertion groove
flow path
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007267025A
Other languages
English (en)
Japanese (ja)
Other versions
JP5111999B2 (ja
JP2009099612A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007267025A priority Critical patent/JP5111999B2/ja
Priority claimed from JP2007267025A external-priority patent/JP5111999B2/ja
Publication of JP2009099612A publication Critical patent/JP2009099612A/ja
Publication of JP2009099612A5 publication Critical patent/JP2009099612A5/ja
Application granted granted Critical
Publication of JP5111999B2 publication Critical patent/JP5111999B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007267025A 2007-10-12 2007-10-12 基板処理装置 Expired - Fee Related JP5111999B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007267025A JP5111999B2 (ja) 2007-10-12 2007-10-12 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007267025A JP5111999B2 (ja) 2007-10-12 2007-10-12 基板処理装置

Publications (3)

Publication Number Publication Date
JP2009099612A JP2009099612A (ja) 2009-05-07
JP2009099612A5 true JP2009099612A5 (https=) 2010-07-01
JP5111999B2 JP5111999B2 (ja) 2013-01-09

Family

ID=40702377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007267025A Expired - Fee Related JP5111999B2 (ja) 2007-10-12 2007-10-12 基板処理装置

Country Status (1)

Country Link
JP (1) JP5111999B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013118205A (ja) * 2010-03-23 2013-06-13 Jet Co Ltd 基板処理装置
JP6053246B1 (ja) * 2015-07-30 2016-12-27 バンドー化学株式会社 電極の製造方法
WO2017017911A1 (ja) * 2015-07-30 2017-02-02 バンドー化学株式会社 電極の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3954881B2 (ja) * 2002-03-27 2007-08-08 大日本スクリーン製造株式会社 基板処理装置およびそれを備えたメッキ装置

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