JP2009095826A5 - - Google Patents

Download PDF

Info

Publication number
JP2009095826A5
JP2009095826A5 JP2008245726A JP2008245726A JP2009095826A5 JP 2009095826 A5 JP2009095826 A5 JP 2009095826A5 JP 2008245726 A JP2008245726 A JP 2008245726A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2009095826 A5 JP2009095826 A5 JP 2009095826A5
Authority
JP
Japan
Prior art keywords
coating nozzle
coating
reflected light
inspection method
columnar flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008245726A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009095826A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008245726A priority Critical patent/JP2009095826A/ja
Priority claimed from JP2008245726A external-priority patent/JP2009095826A/ja
Publication of JP2009095826A publication Critical patent/JP2009095826A/ja
Publication of JP2009095826A5 publication Critical patent/JP2009095826A5/ja
Withdrawn legal-status Critical Current

Links

JP2008245726A 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 Withdrawn JP2009095826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007247933 2007-09-25
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Publications (2)

Publication Number Publication Date
JP2009095826A JP2009095826A (ja) 2009-05-07
JP2009095826A5 true JP2009095826A5 (enrdf_load_stackoverflow) 2011-09-29

Family

ID=40699336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008245726A Withdrawn JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Country Status (1)

Country Link
JP (1) JP2009095826A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5285916B2 (ja) * 2008-01-09 2013-09-11 東レ株式会社 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法
JP6353780B2 (ja) * 2014-12-17 2018-07-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR102340465B1 (ko) 2014-03-11 2021-12-16 가부시키가이샤 스크린 홀딩스 기판 처리 장치 및 기판 처리 방법
JP6541491B2 (ja) 2015-07-29 2019-07-10 株式会社Ｓｃｒｅｅｎホールディングス 流下判定方法、流下判定装置および吐出装置
JP6649957B2 (ja) 2015-09-24 2020-02-19 ギガフォトン株式会社 極端紫外光生成装置
JP6553487B2 (ja) * 2015-11-10 2019-07-31 株式会社Ｓｃｒｅｅｎホールディングス 吐出判定方法および吐出装置
KR101906288B1 (ko) * 2016-12-22 2018-12-06 삼성디스플레이 주식회사 하향식 기판 에칭장치
KR101998965B1 (ko) * 2017-11-01 2019-07-10 주식회사 포스코 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법

Similar Documents

Publication Publication Date Title
JP2009095826A5 (enrdf_load_stackoverflow)
JP2010097768A5 (enrdf_load_stackoverflow)
JP2012514730A5 (enrdf_load_stackoverflow)
EP2251454A3 (en) Vessel coating and inspection
EP4477242A3 (en) System and method for monitoring fluid flow
JP2011525935A5 (enrdf_load_stackoverflow)
EP2374851A3 (en) Ink composition, method of producing the same, ink set, and image forming method
JP2013521366A5 (enrdf_load_stackoverflow)
JP2013524170A5 (enrdf_load_stackoverflow)
PL2360213T3 (pl) Przeciwporostowa kompozycja powłokowa, przeciwporostowa błona powłokowa wytworzona z kompozycji, powlekany obiekt zawierający błonę powłokową na powierzchni oraz sposób obróbki przeciwporostowej przez wytworzenie błony powłokowej
JP2010535608A5 (enrdf_load_stackoverflow)
EP2265893A4 (en) Method and apparatus for determining pipewall thickness using one or more ultrasonic sensors
JP2012506635A5 (enrdf_load_stackoverflow)
JP2016135110A5 (enrdf_load_stackoverflow)
JP2012220381A5 (enrdf_load_stackoverflow)
CL2013002318A1 (es) Membrana de nanofiltracion con una membrana de soporte porosa en que la superficie de la membrana de soporte esta revestida con particulas polimericas preparadas mediante polimerizacion en emulsion con un diametro de particula promedio inferior a 70 nm; procedimiento de fabricacion de dicha membrana ; y su uso.
JP2012518389A5 (enrdf_load_stackoverflow)
JP2013219248A5 (enrdf_load_stackoverflow)
WO2010048276A3 (en) Method and apparatus for measuring particle size distribution in drilling fluid
EP2337876A4 (en) Film formation method, film formation device,piezoelectric film, piezoelectric device and liquid discharge device
JP2015503734A5 (enrdf_load_stackoverflow)
NL2003179A1 (nl) Lithographic apparatus and device manufacturing method and scatterometry method and measurement system used therein.
FR2906035B1 (fr) Procede de mesure quantitative de cibles biomoleculaires deposees sur une biopuce, et dispositif pour sa mise en oeuvre.
EP1835405A3 (en) Method and apparatus for testing execution flow of program
ES2555306T1 (es) Procedimiento de revestimiento de productos alimentarios