JP2009089097A - 振動トランスデューサ - Google Patents

振動トランスデューサ Download PDF

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Publication number
JP2009089097A
JP2009089097A JP2007256905A JP2007256905A JP2009089097A JP 2009089097 A JP2009089097 A JP 2009089097A JP 2007256905 A JP2007256905 A JP 2007256905A JP 2007256905 A JP2007256905 A JP 2007256905A JP 2009089097 A JP2009089097 A JP 2009089097A
Authority
JP
Japan
Prior art keywords
diaphragm
plate
substrate
film
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007256905A
Other languages
English (en)
Japanese (ja)
Inventor
Tamito Suzuki
民人 鈴木
Yukitoshi Suzuki
幸俊 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to JP2007256905A priority Critical patent/JP2009089097A/ja
Priority to US12/284,935 priority patent/US20090136064A1/en
Priority to TW097137481A priority patent/TW200934273A/zh
Priority to EP08016986A priority patent/EP2043385A2/en
Priority to CNA2008101617836A priority patent/CN101400012A/zh
Priority to KR1020080094562A priority patent/KR20090033091A/ko
Publication of JP2009089097A publication Critical patent/JP2009089097A/ja
Withdrawn legal-status Critical Current

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  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2007256905A 2007-09-28 2007-09-28 振動トランスデューサ Withdrawn JP2009089097A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007256905A JP2009089097A (ja) 2007-09-28 2007-09-28 振動トランスデューサ
US12/284,935 US20090136064A1 (en) 2007-09-28 2008-09-26 Vibration transducer and manufacturing method therefor
TW097137481A TW200934273A (en) 2007-09-28 2008-09-26 Vibration transducer and manufacturing method therefor
EP08016986A EP2043385A2 (en) 2007-09-28 2008-09-26 Vibration transducer and manufacturing method therefor
CNA2008101617836A CN101400012A (zh) 2007-09-28 2008-09-26 振动传感器及其制造方法
KR1020080094562A KR20090033091A (ko) 2007-09-28 2008-09-26 진동 트랜스듀서 및 그 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007256905A JP2009089097A (ja) 2007-09-28 2007-09-28 振動トランスデューサ

Publications (1)

Publication Number Publication Date
JP2009089097A true JP2009089097A (ja) 2009-04-23

Family

ID=40518208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007256905A Withdrawn JP2009089097A (ja) 2007-09-28 2007-09-28 振動トランスデューサ

Country Status (2)

Country Link
JP (1) JP2009089097A (zh)
CN (1) CN101400012A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2384026A2 (en) 2010-04-28 2011-11-02 Omron Corporation Acoustic sensor and method of manufacturing the same
EP2386521A2 (en) 2010-05-11 2011-11-16 Omron Corporation Acoustic sensor having protective film and method of manufacturing the same
EP2387255A2 (en) 2010-05-13 2011-11-16 Omron Corporation Acoustic sensor and microphone

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101841756A (zh) * 2010-03-29 2010-09-22 瑞声声学科技(深圳)有限公司 振膜及应用该振膜的硅电容麦克风
US9628886B2 (en) * 2013-08-26 2017-04-18 Infineon Technologies Ag MEMS device
CN105142086B (zh) * 2015-09-24 2018-09-07 歌尔股份有限公司 一种mems麦克风芯片、传声器和音频设备
CN107786929B (zh) * 2016-08-26 2023-12-26 华景科技无锡有限公司 硅麦克风

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2384026A2 (en) 2010-04-28 2011-11-02 Omron Corporation Acoustic sensor and method of manufacturing the same
CN102238461A (zh) * 2010-04-28 2011-11-09 欧姆龙株式会社 声音传感器及其制造方法
JP2011234227A (ja) * 2010-04-28 2011-11-17 Omron Corp 音響センサ及びその製造方法
US8374364B2 (en) 2010-04-28 2013-02-12 Omron Corporation Acoustic sensor and method of manufacturing the same
EP2386521A2 (en) 2010-05-11 2011-11-16 Omron Corporation Acoustic sensor having protective film and method of manufacturing the same
JP2011239197A (ja) * 2010-05-11 2011-11-24 Omron Corp 音響センサ及びその製造方法
US9199837B2 (en) 2010-05-11 2015-12-01 Omron Corporation Acoustic sensor and method of manufacturing the same
EP2387255A2 (en) 2010-05-13 2011-11-16 Omron Corporation Acoustic sensor and microphone
US8542851B2 (en) 2010-05-13 2013-09-24 Omron Corporation Acoustic sensor and microphone

Also Published As

Publication number Publication date
CN101400012A (zh) 2009-04-01

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Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20101207