JP2009088348A5 - - Google Patents
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- Publication number
- JP2009088348A5 JP2009088348A5 JP2007257768A JP2007257768A JP2009088348A5 JP 2009088348 A5 JP2009088348 A5 JP 2009088348A5 JP 2007257768 A JP2007257768 A JP 2007257768A JP 2007257768 A JP2007257768 A JP 2007257768A JP 2009088348 A5 JP2009088348 A5 JP 2009088348A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating unit
- lamp
- heating
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007257768A JP5465828B2 (en) | 2007-10-01 | 2007-10-01 | Substrate processing apparatus and semiconductor device manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007257768A JP5465828B2 (en) | 2007-10-01 | 2007-10-01 | Substrate processing apparatus and semiconductor device manufacturing method |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009088348A JP2009088348A (en) | 2009-04-23 |
JP2009088348A5 true JP2009088348A5 (en) | 2010-11-18 |
JP5465828B2 JP5465828B2 (en) | 2014-04-09 |
Family
ID=40661355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007257768A Active JP5465828B2 (en) | 2007-10-01 | 2007-10-01 | Substrate processing apparatus and semiconductor device manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5465828B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101331420B1 (en) | 2011-03-04 | 2013-11-21 | 가부시키가이샤 히다치 고쿠사이 덴키 | Substrate processing apparatus and method of manufacturing semiconductor device |
JP6012933B2 (en) * | 2011-04-26 | 2016-10-25 | 株式会社日立国際電気 | Substrate processing apparatus, semiconductor device manufacturing method, and substrate processing method |
KR102696209B1 (en) * | 2019-03-20 | 2024-08-20 | 가부시키가이샤 코쿠사이 엘렉트릭 | Substrate processing apparatus, process vessel, reflector and method of manufacturing semiconductor device |
KR102656121B1 (en) * | 2021-12-24 | 2024-04-12 | (주)보부하이테크 | Heater structure with improved welding defect and crack |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154618A (en) * | 1985-12-26 | 1987-07-09 | Matsushita Electric Ind Co Ltd | Vapor growth apparatus |
JPH0532956Y2 (en) * | 1987-09-24 | 1993-08-23 | ||
JPH08292667A (en) * | 1995-04-21 | 1996-11-05 | Tec Corp | Heat and fixing device |
JP2000114196A (en) * | 1998-08-06 | 2000-04-21 | Ushio Inc | Cooling structure of light projecting heating apparatus |
JP3733811B2 (en) * | 1999-02-16 | 2006-01-11 | ウシオ電機株式会社 | Light irradiation type heat treatment equipment |
JP4004765B2 (en) * | 2000-10-10 | 2007-11-07 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
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2007
- 2007-10-01 JP JP2007257768A patent/JP5465828B2/en active Active
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