JP2009074977A5 - - Google Patents
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- Publication number
- JP2009074977A5 JP2009074977A5 JP2007245113A JP2007245113A JP2009074977A5 JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5 JP 2007245113 A JP2007245113 A JP 2007245113A JP 2007245113 A JP2007245113 A JP 2007245113A JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5
- Authority
- JP
- Japan
- Prior art keywords
- pair
- base
- thin film
- counter electrodes
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007245113A JP5419336B2 (ja) | 2007-09-21 | 2007-09-21 | 感応センサ及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007245113A JP5419336B2 (ja) | 2007-09-21 | 2007-09-21 | 感応センサ及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009074977A JP2009074977A (ja) | 2009-04-09 |
JP2009074977A5 true JP2009074977A5 (zh) | 2010-06-03 |
JP5419336B2 JP5419336B2 (ja) | 2014-02-19 |
Family
ID=40610081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007245113A Active JP5419336B2 (ja) | 2007-09-21 | 2007-09-21 | 感応センサ及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5419336B2 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010084916A1 (ja) * | 2009-01-21 | 2010-07-29 | 北陸電気工業株式会社 | ガスセンサ用基体及びその製造方法 |
JP5252742B2 (ja) * | 2010-01-28 | 2013-07-31 | フィガロ技研株式会社 | ガスセンサ |
JP5630821B2 (ja) * | 2010-11-05 | 2014-11-26 | フィガロ技研株式会社 | ガスセンサ |
JP6639566B2 (ja) * | 2018-06-08 | 2020-02-05 | オムロン株式会社 | マイクロホットプレート及びmemsガスセンサ |
JP2023184338A (ja) * | 2022-06-17 | 2023-12-28 | 日清紡マイクロデバイス株式会社 | ガスセンサ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5391696U (zh) * | 1976-12-27 | 1978-07-26 | ||
JPS61112260U (zh) * | 1984-12-27 | 1986-07-16 | ||
JPS6214048A (ja) * | 1985-07-11 | 1987-01-22 | Figaro Eng Inc | 排ガスセンサ |
JPH0324450A (ja) * | 1989-06-21 | 1991-02-01 | Brother Ind Ltd | セラミックス湿度・ガスセンサー |
JP2005003472A (ja) * | 2003-06-11 | 2005-01-06 | Osaka Gas Co Ltd | 薄膜ガスセンサの製造方法 |
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2007
- 2007-09-21 JP JP2007245113A patent/JP5419336B2/ja active Active
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