JP2009074977A5 - - Google Patents

Download PDF

Info

Publication number
JP2009074977A5
JP2009074977A5 JP2007245113A JP2007245113A JP2009074977A5 JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5 JP 2007245113 A JP2007245113 A JP 2007245113A JP 2007245113 A JP2007245113 A JP 2007245113A JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5
Authority
JP
Japan
Prior art keywords
pair
base
thin film
counter electrodes
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007245113A
Other languages
English (en)
Japanese (ja)
Other versions
JP5419336B2 (ja
JP2009074977A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007245113A priority Critical patent/JP5419336B2/ja
Priority claimed from JP2007245113A external-priority patent/JP5419336B2/ja
Publication of JP2009074977A publication Critical patent/JP2009074977A/ja
Publication of JP2009074977A5 publication Critical patent/JP2009074977A5/ja
Application granted granted Critical
Publication of JP5419336B2 publication Critical patent/JP5419336B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007245113A 2007-09-21 2007-09-21 感応センサ及びその製造方法 Active JP5419336B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007245113A JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007245113A JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Publications (3)

Publication Number Publication Date
JP2009074977A JP2009074977A (ja) 2009-04-09
JP2009074977A5 true JP2009074977A5 (cg-RX-API-DMAC10.html) 2010-06-03
JP5419336B2 JP5419336B2 (ja) 2014-02-19

Family

ID=40610081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007245113A Active JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Country Status (1)

Country Link
JP (1) JP5419336B2 (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010084916A1 (ja) * 2009-01-21 2010-07-29 北陸電気工業株式会社 ガスセンサ用基体及びその製造方法
JP5252742B2 (ja) * 2010-01-28 2013-07-31 フィガロ技研株式会社 ガスセンサ
JP5630821B2 (ja) * 2010-11-05 2014-11-26 フィガロ技研株式会社 ガスセンサ
JP6639566B2 (ja) * 2018-06-08 2020-02-05 オムロン株式会社 マイクロホットプレート及びｍｅｍｓガスセンサ
JP7798606B2 (ja) * 2022-03-01 2026-01-14 Tdk株式会社 ガスセンサ
JP2023184338A (ja) * 2022-06-17 2023-12-28 日清紡マイクロデバイス株式会社 ガスセンサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391696U (cg-RX-API-DMAC10.html) * 1976-12-27 1978-07-26
JPS61112260U (cg-RX-API-DMAC10.html) * 1984-12-27 1986-07-16
JPS6214048A (ja) * 1985-07-11 1987-01-22 Figaro Eng Inc 排ガスセンサ
JPH0324450A (ja) * 1989-06-21 1991-02-01 Brother Ind Ltd セラミックス湿度・ガスセンサー
JP2005003472A (ja) * 2003-06-11 2005-01-06 Osaka Gas Co Ltd 薄膜ガスセンサの製造方法

Similar Documents

Publication Publication Date Title
CN103534195B (zh) 形成具有改变的应力特性的膜的方法
JP2008116938A5 (cg-RX-API-DMAC10.html)
JP2009003434A5 (cg-RX-API-DMAC10.html)
JP2019212659A5 (cg-RX-API-DMAC10.html)
JP2008311635A5 (cg-RX-API-DMAC10.html)
JP2010262275A5 (ja) 表示装置及び表示装置の作製方法
TWI265639B (en) Air gap interconnect structure and method thereof
JP2012118073A5 (cg-RX-API-DMAC10.html)
JP2008525987A5 (cg-RX-API-DMAC10.html)
JP2013046086A5 (cg-RX-API-DMAC10.html)
JP2008172266A5 (cg-RX-API-DMAC10.html)
JP2014192386A5 (cg-RX-API-DMAC10.html)
JP2009081357A5 (cg-RX-API-DMAC10.html)
JP2010147955A5 (cg-RX-API-DMAC10.html)
JP2012101196A5 (cg-RX-API-DMAC10.html)
JP5419336B2 (ja) 感応センサ及びその製造方法
TW200705014A (en) Liquid crystal device and electronic apparatus
JP2013062296A5 (cg-RX-API-DMAC10.html)
JP2005301125A5 (cg-RX-API-DMAC10.html)
WO2014127581A1 (zh) 下部电极及其制作方法
KR101115419B1 (ko) 열접착 테이프를 이용한 정전용량형 힘 센서 제작방법
JP2004361395A5 (cg-RX-API-DMAC10.html)
CN102902093B (zh) 柔性基板、载体平台、柔性显示器及其制备方法
JP2005317912A5 (cg-RX-API-DMAC10.html)
TW201340273A (zh) 晶圓堆疊結構及方法