JP2009057624A - Chemical polishing agent and metal plating method using copper or copper alloy treated before plating using the chemical polishing agent - Google Patents

Chemical polishing agent and metal plating method using copper or copper alloy treated before plating using the chemical polishing agent Download PDF

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JP2009057624A
JP2009057624A JP2007228394A JP2007228394A JP2009057624A JP 2009057624 A JP2009057624 A JP 2009057624A JP 2007228394 A JP2007228394 A JP 2007228394A JP 2007228394 A JP2007228394 A JP 2007228394A JP 2009057624 A JP2009057624 A JP 2009057624A
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copper
plating
copper alloy
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sulfuric acid
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JP5117796B2 (en
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Tetsuji Ohashi
徹二 大橋
Yoshihiro Ishino
由紘 石野
Makio Tanami
牧雄 田濤
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Meltex Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a chemical polishing agent of copper or copper alloy which forms a surface state of a required and sufficient level, without generation of unevenness or the like, as pretreatment of plating of the copper or the copper alloy to which metal plating is applied, and to provide a metal plating method using the copper or the copper alloy treated before plating using the chemical polishing agent, as a plated material. <P>SOLUTION: The chemical polishing agent to be used for pretreatment of plating of a surface of the copper or the copper alloy includes each component of ferric sulfate, sulfuric acid, a nonionic surface active agent, and a halogen ion, wherein a value of a ratio of contents of the sulfuric acid to contents of the ferric sulfate, [the contents of the sulfuric acid]/[the contents of the ferric sulfate] is 1 to 4. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本件発明は、化学研磨剤及びその化学研磨剤を用いてめっき前処理した銅又は銅合金を用いる金属めっき方法に関する。   The present invention relates to a chemical polishing agent and a metal plating method using copper or a copper alloy pre-plated with the chemical polishing agent.

銅や銅合金は、加工が容易で電気伝導度も良好なことから、電気又は電子配線、メカニカルリレー、コネクターの接点等に多用されている。これら配線の接続端子部や接点には、接続の信頼性を維持するために、防蝕を兼ねた金属めっき皮膜として、はんだめっき皮膜や金めっき皮膜が形成される。金めっき皮膜を形成する場合には、銅又は銅合金の下地と金めっき皮膜との拡散を防止するバリアーとして、下地の銅又は銅合金と金めっき皮膜との間にニッケルめっき層を設ける。このとき、めっきするニッケルの量及び金の量を削減するため、平滑表面にするのが一般的である。   Since copper and copper alloys are easy to process and have good electrical conductivity, they are frequently used for electrical or electronic wiring, mechanical relays, connector contacts, and the like. In order to maintain the reliability of connection, a solder plating film or a gold plating film is formed as a metal plating film that also serves as corrosion protection at connection terminals and contacts of these wirings. When a gold plating film is formed, a nickel plating layer is provided between the underlying copper or copper alloy and the gold plating film as a barrier for preventing diffusion of the copper or copper alloy base and the gold plating film. At this time, in order to reduce the amount of nickel to be plated and the amount of gold, a smooth surface is generally used.

しかし、表面が鏡面のような光沢を有すると、銅又は銅合金の下地とニッケルめっき皮膜、ニッケルめっき皮膜と金めっき皮膜との密着性に問題が発生する。このため、銅又は銅合金の表面を粗化又は活性化処理して密着不良の発生を防止している。該処理手法としては、機械的手法と化学的手法とがある。しかし、近年のめっき皮膜の密着性改善には、物理的手法で粗化するよりも、可能な限り平坦で、且つ、めっき層との密着性を改善する活性表面を、化学的な手法を採用して下地金属の表面に形成することが多く行なわれてきた。即ち、下地金属に対するめっき皮膜の密着性を確保する手段として、物理的なアンカー効果に求めるのではなく、化学的な密着力を得てめっき皮膜の密着性を向上させようとしてきたのである。   However, if the surface has a gloss like a mirror surface, a problem arises in the adhesion between the copper or copper alloy base and the nickel plating film, or between the nickel plating film and the gold plating film. For this reason, the surface of copper or a copper alloy is roughened or activated to prevent the occurrence of poor adhesion. The processing method includes a mechanical method and a chemical method. However, to improve the adhesion of the plating film in recent years, a chemical method is adopted that uses an active surface that is as flat as possible and improves the adhesion to the plating layer, rather than roughening by a physical method. In many cases, it is formed on the surface of the base metal. That is, as a means for ensuring the adhesion of the plating film to the base metal, it has been attempted to improve the adhesion of the plating film by obtaining a chemical adhesion force, instead of seeking the physical anchor effect.

また、導電材料として、銅箔を主に用いるプリント配線板にも、パーソナルコンピューターなどに用いるメモリーカードのように、ソケットに挿入して使用する用途がある。このようにカード形状の製品では、挿入端子部分にニッケルめっき皮膜と金めっき皮膜とを形成することが多い。更に、配線表面に形成するはんだ皮膜の密着性や、エッチングレジストや永久レジスト等の皮膜の密着性を改善する目的でも、配線表面の粗化が行なわれる。ここで必要とされる粗化状態も、サブミクロン〜数ミクロンレベルで十分である。従って、この目的に対しても、前述の接点や端子と同様に、化学的な粗化手法が主に採用されている。   In addition, printed wiring boards that mainly use copper foil as a conductive material also have uses that are inserted into sockets and used like memory cards used in personal computers and the like. As described above, in a card-shaped product, a nickel plating film and a gold plating film are often formed on the insertion terminal portion. Furthermore, the surface of the wiring is also roughened for the purpose of improving the adhesion of the solder film formed on the wiring surface and the adhesion of a film such as an etching resist or a permanent resist. The roughening state required here is sufficient at a submicron to several micron level. Therefore, a chemical roughening method is mainly employed for this purpose as well as the above-described contacts and terminals.

例えば、特許文献1には、銅表面に油性成分などの微細な汚れが存在してもエッチングむらを生じないマイクロエッチングを行なうことのできるマイクロエッチング剤の提供を目的として、(a)硫酸鉄(III)、(b)硫酸及び(c)非イオン性界面活性剤を含有する水溶液からなる、銅及び/又は銅合金用のマイクロエッチング剤であって、(a)の濃度が1〜40重量%であり、(a)100重量部に対して(b)が5〜50重量部の割合であり、(c)の濃度が0.01〜10重量%であり、ハロゲン含量が0.01〜20重量%であり、適宜(d)リン酸を0.01〜30重量%、或いは(e)カルボン酸を0.01〜30重量%、或いは(d)リン酸0.01〜15重量%及び(e)カルボン酸0.01〜15重量%を含有する組成が開示されている。   For example, in Patent Document 1, for the purpose of providing a microetching agent that can perform microetching that does not cause etching unevenness even if fine stains such as oily components are present on the copper surface, (a) iron sulfate ( III), (b) a microetching agent for copper and / or copper alloy comprising an aqueous solution containing sulfuric acid and (c) a nonionic surfactant, wherein the concentration of (a) is 1 to 40% by weight (A) The proportion of (b) is 5 to 50 parts by weight with respect to 100 parts by weight, the concentration of (c) is 0.01 to 10% by weight, and the halogen content is 0.01 to 20%. (D) 0.01 to 30% by weight of phosphoric acid, or (e) 0.01 to 30% by weight of carboxylic acid, or (d) 0.01 to 15% by weight of phosphoric acid and ( e) Contains 0.01 to 15% by weight of carboxylic acid Composition is disclosed.

この特許文献1の実施例では、耐変色性として、銅張積層板をエッチングした後の銅表面を目視で観察し、銅表面全体にわたって全く変色が見られないか、又は、銅表面の一部に微かに変色が見られるが実用上支障の無いレベルのものが開示されている。また、この実施例では、エッチングむらも同様にエッチング後の銅表面を目視にて観察し、銅表面全体にわたって全くエッチングむらが見られないか、又は、銅表面の一部に微かにエッチングむらが見られるが実用上支障の無いレベルにあることが開示されている。   In this example of Patent Document 1, as the color change resistance, the copper surface after etching the copper-clad laminate is visually observed, and no discoloration is observed over the entire copper surface, or a part of the copper surface. Although a slight discoloration can be seen, there are disclosed those having no practical problem. Further, in this example, the etching unevenness is also observed by visually observing the etched copper surface, and there is no etching unevenness over the entire copper surface, or there is slight etching unevenness on a part of the copper surface. Although it is seen, it is disclosed that it is at a level where there is no practical problem.

特開2001−181868号公報JP 2001-181868 A

しかしながら、上記特許文献1に開示されている銅及び銅合金用のマイクロエッチング剤は、プリント配線板を製造する際に、下地である銅及び銅合金の表面に、エッチングレジストやソルダーレジストの形成を良好に行なうため、下地の銅及び銅合金の表面の前処理として用いるものである。   However, the microetching agent for copper and copper alloy disclosed in Patent Document 1 described above forms an etching resist or solder resist on the surface of the underlying copper and copper alloy when manufacturing a printed wiring board. In order to perform well, it is used as a pretreatment of the surface of the underlying copper and copper alloy.

確かに、上記特許文献1に開示の銅及び銅合金用のマイクロエッチング剤は、銅又は銅合金の表面をエッチングして、一定レベルで金属成分を溶解させ得る。即ち、上記特許文献1に開示の銅及び銅合金用のマイクロエッチング剤は、銅及び銅合金用の表面に付着した油脂分等のコンタミネーションを、エッチングで溶解する金属成分と一緒に除去可能であると考えられ、めっきに適した下地表面が得られる可能性がある。   Certainly, the micro-etching agent for copper and copper alloy disclosed in Patent Document 1 can etch the surface of copper or copper alloy and dissolve the metal component at a certain level. That is, the micro-etching agent for copper and copper alloy disclosed in Patent Document 1 can remove contamination such as oil and fat adhering to the surface for copper and copper alloy together with metal components dissolved by etching. There is a possibility that a base surface suitable for plating can be obtained.

そこで、上記特許文献1に開示の銅及び銅合金用のマイクロエッチング剤は、めっきする下地の調整用途のものではないが、めっき前処理剤として使用してみた。その結果、この特許文献1のマイクロエッチング剤を、めっき下地である銅又は銅合金の処理に用いると、良好なめっき前処理が行なえず、形成しためっき皮膜の耐腐食性能も劣るというのが実情である。即ち、特許文献1の実施例の記載から見て、被めっき物である銅又は銅合金表面の一部に微かにエッチングむらが見られるが実用上支障の無いレベルと称している。これは、あくまでも目視によって確認されるレベルである。例えば、記特許文献1に開示の銅及び銅合金用のマイクロエッチング剤を用いてめっき前処理した銅又は銅合金の表面は、微細な凹凸形状が表面に形成されたり、余分な酸化皮膜が形成される場合もあり、また、処理後の下地表面の光沢が失われる傾向もあり、平坦で活性化した下地表面を得るのが困難である。このように状態の下地金属に対して、金属めっきを施すとめっきむらになってしまう危険性が大きくなる。   Therefore, the microetching agent for copper and copper alloy disclosed in Patent Document 1 is not intended for adjusting the base for plating, but has been used as a pretreatment agent for plating. As a result, when the microetching agent of Patent Document 1 is used for the treatment of copper or copper alloy as a plating base, it is impossible to perform a good pretreatment for plating, and the corrosion resistance of the formed plating film is inferior. It is. That is, from the description of the example of Patent Document 1, it is called a level where there is no problem in practical use although etching unevenness is slightly seen on a part of the surface of copper or copper alloy which is an object to be plated. This is a level that is confirmed visually. For example, the surface of the copper or copper alloy that has been pre-plated with the microetching agent for copper and copper alloy disclosed in Patent Document 1 has a fine uneven shape formed on the surface, or an extra oxide film is formed. In some cases, the gloss of the ground surface after the treatment tends to be lost, and it is difficult to obtain a flat and activated ground surface. When metal plating is performed on the base metal in such a state, the risk of uneven plating increases.

しかも、上記特許文献1に開示の銅及び銅合金用のマイクロエッチング剤は、銅及び銅合金の浸食速度が速く、マイクロエッチングによる被めっき物表面の浸食量が多くなる傾向が高い。特許文献1に開示されている銅及び銅合金用のマイクロエッチング剤は、本来、プリント配線板を製造する際に、エッチングレジストやソルダーレジストとの形成能を向上させるためのものである。このように場合のエッチング量は、0.1μm〜5μm厚さ分であり、エッチングした後の表面形状として、一定の凹凸を形成することを目的とするからである。このようにエッチング速度の速いマイクロエッチング液は、凹凸が少なく平坦で、且つ、活性化した状態の下地表面の形成を目的とした、めっき前処理剤として使用することは困難である。使用目的が異なるからである。   Moreover, the microetching agent for copper and copper alloy disclosed in Patent Document 1 has a high erosion rate of copper and copper alloy, and tends to increase the amount of erosion on the surface of the object to be plated by microetching. The microetching agent for copper and copper alloy disclosed in Patent Document 1 is originally intended to improve the forming ability with an etching resist or a solder resist when a printed wiring board is manufactured. This is because the etching amount in this case is 0.1 μm to 5 μm in thickness, and the purpose is to form certain irregularities as the surface shape after etching. Thus, the microetching solution having a high etching rate is difficult to be used as a plating pretreatment agent for the purpose of forming a flat surface with few irregularities and an activated state. This is because the purpose of use is different.

一方で、下地金属として銅又は銅合金を用いる種々のケースにおいて、その表面に設けるもの(層)によって、それらとの密着性を良好にするために必要とされる表面の状態は異なると言える。厳密に言えば、下地金属にめっき皮膜を形成する場合、下地金属の表面にはんだを溶融してはんだ皮膜を形成する場合、下地金属の表面にレジスト皮膜を形成する場合のそれぞれでは、要求される下地の表面状態が異なると考えられる。   On the other hand, in various cases using copper or a copper alloy as a base metal, it can be said that the surface state required for improving the adhesion with them varies depending on what (layer) is provided on the surface. Strictly speaking, when forming a plating film on the base metal, melting a solder on the surface of the base metal to form a solder film, and forming a resist film on the surface of the base metal, respectively, it is required. It is considered that the surface condition of the groundwork is different.

以上のことから、下地金属として銅又は銅合金を用い、その表面にめっき皮膜を形成した場合に、むらの無いめっき状態が形成でき、且つ、めっき皮膜の密着性及び耐腐食性能に優れためっき層の形成を可能とする下地表面を形成できる、銅又は銅合金のめっき前処理として用いる化学研磨剤が求められてきた。   From the above, when copper or copper alloy is used as the base metal and a plating film is formed on the surface, plating with no unevenness can be formed, and the plating film has excellent adhesion and corrosion resistance. There has been a need for chemical abrasives used as pre-plating treatments for copper or copper alloys that can form an underlying surface that allows layer formation.

そこで、本件発明者等は鋭意研究の結果、以下の成分構成を備える銅又は銅合金表面のめっき前処理に用いる化学研磨剤、及び、その化学研磨剤を用いてめっき前処理を施した銅又は銅合金を用いる、銅又は銅合金表面への金属めっき方法に想到した。   Therefore, as a result of diligent research, the inventors of the present invention, as a result of chemical research, used a pre-plating treatment for copper or a copper alloy surface having the following component structure, and copper or pre-plated using the chemical polishing agent. The inventors have come up with a method for metal plating on the surface of copper or copper alloy using a copper alloy.

本件発明に係る化学研磨剤: 本件発明に係る化学研磨剤は、銅又は銅合金表面のめっき前処理に用いる化学研磨剤であって、硫酸第二鉄、硫酸、非イオン性界面活性剤、ハロゲンイオンの各成分を含み、且つ、該硫酸の含有量と該硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1〜4であることを特徴としている。 Chemical abrasive according to the present invention: The chemical abrasive according to the present invention is a chemical abrasive used for pre-plating of copper or a copper alloy surface, and is ferric sulfate, sulfuric acid, nonionic surfactant, halogen Each component of ions is included, and the ratio of the content of sulfuric acid to the content of ferric sulfate [the content of sulfuric acid] / [the content of ferric sulfate] is 1 to 4. It is characterized by that.

前記化学研磨剤は、前記硫酸第二鉄の含有量が5wt%〜10wt%であることも好ましい。   The chemical abrasive preferably has a ferric sulfate content of 5 wt% to 10 wt%.

前記化学研磨剤は、前記硫酸の含有量が10wt%〜20wt%であることも好ましい。   The chemical abrasive preferably has a sulfuric acid content of 10 wt% to 20 wt%.

前記化学研磨剤は、前記非イオン性界面活性剤の含有量が0.1wt%〜5wt%であることも好ましい。   The chemical abrasive preferably has a nonionic surfactant content of 0.1 wt% to 5 wt%.

前記化学研磨剤は、前記ハロゲンイオンの含有量が0.1wt%〜10wt%であることも好ましい。   The chemical abrasive preferably has a halogen ion content of 0.1 wt% to 10 wt%.

本件発明に係る銅又は銅合金表面への金属めっき方法: 本件発明に係る銅又は銅合金への金属めっき方法は、被めっき物として前記化学研磨剤を用いてめっき前処理を施した銅又は銅合金を用いる銅又は銅合金表面への金属めっき方法であって、以下の工程A〜工程Cを含むことを特徴としている。 The metal plating method to the copper or copper alloy surface which concerns on this invention: The metal plating method to the copper or copper alloy which concerns on this invention is the copper or copper which performed the plating pretreatment using the said chemical abrasive as a to-be-plated object A metal plating method on the surface of copper or copper alloy using an alloy, comprising the following steps A to C.

工程A: 銅又は銅合金の表面と脱脂剤とを接触させて脱脂処理する脱脂工程。
工程B: 工程Aで得られた銅又は銅合金を前記化学研磨剤と接触させて表面を処理するめっき前処理工程。
工程C: 工程Bで得られた銅又は銅合金の表面に金属めっきを施す金属めっき工程。
Process A: A degreasing process in which the surface of copper or copper alloy and a degreasing agent are brought into contact with each other to perform a degreasing treatment.
Step B: A plating pretreatment step of treating the surface by bringing the copper or copper alloy obtained in Step A into contact with the chemical abrasive.
Process C: A metal plating process for performing metal plating on the surface of the copper or copper alloy obtained in Process B.

本件発明に係る化学研磨剤は、硫酸第二鉄、硫酸、非イオン性界面活性剤、ハロゲンイオンの各成分を含み、且つ、硫酸の含有量と硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1〜4である化学研磨剤であり、有害物や特殊な化学物質は含んでいない。従って、廃水処理の負荷を軽減できる。そして、金属めっきを施す対象物である銅又は銅合金の被めっき物に、この化学研磨剤を用いてめっき前処理を施せば、むらの無い良好な光沢表面が得られる。従って、この表面にめっき処理を施せば、そのめっき層は、膜厚の均一性に優れ且つ緻密な金属めっきを施すことが出来る。このように金属めっき皮膜の膜厚が均一で且つ緻密であれば、めっき外観が良好で、欠陥の無い保護皮膜として機能するためめっき皮膜の耐腐食性能が向上する。この結果、めっき製品の耐久性が向上する。また、めっき厚さの管理幅の下限を低く設定することが可能になり、資源の節約にもなる。   The chemical abrasive according to the present invention includes components of ferric sulfate, sulfuric acid, nonionic surfactant, and halogen ion, and a ratio of sulfuric acid content to ferric sulfate content [sulfuric acid. Content] / [content of ferric sulfate] is a chemical abrasive having a value of 1 to 4, and does not contain harmful substances or special chemical substances. Therefore, the wastewater treatment load can be reduced. And if the pre-plating process is performed on the copper or copper alloy object to be plated by using this chemical abrasive, a good gloss surface without unevenness can be obtained. Therefore, if this surface is plated, the plating layer is excellent in film thickness uniformity and can be subjected to dense metal plating. Thus, if the thickness of the metal plating film is uniform and dense, the plating appearance is good and functions as a protective film having no defects, so that the corrosion resistance of the plating film is improved. As a result, the durability of the plated product is improved. In addition, it becomes possible to set the lower limit of the management width of the plating thickness low, which also saves resources.

本件発明に係る化学研磨剤の形態: 本件発明に係る化学研磨剤は、銅又は銅合金表面のめっき前処理に用いる化学研磨剤であり、硫酸第二鉄、硫酸、非イオン性界面活性剤、ハロゲンイオンの各成分を含み、該硫酸の含有量と該硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1〜4である。該化学研磨剤は、有害物や特殊な化学物質を使用していないため、市場で容易に入手できる薬品類を用いて、各成分の含有量を調整することが出来る。そして、金属めっきを施す被めっき物の銅又は銅合金を、前記成分を含む化学研磨剤と接触させてめっき前処理すると、その表面には、金属めっき皮膜の密着性を良好にするために好適な下地表面が得られる。この処理後の下地表面は、一般的なマイクロエッチングを施した場合の粗化形状とは異なり、表面の光沢が高く平坦な表面状態を示し、且つ、めっき皮膜の密着性を阻害するレベルの余分な酸化皮膜が存在しないものである。 Form of chemical abrasive according to the present invention: The chemical abrasive according to the present invention is a chemical abrasive used for plating pretreatment on the surface of copper or copper alloy, ferric sulfate, sulfuric acid, nonionic surfactant, Each component of halogen ions is included, and the ratio of the content of sulfuric acid to the content of ferric sulfate [the content of sulfuric acid] / [the content of ferric sulfate] is 1 to 4. Since the chemical abrasive does not use harmful substances or special chemical substances, the content of each component can be adjusted using chemicals that are readily available in the market. And, if the copper or copper alloy of the object to be plated is brought into contact with a chemical abrasive containing the above components and pre-plated, it is suitable for improving the adhesion of the metal plating film on the surface. A smooth base surface. The roughened surface after this treatment is different from the roughened shape when general micro-etching is performed, and the surface is glossy and flat, and has an extra level that hinders the adhesion of the plating film. No oxide film exists.

まず、前記化学研磨剤においては、該硫酸の含有量と該硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値を1〜4としている。本件発明では、第二鉄イオンと遊離硫酸イオンとを用いて、銅又は銅合金の表面を最適な状態に前処理している。従って、[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1を下回ると、第二鉄イオンの酸化力に対して遊離硫酸イオン量が不足する。遊離硫酸イオン量が不足して酸化銅の溶解が遅くなると、金属銅と酸化銅とが共存する。金属銅と酸化銅とが共存すると、酸化銅の形態が硫酸に易溶である酸化第二銅と、硫酸に難溶である酸化第一銅との混合物になる傾向が現れる。すると、処理対象である銅又は銅合金の表面に色むらが発生してしまう。即ち、[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1以上であることは、処理対象である銅又は銅合金表面における色むらの発生防止に有効である。   First, in the chemical abrasive, the ratio of the content of sulfuric acid to the content of ferric sulfate [the content of sulfuric acid] / [the content of ferric sulfate] is set to 1 to 4. . In the present invention, the surface of copper or copper alloy is pretreated to an optimum state using ferric ions and free sulfate ions. Therefore, if the value of [sulfuric acid content] / [ferric sulfate content] is less than 1, the amount of free sulfate ions is insufficient with respect to the oxidizing power of ferric ions. When the amount of free sulfate ions is insufficient and the dissolution of copper oxide is delayed, metallic copper and copper oxide coexist. When metallic copper and copper oxide coexist, the copper oxide tends to be a mixture of cupric oxide, which is easily soluble in sulfuric acid, and cuprous oxide, which is hardly soluble in sulfuric acid. As a result, uneven color occurs on the surface of the copper or copper alloy to be treated. That is, a value of [sulfuric acid content] / [ferric sulfate content] of 1 or more is effective in preventing color unevenness on the copper or copper alloy surface to be treated.

一方、[硫酸の含有量]/[硫酸第二鉄の含有量]の値が4を超えても、遊離硫酸イオンが酸化銅を溶解する能力が向上することは無く、資源の無駄使いである。また、硫酸濃度が高いため、化学研磨剤の比重と粘度が上昇して、化学研磨液をポンプを用いて循環するために要する電力負荷が大きくなる。そして、工程の設計によっては次工程に持ち込む硫酸イオン量が増え、廃水処理の負荷が増大するため好ましくない。ここで、後述する硫酸第二鉄含有量のより好ましい量、硫酸含有量のより好ましい量を考え合わせると、[硫酸の含有量]/[硫酸第二鉄の含有量]の値のより好ましい範囲は、1.37〜2.83である。   On the other hand, even if the value of [Sulfuric acid content] / [Ferric sulfate content] exceeds 4, the ability of free sulfate ions to dissolve copper oxide is not improved, which is a waste of resources. . In addition, since the sulfuric acid concentration is high, the specific gravity and viscosity of the chemical polishing agent increase, and the power load required to circulate the chemical polishing liquid using a pump increases. Depending on the design of the process, the amount of sulfate ions brought into the next process increases, which increases the load of wastewater treatment, which is not preferable. Here, considering the more preferable amount of ferric sulfate content and the more preferable amount of sulfuric acid content described later, the more preferable range of the value of [sulfuric acid content] / [ferric sulfate content]. Is 1.37-2.83.

そして、前記化学研磨剤においては、前記硫酸第二鉄の含有量が5wt%〜10wt%である。しかし、実際の操業では、硫酸第二鉄源として硫酸第二鉄の7水塩や9水塩等を用いる。従って、ここで言っている含有量は、それらが含む硫酸第二鉄成分のみの含有量として表示している。この、化学研磨剤が含む硫酸第二鉄は、第二鉄イオンとして銅又は銅合金の表面を酸化して金属銅を酸化銅にし、遊離硫酸イオンによる溶解を容易にする。しかし、該酸化第二鉄の含有量が5wt%を下回ると、銅又は銅合金の表面を酸化する能力が弱く、銅又は銅合金表面に酸化むらが発生したり、目的とする表面状態が得られにくくなるため好ましくない。一方、該酸化第二鉄の含有量が10wt%を超えると、銅又は銅合金表面が、マイクロエッチングを施した場合と類似した形状を示すようになる。そして、その銅又は銅合金表面上に金属めっきを施すと、めっき皮膜表面の光沢が失われたり、外観上の光沢及び色調にむらが発生しやすくなるため好ましくない。上記から、銅又は銅合金表面に適正な光沢を維持したまま最適な表面状態を形成するには、該硫酸第二鉄の含有量を6wt%〜8wt%とすることがより好ましい。   And in the said chemical polishing agent, content of the said ferric sulfate is 5 wt%-10 wt%. However, in actual operation, a hepatic sulfate heptahydrate or a nonahydrate is used as a ferric sulfate source. Therefore, the content said here is displayed as content of only the ferric sulfate component which they contain. The ferric sulfate contained in the chemical polishing agent oxidizes the surface of copper or a copper alloy as ferric ions to convert metallic copper into copper oxide, and facilitates dissolution by free sulfate ions. However, when the content of ferric oxide is less than 5 wt%, the ability to oxidize the surface of copper or copper alloy is weak, uneven oxidation occurs on the surface of copper or copper alloy, or the desired surface state is obtained. This is not preferable because it is difficult to be formed. On the other hand, when the content of the ferric oxide exceeds 10 wt%, the surface of copper or a copper alloy shows a shape similar to that obtained when microetching is performed. When metal plating is performed on the copper or copper alloy surface, the gloss on the surface of the plating film is lost or unevenness in the gloss and color tone on the appearance tends to occur. From the above, in order to form an optimal surface state while maintaining an appropriate gloss on the copper or copper alloy surface, it is more preferable that the content of the ferric sulfate is 6 wt% to 8 wt%.

また、前記化学研磨剤においては、前記硫酸の含有量が10wt%〜20wt%であることが好ましい。遊離硫酸イオンは、前記第二鉄イオンが銅又は銅合金表面の銅を酸化することで形成された酸化銅を溶解する。該化学研磨剤は、硫酸の含有量が10wt%を下回っても、建浴した直後であれば遊離硫酸イオンが酸化銅を溶解する能力は備えている。しかし、銅又は銅合金を連続処理する操業では、該化学研磨剤が含む遊離硫酸イオンの含有量が、酸化銅を溶解する能力が不足する状態に至るまでの時間が短い。即ち、安定した操業の継続が困難になるため好ましくない。一方、該硫酸の含有量が20wt%を超えても、前述のように、遊離硫酸イオンが酸化銅を溶解する能力が向上することは無く、硫酸濃度が高いことによる弊害が見られるようになるため好ましくない。上記バランスを考えると、より好ましい該硫酸の含有量は11wt%〜17wt%である。   In the chemical abrasive, the sulfuric acid content is preferably 10 wt% to 20 wt%. The free sulfate ions dissolve the copper oxide formed by the ferric ions oxidizing copper on the copper or copper alloy surface. Even if the content of sulfuric acid is less than 10 wt%, the chemical abrasive has the ability of free sulfate ions to dissolve copper oxide if it is immediately after the bathing. However, in the operation of continuously treating copper or a copper alloy, the time until the content of free sulfate ions contained in the chemical abrasive becomes insufficient in the ability to dissolve copper oxide is short. That is, it is not preferable because it is difficult to continue stable operation. On the other hand, even if the content of the sulfuric acid exceeds 20 wt%, as described above, the ability of free sulfate ions to dissolve copper oxide is not improved, and a negative effect due to the high sulfuric acid concentration is observed. Therefore, it is not preferable. Considering the above balance, the more preferable content of the sulfuric acid is 11 wt% to 17 wt%.

更に、前記化学研磨剤においては、前記非イオン性界面活性剤の含有量が0.1wt%〜5wt%である。該非イオン性界面活性剤は、銅又は銅合金の表面に付着した油脂成分を脱離させる機能を有する。従って、該非イオン性界面活性剤の含有量が0.1wt%を下回ると、油脂成分を脱離させる能力が不足するため好ましくない。一方、該非イオン性界面活性剤の含有量が5wt%を超えると、該非イオン性界面活性剤が銅又は銅合金の表面に吸着する傾向が現れ、その結果、銅又は銅合金表面に色むらが発生するため好ましくない。従って、銅又は銅合金表面に付着した油脂成分を脱離し、銅又は銅合金表面に吸着することによる悪影響を排除する観点からは、該非イオン性界面活性剤の含有量は0.5wt%〜2.0wt%とすることがより好ましい。   Furthermore, in the chemical abrasive, the content of the nonionic surfactant is 0.1 wt% to 5 wt%. The nonionic surfactant has a function of desorbing oil and fat components adhering to the surface of copper or copper alloy. Therefore, if the content of the nonionic surfactant is less than 0.1 wt%, it is not preferable because the ability to desorb oil and fat components is insufficient. On the other hand, when the content of the nonionic surfactant exceeds 5 wt%, the nonionic surfactant tends to be adsorbed on the surface of copper or copper alloy, and as a result, uneven color on the copper or copper alloy surface appears. Since it occurs, it is not preferable. Therefore, from the viewpoint of eliminating the fat and oil component adhering to the copper or copper alloy surface and eliminating the adverse effects caused by adsorbing to the copper or copper alloy surface, the content of the nonionic surfactant is 0.5 wt% to 2%. More preferably, the content is 0.0 wt%.

前記非イオン性界面活性剤は、水溶性であれば特に化学構成などを限定する必要は無い。例えば、エステル型非イオン性界面活性剤とアミド型非イオン性界面活性剤やそのアルキレンオキサイド付加物、脂肪酸のアルキレンオキサイド付加物、アルコールのアルキレンオキサイド付加物、アミン類のアルキレンオキサイド付加物、ポリアルキレンオキサイド等を用いることが出来る。しかし、非イオン性界面活性剤の効果をより安定的に発揮するためには、エーテル系の非イオン性界面活性剤を用いることがより好ましく、中でもポリオキシエチレンラウリルエーテルやポリオキシエチレンアルキルアミノエーテルを用いることが更に好ましい。   If the nonionic surfactant is water-soluble, it is not necessary to limit the chemical structure. For example, ester type nonionic surfactant and amide type nonionic surfactant and its alkylene oxide adduct, alkylene oxide adduct of fatty acid, alkylene oxide adduct of alcohol, alkylene oxide adduct of amines, polyalkylene Oxide etc. can be used. However, in order to exhibit the effect of the nonionic surfactant more stably, it is more preferable to use an ether type nonionic surfactant, and among them, polyoxyethylene lauryl ether and polyoxyethylene alkylamino ether are preferred. More preferably, is used.

そして、前記化学研磨剤においては、前記ハロゲンイオンの含有量が0.1wt%〜10wt%である。該ハロゲンイオンは、銅又は銅合金の表面に吸着する性質を有している。銅又は銅合金を該化学研磨剤に接触させると、銅又は銅合金の表面に該ハロゲンイオンが吸着して表面が均質化し、第二鉄イオンによる銅の酸化に際して、酸化むらの発生を抑制でき、下地表面の酸化銅の膜厚を均一化できる。しかし、該ハロゲンの含有量が0.1wt%を下回ると、銅又は銅合金の表面への該ハロゲンイオンの吸着が均一に行なえず、銅又は銅合金表面の均質化が果たせない。その結果、銅又は銅合金の表面に酸化むらが発生する傾向が見られるようになるため好ましくない。一方、該ハロゲンの含有量が10wt%を超えても、銅又は銅合金表面の均質化効果は飽和に達している。従って、資源の無駄使いであると同時に、ハロゲンが周辺の設備を腐食する傾向が現れるため好ましくない。   And in the said chemical polishing agent, content of the said halogen ion is 0.1 wt%-10 wt%. The halogen ion has a property of adsorbing on the surface of copper or a copper alloy. When copper or a copper alloy is brought into contact with the chemical abrasive, the halogen ions are adsorbed on the surface of the copper or copper alloy and the surface is homogenized, and the occurrence of uneven oxidation can be suppressed when copper is oxidized by ferric ions. The film thickness of the copper oxide on the underlying surface can be made uniform. However, if the halogen content is less than 0.1 wt%, the halogen ions cannot be uniformly adsorbed on the surface of the copper or copper alloy, and the surface of the copper or copper alloy cannot be homogenized. As a result, there is a tendency that uneven oxidation occurs on the surface of copper or copper alloy, which is not preferable. On the other hand, even when the halogen content exceeds 10 wt%, the homogenization effect on the surface of copper or copper alloy reaches saturation. Therefore, it is not preferable because the halogen tends to corrode surrounding facilities as well as wasteful use of resources.

そして、前記ハロゲンとしては、塩素又は臭素を用いることが好ましい。銅又は銅合金の表面に安定した吸着を示すからである。該ハロゲンとして塩素を選択した場合には、化学研磨剤が酸性領域の水溶液であることから、塩酸を用いて調製することが出来る。また、硫酸第二鉄の一部を必要量だけ塩化第二鉄に置き換えて調製することも出来る。   And as said halogen, it is preferable to use chlorine or a bromine. This is because stable adsorption is exhibited on the surface of copper or copper alloy. When chlorine is selected as the halogen, it can be prepared using hydrochloric acid because the chemical abrasive is an aqueous solution in the acidic region. Moreover, it can also prepare by substituting a part of ferric sulfate for a required quantity with ferric chloride.

本件発明に係る銅又は銅合金表面への金属めっき方法の形態: 本件発明に係る銅又は銅合金表面への金属めっき方法は、被めっき物として前記化学研磨剤を用いてめっき前処理を施した銅又は銅合金を用いる金属めっき方法であって、以下の工程A〜工程Cを含む。以下、工程毎に説明する。 Form of the metal plating method on the copper or copper alloy surface according to the present invention: The metal plating method on the copper or copper alloy surface according to the present invention was subjected to a plating pretreatment using the chemical abrasive as an object to be plated. A metal plating method using copper or a copper alloy, which includes the following steps A to C. Hereinafter, it demonstrates for every process.

工程Aは、銅又は銅合金の表面を脱脂剤と接触させて脱脂処理する脱脂工程である。この工程では、被めっき物である該銅又は銅合金を調製した脱脂剤に浸漬する方法、脱脂剤を被めっき物である該銅又は銅合金に吹き付ける方法などから最適な方法を選択して実施できる。また、用いる脱脂剤に特段の規定は無い。例えば、電解脱脂を施すのであれば、エンソン(株)製クリーナー 160、クリーナー 160SW等を用い、液温を60℃として2.5A/dmで15秒間電解すればよい。また、市販の脱脂剤を入手し、外観への影響が無いことを確認して用いることも出来る。脱脂処理が終了した被めっき物は、水洗しておく。 Process A is a degreasing process in which the surface of copper or copper alloy is contacted with a degreasing agent to perform a degreasing process. In this process, the optimum method is selected from the method of immersing the copper or copper alloy that is the object to be plated in the prepared degreasing agent, the method of spraying the degreasing agent to the copper or copper alloy that is the object to be plated, etc. it can. Moreover, there is no special provision in the degreasing agent to be used. For example, if electrolytic degreasing is to be performed, electrolysis may be performed at 2.5 A / dm 2 for 15 seconds using a cleaner 160, cleaner 160SW manufactured by Enson Co., Ltd., and the liquid temperature at 60 ° C. Moreover, a commercially available degreasing agent can be obtained and used after confirming that there is no influence on the appearance. The object to be plated after the degreasing treatment is washed with water.

工程Bは、前記工程Aで得られた前記銅又は銅合金を前記化学研磨剤と接触させて処理するめっき前処理工程である。この工程でも脱脂工程と同様に、被めっき物である銅又は銅合金を、該化学研磨剤に浸漬する方法、該化学研磨剤を、銅又は銅合金に吹き付ける方法などから最適な方法を選択して実施できる。浸漬法を採用するのであれば、該化学研磨剤を溜めた処理槽に、銅又は銅合金をラック架けなどして投入し、所定時間浸漬処理する。このとき、該化学研磨剤はサービスタンクと処理槽との間をポンプを用いて循環し、異物を除去すると同時に液を攪拌すると、銅又は銅合金表面には光沢及び色調むらが発生しにくい。所定時間の処理が終了すると、銅又は銅合金を処理槽から引き上げて水洗し、次工程に搬送するのが一般的であり、好ましい。   Process B is a plating pretreatment process in which the copper or copper alloy obtained in Process A is contacted with the chemical abrasive and processed. In this process, as in the case of the degreasing process, an optimum method is selected from a method of immersing copper or a copper alloy as an object to be plated in the chemical abrasive, a method of spraying the chemical abrasive on the copper or copper alloy, and the like. Can be implemented. If the dipping method is adopted, copper or a copper alloy is put in a rack or the like in a treatment tank in which the chemical abrasive is stored, and dipped for a predetermined time. At this time, when the chemical abrasive is circulated between the service tank and the treatment tank using a pump to remove foreign substances and the liquid is stirred at the same time, the surface of the copper or copper alloy is less likely to have gloss and uneven color tone. When the treatment for a predetermined time is completed, it is common and preferable that copper or a copper alloy is lifted from the treatment tank, washed with water, and conveyed to the next step.

工程Cは、工程Bで得られた前記銅又は銅合金の表面に金属めっきを施す金属めっき工程である。ここで施す金属めっき手法には特に限定は無く、無電解めっき法及び電気めっき法のいずれか一方又は両方を組み合わせて用いることが出来る。このとき、銅又は銅合金は、水洗を施してあるとはいえ、界面活性剤などが吸着して残留している場合があり、めっき工程で悪影響を与える可能性がある。このように場合には、めっき直前に被めっき物に酸洗いを施すことが推奨される。   Step C is a metal plating step in which metal plating is performed on the surface of the copper or copper alloy obtained in step B. The metal plating method applied here is not particularly limited, and any one or both of an electroless plating method and an electroplating method can be used. At this time, although the copper or copper alloy has been washed with water, the surfactant or the like may be adsorbed and remain, which may adversely affect the plating process. In such a case, it is recommended that the object to be plated be pickled immediately before plating.

工程Cで施す金属めっきがニッケルめっきであり、無電解ニッケルめっきを施すのであれば、パラジウムなどの触媒を付与後、無電解ニッケルめっき液としてメルテックス(株)製メルプレートNI−6509MF等を用い、液温を80℃〜92℃として所定時間浸漬すれば、無電解ニッケルめっき皮膜が得られる。そして、電気ニッケルめっきを施すのであれば、ワット浴やスルファミン酸浴を自身で調製し、一般的なめっき条件を適用することで、電気ニッケルめっき皮膜が得られる。このようにして得られたニッケルめっき皮膜上に無電解金めっきを施すのであれば、メルテックス(株)製メルプレートAU−6630等を用い、液温を55℃〜65℃として所定時間浸漬すれば、無電解金めっき皮膜が得られる。電気金めっきを施す場合には、ローム アンド ハース電子材料(株)製ロノベルCS−100等を用い、液温を40℃〜60℃とし、陰極電流密度5A/m〜40A/mで所定時間電解すれば、電気金めっき皮膜が得られる。 If the metal plating applied in step C is nickel plating and electroless nickel plating is applied, a catalyst such as palladium is applied, and then Melplate NI-6509MF manufactured by Meltex Co., Ltd. is used as the electroless nickel plating solution. If the liquid temperature is set to 80 ° C. to 92 ° C. and immersed for a predetermined time, an electroless nickel plating film can be obtained. If electro nickel plating is performed, an electro nickel plating film can be obtained by preparing a Watt bath or a sulfamic acid bath by itself and applying general plating conditions. If electroless gold plating is performed on the nickel plating film thus obtained, use Meltex AU-6630 manufactured by Meltex Co., Ltd. Thus, an electroless gold plating film can be obtained. When electrogold plating is performed, the liquid temperature is set to 40 ° C. to 60 ° C. and the cathode current density is 5 A / m 2 to 40 A / m 2 using Rohmell CS-100 manufactured by Rohm and Haas Electronic Materials Co., Ltd. If electrolysis is performed for a time, an electrogold plating film can be obtained.

実施例1では、硫酸第二鉄含有量を6.34%、硫酸含有量を13.84%、非イオン性界面活性剤含有量を0.85%、ハロゲン含有量を0.21%に調整した化学研磨剤を用い、めっき前処理性を評価した。この組成における〔硫酸の含有量]/[硫酸第二鉄の含有量]の値は2.18であった。この組成を、比較例1で用いたマイクロエッチング剤の組成と併せて後の表1に纏めて示す。   In Example 1, the ferric sulfate content was adjusted to 6.34%, the sulfuric acid content to 13.84%, the nonionic surfactant content to 0.85%, and the halogen content to 0.21%. The plating pretreatment was evaluated using the chemical abrasives. The value of [sulfuric acid content] / [ferric sulfate content] in this composition was 2.18. This composition is shown together with the composition of the microetching agent used in Comparative Example 1 in Table 1 below.

前記化学研磨剤を用い、純銅、真鍮とリン青銅とをめっき前処理の対象素材とし、液温45℃で15秒間前処理した。そして、めっき前処理状態の良否は、めっき前処理後の対象素材表面の光沢度で評価した。光沢度は、光沢度計に(株)村上色彩技術研究所製デジタル光沢計GH−26Dを用い、入射角を20度に設定し、測定光の入射方向が、めっき前処理を施した対象素材の圧延方向に一致するようにして測定した。その結果、純銅の光沢度は514.7、真鍮の光沢度は867.0、リン青銅の光沢度は48.0であり、良好な光沢を示した。評価結果を、比較例1の評価結果と併せて後の表2に示す。   Using the chemical abrasive, pure copper, brass, and phosphor bronze were used as pre-plating target materials and pre-treated at a liquid temperature of 45 ° C. for 15 seconds. And the quality of the pre-plating treatment state was evaluated by the glossiness of the target material surface after the pre-plating treatment. Glossiness is a target material that uses a digital gloss meter GH-26D manufactured by Murakami Color Research Laboratory Co., Ltd. as the gloss meter, the incident angle is set to 20 degrees, and the incident direction of the measuring light is pre-plated. The measurement was performed so as to coincide with the rolling direction. As a result, the glossiness of pure copper was 514.7, the glossiness of brass was 867.0, and the glossiness of phosphor bronze was 48.0, indicating good gloss. The evaluation results are shown in Table 2 later together with the evaluation results of Comparative Example 1.

実施例2では、被めっき物としてリン青銅を用い、図1に示すフローによりめっき材を作成し、めっき密着性の評価を行なった。図1に示すめっき前処理工程では、前記化学研磨剤を用いて被めっき物にめっき前処理を施した。その後、ニッケルめっき工程では、スルファミン酸ニッケル4水和物を450g/L、塩化ニッケル6水和物を3g/L、ホウ酸を30g/L、pHを4.8に調製したスルファミン酸浴を用い、液温を40℃とし、陰極電流密度10A/mで2分間電解して、2μm厚さの電気ニッケルめっき皮膜を形成した。続いて金めっき工程では、ローム アンド ハース電子材料(株)製ロノベルCS−100を用い、液温を50℃とし、陰極電流密度5A/mで3秒間電解して、0.05μm厚さの電気金めっき皮膜を形成した。ここで言っているめっき厚さとは、被めっき物の表面が凹凸の無い理想平面であると仮定したときのめっき厚さであり、具体的には、めっき面の2次元面積と、該面積範囲におけるめっき前後の重量変化から換算した値である。更にこのめっき材には、(株)テトラ製テトラ C−2000の2vol%溶液を用いて、封孔処理を施した。 In Example 2, phosphor bronze was used as an object to be plated, a plating material was prepared by the flow shown in FIG. 1, and the plating adhesion was evaluated. In the pre-plating treatment step shown in FIG. 1, the pre-plating treatment was performed on the object to be plated using the chemical abrasive. Thereafter, in the nickel plating step, a sulfamic acid bath prepared by adjusting nickel sulfamate tetrahydrate to 450 g / L, nickel chloride hexahydrate to 3 g / L, boric acid to 30 g / L, and pH to 4.8 is used. Then, the liquid temperature was set to 40 ° C., and electrolysis was performed at a cathode current density of 10 A / m 2 for 2 minutes to form an electric nickel plating film having a thickness of 2 μm. Subsequently, in the gold plating step, Rohm and Haas Electronic Material Co., Ltd. Ronovel CS-100 was used, the liquid temperature was set to 50 ° C., and electrolysis was performed at a cathode current density of 5 A / m 2 for 3 seconds to obtain a thickness of 0.05 μm. An electrogold plating film was formed. The plating thickness said here is the plating thickness when it is assumed that the surface of the object to be plated is an ideal flat surface without irregularities, and specifically, the two-dimensional area of the plating surface and the area range. It is the value converted from the weight change before and after plating. Further, this plating material was subjected to sealing treatment using a 2 vol% solution of Tetra Co., Ltd. Tetra C-2000.

このようにして得られためっき材のめっき密着性は、めっき材に対して塩水噴霧を実施した後の外観で判定した。塩水噴霧では、塩化ナトリウム濃度を50g/Lに調整した35℃の水溶液を、96時間連続噴霧し、その後水洗して風乾した。塩水噴霧後のめっき材の外観を図2に示す。図2では、めっき材の表面に水滴むらは見えるが、めっき皮膜の浮き上がり等は観察されず、被めっき物であるリン青銅が塩水に浸食された様子も無い。この結果から、このめっき材には密着性が良好なめっき皮膜が形成されていることがわかる。   The plating adhesion of the plating material thus obtained was determined by the appearance after the salt spray was applied to the plating material. In salt spray, an aqueous solution at 35 ° C. with a sodium chloride concentration adjusted to 50 g / L was continuously sprayed for 96 hours, then washed with water and air-dried. The appearance of the plated material after spraying with salt water is shown in FIG. In FIG. 2, water droplets are visible on the surface of the plating material, but no lifting of the plating film or the like is observed, and there is no appearance that the phosphor bronze as the object to be plated is eroded by the salt water. From this result, it is understood that a plating film having good adhesion is formed on this plating material.

比較例Comparative example

〔比較例1〕
比較例1では、実施例で用いた化学研磨剤の代わりに、特許文献1の実施例1に開示のマイクロエッチング剤を用い、めっき前処理性を評価した。このマイクロエッチング剤の組成を、実施例1で用いた化学研磨剤の組成と併せて、以下の表1に示す。この組成における〔硫酸の含有量]/[硫酸第二鉄の含有量]の値は0.25であった。
[Comparative Example 1]
In Comparative Example 1, the pretreatment property for plating was evaluated using the microetching agent disclosed in Example 1 of Patent Document 1 instead of the chemical abrasive used in the Examples. The composition of this microetching agent is shown in Table 1 below together with the composition of the chemical abrasive used in Example 1. The value of [sulfuric acid content] / [ferric sulfate content] in this composition was 0.25.

そして、前記マイクロエッチング剤を用いた以外は実施例1と同様の条件でめっき前処理を実施した。その結果、純銅の光沢度は57.3、真鍮の光沢度は192.0、リン青銅の光沢度は16.5であった。即ち、マイクロエッチングされることにより、明らかに対象素材の表面の光沢が失われている。評価結果を、実施例1の評価結果と併せて以下の表2に示す。   And the plating pre-processing was implemented on the conditions similar to Example 1 except having used the said microetching agent. As a result, the glossiness of pure copper was 57.3, the glossiness of brass was 192.0, and the glossiness of phosphor bronze was 16.5. That is, the gloss of the surface of the target material is clearly lost by microetching. The evaluation results are shown in Table 2 below together with the evaluation results of Example 1.

〔比較例2〕
比較例2では、めっき前処理に特許文献1の実施例1に開示の前記マイクロエッチング剤を用いた以外は、実施例2と同様の条件でめっき材を作成し、実施例2と同様にしてめっき密着性の評価を行なった。塩水噴霧後のめっき材の外観を図3に示す。めっき材の表面ではめっき皮膜が浮き上がっており、被めっき物であるリン青銅が明らかに浸食されている様子が観察される。従って、実施例2で得られためっき材と比較して、比較例2で得られためっき材のめっき皮膜の密着性は明らかに劣っている。
[Comparative Example 2]
In Comparative Example 2, a plating material was prepared under the same conditions as in Example 2 except that the microetching agent disclosed in Example 1 of Patent Document 1 was used for the plating pretreatment. The plating adhesion was evaluated. The appearance of the plating material after spraying with salt water is shown in FIG. The plating film is floating on the surface of the plating material, and it is observed that the phosphor bronze, which is the object to be plated, is clearly eroded. Therefore, compared with the plating material obtained in Example 2, the adhesion of the plating film of the plating material obtained in Comparative Example 2 is clearly inferior.

〔実施例と比較例との対比〕
実施例2で得られためっき皮膜と比較例2で得られためっき皮膜とを比較すると、実施例2で得られためっき皮膜の外観は良好であり、被めっき物への密着性も良好で安定していることが明らかである。この実施例2と比較例2との違いは、めっき前の被めっき物の表面状態に起因していると考察される。実施例1と比較例1とを対比すると、実施例1で光沢度48を示しているリン青銅は、比較例1では光沢度16.5を示している。即ち、比較例1では、リン青銅の表面がマイクロエッチングされ、大きな凹凸形状を備えていると考えられる。即ち、3次元的な表面積が大きくなり、凹凸形状の影響も受け、電気ニッケルめっき及び電気金めっきを施しても、めっき皮膜による被覆が不十分な部位が存在していたと推測できる。従って、銅又は銅合金への金属めっきの前処理では、本件発明に係る化学研磨剤を用い、被めっき物表面が平坦で光沢が良好な状態で金属めっきを施すと、密着性が良好なめっき皮膜が得られる。
[Contrast between Example and Comparative Example]
When the plating film obtained in Example 2 is compared with the plating film obtained in Comparative Example 2, the appearance of the plating film obtained in Example 2 is good and the adhesion to the object to be plated is also good. It is clear that it is stable. It is considered that the difference between Example 2 and Comparative Example 2 is caused by the surface state of the object to be plated before plating. When Example 1 is compared with Comparative Example 1, phosphor bronze having a gloss of 48 in Example 1 has a gloss of 16.5 in Comparative Example 1. That is, in Comparative Example 1, it is considered that the surface of phosphor bronze is micro-etched and has a large uneven shape. In other words, the three-dimensional surface area is increased, and it is also affected by the uneven shape, so that it can be inferred that there was an area where the coating with the plating film was insufficient even when electro nickel plating and electro gold plating were performed. Therefore, in the pretreatment of metal plating on copper or copper alloy, if the chemical polishing agent according to the present invention is used and the metal plating is performed in a state where the surface of the object to be plated is flat and gloss is good, plating with good adhesion is performed. A film is obtained.

本件発明に係る化学研磨剤は、硫酸第二鉄、硫酸、非イオン性界面活性剤、ハロゲンイオンの各成分を含み、且つ、硫酸の含有量と硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1〜4である化学研磨剤であり、有害物や特殊な化学物質は含んでいない。従って、廃水処理の負荷を軽減できる。そして、金属めっきを施す対象物である銅又は銅合金の被めっき物に、この化学研磨剤を用いてめっき前処理を施せば、むらの無い良好な光沢表面が得られる。従って、この表面にめっき処理を施せば、そのめっき層は、膜厚の均一性に優れ且つ緻密な金属めっきを施すことが出来る。このように金属めっき皮膜の膜厚が均一で且つ緻密であれば、めっき外観が良好で、欠陥の無い保護皮膜として機能するためめっき皮膜の耐腐食性能が向上する。この結果、めっき製品の耐久性が向上する。また、メカニカルリレーの接点やプリント配線板の端子部分等へのめっき厚さの管理幅の下限を低く設定することが出来、資源の節約と製造コストの削減が可能になる。   The chemical abrasive according to the present invention includes components of ferric sulfate, sulfuric acid, nonionic surfactant, and halogen ion, and a ratio of sulfuric acid content to ferric sulfate content [sulfuric acid. Content] / [content of ferric sulfate] is a chemical abrasive having a value of 1 to 4, and does not contain harmful substances or special chemical substances. Therefore, the wastewater treatment load can be reduced. And if the pre-plating process is performed on the copper or copper alloy object to be plated by using this chemical abrasive, a good gloss surface without unevenness can be obtained. Therefore, if this surface is plated, the plating layer is excellent in film thickness uniformity and can be subjected to dense metal plating. Thus, if the thickness of the metal plating film is uniform and dense, the plating appearance is good and functions as a protective film having no defects, so that the corrosion resistance of the plating film is improved. As a result, the durability of the plated product is improved. In addition, the lower limit of the management width of the plating thickness on the contact of the mechanical relay, the terminal portion of the printed wiring board, etc. can be set low, so that resources can be saved and the manufacturing cost can be reduced.

被めっき物へのニッケル・金めっき工程である。This is a nickel / gold plating process to be plated. 実施例2で得られた塩水噴霧後のめっき材の外観を示す写真である。2 is a photograph showing the appearance of a plated material after spraying with salt water obtained in Example 2. FIG. 比較例2で得られた塩水噴霧後のめっき材の外観を示す写真である。6 is a photograph showing the appearance of a plated material after spraying with salt water obtained in Comparative Example 2.

Claims (6)

銅又は銅合金表面のめっき前処理に用いる化学研磨剤であって、
硫酸第二鉄、硫酸、非イオン性界面活性剤、ハロゲンイオンの各成分を含み、且つ、硫酸の含有量と硫酸第二鉄の含有量との比[硫酸の含有量]/[硫酸第二鉄の含有量]の値が1〜4であることを特徴とする化学研磨剤。
A chemical abrasive used for pre-plating of copper or copper alloy surface,
Contains ferric sulfate, sulfuric acid, nonionic surfactant and halogen ion components, and ratio of sulfuric acid content to ferric sulfate content [sulfuric acid content] / [ferric sulfate] A chemical abrasive having a value of [iron content] of 1 to 4.
前記硫酸第二鉄の含有量が5wt%〜10wt%である請求項1に記載の化学研磨剤。 The chemical abrasive according to claim 1, wherein the content of ferric sulfate is 5 wt% to 10 wt%. 前記硫酸の含有量が10wt%〜20wt%である請求項1又は請求項2に記載の化学研磨剤。 The chemical polishing agent according to claim 1 or 2, wherein a content of the sulfuric acid is 10 wt% to 20 wt%. 前記非イオン性界面活性剤の含有量が0.1wt%〜5wt%である請求項1〜請求項3のいずれかに記載の化学研磨剤。 The chemical abrasive according to any one of claims 1 to 3, wherein the content of the nonionic surfactant is 0.1 wt% to 5 wt%. 前記ハロゲンイオンの含有量が0.1wt%〜10wt%である請求項1〜請求項4のいずれかに記載の化学研磨剤。 The chemical abrasive according to any one of claims 1 to 4, wherein a content of the halogen ion is 0.1 wt% to 10 wt%. 被めっき物として請求項1〜請求項5のいずれかに記載の化学研磨剤を用いてめっき前処理を施した銅又は銅合金を用いることを特徴とする、銅又は銅合金表面への金属めっき方法であって、
以下の工程A〜工程Cを含むことを特徴とする金属めっき方法。
工程A: 銅又は銅合金の表面を脱脂剤と接触させて脱脂処理する脱脂工程。
工程B: 工程Aで得られた銅又は銅合金を化学研磨剤と接触させて処理するめっき前処理工程。
工程C: 工程Bで得られた銅又は銅合金の表面に金属めっきを施す金属めっき工程。
Metal plating on the surface of copper or copper alloy, characterized by using copper or copper alloy that has been subjected to plating pretreatment using the chemical abrasive according to any one of claims 1 to 5 as an object to be plated. A method,
A metal plating method comprising the following steps A to C:
Step A: A degreasing step in which the surface of copper or copper alloy is contacted with a degreasing agent to perform a degreasing treatment.
Step B: A plating pretreatment step in which the copper or copper alloy obtained in step A is contacted with a chemical abrasive and processed.
Process C: A metal plating process for performing metal plating on the surface of the copper or copper alloy obtained in Process B.
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JP2014091845A (en) * 2012-11-01 2014-05-19 Dowa Metaltech Kk Nickel plating material and method for manufacturing the same
CN106086908A (en) * 2016-07-19 2016-11-09 东莞市凯盟表面处理技术开发有限公司 A kind of copper material pickling polishing fluid and preparation method thereof and using method
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JP2014091845A (en) * 2012-11-01 2014-05-19 Dowa Metaltech Kk Nickel plating material and method for manufacturing the same
JP2017179558A (en) * 2016-03-31 2017-10-05 古河電気工業株式会社 Metallic material for thin film plating and method for producing the same
CN106086908A (en) * 2016-07-19 2016-11-09 东莞市凯盟表面处理技术开发有限公司 A kind of copper material pickling polishing fluid and preparation method thereof and using method

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