JP2009052432A5 - - Google Patents

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Publication number
JP2009052432A5
JP2009052432A5 JP2007218003A JP2007218003A JP2009052432A5 JP 2009052432 A5 JP2009052432 A5 JP 2009052432A5 JP 2007218003 A JP2007218003 A JP 2007218003A JP 2007218003 A JP2007218003 A JP 2007218003A JP 2009052432 A5 JP2009052432 A5 JP 2009052432A5
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JP
Japan
Prior art keywords
vacuum
reservoir tank
pressure
vacuum chamber
communication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007218003A
Other languages
English (en)
Japanese (ja)
Other versions
JP4881260B2 (ja
JP2009052432A (ja
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Publication date
Application filed filed Critical
Priority to JP2007218003A priority Critical patent/JP4881260B2/ja
Priority claimed from JP2007218003A external-priority patent/JP4881260B2/ja
Publication of JP2009052432A publication Critical patent/JP2009052432A/ja
Publication of JP2009052432A5 publication Critical patent/JP2009052432A5/ja
Application granted granted Critical
Publication of JP4881260B2 publication Critical patent/JP4881260B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007218003A 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法 Expired - Fee Related JP4881260B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007218003A JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007218003A JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Publications (3)

Publication Number Publication Date
JP2009052432A JP2009052432A (ja) 2009-03-12
JP2009052432A5 true JP2009052432A5 (enrdf_load_stackoverflow) 2010-10-14
JP4881260B2 JP4881260B2 (ja) 2012-02-22

Family

ID=40503723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007218003A Expired - Fee Related JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Country Status (1)

Country Link
JP (1) JP4881260B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6457753B2 (ja) * 2014-07-09 2019-01-23 岩谷産業株式会社 吸引装置、吸引方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113511A (en) * 1978-02-23 1979-09-05 Seiko Epson Corp Vacuum unit
JPS62199973A (ja) * 1986-02-28 1987-09-03 Nok Corp 真空引き方法
JPH04362284A (ja) * 1991-06-07 1992-12-15 Tel Varian Ltd 真空装置
JPH09306972A (ja) * 1996-05-17 1997-11-28 C Bui Res:Kk 半導体製造装置
JPH11230034A (ja) * 1998-02-18 1999-08-24 Ebara Corp 真空排気システム及びその運転方法

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