JP2009029048A - Dividing method of workpiece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dividing method of workpiece capable of improving production and obtaining high quality-segments of uniform parting surfaces free from undulations. <P>SOLUTION: A parting start point line 111 is formed on one surface 101a of a large-sized workpiece 10, and a support 11 is bonded via an adhesive layer 10 to a state of restraining a camber The other surface 101b is dipped into a molten metal 131 and is heated and a crack 121 is developed from the parting start point line 11 by the thermal stress generated within the large-sized workpiece 10 so that the workpiece is divided. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method of dividing a work by dividing a work such as a glass substrate into a plurality of divided substrates by the progress of cracks, and more preferably, a small piece of a glass base material used for a chip substrate of an electronic component, The present invention relates to a work dividing method that can be suitably carried out in order to manufacture by dividing a large-sized glass plate that is a work.

  For example, a glass substrate such as a chip substrate of an electronic component having a square or rectangular shape with a side length of 3 mm to 15 mm and a thickness of about 0.1 mm to 1.0 mm is a single rectangular shape. The large-sized glass plate is divided into a plurality of divided pieces by dividing the large-sized glass plate in a lattice shape along the planned dividing lines in the two orthogonal directions in the X direction and the Y direction.

  The large-sized glass plate is divided by forming a surface crack line as a dividing starting line along the X direction and the Y direction by a diamond cutter, preferably cooling by laser irradiation and spraying of water, and the like. It is divided by advancing a crack toward the surface and divided into a plurality of divided pieces.

  When dividing along the surface crack line, a large glass plate is curved so that one surface provided with the surface crack line is convex, and the surface crack line is divided by the progress of cracks due to tensile stress. Many methods are used.

  FIG. 5 is a view for explaining a conventional method for dividing a work, and shows a step of forming a dividing starting point line 216 on one surface of a large-sized glass plate 211. FIG. 6 is a diagram illustrating a process of dividing the large glass plate 211 by causing the crack 223 to propagate from the dividing starting point line 216. First, as shown in FIG. 5, a large glass plate 211 as a work is placed on a stage 201 made of a rigid body, and the large glass plate 211 is drawn by a suction force through a plurality of suction holes (not shown) provided in the stage 201. Is fixed on the stage 201 by vacuum suction.

  Next, a scriber 212 including a wheel 214 on a disk made of sintered diamond or the like is scanned while pressing the large-format glass plate 211 while pressing it along a planned dividing line (not shown) on the large-format glass plate 211, thereby starting the dividing point. Line 216 is formed.

  In this way, after forming the dividing starting point line 216 along all the planned dividing lines on one surface of the large-sized glass plate 211, the one surface on which the dividing starting point line 216 is formed is used as the surface of the stage 201 as shown in FIG. A large-sized glass plate 211 is placed so as to be in contact with the sheet body 206 made of a soft elastic material such as rubber, which is attached to the sheet.

  Thereafter, the large glass plate 211 is pressed from the other surface opposite to the one surface on which the dividing starting point line 211 is formed by using the pressurizing jig 221 to be pulled toward the one surface side on which the dividing starting point line 211 is formed. The crack 223 is developed by generating stress, and the large-sized glass plate 211 is divided into a plurality of small pieces of glass 225 which are divided pieces.

  In such a conventional technique, since one surface on which the dividing starting point line 216 is formed is pressed against the sheet body 206, contamination on the sheet body 206 adheres to the large glass plate 211. For this reason, when the circuit pattern is exposed and formed on the one surface of the large-sized glass plate, for example, the circuit pattern is contaminated, and there is a possibility of adversely affecting the subsequent processing.

  Further, in order to divide the large-sized glass plate 211 into a plurality of divided pieces, pressurization is performed from the other surface opposite to the one surface on which the X-direction dividing starting line is formed, and the dividing starting line in the X direction is formed. Since it is necessary to rotate the large-sized glass plate 211 by 90 degrees and cut along the starting point line in the Y direction in the same manner after generating a tensile stress on one surface side and cutting it. The problem is that productivity is poor.

  In order to solve these problems, in another prior art, one surface on which the dividing starting point line 216 is formed is heated from the other surface side on the opposite side by a heater stage, and cracks are developed by the generated thermal stress, The large-sized glass plate 211 is divided into the X direction and the Y direction at once to divide a plurality of divided pieces (for example, see Patent Document 1).

  In such other prior art, it is necessary to uniformly lower the temperature on one surface side where the dividing starting point line is formed and to increase the temperature on the other surface side. Since the surface of the heater stage and the one surface of the large-sized glass plate 211 are not smooth, the surface of the large-sized glass plate 211 is brought into contact with the other surface on the opposite side to the one surface where the dividing starting point line is formed. The temperature difference is usually not uniform. Therefore, in a place where a sufficient temperature difference does not occur between one surface and the other surface of a large glass plate, sufficient thermal stress is not generated to cause the crack to develop, There is a problem that uneven separation occurs at points.

JP 2003-238180 A

  An object of the present invention is to provide a workpiece dividing method capable of improving productivity and obtaining a high-quality divided piece having a uniform divided cross section without undulations.

The present invention is a work dividing method for dividing a plate-shaped workpiece made of a brittle material into a plurality of divided pieces and dividing the workpiece,
On one surface of the workpiece, a dividing starting point line is formed along a predetermined dividing line,
In a state in which the warp of the workpiece forming the dividing starting point line is constrained, the other surface of the workpiece opposite to the one surface forming the dividing starting point line is brought into contact with a heated fluid, so that the workpiece A workpiece dividing method characterized by dividing the workpiece into divided pieces.

  According to the present invention, the heated fluid can be contacted as a heat source regardless of the undulation or unevenness of the surface of the workpiece, which is a glass plate, for example, so that the workpiece can be heated uniformly. As a result, it is possible to form a plurality of divided pieces with no unevenness in the divided section almost simultaneously, improving productivity and obtaining high-quality divided pieces.

  In addition, the present invention is characterized in that a rigid support is attached to one surface on which a dividing starting point line of the workpiece is formed in order to restrain warping of the workpiece.

  According to the present invention, it is possible to prevent warping of the workpiece, generate high thermal stress on the workpiece, reliably form a uniform sectional surface, and improve yield.

In the invention, it is preferable that the hard support is made of a translucent material.
According to the present invention, since the hard support is made of a translucent material, the support can be made to transmit ultraviolet rays, and in order to join the support and the work, a weak adhesive force type is applied by irradiation with ultraviolet rays. An adhesive can be used, whereby the support and the workpiece can be easily attached and detached.

  Further, the present invention is characterized in that the support is attached to one surface of the workpiece on which a dividing starting point line is formed via an adhesive layer.

  Further, according to the present invention, since the one surface on which the dividing starting point line is formed and the support are attached via an adhesive layer, an uneven surface such as an electrode is formed on one surface forming the dividing starting point line of the workpiece. Even if it is formed, the said unevenness | corrugation can be absorbed by the contact bonding layer, and a workpiece | work and a support body can be joined, without damaging the unevenness | corrugation of one surface.

  In the invention, it is preferable that the adhesive layer reduces the tackiness by irradiating with ultraviolet rays.

  According to the present invention, since the adhesive layer can be reduced in tackiness by irradiating the adhesive layer with ultraviolet rays, the plurality of divided pieces can be easily peeled off from the support after the work is divided.

In the invention, it is preferable that the heated fluid is a molten metal.
According to the present invention, since the molten metal is used as the heated fluid, the thermal conductivity is higher than when other fluid such as a heated gas is used, and the workpiece can be efficiently heated. .

  According to the present invention, since the workpiece is heated by a heated fluid such as molten metal, the heat source can be brought into contact with the undulation or unevenness of the workpiece surface, and the entire surface to be heated can be uniformly heated. It is possible to prevent the divided sections from becoming uneven, to efficiently manufacture high-quality divided pieces, and to improve the yield.

  FIG. 1 is a cross-sectional view showing a configuration of a laminated body 118 to which a workpiece dividing method according to an embodiment of the present invention is applied. In the present embodiment, a method for dividing a workpiece will be described in which a large-sized workpiece 101 made of a large glass plate is divided into a plurality of divided pieces 128 as a workpiece made of a brittle material.

The large-size workpiece 101 is made of, for example, non-alkali glass (R′O—Al ₂ O ₃ —SiO ₂ where R ′ is a divalent element) having a vertical width of 400 mm, a horizontal width of 320 mm, and a thickness of 0.7 mm. Then, one surface 101a of the large-size workpiece 101 is scribed by a sintered diamond cutter (not shown) to form a dividing starting point line 111 having a width b = 0.65 mm and a depth d = 12 μm and a substantially V-shaped cross section.

  The divided piece 128 is, for example, a glass base material used as a chip substrate of an electronic component having a length of about 3 mm to 15 mm on one side and a thickness of about 0.1 mm to 1.0 mm. In addition, the rectangular large-sized glass plate is formed by dividing the rectangular large-sized glass plate in a lattice shape along the planned dividing lines in the two biaxial directions perpendicular to the X direction and the Y direction.

The glass used for the large-size workpiece 101 is quartz (SiO ₂ ), soda glass (Na ₂ O—CaO—SiO ₂ ), lead glass (K ₂ O—PbO—SiO ₂ ) in addition to the alkali-free glass described above. , Borosilicate glass (Na ₂ O—B ₂ O ₃ —SiO ₂ ) or the like may be used. Moreover, the dividing starting point line 111 may be formed by irradiating a carbon dioxide laser in addition to scribing.

  Next, a support body 116 made of glass having the same size as that of the large-size workpiece 101 is bonded to one surface 101a of the large-size workpiece 101 through the adhesive layer 106 whose adhesiveness is reduced by irradiation with ultraviolet rays, and the laminate 118 is attached. Finalize. The adhesive layer 106 is realized by, for example, a self-releasable double-sided pressure-sensitive adhesive tape that can be peeled off by generating gas by irradiation with ultraviolet rays. This self-releasable double-sided pressure-sensitive adhesive tape is easily commercially available, for example, as SELFA (trade name) manufactured by Sekisui Chemical Co., Ltd.

  As a sticking method, first, using the laminator, the above-mentioned self-peeling double-sided adhesive tape is peeled off and attached to the support 116 with the separator on one surface. Thereafter, the separator on the other surface 101b opposite to the one surface 101a is removed, and the large-sized workpiece 101 is placed so that the one surface 101a on which the dividing starting line 111 is formed and the self-peeling double-sided adhesive tape are in contact. Next, the large-size workpiece 101 and the support 116 are attached by applying pressure from the other surface 101b side opposite to the one surface 101a on which the dividing starting point line 111 of the large-size workpiece 101 is formed, and heating if necessary. Completion is made, and the laminate 118 is formed.

  FIG. 2 is a cross-sectional view for explaining a procedure for immersing the laminate 118 in the molten metal 131. A procedure for immersing the laminate 118 formed as described above in the molten metal 131 and dividing the large-size workpiece 101 will be described. For example, the inside of a storage tank 126 made of stainless steel provided with a Joule heating mechanism (not shown) is heated to about 300 ° C., for example, Sn—Ag—Cu solder is melted, and the heated molten metal 131 is stored. As described above, since the molten metal 131 is used as the heated fluid, the large-size workpiece 101 is heated efficiently and evenly, as compared with the case where another fluid such as a heated gas is used. be able to.

  FIG. 3 is a cross-sectional view showing a state where the large-size workpiece 101 is immersed in the molten metal 131. Next, the laminated body 118 is immersed in and brought into contact with the molten metal 131 on the other surface 101b opposite to the one surface 101a where the dividing starting point line 111 of the large-sized workpiece 101 is formed. As a result, a temperature difference is generated between the one surface 101a on which the dividing start line 111 is formed and the other surface 101b on the opposite side of the large workpiece 101, and the dividing starting line 111 of the large work 101 is formed. A tensile stress is generated on one surface 101a.

  As a result, the crack 121 progresses in the thickness direction of the large-size workpiece 101 from the dividing starting point line 111 of one surface 101a toward the other surface 101b, and finally the other side from the one surface 101a where the dividing starting point line 111 is formed. The crack 121 reaches the surface 101b, and the division is completed.

  Note that the molten metal 131 is related to the shape of the large-size workpiece 101, unlike the case where the surface 101a on which the dividing starting point 111 of the large-size workpiece 101 is formed is brought into direct contact with the heated rigid surface such as a hot plate. Without touching its surface 101a. Therefore, uniform heating is possible, and there is no risk of uneven separation.

  In another embodiment of the present invention, hot air or combustion gas from a gas burner can be used as a fluid as a heat source.

  FIG. 4 is a cross-sectional view for explaining a procedure for separating each divided piece 128 from the divided large-size workpiece 101. As described above, the large-sized workpiece 101 constituting the laminated body 118 is divided to form the divided pieces 128, and then the laminated body 118 is pulled up from the molten metal 131. Thereafter, as shown in the figure, the stacked body 118 is placed so that the surface of the support 116 is in contact with the surface of the stage 113 of the ultraviolet irradiation device 114.

  In this state, the support 116 is irradiated with ultraviolet rays from the ultraviolet ray generator 114. Since the support 116 is made of a light-transmitting material such as glass, ultraviolet rays are transmitted through the support 116 and irradiated onto the adhesive layer 106 made of a self-peeling double-sided adhesive tape. As a result, gas is generated on the surface of the adhesive layer 106 due to absorption of ultraviolet rays, and the adhesive force between the large-size workpiece 101 and the adhesive layer 106 is reduced. After reducing the adhesive force of the adhesive layer 106 in this manner, the vacuum suction tweezers 133 and the like are brought into contact with each of the divided pieces 128, and the divided pieces 128 are sucked and picked up by a suction force from a vacuum suction source (not shown).

  As described above, the process of dividing the large work 101 and dividing it into a plurality of divided pieces 128 is completed.

  According to this embodiment, since the molten metal 131 that is a heated fluid is brought into contact as a heat source regardless of the undulation or unevenness of the surface of the large-sized workpiece 101, the large-sized workpiece 101 is heated uniformly and simultaneously by a surface heat source. Cracks can be split by thermal stress. As a result, a plurality of divided pieces 128 having no uneven cross section can be formed almost simultaneously. In this way, the large-size workpiece 101 can be divided into high-quality divided pieces 128 in a short time, and separated from the support 116 to be separated into individual pieces, so that productivity can be improved.

  In addition, by sticking the support 116 to the large-size workpiece 101, the large-size workpiece 101 is prevented from warping during heating, and high thermal stress is generated inside the large-size workpiece 101 so as to reliably form a uniform sectional surface. Further, it is possible to improve the yield by suppressing the occurrence of uneven separation.

  Further, since the support body 116 is made of a light-transmitting material, the support body 116 can transmit ultraviolet rays, and in order to join the support body 116 and the large-size work 101, adhesion of weak adhesive force type by ultraviolet irradiation is performed. A self-peeling double-sided pressure-sensitive adhesive tape that can be peeled off by generating an agent by irradiation with ultraviolet rays as described above can be used, whereby the support 116 and the large-size workpiece 101 can be easily bonded and separated. .

  Further, since the one surface 101a on which the dividing starting point line 111 is formed and the support 116 are attached via the adhesive layer 106, an electrode or the like is formed on the one surface 101a on which the dividing starting point line 111 of the large-sized workpiece 101 is formed. Even if a wiring pattern with unevenness is formed, the unevenness can be absorbed by the adhesive layer 106, and the large-size workpiece 101 and the support 116 can be obtained without damaging the wiring pattern on the one surface 101a. Can be joined.

  In addition, since the adhesive layer 106 can be reduced in adhesiveness by irradiating the adhesive layer 106 with ultraviolet rays, the plurality of divided pieces 128 can be easily peeled off and separated from the support 116 after the large format work 101 is divided. Can do.

  The workpiece made of a brittle material for which the dividing method of the present invention is performed is not limited to the glass plate described above, and can be suitably performed on, for example, a semiconductor wafer.

It is sectional drawing which shows the structure of the laminated body 118 to which the division | segmentation method of the workpiece | work of one Embodiment of this invention is applied. 5 is a cross-sectional view for explaining a procedure of immersing a laminated body 118 in a molten metal 131. FIG. It is sectional drawing which shows the state which immersed the large format workpiece | work 101 in the molten metal 131. FIG. It is sectional drawing for demonstrating the procedure which isolate | separates each division | segmentation piece 128 from the large-sized workpiece 101 divided | segmented. It is a figure for demonstrating the division | segmentation method of the conventional workpiece | work, and shows the process of forming the dividing starting point line 216 in one surface of the large format glass plate 211. FIG. It is a figure which shows the process of extending the crack 223 from the dividing starting point line 216, and dividing the large format glass plate 211. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Large format work 101a One surface 101b Other surface 106 Adhesive layer 111 Dividing starting point line 113 Stage 114 Ultraviolet irradiation apparatus 116 Support body 118 Laminated body 121 Crack 126 Storage tank 128 Divided piece 131 Molten metal

Claims (6)

A method of dividing a workpiece in which a plate-like workpiece made of a brittle material is divided into a plurality of divided pieces.
On one surface of the workpiece, a dividing starting point line is formed along a predetermined dividing line,
In a state in which the warp of the workpiece forming the dividing starting point line is constrained, the other surface of the workpiece opposite to the one surface forming the dividing starting point line is brought into contact with a heated fluid, so that the workpiece A method of dividing a workpiece, wherein the workpiece is divided into divided pieces.   The work dividing method according to claim 1, wherein a hard support is affixed to one surface on which a dividing starting point line of the work is formed in order to restrain warping of the work.   The work dividing method according to claim 2, wherein the hard support is made of a translucent material.   The method for dividing a workpiece according to claim 2 or 3, wherein the support is attached to one surface on which the dividing starting point line of the workpiece is formed via an adhesive layer.   5. The work dividing method according to claim 2, wherein the adhesive layer reduces the tackiness by irradiating ultraviolet rays. 6.   The work dividing method according to claim 1, wherein the heated fluid is a molten metal.

Images