JP2009015047A - Microscope device and observation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope device for accurately and efficiently acquiring information regarding light quantity and favorably acquiring image information of a sample. <P>SOLUTION: This microscope device comprises an image formation optical system, a lighting system which illuminates an object surface of the image formation optical system, an imaging element arranged in the image formation region of the image formation optical system, and a detector which detects light quantity in the image formation region and in a predetermined region other than the imaging element. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a microscope apparatus and an observation method using the microscope apparatus.

The microscope apparatus includes an imaging optical system including an objective lens and the like, and observes a preparation sample via the imaging optical system. Patent Document 1 below discloses an example of a technique related to a microscope apparatus that acquires image information of a sample using an image sensor.
US Patent Publication No. 2005/248837

  When acquiring image information of a sample using an image sensor, for example, if the amount of light (illuminance) of light incident on the image sensor is not optimally adjusted, the image information of the sample can be acquired favorably with the image sensor. It can be difficult. In order to adjust the amount of light incident on the image sensor, it is effective to detect the amount of light incident on the image sensor. Therefore, it is desired to devise a technique that can accurately and efficiently detect the amount of light incident on the image sensor.

  An object of this invention is to provide the microscope apparatus which can acquire the information regarding a light quantity accurately and efficiently, and can acquire the image information of a sample favorably, and the observation method using a microscope apparatus.

  In order to solve the above-described problems, the following configurations corresponding to the respective drawings shown in the embodiments are adopted as each aspect illustrating the present invention. However, the reference numerals with parentheses attached to each element are merely examples of the element and do not limit each element.

  According to the first aspect illustrating the present invention, the imaging optical system (18), the illumination device (16) for illuminating the object plane of the imaging optical system (18), and the imaging optical system (18) An image sensor (12) disposed in the imaging region (32), and a detection device (13) for detecting the amount of light in a predetermined region other than the image sensor (12) in the imaging region (32). A provided microscope apparatus (3) is provided.

  According to the first aspect exemplifying the present invention, it is possible to accurately and efficiently acquire information regarding the amount of light, and to acquire image information of a sample favorably.

  According to a second embodiment illustrating the present invention, there is an observation method using a microscope apparatus (3), in which an imaging element (32) is formed in an imaging region (32) of an imaging optical system (18) of the microscope apparatus (3). 12), illuminating the object plane of the imaging optical system (18) with illumination light, and detecting the amount of light in a predetermined area within the imaging area (32) other than the image sensor (12) And an observation method including adjusting the amount of light in the imaging region (32) based on the detected result.

  According to the 2nd mode which illustrates the present invention, the information about light quantity can be acquired accurately and efficiently, and the image information on a sample can be acquired favorably.

  According to the present invention, information regarding the amount of light can be acquired with high accuracy and efficiency, and image information of the sample can be acquired well.

  Hereinafter, embodiments of the present invention will be exemplarily described with reference to the drawings, but the present invention is not limited thereto. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The predetermined direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a diagram illustrating an example of a microscope system 1 according to the first embodiment. In FIG. 1, the microscope system 1 includes a microscope device 3 that observes a preparation 2 including a sample S, a control device 4 that controls the operation of the microscope device 3, and a display device 5 that is connected to the control device 4. Yes. The control device 4 includes a computer system. The display device 5 includes a flat panel display such as a liquid crystal display.

  FIG. 2 is a schematic configuration diagram showing the microscope apparatus 3. 1 and 2, the microscope device 3 includes a first light source device 6, a second light source device 7, an optical system 9 including an objective lens 8, and the like, and a first stage 10 that can move while supporting the preparation 2. An eyepiece unit 11, an image sensor 12 capable of acquiring image information of an object, an optical sensor 13 capable of detecting the amount of light, and a second stage 14 movable while supporting the image sensor 12 and the optical sensor 13. It has. The imaging device 12 includes, for example, a CCD (charge coupled device). The microscope apparatus 3 includes a body 15, and each of the first light source device 6, the second light source device 7, the optical system 9, the first stage 10, and the second stage 14 is supported by the body 15.

  The optical system 9 illuminates the preparation 2 using the first illumination optical system 16 that illuminates the preparation 2 using the light emitted from the first light source device 6 and the light emitted from the second light source device 7. The second illumination optical system 17 and the image of the preparation 2 illuminated by at least one of the first illumination optical system 16 and the second illumination optical system 17 are formed on the second stage 14 and in the vicinity of the eyepiece 11. And an optical system 18.

  The objective lens 8 can face the preparation 2 supported by the first stage 10. In the present embodiment, the objective lens 8 is disposed on the −Z side (downward) of the preparation 2 supported by the first stage 10.

  The first light source device 6 emits light (illumination light) for illuminating the sample S of the preparation 2. The control device 4 emits illumination light for illuminating the preparation 2 from the first light source device 6 at least when the sample S of the preparation 2 is observed.

  In the present embodiment, the first light source device 6 and the control device 4 are connected via a cable, and the control device 4 can control the first light source device 6.

  The first illumination optical system 16 uses the light emitted from the first light source device 6 to illuminate the preparation 2 with illumination light having a uniform illuminance distribution. The first illumination optical system 16 includes an optical element 19 having an exit surface that emits illumination light for illuminating the preparation 2. The optical element 19 is disposed on the + Z side (upper side) of the preparation 2 supported by the first stage 10. The first illumination optical system 16 illuminates the preparation 2 supported by the first stage 10 with illumination light from above.

  As described above, the microscope apparatus 3 according to this embodiment irradiates the preparation 2 with illumination light from above the preparation 2 and obtains the image information of the preparation 2 via the objective lens 8 disposed below the preparation 2. Includes a microscope. The image of the preparation 2 illuminated by the first illumination optical system 16 is formed on the second stage 14 and in the vicinity of the eyepiece 11 by the imaging optical system 18.

  The second light source device 7 includes, for example, a mercury lamp, and emits light (excitation light) for generating fluorescence from the fluorescent material of the preparation 2.

  The second illumination optical system 17 uses the light emitted from the second light source device 7 to illuminate the preparation 2 with excitation light in a predetermined wavelength region. The second illumination optical system 17 includes an objective lens 8 and a filter block 20 that can separate excitation light and fluorescence. The objective lens 8 emits excitation light for illuminating the preparation 2. The second illumination optical system 17 illuminates the preparation 2 supported by the first stage 10 with excitation light from below.

  As described above, the microscope apparatus 3 of the present embodiment includes a fluorescence microscope that irradiates the preparation 2 with excitation light and observes the fluorescence generated from the preparation 2. When the preparation 2 (sample S) contains a fluorescent substance, the preparation 2 can be irradiated with excitation light from the second illumination optical system 17 to generate fluorescence from the fluorescent substance.

  FIG. 3 is a schematic diagram illustrating an example of the filter block 20. As shown in FIG. 3, the filter block 20 includes a first filter 21 that receives light from the second light source device 7, a dichroic mirror 22 that receives light through the first filter 21, and a dichroic mirror 22. And a second filter 23 on which light is incident.

  The first filter 21 cuts a part of the wavelength region of the light emitted from the second light source device 7 and extracts light of a predetermined wavelength region (excitation light) necessary for excitation of the fluorescent material. It is a wavelength selective optical element. That is, the first filter 21 includes a band-pass filter that transmits only light (excitation light) in a predetermined wavelength region and does not transmit light in other wavelength regions. Light (excitation light) in a predetermined wavelength region emitted from the second light source device 7 and transmitted through the first filter 21 enters the dichroic mirror 22.

  The dichroic mirror 22 is a separation optical element that separates excitation light and fluorescence. In the present embodiment, the dichroic mirror 22 reflects light (excitation light) in a predetermined wavelength region that has passed through the first filter 21 and transmits light outside the predetermined wavelength region. The light (excitation light) in the predetermined wavelength region that has passed through the first filter 21 is reflected by the dichroic mirror 22 and guided to the preparation 2. The excitation light is irradiated to the preparation 2.

  In the present embodiment, the objective lens 8 is disposed between the filter block 20 and the preparation 2, and excitation light from the dichroic mirror 22 passes through the objective lens 8 from below the preparation 2 to the preparation 2. Irradiated. The second illumination optical system 17 illuminates the preparation 2 with excitation light.

  When the preparation 2 (sample S) contains a fluorescent material, the fluorescent material on the preparation 2 is irradiated with excitation light, whereby fluorescence is generated from the fluorescent material. The fluorescence generated from the fluorescent material enters the dichroic mirror 22 via the objective lens 8. In general, the wavelength of fluorescence is longer than the wavelength of excitation light, and the wavelength of fluorescence is different from the wavelength of excitation light. Therefore, the fluorescence generated from the fluorescent material and incident on the dichroic mirror 22 is transmitted through the dichroic mirror 22. The fluorescence that has passed through the dichroic mirror 22 enters the second filter 23.

  The second filter 23 is a wavelength selection optical element that separates fluorescence from the preparation 2 and unnecessary light (scattered light or the like) having a wavelength other than fluorescence to extract only fluorescence. That is, the second filter 23 includes a bandpass filter that transmits only fluorescence and does not transmit light in other wavelength regions. The fluorescence transmitted through the second filter 23 is incident on a separation optical element 24 (see FIG. 2) that separates light.

  The second light source device 7 may be a laser device capable of exciting a fluorescent material and emitting laser light (excitation light) in a predetermined wavelength region.

  In the present embodiment, the first illumination optical system 16 illuminates the preparation 2 with light having a wavelength other than the excitation light. For example, the first illumination optical system 16 is provided with a filter (wavelength selection optical element) that cuts light in the wavelength region of the excitation light out of the light emitted from the first light source device 6. 16 can illuminate the preparation 2 with light of a wavelength other than the excitation light.

  The light emitted from the first illumination optical system 16 can pass through the dichroic mirror 22 and the second filter 23 of the filter block 20. A drive mechanism that can move the filter block 20 is provided, and when light is emitted from the first illumination optical system 16, the filter block 20 is retracted from the optical path of the light emitted from the first illumination optical system 16. May be.

  1 and 2, the first stage 10 is movable on the object plane side of the imaging optical system 18 while supporting the preparation 2. The first stage 10 supports the preparation 2 so that the preparation 2 and the objective lens 8 face each other. The first stage 10 can arrange the preparation 2 (sample S) on the object plane of the imaging optical system 18.

  In the present embodiment, the first stage 10 is movable on the base member 25 while supporting the preparation 2. A drive device that can move the first stage 10 is connected to the first stage 10, and the first stage 10 can be moved in the XY plane on the base member 25 by the drive device. The drive device of the first stage 10 and the control device 4 are connected via a cable, and the control device 4 can move the preparation 2 on the first stage 10 in the XY plane by using the drive device.

  The second stage 14 is movable on the image plane side of the imaging optical system 18 while supporting the image sensor 12 and the optical sensor 13. The imaging optical system 18 includes an imaging lens 26, and the second stage 14 has the imaging element 12 and the optical sensor so that at least one of the imaging element 12 and the optical sensor 13 and the imaging lens 26 face each other. 13 is supported.

  In the present embodiment, the second stage 14 includes a support member 27 that supports the imaging device 12 and the optical sensor 13, a base member 28 that supports the support member 27 movably, and the support member 27 on the base member 28. And a driving device 29 that moves. The support member 27 is movable on the base member 28 in the XY plane. The second stage 14 (drive device 29) and the control device 4 are connected via a cable, and the control device 4 uses the drive device 29 to support a support member 27 that supports the image sensor 12 and the optical sensor 13. It can move in the XY plane.

  The imaging optical system 18 includes a plurality of optical elements such as an objective lens 8, an imaging lens 26, an eyepiece lens 30, and a reflection mirror. The image of the preparation 2 is displayed on the second stage 14 and in the vicinity of the eyepiece 11. To form. The light from the preparation 2 enters the objective lens 8. The objective lens 8 is an optical element closest to the object plane of the imaging optical system 18 among the plurality of optical elements of the imaging optical system 18. The imaging lens 26 and the eyepiece lens 30 are optical elements closest to the image plane of the imaging optical system 18 among the plurality of optical elements of the imaging optical system 18.

  The optical system 9 includes a separation optical element 24 that separates light from the objective lens 8. The separation optical element 24 includes a half mirror, transmits a part of incident light, and reflects a part thereof. Note that the separation optical element 24 may be a dichroic mirror. The light from the preparation 2 enters the separation optical element 24 through the objective lens 8 and the filter block 20. In the present embodiment, the light transmitted through the separation optical element 24 is guided to the second stage 14 through the imaging lens 26. As a result, the image of the preparation 2 is formed on the second stage 14 by the imaging optical system 18.

  The imaging element 12 is disposed on the second stage 14, and the imaging optical system 18 can form the image of the preparation 2 on the light receiving surface of the imaging element 12. The image pickup device 12 can acquire image information of the preparation 2 arranged on the object plane side of the imaging optical system 18. The image sensor 12 and the control device 4 are connected via a cable, and the image information (image signal) of the preparation 2 acquired by the image sensor 12 is output to the control device 4 via the cable. The control device 4 displays the image information from the image sensor 12 using the display device 5. The display device 5 can enlarge and display the image information of the preparation 2 acquired by the image sensor 12. In addition, the control device 4 performs image processing on the pixel signal output from the image sensor 12 by a predetermined method to generate image data.

  On the other hand, the light reflected by the separation optical element 24 is guided to the eyepiece unit 11 through the reflection mirror, the eyepiece lens 30 and the like. Thereby, the image of the preparation 2 is formed in the vicinity of the eyepiece 11 by the imaging optical system 18. The observer can observe the image of the preparation 2 through the eyepiece unit 11.

  In the present embodiment, the microscope apparatus 3 includes an operation unit 31 for moving the objective lens in the Z-axis direction. The observer can move the objective lens 8 in the Z-axis direction using the operation unit 31.

  FIG. 4 is a perspective view schematically showing the first light source device 6, the first illumination optical system 16, the first stage 10, the imaging optical system 18, and the support member 27 of the second stage 14.

  As shown in FIG. 4, the microscope apparatus 3 includes a first stage 10 that can move while supporting the preparation 2, a second stage 14 that can move while supporting the imaging device 12 and the optical sensor 13, and illumination light. A first light source device 6 that emits light, a first illumination optical system 16 that illuminates the preparation 2 supported by the first stage 10 using illumination light emitted from the first light source device 6, and illumination light. And an imaging optical system 18 that forms an image of the preparation 2 on the light receiving surface of the imaging device 12 supported by the second stage 14.

  The preparation 2 includes a slide glass 2A on which the sample S is placed and a cover glass 2B that covers the sample S on the slide glass 2A.

  The imaging optical system 18 forms an image of the object plane on the image plane. The imaging optical system 18 has an imaging region 32 on the image plane side, and an image of the object plane is formed in the imaging region 32. In the present embodiment, the optical axis of the imaging optical system 18 is substantially parallel to the Z axis.

  The first stage 10 is disposed on the object plane side of the imaging optical system 10. The first stage 10 can move at least in the XY plane orthogonal to the optical axis of the imaging optical system 18 while supporting the preparation 2. The preparation 2 can be moved at least in the XY plane by the first stage 10 on the object plane side of the imaging optical system 18.

  The second stage 14 is disposed on the image plane side of the imaging optical system 18. The second stage 14 can move at least in the XY plane orthogonal to the optical axis of the imaging optical system 18 in a state where the imaging element 12 and the optical sensor 13 are supported by the support member 27. The image sensor 12 and the optical sensor 13 can move at least in the XY plane on the image plane side of the imaging optical system 18 by the second stage 14.

  The second stage 14 can move in the XY directions within a predetermined area including the imaging area 32 of the imaging optical system 18. The second stage 14 can move the imaging element 12 and the optical sensor 13 with respect to the imaging region 32 of the imaging optical system 18. The image sensor 12 and the optical sensor 13 supported by the second stage 14 can be arranged in the imaging region 32 of the imaging optical system 18. The optical sensor 13 is arranged on the second stage 14 in a predetermined positional relationship with respect to the image sensor 12.

  The optical sensor 13 can detect the amount of light in the imaging region 32 of the imaging optical system 18. The optical sensor 13 can detect the illuminance in the imaging region 32 of the imaging optical system 18. The optical sensor 13 can detect the amount of light (illuminance) emitted from the first illumination optical system 16 and incident on the imaging region 32 of the imaging optical system 18 via the preparation 2 and the imaging optical system 18. .

  In the present embodiment, the optical sensor 13 detects the amount of light (illuminance) in a predetermined area other than the imaging element 12 in the imaging area 32 of the imaging optical system 18. In the present embodiment, the optical sensor 13 is disposed at a position adjacent to the imaging element 12 in the imaging region 32 of the imaging optical system 18. In the present embodiment, the optical sensor 13 can be disposed in the imaging region 32 simultaneously with the imaging device 12 when the imaging device 12 is disposed in the imaging region 32. That is, the image sensor 12 and the optical sensor 13 have a positional relationship that can be disposed together in the imaging region 32 of the imaging optical system 18.

  In the present embodiment, a plurality of image sensors 12 are arranged on the second stage 14. A plurality of optical sensors 13 are also arranged on the second stage 14.

  FIG. 5 is a diagram illustrating a positional relationship between the imaging element 12 and the optical sensor 13 and the imaging region 32. As shown in FIG. 5, in the present embodiment, the imaging region 32 is circular. In the present embodiment, the image sensor 12 is arranged at nine locations on the second stage 14. Each of the image sensors 12 is arranged at a predetermined interval in the XY plane.

  In the present embodiment, on the second stage 14, three groups of image pickup devices 12 arranged at predetermined intervals in the X-axis direction are arranged in the Y-axis direction. That is, in the present embodiment, the image sensor 12 is arranged in a matrix of 3 rows and 3 columns on the second stage 14.

  In the present embodiment, the outer shapes of the image pickup devices 12 in the XY plane are the same, and the distance between the image pickup devices 12 in the X axis direction is substantially the same as the size of the image pickup devices 12 in the X axis direction. The interval between the image sensors 12 in the direction is substantially the same as the size of the image sensor 12 in the Y-axis direction.

  As shown in FIG. 5, in the present embodiment, a plurality of image sensors 12 can be simultaneously arranged in the imaging region 32. As a result, the image sensor 12 has image information on the object plane of the imaging optical system 18 (preparation 2 arranged on the object plane side) at each of a plurality of different positions (nine positions) in the imaging region 32. Image information).

  In addition, the control device 4 arranges at least two imaging elements 12 in the imaging region 32, so that the object of the imaging optical system 18 at each of a plurality of positions (at least two positions) of the imaging region 32. Surface image information (image information of the preparation 2 arranged on the object plane side) can be acquired. Thus, in the present embodiment, a plurality of image sensors 12 can be arranged in the imaging region 32 at a predetermined interval.

  In the present embodiment, the optical sensors 13 are arranged at 18 locations on the second stage 14. Each of the optical sensors 13 is arranged at a predetermined interval in the XY plane.

  The optical sensor 13 is disposed at a position adjacent to the imaging element 12 in the imaging region 32. The optical sensors 13 are arranged between the image pickup elements 12 arranged at a predetermined interval.

  In the present embodiment, on the second stage 14, six groups of optical sensors 13 arranged at predetermined intervals in the X-axis direction are arranged in the Y-axis direction. Further, the groups of the optical sensors 13 adjacent in the Y-axis direction are shifted from each other by the size of the image sensor 12 in the X-axis direction with respect to the X-axis direction.

  Further, as shown in FIG. 5, in the present embodiment, a plurality of optical sensors 13 can be simultaneously disposed in the imaging region 32. Thereby, the optical sensor 13 can detect the light amount (illuminance) at a plurality of different positions in the imaging region 32.

  Next, a method for observing the preparation 2 including the sample S using the microscope system 1 having the above-described configuration will be described. In the present embodiment, the second stage 14 is moved in the XY direction with respect to the imaging region 32 of the imaging optical system 18, and the imaging optical system 32 is moved at each of a plurality of positions in the imaging region 32. Image information of the object plane (image information of the preparation 2 arranged on the object plane side) is acquired using the imaging element 12, and the preparation 2 including the sample S is acquired based on the image information acquired by the plurality of acquisition operations. Get image data.

  As an example, in the present embodiment, as shown in FIG. 5, image data of a region T in the imaging region 32 is acquired. In the present embodiment, the region T is divided into an A region, a B region, a C region, and a D region. Each of the A region, the B region, the C region, and the D region forms part of the imaging region 32. The control device 4 acquires image information in each of the A region, the B region, the C region, and the D region using the imaging element 12, and the image information acquired for the A region, the B region, the C region, and the D region. Is processed to generate image data of the region T. Here, the image information of the preparation 2 in each of the A region, the B region, the C region, and the D region is a part of the image information of the preparation 2 formed in the imaging region 32 (region T). The image data of the region T can be acquired by combining (connecting) the image information in the B region, the C region, and the D region by image processing.

  In the present embodiment, the outer shapes (size and shape) of the A region, the B region, the C region, and the D region in the XY plane are the same. In addition, the outer shapes of the A region, the B region, the C region, and the D region in the XY plane are substantially the same as the outer shape of the image sensor 12. Each of the A region, the B region, the C region, and the D region is smaller than the imaging region 32, and a plurality of regions are arranged in the imaging region 32. One group is formed by the A region, the B region, the C region, and the D region. In the present embodiment, the B region is arranged on the −X side of the A region, the C region is arranged on the −Y side of the A region, the D region is on the −X side of the C region and on the −Y side of the B region. Is arranged. And the group which consists of A area | region, B area | region, C area | region, and D area | region is arrange | positioned at the matrix form in XY plane.

  For example, when the image information of the preparation 2 in the A area is acquired using the image sensor 12, the position of the image sensor 12 is adjusted so that the A area and the image sensor 12 coincide. Further, when the image information of the preparation 2 in the B area is acquired using the image sensor 12, the position of the image sensor 12 is adjusted so that the B area and the image sensor 12 coincide with each other. Similarly, when the image information of the preparation 2 in the C region and the D region is acquired using the image sensor 12, the position of the image sensor 12 is set so that each of the C region and the D region matches the image sensor 12. Adjusted.

  In the following description, adjusting the position of the image sensor 12 so that the area A and the image sensor 12 coincide with each other is referred to as appropriately arranging the image sensor 12 in the area A. Similarly, adjusting the position of the image sensor 12 so that the B area and the image sensor 12 coincide with each other is referred to as arranging the image sensor 12 in the B area as appropriate, and the C area and the image sensor 12 coincide with each other. Adjusting the position of the image sensor 12 as described above is referred to as arranging the image sensor 12 in the C region as appropriate, and adjusting the position of the image sensor 12 so that the D region and the image sensor 12 are matched as appropriate. , The imaging element 12 is arranged in the D region.

  In the present embodiment, one image sensor 12 is arranged for one group of the A region, the B region, the C region, and the D region. In the present embodiment, the image sensor 12 is arranged in the A region in the imaging region 32, acquires the image information of the preparation 2 in the A region, and is then arranged in the B region and the preparation 2 in the B region. Get image information. In addition, the image pickup device 12 obtains the image information of the preparation 2 in the B region, and then obtains the image information of the preparation 2 in the C region. After that, the image information of the preparation 2 in the D region is obtained by being arranged in the D region.

  Hereinafter, an example of the operation of the microscope system 1 according to the present embodiment will be described with reference to the schematic diagrams of FIGS. 5 and 6 and FIG. 7 with reference to flowcharts.

  First, the control device 4 controls the second stage 14 to place each of the plurality of imaging elements 12 in each of the plurality of A regions in the imaging region 32 of the imaging optical system 18 (step S1). . That is, the control device 4 controls the second stage 14 so that the area A and the image sensor 12 have the positional relationship shown in FIG.

  After disposing the image sensor 12 in the area A, the control device 4 emits illumination light from the first illumination optical system 16 to illuminate the preparation 2. Then, an image of the preparation 2 is formed in the imaging region 32 by the imaging optical system 18.

  Each of the imaging elements 12 is arranged in each of the A regions, which are partial regions in the imaging region 32, and the preparation 2 image in the A region among the images of the preparation 2 formed in the imaging region 32. Information is acquired (step S2). Image information (image signal) in the area A acquired by each image sensor 12 is output to the control device 4. The control device 4 stores the image information (image signal) of the preparation 2 in the area A acquired by the image sensor 12 in a predetermined storage device.

  In the present embodiment, when the imaging device 12 is disposed in the imaging region 32 (in the region T), the optical sensor 13 is also disposed in the imaging region 32 (in the region T). The control device 4 performs an illumination operation using the first illumination optical system 16 and a detection operation using the optical sensor 13 in a state where the image sensor 12 is disposed in the imaging region 32. In addition, the control device 4 performs an operation of detecting the amount of light using the optical sensor 13 in parallel with the operation of acquiring image information using the image sensor 12.

  As shown in FIG. 5, when the image sensor 12 is disposed in the A region, the optical sensor 13 is disposed in each of the B region and the C region. The optical sensor 13 detects the amount of light (illuminance) in the B region and the C region that are in the imaging region 32 (in the region T) and different from the A region in which the image sensor 12 is disposed. Thus, in the present embodiment, when each of the imaging elements 12 is arranged in the A region and acquires image information in the A region, each of the optical sensors 13 is different from the A region in the B region and the C region. It arrange | positions in an area | region and detects the light quantity in B area | region and C area | region. In other words, the operation in which the image pickup element 12 acquires image information in the A region and the operation in which the optical sensor 13 acquires the light amounts in the B region and the C region different from the A region are executed simultaneously.

  In the present embodiment, the control device 4 uses each of the optical sensors 13 to simultaneously detect the light amounts in a plurality of different B regions and C regions.

  The detection result of each optical sensor 13 is output to the control device 4. The control device 4 stores the detection result of the optical sensor 13 in a predetermined storage device.

  The control device 4 controls the second stage 14 in order to acquire the image information in the B region after acquiring the image information in the A region by using the imaging element 12. The image pickup device 12 is arranged in the A region in the imaging region 32 and acquires the image information of the preparation 2, and is then arranged in the B region different from the A region by the movement of the second stage 14.

  Based on the detection result of the optical sensor 13, the control device 4 performs an operation of adjusting the amount of light incident on the imaging region 32 (B region) (step S3). In the present embodiment, the control device 4 detects the detection result of the optical sensor 13 so that the amount of light incident on the region B via the preparation 2 and the imaging optical system 18 becomes a predetermined optimum value. Based on the above, the amount of light incident on the imaging region 32 (B region) is adjusted.

  That is, in this embodiment, when acquiring the image information of the preparation 2 in the B area using the image sensor 12 arranged in the B area, the control device 4 enters the image sensor 12 arranged in the B area. The amount of light incident on the image formation region 32 (B region) is adjusted in advance so that the amount of light to be optimized is optimized.

  In the present embodiment, the control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 according to the optical characteristics (dynamic range) of the image sensor 12. Specifically, the control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 (B region) so that the amount of light incident on the B region falls within the dynamic range of the image sensor 12. To do. The dynamic range of the image sensor 12 is known based on, for example, a design value or an experiment, simulation, or the like for obtaining a dynamic range executed in advance. Based on the detection result of the optical sensor 13 and the known dynamic range of the image sensor 12, the control device 4 causes the light amount (illuminance) of light incident on the region B to fall within the dynamic range of the image sensor 12. The amount of light (illuminance) of light incident on the B region is adjusted.

  The amount of light incident on the imaging region 32 (B region) can be adjusted, for example, by adjusting the output of the first light source device 6. Alternatively, the first illumination optical system 16 is provided with a plurality of light transmission filters having different transmittances, and a predetermined light transmission filter capable of obtaining a target light amount is selected from the plurality of light transmission filters, and the selected light transmission filter is selected. The light transmissive filter is arranged on the optical path of the first illumination optical system 16 and the amount of illumination light emitted from the first illumination optical system 16 is adjusted to enter the imaging region 32 (B region). The amount of light can also be adjusted. In addition, a light transmission filter as described above may be disposed on the optical path of the imaging optical system 18.

  In the present embodiment, the control device 4 moves the imaging device 12 arranged in the A region to the B region, that is, when the imaging device 12 moves from the A region to the B region. The process for adjusting the amount of light incident on is started. In other words, the control device 4 executes a process for adjusting the light amount (illuminance) of the light incident on the B area prior to disposing the image sensor 12 in the B area. For example, the control device 4 controls the output value of the first light source device 6 in order to adjust the amount of light incident on the imaging region 32 when the image sensor 12 moves from the A region to the B region. Alternatively, the control device 4 selects the predetermined light transmission filter described above in order to adjust the amount of light incident on the imaging region 32 when the imaging device 12 moves from the A region to the B region, The selected optical filter is disposed on the optical path of the first illumination optical system 16 or the imaging optical system 18.

  As a result, the amount of light incident on the B region is optimally adjusted before the image sensor 12 is arranged in the B region, and thus before the operation of acquiring the image information of the preparation 2 in the B region is executed. .

  Note that the process of adjusting the amount of light incident on the imaging region 32 (B region) is not only performed when the image sensor 12 is moving from the A region to the B region, but also when the image sensor 12 is in the A region. May be executed when the image pickup device 12 is disposed in the A region after the operation of acquiring the image is completed. The process of adjusting the amount of light incident on the imaging region 32 (B region) is performed after the image sensor 12 is arranged in the B region, and the image sensor 12 acquires image information in the B region. It may be executed before In short, it is only necessary that the amount of light incident on the B region is optimally adjusted before the light is incident on the imaging element 12 arranged in the B region via the preparation 2 and the imaging optical system 8.

  A process for adjusting the amount of light incident on the B area is performed, and a process for arranging the image sensor 12 in the B area is performed, whereby an image sensor is provided for each of the B areas as shown in FIG. 12 is arranged. The control device 4 illuminates the slide 2 by emitting illumination light from the first illumination optical system 16 in a state where the image sensor 12 is arranged in the B region. Then, an image of the preparation 2 is formed in the imaging region 32 by the imaging optical system 18.

  Each of the imaging elements 12 is arranged in each of the B regions, which are partial regions in the imaging region 32, and among the images of the preparation 2 formed in the imaging region 32, the image of the preparation 2 in the B region. Information is acquired (step S4). Since the optimal amount of light is incident on the image sensor 12 arranged in the B area, the image sensor 12 can acquire the image information of the preparation 2 in the B area.

  Image information (image signal) in the B region acquired by each image sensor 12 is output to the control device 4. The control device 4 stores the image information (image signal) of the preparation 2 in the area B acquired by the image sensor 12 in a predetermined storage device.

  As shown in FIG. 6A, when the image sensor 12 is disposed in the B region, the optical sensor 13 is disposed in each of the A region and the D region. The optical sensor 13 detects the light amount (illuminance) in the A region and the D region that are in the imaging region 32 (in the region T) and different from the B region in which the imaging element 12 is disposed. Thus, in the present embodiment, when each of the imaging elements 12 is arranged in the B region and acquires image information in the B region, each of the optical sensors 13 is different from the B region in the A region and D. It arrange | positions in an area | region and detects the light quantity in A area | region and D area | region. In other words, the operation in which the image sensor 12 acquires image information in the B region and the operation in which the optical sensor 13 acquires the light amount in the A region and the D region different from the B region are executed simultaneously.

  In addition, the control device 4 uses each of the optical sensors 13 to simultaneously detect light amounts in a plurality of different A regions and D regions.

  The detection result of each optical sensor 13 is output to the control device 4. The control device 4 stores the detection result of the optical sensor 13 in a predetermined storage device.

  The control device 4 controls the second stage 14 in order to acquire the image information in the C region after acquiring the image information in the B region using the imaging element 12. The image sensor 12 is arranged in the B area in the imaging area 32 and acquires the image information of the preparation 2, and then arranged in the C area different from the B area by the movement of the second stage 14.

  Based on the detection result of the optical sensor 13, the control device 4 performs an operation of adjusting the amount of light incident on the imaging region 32 (C region) (step S5). The control device 4 forms an image based on the detection result of the optical sensor 13 so that the amount of light incident on the C region via the preparation 2 and the imaging optical system 18 becomes a predetermined optimum value. The amount of light incident on the region 32 (C region) is adjusted.

  That is, in this embodiment, when acquiring the image information of the preparation 2 in the C region using the image sensor 12 arranged in the C region, the control device 4 is incident on the image sensor 12 arranged in the C region. The amount of light incident on the imaging region 32 (C region) is adjusted in advance so that the amount of light to be optimized is optimized.

  In the present embodiment, the control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 according to the optical characteristics (dynamic range) of the image sensor 12. The control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 (C region) so that the amount of light incident on the C region falls within the dynamic range of the image sensor 12.

  In the present embodiment, the control device 4 starts processing for adjusting the amount of light incident on the imaging region 32 when the imaging device 12 moves from the B region to the C region. As a result, the amount of light incident on the C region is optimally adjusted before the image sensor 12 is arranged in the C region, and thus before the operation of acquiring the image information of the preparation 2 in the C region is executed. .

  The process for adjusting the amount of light incident on the imaging region 32 (C region) is not only performed when the image sensor 12 is moving from the B region to the C region, but also when the image sensor 12 is in the B region. May be executed when the image pickup device 12 is disposed in the C region after the operation of acquiring the image is completed. The process of adjusting the amount of light incident on the imaging region 32 (C region) is performed after the image sensor 12 is arranged in the C region, and the image sensor 12 acquires image information in the C region. It may be executed before

  A process for adjusting the amount of light incident on the C area is performed, and a process for arranging the image sensor 12 in the C area is performed, so that an image sensor is provided for each of the C areas as shown in FIG. 12 is arranged. The control device 4 illuminates the slide 2 by emitting illumination light from the first illumination optical system 16 in a state where the image sensor 12 is arranged in the C region. Then, an image of the preparation 2 is formed in the imaging region 32 by the imaging optical system 18.

  Each of the imaging elements 12 is disposed in each of the C regions, which are a part of the imaging region 32, and among the images of the preparation 2 formed in the imaging region 32, the image of the preparation 2 in the C region. Information is acquired (step S6). Since the optimal amount of light is incident on the image sensor 12 arranged in the C region, the image sensor 12 can acquire the image information of the preparation 2 in the C region in a good manner.

  The image information (image signal) in the C area acquired by each imaging element 12 is output to the control device 4. The control device 4 stores the image information (image signal) of the preparation 2 in the area C acquired by the image sensor 12 in a predetermined storage device.

  The control device 4 controls the second stage 14 in order to acquire the image information in the D region after acquiring the image information in the C region using the imaging element 12. The image pickup device 12 is arranged in the C region in the imaging region 32 and acquires the image information of the preparation 2, and then is arranged in the D region different from the C region by the movement of the second stage 14.

  The control device 4 performs an operation of adjusting the light amount of light incident on the imaging region 32 (D region) based on the detection result of the light amount of the D region using the optical sensor 13 performed in step S4 ( Step S7). The control device 4 forms an image based on the detection result of the optical sensor 13 so that the amount of light incident on the D region through the preparation 2 and the imaging optical system 18 becomes a predetermined optimum value. The amount of light incident on the region 32 (D region) is adjusted.

  That is, in this embodiment, when acquiring the image information of the preparation 2 in the D region using the image sensor 12 arranged in the D region, the control device 4 enters the image sensor 12 arranged in the D region. The amount of light incident on the imaging region 32 (D region) is adjusted in advance so that the amount of light to be optimized is optimized.

  The control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 according to the optical characteristics (dynamic range) of the image sensor 12. The control device 4 adjusts the amount of light (illuminance) incident on the imaging region 32 (D region) so that the amount of light incident on the D region falls within the dynamic range of the image sensor 12.

  The control device 4 starts processing for adjusting the amount of light incident on the imaging region 32 when the image sensor 12 moves from the C region to the D region. As a result, the amount of light incident on the D region is optimally adjusted before the image sensor 12 is arranged in the D region, and thus before the operation of acquiring the image information of the preparation 2 in the D region is executed. .

  Note that the process of adjusting the amount of light incident on the imaging region 32 (D region) is not only performed when the image sensor 12 is moving from the C region to the D region, but also when the image sensor 12 is in the C region. May be executed when the image pickup device 12 is disposed in the D region after the operation of acquiring the image is completed. The process of adjusting the amount of light incident on the imaging region 32 (D region) is performed after the image sensor 12 is arranged in the D region, and the image sensor 12 acquires image information in the D region. It may be executed before

  A process of adjusting the amount of light incident on the D area is executed, and a process of arranging the image sensor 12 in the D area is executed, so that an image sensor is provided in each of the D areas as shown in FIG. 12 is arranged. The control device 4 illuminates the preparation 2 by emitting illumination light from the first illumination optical system 16 in a state where the image sensor 12 is arranged in the D region. Then, an image of the preparation 2 is formed in the imaging region 32 by the imaging optical system 18.

  Each of the imaging elements 12 is arranged in each of the D regions, which are a part of the imaging region 32, and among the images of the preparation 2 formed in the imaging region 32, the image of the preparation 2 in the D region. Information is acquired (step S8). Since the optimal amount of light is incident on the image sensor 12 arranged in the D area, the image sensor 12 can acquire the image information of the preparation 2 in the D area.

  The image information (image signal) in the D area acquired by each image sensor 12 is output to the control device 4. The control device 4 stores the image information (image signal) of the preparation 2 in the D region acquired by the image sensor 12 in a predetermined storage device.

  Thus, the process of acquiring the image information of the preparation 2 in each of the A region, the B region, the C region, and the D region using the image sensor 12 is completed. The control device 4 performs image processing on the image information in each of the A region, the B region, the C region, and the D region acquired using the imaging element 12, thereby at least the region T of the preparation 2 including the sample S. Can be obtained. Further, the control device 4 can display the image on the display device 5.

  In the description using the flowchart of FIG. 7 as described above, the description of the process for detecting the amount of light incident on the A area, which is executed before acquiring the image information of the slide 2 in the A area, is omitted. However, before executing the process of acquiring image information in the A area, the optical sensor 13 is disposed in the A area, and the process of detecting the amount of light incident on the A area is executed. The control device 4 performs processing for adjusting the light amount of light incident on the A region based on the result of detecting the light amount of light incident on the A region, and then acquires the image information of the preparation 2 in the A region. (Step S2) is executed.

  As an example, in the present embodiment, as the imaging device 12 (CCD), the size (outer shape) of the light receiving surface is 6.4 × 4.8 mm, the pixel pitch is 5 μm, and the number of pixels is 1280 ×. 960 is used. The magnification of the imaging optical system 18 is 20 times. Thereby, image data having a pixel pitch of 0.25 μm can be acquired. The size (diameter) of the visual field of the imaging optical system 18 is 2.0 mm. In that case, the size (diameter) of the imaging region 32 is 40 mm.

  As described above, according to the present embodiment, the amount of light in the imaging region 32 can be detected accurately and efficiently using the optical sensor 13. Then, the imaging region 32 can be illuminated with a desired light amount by controlling the first light source device 6, the first illumination optical system 16, and the like based on the detection result.

  In the present embodiment, by arranging a plurality of small image pickup devices 12 and moving the image pickup devices 12 with respect to the image formation region 32, image data of the entire image formation region 32 can be acquired. Accordingly, it is possible to suppress an increase in the photographing time for acquiring the image data of the entire imaging region 32. When it is difficult to prepare a large image sensor that can collectively acquire image data of the entire imaging region 32 at a desired resolution (resolution), the imaging region 32 is divided into a plurality of imaging regions 32 as in this embodiment. It is effective to divide into small areas (A to D areas) and to photograph each of these small areas by using a plurality of small and high-speed imaging elements 12.

  In addition, it is preferable that the pixel pitch of the image sensor 12 is small in order to increase the definition of image data to be acquired. That is, it is preferable that the pixels of the image sensor 12 (CCD) are small. On the other hand, when the CCD pixel is small, the dynamic range of the image sensor 12 (CCD) may be narrowed. That is, when the image information of the preparation 2 is acquired using the imaging element 12 with a narrow dynamic range, the image information of the preparation 2 can be acquired well unless the amount of light incident on the imaging element 12 is adjusted accurately. It can be difficult.

  In the present embodiment, since the optical sensor 13 is provided in the vicinity of the image sensor 12 on the image plane side of the imaging optical system 18, the optical sensor 13 has an amount of light equivalent to the amount of light incident on the image sensor 12. Light enters. Therefore, the optical sensor 13 can accurately and efficiently detect the amount of light incident on the image sensor 12.

  For example, based on the output of the image sensor, the amount of light that can acquire image information satisfactorily (contains the dynamic range) is derived in advance, and the result is used to actually acquire image information with the image sensor. Although it is conceivable to adjust the amount of light, the number of steps increases and the processing time increases.

  According to the present embodiment, it is possible to efficiently derive the optimum light amount using the optical sensor 13. Further, it is possible to efficiently derive the optimum light amount while suppressing the complexity of the device configuration.

  And based on the detection result of the optical sensor 13, by adjusting the amount of light incident on the image sensor 12 so as to obtain an optimum amount of light according to the image sensor 12 (dynamic range of the image sensor 12), The image sensor 12 can acquire the image information of the preparation 2 in a favorable manner.

  Further, according to the present embodiment, since the image sensor 12 acquires the image information of the preparation 2 in each of the A area, the B area, the C area, and the D area, the image sensor 12 has the A area, the B area, and the C area. Prior to being arranged in the region and the D region, the optical sensor 13 is arranged in each of the A region, the B region, the C region, and the D region, and each of the A region, the B region, the C region, and the D region. The amount of light is detected. Therefore, the optical sensor 13 can accurately detect the amount of light incident on the image sensor 12 disposed in each of the A region, the B region, the C region, and the D region. Then, based on the detection result of the optical sensor 13, the amount of light incident on the image sensor 12 is adjusted so as to obtain an optimum amount of light corresponding to each of the A region, the B region, the C region, and the D region. Thus, in each of the A region, the B region, the C region, and the D region, the image sensor 12 can acquire the image information of the preparation 2 in a favorable manner. According to the present embodiment, for example, even when the preparation 2 (sample S) has a light transmittance distribution, the amount of light in each of the A region, the B region, the C region, and the D region is measured using the optical sensor 13. Since it is detected, it is possible to detect the amount of light reflecting the light transmittance distribution of the preparation 2 in each of the A region, the B region, the C region, and the D region. Therefore, using the detection result, the amount of light incident on each of the A region, the B region, the C region, and the D region is imaged in each of the A region, the B region, the C region, and the D region. The amount of light incident on the image sensor 12 can be adjusted so as to fall within the dynamic range of the element 12.

  Further, according to the present embodiment, since the optical sensor 13 is arranged in the image formation region 32 and in the region other than the image sensor 12, the region other than the image sensor 12 can be used effectively, and the image pickup is performed. The process of detecting the amount of light can be executed without affecting the process of acquiring image information using the element 12.

  Moreover, according to this embodiment, since the process which detects the light quantity which uses the optical sensor 13 is performed in parallel with the process which acquires the image information which uses the image pick-up element 12, processing efficiency can be improved. .

  In addition, according to the present embodiment, by providing a plurality of imaging elements 12, it is possible to acquire image data of the entire imaging region 32 while suppressing an increase in the number of photographing.

  Further, according to the present embodiment, by providing a plurality of optical sensors 13 (detection areas), it is possible to detect the amount of light corresponding to each of the plurality of A regions, B regions, C regions, and D regions, The amount of light incident on the imaging region 32 can be adjusted better. Moreover, the light quantity distribution (illuminance distribution) in the imaging region 32 can also be detected by the plurality of optical sensors 13. Then, by using the detection result, it is possible to derive an optimal amount of light that falls within the dynamic range of each of the image sensors 12 arranged in the imaging region 32.

  In the present embodiment, the case where the image sensor 12 is moved with respect to the imaging region 32 by moving the second stage 14 has been described as an example. However, the first stage 10 that supports the preparation 2 is provided. By moving, the image information of the slide 2 can be obtained by dividing the image information of the slide 2, and the image information obtained by dividing the image information can be processed. Further, both the first stage 10 and the second stage 14 may be moved.

Second Embodiment
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 8 is a schematic diagram illustrating an example of a microscope apparatus 3B according to the second embodiment. As shown in FIG. 8, the microscope apparatus 3 </ b> B includes a second stage 14 that can move on the image plane side of the imaging optical system 18. In the imaging region 32 of the imaging optical system 18, a reflecting member 41 having a reflecting surface 40 is disposed at a position adjacent to the imaging element 12.

  As in the first embodiment described above, the image sensor 12 is arranged at nine locations on the second stage 14. That is, the image sensor 12 is arranged in a matrix of 3 rows and 3 columns on the second stage 14.

  The reflecting member 41 is disposed in a predetermined positional relationship with respect to the image sensor 12 on the second stage 14. A plurality of reflecting members 41 are arranged on the second stage 14. Each of the reflection members 41 is arranged at a predetermined interval in the XY plane.

  The reflection member 41 is disposed at a position adjacent to the imaging element 12 in the imaging region 32. The reflection member 41 is disposed between the imaging elements 12 that are disposed at a predetermined interval. In the present embodiment, the reflecting member 41 is arranged at 18 positions on the second stage 14.

  That is, in the present embodiment, the reflecting member 41 is disposed on the second stage 14 instead of the optical sensor 13 described in the first embodiment. The plurality of reflecting members 41 can be arranged in the imaging region 32 at the same time.

  The reflecting surface 40 of the reflecting member 41 reflects the light emitted from the imaging optical system 18 in a direction inclined with respect to the optical axis of the imaging optical system 18. The light emitted from the imaging optical system 18 and incident on the reflecting surface 40 of the reflecting member 41 is reflected toward a position other than the imaging optical system 18.

  An optical sensor 130 capable of detecting the amount of light is disposed at a predetermined position with respect to the reflecting surface 40 of the reflecting member 41. A plurality of optical sensors 130 are arranged according to the plurality of reflecting surfaces 40 (reflecting members 41). In FIG. 8, some of the plurality of optical sensors 130 corresponding to the reflecting member 41 are illustrated for easy viewing of the drawing.

  In the present embodiment, the optical sensor 130 detects light emitted from the imaging optical system 18 and reflected by the reflecting surface 40 of the reflecting member 41. As in the first embodiment described above, the control device 4 adjusts the amount of light incident on the imaging region 32 based on the detection result of the amount of light detected by the optical sensor 13.

  Also in the present embodiment, the amount of light incident on the imaging region 32 can be detected accurately and efficiently. This embodiment is effective, for example, when it is difficult to dispose an optical sensor between the image sensors 12 on the second stage 14.

It is a figure which shows a microscope system in 1st Embodiment. It is a figure which shows the microscope apparatus which concerns on 1st Embodiment. It is a figure which shows a part of optical system which concerns on 1st Embodiment. 1 is a perspective view schematically showing a microscope apparatus according to a first embodiment. It is a figure which shows the positional relationship of the image pick-up element which concerns on 1st Embodiment, an optical sensor, and an imaging area | region. It is a figure for demonstrating the observation method using the microscope apparatus which concerns on 1st Embodiment. It is a flowchart for demonstrating the observation method using the microscope apparatus which concerns on 1st Embodiment. It is a perspective view which shows typically a part of microscope apparatus concerning 2nd Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Microscope system, 2 ... Preparation, 3 ... Front microscope apparatus, 4 ... Control apparatus, 6 ... 1st light source device, 10 ... 1st stage, 12 ... Image sensor, 13 ... Optical sensor, 14 ... 2nd stage, 16 DESCRIPTION OF SYMBOLS 1st illumination optical system, 18 ... Imaging optical system, 32 ... Imaging region, 40 ... Reflecting surface, 41 ... Reflecting member

Claims (18)

An imaging optical system;
An illumination device that illuminates the object plane of the imaging optical system;
An imaging device disposed in an imaging region of the imaging optical system;
A microscope apparatus comprising: a detection device that detects a light amount in a predetermined region other than the imaging element in the imaging region.   The microscope apparatus according to claim 1, wherein an illumination operation using the illumination device and a detection operation using the detection device are executed in a state where the imaging element is arranged in the imaging region.   The microscope apparatus according to claim 1, wherein the illumination device includes a control device that controls a light amount in the imaging region based on a detection result of the detection device.   The microscope apparatus according to claim 1, further comprising a control device that controls the illumination device based on a detection result of the detection device.   The microscope apparatus as described in any one of Claims 1-4 provided with the drive device which moves the said image pick-up element with respect to the said image formation area.   The microscope apparatus according to claim 5, wherein the imaging device acquires image information of an object plane of the imaging optical system at each of a plurality of positions in the imaging region.   The microscope apparatus according to claim 6, further comprising an image processing apparatus that processes image information acquired by the imaging element at each of the plurality of positions. A driving device for moving the image sensor relative to the imaging region;
The image sensor is arranged at a first position in the imaging region to acquire image information of an object plane of the imaging optical system, and is then arranged at a second position different from the first position. Get
The microscope apparatus according to any one of claims 1 to 3, wherein when the image sensor is disposed at the first position, the detection device detects a light amount in a predetermined region including the second position.   The microscope apparatus according to claim 8, wherein the illumination device is controlled when the imaging element moves from the first position to the second position.   The microscope apparatus according to claim 1, wherein a plurality of the imaging elements can be arranged in the imaging region at a predetermined interval.   The microscope device according to claim 1, wherein the detection device detects light quantities in a plurality of different predetermined regions.   The microscope apparatus according to claim 1, wherein at least a part of the detection device is disposed at a position adjacent to the imaging element in the imaging region. A reflective surface is provided at a position adjacent to the imaging element in the imaging region,
The microscope device according to claim 1, wherein the detection device detects light reflected by the reflecting surface. An observation method using a microscope device,
Arranging an imaging device in an imaging region of an imaging optical system of the microscope apparatus;
Illuminating the object plane of the imaging optical system with illumination light;
Detecting the amount of light in a predetermined region other than the image sensor within the imaging region;
Adjusting an amount of light in the imaging region based on the detected result.   The observation method according to claim 14, wherein the imaging device is moved with respect to the imaging region, and acquires image information of an object plane of the imaging optical system at each of a plurality of positions in the imaging region. The image sensor is arranged at a first position in the imaging region to acquire image information of an object plane of the imaging optical system, and is then arranged at a second position different from the first position. Get
The observation method according to claim 14 or 15, wherein when the image sensor is arranged at the first position, a light amount in a predetermined region including the second position is detected.   The observation method according to claim 16, wherein the amount of light in the imaging region is adjusted when the imaging device moves from the first position to the second position.   The observation method according to any one of claims 14 to 17, wherein light amounts in a plurality of different predetermined regions are simultaneously detected.

Images