JP2009010154A - Device and method for sticking sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for sticking a sheet and a sticking method preventing the cutting of a release sheet while preventing a spacer from peeling from the release sheet when an adhesive sheet temporarily attached to the band-shaped release sheet is stuck on an adherend by using a peeling plate. <P>SOLUTION: The device 10 for sticking the sheet has a sticking unit 20 with first and second delivery means 12 and 13 imparting a delivery force to a raw fabric R, the peeling plate 15 for peeling the adhesive sheet S from the peeling sheet RL and a press roller 17 sticking the adhesive sheet S by pressing it against a ring frame RF and an adherent such as a wafer W and a supporting means 21 supporting the adherend. When the adhesive sheet S is positioned, a sticking front-end region SE is formed on the adhesive sheet S by retracting the peeling plate 15 to an intermediate stopping place through a direct-acting motor 16. A holding between the press roller 17 and the ring frame RF of the sticking front-end region SE is detected, and the peeling plate 15 is fitted so as to be retracted up to a shunting place in this case. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and in particular, when a strip-shaped original fabric is folded back with a peel plate, and when an adhesive sheet is peeled from a release sheet constituting the original fabric, unintentional cutting of the release sheet is performed. The present invention relates to a sheet sticking apparatus and a sticking method that can be avoided.

Semiconductor wafers (hereinafter, simply referred to as “wafers”) are integrated (mounted) on a ring frame via an adhesive sheet, for example, in consideration of handling properties when performing various processes. Yes.
Patent Document 1 discloses a configuration in which an original sheet in which an adhesive sheet is temporarily attached to a strip-shaped release sheet is used, and the original sheet is folded back with a peel plate so that the adhesive sheet is peeled off from the release sheet and attached to the ring frame. Has been.

  7 includes an adhesive sheet S formed by removing a part of the base sheet BS temporarily attached to the strip-shaped release sheet RL, and spacers S1 formed on both sides in the width direction. The original fabric R is shown. When sticking using such an original fabric R, the ring frame RF and the wafer W constituting the adherend are supported on the table T, and the original fabric R is folded at the tip of the peel plate P. By feeding out, the adhesive sheet S is peeled from the release sheet RL, and the peeled adhesive sheet S is stuck to the ring frame RF and the wafer W via the press roller PR.

JP 2005-159044 A

In the sheet sticking apparatus shown in Patent Document 1 and FIG. 7, the release sheet RL is always strongly abutted by the tip of the peel plate P because it has a structure in which the original fabric is folded at an acute angle via the peel plate P. Bent into a folded state, that is, a squeezed state. Therefore, there is a disadvantage that unintentional cutting of the release sheet RL is caused depending on the folding angle of the peel plate P, the material and thickness of the release sheet RL, the tension applied to the original fabric R, and the like.
Moreover, in the peeling method using the peel plate P, the edge becomes sharper and the folding direction becomes an acute angle. However, in this case, the peeling sheet RL is easily cut instead. is there. Therefore, it can be said that there is a contradictory relationship between ease of peeling and prevention of cutting of the release sheet.

  In addition, when the original fabric R shown in FIG. 7 is used, when the adhesive sheet S is continuously peeled by the peel plate P, the spacer S1 is peeled from the release sheet RL and hangs downward. May occur, and the hanging portion is sandwiched between the press roller PR and the table T or the ring frame RF, resulting in a malfunction.

[Object of invention]
The present invention has been devised paying attention to such inconveniences, and its purpose is to cut the release sheet when the adhesive sheet is peeled off from the release sheet by folding the original fabric with a peel plate. An object of the present invention is to provide a sheet sticking device that can prevent the above.
Another object of the present invention is to provide a sheet sticking device that can eliminate the inconvenience that the spacer is peeled off from the release sheet RL when the original fabric having the spacer is used. .

In order to achieve the above-mentioned object, the present invention feeds an original fabric on which an adhesive sheet is temporarily attached to a strip-like release sheet at a predetermined interval, and peels the adhesive sheet from the release sheet and affixes it to an adherend. In the sheet pasting device,
A feeding means for applying a feeding force to the original fabric; a peeling means for peeling the adhesive sheet from the release sheet; and a pressing means for pressing the adhesive sheet peeled off from the release sheet to the adherend. An affixing unit; a support means for supporting the adherend and being relatively movable with the affixing unit; and a control means for controlling the respective means.
The peeling means comprises a peel plate that folds the original fabric at a preset initial position and peels the adhesive sheet from the release sheet, a detecting means for detecting the adhesive sheet, and an advancing / retreating means for moving the peel plate back and forth. ,
The control means employs a configuration in which the adhesive sheet is positioned via the detection means, and the advance / retreat means is controlled in a predetermined manner so that the peel plate is retracted to peel the adhesive sheet.

  In the present invention, the peel plate moves to an intermediate stop position that is retracted by a predetermined amount from the initial position, thereby forming a sticking tip region on the adhesive sheet, and between the pressing means and the adherend. It is preferable to adopt a configuration in which the sticking tip region is sandwiched and then moved to a predetermined retreat position.

  The feeding means is configured to control the feeding of the original fabric so as to eliminate the looseness of the original fabric when the peel plate moves in the retreating direction.

Further, the feeding means includes a first feeding means arranged on the upstream side in the original fabric feeding direction with respect to the peel plate, and a second feeding means arranged on the downstream side in the original fabric feeding direction,
When the peel plate retracts to the retracted position, the second feeding means winds up the original fabric, and when the peel plate returns to the initial position, the second feeding means performs a reverse operation. The structure is adopted.

  In addition, the present invention can be particularly adapted to a case where an original fabric having strip-shaped spacers that are flush with the adhesive sheet on both sides in the width direction of the release sheet.

Furthermore, the present invention feeds the original fabric on which the adhesive sheet is temporarily attached to the strip-like release sheet at a predetermined interval, and affixes it to the adherend via the pressing means while peeling the adhesive sheet from the release sheet. In the sheet pasting method,
When the adhesive sheet is peeled from the release sheet via the peel plate, after the adhesive sheet is detected and the adhesive sheet is positioned, the peel plate is moved to an intermediate stop position retracted by a predetermined amount from the initial position. Forming a sticking tip region on the adhesive sheet,
Next, after the sticking tip region is sandwiched between the pressing means and the adherend, the peel plate is retracted to a predetermined retracted position, and the original fabric is removed in synchronization with the movement of the adherend. The method of sticking an adhesive sheet on the adherend by drawing it out is adopted.

The present invention employs a configuration in which when the detecting means detects a predetermined position of the adhesive sheet, the advancing / retreating means is controlled in a predetermined manner so that the peel plate is retracted and the adhesive sheet is peeled off. Therefore, the risk of cutting the release sheet can be reduced.
Further, the peel plate moves further from the intermediate stop position to a predetermined retreat position on condition that the sticking tip region is sandwiched between the pressing means and the adherend, so that the peel plate contacts the release sheet. Time can be reduced as much as possible, and the cutting factor of the release sheet can be eliminated.
Furthermore, since the feeding means adopts a structure that does not cause the looseness of the original fabric even when the peel plate is retracted, there is no inconvenience that the adhesive sheet is not peeled off.
Further, the first and second feeding means constitutes the feeding means, and when the peel plate returns to the initial position from the retracted position, the second feeding means reverses so that the peel plate removes the release sheet. It can weaken the action.
Furthermore, in the case where the original fabric has a strip-shaped spacer, the above configuration eliminates the inconvenience that the spacer is peeled off from the release sheet.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view of a sheet sticking apparatus 10 according to the present embodiment, and FIG. 2 shows a schematic perspective view of an original fabric R used in the sheet sticking apparatus 10. Here, as shown in FIG. 2, the raw fabric R is a strip-shaped release sheet RL, an adhesive sheet S temporarily attached to the release sheet RL at a predetermined interval, and both sides of the release sheet RL in the width direction. In addition, a spacer having a spacer S <b> 1 continuous in the length direction of the release sheet RL at the same plane position as the adhesive sheet S is employed. Between the adhesive sheet S and the spacer S1, a sheet punching portion S2 is formed. The sheet punching portion S2 cuts the base sheet BS that forms the adhesive sheet S and the spacer S1 corresponding to the sheet punching portion S2. It can be formed by forming and removing it.

  As shown in FIG. 1 (A), the sheet sticking device 10 includes a support roller 11 for a raw fabric R wound in a roll shape, and first and second feeding means for giving a repetitive output to the raw fabric R. Second feeding means 12, 13; a peel plate 15 as a peeling means for peeling the adhesive sheet S from the release sheet RL; a linear motion motor 16 as an advancing / retreating means for moving the peel plate 15 back and forth; and the adhesive sheet S A press roller 17 constituting a pressing means for pressing and adhering to the ring frame RF and the wafer W as an adherend, and a take-up roller 18 for winding the release sheet RL after the adhesive sheet S is peeled off by a motor (not shown). And a supporting unit 21 that supports the ring frame RF and the wafer W and is movable relative to the pasting unit 20. And it is configured to Luo respective means and a control means (not shown) to a predetermined control.

  The first feeding means 12 includes a driving roller 24 connected to the output shaft of the motor M1 and a pinch roller 23 that sandwiches the original fabric R between the driving roller 24. The second feeding means 13 includes The driving roller 25 is connected to the output shaft of the motor M 2, and the pinch roller 27 sandwiches the release sheet RL between the driving roller 25. The motor M2 in this embodiment is of a type that can rotate forward and reverse.

  The peel plate 15 has a substantially square shape in plan view with a width larger than the width of the original fabric R, and as shown in FIG. 1 (B), the front surface is directed toward the tip (left end in FIG. 1 (A)). It has a shape that is provided in a narrow shape. A sensor 29 as a detecting means is provided at the front end side of the peel plate 15 so as not to protrude from the upper surface of the peel plate 15. The sensor 29 detects the adhesive sheet S and outputs a signal. ing.

  A peel plate 15 is attached to a slider (not shown) of the linear motion motor 16, and by the operation of the linear motion motor 16, the peel plate 15 is in an initial position close to the lower outer periphery of the press roller 17 ( FIG. 1 (A)), a position retracted by a predetermined amount from the position, that is, an intermediate stop position for forming the sticking tip region SE on the adhesive sheet S as shown in FIG. 3, and FIG. As shown, it is provided so as to be able to advance and retreat between a retracted position completely separated from the original fabric R. The entire pasting unit 20 including the linear motor 16 is supported by a frame (not shown).

  The support means 21 includes a table 30 that sucks and supports the ring frame RF and the wafer W, a slide table 32 that supports the table 30 so as to be movable up and down via a linear motion motor 31, and the slide table 32. 1 includes a guide rail 33 that is movably guided in the left-right direction, a drive means (not shown) that moves the slide table 32, a feed screw shaft, and the like.

  Next, the sheet sticking method in this embodiment is demonstrated.

  First, at the time of the work of winding the original fabric R, the peel plate 15 is moved backward to the retracted position (see FIG. 5). Then, the original fabric R supported by the support roller 11 is pulled out by a predetermined length, and is passed between the driving roller 24 and the pinch roller 23 and between the driving roller 25 and the pinch roller 27, and the lead end of the original fabric R is taken up. Fix to the roller 18.

  When the power is turned on, the linear motor 16 is driven and the peel plate 15 is set to the initial position. When the automatic operation mode is selected by an operation panel (not shown), the first and second feeding means 12 and 13 are driven to feed the original fabric R. At this time, when the sensor 29 detects a predetermined position of the adhesive sheet S, it outputs a signal to a control means (not shown). Upon receiving this signal, the control means controls and positions the motor M2 so that the front end of the adhesive sheet S is located at the lowermost part of the press roller, as shown in FIG.

  Next, when the ring frame RF and the wafer W are transferred onto the table 30 via a transfer arm or the like (not shown), the table 30 is moved below the press roller 17 as shown in FIG. While moving so that the left side in the radial direction of the frame RF is located, the peel plate 15 is moved back to the intermediate stop position, and the sticking tip region SE is formed on the adhesive sheet S (see FIG. 3). At this time, in order to prevent the front end of the adhesive sheet S from drooping, air assist is performed in which air is blown toward the press roller 17 from below the adhesive sheet S. When the peel plate 15 is retracted, the winding operation is performed in parallel by the drive roller 25, so that the original fabric R between the peel plate 15 and the drive roller 25 is not loosened.

  Next, as shown in FIG. 4, when the table 30 is raised via the linear motor 31, the sticking tip region SE is sandwiched between the press roller 17 and the ring frame RF, and this is detected by a sensor (not shown). Further, under the control of a control means (not shown), the peel plate 15 is retracted to the retracted position via the linear motor 16, and the tip of the peel plate 15 and the release sheet RL are kept in a non-contact state ( (See FIG. 5).

  Then, as shown in FIG. 6, with the peel plate 15 retracted to the retracted position, the unwinding of the original fabric R and the take-up of the release sheet RL are performed, and the table 30 is synchronized with the drawing. By moving to the middle left side, the adhesive sheet S is attached to the ring frame RF and the wafer W while receiving a pressing force by the press roller 17. At the end of the pasting, the rear end of the adhesive sheet S loses the support of the release sheet RL so that it does not come into contact with the adherend before being pressed. Air assist to blow air is performed.

  When the table 30 passes the press roller 17 to the left side in the figure, the adhesive sheet S is completely pasted, and the ring frame RF and the wafer W are transferred to the next process via a transfer arm (not shown). Then, a new ring frame RF and wafer W are transferred onto the table 30.

  After the adhesive sheet S is attached to the ring frame RF and the wafer W in this way, the peel plate 15 returns to the initial position via the linear motion motor 16. At this time, the driving roller 25 of the second feeding means 13 rotates in the reverse direction, and the unwinding operation of the original fabric R is performed in order to weaken the action of squeezing the release sheet RL by the peel plate 15. Each time it is detected that the next adhesive sheet S has reached the peeling position, the above-described operation is repeated, and the adhesive sheets S are sequentially attached to the ring frame RF and the wafer W.

Therefore, according to such an embodiment, in the sticking operation of the adhesive sheet S, the peel plate 15 contacts the release sheet RL only when the sticking tip region SE is formed on the adhesive sheet S, and thereafter the release sheet RL. Since the control unit controls the retreat position so as not to contact the RL, the state where the release sheet RL is squeezed at the tip of the peel plate 15 can be reduced as much as possible. The effect that the cutting which does not perform can be prevented effectively is acquired.
Moreover, even if the original fabric R is of the type having the spacer S1, there is no inconvenience that the spacer S1 is peeled off from the release sheet RL by the peel plate 15, so that the malfunction caused by it can be surely eliminated. Can do.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

  For example, in the above-described embodiment, the case where the raw fabric R of the type in which the sheet extraction portion S2 is provided between the adhesive sheet S and the spacer S1 is illustrated and described, but the present invention is limited to this. Rather, it may be a raw material that is not provided with the sheet punching portion S2 and is simply provided with a notch for forming the adhesive sheet S in the base sheet BS, and only the adhesive sheet S is present on the release sheet RL. It is also possible to target the original fabric temporarily attached at a predetermined interval.

  The initial position and the intermediate stop position of the peel plate 15 are not limited. The distance between the centers of the press roller 17 and the driving roller 24, the length of the adhesive sheet in the feeding direction, that is, the adhesive sheet S in the above embodiment. It can be determined according to the diameter and the like.

  Furthermore, in the said embodiment, while the table 30 of the support means 21 rose to the press roller 17 side, and it was set as the structure which moves to the left-right direction in the figure with respect to the sticking unit 20, the support means 21 side is made into a stop state. On the other hand, it is good also as a structure which can move the sticking unit 20 side, and the structure which those both move can also be employ | adopted.

  Further, the sensor 29 as the detecting means may be provided outside instead of being provided on the peel plate 15.

  In addition to the press roller 17, the pressing means may be a blade member, an air spray, a vacuum grid having an adhesive sheet suction surface, or the like.

  In addition, the adherend is not limited to the ring frame RF or the wafer W, and can be a variety of objects such as industrial parts to which an adhesive sheet such as a label is affixed, and household goods.

  Further, the control means is not limited as long as it can control the operation of a personal computer, a sequencer or the like.

(A) is a schematic front view of the sheet sticking apparatus which shows the state which has a peel plate in an initial position, (B) is a schematic perspective view which shows the structure by which the sensor was provided in the peel plate. The schematic perspective view of the original fabric applied to this embodiment. The schematic front view which shows the state which the peel plate retracted | retreated to the intermediate stop position and formed the sticking front-end | tip area | region. The schematic front view which shows the state by which the sticking front-end | tip area | region was pinched | interposed between the press roller and the ring frame. The schematic front view which shows the state which the peel plate retracted to the retracted position. The schematic front view which shows the intermediate state in which an adhesive sheet is affixed on a ring frame and a wafer. The schematic perspective view for demonstrating the conventional problem.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 12 1st feeding means 13 2nd feeding means 15 Peel plate (peeling means)
17 Press roller (pressing means)
20 sticking unit 21 support means 29 sensor (detection means)
16 Linear motor (advance / retreat means)
R Original fabric RL Release sheet RF Ring frame (Substrate)
S Adhesive Sheet S1 Spacer SE Affixing Tip Area W Semiconductor Wafer (Substrate)

Claims (6)

In the sheet sticking apparatus for peeling the adhesive sheet from the release sheet and sticking it to the adherend, while feeding out the original fabric on which the adhesive sheet is temporarily attached to the strip-like release sheet at a predetermined interval,
A feeding means for applying a feeding force to the original fabric; a peeling means for peeling the adhesive sheet from the release sheet; and a pressing means for pressing the adhesive sheet peeled off from the release sheet to the adherend. An affixing unit; a support means for supporting the adherend and being relatively movable with the affixing unit; and a control means for controlling the respective means.
The peeling means comprises a peel plate that folds the original fabric at a preset initial position and peels the adhesive sheet from the release sheet, a detecting means for detecting the adhesive sheet, and an advancing / retreating means for moving the peel plate back and forth. ,
The control means performs positioning of the adhesive sheet via the detection means, and controls the advance / retreat means to retreat the peel plate to separate the adhesive sheet. .   The peel plate moves to an intermediate stop position that is retracted by a predetermined amount from the initial position, thereby forming a sticking tip region on the adhesive sheet, and the sticking tip region between the pressing means and the adherend. The sheet sticking apparatus according to claim 1, wherein the sheet sticking apparatus moves to a predetermined retreat position after being sandwiched.   The sheet sticking apparatus according to claim 1 or 2, wherein the feeding means controls the feeding of the original fabric so as to eliminate the looseness of the original fabric when the peel plate moves in a retreating direction. The feeding means includes a first feeding means arranged on the upstream side in the original fabric feeding direction with respect to the peel plate, and a second feeding means arranged on the downstream side in the original fabric feeding direction,
When the peel plate is retracted to the retracted position, the second feeding means winds up the original fabric, and when the peel plate returns to the initial position, the second feeding means is reversed. The sheet sticking device according to claim 1, 2, or 3.   The sheet sticking apparatus according to any one of claims 1 to 4, wherein the sheet sticking apparatus is intended for a raw fabric having a strip-shaped spacer that is in the same plane position as the adhesive sheet on both sides in the width direction of the release sheet. In the sheet sticking method of sticking to the adherend through the pressing means while peeling the adhesive sheet from the release sheet while feeding the original fabric on which the adhesive sheet is temporarily attached to the strip-like release sheet at a predetermined interval,
When the adhesive sheet is peeled from the release sheet via the peel plate, after the adhesive sheet is detected and the adhesive sheet is positioned, the peel plate is moved to an intermediate stop position retracted by a predetermined amount from the initial position. Forming a sticking tip region on the adhesive sheet,
Next, after the sticking tip region is sandwiched between the pressing means and the adherend, the peel plate is retracted to a predetermined retracted position, and the original fabric is removed in synchronization with the movement of the adherend. A sheet sticking method comprising sticking an adhesive sheet to the adherend by unwinding.

Images