JP2008544259A - 圧電薄膜共振器(fbar)に基づく気相化学センサ - Google Patents
圧電薄膜共振器(fbar)に基づく気相化学センサ Download PDFInfo
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 7
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
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- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
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- G01N2291/00—Indexing codes associated with group G01N29/00
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- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
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- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
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Abstract
【選択図】なし
Description
Claims (19)
- 一の第1の第1の圧電薄膜共振器(FBAR)デバイスと、
一のターゲット化学物質選択層によりコーティングされる一の第2のFBARデバイスと、
前記第1のFBARデバイスおよび前記第2のFBARデバイスの一の差分周波数出力を決定することにより、前記ターゲット化学物質の存在を決定する手段と、
を含む装置。 - 前記第1のFBARデバイスおよび前記第2のFBARデバイスは、それぞれ、
一の増幅器と、
前記増幅器の出力と入力との間に接続される一のFBARを有する一のフィードバックループと、
を含む、請求項1に記載の装置。 - 前記ターゲット化学物質の存在を示すデータを一の遠隔地に送信することにより、一の領域の一の毒性マップを生成する一の無線デバイスをさらに含む、請求項1に記載の装置。
- 一のターゲット化学物質選択層によりそれぞれコーティングされ、一の異なる化学物質を検出する複数の前記第2のFBARデバイスをさらに含む、請求項1に記載の装置。
- 前記第1のFBARデバイスおよび前記第2のFBARデバイスの一の差分周波数出力を決定するための前記手段は、
前記第1のFBARデバイスおよび前記第2のFBARデバイスから一の出力信号を受信することにより、一の結合信号を出力する一のコンバイナと、
前記結合信号を受信し、かつ、一の差分出力信号を出力する一のローパスフィルタと、
前記差分周波数を決定する一の周波数カウンタと、
を含む、請求項1に記載の装置。 - 前記第1のFBARデバイスおよび前記第2のFBARデバイスの一の差分周波数出力を決定するための前記手段は、
複数の前記第2のFBARデバイスからの信号を多重化する一のマルチプレクサと、
前記第1のFBARデバイスおよび前記マルチプレクサから一の出力信号を受信することにより、一の結合信号を出力する一のコンバイナと、
前記結合信号を受信し、かつ、一の差分出力信号を出力する一のローパスフィルタと、
前記差分周波数を決定する一の周波数カウンタと、
を含む、請求項1に記載の装置。 - 前記第1のFBARデバイスおよび前記第2のFBARデバイスの一の差分周波数出力を決定するための前記手段は、
前記第1のFBARデバイスの前記出力を分割する一のスプリッタと、
前記スプリッタからの一の信号と、複数の前記第2のFBARデバイスのそれぞれからの一の信号とをそれぞれ受信し、一の結合信号をそれぞれ出力する複数のコンバイナと、
前記コンバイナの1つにそれぞれ接続される複数のローパスフィルタと、
一の差分周波数をそれぞれ決定する複数の周波数カウンタと、
を含む請求項1に記載の装置。 - 方法であって、
一のFBAR発振器における一の圧電薄膜共振器を一のターゲット化学物質選択層によりコーティングすることと、
前記コーティングされたFBAR発振器と一の参照非コーティングFBAR発振器との間の一の差分周波数を決定することと、
前記差分周波数から、前記ターゲット化学物質の存在を決定することと、
を含む方法。 - 前記ターゲット化学物質の存在を示す情報を一の遠隔地に送信する一の無線デバイスを用いることをさらに含む、請求項8に記載の方法。
- 一の地理的領域に分散される消費者製品中に複数の無線デバイスを配置することをさらに含む、請求項9に記載の方法。
- 前記遠隔地において記複数の無線デバイスからの情報を得ることと、
前記地理的領域の一の毒性マップを作成することと、
をさらに含む、請求項10に記載の方法。 - 異なる化学物質を対象とすべく、複数のFBAR発振器における一の圧電薄膜共振器(FBAR)を一のターゲット化学物質選択層によりコーティングすることをさらに含む、請求項8に記載の方法。
- 複数のFBAR発振器から少なくとも1つを選択するよう一のマルチプレクサをプログラムすることを含む、請求項 に記載の方法。
- システムであって、
一のターゲット化学物質選択層によりコーティングされる一の圧電薄膜共振器(FBAR)をそれぞれ含む複数の無線デバイスと、
前記複数の無線デバイスの位置における一のターゲット化学物質の存在を示す前記複数の無線デバイスから情報を受信する一の遠隔レシーバ位置と、
を含むシステム。 - 前記情報は、一の毒性マップを生成するのに用いられる、請求項14に記載のシステム。
- 前記複数の無線デバイスは、測位システムを含む、請求項14に記載のシステム。
- 前記複数の無線デバイスは、携帯電話を含む、請求項16に記載のシステム。
- 前記複数の無線デバイスは、パーソナル携帯情報機器を含む、請求項16に記載のシステム。
- 前記複数の無線デバイスの少なくとも1つは、一の異なるターゲット化学物質選択層をそれぞれ含むFBARデバイスアレイを含む、請求項14に記載のシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/174,059 US20070000305A1 (en) | 2005-06-30 | 2005-06-30 | Gas phase chemical sensor based on film bulk resonators (FBAR) |
PCT/US2006/025755 WO2007005701A2 (en) | 2005-06-30 | 2006-06-29 | Gas phase chemical sensor based on film bulk acoustic resonators (fbar) |
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Publication Number | Publication Date |
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JP2008544259A true JP2008544259A (ja) | 2008-12-04 |
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JP2008517238A Pending JP2008544259A (ja) | 2005-06-30 | 2006-06-29 | 圧電薄膜共振器(fbar)に基づく気相化学センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070000305A1 (ja) |
EP (1) | EP1896841A2 (ja) |
JP (1) | JP2008544259A (ja) |
KR (1) | KR20080027288A (ja) |
TW (1) | TW200711300A (ja) |
WO (1) | WO2007005701A2 (ja) |
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JP2012532436A (ja) * | 2009-07-06 | 2012-12-13 | クアルコム,インコーポレイテッド | バッテリ内のセンサ |
JP2015040793A (ja) * | 2013-08-22 | 2015-03-02 | オリンパス株式会社 | ガスセンサ |
JP2018115927A (ja) * | 2017-01-17 | 2018-07-26 | 太陽誘電株式会社 | センサ回路およびセンシング方法 |
JP2018536157A (ja) * | 2015-10-28 | 2018-12-06 | コーボ ユーエス,インコーポレイティド | バルク音波(baw)共振器と基板を貫通する流体ビアを有するセンサー装置 |
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JP2012532436A (ja) * | 2009-07-06 | 2012-12-13 | クアルコム,インコーポレイテッド | バッテリ内のセンサ |
US8723525B2 (en) | 2009-07-06 | 2014-05-13 | Qualcomm Incorporated | Sensor in battery |
JP2015040793A (ja) * | 2013-08-22 | 2015-03-02 | オリンパス株式会社 | ガスセンサ |
JP2018536157A (ja) * | 2015-10-28 | 2018-12-06 | コーボ ユーエス,インコーポレイティド | バルク音波(baw)共振器と基板を貫通する流体ビアを有するセンサー装置 |
JP2018115927A (ja) * | 2017-01-17 | 2018-07-26 | 太陽誘電株式会社 | センサ回路およびセンシング方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200711300A (en) | 2007-03-16 |
US20070000305A1 (en) | 2007-01-04 |
EP1896841A2 (en) | 2008-03-12 |
KR20080027288A (ko) | 2008-03-26 |
WO2007005701A3 (en) | 2007-06-07 |
WO2007005701A2 (en) | 2007-01-11 |
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