JP2008537281A - Ac励起マイクロキャビティ放電デバイス及び方法 - Google Patents
Ac励起マイクロキャビティ放電デバイス及び方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/09—Hollow cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/025—Hollow cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/38—Dielectric or insulating layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32596—Hollow cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
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- Analytical Chemistry (AREA)
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- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Micromachines (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Electroluminescent Light Sources (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
【選択図】図2
Description
この説明で、および何れかの添付請求項において用いる場合、“層”は、単一のステップまたは複数のステップ(例えば、堆積)で形成することができる。1つの層または構造は、他の構造または層に直接的に隣接させることなく、または接触させることなく、別の構造または層の上に形成し、または重ねることができる。
上述したデバイス構造のいずれかが形成された後、該デバイスは、真空システムにより排気することができ、また、真空下で加熱して、該構造を脱気してもよい。その後、該デバイス(または、デバイスからなるアレイ)内のマイクロキャビティは、所望のガスまたは蒸気、あるいは、ガスと蒸気の混合物で埋め戻すことができる(ステップ1170)。このため、一般的には、陽極接合、積層またはエポキシを用いた封止等の様々な周知のプロセスのうちの1つにより、(選択した材料物質により)該デバイスまたはアレイを封止することが望ましい。マイクロプラズマ放電は、上記電極間に、(適当な大きさの)時間依存性(AC、パルス状DC等)励起電位を印加することにより、該キャビティ内で点火することができる。
Claims (26)
- 導体、あるいは、導電層で被覆された半導体または誘電体のうちの1つであり、基板(210、1020)の第1の面に開口するマイクロキャビティを含む前記基板と、
前記基板の第1の面と、前記マイクロキャビティの内面とを実質的に覆う誘電体層(1020、220)と、
第1の電極を形成する前記基板の第2の面に結合された電気接点(225、1010)と、
前記第1及び第2の電極への時間依存性電位の印加のために、前記誘電体層に対して遠位に配置された第2の電極と、
を備えるマイクロ放電デバイス。 - 前記誘電体層は、第1の誘電体からなる層と、第2の誘電体からなる層とを含む、請求項1に記載のデバイス。
- 前記マイクロキャビティは、前記基板の第2の面まで及んでいる、請求項1に記載のデバイス。
- 前記基板は半導体である、請求項1に記載のデバイス。
- 前記基板は、金属及びポリマーの一方である、請求項1に記載のデバイス。
- 前記第2の電極は、誘電体を被覆したスクリーンである、請求項1に記載のデバイス。
- 前記第2の電極は、第2の誘電体層で被覆されている、請求項1に記載のデバイス。
- 前記マイクロキャビティは、断面が台形、矩形及び円筒形のうちの1つである、請求項1に記載のデバイス。
- 前記基板は、誘電体基板を備え、第1及び第2の面を含み、各面が導電層で被覆されており、それによって、前記第1及び第2の電極を形成し、
前記デバイスは、前記第1及び第2の電極への時間依存性電位の印加時に、マイクロ放電が生成されるように、前記マイクロキャビティ内に含まれた放電ガスまたは蒸気、またはガスと蒸気の混合物をさらに備える、請求項1に記載のデバイス。 - 前記誘電体層は、前記第1の面上で、前記導電層及びマイクロキャビティを実質的に覆う、請求項9に記載のマイクロ放電デバイス。
- 前記マイクロキャビティは、前記基板の第2の面上の導電層まで及んでいる、請求項9に記載のマイクロ放電デバイス。
- 前記デバイスはフレキシブルである、請求項9に記載のマイクロ放電デバイス。
- 前記基板は、前記第1の面及び第2の面を有するフレキシブル誘電体基板であって、前記第1の面が導電的に被覆されており、それによって前記第1の電極を形成し、前記第2の面が前記第1の面に実質的に平行であり、前記基板が、前記基板の第2の面に開口しているマイクロキャビティを有するフレキシブル誘電体基板と、
前記第1及び第2の電極への時間依存性電位の印加のために、前記第2の面の上に配置された第2の電極と、
前記電位の印加時に、マイクロ放電をサポートするために前記マイクロキャビティ内に含まれた放電ガスまたは蒸気、あるいは、ガスと蒸気の混合物と、
を備える、請求項1に記載のマイクロ放電デバイス。 - マイクロ放電デバイスを製造する方法であって、
導電性基板、半導電性基板、または、導電層を有する誘電体を備える基板であって、前記基板が、少なくとも1つのマイクロキャビティを含み、該マイクロキャビティが、前記基板の第1の面に対する開口を含む前記基板を形成することと、
電気接点を、前記基板の第2の面に接続して、第1の電極を形成することと、
前記基板上、および前記マイクロキャビティ内に第1の誘電体層を堆積することと、
前記マイクロキャビティの開口、および前記第1の誘電体層に対して遠位に配置された第2の電極を設けることと、
前記マイクロキャビティを、特定の放電ガスまたは蒸気、あるいはガスと蒸気の混合物で充填することと、
を備える方法。 - 前記マイクロキャビティが、前記基板の第2の面まで及んでいる、請求項14に記載の方法。
- 第2の誘電体層を堆積することをさらに含み、前記第2の誘電体層が、前記第2の電極を実質的に覆っている、請求項14に記載の方法。
- 前記第1の誘電体層上に第2の誘電体層を堆積することと、
光放射が所定の波長で増加するように、前記第1及び第2の誘電体層の材料物質及び厚さを選定することと、
をさらに含む、請求項14に記載の方法。 - 前記第1の誘電体層上に第2の誘電体層を堆積することと、
光放射が所定の波長で増加するように、前記第1及び第2の誘電体層の材料物質及び厚さを選定することと、
をさらに含む、請求項14に記載の方法。 - 前記第2の電極を設けることは、前記第1の誘電体層上に導体を堆積して、前記第2の電極を形成することを含む、請求項14に記載の方法。
- 前記第2の電極を覆う第2の誘電体層を形成することをさらに含む、請求項19に記載の方法。
- 前記第2の電極を設けることは、スクリーンを設けることを含む、請求項14に記載の方法。
- 少なくとも1つのマイクロキャビティを前記基板内に形成することをさらに含む、請求項14に記載の方法。
- 少なくとも1つのマイクロキャビティがウェットエッチングによって形成される、請求項14に記載の方法。
- 少なくとも1つのマイクロキャビティがマイクロマシニングによって形成される、請求項14に記載の方法。
- 前記基板が半導体である、請求項14に記載の方法。
- 前記基板は、金属層及びポリマーの一方である、請求項14に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/042,228 US7477017B2 (en) | 2005-01-25 | 2005-01-25 | AC-excited microcavity discharge device and method |
US11/042,228 | 2005-01-25 | ||
PCT/US2006/002932 WO2007086857A2 (en) | 2005-01-25 | 2006-01-24 | Ac-excited microcavity discharge device and method |
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JP2008537281A true JP2008537281A (ja) | 2008-09-11 |
JP5301838B2 JP5301838B2 (ja) | 2013-09-25 |
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US (1) | US7477017B2 (ja) |
EP (1) | EP1849180A4 (ja) |
JP (1) | JP5301838B2 (ja) |
KR (1) | KR20070101350A (ja) |
CN (1) | CN101310353A (ja) |
WO (1) | WO2007086857A2 (ja) |
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US20080290799A1 (en) | 2008-11-27 |
US7477017B2 (en) | 2009-01-13 |
WO2007086857A2 (en) | 2007-08-02 |
JP5301838B2 (ja) | 2013-09-25 |
CN101310353A (zh) | 2008-11-19 |
EP1849180A2 (en) | 2007-10-31 |
WO2007086857A3 (en) | 2008-08-14 |
EP1849180A4 (en) | 2009-04-29 |
KR20070101350A (ko) | 2007-10-16 |
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