JP2008514125A - キャビテーションしきい値の特性決定および制御のための方法および装置 - Google Patents
キャビテーションしきい値の特性決定および制御のための方法および装置 Download PDFInfo
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- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
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- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0877—Liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01N2291/00—Indexing codes associated with group G01N29/00
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- G01N2291/028—Material parameters
- G01N2291/02836—Flow rate, liquid level
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
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Abstract
【選択図】 図2
Description
a)ある一定量の処理流体を特定の出力レベルの音響エネルギーに曝露することと、
b)一定期間にわたり流体からの光子出力を測定することと、
c)光子出力が所望のレベルから逸脱すると、略所望のレベルに光子出力に戻す修正ステップを開始することと、
の各ステップを備える。
Claims (10)
- 流体中のキャビテーションの特性を決定する装置であって、
流体を保持する容器と、
音響エネルギーを生成する音響エネルギー発生手段であって、前記音響エネルギー発生手段は前記流体が前記容器に保持される間に、前記流体に前記音響エネルギーを伝達するように配置されている、音響エネルギー発生手段と、
キャビテーションが前記音響エネルギーにより前記流体中に発生すると、前記容器内に保持される前記流体中のキャビテーションを検出するキャビテーション検出手段と、
を備える、装置。 - 前記キャビテーション検出手段は光検出手段を備える、請求項1に記載の装置。
- 前記光検出手段は光電子増倍電管を備える、請求項2に記載の装置。
- 前記キャビテーション検出手段は圧力測定手段を備える、請求項1に記載の装置。
- 前記圧力測定手段はハイドロフォンを備える、請求項4に記載の装置。
- 前記音響エネルギー発生手段は圧電性結晶を備える、請求項1に記載の装置。
- 音響エネルギーを吸収するバッフル手段をさらに備える、請求項1に記載の装置。
- 前記音響エネルギー発生手段に可変量の電力を供給する電力発生手段と、
前記光検出手段からの前記流体から放出される前記光のデータを収集するコンピュータ手段と、
をさらに備える、請求項1に記載の装置。 - 流体中の前記キャビテーションを制御する方法であって
a)ある一定量の流体が音響エネルギーを生成する音響エネルギー発生手段を備える容器内に保持される間に、前記ある一定量の流体を特定の出力レベルおよび周波数で音響エネルギーに曝露することであって、前記音響エネルギー発生手段は前記流体が前記容器に保持される間に前記流体に前記音響エネルギーを伝達するように配置され、前記容器はさらに、キャビテーションが前記音響エネルギーにより前記流体に発生するときに、前記容器内に保持される流体からの光子出力を測定する光検出手段を備えることと、
b)一定期間にわたり前記流体からの前記光子出力を測定することと、
c)前記光子出力が所望のレベルから逸脱すると、前記光子出力を略前記所望のレベルに戻す修正ステップを開始することと、
を備える方法。 - 前記修正ステップは、
前記流体の前記温度を変化させることと、
前記流体中の気体または他の化学物質の前記濃度を変化させることと、
前記処理を停止すること、
前記特定の出力レベルを変更すること、
前記出力レベルの前記周波数を変更すること、
からなる群から選択される、請求項9に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61080504P | 2004-09-17 | 2004-09-17 | |
PCT/US2005/033180 WO2006034040A2 (en) | 2004-09-17 | 2005-09-16 | Method and apparatus for cavitation threshold characterization and control |
Related Child Applications (1)
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JP2012156337A Division JP2012255791A (ja) | 2004-09-17 | 2012-07-12 | キャビテーションしきい値の特性決定および制御のための方法および装置 |
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JP2008514125A true JP2008514125A (ja) | 2008-05-01 |
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JP2007532503A Withdrawn JP2008514125A (ja) | 2004-09-17 | 2005-09-16 | キャビテーションしきい値の特性決定および制御のための方法および装置 |
JP2012156337A Pending JP2012255791A (ja) | 2004-09-17 | 2012-07-12 | キャビテーションしきい値の特性決定および制御のための方法および装置 |
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JP2012156337A Pending JP2012255791A (ja) | 2004-09-17 | 2012-07-12 | キャビテーションしきい値の特性決定および制御のための方法および装置 |
Country Status (8)
Country | Link |
---|---|
US (2) | US7443079B2 (ja) |
EP (1) | EP1800355B1 (ja) |
JP (2) | JP2008514125A (ja) |
KR (1) | KR101125352B1 (ja) |
CN (1) | CN101019245B (ja) |
AT (1) | ATE493642T1 (ja) |
DE (1) | DE602005025665D1 (ja) |
WO (1) | WO2006034040A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007333566A (ja) * | 2006-06-15 | 2007-12-27 | Shimizu Corp | ガスキャビテーション試験方法および装置 |
JP2013096937A (ja) * | 2011-11-04 | 2013-05-20 | Siltronic Ag | 洗浄装置、測定方法および校正方法 |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7210354B2 (en) * | 1997-06-16 | 2007-05-01 | Puskas William L | Sensing system for measuring cavitation |
US7336019B1 (en) | 2005-07-01 | 2008-02-26 | Puskas William L | Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound |
US8075695B2 (en) * | 1996-08-05 | 2011-12-13 | Puskas William L | Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound |
US20060086604A1 (en) * | 1996-09-24 | 2006-04-27 | Puskas William L | Organism inactivation method and system |
US20080047575A1 (en) * | 1996-09-24 | 2008-02-28 | Puskas William L | Apparatus, circuitry, signals and methods for cleaning and processing with sound |
JP2006088154A (ja) * | 2004-09-21 | 2006-04-06 | Interuniv Micro Electronica Centrum Vzw | 過渡的なキャビテーションを制御する方法及び装置 |
US8858805B2 (en) * | 2005-01-25 | 2014-10-14 | Robert Edward Vago | Method and device for removal of ammonia and related contaminants from water |
US7402805B1 (en) * | 2005-08-22 | 2008-07-22 | The United States Of America As Represented By The Secretary Of The Navy | Device for the in-situ measurement of acoustically stimulated bioluminescence |
US20080022774A1 (en) * | 2006-07-28 | 2008-01-31 | International Business Machines Corporation | Imaging thin film structures by scanning acoustic microscopy |
US20080163890A1 (en) * | 2007-01-10 | 2008-07-10 | Applied Materials, Inc. | Tunable megasonics cavitation process using multiple transducers for cleaning nanometer particles without structure damage |
DE502007000707D1 (de) * | 2007-08-24 | 2009-06-18 | Bandelin Electronic Gmbh & Co | Vorrichtung und Verfahren zur qualitativen Bestimmung der Kavitationsenergie von Ultraschall in Behältern |
US8196536B1 (en) * | 2008-01-10 | 2012-06-12 | Lawrence Harbin | Apparatus to reduce skin friction drag on a marine vessel |
US8677918B2 (en) * | 2008-01-10 | 2014-03-25 | Lawrence Harbin | Marine vessel having reduced skin friction drag |
US7976684B2 (en) * | 2008-08-09 | 2011-07-12 | Francisco Rivera Ferrer | Jacketed ultrasound system |
JP5526118B2 (ja) * | 2011-12-26 | 2014-06-18 | ジルトロニック アクチエンゲゼルシャフト | 超音波洗浄方法 |
DE102012201539A1 (de) * | 2012-02-02 | 2013-08-08 | Siemens Aktiengesellschaft | Gewinnen von Daten über einen Zustand einer Flüssigkeit |
US8893634B2 (en) * | 2012-04-27 | 2014-11-25 | Lawrence Harbin | Self-powered slip plate to reduce skin-friction drag on a marine vessel |
JP5872382B2 (ja) * | 2012-05-24 | 2016-03-01 | ジルトロニック アクチエンゲゼルシャフトSiltronic AG | 超音波洗浄方法 |
JP5894858B2 (ja) * | 2012-05-24 | 2016-03-30 | ジルトロニック アクチエンゲゼルシャフトSiltronic AG | 超音波洗浄方法 |
CN105027201A (zh) * | 2013-03-14 | 2015-11-04 | 酷兰斯公司 | 唱片清洁器 |
DE102013014539B4 (de) * | 2013-09-03 | 2018-12-27 | Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt | Gerät und Verfahren zur Messung einer Kavitationsstärke in einem flüssigen Medium |
US9817315B2 (en) * | 2014-03-13 | 2017-11-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method for supplying and dispensing bubble-free photolithography chemical solutions |
EP3151967A2 (en) * | 2014-06-09 | 2017-04-12 | Ascent Bio-Nano Technologies, Inc. | System for manipulation and sorting of particles |
RU2688883C2 (ru) * | 2014-08-26 | 2019-05-22 | Павел Михайлович Гребеньков | Акустический детектор текучей среды и способ его применения |
US9850750B1 (en) * | 2016-06-16 | 2017-12-26 | Baker Hughes, A Ge Company, Llc | Sonoluminescence spectroscopy for real-time downhole fluid analysis |
JP6853584B2 (ja) * | 2016-08-19 | 2021-03-31 | 国立大学法人 香川大学 | 光学特性測定装置及び光学特性測定方法 |
FR3057180B1 (fr) | 2016-12-12 | 2018-10-12 | Constellium Issoire | Procede d'amelioration du mouillage d'une surface d'un substrat solide par un metal liquide |
FR3061836B1 (fr) * | 2017-01-17 | 2021-06-04 | Gil Ching | Dispositif et procede de nettoyage et/ou de decontamination d’aliments par des ondes acoustiques de haute frequence |
US20180238646A1 (en) * | 2017-02-23 | 2018-08-23 | Larry Baxter | Methods For Negating Deposits Using Cavitation Induced Shock Waves |
RU2700284C1 (ru) * | 2019-03-11 | 2019-09-16 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Оренбургский государственный университет" | Устройство для регистрации интенсивности кавитации |
RU2759428C2 (ru) * | 2020-04-03 | 2021-11-12 | Федеральное государственное бюджетное научное учреждение Уфимский федеральный исследовательский центр Российской академии наук | Лабораторный реактор для ультразвуковой обработки с регистрацией люминесценции в растворах и суспензиях |
CN113324913B (zh) * | 2021-05-19 | 2022-06-21 | 西安交通大学 | 基于激振器的变压器油空化阈值的测定装置及方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01116418A (ja) * | 1987-10-30 | 1989-05-09 | Yokogawa Medical Syst Ltd | キャビテーション検出装置 |
JPH09184825A (ja) * | 1995-12-12 | 1997-07-15 | Lucent Technol Inc | 音響セル |
JPH11211664A (ja) * | 1998-01-28 | 1999-08-06 | Shokuhin Sangyo Denshi Riyou Gijutsu Kenkyu Kumiai | ソノルミネッセンスプローブ |
JP2000028587A (ja) * | 1998-07-15 | 2000-01-28 | Toray Ind Inc | 気泡検出器の評価方法、評価装置、および気泡検出器、並びにそれを利用した人工透析装置 |
WO2002005465A1 (en) * | 2000-07-10 | 2002-01-17 | L-Tech Corporation | Method and device for measuring cavitation |
JP2004521341A (ja) * | 2001-03-12 | 2004-07-15 | サントル ナショナル ドゥ ラ ルシエルシュ シアンティフィック ー セーエヌエルエス | 音ルミネセンスによる光子の生成方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3443797A (en) | 1965-11-26 | 1969-05-13 | Branson Instr | Instrument for measuring cavitation intensity in a liquid |
US3647387A (en) | 1970-03-19 | 1972-03-07 | Stanford Research Inst | Detection device |
US5367497A (en) | 1993-08-12 | 1994-11-22 | Marschall Richard A | Extended frequency range hydrophone |
US5436874A (en) * | 1993-11-17 | 1995-07-25 | Martin Marietta Corporation | Method and apparatus for sensing acoustic signals in a liquid |
US5659173A (en) * | 1994-02-23 | 1997-08-19 | The Regents Of The University Of California | Converting acoustic energy into useful other energy forms |
US5525041A (en) * | 1994-07-14 | 1996-06-11 | Deak; David | Momemtum transfer pump |
US5982801A (en) * | 1994-07-14 | 1999-11-09 | Quantum Sonic Corp., Inc | Momentum transfer apparatus |
US7210354B2 (en) * | 1997-06-16 | 2007-05-01 | Puskas William L | Sensing system for measuring cavitation |
US8075695B2 (en) * | 1996-08-05 | 2011-12-13 | Puskas William L | Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound |
WO1999034858A1 (en) * | 1998-01-12 | 1999-07-15 | Georgia Tech Research Corporation | Assessment and control of acoustic tissue effects |
JP2000088638A (ja) | 1998-09-16 | 2000-03-31 | Agency Of Ind Science & Technol | 光ファイバーを用いたソノルミネッセンスプローブ |
DE69937747T2 (de) * | 1998-10-28 | 2008-12-04 | Covaris, Inc., Woburn | Vorrichtung und verfahren zur kontrolle einer akustischen behandlung |
US7687039B2 (en) * | 1998-10-28 | 2010-03-30 | Covaris, Inc. | Methods and systems for modulating acoustic energy delivery |
GB9826936D0 (en) | 1998-12-09 | 1999-09-15 | British Aerospace | A baffle for a liquid tank |
US20020134402A1 (en) * | 2000-01-21 | 2002-09-26 | Madanshetty Sameer I. | Article produced by acoustic cavitation in a liquid insonification medium |
US6655922B1 (en) | 2001-08-10 | 2003-12-02 | Rockwell Automation Technologies, Inc. | System and method for detecting and diagnosing pump cavitation |
DE10244387A1 (de) | 2002-09-24 | 2004-04-01 | Dornier Medtech Systems Gmbh | Verfahren zum Prüfen der Funktionseigenschaften eines Kavitation erzeugenden akustischen Geräts |
US7380975B2 (en) * | 2005-01-18 | 2008-06-03 | Impulse Devices, Inc. | Hydraulic actuated cavitation chamber with integrated fluid rotation system |
US20080299177A1 (en) * | 2007-06-06 | 2008-12-04 | Biovaluation & Analysis, Inc. | Supramolecular Complexes for Use in Acoustically Mediated Intracellular Drug Delivery in vivo |
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2005
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- 2005-09-16 DE DE200560025665 patent/DE602005025665D1/de active Active
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- 2012-07-12 JP JP2012156337A patent/JP2012255791A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01116418A (ja) * | 1987-10-30 | 1989-05-09 | Yokogawa Medical Syst Ltd | キャビテーション検出装置 |
JPH09184825A (ja) * | 1995-12-12 | 1997-07-15 | Lucent Technol Inc | 音響セル |
JPH11211664A (ja) * | 1998-01-28 | 1999-08-06 | Shokuhin Sangyo Denshi Riyou Gijutsu Kenkyu Kumiai | ソノルミネッセンスプローブ |
JP2000028587A (ja) * | 1998-07-15 | 2000-01-28 | Toray Ind Inc | 気泡検出器の評価方法、評価装置、および気泡検出器、並びにそれを利用した人工透析装置 |
WO2002005465A1 (en) * | 2000-07-10 | 2002-01-17 | L-Tech Corporation | Method and device for measuring cavitation |
JP2004521341A (ja) * | 2001-03-12 | 2004-07-15 | サントル ナショナル ドゥ ラ ルシエルシュ シアンティフィック ー セーエヌエルエス | 音ルミネセンスによる光子の生成方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007333566A (ja) * | 2006-06-15 | 2007-12-27 | Shimizu Corp | ガスキャビテーション試験方法および装置 |
JP2013096937A (ja) * | 2011-11-04 | 2013-05-20 | Siltronic Ag | 洗浄装置、測定方法および校正方法 |
Also Published As
Publication number | Publication date |
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US20090049917A1 (en) | 2009-02-26 |
WO2006034040A2 (en) | 2006-03-30 |
ATE493642T1 (de) | 2011-01-15 |
EP1800355A2 (en) | 2007-06-27 |
US20060061225A1 (en) | 2006-03-23 |
EP1800355B1 (en) | 2010-12-29 |
US7443079B2 (en) | 2008-10-28 |
EP1800355A4 (en) | 2008-02-20 |
CN101019245A (zh) | 2007-08-15 |
JP2012255791A (ja) | 2012-12-27 |
KR101125352B1 (ko) | 2012-03-27 |
CN101019245B (zh) | 2010-12-15 |
DE602005025665D1 (de) | 2011-02-10 |
WO2006034040A3 (en) | 2006-06-01 |
KR20070072875A (ko) | 2007-07-06 |
US7683525B2 (en) | 2010-03-23 |
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