JP2008509424A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2008509424A5 JP2008509424A5 JP2007525729A JP2007525729A JP2008509424A5 JP 2008509424 A5 JP2008509424 A5 JP 2008509424A5 JP 2007525729 A JP2007525729 A JP 2007525729A JP 2007525729 A JP2007525729 A JP 2007525729A JP 2008509424 A5 JP2008509424 A5 JP 2008509424A5
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- chamber
- forming element
- chamber forming
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 24
- 238000005096 rolling process Methods 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002991 molded plastic Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/915,868 | 2004-08-09 | ||
| US10/915,868 US6991213B2 (en) | 2003-12-30 | 2004-08-09 | Dual diaphragm valve |
| PCT/US2005/028235 WO2006020620A1 (en) | 2004-08-09 | 2005-08-09 | Modified dual diaphragm pressure sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008509424A JP2008509424A (ja) | 2008-03-27 |
| JP2008509424A5 true JP2008509424A5 (https=) | 2011-10-13 |
| JP5073493B2 JP5073493B2 (ja) | 2012-11-14 |
Family
ID=35219283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007525729A Expired - Fee Related JP5073493B2 (ja) | 2004-08-09 | 2005-08-09 | 圧力を感知するための装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6991213B2 (https=) |
| EP (1) | EP1778978A1 (https=) |
| JP (1) | JP5073493B2 (https=) |
| WO (1) | WO2006020620A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7517201B2 (en) * | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
| US20070045128A1 (en) * | 2005-08-19 | 2007-03-01 | Honeywell International Inc. | Chlorine dioxide sensor |
| US7505110B2 (en) * | 2006-03-14 | 2009-03-17 | International Business Machines Corporation | Micro-electro-mechanical valves and pumps |
| US20070234785A1 (en) * | 2006-03-30 | 2007-10-11 | Timothy Beerling | System and method for using a flexible membrane for controlling fluid flow in a microfluidic circuit |
| US7841385B2 (en) * | 2006-06-26 | 2010-11-30 | International Business Machines Corporation | Dual-chamber fluid pump for a multi-fluid electronics cooling system and method |
| CA2703801A1 (en) * | 2006-11-03 | 2008-05-08 | Mcgill University | Electrical microvalve and method of manufacturing thereof |
| NL2005673C2 (en) | 2010-11-11 | 2012-05-14 | Badotherm Proces Instr B V | Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly. |
| CN102966520B (zh) * | 2012-11-07 | 2016-04-06 | 广州市番禺奥迪威电子有限公司 | 一种压电泵 |
| WO2018027108A1 (en) * | 2016-08-05 | 2018-02-08 | Marsh Stephen Alan | Micro pressure sensor |
| DE102018112065A1 (de) * | 2018-05-18 | 2019-11-21 | Memetis Gmbh | Ventil mit Aktuator aus einer Formgedächtnislegierung in flacher Geometrie |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60253944A (ja) * | 1984-05-31 | 1985-12-14 | Shimadzu Corp | 圧力センサおよびその製造方法 |
| JPH0726887B2 (ja) * | 1986-05-31 | 1995-03-29 | 株式会社堀場製作所 | コンデンサマイクロフオン型検出器用ダイアフラム |
| US4754365A (en) * | 1987-06-15 | 1988-06-28 | Fischer & Porter Company | Differential pressure transducer |
| JP2517467B2 (ja) * | 1990-10-05 | 1996-07-24 | 山武ハネウエル株式会社 | 静電容量式圧力センサ |
| DE4119955C2 (de) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniatur-Betätigungselement |
| US5325880A (en) * | 1993-04-19 | 1994-07-05 | Tini Alloy Company | Shape memory alloy film actuated microvalve |
| US5671905A (en) * | 1995-06-21 | 1997-09-30 | Hopkins, Jr.; Dean A. | Electrochemical actuator and method of making same |
| US5941501A (en) * | 1996-09-06 | 1999-08-24 | Xerox Corporation | Passively addressable cantilever valves |
| US5971355A (en) * | 1996-11-27 | 1999-10-26 | Xerox Corporation | Microdevice valve structures to fluid control |
| US6682500B2 (en) * | 1998-01-29 | 2004-01-27 | David Soltanpour | Synthetic muscle based diaphragm pump apparatuses |
| DE69836836T2 (de) * | 1998-11-06 | 2007-06-28 | Honeywell, Inc., Minneapolis | Elektrostatisch betätigte pumpenarray |
| US6179586B1 (en) * | 1999-09-15 | 2001-01-30 | Honeywell International Inc. | Dual diaphragm, single chamber mesopump |
| US6568286B1 (en) * | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6520477B2 (en) * | 2001-02-01 | 2003-02-18 | William Trimmer | Micro pump |
| JP4296728B2 (ja) * | 2001-07-06 | 2009-07-15 | 株式会社デンソー | 静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体 |
| GB0119481D0 (en) * | 2001-08-09 | 2001-10-03 | Casella Cel Ltd | Personal air sampling system and pump for use therein |
| US6729856B2 (en) * | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
-
2004
- 2004-08-09 US US10/915,868 patent/US6991213B2/en not_active Expired - Fee Related
-
2005
- 2005-08-09 EP EP05784436A patent/EP1778978A1/en not_active Withdrawn
- 2005-08-09 JP JP2007525729A patent/JP5073493B2/ja not_active Expired - Fee Related
- 2005-08-09 WO PCT/US2005/028235 patent/WO2006020620A1/en not_active Ceased
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8308452B2 (en) | Dual chamber valveless MEMS micropump | |
| JP5073493B2 (ja) | 圧力を感知するための装置 | |
| JP4378617B2 (ja) | 微小電気機械センサー | |
| JP2008509424A5 (https=) | ||
| US20050047967A1 (en) | Microfluidic component providing multi-directional fluid movement | |
| US20140290373A1 (en) | Polymer layer system pressure sensor device, and polymer layer system pressure sensor method | |
| CN101263302A (zh) | 非对称双隔膜泵 | |
| JP4702815B2 (ja) | 低い圧力差のもとで流速を制限するための装置 | |
| US6901807B1 (en) | Positive and negative pressure sensor | |
| US7100453B2 (en) | Modified dual diaphragm pressure sensor | |
| US6886410B1 (en) | Modified dual diaphragm pressure sensor | |
| US20090064790A1 (en) | Microreactor Glass Diaphragm Sensors | |
| WO2008039710A2 (en) | Self calibrating dual diaphragm pressure sensor | |
| US20230288278A1 (en) | Pressure sensing | |
| JP4993345B2 (ja) | 静電容量型圧力センサ | |
| US20240158222A1 (en) | MEMS Device for Interaction with Fluids | |
| US12058211B2 (en) | Fluid molecule system handled by artificial intelligence internet of things | |
| KR101948113B1 (ko) | 탄성도 측정 장치 | |
| US12577098B2 (en) | MEMS device for interaction with fluids | |
| CN223284878U (zh) | 按键开关及键盘 | |
| CN119895242A (zh) | 压力传感器和压力确定方法 | |
| EP1636557A1 (en) | A pressure indicator | |
| KR20110122626A (ko) | 고분자 구동기를 포함하는 미세 밸브 구조체 및 랩온어칩 모듈 | |
| JP2007303410A (ja) | マイクロポンプの構造 |