JP5073493B2 - 圧力を感知するための装置 - Google Patents

圧力を感知するための装置 Download PDF

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Publication number
JP5073493B2
JP5073493B2 JP2007525729A JP2007525729A JP5073493B2 JP 5073493 B2 JP5073493 B2 JP 5073493B2 JP 2007525729 A JP2007525729 A JP 2007525729A JP 2007525729 A JP2007525729 A JP 2007525729A JP 5073493 B2 JP5073493 B2 JP 5073493B2
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JP
Japan
Prior art keywords
diaphragm
forming element
chamber forming
chamber
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007525729A
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English (en)
Japanese (ja)
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JP2008509424A (ja
JP2008509424A5 (https=
Inventor
ワン，ツ−ユ
カブズ，ユージン・アイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2008509424A publication Critical patent/JP2008509424A/ja
Publication of JP2008509424A5 publication Critical patent/JP2008509424A5/ja
Application granted granted Critical
Publication of JP5073493B2 publication Critical patent/JP5073493B2/ja
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Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)
JP2007525729A 2004-08-09 2005-08-09 圧力を感知するための装置 Expired - Fee Related JP5073493B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/915,868 2004-08-09
US10/915,868 US6991213B2 (en) 2003-12-30 2004-08-09 Dual diaphragm valve
PCT/US2005/028235 WO2006020620A1 (en) 2004-08-09 2005-08-09 Modified dual diaphragm pressure sensor

Publications (3)

Publication Number Publication Date
JP2008509424A JP2008509424A (ja) 2008-03-27
JP2008509424A5 JP2008509424A5 (https=) 2011-10-13
JP5073493B2 true JP5073493B2 (ja) 2012-11-14

Family

ID=35219283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007525729A Expired - Fee Related JP5073493B2 (ja) 2004-08-09 2005-08-09 圧力を感知するための装置

Country Status (4)

Country Link
US (1) US6991213B2 (https=)
EP (1) EP1778978A1 (https=)
JP (1) JP5073493B2 (https=)
WO (1) WO2006020620A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070045128A1 (en) * 2005-08-19 2007-03-01 Honeywell International Inc. Chlorine dioxide sensor
US7505110B2 (en) * 2006-03-14 2009-03-17 International Business Machines Corporation Micro-electro-mechanical valves and pumps
US20070234785A1 (en) * 2006-03-30 2007-10-11 Timothy Beerling System and method for using a flexible membrane for controlling fluid flow in a microfluidic circuit
US7841385B2 (en) * 2006-06-26 2010-11-30 International Business Machines Corporation Dual-chamber fluid pump for a multi-fluid electronics cooling system and method
CA2703801A1 (en) * 2006-11-03 2008-05-08 Mcgill University Electrical microvalve and method of manufacturing thereof
NL2005673C2 (en) 2010-11-11 2012-05-14 Badotherm Proces Instr B V Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly.
CN102966520B (zh) * 2012-11-07 2016-04-06 广州市番禺奥迪威电子有限公司 一种压电泵
WO2018027108A1 (en) * 2016-08-05 2018-02-08 Marsh Stephen Alan Micro pressure sensor
DE102018112065A1 (de) * 2018-05-18 2019-11-21 Memetis Gmbh Ventil mit Aktuator aus einer Formgedächtnislegierung in flacher Geometrie

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253944A (ja) * 1984-05-31 1985-12-14 Shimadzu Corp 圧力センサおよびその製造方法
JPH0726887B2 (ja) * 1986-05-31 1995-03-29 株式会社堀場製作所 コンデンサマイクロフオン型検出器用ダイアフラム
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
DE4119955C2 (de) * 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5671905A (en) * 1995-06-21 1997-09-30 Hopkins, Jr.; Dean A. Electrochemical actuator and method of making same
US5941501A (en) * 1996-09-06 1999-08-24 Xerox Corporation Passively addressable cantilever valves
US5971355A (en) * 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US6682500B2 (en) * 1998-01-29 2004-01-27 David Soltanpour Synthetic muscle based diaphragm pump apparatuses
DE69836836T2 (de) * 1998-11-06 2007-06-28 Honeywell, Inc., Minneapolis Elektrostatisch betätigte pumpenarray
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6520477B2 (en) * 2001-02-01 2003-02-18 William Trimmer Micro pump
JP4296728B2 (ja) * 2001-07-06 2009-07-15 株式会社デンソー 静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体
GB0119481D0 (en) * 2001-08-09 2001-10-03 Casella Cel Ltd Personal air sampling system and pump for use therein
US6729856B2 (en) * 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces

Also Published As

Publication number Publication date
US20050139797A1 (en) 2005-06-30
JP2008509424A (ja) 2008-03-27
US6991213B2 (en) 2006-01-31
EP1778978A1 (en) 2007-05-02
WO2006020620A1 (en) 2006-02-23

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