JP2008503876A - 双安定小型弁 - Google Patents
双安定小型弁 Download PDFInfo
- Publication number
- JP2008503876A JP2008503876A JP2007516630A JP2007516630A JP2008503876A JP 2008503876 A JP2008503876 A JP 2008503876A JP 2007516630 A JP2007516630 A JP 2007516630A JP 2007516630 A JP2007516630 A JP 2007516630A JP 2008503876 A JP2008503876 A JP 2008503876A
- Authority
- JP
- Japan
- Prior art keywords
- bistable
- movable part
- drive surface
- actuator
- miniature valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K2099/0069—Bistable microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F2007/068—Electromagnets; Actuators including electromagnets using printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/16—Rectilinearly-movable armatures
- H01F7/1638—Armatures not entering the winding
Abstract
【解決手段】 双安定小型弁は、可動部品と、開及び閉状態の間で可動部品を制御可能に切り替えるために静電気的、磁気的、機械的に可動部品に結合するアクチュエータと、構造的な支持を与えるケーシングとを含む。可動部品は、弁の管内に可動自在に設置された駆動表面300と、可動部品の開及び閉状態に機械的な安定性を与える駆動表面に取り付けられた双安定要素とを含む。双安定要素は駆動表面の対辺の中間点に取り付けられた1組の弾力性座屈梁302,304として実現される。任意に、その端点で駆動表面に取り付けられ、その中間点で駆動表面に取り付けられる弾力性支持梁306,308を含んでも良い。
【選択図】図3
Description
Claims (20)
- 流体を運ぶための管と、
流体が前記管を通って流れることを許容する開状態及び流体が前記管を通って流れることを阻止する閉状態にする可動部品と、
前記可動部品を前記開状態及び前記閉状態の間で制御可能に切り替えるために前記可動部品に結合されたアクチュエータと、
前記管と、前記可動部品と、前記アクチュエータとに構造的な支持を与えるケーシングとを含み、
前記可動部品は、
前記管内に可動自在に配置された駆動表面と、
前記可動部品の前記開状態及び前記閉状態に機械的な安定性を与えるために前記駆動表面に取り付けられた双安定要素を含むことを特徴とする双安定小型弁。 - 前記可動部品は前記駆動表面に取り付けられたシール要素を含むことを特徴とする請求項1に記載の双安定小型弁。
- 前記管は流体シール要素を有する弁出口オリフィスを含むことを特徴とする請求項1に記載の双安定小型弁。
- 前記駆動表面は厚さが100マイクロメータ以下の膜であることを特徴とする請求項1に記載の双安定小型弁。
- 前記アクチュエータは前記開状態及び前記閉状態の間で変化を生じさせるべく前記可動部品に磁気的に結合されることを特徴とする請求項1に記載の双安定小型弁。
- 前記駆動表面及び前記アクチュエータは磁気要素であることを特徴とする請求項5に記載の双安定小型弁。
- 前記磁気要素は磁性材料を含むことを特徴とする請求項6に記載の双安定小型弁。
- 前記磁気要素は電磁石を含むことを特徴とする請求項6に記載の双安定小型弁。
- 前記電磁石は平面コイルを含むことを特徴とする請求項8に記載の双安定小型弁。
- 前記アクチュエータは前記開状態及び前記閉状態の間で変化を生じさせるべく前記可動部品に静電気的に結合されることを特徴とする請求項1に記載の双安定小型弁。
- 前記駆動表面及び前記アクチュエータは導電性要素を含むことを特徴とする請求項10に記載の双安定小型弁。
- 前記アクチュエータは単一の平面電極を含むことを特徴とする請求項10に記載の双安定小型弁。
- 前記アクチュエータは2つの平面電極を含むことを特徴とする請求項10に記載の双安定小型弁。
- 前記アクチュエータは前記開状態及び前記閉状態の間で変化を生じさせるべく前記可動部品に機械的に結合されることを特徴とする請求項1に記載の双安定小型弁。
- 前記双安定要素は弾力性座屈梁を含むことを特徴とする請求項1に記載の双安定小型弁。
- 前記弾力性座屈梁は前記駆動表面の対辺に前記弾力性座屈梁の中間点で取り付けられることを特徴とする請求項15に記載の双安定小型弁。
- 前記駆動部品は弾力性支持梁を含み、
前記弾力性支持梁は、前記弾力性支持梁の端点で前記駆動表面に取り付けられ、前記弾力性支持梁の中間点で前記弾力性座屈梁に取り付けられることを特徴とする請求項15に記載の双安定小型弁。 - 前記双安定要素は前記座屈梁を座屈させるべく圧縮されたC型クランプを含むことを特徴とする請求項15に記載の双安定小型弁。
- 前記座屈梁のそれぞれは、せん断応力により座屈を生じさせる2つの物質層を含むことを特徴とする請求項15に記載の双安定小型弁。
- 前記座屈梁のそれぞれは、座屈を生じさせるべく基板に端点付近で結合されることを特徴とする請求項15に記載の双安定小型弁。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57978904P | 2004-06-14 | 2004-06-14 | |
US60/579,789 | 2004-06-14 | ||
US11/151,158 | 2005-06-10 | ||
US11/151,158 US7422191B2 (en) | 2004-06-14 | 2005-06-10 | Bistable miniature valve |
PCT/US2005/020901 WO2005124797A2 (en) | 2004-06-14 | 2005-06-13 | Bistable miniature valve |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008503876A true JP2008503876A (ja) | 2008-02-07 |
JP4709212B2 JP4709212B2 (ja) | 2011-06-22 |
Family
ID=35510424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007516630A Expired - Fee Related JP4709212B2 (ja) | 2004-06-14 | 2005-06-13 | 双安定小型弁 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7422191B2 (ja) |
EP (1) | EP1766642A4 (ja) |
JP (1) | JP4709212B2 (ja) |
KR (1) | KR20070083454A (ja) |
WO (1) | WO2005124797A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090217997A1 (en) * | 2005-05-04 | 2009-09-03 | Alan Feinerman | Thin welded sheets fluid pathway |
DE102009045591A1 (de) * | 2009-10-12 | 2011-04-14 | BSH Bosch und Siemens Hausgeräte GmbH | Haushaltsgerät, insbesondere Haushalts-Geschirrspülmaschine |
US8842781B2 (en) * | 2010-02-15 | 2014-09-23 | Intel Mobile Communications GmbH | Device and method for selecting a path from an estimated delay profile of a radio signal |
JP2016512386A (ja) * | 2013-03-14 | 2016-04-25 | ソリジー インコーポレイテド | 磁力で活性化される印刷メンブレンスイッチ及びその適用 |
BR112017000230B1 (pt) | 2014-07-07 | 2022-11-29 | Nanotech Analysis S.R.L.S. | Dispositivo de controle de fluxo gasoso, sistemas e métodos que empregam o dispositivo |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62122980U (ja) * | 1986-01-27 | 1987-08-04 | ||
JPS62122981U (ja) * | 1986-01-27 | 1987-08-04 | ||
JPH10169826A (ja) * | 1996-11-27 | 1998-06-26 | Xerox Corp | バルブ及びバルブアレイ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3621332A1 (de) * | 1986-06-26 | 1988-01-14 | Fraunhofer Ges Forschung | Mikroventil |
US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
US5050838A (en) * | 1990-07-31 | 1991-09-24 | Hewlett-Packard Company | Control valve utilizing mechanical beam buckling |
US6168395B1 (en) * | 1996-02-10 | 2001-01-02 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Bistable microactuator with coupled membranes |
US6123316A (en) * | 1996-11-27 | 2000-09-26 | Xerox Corporation | Conduit system for a valve array |
US6598621B1 (en) * | 1998-04-01 | 2003-07-29 | Camcon Ltd. | Magnetic drives |
DE19821638C2 (de) * | 1998-05-14 | 2000-07-06 | Festo Ag & Co | Mikroventil |
EP1077037B1 (en) * | 1999-08-17 | 2004-10-27 | Delphi Automotive Systems Sungwoo Co., Ltd. | Seat belt buckle |
WO2001049144A1 (en) * | 1999-12-30 | 2001-07-12 | Delphi Technologies, Inc. | Seat restraint buckle assembly |
US6340176B1 (en) * | 2000-03-31 | 2002-01-22 | Delphi Technologies, Inc. | Seat restraint tensioner |
KR100348163B1 (ko) * | 2000-06-22 | 2002-08-09 | 델파이 오토모티브 시스템스 성우 주식회사 | 좌석벨트 리트랙터의 동력전달장치 일체형 프리텐셔너 |
GB0016505D0 (en) * | 2000-07-06 | 2000-08-23 | Wygnanski Wladyslaw | Improved electro-magnetic device |
US6828887B2 (en) * | 2002-05-10 | 2004-12-07 | Jpmorgan Chase Bank | Bistable microelectromechanical system based structures, systems and methods |
-
2005
- 2005-06-10 US US11/151,158 patent/US7422191B2/en not_active Expired - Fee Related
- 2005-06-13 JP JP2007516630A patent/JP4709212B2/ja not_active Expired - Fee Related
- 2005-06-13 EP EP05761438A patent/EP1766642A4/en not_active Withdrawn
- 2005-06-13 KR KR1020077000713A patent/KR20070083454A/ko not_active Application Discontinuation
- 2005-06-13 WO PCT/US2005/020901 patent/WO2005124797A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62122980U (ja) * | 1986-01-27 | 1987-08-04 | ||
JPS62122981U (ja) * | 1986-01-27 | 1987-08-04 | ||
JPH10169826A (ja) * | 1996-11-27 | 1998-06-26 | Xerox Corp | バルブ及びバルブアレイ |
Also Published As
Publication number | Publication date |
---|---|
US20060017534A1 (en) | 2006-01-26 |
JP4709212B2 (ja) | 2011-06-22 |
EP1766642A4 (en) | 2012-08-29 |
WO2005124797A2 (en) | 2005-12-29 |
US7422191B2 (en) | 2008-09-09 |
EP1766642A2 (en) | 2007-03-28 |
KR20070083454A (ko) | 2007-08-24 |
WO2005124797A3 (en) | 2007-08-09 |
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