JP2008311853A5 - - Google Patents
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- Publication number
- JP2008311853A5 JP2008311853A5 JP2007156482A JP2007156482A JP2008311853A5 JP 2008311853 A5 JP2008311853 A5 JP 2008311853A5 JP 2007156482 A JP2007156482 A JP 2007156482A JP 2007156482 A JP2007156482 A JP 2007156482A JP 2008311853 A5 JP2008311853 A5 JP 2008311853A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- acoustic wave
- surface acoustic
- average
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010410 layer Substances 0.000 claims 20
- 238000010897 surface acoustic wave method Methods 0.000 claims 6
- 239000011241 protective layer Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims 2
- 229910003460 diamond Inorganic materials 0.000 claims 2
- 239000010432 diamond Substances 0.000 claims 2
- 230000014509 gene expression Effects 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007156482A JP2008311853A (ja) | 2007-06-13 | 2007-06-13 | 弾性表面波素子および電子機器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007156482A JP2008311853A (ja) | 2007-06-13 | 2007-06-13 | 弾性表面波素子および電子機器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008311853A JP2008311853A (ja) | 2008-12-25 |
JP2008311853A5 true JP2008311853A5 (pt) | 2010-07-15 |
Family
ID=40239077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007156482A Withdrawn JP2008311853A (ja) | 2007-06-13 | 2007-06-13 | 弾性表面波素子および電子機器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2008311853A (pt) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5136594B2 (ja) * | 2010-05-21 | 2013-02-06 | 株式会社デンソー | 弾性表面波発振器 |
JP6432299B2 (ja) * | 2014-11-17 | 2018-12-05 | 株式会社デンソー | 弾性表面波素子 |
-
2007
- 2007-06-13 JP JP2007156482A patent/JP2008311853A/ja not_active Withdrawn
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