JP2008311255A - Compound magnetic substance and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that there has not been provided hitherto a compound magnetic substance and its manufacturing method having a considerably small magnetic loss in a frequency of hundred MHz to several GHz. <P>SOLUTION: There can be obtained the compound magnetic substance which is characterized in that: magnetic powder is dispersed into an insulating material, to constitute the substance; and a loss tangent tan δ is not larger than 0.1 at a frequency which is not higher than 4 GHz and higher than 1 at an actual part μr' of complex permeability, and at a frequency of not higher than 1 GHz. The magnetic powder in the compound magnetic substance is iron system metallic magnetic powder or metal oxide magnetic powder, and included in the insulating material by 10 to 95 vol.%. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a composite magnetic body used for a substrate material for a high-frequency device and a method for producing the same.

With the increase in speed and density of information communication devices, there is a strong demand for downsizing and low power consumption of electronic components and circuit boards mounted on electronic devices. In general, the wavelength λg of the electromagnetic wave propagating in the material is determined by the wavelength λ0 of the electromagnetic wave propagating in the vacuum, the real part εr ′ of the complex permittivity (hereinafter referred to as relative permittivity εr), and the real part μr of the complex permeability. '(Hereinafter referred to as relative permeability μr)
λg = λ0 / (εr · μr) ^1/2
Therefore, it is known that the larger the relative dielectric constant εr and the relative magnetic permeability μr, the larger the wavelength shortening rate and the smaller electronic components and circuit boards.

  In the substrate of such a high-frequency device, in order to control the electromagnetic field characteristics, the magnetic material such as metal magnetic powder or metal oxide magnetic powder is included in the substrate material as an insulating material for the purpose of imparting magnetic characteristics to the substrate. Dispersed and used as a filler.

However, eddy currents are generated on the surface of magnetic materials in the high-frequency band used by information and communication equipment, and this eddy current generates a magnetic field in a direction that cancels the change in the applied magnetic field, resulting in a decrease in the apparent permeability of the material. Was invited. Moreover, since an increase in eddy current causes energy loss due to Joule heat, it has been difficult to use it as a material for circuit boards and electronic components. To reduce eddy currents,
d = 1 / (π · f · μ0 · μr · σ) ^1/2
It is effective to make the diameter of the magnetic powder smaller than the skin depth d expressed by Here, f is the signal frequency, σ is the conductivity of the magnetic powder, and μ 0 is the permeability of the vacuum.

  In recent years, with the advancement of nanotechnology, the miniaturization of magnetic particles has progressed, and some cases have been reported in which the decrease in the relative permeability μr of materials at high frequencies is suppressed.

  Patent Document 1 disperses flat nanocrystalline magnetic powder in a resin, thereby increasing the imaginary part permeability μ ", which is a magnetic loss term when the permeability is represented by a complex permeability. It discloses that an electromagnetic wave absorber having an excellent radio wave absorbing ability can be formed.

  Further, Patent Document 2 provides a composite magnetic body having a small loss at about 300 MHz or less by dispersing magnetic particles having a plurality of particle diameters in a resin using a dispersion mixing method using screw stirring and ultrasonic stirring. ing.

Japanese Patent Laid-Open No. 11-354773 JP 2006-269134 A

  Patent Document 1 discloses that an electromagnetic absorber having excellent radio wave absorption characteristics over a wide band can be formed by combining a flat nanocrystalline magnetic powder with a resin. That is, Patent Document 1 proposes a material having a large imaginary part permeability μ "that is a magnetic loss term at a use frequency in order to block and absorb electromagnetic waves. However, a material having a large magnetic loss is a circuit board. It cannot be applied to applications that require a small magnetic loss, such as electronic components.

  On the other hand, Patent Document 2 discloses a composite magnetic body that can suppress crosstalk and radiation noise with low power consumption and is suitable for a circuit board and electronic components. Further, in Patent Document 2, since the aggregate of fine magnetic fine particles in a composite magnetic material behaves as one large magnetic particle, an eddy current is likely to be generated at a high frequency, resulting in deterioration of magnetic characteristics. Thus, the composite magnetic body is manufactured so as not to cause aggregation of the magnetic particles. However, in this method, the energy applied from the outside to the aggregate is smaller than the energy forming the aggregate, so that it is not uniformly dispersed in the insulating material. In the several hundred MHz to several GHz band, the magnetic loss It has been found that cannot be sufficiently reduced. That is, it was found that the mixing method disclosed in Patent Document 2 is insufficient for crushing aggregates. In addition, since magnetic particles having a plurality of particle sizes are included, it is necessary to select not only the magnetic powder but also the particle size of the magnetic powder, which has the disadvantage that the manufacturing process becomes complicated. .

Here, regarding magnetic powder, in the case of metal magnetic powder, it has high saturation magnetization and magnetic permeability, but its electrical resistivity is low (10 ⁻⁶ to 10 ⁻⁴ Ωcm). In order to increase current loss and cause deterioration of magnetic properties, it is necessary to uniformly disperse the magnetic powder in the composite magnetic material. Further, by using iron-based metal magnetic powder, it can be manufactured safely and efficiently at a low production cost on an industrial scale as compared with nickel or cobalt-based metal magnetic powder. On the other hand, the metal oxide magnetic powder has a higher electrical resistivity (1 to 10 ⁸ Ωcm) than the metal magnetic material, so that the eddy current loss is small in the high frequency region and the magnetic characteristics are hardly deteriorated. However, since the saturation magnetic flux density is 1/3 to 1/2 of the metal magnetic material, it is necessary to contain the magnetic powder in a high concentration in the composite magnetic body.

  The object of the present invention has been made in view of the above problems, and gives a sufficiently small magnetic loss in the range of several hundreds of MHz to several GHz even if any material of metal magnetic powder and metal oxide magnetic powder is used. It is to provide a composite magnetic body and a method for producing the same.

  As a result of intensive studies, the present inventors have found that magnetic loss can be reduced even in a frequency band of several hundred MHz to several GHz by suitably dispersing the magnetic powder.

  That is, according to the first aspect of the present invention, in the composite magnetic body constituted by dispersing magnetic powder in an insulating material, the magnetic powder is an iron-based metal magnetic powder or a metal oxide magnetic powder, The insulating material contains 10 to 95 vol% of the magnetic powder, the relative permeability μr is greater than 1 at a frequency of 4 GHz or less, and the loss tangent tan δ is 0.1 or less at a frequency of 1 GHz or less. A composite magnetic material is obtained.

  According to the second aspect of the present invention, the material of the iron-based metal magnetic powder is iron (Fe), iron (Fe) -cobalt (Co) alloy, iron (Fe) -silicon (Si) alloy, iron (Fe) -nitrogen (N) alloy, iron (Fe) -carbon (C) alloy, iron (Fe) -boron (B) alloy, iron (Fe) -phosphorus (P) alloy, iron (Fe ) -Aluminum (Al) alloy, at least one selected from the group consisting of iron (Fe) -aluminum (Al) -silicon (Si) alloys, The body is obtained.

  According to the third aspect of the present invention, the material of the iron-based metal magnetic powder is titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), copper (Cu), The iron-based metal magnetic powder according to claim 2, wherein one or more metal elements of zinc (Zn), niobium (Nb), molybdenum (Mo), indium (In), and tin (Sn) are added. A composite magnetic body according to the first aspect is obtained.

According to the fourth aspect of the present invention, the material of the metal oxide magnetic powder is goethite (FeOOH), hematite (Fe ₂ O ₃ ), magnetite (Fe ₃ O ₄ ), manganese (Mn) -zinc (Zn). ) Ferrite, nickel (Ni) -zinc (Zn) ferrite, cobalt (Co) ferrite, manganese (Mn) ferrite, nickel (Ni) ferrite, copper (Cu) ferrite, zinc (Zn) ferrite, magnesium (Mg) ferrite, And at least one selected from the group consisting of lithium (Li) ferrite, manganese (Mn) -magnesium (Mg) ferrite, copper (Cu) -zinc (Zn) ferrite, and manganese (Mn) -zinc (Zn) ferrite. A composite magnetic body according to the first aspect is obtained.

  According to a fifth aspect of the present invention, there is obtained the composite magnetic body according to any one of the first to fourth aspects, wherein the magnetic powder has a particle size of 0.01 to 10 μm.

According to the sixth aspect of the present invention, the insulating material includes polyimide resin, polybenzoxazole resin, polyphenylene resin, polybenzocyclobutene resin, polyarylene ether resin, polysiloxane resin, epoxy resin, polyester resin, fluorine Synthetic resin or liquid phase resin including at least one of resin, polyolefin resin, polycycloolefin resin, cyanate resin, polyphenylene ether resin, and polystyrene resin, or Al ₂ O ₃ , SiO ₂ , TiO ₂ , 2MgO · SiO ₁ , at least one selected from the group consisting of ceramics of MgTiO ₃ , CaTiO ₃ , SrTiO ₃ , BaTiO ₃ , 3Al ₂ O ₃ .2SiO ₂ , ZrO ₂ , SiC, and AlN. The aspect of A composite magnetic material according to any one of the above is obtained.

  According to the seventh aspect of the present invention, the composite magnet includes the steps of producing a slurry by dispersing and mixing an insulating material and the magnetic powder in a solvent, and applying, drying and firing the slurry. The slurry manufacturing step includes a step of manufacturing a dispersion solvent obtained by adding a surfactant to a solvent, and a step of mixing the magnetic powder with the dispersion solvent. The step of mixing includes the step of adding a dispersion medium and the step of carrying out rotation / revolution mixing, whereby the method for producing a composite magnetic body according to any one of the first to sixth aspects is obtained.

  According to an eighth aspect of the present invention, there is provided the method for producing a composite magnetic body according to the seventh aspect, wherein the rotation and revolution mixing is performed at a revolution speed of 100 rpm or more and a rotation speed of 100 rpm or more. .

  According to the ninth aspect of the present invention, the slurry manufacturing step further includes a step of adding and mixing an insulating material to the slurry, the solvent, the surfactant, the magnetic powder, the dispersion medium, and the Separating the dispersion medium from the mixture of insulating materials. The method for producing a composite magnetic body according to the eighth or ninth aspect is obtained.

  According to the tenth aspect of the present invention, in the step of separating the dispersion medium, the mixture is allowed to stand or is centrifuged to separate the mixture from the portion containing the dispersion medium. The method for producing a composite magnetic body according to the ninth aspect is characterized in that the method includes the step of separating the composite magnetic body.

  According to an eleventh aspect of the present invention, the material of the iron-based metal magnetic powder is iron (Fe), iron (Fe) -cobalt (Co) alloy, iron (Fe) -silicon (Si) alloy, iron (Fe) -nitrogen (N) alloy, iron (Fe) -carbon (C) alloy, iron (Fe) -boron (B) alloy, iron (Fe) -phosphorus (P) alloy, iron (Fe ) -Aluminum (Al) based alloy and at least one selected from the group consisting of iron (Fe) -aluminum (Al) -silicon (Si) based alloys A method for producing a composite magnetic body is obtained.

  According to the twelfth aspect of the present invention, the material of the iron-based metal magnetic powder is titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), copper (Cu), The iron-based metal magnetic powder according to claim 2, wherein one or more metal elements of zinc (Zn), niobium (Nb), molybdenum (Mo), indium (In), and tin (Sn) are added. The method for producing a composite magnetic body according to any one of the seventh to tenth aspects is obtained.

According to the thirteenth aspect of the present invention, the material of the metal oxide magnetic powder is goethite (FeOOH), hematite (Fe ₂ O ₃ ), magnetite (Fe ₃ O ₄ ), manganese (Mn) -zinc (Zn). ) Ferrite, nickel (Ni) -zinc (Zn) ferrite, cobalt (Co) ferrite, manganese (Mn) ferrite, nickel (Ni) ferrite, copper (Cu) ferrite, zinc (Zn) ferrite, magnesium (Mg) ferrite, And at least one selected from the group consisting of lithium (Li) ferrite, manganese (Mn) -magnesium (Mg) ferrite, copper (Cu) -zinc (Zn) ferrite, and manganese (Mn) -zinc (Zn) ferrite. A method for producing a composite magnetic body according to any one of the seventh to tenth aspects is obtained. .

According to a fourteenth aspect of the present invention, the insulating material is polyimide resin, polybenzoxazole resin, polyphenylene resin, polybenzocyclobutene resin, polyarylene ether resin, polysiloxane resin, epoxy resin, polyester resin, fluorine Synthetic resin or liquid phase resin including at least one of resin, polyolefin resin, polycycloolefin resin, cyanate resin, polyphenylene ether resin, and polystyrene resin, or Al ₂ O ₃ , SiO ₂ , TiO ₂ , 2MgO · SiO ₂ , MgTiO ₃ , CaTiO ₃ , SrTiO ₃ , BaTiO ₃ , 3Al ₂ O ₃ .2SiO ₂ , ZrO ₂ , SiC, AlN, a raw material for at least one ceramic selected from the group consisting of ceramics The manufacturing method of the composite magnetic body as described in the seventh to thirteenth aspects is obtained.

  According to the fifteenth aspect of the present invention, the dispersion medium added in the mixing step of the magnetic substance powder is a metal, a metal oxide, an oxide sintered body, a nitride sintered body, a silicide sintered, and The method for producing a composite magnetic body according to any one of the tenth to fourteenth aspects is obtained, which is at least one granule selected from the group consisting of glass.

  According to a sixteenth aspect of the present invention, the dispersion medium comprises aluminum, steel, lead, iron oxide, amilna, zirconia, silicon dioxide, titania, silicon nitride, silicon carbide, soda glass, lead glass, and high specific gravity. The method for producing a composite magnetic body according to any one of the fifteenth aspects, comprising at least one glass.

  According to a seventeenth aspect of the present invention, there is provided the method for producing a composite magnetic body according to the fifteenth or sixteenth aspect, wherein the dispersion medium has a specific gravity of 6 or more.

  According to an eighteenth aspect of the present invention, there is provided the method for producing a composite magnetic body according to the seventeenth aspect, wherein the dispersion medium contains any one of zirconia, steel, and stainless steel.

  According to a nineteenth aspect of the present invention, the dispersion medium is a granular material having an average particle diameter of 0.01 mm or more and 3.0 mm or less, according to the seventh to eighteenth aspects. A method for producing a body is obtained.

  According to the present invention, by appropriately mixing and dispersing iron-based metal magnetic powder or metal oxide magnetic powder in the insulating material as the magnetic powder, the relative permeability μr is greater than 1 at a frequency of 4 GHz or less, In addition, it is possible to provide a composite magnetic body having a loss tangent tan δ of 0.1 or less at a frequency of 1 GHz or less. By applying the composite magnetic material as a material for circuit boards and electronic components, downsizing and low power consumption of information communication equipment in the tens to hundreds of MHz band, which was difficult to achieve with electronic components using only dielectrics Can be realized.

  First, the magnetic powder constituting the composite magnetic body according to the present invention will be described.

Examples of the material of the magnetic powder include at least one metal, alloy, or compound of iron, cobalt, and nickel. Iron (Fe), iron (Fe)-, which is iron or an iron-based alloy having high saturation magnetization. Cobalt (Co) alloy, iron (Fe) -silicon (Si) alloy, iron (Fe) -nitrogen (N) alloy, iron (Fe) -carbon (C) alloy, iron (Fe) -boron ( B) series alloy, iron (Fe) -phosphorus (P) series alloy, iron (Fe) -aluminum (Al), iron (Fe) -aluminum (Al) -silicon (Si) series alloy, or titanium (Ti), Vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), copper (Cu), zinc (Zn), niobium (Nb), molybdenum (Mo), indium (In), tin (Sn) One or more of these metals Iron or iron alloy was added iodine are preferred. A magnetic powder in which such a metal element is added to iron or an iron-based alloy becomes soft and improves plastic deformability, so that it is easily deformed plastically when mechanical stress is applied, and a flat magnetic powder having a high aspect ratio. Becomes easier to obtain. Further, since the length direction of the flat magnetic powder coincides with the axis of easy magnetization crystal, the magnetic permeability of the composite magnetic material can be increased. Moreover, magnetite (Fe ₃ O ₄ ), manganese (Mn) -zinc (Zn) ferrite, nickel (Ni) -zinc (Zn) ferrite, cobalt (Co) ferrite, manganese (Mn) ferrite having high electrical resistivity, Nickel (Ni) ferrite, copper (Cu) ferrite, zinc (Zn) ferrite, magnesium (Mg) ferrite, lithium (Li) ferrite, manganese (Mn) -magnesium (Mg) ferrite, copper (Cu) -zinc (Zn) Ferrite compounds such as ferrite and manganese (Mn) -zinc (Zn) ferrite are also preferred.

  The content of the magnetic powder contained in the composite magnetic material is preferably 10 vol% or more and 95 vol% or less, preferably 10 vol% or more, and particularly preferably in the range of 10 vol% or more and 90 vol% or less. This is because the content of the magnetic powder is too small at 10 vol% or less, and a high specific permeability μr cannot be obtained. On the other hand, as the content of the magnetic powder increases, it becomes difficult to coat the composite magnetic material. In particular, if it exceeds 95 vol%, the ratio of the magnetic powder in the composite magnetic body becomes too large to be uniformly coated with the insulating material, forming aggregates and increasing the loss tangent tan δ. Because it becomes.

  The particle size of the magnetic powder is preferably 0.01 μm or more and 10 μm or less. The reason why the thickness is preferably 0.01 μm or more and 10 μm or less is that the particle size and saturation magnetization of the magnetic powder are closely related, and as the particle size becomes smaller, the number increases, the volume per particle decreases, and the total surface area increases. Etc. are produced. The increase in the total surface area compared to the volume means that the properties involving the surface are dominated by the particles. In general, since the surface layer has a composition / structure different from that of the inside, when the particles become smaller, atoms contributing to magnetism relatively decrease and the saturation magnetization becomes smaller. Therefore, it is necessary to have an average particle size of at least 0.01 μm or more. If the particle size becomes too large, eddy currents are generated at high frequencies, so the upper limit of the average particle size is 10 μm.

  Next, the insulating material constituting the composite magnetic material will be described.

  When the composite magnetic material is used as a material for a circuit board, it is preferable that the dielectric constant is low from the viewpoint of increasing the characteristic impedance. As the insulating material, polyimide resin, polybenzoxazole resin, polyphenylene resin, polybenzocyclobutene Low dielectric constant synthetic resins such as resins, polyarylene ether resins, polysiloxane resins, epoxy resins, polyester resins, fluororesins, polyolefin resins, polycycloolefin resins, cyanate resins, polyphenylene ether resins, polystyrene resins are suitably selected. The

When a high dielectric constant is required such as a capacitor or an antenna element, ceramics such as Al ₂ O ₃ , SiO ₂ , TiO ₂ , 2MgO · SiO ₂ , MgTiO ₃ , CaTiO ₃ , SrTiO ₃ , BaTiO ₃ or the like A mixture of these inorganic and organic materials can be used as appropriate.

  The manufacturing process of the composite magnetic body according to the present invention includes a process of manufacturing a dispersion solvent in which a surfactant is added to a solvent during a process of manufacturing a slurry by dispersing and mixing magnetic powder in a solvent, A mixing step of mixing the magnetic powder with the magnetic powder, and when the magnetic powder is mixed in the dispersion solvent, the dispersion medium and the insulating material are added. Mix.

  Equipment that can be used in this mixing step includes a kneader, roll mill, pin mill, sand mill, ball mill, planetary ball mill, etc., but a sand mill, ball mill, planetary ball mill, etc. are suitable for using the dispersion medium according to the present invention. ing.

  Examples of the dispersion medium include metals or metal oxides such as aluminum, steel and lead, oxide sintered bodies such as amilna, zirconia, silicon dioxide and titania, nitride sintered bodies such as silicon nitride, and silicon carbide. Examples of the dispersion medium according to the present invention include zirconia, steel, and stainless steel having a specific gravity of 6 or more from the viewpoint of mixing efficiency. .

  Further, since the mixing is performed by the impact of the collision of the dispersion medium, the dispersibility improves as the number of collisions increases. Therefore, the smaller the average particle size of the dispersion medium, the greater the number of particles filled per unit volume, the greater the number of collisions and the better the dispersibility. On the other hand, if the particle size is too small, it is difficult to separate from the slurry. Become. Therefore, it is necessary to have an average particle diameter of at least 0.01 mm. Further, if the particle size becomes too large, the number of collisions described above decreases and the dispersion performance decreases, so the upper limit of the average particle size is 3.0 mm.

  Further, the mixing and stirring time needs to be appropriately adjusted depending on the initial input amount of raw materials and the rotation and revolution speed of stirring.

  Next, a method for applying the obtained slurry will be described. As a coating method, a dry film can be produced by forming this into an arbitrary sheet shape by a known forming method such as a press method, a doctor blade method, or an injection molding method. Among these methods, it is desirable to form a laminated body of composite magnetic bodies into a sheet by a doctor blade method. The slurry is applied after volatilization of the solvent and concentration to adjust the viscosity suitable for the above application method. If necessary, after the slurry application, an orientation treatment for orienting the flat magnetic powder in a direction parallel to the sheet is performed by orientation of the magnetic field before drying.

  Finally, the dry film thus obtained is heat-treated and press-molded in a reducing atmosphere or vacuum to obtain a composite magnetic body.

  The greatest feature of the manufacturing process according to the present invention is that when a high saturation magnetization iron or an iron-based alloy or a ferrite compound having a high electrical resistivity is mixed and stirred with an insulating material in a solvent, a dispersion medium is added to the mixing container. Since the rotation and revolution stirring is performed at a high speed (revolution speed of 100 rpm or more, rotation speed of 100 rpm or more), the aggregated particles of the magnetic particles are crushed by the strong shear stress generated by the dispersion medium, and the dispersibility is improved. That is, the magnetic powder can be uniformly and highly concentrated in the body.

[Example]
EXAMPLES Hereinafter, although this invention is demonstrated concretely by Example 1 and 2, this invention is not limited by these Examples.

  1 g of Fe magnetic powder with an average particle size of 0.1 μm is mixed with 10 g of xylene and cyclopentanone 4: 1 mixed solution with a dispersion of nitrogen-containing graft polymer as a surfactant, and planetary stirring is performed using zirconia beads. For 30 minutes. The revolution speed during planetary stirring was 2000 rpm, and the rotation speed was 800 rpm. The slurry thus obtained and 0.5 g of resin varnish obtained by diluting the polycycloolefin resin to a solid content ratio of 40% were further mixed for 5 minutes by planetary stirring using zirconia beads.

  Next, the obtained mixed liquid was introduced into a rotary evaporator, the solvent was evaporated at 50 ° C. and 2.7 kPa, and a viscosity capable of being applied with a doctor blade was obtained.

The mixture obtained as described above was formed into a film by the doctor blade method, and then dried at room temperature while orienting the magnetic particles by applying a magnetic field of 1.6 × 10 ⁵ A / m. The dry film thus obtained was press fired with a reduced-pressure press. The press conditions were raised to 130 ° C. for 20 minutes at normal pressure, and then held for 5 minutes under a pressure of 2 MPa, then heated to 160 ° C. and held for 40 minutes to cure the resin and have an area of 30 mm. A composite magnetic body having a corner and a thickness of about 60 μm was obtained. When the complex magnetic permeability of this composite magnetic material was measured by the parallel line method, the relative magnetic permeability μr = 5 and the magnetic loss tan δ = 0.1 at 1 GHz (see FIG. 1). A structural photograph of this composite magnetic material is shown in FIG.

Using 1 g of magnetite (Fe ₃ O ₄ ) magnetic powder having an average particle size of 0.1 μm, a composite magnetic body was produced under the same conditions as in Example 1 to obtain a composite magnetic body having an area of 30 mm square and a thickness of 60 μm. . When the complex magnetic permeability of this composite magnetic material was measured by the parallel line method, the relative magnetic permeability μr = 5 and the magnetic loss tan δ = 0.1 at 1 GHz (see FIG. 3). A structural photograph of this composite magnetic material is shown in FIG.

  According to the present invention, by appropriately mixing and dispersing metal magnetic powder or metal oxide magnetic powder in the insulating material as magnetic powder, the relative permeability μr is larger than 1 at a frequency of 4 GHz or less, and loss A composite magnetic body having a tangent tan δ of 0.1 or less is obtained. By applying the composite magnetic material as a material for circuit boards and electronic components, downsizing and low power consumption of information communication equipment in the tens to hundreds of MHz band, which was difficult to achieve with electronic components using only dielectrics Can be realized.

It is a value which shows the value of the magnetic characteristic of the composite magnetic body obtained in Example 1 of the present invention with respect to the frequency. It is a scanning electron microscope image of the composite magnetic body obtained in Example 1 of this invention. It is a value which shows the value of the magnetic characteristic of the composite magnetic body obtained in Example 2 of the present invention with respect to the frequency. It is a scanning electron microscope image of the composite magnetic body obtained in Example 2 of the present invention.

Claims (19)

  In a composite magnetic body constituted by dispersing magnetic powder in an insulating material, the magnetic powder is an iron-based metal magnetic powder or a metal oxide magnetic powder, and the magnetic powder is contained in 10 to 95 vol% in the insulating material. A composite magnetic body characterized in that the real part μr ′ of the complex permeability is greater than 1 at a frequency of 4 GHz or less and the loss tangent tan δ is 0.1 or less at a frequency of 1 GHz or less.   The material of the iron metal magnetic powder is iron (Fe), iron (Fe) -silicon (Si) alloy, iron (Fe) -nitrogen (N) alloy, iron (Fe) -carbon (C) alloy, Iron (Fe) -boron (B) alloy, iron (Fe) -phosphorus (P) alloy, iron (Fe) -aluminum (Al) alloy, iron (Fe) -aluminum (Al) -silicon (Si) The composite magnetic body according to claim 1, wherein the composite magnetic body is at least one selected from the group consisting of a system alloy.   The iron-based metal magnetic powder is made of titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), copper (Cu), zinc (Zn), niobium (Nb), molybdenum. The iron-based metal magnetic powder according to claim 2, wherein one or more metal elements of (Mo), indium (In), and tin (Sn) are added. Composite magnetic material. The material of the metal oxide magnetic powder is goethite (FeOOH), hematite (Fe ₂ O ₃ ), magnetite (Fe ₃ O ₄ ), manganese (Mn) -zinc (Zn) ferrite, nickel (Ni) -zinc (Zn ) Ferrite, cobalt (Co) ferrite, manganese (Mn) ferrite, nickel (Ni) ferrite, copper (Cu) ferrite, zinc (Zn) ferrite, magnesium (Mg) ferrite, lithium (Li) ferrite, manganese (Mn)- The at least one selected from the group consisting of magnesium (Mg) ferrite, copper (Cu) -zinc (Zn) ferrite, and manganese (Mn) -zinc (Zn) ferrite. Composite magnetic material.   The composite magnetic body according to claim 1, wherein the magnetic powder has a particle size of 0.01 to 10 μm. The insulating material is polyimide resin, polybenzoxazole resin, polyphenylene resin, polybenzocyclobutene resin, polyarylene ether resin, polysiloxane resin, epoxy resin, urethane resin, polyester resin, polyester urethane resin, fluorine resin, polyolefin resin. , Polycycloolefin resin, cyanate resin, polyphenylene ether resin, and synthetic resin or liquid phase resin including at least one of polystyrene resin, and Al ₂ O ₃ , SiO ₂ , TiO ₂ , 2MgO · SiO ₂ , MgTiO ₃ 2. It is at least one selected from the group consisting of ceramics of CaTiO ₃ , SrTiO ₃ , BaTiO ₃ , 3Al ₂ O ₃ .2SiO ₂ , ZrO ₂ , SiC, and AlN. The composite magnetic body in any one of -4.   A step of producing a slurry by dispersing and mixing a magnetic powder made of iron-based metal magnetic powder or metal oxide magnetic powder and an insulating material in a solvent; and a step of applying, drying and firing the slurry. A method of manufacturing a composite magnetic body, wherein the slurry manufacturing step includes a step of manufacturing a dispersion solvent in which a surfactant is added to a solvent, and a step of mixing the magnetic powder in the dispersion solvent. The method for producing a composite magnetic body, wherein the step of mixing the powder includes a step of adding a dispersion medium and a step of carrying out rotation / revolution mixing.   The method for producing a composite magnetic body according to claim 7, wherein the rotation / revolution mixing is performed at a rotation speed of 100 rpm or more and a rotation speed of 100 rpm or more.   The slurry manufacturing step further includes adding and mixing an insulating material to the slurry, and mixing the dispersion medium from the solvent, the surfactant, the magnetic powder, the dispersion medium, and a mixture of the insulating materials. The method for producing a composite magnetic body according to claim 7, further comprising a step of separating.   The step of separating the dispersion medium includes a step of standing or centrifuging the mixture to separate the mixture into a portion containing the dispersion medium and a portion not containing the dispersion medium. The manufacturing method of the composite magnetic body of Claim 9.   The material of the iron-based metal magnetic powder is iron (Fe), iron (Fe) -cobalt (Co) alloy, iron (Fe) -silicon (Si) alloy, iron (Fe) -nitrogen (N) alloy, Iron (Fe) -carbon (C) alloy, iron (Fe) -boron (B) alloy, iron (Fe) -phosphorus (P) alloy, iron (Fe) -aluminum (Al) alloy, iron ( The method for producing a composite magnetic body according to any one of claims 7 to 10, wherein the method is at least one selected from the group consisting of Fe) -aluminum (Al) -silicon (Si) alloys.   The iron-based metal magnetic powder is made of titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), copper (Cu), zinc (Zn), niobium (Nb), molybdenum. The iron-based metal magnetic powder according to claim 11, wherein at least one metal element selected from (Mo), indium (In), and tin (Sn) is added. The manufacturing method of the composite magnetic body in any one. The material of the metal oxide magnetic powder is goethite (FeOOH), hematite (Fe ₂ O ₃ ), magnetite (Fe ₃ O ₄ ), manganese (Mn) -zinc (Zn) ferrite, nickel (Ni) -zinc (Zn ) Ferrite, cobalt (Co) ferrite, manganese (Mn) ferrite, nickel (Ni) ferrite, copper (Cu) ferrite, zinc (Zn) ferrite, magnesium (Mg) ferrite, lithium (Li) ferrite, manganese (Mn)- The at least one selected from the group consisting of magnesium (Mg) ferrite, copper (Cu) -zinc (Zn) ferrite, and manganese (Mn) -zinc (Zn) ferrite. The manufacturing method of the composite magnetic body in any one. The insulating material is polyimide resin, polybenzoxazole resin, polyphenylene resin, polybenzocyclobutene resin, polyarylene ether resin, polysiloxane resin, epoxy resin, polyester resin, fluorine resin, polyolefin resin, polycycloolefin resin, cyanate Synthetic resin or liquid phase resin including at least one of resin, polyphenylene ether resin, and polystyrene resin, or Al ₂ O ₃ , SiO ₂ , TiO ₂ , 2MgO · SiO ₂ , MgTiO ₃ , CaTiO ₃ , SrTiO ₃ , The raw material of at least one ceramic selected from the group consisting of ceramics of BaTiO ₃ , 3Al ₂ O ₃ .2SiO ₂ , ZrO ₂ , SiC, and AlN, according to claim 7. The manufacturing method of the composite magnetic body of description.   The dispersion medium added in the mixing step of the magnetic powder is at least one particle selected from the group consisting of metal, metal oxide, oxide sintered body, nitride sintered body, silicide sintered, and glass. The method for producing a composite magnetic body according to claim 10, wherein the composite magnetic body is a body.   The dispersion medium includes at least one of aluminum, steel, lead, iron oxide, amyrna, zirconia, silicon dioxide, titania, silicon nitride, silicon carbide, soda glass, lead glass, and high specific gravity glass. The method for producing a composite magnetic body according to claim 15.   The method for producing a composite magnetic body according to claim 15, wherein the dispersion medium has a specific gravity of 6 or more.   The method of manufacturing a composite magnetic body according to claim 17, wherein the dispersion medium includes any one of zirconia, steel, and stainless steel.   The method for producing a composite magnetic body according to any one of claims 7 to 18, wherein the dispersion medium is a granule having an average particle diameter of 0.01 mm to 3.0 mm.

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