JP2008275200A - Portable local dust collecting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a portable local dust collecting device capable of easily independently coping with nonsteady work in a local region such as maintenance work and cleaning work of a manufacturing device, and efficiently collecting both of floating dust and gravity-falling products. <P>SOLUTION: This portable local dust collecting device 10 is portably constituted so that it can be disposed on an optional position on a floor surface, and comprises a housing 11 as a suction chamber also used as a work table having a working area and mechanical strength to allow a worker to get thereon to do a prescribed work, an exhaust hose 13 for exhausting the air sucked into the housing 11, and a suction pump 14 connected with the terminal end of the exhaust hose 13, and the air at an upper part of the housing 11 is sucked in the floor surface direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a portable local dust collector, and more particularly to a portable local dust collector that can be used in a clean room for manufacturing semiconductor devices and the like.

  In a clean room of a semiconductor manufacturing factory, a manufacturing area for manufacturing a semiconductor device and a maintenance area for performing maintenance work and cleaning work for a semiconductor manufacturing apparatus such as an etching apparatus are usually separated by a partition. High cleanliness is managed.

  FIG. 8 shows an example of a clean room. FIG. 8 is a configuration diagram of a downflow type clean room.

  In FIG. 8, 1 is a manufacturing area, 2 is a semiconductor manufacturing apparatus, 3 is a maintenance area, 4 and 5 are partitions, and 6 is a fan filter unit.

  The production area 1 and the maintenance area 3 are partitioned by partitions 4 and 5, and a fan filter unit 6 is installed on each ceiling surface. Clean air is downflowed (in the figure, the airflow is indicated by a white arrow). Supplied).

  Here, since the manufacturing area 1 requires high cleanliness, more fan filter units 6 are installed than the maintenance area 3.

  Further, the semiconductor manufacturing apparatus 2 is disposed so as to penetrate the partition 4 from the maintenance area 3 to the manufacturing area 1.

The various semiconductor manufacturing apparatuses 2 arranged in this way are regularly subjected to maintenance work and cleaning work in the maintenance area 3 for each apparatus (for example, Patent Document 1).
Japanese Patent Laid-Open No. 2004-308964 FIG.

  Here, maintenance work and cleaning work for each semiconductor manufacturing apparatus 2 are performed with the exterior panel of the semiconductor manufacturing apparatus 2 removed, and at that time, floating dust generated from a maintenance worker who moves around for the work is generated by the semiconductor. On the contrary, a product generated by a process process that enters the manufacturing apparatus 2 or adheres to an exterior panel or the like falls from the semiconductor manufacturing apparatus 2 side onto the floor surface of the maintenance area 3 to contaminate the maintenance area 3. There was a fear.

  For this reason, it is possible to easily cope with unsteady work such as maintenance work and cleaning work for each semiconductor manufacturing apparatus 2 and to efficiently remove both floating dust and products falling by its own weight that are particularly likely to occur in the work area. A portable local dust collector that can collect dust well was desired.

  An object of the present invention is to provide a portable local area that can easily individually handle unsteady work in a local area such as maintenance work and cleaning work of a manufacturing apparatus, and can efficiently collect both floating dust and a product falling under its own weight. It is to provide a dust collector.

  The portable local dust collector of the present invention is configured to be transportable so that it can be placed at an arbitrary position on the floor surface, and the work area and mechanical strength on which an operator can sit and perform a predetermined work. A portable local dust collector that sucks air above the housing in the direction of the floor surface.

  The portable local dust collector of the present invention is portable and is provided on a side surface or a lower surface of the housing, a housing on which an operator can get on the upper surface, a plurality of suction holes provided on the upper surface of the housing. And a portable local dust collector equipped with an exhaust port.

  According to the portable local dust collector of the present invention, it is configured to be transportable so as to be arranged at an arbitrary position on the floor surface, and the work area area and machine on which an operator can sit and perform a predetermined work It has a housing as a suction chamber that also functions as a workbench with good strength and sucks the air above the housing in the direction of the floor, making it easy for unsteady work in local areas such as maintenance work and cleaning work of manufacturing equipment It can be individually handled, and can efficiently collect both suspended dust and products falling by its own weight.

  1 and 2 show a portable local dust collector as a first embodiment of the present invention. FIG. 1A is a configuration diagram in which a portable local dust collector is arranged in the maintenance area described in FIG. FIG. 1B is a perspective view of a portable local dust collector, and FIG. 2 is an exploded perspective view of a main part of the portable local dust collector (a suction pump is omitted). The same parts as those in FIG.

  1 and 2, 10 is a portable local dust collector as a first embodiment of the present invention, 11 is a housing, 11a is an upper plate portion, 11b is a suction hole, 11c is a frame portion, and 11d is a side plate portion. 11e is a bottom plate portion, 12 is an exhaust port, 13 is an exhaust hose, and 14 is a suction pump.

  As shown in FIG. 1, a portable local dust collector 10 includes a thin box-shaped housing 11, an exhaust hose 13 having one end connected to an exhaust port 12 provided on a side surface thereof, and an end of the exhaust hose 13. And a suction pump 14 connected to.

  Then, due to the suction force of the suction pump 14, the air above the housing 11 is sucked into the internal space of the housing 11 from the numerous suction holes 11 b provided in the upper plate portion 11 a, and the sucked air is externally passed through the exhaust hose 13. It can be discharged and processed in the exhaust system.

  In addition, the portable local dust collector 10 is configured to be transportable and can be freely arranged at an arbitrary position on the floor surface. The portable local dust collector 10 is not used in a local region such as maintenance work or cleaning work of the semiconductor manufacturing apparatus 2. Easily deal with regular work individually.

  Moreover, it has a work area area and mechanical strength on which a maintenance worker can put on and remove the exterior panel of the semiconductor manufacturing apparatus 2 and perform maintenance work and cleaning work.

  That is, the housing 11 serves as a work table and a suction chamber.

  Specifically, as shown in FIG. 2, the housing 11 includes a frame portion 11c for maintaining its mechanical strength, and an upper plate portion 11a, a side plate portion 11d, and a bottom plate portion 11e serving as outer walls. . In the drawing, the shape of the frame portion 11c is shown as a combination of an outer frame and an inner frame provided in a cross shape with respect to the outer frame, but the inner frame may be provided with a plurality of frames in a lattice shape. However, a diagonal frame may be provided.

  The upper plate portion 11a serving as a work area is provided with a large number of suction holes 11b arranged over the entire surface so that the air above the suction holes 11b can be sucked in the floor direction.

  Thereby, not only the floating dust but also the product falling by its own weight can be efficiently collected. Moreover, even if an operator moves to any position on the upper plate part 11a, the same dust collection effect is always obtained.

  Moreover, the exhaust port 12 is provided in one place of the side-plate part 11d.

  Here, if the area of the upper plate part 11a is set to the minimum area necessary for the work, the housing 11 becomes compact and lightweight, which is suitable for conveyance.

  For example, it is desirable that the upper plate portion 11a has a rectangular shape, the area of which is 60 cm to 120 cm on a side, and the housing 11 has a weight of 35 kg or less.

  Further, the load resistance of the housing 11 is set to 200 kg or more so that there is no problem in safety even if an operator moves on and moves for work.

  Further, when the height of the housing 11 is in the range of about 5 cm to 20 cm, a sufficient internal space can be secured and the suction and air permeability as a suction chamber are good.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a perspective view of a main part of the portable local dust collector (a suction pump is omitted). The same parts as those in FIGS.

  As shown in FIG. 3, a portable local dust collector 20 as a second embodiment of the present invention has exhaust ports 12 a, 12 b, 12 c, and 4 at four locations of each side plate portion 11 d of a housing 21 having a rectangular planar shape. 12d is provided, and exhaust hoses 13a, 13b, 13c, and 13d are connected to each.

  The exhaust ports 12a, 12b, 12c, and 12d (four locations) are provided at substantially equal positions with respect to the housing 21 so that the air in the housing 11 can be exhausted uniformly.

  The ends of the exhaust hoses 13a, 13b, 13c, and 13d may be integrated into one and connected to one suction pump (not shown), or four suction pumps (not shown). May be prepared and connected to each other.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 4 is an exploded perspective view of a main part of the portable local dust collector (a suction pump is omitted). The same parts as those in FIGS.

  As shown in FIG. 4, a portable local dust collector 30 as a third embodiment of the present invention includes a housing 31 having an outer peripheral frame portion 32 formed of a hollow square pipe and a hollow that divides an internal space into four spaces. It is composed of a partition frame portion 33 made of a square pipe, an upper plate portion 11a, and a bottom plate portion 11e.

  The outer peripheral frame portion 32 is provided with a plurality of ventilation holes 34 facing the internal space of the housing 31.

  Moreover, the outer periphery frame part 32 and the partition frame part 33 are comprised so that it can mutually communicate in the connection part.

  Further, the air holes 34 provided in the outer peripheral frame portion 32 and the partition frame portion 33 gradually increase in diameter from a position close to the exhaust port 12 toward a position far from the exhaust port 12.

  As described above, when the internal space of the housing 31 is divided into multiple parts and the internal air is dispersed and sucked from the large number of vent holes 34, the air in the housing 31 can be removed when the air in the housing 31 is introduced into the suction holes 12. A more balanced suction pressure can be generated from corner to corner, and so-called air accumulation is less likely to occur.

  Further, the diameters of the respective vent holes 34 may be the same as each other, but it is preferable that the vicinity of the exhaust port 12 is made smaller and made larger as the distance is increased.

  This is because the exhaust power near the exhaust port 12 is strong and weakens as it leaves, so if you reduce the nearby aperture to reduce exhaust resistance and increase the aperture as you move away, the same force is applied regardless of the location. Since it can be evacuated, it is well balanced and can collect dust uniformly.

  As a result, the height of the housing 31 can be reduced to about 1 cm to 5 cm, and the workability and safety are excellent.

  In the figure, the vent hole 34 is shown as a round hole, but it may be a long hole.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a perspective view of a main part of the portable local dust collector (a suction pump is omitted). The same parts as those in FIGS.

  As shown in FIG. 5, a portable local dust collector 40 as a fourth embodiment of the present invention includes a slope portion 42 for eliminating a step having an inclined surface that spreads at a part of the outer peripheral edge of a housing 41. I have.

  Thus, when the slope part 42 is provided, the operation | movement which an operator goes up and down on the housing 41 becomes easy, and safety | security improves.

  Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is an exploded perspective view of a main part of the portable local dust collector (a suction pump is omitted). The same parts as those in FIGS.

  As shown in FIG. 6, a portable local dust collector 50 as a fifth embodiment of the present invention includes a stainless mesh plate for further improving the mechanical strength of the housing 51 in the housing 51. A reinforcing member 52 is disposed. In the drawing, the reinforcing member 52 is shown as being diagonally hooked with respect to the outer frame. However, the reinforcing member 52 may be provided with a cross shape or a lattice shape with respect to the outer frame. In any case, the balance of exhaust is good if the internal space is equally divided.

  Thus, when the reinforcing member 52 made of a mesh plate is disposed, the mechanical strength of the housing 11 can be improved without impairing the air permeability.

  In the first to fifth embodiments described above, the maintenance area is described as the down flow method. In this case, the suction air flow and the indoor air flow of the portable local dust collector are in the same direction (facing the floor). It is preferable without disturbing the indoor airflow.

  On the other hand, even in the case of the upflow method, the airflow from under the floor is blocked by the bottom plate of the portable local dust collector and bypasses and flows into the maintenance area. Although it does not disturb greatly, as shown in FIG. 7, when a partition hood 61 made of a vinyl curtain or the like surrounding the portable local dust collector 60 is used in combination as shown in FIG. Good suction and dust collection are possible.

  In the first to sixth embodiments described above, the suction pump 14 is used for the suction. However, the present invention is not particularly limited, and suction is performed by connecting to an exhaust duct (not shown) disposed in the factory. You may make it do.

  Further, the planar shape of the housings 11, 21, 31, 41, 51 may be a shape suitable for the work place, and is not limited to a rectangle.

  Further, as a material constituting the housings 11, 21, 31, 41, 51, stainless steel having a certain mechanical strength and durability and low dust generation property, or aluminum or titanium that can be reduced in weight is desirable.

  In addition, the housings 11, 21, 31, 41, 51 may be provided with a handle (not shown) for conveyance to facilitate the conveyance.

  Moreover, although demonstrated by the structure which provides many suction holes 11b in the upper board part 11a, you may use a grating board.

  In the second embodiment, the four exhaust ports 12a to 12d are described. However, the present invention is not particularly limited to this and may be two or more. The exhaust port can also be provided on the bottom surface by attaching a leg or the like to the housing and providing a space below it.

  In the third embodiment, the inside of the housing 31 is divided into four parts. However, the present invention is not limited to this.

  Moreover, in Example 4, although the slope part 42 was provided only in the side surface of one direction, you may provide in another side surface.

  Needless to say, the embodiments that can be combined may be combined as appropriate.

  The present invention is a portable local dust collection system that can easily individually handle unsteady operations in local areas such as maintenance operations and cleaning operations of manufacturing equipment, and can efficiently collect both floating dust and products that fall under its own weight. Applicable to equipment.

The block diagram which has arrange | positioned the portable local dust collector of this invention in the maintenance area, and the perspective view of a portable local dust collector The principal part disassembled perspective view of the portable local dust collector as 1st Example of this invention (a suction pump is abbreviate | omitted) The principal part perspective view of the portable local dust collector as 2nd Example of this invention (a suction pump is abbreviate | omitted) The principal part disassembled perspective view of the portable local dust collector as 3rd Example of this invention (a suction pump is abbreviate | omitted) The principal part perspective view of the portable local dust collector as 4th Example of this invention (a suction pump is abbreviate | omitted) The principal part disassembled perspective view of the portable local dust collector as 5th Example of this invention (a suction pump is abbreviate | omitted) The perspective view of the portable local dust collector as 6th Example of this invention Configuration diagram of an example of a clean room

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Manufacturing area 2 Semiconductor manufacturing apparatus 3 Maintenance area 4, 5 Partition 6 Fan filter unit 10 Portable local dust collector as a 1st Example of this invention 11, 21, 31, 41, 51 Housing 11a Upper board part 11b Suction hole 11c Frame portion 11d Side plate portion 11e Bottom plate portion 12, 12a, 12b, 12c, 12d Exhaust port 13, 13a, 13b, 13c, 13d Exhaust hose 14 Suction pump 20 Portable local as a second embodiment of the present invention Dust Collector 30 Portable Local Dust Collector as Third Embodiment of the Present Invention 32 Peripheral Frame Part 33 Partition Frame Part 34 Vent Hole 40 Portable Local Dust Collector as Fourth Example of the Present Invention 42 Slope Portion 50 Portable local dust collector as a fifth embodiment of the present invention 52 Reinforcing member 60 Sixth embodiment of the present invention Portable local dust collector as an example 61 Partition hood

Claims (19)

  As a suction chamber that is configured to be transportable so that it can be placed at an arbitrary position on the floor surface, and also serves as a work table having a work area area and mechanical strength on which an operator can sit and perform a predetermined work A portable local dust collector including a housing and sucking air above the housing in a floor surface direction.   A portable local assembly comprising a portable housing that allows an operator to ride on the upper surface, a plurality of suction holes provided on the upper surface of the housing, and an exhaust port provided on a side surface or the lower surface of the housing. Dust equipment.   The portable local dust collector according to claim 1, wherein a plurality of suction holes are provided over the entire upper surface of the housing.   The portable local dust collector according to claim 1, wherein an exhaust port is provided in a side surface portion of the housing.   The portable local dust collector according to claim 2 or 4, wherein the exhaust port is provided at a plurality of locations.   The portable local dust collector according to any one of claims 1 to 5, wherein an area of an upper surface portion of the housing serving as a work area is a minimum area necessary for a predetermined work.   The portable local dust collector according to any one of claims 1 to 6, wherein an upper surface portion of the housing has a rectangular shape, and an area thereof is a rectangular area having a side of 60 cm to 120 cm.   The portable local dust collector according to any one of claims 1 to 7, wherein a height dimension of the housing is in a range of 1 cm to 20 cm.   The portable local dust collector according to claim 1, wherein the housing has a load resistance of 200 kg or more.   The portable local dust collector according to any one of claims 1 to 9, further comprising a slope portion for removing a step having an inclined surface that spreads at the outer periphery of the housing. The housing includes a frame portion for maintaining the mechanical strength of the housing;
The portable local dust collector according to any one of claims 1 to 10, further comprising an upper plate portion, a side plate portion, and a bottom plate portion serving as outer walls. The housing includes an upper plate portion and a bottom plate portion,
An outer peripheral frame portion also serving as an outer wall made of a hollow pipe having a plurality of air holes facing the internal space of the housing;
The portable local dust collector according to any one of claims 1 to 10, further comprising a partition frame portion made of a hollow pipe that can communicate with the outer peripheral frame portion and divides the internal space into several spaces.   The portable local dust collector according to claim 12, wherein the vent hole provided in the outer peripheral frame portion has a gradually increasing diameter from a position close to the exhaust port to a position far from the exhaust port.   The portable local dust collector according to claim 12 or 13, wherein the partition frame portion has a plurality of ventilation holes facing an internal space of the housing.   The portable local dust collector according to claim 14, wherein the vent hole provided in the partition frame portion has a gradually increasing diameter from a position close to the exhaust port to a position far from the exhaust port.   The portable local dust collector according to any one of claims 1 to 15, wherein a reinforcing member made of a mesh plate is further disposed inside the housing.   The portable local dust collector according to any one of claims 1 to 16, further comprising a partition hood that surrounds the upper space of the housing.   The portable local dust collector according to any one of claims 1 to 17, wherein the weight of the housing is 35 kg or less.   The portable local dust collector according to claim 1, wherein the housing is made of stainless steel, aluminum, or titanium.

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