JP2008273729A5 - - Google Patents
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- Publication number
- JP2008273729A5 JP2008273729A5 JP2007122678A JP2007122678A JP2008273729A5 JP 2008273729 A5 JP2008273729 A5 JP 2008273729A5 JP 2007122678 A JP2007122678 A JP 2007122678A JP 2007122678 A JP2007122678 A JP 2007122678A JP 2008273729 A5 JP2008273729 A5 JP 2008273729A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- levitation unit
- fluid
- unit according
- pressurized fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007122678A JP2008273729A (ja) | 2007-05-07 | 2007-05-07 | 浮上ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007122678A JP2008273729A (ja) | 2007-05-07 | 2007-05-07 | 浮上ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008273729A JP2008273729A (ja) | 2008-11-13 |
| JP2008273729A5 true JP2008273729A5 (https=) | 2010-06-24 |
Family
ID=40052221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007122678A Pending JP2008273729A (ja) | 2007-05-07 | 2007-05-07 | 浮上ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008273729A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2004177C2 (en) | 2010-02-01 | 2011-08-03 | Levitech B V | Dynamic fluid valve and method for establishing the same. |
| US9490156B2 (en) * | 2013-05-23 | 2016-11-08 | Asm Technology Singapore Pte Ltd | Transfer device for holding an object using a gas flow |
| JP7493465B2 (ja) * | 2021-01-07 | 2024-05-31 | 株式会社ディスコ | 加工装置及び被加工物の搬出方法 |
| KR102910930B1 (ko) * | 2023-08-21 | 2026-01-12 | 주식회사 하이럭스 | 비접촉 반송장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1150533B (it) * | 1981-04-25 | 1986-12-10 | Hauni Werke Koerber & Co Kg | Dispositivo di trasporto,per articoli dell'industria lavorante il tabacco |
| JP3955937B2 (ja) * | 2000-06-12 | 2007-08-08 | 東レエンジニアリング株式会社 | 基板の冷却方法およびその装置 |
| JP4789399B2 (ja) * | 2003-05-01 | 2011-10-12 | オリンパス株式会社 | 浮上ユニット |
| JP4614868B2 (ja) * | 2004-11-22 | 2011-01-19 | 日本碍子株式会社 | 接合体及びその製造方法 |
| JP2006306611A (ja) * | 2005-05-02 | 2006-11-09 | Sumitomo Heavy Ind Ltd | 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置 |
-
2007
- 2007-05-07 JP JP2007122678A patent/JP2008273729A/ja active Pending
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