JP2008273729A5 - - Google Patents

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Publication number
JP2008273729A5
JP2008273729A5 JP2007122678A JP2007122678A JP2008273729A5 JP 2008273729 A5 JP2008273729 A5 JP 2008273729A5 JP 2007122678 A JP2007122678 A JP 2007122678A JP 2007122678 A JP2007122678 A JP 2007122678A JP 2008273729 A5 JP2008273729 A5 JP 2008273729A5
Authority
JP
Japan
Prior art keywords
chamber
levitation unit
fluid
unit according
pressurized fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007122678A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008273729A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007122678A priority Critical patent/JP2008273729A/ja
Priority claimed from JP2007122678A external-priority patent/JP2008273729A/ja
Publication of JP2008273729A publication Critical patent/JP2008273729A/ja
Publication of JP2008273729A5 publication Critical patent/JP2008273729A5/ja
Pending legal-status Critical Current

Links

JP2007122678A 2007-05-07 2007-05-07 浮上ユニット Pending JP2008273729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007122678A JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007122678A JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Publications (2)

Publication Number Publication Date
JP2008273729A JP2008273729A (ja) 2008-11-13
JP2008273729A5 true JP2008273729A5 (cg-RX-API-DMAC7.html) 2010-06-24

Family

ID=40052221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007122678A Pending JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Country Status (1)

Country Link
JP (1) JP2008273729A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2004177C2 (en) 2010-02-01 2011-08-03 Levitech B V Dynamic fluid valve and method for establishing the same.
US9490156B2 (en) * 2013-05-23 2016-11-08 Asm Technology Singapore Pte Ltd Transfer device for holding an object using a gas flow
JP7493465B2 (ja) * 2021-01-07 2024-05-31 株式会社ディスコ 加工装置及び被加工物の搬出方法
KR102910930B1 (ko) * 2023-08-21 2026-01-12 주식회사 하이럭스 비접촉 반송장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1150533B (it) * 1981-04-25 1986-12-10 Hauni Werke Koerber & Co Kg Dispositivo di trasporto,per articoli dell'industria lavorante il tabacco
JP3955937B2 (ja) * 2000-06-12 2007-08-08 東レエンジニアリング株式会社 基板の冷却方法およびその装置
JP4789399B2 (ja) * 2003-05-01 2011-10-12 オリンパス株式会社 浮上ユニット
JP4614868B2 (ja) * 2004-11-22 2011-01-19 日本碍子株式会社 接合体及びその製造方法
JP2006306611A (ja) * 2005-05-02 2006-11-09 Sumitomo Heavy Ind Ltd 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置

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