JP2008270073A - Three-dimensional image construction method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To construct an accurate and clear three-dimensional image of a sample by superposing a plurality of continuously-acquired cross-sectional images without being affected by drift. <P>SOLUTION: A three-dimensional image construction method executes the following steps, that is, a step for forming a deposition film DP on the surface of a sample 2, a step for forming a correction mark M, linearly extending toward one direction, on the deposition film, a step for executing etching so as to cross the correction mark and exposing the cross-section of the deposition film and that of the sample, a step for acquiring an exposed cross-sectional image of the deposition film and that of the sample, a step for continuously acquiring a plurality of cross-sectional images by repeatedly executing each of the above steps, and a step for constructing a basic three-dimensional image by superposing the plurality of cross-sectional images in the acquisition order on the basis of the correction mark. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a three-dimensional image construction method for obtaining a cross-sectional image of a sample and then superimposing the cross-sectional images to construct a three-dimensional image.

As one of the methods for analyzing the internal structure of a sample such as a semiconductor device or performing a three-dimensional observation, a plurality of cross-sectional images of the sample were obtained while repeating etching using a focused ion beam (FIB). Thereafter, a method of constructing a three-dimensional image by superimposing these cross-sectional images is known.
This method is a method called Cut & Seee using a charged particle beam device, and in addition to being able to see a cross-sectional image of a sample, it is possible to perform other three-dimensional observations of a sample from various directions. Has no advantage. Specifically, the sample is irradiated with FIB and etched to expose the cross section. Subsequently, the exposed cross section is observed with an SEM to obtain a cross-sectional image. Subsequently, etching is performed again to expose the next cross section, and then a second cross-sectional image is acquired by SEM observation. In this way, a plurality of cross-sectional images are acquired by repeating the etching process and the SEM observation. And it is a method of constructing a three-dimensional image by superimposing a plurality of cross-sectional images acquired last.

  By the way, in order to construct an accurate three-dimensional image, it is necessary to superimpose a plurality of cross-sectional images so as not to shift their positions. However, in the actual charged particle beam apparatus, drift occurs, so that each cross-sectional image is slightly displaced when a plurality of cross-sectional images are acquired. Therefore, it has been difficult to construct an accurate and clear three-dimensional image. In addition, as a cause of drift, for example, temperature drift due to temperature change of a stage or the like on which a sample is placed, mechanical shake of an apparatus constituent unit, FIB irradiation accuracy at the time of etching processing, and SEM observation There are irradiation accuracy of an electron beam (EB) and the like.

Thus, an apparatus that improves FIB irradiation accuracy, which is one of the causes of drift, is known (see Patent Document 1). According to this apparatus, since the influence of drift can be reduced, it is possible to eliminate as much position displacement as possible when superimposing the sectional images.
In addition, when constructing a three-dimensional image, an apparatus that constructs a three-dimensional image by superimposing planar images instead of superimposing cross-sectional images of a sample is also known (see Patent Document 2).
JP 2003-331775 A Japanese Patent Laid-Open No. 4-188553

However, the following problems remain in the conventional method.
That is, according to the apparatus described in Patent Document 1, only the FIB irradiation accuracy, which is one of the causes of drift, is improved to reduce drift, but it occurs even slightly. It is impossible to completely eliminate the drift itself.
Therefore, even if drift is reduced by this method, in order to construct a three-dimensional image that is as accurate as possible, it is necessary to make fine adjustments manually when overlaying multiple cross-sectional images, or when the sample has a certain pattern. In other words, work such as automatic correction so that the patterns are continuously connected must be performed in parallel.

  However, this automatic correction method has a large cross-sectional change in a minute pattern such as an IC or LSI in recent years, and it is difficult to correct a positional deviation using pattern matching. As a result, the operator currently adjusts the positional deviation of the cross-sectional images manually one by one.

  In addition, the apparatus described in Patent Document 2 is different only in the types of images to be superimposed, and it is difficult to construct an accurate three-dimensional image due to the influence of drift. Particularly, since the cross-sectional images in this case are obtained by overlapping the planar images, even the cross-sectional images cannot be accurately displayed due to the influence of drift.

  The present invention has been made in consideration of such circumstances, and its purpose is to superimpose a plurality of continuously acquired cross-sectional images without being affected by drift, and to obtain an accurate and clear sample. To provide a 3D image construction method capable of constructing a 3D image.

The present invention provides the following means in order to solve the above problems.
A three-dimensional image construction method according to the present invention uses a protection step of irradiating a surface of a sample with a focused ion beam and supplying a source gas to form a deposition film for protecting the surface, and using the focused ion beam. Forming a correction mark extending in a line in one direction on the deposition film, and irradiating the focused ion beam across the correction mark while irradiating the focused ion beam and the sample Etching process to expose the cross section of the deposition film and the sample, and irradiating the exposed cross section of the deposition film and the sample with the charged particle beam and releasing from the deposition film and the sample by the irradiation An acquisition step of acquiring a cross-sectional image based on the secondary charged particles, and repeating the exposure step and the acquisition step a predetermined number of times The correction mark reflected in the cross-sectional image is constructed so as to construct a repetitive step of acquiring a plurality of the cross-sectional images continuously toward the one direction and a correction mark formed during the mark forming step. And a construction step of constructing a basic three-dimensional image by superimposing the plurality of cross-sectional images in the order in which they are acquired as a reference.

In the three-dimensional image construction method according to the present invention, it is possible to construct a three-dimensional image of a sample by continuously obtaining a plurality of cross-sectional images and then superimposing the plurality of cross-sectional images.
First, a focused ion beam (FIB) or electron beam (EB) is irradiated on the surface of the sample, and a source gas for forming a deposition film is supplied to protect the surface of the sample. A protective process for forming a film is performed. Next, a mark forming process is performed for forming a correction mark using the deposition film formed as the protective film. At this time, the correction mark is formed so as to extend in a line in one direction by using the FIB.

Next, an exposure process is performed in which the deposition film and the sample are etched while irradiating the FIB so as to cross the correction mark formed in a line shape, and the cross sections of the deposition film and the sample are exposed. At this time, since the FIB is irradiated across the correction mark, the cross section of the correction mark is also exposed on the cross section of the deposition film.
Next, the exposed deposition film and the cross section of the sample are irradiated with a charged particle beam. Then, secondary charged particles are generated from the deposition film and the cross section of the sample by the irradiation of the charged particle beam. Then, a cross-sectional image of the deposition film and the sample is acquired based on the secondary charged particles. By this acquisition step, the first cross-sectional image can be acquired. Note that this cross-sectional image also includes the cross section of the correction mark.

Subsequently, a repetition process is performed in which the exposure process and the acquisition process described above are repeated a predetermined number of times in one direction. Thereby, a plurality of cross-sectional images of the deposition film and the sample can be obtained continuously. In addition, the correction mark is reflected in all the cross-sectional images in common.
Then, after acquiring a plurality of cross-sectional images, a construction process is performed in which the cross-sectional images are superimposed in the order of acquisition. At this time, the adjacent cross-sectional images are sequentially overlapped with each other based on the correction mark reflected in the cross-sectional image. That is, a plurality of cross-sectional images are overlaid so as to construct a linear correction mark formed during the mark forming process. Thereby, even if each cross-sectional image is affected by drift when each cross-sectional image is acquired, the cross-sectional images can be superimposed while correcting the positional deviation.

  As a result, an accurate and clear three-dimensional image of the deposition film and sample, that is, a basic three-dimensional image can be constructed. Therefore, the three-dimensional observation of the sample and the analysis of the internal structure can be performed accurately. Further, unlike the prior art, it is not necessary for the operator to manually adjust the positional deviation of the cross-sectional images one by one, so that the burden on the operator when performing image processing can be reduced as much as possible.

  The three-dimensional image construction method according to the present invention is the three-dimensional image construction method according to the present invention, wherein after the construction step, the three-dimensional image of the deposition film is removed from the basic three-dimensional image, and the sample The extraction step of extracting only the three-dimensional image is performed.

  In the three-dimensional image construction method according to the present invention, the three-dimensional image of the deposition film is removed from the basic three-dimensional image and only the three-dimensional image of the sample is extracted. Structural analysis can be performed.

  The three-dimensional image construction method according to the present invention is the above-described three-dimensional image construction method according to the present invention, wherein the irradiation position is determined with reference to the correction mark before the focused ion beam is irradiated in the exposure step. It is characterized by correcting.

In the three-dimensional image construction method according to the present invention, the irradiation position of the FIB is corrected with reference to the correction mark in the exposure process in which the FIB is irradiated to expose the cross section of the deposition film and the sample. That is, after performing FIB drift correction, etching is performed. Thereby, since the drift accompanying the irradiation position error of FIB can be reduced as much as possible, the burden of image processing can be reduced in the construction process to be performed later. Therefore, the construction process can be performed efficiently. In addition, a plurality of cross-sectional images can be superimposed more accurately.

  Further, the three-dimensional image construction method according to the present invention is the three-dimensional image construction method according to any one of the present invention, wherein the correction mark is used as a reference before the charged particle beam is irradiated in the acquisition step. The irradiation position is corrected.

  In the three-dimensional image construction method according to the present invention, the irradiation position of the charged particle beam is corrected with reference to the correction mark in the acquisition step of acquiring the sectional image of the deposition film and the sample by irradiating the charged particle beam. To do. That is, the cross-sectional image is acquired after correcting the drift of the charged particle beam. Thereby, since the drift accompanying the irradiation position error of the charged particle beam can be reduced as much as possible, the burden of image processing can be reduced during the construction process to be performed later. Therefore, the construction process can be performed efficiently. In addition, a plurality of cross-sectional images can be superimposed more accurately.

  The three-dimensional image construction method according to the present invention is the above three-dimensional image construction method according to the present invention, wherein the deposition film is etched by irradiation with the focused ion beam in the mark forming step. The correction mark is formed by the method described above.

  In the three-dimensional image construction method according to the present invention, since the correction film is formed by etching the deposition film, there is no problem that the correction mark is peeled off and the reliability as an index is improved. can do.

  Further, the three-dimensional image construction method according to the present invention is the three-dimensional image construction method according to any one of the present invention, wherein the source gas is supplied simultaneously with the irradiation of the focused ion beam during the mark formation step. The correction mark is formed by further depositing a deposition film on the deposition film.

  In the three-dimensional image construction method according to the present invention, a correction film is formed by further depositing a deposition film on the deposition film. Therefore, unlike the case where the correction mark is formed by etching, the sample is etched. There is no risk of unintended parts being processed.

  The three-dimensional image construction method according to the present invention is characterized in that, in the three-dimensional image construction method according to any one of the above-described present invention, a plurality of the correction marks are formed in parallel during the mark formation step. Is.

  In the three-dimensional image construction method according to the present invention, when each cross-sectional image is acquired, a plurality of cross-sections of the correction mark are exposed. Therefore, when performing the construction process, the positional deviation correction can be performed based on a plurality of correction marks, so that a more accurate three-dimensional image of the sample can be constructed.

  According to the three-dimensional image construction method according to the present invention, it is possible to construct a three-dimensional image of a sample on which accurate and clean cross-sectional images are superimposed without being affected by drift, The internal structure can be analyzed accurately. In addition, the burden on the operator when performing image processing can be reduced as much as possible.

  Hereinafter, an embodiment of a three-dimensional image construction method according to the present invention will be described with reference to FIGS. In the present embodiment, a FIB-SEM composite type charged particle beam apparatus capable of irradiating two types of charged particle beams of a focused ion beam (FIB) and an electron beam (EB) will be described as an example. .

First, the charged particle beam apparatus will be described.
As shown in FIG. 1, the charged particle beam apparatus 1 includes a sample stage 3 on which a sample 2 is placed, a stage 4 that displaces the sample stage 3, and irradiation that irradiates the sample 2 with FIB and EB. A mechanism 5, a secondary charged particle detector 6 that detects secondary charged particles E generated by irradiation with FIB and EB, and a source gas G that forms a deposition film DP near the surface of the sample 2 irradiated with FIB , A control unit 8 that generates image data of the sample 2 based on the detected secondary charged particles E, and a display unit 9 that displays the generated image data as a sample image. ing.

The sample 2 is housed in a vacuum sample chamber 10, and FIB and EB irradiation, supply of a source gas G, and the like are performed in the vacuum sample chamber 10. Further, as shown in FIG. 2, the sample 2 of the present embodiment is an example of a semiconductor device in which a contact hole 2c filled with a metal material 2b is formed in a through hole 2a having openings on both sides. Will be described.
The stage 4 is operated in accordance with an instruction from the control unit 8, and for example, the sample stage 3 can be displaced about five axes. That is, as shown in FIG. 1, the sample stage 3 is moved along the X axis and the Y axis that are parallel to the horizontal plane and orthogonal to each other, and the Z axis that is orthogonal to the X axis and the Y axis, respectively. The sample stage 3 can be rotated about the Z axis, and the sample stage 3 can be tilted about the X axis (or Y axis). In this way, by displacing the sample stage 3 along the five axes, the FIB and EB can be irradiated with the sample 2 being displaced in any posture.

  The irradiation mechanism 5 includes a FIB column 15 that irradiates the sample 2 with FIB and an SEM column 16 that irradiates EB. The FIB column 15 includes an ion generation source 15a and an ion optical system 15b. After the ions C generated by the ion generation source 15a are finely squeezed into an FIB by the ion optical system 15b, the sample 2 is irradiated. It is supposed to be. The SEM column 16 includes an electron generation source 16a and an electron optical system 16b. The electron D generated by the electron generation source 16a is narrowed down by the electron optical system 16b to form an electron beam EB, and then irradiated. It is like that.

  The control unit 8 comprehensively controls each of the above components and converts the secondary charged particle E detected by the secondary charged particle detector 6 into a luminance signal to generate a sample image (SEM image). is doing. And the produced | generated sample image is memorize | stored in the memory part 8a, and it is displayed on the display part 9. FIG. As a result, the operator can confirm the generated sample image. Further, an input unit 8b that can be input by an operator is connected to the control unit 8, and each component can be controlled based on a signal input by the input unit 8b. That is, the operator can operate the stage 4 to displace the sample stage 3 and the sample 2, and can control the irradiation timing of the FIB or EB, the supply timing of the source gas G, and the like. In addition, the control unit 8 can automatically acquire a sample image and the like.

Next, a three-dimensional image construction method for constructing a three-dimensional image of the sample 2 using the charged particle beam apparatus 1 configured as described above will be described.
In this 3D image construction method, a protection process, a mark formation process, an exposure process, an acquisition process, a repetition process, a construction process, and an extraction process are sequentially performed to obtain a plurality of cross-sectional images (sample images) X continuously. This is a method of constructing a three-dimensional image of the sample 2 by superimposing these plural cross-sectional images X. Each of these steps will be described in detail below. In the present embodiment, a case will be described in which a three-dimensional image is constructed by acquiring a cross-sectional image X of a region where the contact hole 2c is formed, instead of constructing a three-dimensional image of the entire sample 2.

First, as shown in FIG. 1, FIB is irradiated on the surface of the sample 2 while appropriately moving the sample 2 in the XY directions by the stage 4, and a source gas G is supplied to protect the surface of the sample 2. A protection process for forming the position film DP is performed. At this time, as shown in FIG. 3, the deposition film DP is formed so as to cover at least the region where the contact hole 2 c is formed rather than the entire surface of the sample 2.
Subsequently, rough processing is performed to ensure a field of view when the cross-sectional image X is acquired in the subsequent steps. That is, the observation start position is irradiated with FIB and etching (deep drilling) is performed to form a V-shaped groove 20 as shown in FIG.

  Next, a mark forming process for forming the correction mark M using the deposition film DP formed as the protective film is performed. At this time, FIB is irradiated while moving the sample 2 in one direction by the stage 4, and the deposition film DP is etched into a line shape. Thereby, as shown in FIG. 5, the correction mark M can be formed so as to extend in a line in one direction.

After forming the correction mark M, the acquisition of the cross-sectional image X is started. First, as shown in FIG. 6, the operator inputs the width (1-line processing width) W of the cross-sectional image X and the number of cross-sectional images X to be acquired to the control unit 8 via the input unit 8b. Based on this input condition, the controller 8 automatically performs the subsequent steps to acquire a predetermined number of cross-sectional images X.
First, etching is performed by irradiating FIB while moving the sample stage 3 by the stage 4 so as to cross the correction mark M formed in a line, and exposing the cross section of the deposition film DP and the sample 2 respectively. Perform the process. At this time, the etching process is performed by irradiating the FIB while moving the sample stage 3 so that the cross section of the deposition film DP and the sample 2 becomes a plane orthogonal to the correction mark M. In particular, since FIB is irradiated across the correction mark M in this step, the cross section of the correction mark M is exposed on the cross section of the deposition film DP as shown in FIG.

  Next, as shown in FIG. 6, the exposed deposition film DP and the cross section of the sample 2 are irradiated with EB. Then, secondary charged particles E are generated from the deposition film DP and the cross section of the sample 2 by the irradiation of the EB. The secondary charged particle detector 6 detects the secondary charged particle E and outputs it to the control unit 8. As shown in FIG. 8, the control unit 8 generates a cross-sectional image X from the transmitted secondary charged particles E, and then stores the cross-sectional image X in the memory unit 8 a and displays it on the display unit 9. By this acquisition step, the first cross-sectional image X can be acquired. In this cross-sectional image X, the cross-section of the correction mark M is also reflected. Further, the operator can confirm the cross-sectional image X by the display unit 9.

Subsequently, the control unit 8 performs a repetition process in which the exposure process and the acquisition process described above are repeatedly performed a predetermined number of times in one direction. Thereby, a plurality of deposition images DP and a plurality of cross-sectional images X of the sample 2 can be obtained continuously. Moreover, the correction mark M is reflected in all the cross-sectional images X in common.
Then, after the acquisition of the plurality of cross-sectional images X is completed, the operator causes the control unit 8 to perform a construction process of superimposing the cross-sectional images X stored in the memory unit 8a in the order of acquisition. Alternatively, the operator himself performs this construction process. At this time, with reference to the correction mark M reflected in the cross-sectional image X, the adjacent cross-sectional images X are sequentially superimposed as shown in FIG. That is, a plurality of cross-sectional images X are overlaid so as to construct a linear correction mark M formed during the mark forming process. Thereby, when each cross-sectional image X is acquired, even if each cross-sectional image X is affected by the drift, the cross-sectional images X can be superimposed while correcting the positional deviation.

As a result, as shown in FIG. 9, an accurate and clear three-dimensional image of the deposition film DP and the sample 2, that is, a basic three-dimensional image can be constructed. Finally, an extraction process is performed in which the three-dimensional image of the deposition film DP is removed from the basic three-dimensional image to extract the three-dimensional image of the sample 2. As a result, an accurate and beautiful three-dimensional image of the sample 2 can be constructed without being affected by drift. Therefore, the operator can accurately perform the three-dimensional observation of the sample 2 in which the contact hole 2c is formed and the analysis of the internal structure. In addition, the burden on the operator when performing image processing can be reduced as much as possible.
Further, in the present embodiment, since the correction mark M is formed by etching the deposition film DP, there is no problem that the correction mark M is peeled off and the reliability as an index is improved. be able to.

  In the above embodiment, the irradiation position may be corrected using the correction mark M as a reference before the FIB is irradiated. That is, in the exposure process in which the FIB is irradiated to expose the deposition film DP and the cross section of the sample 2, the etching process is performed after the FIB drift correction is performed. By doing so, the drift accompanying the FIB irradiation position error can be reduced as much as possible, so that the burden of image processing can be reduced during the construction process to be performed later. Therefore, the construction process can be performed efficiently. In addition, a plurality of cross-sectional images X can be more accurately superimposed.

  Further, the irradiation position may be corrected based on the correction mark M not only when the FIB is irradiated but also when the EB is irradiated. In other words, in the acquisition step of acquiring the deposition film DP and the cross-sectional image X of the sample 2 by irradiating EB, the cross-sectional image X is acquired after performing the EB drift correction. By doing so, it is possible to reduce the drift accompanying the EB irradiation position error as much as possible.

  The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, in the above embodiment, the correction mark M is formed by etching the deposition film DP. However, the present invention is not limited to this case. For example, in the mark forming process, the source gas G is supplied simultaneously with the FIB irradiation, and the deposition mark DP is further deposited on the deposition film DP as shown in FIG. It may be formed. Even in this case, the same effects can be achieved. In addition, unlike the case where the correction mark M is formed by etching, there is no possibility that an unintended portion of the sample 2 is processed by any chance during the etching.

  In the above embodiment, one correction mark M is formed. However, the number is not limited to one, and a plurality of correction marks M may be formed in parallel. In this case, when each cross-sectional image X is acquired, a plurality of cross-sections of the correction mark M are exposed. Therefore, when performing the construction process, the positional deviation correction can be performed based on the plurality of correction marks M, so that a more accurate three-dimensional image of the sample 2 can be constructed.

  In the above embodiment, the FIB-SEM composite type charged particle beam device 1 having the FIB column 15 and the SEM column 16 is used. However, the three-dimensional image construction method according to the present invention uses this charged particle beam device. It is not limited to 1. For example, a FIB-FIB composite type charged particle beam apparatus that employs the FIB column 15 instead of the SEM column 16 may be used. In this case, when the cross-sectional image X is acquired, the cross-sectional image X (sample image) can be acquired as a SIM image by irradiating FIB instead of EB. Even in this case, the same effect can be obtained. That is, when acquiring the cross-sectional image X, any configuration that can irradiate a charged particle beam, such as FIB or EB, may be used.

  Further, instead of the composite type described above, an FIB single type charged particle beam apparatus provided with only one FIB column 15 may be used. In this case, the stage 4 is tilted so that the incident angle of the FIB with respect to the sample 2 can be varied, so that the FIB irradiation angle changes during the etching process and when the cross-sectional image X is acquired. In addition, the FIB conditions are designed so as to be switched between the time of etching processing and the time of obtaining the cross-sectional image X. By doing so, a three-dimensional image of the sample 2 can be constructed even when only one FIB column 15 is provided. It is also possible to automatically construct a three-dimensional image by creating a recipe for the conditions at the time of etching processing and observing the cross-sectional image.

It is a block diagram which shows one Embodiment of the charged particle beam apparatus used in order to perform the three-dimensional image construction method which concerns on this invention. It is a perspective view of the sample which performs a three-dimensional image construction. It is a figure for demonstrating one process at the time of constructing the three-dimensional image of the sample shown in FIG. 2, Comprising: It is a figure which shows the state which formed the deposition film on the surface of the sample. From the state shown in FIG. 3, the sample is roughly processed into a V shape to expose the cross section of the sample and the deposition film. From the state shown in FIG. 4, a correction mark is formed on the deposition film. FIG. 6 is a diagram illustrating a state in which a plurality of cross-sectional images are continuously acquired by repeatedly performing etching processing and cross-sectional image acquisition in one direction from the state illustrated in FIG. 5. It is a figure which shows the cross section of the deposition film and sample which were exposed by the etching process. It is a figure which shows the state which has overlapped the cross-sectional image on the basis of the correction mark. (A) is the figure which looked at the three-dimensional image constructed by superimposing the cross-sectional images from above the sample, and (b) is a cross-sectional perspective view along the AA line of (a). It is the figure which showed the modification of the correction mark.

Explanation of symbols

E Secondary charged particle G Raw material gas M Correction mark X Cross-sectional image DP Deposition film EB Electron beam (charged particle beam)
FIB Focused ion beam (charged particle beam)
2 samples

Claims (7)

A protection step of irradiating the surface of the sample with a focused ion beam and supplying a source gas to form a deposition film for protecting the surface;
A mark forming step of forming a correction mark on the deposition film extending in a line shape in one direction using the focused ion beam;
An exposure step of etching the deposition film and the sample while irradiating the focused ion beam across the correction mark to expose a cross section of the deposition film and the sample;
An acquisition step of irradiating a cross section of the exposed deposition film and the sample with a charged particle beam and acquiring a cross-sectional image based on secondary charged particles emitted from the deposition film and the sample by the irradiation;
Repeating the exposure step and the acquisition step a predetermined number of times, continuously acquiring a plurality of the cross-sectional images toward the one direction, and
In order to construct the correction mark formed during the mark forming step, the basic three-dimensional image is formed by superimposing the plurality of cross-sectional images in the order in which the plurality of cross-sectional images are acquired with reference to the correction mark reflected in the cross-sectional image. A three-dimensional image construction method characterized by performing a construction step for construction. In the three-dimensional image construction method according to claim 1,
After the construction step, a three-dimensional image construction method comprising performing an extraction step of removing only the three-dimensional image of the sample by removing the three-dimensional image of the deposition film from the basic three-dimensional image. In the three-dimensional image construction method according to claim 1 or 2,
In the exposure step, the irradiation position is corrected using the correction mark as a reference before the focused ion beam is irradiated. In the three-dimensional image construction method according to any one of claims 1 to 3,
In the acquisition step, the irradiation position is corrected using the correction mark as a reference before irradiating the charged particle beam. In the three-dimensional image construction method according to any one of claims 1 to 4,
In the mark formation step, the correction mark is formed by etching the deposition film by irradiation with the focused ion beam. In the three-dimensional image construction method according to any one of claims 1 to 4,
In the mark formation step, the correction gas is formed by supplying the source gas simultaneously with the irradiation of the focused ion beam and further depositing a deposition film on the deposition film. 3D image construction method. In the three-dimensional image construction method according to any one of claims 1 to 6,
A three-dimensional image construction method, wherein a plurality of the correction marks are formed in parallel in the mark forming step.

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