JP2008268059A - Sample holder - Google Patents

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JP2008268059A
JP2008268059A JP2007112801A JP2007112801A JP2008268059A JP 2008268059 A JP2008268059 A JP 2008268059A JP 2007112801 A JP2007112801 A JP 2007112801A JP 2007112801 A JP2007112801 A JP 2007112801A JP 2008268059 A JP2008268059 A JP 2008268059A
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Prior art keywords
sample
support member
sample support
sample holder
optical transmission
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Takao Nakagawa
孝郎 中川
Koji Masutani
浩二 増谷
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ST Japan Inc
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ST Japan Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample holder that can be used for an analysis in which measuring light is transmitted and that makes it possible to prevent a sample from deforming or staining. <P>SOLUTION: A sample holder (1) is constituted so as to include: a sample-support member (2), provided with a plurality of suction holes (2a), that extend from a front-surface side to a back-surface side of the sample-support member (2) and made of optically transmitting material, whose front surface is a sample-support surface (2b) on which a sample (S) is supported; and a reduced-pressure space forming member (4), having a reduced-pressure space (K) to which the plurality of suction holes (2) are connected and of which air is exhausted so that the reduced-pressure space (K) is under a negative pressure, with respect to the front surface side of the sample-support member (2) which supports the sample-support member (2). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、赤外光等の測定光が入射される試料を保持する試料ホルダに関し、特に、測定光が試料および試料ホルダを透過する測定が可能な前記試料ホルダに関する。
本発明の試料ホルダは、顕微分析又は分光分析等に使用される測定光の光路中に着脱自在に装着して使用される。
The present invention relates to a sample holder for holding a sample to which measurement light such as infrared light is incident, and more particularly to the sample holder capable of measuring the measurement light through the sample and the sample holder.
The sample holder of the present invention is used by being detachably mounted in the optical path of measurement light used for microscopic analysis or spectroscopic analysis.

従来、試料を分析する際に使用される試料ホルダとして、次の(J01),(J02)の技術が知られている。
(J01)特許文献1(特開平9−61319号公報)記載の技術
特許文献1には、紙や布などの平面上で薄い試料表面の光学特性を測定するために、試料が表面に支持される金網のようなメッシュ状支持体(12)と、メッシュ状支持体(12)が支持され且つ内部が排気される試料台枠(11)とを有する試料ステージを使用して、試料をメッシュ状支持体(12)に圧力差により吸着して保持する技術が記載されている。
Conventionally, the following techniques (J01) and (J02) are known as sample holders used when analyzing a sample.
(J01) Technology described in Patent Document 1 (Japanese Patent Laid-Open No. 9-61319) In Patent Document 1, a sample is supported on the surface in order to measure optical characteristics of a thin sample surface on a plane such as paper or cloth. The sample is meshed using a sample stage having a mesh support (12) such as a metal mesh and a sample stand (11) on which the mesh support (12) is supported and the inside is evacuated. A technique for adsorbing and holding the support (12) by a pressure difference is described.

(J02)特許文献2(特開平9−15213号公報)記載の技術
特許文献2には、サンプルが光を吸収したことに起因するサンプルの体積変化により発生する音響信号を計測する光吸収計測装置用のサンプルホルダーに関し、パイプ状のサンプルホルダー(1)の内部を排気して減圧すると共に、Oリングのような弾性支持部材(2)を介して、円板状のサンプル(7)を吸引して支持する技術が記載されている。また、前記特許文献2には、音響検出において雑音(ノイズ)の影響を低減するために、サンプル(7)を通過した後の入射光(6)の光路に、何も配置しないようにしたり、音を伝えにくい弾性体(9)を配置したり、光を吸収しにくい(透過しやすい)合成石英ガラス(34)を配置することも記載されている。
(J02) Technology described in Patent Document 2 (Japanese Patent Application Laid-Open No. 9-15213) Patent Document 2 discloses an optical absorption measurement device that measures an acoustic signal generated by a volume change of a sample caused by the sample absorbing light. As for the sample holder, the inside of the pipe-shaped sample holder (1) is evacuated and decompressed, and the disc-shaped sample (7) is sucked through the elastic support member (2) such as an O-ring. The technology to support is described. Further, in Patent Document 2, in order to reduce the influence of noise (noise) in acoustic detection, nothing is arranged in the optical path of incident light (6) after passing through the sample (7), It is also described that an elastic body (9) that hardly transmits sound or a synthetic quartz glass (34) that hardly absorbs light (is easily transmitted) is also described.

特開平9−61319号公報(段落番号「0006」、第1図、第2図)Japanese Patent Laid-Open No. 9-61319 (paragraph number “0006”, FIGS. 1 and 2) 特開平9−15213号公報(段落番号「0019」〜「0027」、「0041」、第1図、第2図、第4図、第7図)Japanese Patent Laid-Open No. 9-15213 (paragraph numbers “0019” to “0027”, “0041”, FIG. 1, FIG. 2, FIG. 4, FIG. 7)

前記従来技術(J01)では、金網のような金属体を使用すると、入射光が金網で遮断されてしまう恐れがある。したがって、従来技術(J01)記載の技術では、試料表面での反射光を利用する分析には使用可能であるが、透過光を利用する分析には十分な光量が取れないため使用できない問題がある。
前記従来技術(J02)では、Oリングのような弾性支持部材を介してパイプ状のサンプルホルダーに支持する構成では、中央部が吸引され、周縁部がOリングで支持されるため、吸引された中央部が湾曲してしまい、試料が変形する恐れがある。また、試料が小さい場合には利用できない。
In the prior art (J01), when a metal body such as a wire mesh is used, incident light may be blocked by the wire mesh. Therefore, the technique described in the prior art (J01) can be used for analysis using reflected light on the sample surface, but cannot be used because sufficient light cannot be obtained for analysis using transmitted light. .
In the prior art (J02), in the configuration in which the pipe-shaped sample holder is supported via an elastic support member such as an O-ring, the central portion is sucked and the peripheral portion is supported by the O-ring, and thus sucked. There is a possibility that the center portion is curved and the sample is deformed. Also, it cannot be used when the sample is small.

従来のFT−IR(Fourier Transform Infrared Spectroscopy:フーリエ変換赤外分光法)のような透過光を利用する分析法の装置では、試料は、両面テープやガム等で試料ホルダに保持されたり、ネジや板バネ等で挟み付けて試料ホルダに固定されていることが一般的であった。しかし、両面テープ等を使用すると粘着剤が試料や試料ホルダに付着し、試料や試料ホルダが汚れてしまうという問題があった。また、ネジ等を使用すると試料が変形する恐れがあるという問題があった。   In an analytical apparatus using transmitted light such as conventional FT-IR (Fourier Transform Infrared Spectroscopy), the sample is held on a sample holder with double-sided tape or gum, In general, it is fixed to a sample holder by being sandwiched by a leaf spring or the like. However, when a double-sided tape or the like is used, there is a problem that the adhesive adheres to the sample or the sample holder and the sample or the sample holder becomes dirty. In addition, there is a problem that the use of screws or the like may cause deformation of the sample.

本発明は、前述の事情に鑑み、測定光を透過させる分析が可能で、試料の変形や汚染を防止可能な試料ホルダを提供することを技術的課題とする。   In view of the above-described circumstances, it is a technical object of the present invention to provide a sample holder that can perform analysis that allows measurement light to pass therethrough and can prevent deformation and contamination of the sample.

次に、前記課題を解決するために案出した本発明の構成を説明するが、本発明の構成要素には、後述の実施例の構成要素との対応を容易にするため、実施例の構成要素の符号をカッコで囲んだものを付記している。なお、本発明を後述の実施例の符号と対応させて説明する理由は、本発明の理解を容易にするためであり、本発明の範囲を実施例に限定するためではない。   Next, the configuration of the present invention devised to solve the above problems will be described. The configuration of the embodiment is used in order to facilitate correspondence with the configuration elements of the embodiments described later. The element code is enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described later is to facilitate the understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(本発明)
前記技術的課題を解決するために、請求項1記載の試料ホルダ(1,1′,1″,41)は、
表面の試料支持面(2b)に試料(S,S1,S2,S3)が支持され且つ表面側から裏面側に延びる複数の吸引孔(2a)が形成された光学透過材料製の試料支持部材(2,2′,2″)と、
前記複数の吸引孔(2a)が接続され且つ前記試料支持部材(2,2′,2″)の表面側に対して減圧された減圧空間(K)を有し、前記試料支持部材(2,2′,2″)を支持する減圧空間形成部材(4,11,11″)と、
を備えたことを特徴とする。
(Invention)
In order to solve the technical problem, the sample holder (1, 1 ', 1 ", 41) according to claim 1,
A sample support member made of an optically transmissive material, in which a sample (S, S1, S2, S3) is supported on the surface sample support surface (2b) and a plurality of suction holes (2a) extending from the front surface side to the back surface side are formed. 2, 2 ', 2 ")
The plurality of suction holes (2a) are connected and have a decompression space (K) decompressed with respect to the surface side of the sample support member (2, 2 ′, 2 ″), and the sample support member (2, 2 ', 2 ") and a decompression space forming member (4, 11, 11");
It is provided with.

(本発明の作用)
前記構成要件を備えた請求項1記載の試料ホルダ(1,1′,1″,41)は、光学透過材料製の試料支持部材(2,2′,2″)の表面の試料支持面(2b)には、試料(S,S1,S2,S3)が支持される。前記試料支持部材(2,2′,2″)には、表面側から裏面側に延びる複数の吸引孔(2a)が形成されている。前記試料支持部材(2,2′,2″)を支持する減圧空間形成部材(4,11,11″)は、減圧空間(K)を有する。前記減圧空間(K)は、前記複数の吸引孔(2a)が接続され、且つ、前記試料支持部材(2,2′,2″)の表面側に対して減圧されている。
したがって、試料支持面(2b)に支持された試料(S,S1,S2,S3)は、減圧された減圧空間(K)に接続された吸引孔(2a)により吸引され、試料支持面(2b)に吸着、保持される。この結果、試料(S,S1,S2,S3)は、試料支持面(2b)により面で保持され且つ圧力差で吸着されるため、試料(S,S1,S2,S3)の変形や粘着剤を使用することによる汚染を防止することができる。また、試料支持面(2b)を構成する試料支持部材(2,2′,2″)が光学透過材料により構成されているため、透過光の損失が低く、透過光を利用した分析を行うことができる。
(Operation of the present invention)
The sample holder (1, 1 ', 1 ", 41) according to claim 1 having the above-described structural requirements is a sample support surface (2) of the surface of the sample support member (2, 2', 2") made of an optical transmission material. 2b) supports samples (S, S1, S2, S3). The sample support member (2, 2 ', 2 ") has a plurality of suction holes (2a) extending from the front surface side to the back surface side. The sample support member (2, 2', 2") is formed. The decompression space forming member (4, 11, 11 ″) to be supported has a decompression space (K). The decompression space (K) is connected to the plurality of suction holes (2a) and the sample support member. The pressure is reduced with respect to the surface side of (2, 2 ′, 2 ″).
Therefore, the sample (S, S1, S2, S3) supported by the sample support surface (2b) is sucked by the suction hole (2a) connected to the decompressed decompression space (K), and the sample support surface (2b) ). As a result, the sample (S, S1, S2, S3) is held on the surface by the sample support surface (2b) and is adsorbed by the pressure difference, so that the deformation of the sample (S, S1, S2, S3) and the adhesive Contamination due to the use of can be prevented. Further, since the sample support member (2, 2 ′, 2 ″) constituting the sample support surface (2b) is made of an optical transmission material, the loss of transmitted light is low and analysis using the transmitted light is performed. Can do.

請求項2記載の発明は、請求項1に記載の試料ホルダ(1,41)において、
試料(S,S1,S2,S3)を測定する測定光(L)を透過させる透過材料製の前記減圧空間形成部材(4)、
を備えたことを特徴とする。
前記構成要件を備えた請求項2記載の発明では、前記減圧空間形成部材(4)が試料(S,S1,S2,S3)を測定する測定光(L)を透過させる透過材料製であるため、測定光(L)の光路上に減圧空間形成部材(4)を配置することができ、減圧空間形成部材(4)を透過した測定光(L)を利用して分析を行うことができる。
The invention according to claim 2 is the sample holder (1, 41) according to claim 1,
The reduced-pressure space forming member (4) made of a transmission material that transmits measurement light (L) for measuring the sample (S, S1, S2, S3),
It is provided with.
In the second aspect of the invention having the above-described structural requirements, the reduced-pressure space forming member (4) is made of a transmissive material that transmits measurement light (L) for measuring the sample (S, S1, S2, S3). The decompression space forming member (4) can be disposed on the optical path of the measurement light (L), and analysis can be performed using the measurement light (L) transmitted through the decompression space forming member (4).

請求項3記載の発明は、請求項1に記載の試料ホルダ(1′,1″)において、
前記試料支持部材(2,2′,2″)に対向離隔して配置された光学透過材料製の底部材(12,12″)と、前記試料支持部材(2,2′,2″)と前記底部材(12,12″)との間に配置された壁部材(13,13″)と、を有する前記減圧空間形成部材(11,11″)であって、前記底部材(12,12″)と前記壁部材(13,13″)と前記試料支持部材(2,2′,2″)とに囲まれた空間により構成された前記減圧空間(K)を有する前記減圧空間形成部材(11,11″)、
を備えたことを特徴とする。
The invention described in claim 3 is the sample holder (1 ′, 1 ″) described in claim 1,
A bottom member (12, 12 ") made of an optically transparent material and disposed opposite to and spaced from the sample support member (2, 2 ', 2"); and the sample support member (2, 2', 2 ") A decompression space forming member (11, 11 ″) having a wall member (13, 13 ″) disposed between the bottom member (12, 12 ″) and the bottom member (12, 12 ″). ”), The wall member (13, 13 ″) and the sample support member (2, 2 ′, 2 ″). 11, 11 ″),
It is provided with.

前記構成要件を備えた請求項3記載の発明では、前記試料支持部材(2,2′,2″)に対向離隔して配置された底部材(12,12″)は、光学透過材料で作製されている。壁部材(13,13″)は、前記試料支持部材(2,2′,2″)と前記底部材(12,12″)との間に配置されている。したがって、底部材(12,12″)が光学透過材料で作製されているため、試料支持部材(2,2′,2″)を通過した透過光が底部材(12,12″)も透過するので、精度の高い透過測定をおこなうことができる。また、底部材(12,12″)と壁部材(13,13″)を別個に作製できるため、作製、組み立てが容易にでき、さらに、壁部材(13,13″)は光学透過材料で作製しなくてもよいため、低コスト化が図れる。   According to the third aspect of the present invention, the bottom member (12, 12 ″) disposed opposite to the sample support member (2, 2 ′, 2 ″) is made of an optical transmission material. Has been. The wall member (13, 13 ″) is disposed between the sample support member (2, 2 ′, 2 ″) and the bottom member (12, 12 ″). Therefore, the bottom member (12, 12). Since "" is made of an optical transmission material, the transmitted light that has passed through the sample support member (2, 2 ', 2 ") also passes through the bottom member (12, 12"). Can be done. Further, since the bottom member (12, 12 ") and the wall member (13, 13") can be separately manufactured, the manufacturing and assembling can be facilitated. Further, the wall member (13, 13 ") is made of an optical transmission material. Therefore, the cost can be reduced.

請求項4記載の発明は、請求項1ないし3のいずれかに記載の試料ホルダ(1′,41)において、
前記試料支持面(2b)よりも小さい前記試料(S,S1,S2,S3)と、
前記試料(S,S1,S2,S3)が収容される試料収容孔(21a,21b,21c,21d)が形成され且つ、前記試料支持面(2b)と同形またはより大きな外形を有する試料支持面カバー(21,21′)と、
を備えたことを特徴とする。
The invention according to claim 4 is the sample holder (1 ', 41) according to any one of claims 1 to 3,
The sample (S, S1, S2, S3) smaller than the sample support surface (2b);
A sample support surface in which sample storage holes (21a, 21b, 21c, 21d) for storing the samples (S, S1, S2, S3) are formed and has the same shape as the sample support surface (2b) or a larger outer shape. A cover (21, 21 '),
It is provided with.

前記構成要件を備えた請求項4記載の発明では、前記試料支持面(2b)と同形の外形を有する試料支持面カバー(21,21′)の試料収容孔(21a,21b,21c,21d)には、試料支持面(2b)よりも小さい試料(S,S1,S2,S3)が収容される。したがって、試料支持面(2b)が試料(S,S1,S2,S3)と試料支持面カバー(21,21′)とによりカバーされるため、試料支持面カバー(21,21′)を設けない場合に比べて、試料(S,S1,S2,S3)の吸着力を確保でき、確実に試料ホルダ(1′,41)に保持できると共に、吸引孔(2a)が塵や埃等で詰まることも防止できる。   According to the fourth aspect of the present invention having the above-described structural requirements, the sample receiving holes (21a, 21b, 21c, 21d) of the sample support surface cover (21, 21 ') having the same shape as the sample support surface (2b). Accommodates samples (S, S1, S2, S3) smaller than the sample support surface (2b). Therefore, since the sample support surface (2b) is covered by the sample (S, S1, S2, S3) and the sample support surface cover (21, 21 '), the sample support surface cover (21, 21') is not provided. Compared to the case, the adsorption force of the sample (S, S1, S2, S3) can be ensured and can be securely held in the sample holder (1 ', 41), and the suction hole (2a) is clogged with dust or dirt. Can also be prevented.

請求項5記載の発明は、請求項4に記載の試料ホルダ(1′,41)において、
複数の試料(S,S1,S2,S3)の大きさに対応して形成された複数の試料収容孔(21a,21b,21c,21d)を有する前記試料支持面カバー(21′)、
を備えたことを特徴とする。
前記構成要件を備えた請求項5記載の発明では、試料支持面カバー(21′)には、複数の試料(S,S1,S2,S3)の大きさに対応して形成された複数の試料収容孔(21a,21b,21c,21d)が設けられているので、1つの試料支持面カバー(21′)で複数の大きさの試料(S,S1,S2,S3)に対応することができる。
The invention according to claim 5 is the sample holder (1 ', 41) according to claim 4,
The sample support surface cover (21 ') having a plurality of sample receiving holes (21a, 21b, 21c, 21d) formed corresponding to the sizes of the plurality of samples (S, S1, S2, S3);
It is provided with.
In the invention according to claim 5 having the above-described structural requirements, a plurality of samples formed on the sample support surface cover (21 ') corresponding to the sizes of the plurality of samples (S, S1, S2, S3). Since the accommodation holes (21a, 21b, 21c, 21d) are provided, one sample support surface cover (21 ') can correspond to a plurality of sizes of samples (S, S1, S2, S3). .

請求項6記載の発明は、請求項1ないし5のいずれかに記載の試料ホルダ(1,1″,41)において、
光学透過材料製の前記試料支持部材(2,2′,2″)を支持する光学透過プレート支持部材(3,3″)と、
前記光学透過プレート支持部材(3,3″)を介して前記試料支持部材(2,2′,2″)を支持する前記減圧空間形成部材(4,11″)と、
を備えたことを特徴とする。
前記構成要件を備えた請求項6記載の発明では、光学透過プレート支持部材(3,3″)は、光学透過材料製の前記試料支持部材(2,2′,2″)を支持する。前記減圧空間形成部材(4,11″)は、前記光学透過プレート支持部材(3,3″)を介して前記試料支持部材(2,2′,2″)を支持する。したがって、試料(S,S1,S2,S3)を支持する部分のみ光学透過材料製の試料支持部材(2,2′,2″)とすることでき、試料ホルダ(1,1″,41)を任意の形状とすることができる。
A sixth aspect of the present invention is the sample holder (1, 1 ″, 41) according to any one of the first to fifth aspects,
An optical transmission plate support member (3, 3 ″) for supporting the sample support member (2, 2 ′, 2 ″) made of an optical transmission material;
The decompression space forming member (4, 11 ") for supporting the sample support member (2, 2 ', 2") via the optical transmission plate support member (3, 3 ");
It is provided with.
The optical transmission plate support member (3, 3 ″) supports the sample support member (2, 2 ′, 2 ″) made of an optical transmission material. The decompression space forming member (4, 11 ″) supports the sample support member (2, 2 ′, 2 ″) via the optical transmission plate support member (3, 3 ″). , S1, S2, S3) only the part supporting the optical transmission material can be used as the sample supporting member (2, 2 ', 2 "), and the sample holder (1, 1", 41) can have any shape. be able to.

請求項7記載の発明は、請求項6に記載の試料ホルダ(1″)において、
複数の前記試料支持部材(2,2′,2″)を支持する前記光学透過プレート支持部材(3″)、
を備えたことを特徴とする。
前記構成要件を備えた請求項7記載の発明では、光学透過プレート支持部材(3″)は、複数の前記試料支持部材(2,2′,2″)を支持するので、一度に複数の試料(S1,S2,S3)を保持することができ、複数の試料(S1,S2,S3)を一度に分析することもできる。
The invention according to claim 7 is the sample holder (1 ″) according to claim 6,
The optical transmission plate support member (3 ″) for supporting a plurality of the sample support members (2, 2 ′, 2 ″);
It is provided with.
According to the seventh aspect of the invention having the above-described structural requirements, the optical transmission plate support member (3 ″) supports the plurality of sample support members (2, 2 ′, 2 ″). (S1, S2, S3) can be held, and a plurality of samples (S1, S2, S3) can be analyzed at once.

前述の本発明は、測定光を透過させる分析が可能で、試料の変形や汚染を防止可能な試料ホルダを提供することができる。   The above-described present invention can provide a sample holder that can be analyzed by transmitting measurement light and can prevent deformation and contamination of the sample.

次に図面を参照しながら、本発明の実施の形態を説明するが、本発明は以下の実施の形態に限定されるものではない。
なお、以後の説明の理解を容易にするために、図面において、前後方向をX軸方向、左右方向をY軸方向、上下方向をZ軸方向とし、矢印X,−X,Y,−Y,Z,−Zで示す方向または示す側をそれぞれ、前方、後方、右方、左方、上方、下方、または、前側、後側、右側、左側、上側、下側とする。
また、図中、「○」の中に「・」が記載されたものは紙面の裏から表に向かう矢印を意味し、「○」の中に「×」が記載されたものは紙面の表から裏に向かう矢印を意味するものとする。
なお、以下の図面を使用した説明において、理解の容易のために説明に必要な部材以外の図示は適宜省略されている。
Next, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments.
In order to facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the left-right direction is the Y-axis direction, the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The direction indicated by Z and -Z or the indicated side is defined as front, rear, right, left, upper, lower, or front, rear, right, left, upper, and lower, respectively.
In the figure, “•” in “○” means an arrow heading from the back of the page to the front, and “×” in “○” is the front of the page. It means an arrow pointing from the back to the back.
In the following description using the drawings, illustrations other than members necessary for the description are omitted as appropriate for easy understanding.

図1は本発明の実施例1の試料ホルダの説明図であり、図1Aは試料が支持された状態での平面図、図1Bは試料が支持された状態での正面図である。
図2は本発明の実施例1の試料ホルダの説明図であり、図2Aは試料が支持されていない状態の試料ホルダの側断面図、図2Bは図2Aに示す状態から試料支持部材と減圧空間形成部材とが離隔した状態の説明図、図2Cは試料支持部材と減圧空間形成部材の平面図である。
図1,図2において、測定光としての赤外光を使用するFT−IRで使用可能な実施例1の試料ホルダ1は、試料Sが表面に支持される試料支持部材2を有する。実施例1では、前記試料支持部材2は、円板状の光学透過プレートにより構成されている。前記試料支持部材2は、光学透過材料の一例としてのGe(ゲルマニウム)により構成されており、表面側から裏面側に延びる微細な吸引孔2aが複数形成されている。なお、前記試料支持部材2の表面の試料支持面2bの直径は、広く一般的に使用される試料Sのサイズに合わせて13mmとすることが好適である。また、各吸引孔2aは、支持される試料Sのサイズや重量、排気装置Vの排気性能に応じて変形可能であるが、直径5μm〜100μmとすることができ、20μm〜50μmが好適である。さらに、光学透過材料としては、検出したい波長の透過光に対する透過特性に対応し且つ前記微細な吸引孔2aが形成可能な光学透過材料を選択可能であるが、例えば、ガラス、Ge、サファイア、CaF、BaF、MgF、LiF、KBr、KCl、NaCl,MgO、石英、シリコン、ZnSe、ZnS、GaAs,方解石(CaCO)等が挙げられる。
1A and 1B are explanatory views of a sample holder according to a first embodiment of the present invention. FIG. 1A is a plan view in a state where the sample is supported, and FIG. 1B is a front view in a state where the sample is supported.
2A and 2B are explanatory views of the sample holder according to the first embodiment of the present invention. FIG. 2A is a side sectional view of the sample holder in a state where the sample is not supported. FIG. FIG. 2C is a plan view of the sample support member and the reduced pressure space forming member in a state where the space forming member is separated.
1 and 2, a sample holder 1 of Example 1 that can be used in FT-IR using infrared light as measurement light has a sample support member 2 on which a sample S is supported. In Example 1, the sample support member 2 is constituted by a disk-shaped optical transmission plate. The sample support member 2 is made of Ge (germanium) as an example of an optical transmission material, and a plurality of fine suction holes 2a extending from the front surface side to the back surface side are formed. The diameter of the sample support surface 2b on the surface of the sample support member 2 is preferably 13 mm in accordance with the size of the sample S that is widely used in general. Each suction hole 2a can be deformed according to the size and weight of the sample S to be supported and the exhaust performance of the exhaust device V, but can have a diameter of 5 μm to 100 μm, preferably 20 μm to 50 μm. . Furthermore, as the optical transmission material, it is possible to select an optical transmission material corresponding to transmission characteristics with respect to transmitted light having a wavelength to be detected and capable of forming the fine suction hole 2a. For example, glass, Ge, sapphire, CaF 2 , BaF 2 , MgF 2 , LiF, KBr, KCl, NaCl, MgO, quartz, silicon, ZnSe, ZnS, GaAs, calcite (CaCO 3 ) and the like.

前記試料支持部材2は、金属製の板状の光学透過プレート支持部材3の中央部に接着等により固定支持されている。前記光学透過プレート支持部材3の裏面側には、支持部材2と同じ光学透過プレートの減圧空間形成部材4が貼り合わされている。図2Cにおいて、前記減圧空間形成部材4には、前記試料支持部材2に対応して中央部に形成された凹部4aと、前記凹部4aの後端から後方に延びる排気路4bとが形成されている。前記排気路4bの後端には排気管接続部6が固定支持されている。前記排気管接続部6は、図示しない排気管を介して排気装置V(図1A参照)に接続されている。したがって、図2Aに示すように、前記凹部4aと試料支持部材2の裏面とにより囲まれる空間によって、減圧空間Kが形成される。そして、前記減圧空間Kには、前記試料支持部材2の吸引孔2aが接続され、排気路4bから排気されることで、減圧空間K内部を試料支持部材2の表面側に対して減圧される。
前記符号2〜6を付した部材等により実施例1の試料ホルダ1が構成されている。
The sample support member 2 is fixedly supported by bonding or the like at the center of a metal plate-like optical transmission plate support member 3. On the back side of the optical transmission plate support member 3, a decompression space forming member 4 of the same optical transmission plate as the support member 2 is bonded. In FIG. 2C, the decompression space forming member 4 is formed with a recess 4a formed in the center corresponding to the sample support member 2 and an exhaust passage 4b extending rearward from the rear end of the recess 4a. Yes. An exhaust pipe connecting portion 6 is fixedly supported at the rear end of the exhaust path 4b. The exhaust pipe connection portion 6 is connected to an exhaust device V (see FIG. 1A) via an exhaust pipe (not shown). Therefore, as shown in FIG. 2A, a decompression space K is formed by the space surrounded by the recess 4a and the back surface of the sample support member 2. Then, the suction hole 2a of the sample support member 2 is connected to the decompression space K, and the inside of the decompression space K is decompressed with respect to the surface side of the sample support member 2 by being exhausted from the exhaust passage 4b. .
The sample holder 1 of Example 1 is comprised by the member etc. which attached | subjected the said codes | symbols 2-6.

(実施例1の作用)
前記構成を備えた実施例1の試料ホルダ1では、試料支持部材2の表面に試料Sが支持された状態で、排気装置Vにより減圧空間Kの排気を行うことで、圧力差により試料Sが試料支持部材2表面に吸引された状態で保持される。この状態で、測定光L(図1Bの一点鎖線参照)が試料Sに入射されると、試料Sの特性に応じて特定の波長が吸収されて透過する。このとき、測定光Lは、Ge製の試料支持部材2、減圧空間K、測定光に透明な材料(光学透過材料)の減圧空間形成部材4を透過する。
したがって、測定光Lは、透過性が高く且つ光学的な損失が低い光学透過材料や、空間Kを通過するので、透過光を利用して(例えば、分光してスペクトル測定をする等)、試料Sの分析を精度よく行うことができる。また、実施例1の試料ホルダ1では、両面テープ等で接着する従来の場合に比べて、試料Sや試料ホルダ1が粘着剤により汚れることが防止できる。さらに、排気装置Vによる排気を終了するか、試料Sを試料支持部材2の面方向にスライドさせて光学透過プレート支持部材3側に移動させることで容易に試料Sを試料ホルダ1から取り外すことができる。また、実施例1の試料ホルダ1では、試料支持部材2により、試料Sの裏面側の全面が支持されると共に、試料支持部材2に離散的に形成された吸引孔2aで吸引されるため、試料Sが湾曲する等の変形を受けにくく、試料Sの破損を防止することができ、分析後の再利用等が可能となる。また、試料支持部材2を支持する光学透過プレート支持部材3の形状および材料を任意に変更することができるので、使用される分析機器に装着可能な任意の形状とすることができる。
(Operation of Example 1)
In the sample holder 1 of Example 1 having the above-described configuration, the sample S is discharged by the pressure difference by evacuating the decompression space K by the exhaust device V while the sample S is supported on the surface of the sample support member 2. The surface of the sample support member 2 is held in a sucked state. In this state, when the measurement light L (see the alternate long and short dash line in FIG. 1B) is incident on the sample S, a specific wavelength is absorbed and transmitted according to the characteristics of the sample S. At this time, the measurement light L passes through the sample support member 2 made of Ge, the decompression space K, and the decompression space forming member 4 made of a material transparent to the measurement light (optical transmission material).
Therefore, since the measurement light L passes through the optical transmission material having high transparency and low optical loss and the space K, the transmitted light is used (for example, spectrum measurement is performed by spectroscopy). S can be analyzed with high accuracy. Moreover, in the sample holder 1 of Example 1, it can prevent that the sample S and the sample holder 1 become dirty with an adhesive compared with the conventional case which adhere | attaches with a double-sided tape etc. Further, the sample S can be easily removed from the sample holder 1 by ending the exhaust by the exhaust device V or by sliding the sample S in the surface direction of the sample support member 2 and moving it to the optical transmission plate support member 3 side. it can. Further, in the sample holder 1 of Example 1, the entire surface on the back side of the sample S is supported by the sample support member 2 and is sucked through the suction holes 2a formed discretely in the sample support member 2. The sample S is not easily deformed such as being bent, the sample S can be prevented from being damaged, and can be reused after analysis. Moreover, since the shape and material of the optical transmission plate support member 3 which supports the sample support member 2 can be changed arbitrarily, it can be set as the arbitrary shape which can be mounted | worn with the analytical instrument used.

図3は本発明の実施例2の試料ホルダの説明図であり、図3Aは斜視説明図、図3Bは分解された状態の説明図である。
なお、この実施例2の説明において、前記実施例1の構成要素に対応する構成要素には同一の符号を付して、その詳細な説明を省略する。
この実施例2は、下記の点で前記実施例1と相違しているが、他の点では前記実施例1と同様に構成されている。
FIG. 3 is an explanatory view of a sample holder according to a second embodiment of the present invention, FIG. 3A is a perspective explanatory view, and FIG. 3B is an explanatory view in an exploded state.
In the description of the second embodiment, components corresponding to those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
The second embodiment is different from the first embodiment in the following points, but is configured in the same manner as the first embodiment in other points.

図3において、実施例2の試料ホルダ1′は、実施例1の試料ホルダ1と異なり、光学透過プレート支持部材3が省略され、円板状の試料支持部材2の裏面側には、減圧空間形成部材11が支持されている。前記減圧空間形成部材11は、試料支持部材2と対向離隔して配置された底部材12と、底部材12と試料支持部材2との間に配置された円筒パイプ状の壁部材13とを有している。前記底部材12は、試料支持部材2と同様に光学透過材料製で円板状の部材により構成されており、試料支持部材2と異なり吸引孔2aは形成されていない。また、前記壁部材13の側面には、排気装置Vに接続される排気管接続部6が支持されている。
したがって、前記試料支持部材2、壁部材13、底部材12により囲まれた空間により、実施例2の減圧空間Kが構成されており、減圧空間Kは排気管接続部6に接続された排気装置Vにより排気される。
In FIG. 3, the sample holder 1 ′ of the second embodiment is different from the sample holder 1 of the first embodiment in that the optical transmission plate support member 3 is omitted, and a reduced pressure space is provided on the back side of the disk-shaped sample support member 2. The forming member 11 is supported. The decompression space forming member 11 includes a bottom member 12 disposed so as to face and separate from the sample support member 2, and a cylindrical pipe-shaped wall member 13 disposed between the bottom member 12 and the sample support member 2. is doing. Similar to the sample support member 2, the bottom member 12 is made of an optically transparent material and is formed of a disk-like member. Unlike the sample support member 2, the suction hole 2 a is not formed. Further, an exhaust pipe connection portion 6 connected to the exhaust device V is supported on the side surface of the wall member 13.
Therefore, the space surrounded by the sample support member 2, the wall member 13, and the bottom member 12 forms the decompression space K of the second embodiment, and the decompression space K is an exhaust device connected to the exhaust pipe connection portion 6. V is exhausted.

(実施例2の作用)
前記構成を備えた実施例2の試料ホルダ1′は、減圧空間Kが排気されて減圧されることにより試料支持部材2の試料支持面2bに試料Sが吸着されて保持され、測定光Lは、試料S、試料支持部材2を透過した後、減圧空間K、光学透過材料製の底部材12を透過する。したがって、実施例2の試料ホルダ1′は、実施例1の試料ホルダ1と同様の作用効果を有する。
また、実施例2の試料ホルダ1′は、底部材12と壁部材13とが別の部材により構成されているので、各部材の加工や組み立てが容易にできる。また、実施例2の試料ホルダ1′では、壁部材13を測定光Lが透過しないので、壁部材13は光学透過材料に限定されず、任意の材料を使用することができ、低コスト化を図ることもできる。
(Operation of Example 2)
In the sample holder 1 ′ of the second embodiment having the above-described configuration, the sample S is adsorbed and held on the sample support surface 2b of the sample support member 2 when the decompression space K is exhausted and decompressed, and the measurement light L is After passing through the sample S and the sample support member 2, they pass through the decompression space K and the bottom member 12 made of an optical transmission material. Therefore, the sample holder 1 ′ of the second embodiment has the same function and effect as the sample holder 1 of the first embodiment.
Further, in the sample holder 1 ′ of the second embodiment, the bottom member 12 and the wall member 13 are constituted by different members, so that each member can be easily processed and assembled. Further, in the sample holder 1 ′ according to the second embodiment, the measurement light L does not pass through the wall member 13, so that the wall member 13 is not limited to the optical transmission material, and any material can be used, thereby reducing the cost. You can also plan.

図4は本発明の実施例3の試料ホルダの説明図であり、実施例2の図3Bに対応する図である。
なお、この実施例3の説明において、前記実施例1、2の構成要素に対応する構成要素には同一の符号を付して、その詳細な説明を省略する。
この実施例3は、下記の点で前記実施例1、2と相違しているが、他の点では前記実施例1、2と同様に構成されている。
図4において、実施例3の試料ホルダ1′では、試料支持部材2よりも小さい試料Sの分析を行う場合に、試料支持部材2の試料支持面2bには、試料支持面カバー21が支持される。前記試料支持面カバー21は、外径が試料支持部材2と同様の外径に形成され、中央部に試料Sの外径に対応する試料収容孔21aが形成されている。
FIG. 4 is an explanatory diagram of a sample holder according to the third embodiment of the present invention, and corresponds to FIG. 3B according to the second embodiment.
In the description of the third embodiment, components corresponding to those of the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
The third embodiment is different from the first and second embodiments in the following points, but is configured in the same manner as the first and second embodiments in other points.
In FIG. 4, in the sample holder 1 ′ of Example 3, when the sample S smaller than the sample support member 2 is analyzed, the sample support surface cover 21 supports the sample support surface cover 21 on the sample support surface 2 b. The The sample support surface cover 21 has an outer diameter that is the same as that of the sample support member 2, and a sample accommodation hole 21 a corresponding to the outer diameter of the sample S is formed at the center.

(実施例3の作用)
前記構成要件を備えた実施例3の試料ホルダ1′では、試料支持面2bの表面積よりも小さい試料Sの分析を行う場合、試料支持面カバー21と試料Sとにより試料支持面2bの全面がカバーされる。試料支持面カバー21を設けない場合には、試料Sにより覆われていない部分の吸引孔2aから減圧空間K側への吸引が優位になり、試料Sの吸引が弱くなる恐れや、試料Sにより覆われていない部分の吸引孔2aに塵や埃等が詰まる恐れがあったが、実施例3の試料ホルダ1′では試料支持面カバー21を設けることにより、試料支持面2bよりも小さな試料Sを使用する場合でも、確実に吸着することができ、吸引孔2aが詰まることも防止できる。さらに試料を通過しない測定光を遮断することができるために、精度のよい測定を可能にする。
(Operation of Example 3)
In the sample holder 1 ′ according to the third embodiment having the above-described configuration requirements, when the sample S smaller than the surface area of the sample support surface 2 b is analyzed, the entire surface of the sample support surface 2 b is covered by the sample support surface cover 21 and the sample S. Covered. When the sample support surface cover 21 is not provided, suction from the suction hole 2a in a portion not covered by the sample S to the decompression space K side is dominant, and the suction of the sample S may be weakened. Although there is a possibility that dust or dirt etc. is clogged in the suction hole 2a in the uncovered portion, the sample holder 1 'in the third embodiment provides the sample support surface cover 21 so that the sample S smaller than the sample support surface 2b is provided. Even in the case of using, the suction can be reliably performed and the suction hole 2a can be prevented from being clogged. Furthermore, since measurement light that does not pass through the sample can be blocked, measurement with high accuracy is possible.

図5は本発明の実施例4の試料ホルダの斜視説明図ある。
なお、この実施例4の説明において、前記実施例1〜3の構成要素に対応する構成要素には同一の符号を付して、その詳細な説明を省略する。
この実施例4は、下記の点で前記実施例1〜3と相違しているが、他の点では前記実施例1〜3と同様に構成されている。
図5において、実施例4の試料ホルダ1″は、板状の光学透過プレート支持部材3″と、角筒状の壁部材13″および板状の底部材12″とを有する減圧空間形成部材11″とを有する。前記光学透過プレート支持部材3″には、試料支持部材2の外径に対応した3つの装着口(装着部)3a,3b,3cが形成されている。前記装着口3a〜3cには、段差が形成されており、段差により試料支持部材2が着脱可能に支持される。前記各装着口3a〜3cには、大サイズ試料用の試料支持部材2、中サイズ試料用の試料支持部材2′、小サイズ試料用の試料支持部材2″または装着口閉塞用のカバー31のいずれかが装着可能に構成されている。
FIG. 5 is a perspective explanatory view of a sample holder according to a fourth embodiment of the present invention.
In the description of the fourth embodiment, components corresponding to the components of the first to third embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
The fourth embodiment is different from the first to third embodiments in the following points, but is configured in the same manner as the first to third embodiments in other points.
In FIG. 5, the sample holder 1 ″ of Example 4 is a decompression space forming member 11 having a plate-like optical transmission plate support member 3 ″, a square tube-like wall member 13 ″, and a plate-like bottom member 12 ″. The optical transmission plate support member 3 "has three mounting ports (mounting parts) 3a, 3b, 3c corresponding to the outer diameter of the sample support member 2. Steps are formed in the mounting ports 3a to 3c, and the sample support member 2 is detachably supported by the steps. The mounting ports 3a to 3c are provided with a sample support member 2 for a large sample, a sample support member 2 'for a medium sample, a sample support member 2 "for a small sample, or a cover 31 for closing the mounting port. Either one is configured to be mountable.

前記大サイズ試料用の試料支持部材2は、大サイズの試料S1を吸着するために、全面に吸引孔2aが形成されており、中サイズ試料用の試料支持部材2′は、中サイズの試料S2を吸着するために、中サイズの試料S2の大きさに対応する領域にのみ吸引孔2aが形成されている。同様に、小サイズ試料用の試料支持部材2″は、小サイズの試料S3を吸着するために、小サイズの試料S3の大きさに対応する領域にのみ吸引孔2aが形成され、装着口閉塞用の装着口カバー31には吸引孔2aが形成されていない。   The sample support member 2 for large size samples has suction holes 2a formed on the entire surface for adsorbing the large size sample S1, and the sample support member 2 'for medium size samples is a medium size sample. In order to adsorb S2, the suction hole 2a is formed only in a region corresponding to the size of the medium-sized sample S2. Similarly, the sample support member 2 ″ for a small-size sample has a suction hole 2a formed only in a region corresponding to the size of the small-size sample S3 in order to adsorb the small-size sample S3, and the mounting opening is blocked. The mounting hole cover 31 for use has no suction hole 2a.

(実施例4の作用)
前記構成要件を備えた実施例4の試料ホルダ1″では、実施例1と同様に、試料Sを吸着して保持できると共に、光学透過プレート支持部材3″に試料支持部材2,2′、2″を最大で3つ装着できるので、複数の試料S1〜S3を前もって用意して、順に測定することができる。また、試料S1〜S3のサイズに合わせて試料支持部材2〜2″を交換することができるので、実施例3の場合と同様に、確実に吸着保持できると共に吸引孔2aの詰まりを防止することができる。さらに、例えば、1つまたは2つの試料Sの分析を行う場合には、試料Sが装着されない装着口3a〜3cには、装着口カバー31を装着することで、減圧空間Kを気密に保つことができる。なお、各試料支持部材2〜2″を複数個準備しておくことで、3つとも同じサイズの試料Sの分析を行うこともできる。
(Operation of Example 4)
In the sample holder 1 ″ according to the fourth embodiment having the above-described constituent elements, the sample S can be adsorbed and held as in the first embodiment, and the sample supporting members 2, 2 ′, 2 are attached to the optical transmission plate supporting member 3 ″. Since a maximum of 3 "can be mounted, a plurality of samples S1 to S3 can be prepared in advance and measured in order. Also, the sample support members 2 to 2" are exchanged according to the size of the samples S1 to S3. Therefore, as in the case of the third embodiment, the suction hole 2a can be prevented from being clogged while being reliably sucked and held. Further, for example, when analyzing one or two samples S, the decompression space K is kept airtight by attaching the attachment port cover 31 to the attachment ports 3a to 3c to which the sample S is not attached. Can do. Note that by preparing a plurality of sample support members 2 to 2 ″, all three samples S of the same size can be analyzed.

図6は本発明の実施例5の試料ホルダの説明図であり、図6Aは試料支持面カバーの平面図、図6Bは試料支持面カバーが使用された状態の説明図である。
なお、この実施例5の説明において、前記実施例1〜4の構成要素に対応する構成要素には同一の符号を付して、その詳細な説明を省略する。
この実施例5は、下記の点で前記実施例1〜4と相違しているが、他の点では前記実施例1〜4と同様に構成されている。
図6において、実施例5の試料支持面カバー21′は、装着される試料Sの大きさに対応して、4つの試料収容口21a〜21dが形成されている。
FIG. 6 is an explanatory view of a sample holder according to a fifth embodiment of the present invention, FIG. 6A is a plan view of a sample support surface cover, and FIG. 6B is an explanatory view of a state in which the sample support surface cover is used.
In the description of the fifth embodiment, components corresponding to those of the first to fourth embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
The fifth embodiment is different from the first to fourth embodiments in the following points, but is configured in the same manner as the first to fourth embodiments in other points.
In FIG. 6, the sample support surface cover 21 ′ of Example 5 has four sample storage ports 21 a to 21 d corresponding to the size of the sample S to be mounted.

(実施例5の作用)
前記構成を備えた実施例5の試料ホルダ1′では、試料支持部材2と同じサイズの試料Sの分析を行う場合には試料支持面カバー21′を使用せずに吸着保持でき、試料支持部材2よりも小さなサイズの試料Sの分析を行う場合には、図6Bに示すように、試料支持面カバー21′を、分析対象の試料Sのサイズに応じて、試料支持部材2の面方向にスライドさせることで、試料Sと試料支持面カバー21′とにより試料支持面2bの全面がカバーできる。この結果、実施例5の試料ホルダ1′は、実施例3と同様に、試料支持面2bよりも小さな試料Sを使用する場合でも、確実に吸着することができ、吸引孔2aが詰まることも防止できる。また、試料Sのサイズに応じて、試料支持面カバーを複数個作成する必要が無く、1つの試料支持面カバー21′を使用して複数のサイズの試料Sに対応することができる。
(Operation of Example 5)
In the sample holder 1 'of the fifth embodiment having the above-described configuration, when the sample S having the same size as the sample support member 2 is analyzed, the sample support 1 can be adsorbed and held without using the sample support surface cover 21'. When analyzing a sample S having a size smaller than 2, the sample support surface cover 21 'is placed in the surface direction of the sample support member 2 in accordance with the size of the sample S to be analyzed, as shown in FIG. 6B. By sliding, the entire surface of the sample support surface 2b can be covered with the sample S and the sample support surface cover 21 '. As a result, the sample holder 1 ′ of Example 5 can be reliably adsorbed even when the sample S smaller than the sample support surface 2 b is used, as in Example 3, and the suction hole 2 a may be clogged. Can be prevented. Further, it is not necessary to prepare a plurality of sample support surface covers according to the size of the sample S, and a single sample support surface cover 21 ′ can be used to support a plurality of sample S sizes.

図7は本発明の実施例6の試料ホルダの説明図であり、図7Aは試料支持面カバーが装着された状態の試料ホルダの平面図、図7Bは図7Aの側面図である。
なお、この実施例6の説明において、前記実施例1〜5の構成要素に対応する構成要素には同一の符号を付して、その詳細な説明を省略する。
この実施例6は、下記の点で前記実施例1〜5と相違しているが、他の点では前記実施例1〜5と同様に構成されている。
図7において、実施例6の試料ホルダ41は、実施例1の試料ホルダ1において、光学透過プレート支持部材3の上面に、試料支持部材2を挟んで二対のカバーガイド部材42が固定支持されている。前記カバーガイド部材42の間には、実施例5と同様に構成された試料支持面カバー21′がスライド移動可能に支持されており、左右方向(Y軸方向)にガイドされる。
FIG. 7 is an explanatory view of a sample holder of Example 6 of the present invention, FIG. 7A is a plan view of the sample holder with a sample support surface cover attached, and FIG. 7B is a side view of FIG. 7A.
In the description of the sixth embodiment, components corresponding to those of the first to fifth embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
Example 6 is different from Examples 1 to 5 in the following points, but is configured in the same manner as Examples 1 to 5 in other points.
In FIG. 7, in the sample holder 41 of the sixth embodiment, in the sample holder 1 of the first embodiment, two pairs of cover guide members 42 are fixedly supported on the upper surface of the optical transmission plate support member 3 with the sample support member 2 interposed therebetween. ing. Between the cover guide members 42, a sample support surface cover 21 'configured in the same manner as in the fifth embodiment is supported so as to be slidable and guided in the left-right direction (Y-axis direction).

(実施例6の作用)
前記構成を備えた実施例6の試料ホルダ41では、試料支持面カバー21′をガイド部材42に沿って移動させることで、試料Sのサイズに対応する試料収容孔21a〜21dを試料支持部材2の位置に容易に移動させることができる。他に、実施例6の試料ホルダ41は、実施例1,5と同様に作用効果を有する。
(Operation of Example 6)
In the sample holder 41 of Example 6 having the above-described configuration, the sample support holes 21a to 21d corresponding to the size of the sample S are formed in the sample support member 2 by moving the sample support surface cover 21 'along the guide member 42. It can be easily moved to the position. In addition, the sample holder 41 of the sixth embodiment has the same effects as the first and fifth embodiments.

(変更例)
以上、本発明の実施例を詳述したが、本発明は、前記実施例に限定されるものではなく、特許請求の範囲に記載された本発明の要旨の範囲内で、種々の変更を行うことが可能である。本発明の変更例(H01)〜(H05)を下記に例示する。
(H01)前記実施例において、試料ホルダ1,1′、1″、41や試料Sの大きさ、装着口3a〜3cの数、試料収容口21a〜21dの数、吸引孔2aの分布や孔径等は、例示した数値や大きさに限定されず、設計や使用目的等に応じて、任意に変更可能である。
(H02)前記実施例において、試料ホルダ1,1′、1″、41は、試料支持面2bが、水平面になるように支持する場合を例示したが、これに限定されず、鉛直方向に沿った状態で分析機器に装着されたり、傾斜した状態で装着される場合にも適用可能である。
(Change example)
As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. Modification examples (H01) to (H05) of the present invention are exemplified below.
(H01) In the above embodiment, the size of the sample holders 1, 1 ', 1 ", 41 and the sample S, the number of mounting ports 3a to 3c, the number of sample storage ports 21a to 21d, the distribution and the hole diameter of the suction holes 2a Etc. are not limited to the illustrated numerical values and sizes, and can be arbitrarily changed according to the design, purpose of use, and the like.
(H02) In the above embodiment, the sample holders 1, 1 ′, 1 ″, and 41 are exemplified to support the sample support surface 2 b so as to be a horizontal plane. The present invention can also be applied to a case where the analyzer is mounted on the analyzer in an inclined state or mounted in an inclined state.

(H03)前記実施例において、試料ホルダ1,1′、1″、41は、測定光Lの透過光を利用する分析機器に好適に使用可能であるが、反射光を使用する分析機器(例えば、可視紫外分光法、蛍光分光法、ラマン分光法等の分析機器)の試料ホルダとして使用することも可能である。すなわち、複数の異なる方式で分析を行う分析機器の間で共通した試料ホルダとして使用することも可能である。
(H04)前記実施例において、例えば、減圧空間内に反射鏡を設け、試料支持部材2を透過した光を所定の方向に反射させ、分析に使用することも可能である。
(H05)前記実施例において、減圧空間Kを減圧するために、排気装置Vで排気したが、これに限定されず、光の透過を妨げない範囲で、減圧可能な任意の方法を採用可能である。例えば、吸引孔2aに垂直な方向に高速で流体(水等)を流すことで減圧空間Kを減圧するいわゆるアスピレータを採用することも可能である。
(H03) In the above embodiment, the sample holders 1, 1 ′, 1 ″, 41 can be suitably used for an analytical instrument that uses the transmitted light of the measuring light L, but an analytical instrument that uses reflected light (for example, It can also be used as a sample holder for analysis instruments such as visible ultraviolet spectroscopy, fluorescence spectroscopy, Raman spectroscopy, etc. That is, as a sample holder common among analysis instruments that perform analysis by a plurality of different methods It is also possible to use it.
(H04) In the above embodiment, for example, it is possible to provide a reflecting mirror in the reduced pressure space, reflect the light transmitted through the sample support member 2 in a predetermined direction, and use it for analysis.
(H05) In the above-described embodiment, the exhaust device V is exhausted to decompress the decompression space K. However, the present invention is not limited to this, and any method capable of decompressing can be employed as long as light transmission is not hindered. is there. For example, it is also possible to employ a so-called aspirator that depressurizes the decompression space K by flowing a fluid (water or the like) at a high speed in a direction perpendicular to the suction hole 2a.

図1は本発明の実施例1の試料ホルダの説明図であり、図1Aは試料が支持された状態での平面図、図1Bは試料が支持された状態での正面図である。1A and 1B are explanatory views of a sample holder according to a first embodiment of the present invention. FIG. 1A is a plan view in a state where the sample is supported, and FIG. 1B is a front view in a state where the sample is supported. 図2は本発明の実施例1の試料ホルダの説明図であり、図2Aは試料が支持されていない状態の試料ホルダの側断面図、図2Bは図2Aに示す状態から試料支持部材と減圧空間形成部材とが離隔した状態の説明図、図2Cは試料支持部材と減圧空間形成部材の平面図である。2A and 2B are explanatory views of the sample holder according to the first embodiment of the present invention. FIG. 2A is a side sectional view of the sample holder in a state where the sample is not supported. FIG. FIG. 2C is a plan view of the sample support member and the reduced pressure space forming member in a state where the space forming member is separated. 図3は本発明の実施例2の試料ホルダの説明図であり、図3Aは斜視説明図、図3Bは分解された状態の説明図である。FIG. 3 is an explanatory view of a sample holder according to a second embodiment of the present invention, FIG. 3A is a perspective explanatory view, and FIG. 3B is an explanatory view in an exploded state. 図4は本発明の実施例3の試料ホルダの説明図であり、実施例2の図3Bに対応する図である。FIG. 4 is an explanatory diagram of a sample holder according to the third embodiment of the present invention, and corresponds to FIG. 3B according to the second embodiment. 図5は本発明の実施例4の試料ホルダの斜視説明図ある。FIG. 5 is a perspective explanatory view of a sample holder according to a fourth embodiment of the present invention. 図6は本発明の実施例5の試料ホルダの説明図であり、図6Aは試料支持面カバーの平面図、図6Bは試料支持面カバーが使用された状態の説明図である。FIG. 6 is an explanatory view of a sample holder according to a fifth embodiment of the present invention, FIG. 6A is a plan view of a sample support surface cover, and FIG. 6B is an explanatory view of a state in which the sample support surface cover is used. 図7は本発明の実施例6の試料ホルダの説明図であり、図7Aは試料支持面カバーが装着された状態の試料ホルダの平面図、図7Bは図7Aの側面図である。FIG. 7 is an explanatory view of a sample holder of Example 6 of the present invention, FIG. 7A is a plan view of the sample holder with a sample support surface cover attached, and FIG. 7B is a side view of FIG. 7A.

符号の説明Explanation of symbols

1,1′,1″,41…試料ホルダ、
2,2′,2″…試料支持部材、
2…大サイズ試料用の試料支持部材、
2′…中サイズ試料用の試料支持部材、
2″…小サイズ試料用の試料支持部材、
31…装着口閉塞用のカバー、
2a…吸引孔、
2b…試料支持面、
3,3″…光学透過プレート支持部材、
3a,3b,3c…装着部、
4,11,11″…減圧空間形成部材、
4a…凹部、
4b…排気路、
6…排気管接続部、
12,12″…底部材、
13,13″…壁部材、
21,21′…試料支持面カバー、
21a,21b,21c,21d…試料収容孔、
42…カバーガイド部材、
K…減圧空間、
L…測定光、
S,S1,S2,S3…試料、
V…排気装置。
1, 1 ', 1 ", 41 ... sample holder,
2, 2 ', 2 "... sample support member,
2 ... Sample support member for large sample,
2 '... Sample support member for medium size sample,
2 "... sample support member for small size samples,
31 ... Cover for closing the mounting opening,
2a ... suction hole,
2b ... sample support surface,
3, 3 "... optical transmission plate support member,
3a, 3b, 3c ... mounting part,
4, 11, 11 "... decompression space forming member,
4a ... concave portion,
4b ... exhaust path,
6 ... exhaust pipe connection part,
12, 12 "... bottom member,
13, 13 "... wall member,
21, 21 ′ ... sample support surface cover,
21a, 21b, 21c, 21d ... sample accommodation hole,
42 ... cover guide member,
K ... decompression space,
L: Measuring light,
S, S1, S2, S3 ... sample,
V: Exhaust device.

Claims (7)

表面の試料支持面に試料が支持され且つ表面側から裏面側に延びる複数の吸引孔が形成された光学透過材料製の試料支持部材と、
前記複数の吸引孔が接続され且つ前記試料支持部材の表面側に対して減圧された負圧空間を有し、前記試料支持部材を支持する減圧空間形成部材と、
を備えたことを特徴とする試料ホルダ。
A sample support member made of an optically transmissive material in which a sample is supported on the surface sample support surface and a plurality of suction holes extending from the front surface side to the back surface side are formed;
A reduced pressure space forming member that has a negative pressure space connected to the plurality of suction holes and reduced in pressure with respect to the surface side of the sample support member, and supports the sample support member;
A sample holder comprising:
試料を測定する測定光を透過させる透過材料製の前記減圧空間形成部材、
を備えたことを特徴とする請求項1に記載の試料ホルダ。
The reduced-pressure space forming member made of a transmission material that transmits measurement light for measuring a sample;
The sample holder according to claim 1, further comprising:
前記試料支持部材に対向離隔して配置された光学透過材料製の底部材と、前記試料支持部材と前記底部材との間に配置された壁部材と、を有する前記減圧空間形成部材であって、前記底部材と前記壁部材と前記試料支持部材とに囲まれた空間により構成された前記減圧空間を有する前記減圧空間形成部材、
を備えたことを特徴とする請求項1に記載の試料ホルダ。
The decompression space forming member, comprising: a bottom member made of an optical transmission material disposed to face and separate from the sample support member; and a wall member disposed between the sample support member and the bottom member. The decompression space forming member having the decompression space configured by a space surrounded by the bottom member, the wall member, and the sample support member,
The sample holder according to claim 1, further comprising:
前記試料支持面よりも小さい前記試料と、
前記試料が収容される試料収容孔が形成され且つ、前記試料支持面と同形の外形を有する試料支持面カバーと、
を備えたことを特徴とする請求項1ないし3のいずれかに記載の試料ホルダ。
The sample smaller than the sample support surface;
A sample support surface cover in which a sample storage hole for storing the sample is formed and has an outer shape identical to the sample support surface;
The sample holder according to any one of claims 1 to 3, further comprising:
複数の試料の大きさに対応して形成された複数の試料収容孔を有する前記試料支持面カバー、
を備えたことを特徴とする請求項4に記載の試料ホルダ。
The sample support surface cover having a plurality of sample receiving holes formed corresponding to the sizes of the plurality of samples;
The sample holder according to claim 4, further comprising:
光学透過材料製の前記試料支持部材を支持する光学透過プレート支持部材と、
前記光学透過プレート支持部材を介して前記試料支持部材を支持する前記減圧空間形成部材と、
を備えたことを特徴とする請求項1ないし5のいずれかに記載の試料ホルダ。
An optical transmission plate support member for supporting the sample support member made of an optical transmission material;
The decompression space forming member that supports the sample support member via the optical transmission plate support member;
The sample holder according to any one of claims 1 to 5, further comprising:
複数の前記試料支持部材を支持する前記光学透過プレート支持部材、
を備えたことを特徴とする請求項6に記載の試料ホルダ。
The optical transmission plate support member for supporting a plurality of the sample support members;
The sample holder according to claim 6, further comprising:
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KR101063291B1 (en) * 2009-06-18 2011-09-07 한양대학교 산학협력단 Specimen mount for optical measuring instrument and optical measuring instrument having same
JP2011232327A (en) * 2010-04-28 2011-11-17 Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi Adsorption jig
WO2014156330A1 (en) * 2013-03-29 2014-10-02 浜松ホトニクス株式会社 Surface-enhanced raman scattering unit and raman spectroscopic analysis method
WO2014156329A1 (en) * 2013-03-29 2014-10-02 浜松ホトニクス株式会社 Surface-enhanced raman scattering unit and raman spectroscopic analysis method
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