JP2023127101A - Optical characteristic measuring instrument - Google Patents

Abstract

To provide an optical characteristic measuring instrument that can improve convenience, while improving reproducibility during measurement.SOLUTION: An optical characteristic measuring instrument according to an embodiment of the present invention is an instrument that measures optical characteristics of a sample, and comprises: a light source that emits irradiation light for measuring the optical characteristics; a measuring mechanism that measures the optical characteristics of the sample by using the irradiation light; a sample chamber in which the sample is arranged in a measurement area on a measurement light path of the irradiation light when the optical characteristics are measured; and a holding member that holds the sample when the sample is arranged in the sample chamber. The holding member has one or more openings for suction that are used during suction using a suction mechanism.SELECTED DRAWING: Figure 5

Description

The present invention relates to an optical property measuring device for measuring optical properties of a sample.

For example, the haze meter, gloss Optical property measuring instruments such as a colorimeter, a colorimeter, and an image clarity measuring instrument have been proposed (for example, see Patent Document 1).

Japanese Patent Application Publication No. 04-29020

Incidentally, such optical property measuring instruments are generally required to improve reproducibility during measurement and improve convenience. It is desirable to provide an optical property measuring instrument that can improve convenience while improving reproducibility during measurement.

An optical property measuring device according to an embodiment of the present invention is a device for measuring optical properties of a sample, and includes a light source that emits irradiation light for measuring optical properties, and a light source that emits irradiation light for measuring optical properties; A measurement mechanism for measuring optical properties, a sample chamber in which the sample is placed in the measurement area on the measurement optical path of the irradiated light when measuring the optical properties, and a sample chamber for holding the sample when the sample is placed in the sample chamber. and a holding member for holding. The holding member has one or more suction openings that are used during suction using the suction mechanism.

According to the optical property measuring instrument according to an embodiment of the present invention, it is possible to improve convenience while improving reproducibility during measurement.

1 is a schematic diagram illustrating a schematic configuration example of an optical property measuring instrument according to a first embodiment of the present invention. FIG. 2 is a schematic diagram showing a configuration example of the optical property measuring instrument shown in FIG. 1 with a sample door in a closed state. FIG. 2 is a schematic diagram showing a configuration example of the optical property measuring instrument shown in FIG. 1 with a sample door in an open state. FIG. 2 is a schematic diagram illustrating a schematic configuration example of an optical property measuring instrument according to a modification (modification 1) of the first embodiment. FIG. 2 is a schematic diagram illustrating a schematic configuration example of an optical property measuring instrument according to a second embodiment. 6 is a plan view schematically showing a detailed configuration example of the sample stage shown in FIG. 5. FIG. 3 is a schematic diagram showing a configuration example of a sample holder according to Comparative Example 2. FIG. FIG. 7 is a schematic diagram showing a schematic configuration example of an optical property measuring instrument according to a modification (modification 2) of the second embodiment. FIG. 7 is a schematic diagram showing a schematic configuration example of an optical property measuring instrument according to a modification (modification 3) of the second embodiment. 10 is a sectional view schematically showing a detailed configuration example of the sample holder shown in FIG. 9. FIG.

Embodiments of the present invention will be described in detail below with reference to the drawings. Note that the explanation will be given in the following order.
1. First embodiment (example of switching the irradiation state of irradiation light in conjunction with opening and closing of the sample door)
2. Modifications of the first embodiment Modification 1 (an example in which the integrating sphere is further provided with a compensation aperture)
3. Second embodiment (example in which a suction opening is provided on the sample stage as a sample holding member)
4. Modifications of the second embodiment Modification 2 (an example in which a filter having a dustproof function is further provided)
Modification example 3 (example in which a suction opening is provided in the sample holding member and the sample holder serving as the sample door)
5. Other variations

<1. First embodiment>
[composition]
FIG. 1 schematically shows an example of a schematic configuration of an optical property measuring device (optical property measuring device 1) according to a first embodiment of the present invention.

The optical property measuring device 1 numerically measures optical properties such as haze, gloss, color, and image clarity (image clarity) for a sample 9 made of various materials placed in a sample chamber 140. It is a measuring instrument that quantitatively evaluates the In particular, the optical property measuring device 1 of this embodiment is configured as a haze meter that evaluates the haze value as the degree of cloudiness of the sample 9.

As shown in FIG. 1, the optical property measuring instrument 1 includes, in a housing 10, a light source 11, a lens system 12a, a reflection plate 131, a light shielding plate 130 having a shutter S, a sample chamber 140, a sample stage 141, and A sample door 142 is provided. The optical property measuring instrument 1 also includes an integrating sphere 15, an optical trap 160, a light receiving section 161, a measuring section 162, a sensor 163, and a control section 19.

Here, the shutter S, the sensor 163, and the control unit 19 correspond to a specific example of a "switching mechanism" in the present invention. Further, the integrating sphere 15, the light receiving section 161, and the measuring section 162 correspond to a specific example of a "measuring mechanism (mechanism for measuring optical characteristics of a sample using irradiated light)" in the present invention.

The light source 11 is a light source that emits irradiation light Lo for measuring the optical characteristics of the sample 9. As shown in FIG. 1, the irradiation light Lo emitted from the light source 11 passes through the lens system 12a and the reflection plate 131, along the measurement optical path P1, to the light shielding plate 130 and the sample 9 (the measurement area on the sample 9). It is now moving in the direction of Am). The light source 11 is configured using, for example, a lamp light source such as a halogen lamp, an LED (semiconductor light emitting device), or the like.

As shown in FIG. 1, the light shielding plate 130 is arranged on the upper surface side of the sample chamber 140 (between the light source 11 and the measurement area Am on the sample 9), and blocks the irradiation light Lo traveling on the measurement optical path P1. It has a shutter S (shutter aperture) through which it can pass. This light shielding plate 130 can be moved (displaced), for example, along the direction d1 (X-axis direction) shown in FIG. . As a result, as will be described later, the open state of the shutter S (the state in which the irradiation light Lo passes through) and the closed state of the shutter S (the state in which the irradiation light Lo does not pass (blocking state)) can be switched. .

The sample chamber 140 is a room in which the sample 9 is placed in a measurement area Am on the measurement optical path P1 of the irradiation light Lo when measuring the optical characteristics of the sample 9. Specifically, when measuring the optical characteristics of the sample 9, the sample 9 is placed and held on a sample stage 141 in the sample chamber 140. Further, as shown in FIG. 1, in this embodiment, when measuring the optical characteristics of the sample 9, the sample 9 is irradiated with the irradiation light Lo traveling on the measurement optical path P1 in the sample chamber 140, It is configured so that the light that has passed through the sample 9 is incident on the integrating sphere 15 through the entrance aperture A1.

In the example of FIG. 1, the sample door 142 is configured to be able to be placed on the front surface (ZX plane) of the sample chamber 140. Specifically, the sample door 142 is configured to be openable and closable along the direction d2 (Z-axis direction) shown in FIG. Or it is a door to block it. In other words, although the details will be described later, when the sample door 142 is set to the open state, the sample chamber 140 is set to the externally exposed state (exposed state), and the sample door 142 is set to the closed state. In this case, the sample chamber 140 is set to a state where it is cut off from the outside (blocked state).

The integrating sphere 15 is arranged below the sample chamber 140, as shown in FIG. It has become a body. The inner surface of the integrating sphere 15 is a diffuse reflection surface. Further, the sample 9 is placed on the sample stage 141 near the entrance opening A1 on the outside of the integrating sphere 15. On the other hand, an optical trap 160 is arranged outside (below) the integrating sphere 15 near the exit opening A3 outside the integrating sphere 15 . As a result, among the irradiation light Lo entering the integrating sphere 15 through the entrance aperture A1, parallel light is absorbed by the optical trap 160, and scattered light is absorbed by the inner surface (diffuse reflection surface) of the integrating sphere 15. The light is diffusely reflected and received by a light receiving section 161, which will be described later, through an aperture (not shown).

The light receiving section 161 is arranged at a position making a central angle of about 90° from the entrance opening A1 on the integrating sphere 15, and receives the light (measurement light Lm) that is diffusely reflected within the integrating sphere 15. be. This light receiving section 161 is configured to include, for example, a Si (silicon) photodiode.

The measuring section 162 performs predetermined processing based on the light reception data D obtained by the light receiving section 161. Through this predetermined processing, measurement data of the optical characteristics of the sample 9 can be obtained based on the light reception data D.

The sensor 163 is a sensor that detects whether the sample door 142 is open or closed. The detection result of the open/closed state of the sample door 142 by this sensor 163 is outputted to the control section 19 as shown in FIG.

The control unit 19 is a part that controls the operation of the optical property measuring instrument 1 as a whole. In the present embodiment, as one of such control operations, the control unit 19 opens the shutter S according to the detection result by the sensor 163 (detection result of the open/closed state of the sample door 142), which will be described in detail later. or closed.

[Operation and action/effect]
(switching operation)
In this optical property measuring instrument 1, the irradiation state and non-irradiation state of the irradiation light Lo to the measurement area Am where the sample 9 is placed are switched in conjunction with the open/close state of the sample door 142. Hereinafter, such switching operation will be explained in detail.

Here, FIG. 2 schematically represents a configuration example of the optical property measuring instrument 1 with the sample door 142 in a closed state. Further, FIG. 3 schematically shows a configuration example of the optical property measuring instrument 1 when the sample door 142 is in an open state.

First, in the closed state of the sample door 142 shown in FIG. 2, the sample door 142 is lowered (along the direction d2 shown in FIG. 2), and the sample chamber 140 The device is set to a state where it is cut off from the outside (blocked state). When the sample door 142 is in the closed state, the light shielding plate 130 is moved by the control unit 19 so that the shutter S is in the closed state (see direction d1 shown in FIG. 2). By setting the shutter S to the closed state in this way, as shown in FIG. 2, the irradiation light Lo emitted from the light source 11 and traveling on the measurement optical path P1 is blocked on the light shielding plate 130, As a result, the measurement area Am is set so that the irradiation light Lo is not irradiated (see FIG. 2). Further, even when the measurement area Am is not irradiated with the irradiation light Lo, the light source 11 maintains the emission state of the irradiation light Lo, as shown in FIG.

On the other hand, in the open state of the sample door 142 shown in FIG. 3, the sample door 142 is raised upward (along the direction d2 shown in FIG. 3), and the sample chamber 140 is is set to be exposed to the outside (exposed state). When the sample door 142 is in the open state, the light shielding plate 130 is moved by the control unit 19 so that the shutter S is in the open state (see direction d1 shown in FIG. 3). By setting the shutter S to the open state in this way, as shown in FIG. As a result of passing through the shutter S, the irradiation light Lo is set to irradiate the measurement area Am (see FIG. 3).

(action/effect)
In this way, in the optical property measuring instrument 1 of the present embodiment, when measuring the optical properties of the sample 9 using the irradiation light Lo, the sample 9 is placed in conjunction with the opening/closing state of the sample door 142. The irradiation state and non-irradiation state of the irradiation light Lo with respect to the measurement area Am are switched.

As a result, in this embodiment, for example, dedicated members such as a light source (such as a floodlight or an observation light source) and a mechanism (such as an insertion/extraction mechanism for an observation light source) for confirming (observing) the measurement area (measurement position) are separately provided. The measurement area can be confirmed using the irradiation light Lo without any trouble. Therefore, in the optical property measuring device 1 of the present embodiment, it is possible to improve convenience with a simple configuration compared to the case of Comparative Example 1 in which such a dedicated member is separately provided.

Furthermore, in the present embodiment, even when the measurement area Am is not irradiated with the irradiation light Lo, the light source 11 maintains the emission state of the irradiation light Lo (does not turn off the light source 11). become that way. That is, since the illuminance of the irradiation light Lo emitted from the light source 11 is stabilized, it is possible to prevent a decrease in measurement accuracy during measurement using this irradiation light Lo. This is because when the light source 11 is configured using the above-mentioned lamp light source, if the light source 11 is repeatedly turned off and on, the illuminance of the irradiation light Lo becomes unstable.

Furthermore, in the present embodiment, when the sample door 142 is in the closed state (the sample chamber 140 is shielded from the outside), the irradiation light Lo is directed to the measurement area Am by setting the shutter S in the closed state. Since it is set to a non-irradiation state, it becomes as follows. That is, when the sample door 142 is closed and measurement is started, it is not necessary to first close the shutter S, so that the measurement time can be shortened. This is because conventionally, when starting measurement, it was necessary to manually set the shutter S to a closed state using a switch or the like, which led to an increase in measurement time.

Hereinafter, a modification of the first embodiment (modification 1), other embodiments of the present invention (second embodiment), and modifications thereof (modifications 2 and 3) will be explained. do. In addition, below, the same code|symbol is attached|subjected to the same component as 1st Embodiment etc., and description is abbreviate|omitted suitably.

<2. Modification of the first embodiment>
Next, a modification (modification 1) of the first embodiment will be described.

[Modification 1]
FIG. 4 schematically shows an example of a schematic configuration of an optical property measuring device (optical property measuring device 1A) according to Modification 1.

The optical property measuring device 1A of Modification 1 shown in FIG. 4 corresponds to the optical property measuring device 1 of the first embodiment shown in FIG. 1, which is changed to a so-called double beam type optical measuring device. are doing. Specifically, the optical property measuring device 1A further includes a lens system 12b and a reflecting plate 132 on a compensation optical path P2 different from the measurement optical path P1, and a compensation aperture on the integrating sphere 15. This corresponds to the one further provided with A2, and the other configurations are basically the same.

The compensation aperture A2 is arranged on the compensation optical path P2 of the irradiation light Lo in the integrating sphere 15. Specifically, the irradiation light Lo emitted from the light source 11 reaches the compensation aperture A2 on the integrating sphere 15 via the lens system 12b and the reflection plate 132 on the compensation optical path P2.

In this manner, in the optical property measuring instrument 1A, the irradiation light Lo passing through the entrance aperture A1 on the measurement optical path P1 and the irradiation light Lo passing through the compensation aperture A2 on the compensation optical path P2 enter the inside of the integrating sphere 15. , are configured to be incident alternately. As a result, in the optical property measuring device 1A, the decrease in the light intensity of the irradiation light Lo due to changes over time is constantly compensated for using the compensation optical path P2, so that stable measurement over a long period of time can be realized. More specifically, at the start of measurement, the shutter S is set to a closed state, and a shutter (not shown) on the compensation optical path P2 is set to an open state. Since the irradiation light Lo enters the integrating sphere 15 without passing through the sample 9, the light intensity of the irradiation light Lo is simply obtained by the light receiving section 161. Subsequently, the shutter S is set to an open state, and the shutter on the compensation optical path P2 is set to a closed state. The sample 9 is irradiated with the irradiation light Lo, and the transmitted light enters the integrating sphere 15 to measure the optical characteristics of the sample 9. At this time, the measured value obtained by the light transmitted through the sample 9 is corrected based on the change over time (light stability) of the light measured without passing through the sample 9. In this way, since the operation at the start of measurement starts with the shutter S in the closed state, it is not necessary to first close the shutter S when the sample door 142 is set in the closed state and measurement is started. Therefore, it is possible to shorten the measurement time.

Also in the first modification, it is basically possible to obtain the same effects through the same actions as in the first embodiment. That is, it becomes possible to improve convenience with a simple configuration.

<3. Second embodiment>
[composition]
FIG. 5 schematically shows an example of a schematic configuration of an optical property measuring device (optical property measuring device 1B) according to the second embodiment of the present invention. Further, FIG. 6 schematically shows a detailed configuration example of the sample stage (sample stage 141B described later) shown in FIG. 5 in a plan view (XY plan view).

The optical property measuring instrument 1B of the second embodiment shown in FIG. 5 is the same as the optical property measuring instrument 1 of the first embodiment shown in FIG. , a tube 171, a pump 172, and an opening connecting member 181 are further provided, and the other configurations are basically the same.

The sample stage 141B is a member that holds the sample 9 when the sample 9 is placed in the sample chamber 140. In other words, this sample stage 141B corresponds to a specific example of a "holding member" in the present invention. Specifically, as shown in FIG. 5, in this optical property measuring instrument 1B, when measuring the optical properties of the sample 9, the sample 9 is irradiated with the irradiation light Lo traveling on the measurement optical path P1, and the sample 9 is The configuration is such that the light transmitted through the sphere 9 is incident on the integrating sphere 15 through the entrance aperture A1. Further, the sample 9 is held by being placed on the sample stage 141B.

On such a sample stage 141B, one or more suction openings A4 (in the examples of FIGS. 5 and 6, a plurality of suction openings A4) are provided, which are used for suction described below. ing. Specifically, in the example of FIG. 6, a plurality of suction openings A4 are provided along the radial direction around the center of the measurement area Am where the sample 9 is placed (near the inlet opening A1). . Specifically, in the example of FIG. 6, a plurality of suction openings A4 are provided in a cross shape (in the vertical and horizontal directions) centered around the center of the measurement area Am.

The pump 172 is a member that performs suction (suction of the sample 9) on the above-described suction opening A4 via the tube 171. In the present embodiment, the suction strength during such suction may be arbitrarily adjustable depending on the degree of bending or warping of the sample 9, for example. In other words, the suction operation by the pump 172 or the like may be switched between an on state (running state) and an off state (stopping state) using a switch or the like, or the suction strength can be changed continuously. You can do it like this.

Note that these tubes 171 and pump 172 correspond to a specific example of the "suction mechanism" in the present invention.

As shown in FIG. 5, the opening connecting member 181 is a member that connects the suction opening A4 on the sample stage 141B and the suction mechanism (tube 171 and pump 172) below the sample stage 141B. be.

[Action/Effect]
In the optical property measuring instrument 1B of this embodiment, a suction opening is provided in the sample stage 141B that holds the sample 9 in the sample chamber 140, and is used for suction using the suction mechanism (tube 171 and pump 172). A4 is provided.

As a result, in this embodiment, unlike the case of sample holders 101 and 102 according to Comparative Example 2 shown in FIG. 7, for example, the following occurs.

That is, first, when measuring the optical properties of a thin sample 9 such as a film, if the sample 9 is bent or warped, it may be difficult for the irradiation light Lo to enter the sample 9 at an accurate angle. There is a risk that the reproducibility during measurement will decrease.

Here, in the case of Comparative Example 2 shown in FIG. 7, by sandwiching the sample 9 from above and below using a pair of sample holders 101 and 102 (for example, a dedicated jig such as a magnetic type or a ring type), The sample 9 is held (fixed). However, in the configuration of Comparative Example 2 (configuration using a dedicated jig as described above), when measuring the optical characteristics of the sample 9 using the irradiation light Lo, for example, the dedicated jig is not used. There is a risk that it takes time and effort to set, and marks (irreversible measurement marks) caused by the dedicated jig may remain on the sample 9.

On the other hand, in this embodiment, the suction opening A4 is provided on the sample stage 141 and the sample 9 is held using suction. become. In other words, in the present embodiment, it is possible to avoid bending and warping of the sample 9 while saving the effort of setting a dedicated jig and avoiding the possibility that marks caused by the dedicated jig remain on the sample 9. The sample 9 can be held in a suppressed state. As a result, in the optical property measuring instrument 1B of this embodiment, it is possible to improve the reproducibility during measurement and to improve the convenience compared to the case of Comparative Example 2, etc.

Furthermore, in this embodiment, when a plurality of suction openings A4 are provided along the radial direction centered around the center of the measurement area Am, the following will occur. In other words, it becomes possible to handle samples 9 of various sizes, thereby making it possible to further improve convenience.

Furthermore, in this embodiment, the suction strength during suction can be arbitrarily adjusted according to the degree of bending or warping of the sample 9, so that the following results can be obtained. In other words, since the suction strength can be changed continuously, the suction strength can be adjusted appropriately depending on the hardness of the sample 9 (degree of bending, warping, etc.), and the above-mentioned marks will not remain on the sample 9. This makes it possible to more reliably avoid the risk of storage.

In addition, in this embodiment, since an opening connecting member 181 is provided to connect the suction opening A4 on the sample stage 141B and the suction mechanism (tube 171 and pump 172), the following steps can be performed. Become. That is, since the tube 171 and the like are connected to the opening connecting member 181 and suction is performed directly, each member disposed inside the housing 10 (control unit 19, measuring unit 162, optical system (integrating sphere 15, light receiving unit) It is possible to prevent dust and the like from entering the portion 161 etc.). Therefore, it is possible to avoid problems caused by dust or the like in each of these members, and it is possible to improve the reliability of the optical property measuring instrument 1B.

<4. Modification of second embodiment>
Next, modified examples (modified examples 2 and 3) of the second embodiment will be described.

[Modification 2]
FIG. 8 schematically shows an example of a schematic configuration of an optical property measuring device (optical property measuring device 1C) according to Modification 2.

The optical property measuring device 1C of the second modification shown in FIG. 8 is the optical property measuring device 1B of the second embodiment shown in FIG. 170 and a filter 182, the other configurations are basically the same.

In the suction space 170, various members such as the integrating sphere 15, the light receiving section 161, the measuring section 162, and the control section 19 are arranged. As shown in FIG. 8, this suction space 170 is set to, for example, a vacuum state using a pump 172.

Note that these suction space 170 and pump 172 correspond to a specific example of the "suction mechanism" in the present invention.

The filter 182 is arranged between the sample stage 141B and the measurement mechanism, specifically, between the sample stage 141B and the suction space 170 adjacent to it. This filter 182 has a dustproof function.

Even in the second modification, it is basically possible to obtain the same effects through the same actions as in the second embodiment. That is, it is possible to improve convenience while improving reproducibility of measurement.

Moreover, especially in this modification 2, a filter 182 having a dustproof function is provided between the sample stage 141B and the suction space 170, so that the following results are obtained. In other words, it is possible to prevent dust and the like from entering each member arranged in the suction space 170 (control unit 19, measurement unit 162, optical system (integrating sphere 15, light receiving unit 161, etc.)). . Therefore, it is possible to avoid problems caused by dust or the like in each of these members, and it is possible to improve the reliability of the optical property measuring instrument 1C.

[Modification 3]
FIG. 9 schematically shows an example of a schematic configuration of an optical property measuring device (optical property measuring device 1D) according to Modification 3. Further, FIG. 10 schematically shows a detailed configuration example of the sample holder (sample holder 141C described later) shown in FIG. 9 in a cross-sectional view (ZX cross-sectional view).

The optical property measuring device 1D of Modification Example 3 shown in FIGS. 9 and 10 differs from the configuration described so far (the configuration in which the irradiation light Lo passes through the sample 9), and has the following configuration. There is. That is, in this optical property measuring device 1D, when measuring the optical properties of the sample 9, the irradiation light Lo emitted from the light source 11 is reflected by the sample 9, and the light reflected by the sample 9 is measured. The light receiving section 161 is configured to receive the light Lm as the light Lm.

Furthermore, as shown in FIGS. 9 and 10, for example, in the optical property measuring device 1D of this modified example 3, in the optical property measuring device 1C of modified example 2 shown in FIG. Instead, a sample holder 141C is provided, and the filter 182 is not provided (omitted), and the other configurations are basically the same.

The sample holder 141C is designed to be placed on a sample stage, for example, as shown by the arrow d3 in FIG. 9, and is a member that holds the sample 9, as shown in FIGS. 9 and 10. be. In other words, this sample holder 141C corresponds to a specific example of a "holding member" in the present invention.

In addition, as shown in FIGS. 9 and 10, on the holding surface of the sample 9 in the sample holder 141C, there are a plurality of suction openings A4 (in this example, a plurality of A suction opening A4) is provided.

Even in the third modification, it is basically possible to obtain the same effects through the same actions as in the second embodiment and the second modification. That is, it is possible to improve convenience while improving reproducibility of measurement.

<5. Other variations>
Although the present invention has been described above with reference to some embodiments and modifications, the present invention is not limited to these embodiments, etc., and various modifications are possible.

For example, in the above embodiments, etc., the configuration (shape, arrangement, number, etc.) of each device in the optical property measuring instrument is specifically listed and explained. It is not limited to this, and other shapes, arrangements, numbers, etc. may be used.

Specifically, in the above-mentioned embodiments, examples have been described in which the "light source" of the present invention is configured using the above-mentioned lamp light source, but the present invention is not limited to this, and other light sources may be used. It may also constitute a "light source" in the invention.

Furthermore, in the above embodiments, examples of the configurations of the "switching mechanism", "measuring mechanism", "suction mechanism", and "holding member" in the present invention are specifically mentioned and explained. The configuration may be other configurations.

Further, for example, the various configuration examples described in the first and second embodiments and the first to third modified examples may be configured in any combination.

In addition, in the above embodiments, an optical property measuring device configured as a haze meter that evaluates the haze value as the degree of cloudiness of a sample is mainly used as an example, but this example is not limited to this example. I can't do it. That is, the "optical property measuring device" according to the present invention can also be applied to optical property measuring devices that measure other optical properties such as gloss, color, and image definition of a sample. It is possible to do so.

Furthermore, the series of controls described in the above embodiments may be performed by hardware (circuits) or software (programs). When the software is used, the software is composed of a group of programs for causing a computer (microcomputer, etc.) to execute each of the above-mentioned functions. Each program may be used, for example, by being installed in the computer in advance, or may be installed into the computer from a network or a recording medium and used.

1, 1A to 1D... Optical property measuring device, 10... Housing, 11... Light source, 12a, 12b... Lens system, 130... Light shielding plate, 131, 132... Reflection plate, 140... Sample chamber, 141, 141B... Sample stand , 141C... Sample holder, 142... Sample door, 15... Integrating sphere, 160... Optical trap, 161... Light receiving section, 162... Measurement section, 163... Sensor, 170... Space for suction, 171... Tube, 172... Pump, 181 ...Aperture connecting member, 182...Filter, 19...Control unit, 9...Sample, Lm...Measurement light, Lo...Irradiation light, P1...Measurement optical path, P2...Compensation optical path, S...Shutter, Am...Measurement area, A1...Entrance Aperture, A2...compensation aperture, A3...exit aperture, A4...suction aperture, D...light reception data, CTL...control signal, d1, d2...direction, d3...arrow.

Claims (10)

An instrument for measuring optical properties in a sample,
a light source that emits irradiation light for measuring the optical characteristics;
a measurement mechanism that measures the optical properties of the sample using the irradiation light;
a sample chamber in which the sample is placed in a measurement area on the measurement optical path of the irradiation light when measuring the optical characteristics;
a holding member that holds the sample when placing the sample in the sample chamber;
The holding member has one or more suction openings used during suction using a suction mechanism. Optical property measuring instrument. The optical property measuring device according to claim 1, wherein a plurality of the suction openings are provided along the radial direction centered around the center of the measurement area. The optical property measuring instrument according to claim 1 or 2, wherein the suction strength during the suction can be arbitrarily adjusted according to the degree of bending or warping of the sample. When measuring the optical properties, the irradiation light is configured to pass through the sample,
The optical property measuring instrument according to any one of claims 1 to 3, wherein the holding member is a sample stage on which the sample is placed and held. The optical property measuring instrument according to claim 4, further comprising an opening connecting member that connects the suction opening on the sample stage and the suction mechanism. The optical property measuring instrument according to claim 4, further comprising a filter having a dustproof function between the sample stage and the measuring mechanism. The measurement mechanism is
an integrating sphere having an entrance aperture disposed on the measurement optical path of the illumination light;
a light receiving unit that receives the light beam emitted from the integrating sphere;
a measurement unit that obtains measurement data of the optical characteristics by performing predetermined processing based on the light reception data obtained in the light reception unit;
The optical property measuring instrument according to any one of claims 1 to 6, comprising: a sample door configured to be openable and closable and for exposing or blocking the sample chamber from the outside;
a switching mechanism that switches between an irradiation state and a non-irradiation state of the irradiation light on the measurement region in conjunction with the open/close state of the sample door;
The optical property measuring device according to any one of claims 1 to 7, further comprising: The optical property is a haze value as a degree of cloudiness of the sample,
The optical property measuring device according to any one of claims 1 to 8, configured as a haze meter. When measuring the optical properties, the irradiation light is configured to reflect the sample,
The optical property measuring instrument according to any one of claims 1 to 3, wherein the holding member is a sample holder placed on a sample stage.

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