JP2008255178A - Epoxy resin composition for sealing semiconductor, semiconductor device, and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an epoxy resin composition for sealing a semiconductor capable of satisfying both moisture-resistance and migration-proofing property, in particular, a COF type semiconductor, to provide a semiconductor device in which the composition is used as a sealing agent, and to provide a manufacturing method for the semiconductor device. <P>SOLUTION: A low viscosity epoxy resin composition for sealing a semiconductor contains an epoxy resin (A), an aromatic amine (B), a metal complex (C), a coupling agent (D) and silane (E). In the epoxy resin composition, an amount of the metal complex (C) is 0.2-3.0 pts.mass relative to 100 pts.mass of a total amount of the epoxy resin (A) and the aromatic amine (B), a total amount of the coupling agent (D) and silane (E) is 3.0-5.5 pts.mass. The semiconductor device using the composition and the manufacturing method for the semiconductor device are provided. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a highly reliable, highly insulating and highly workable epoxy resin composition for semiconductor encapsulation, which is used for sealing a semiconductor flip chip, especially a COF (chip on film) type flip chip. The present invention relates to a semiconductor device used and a method for manufacturing the semiconductor device.

  Known semiconductor devices having a liquid crystal driver IC include a COF (chip on film) in which a semiconductor chip (element) is mounted on a flexible substrate, and a TCP (tape carrier package). Note that the COF is defined as a semiconductor device having a structure in which a semiconductor chip or the like is mounted on a flexible substrate having wiring. In recent years, the demand for increasing the number of outputs of a liquid crystal driver has increased, and the number of COF mountings excellent in miniaturization of wiring patterns has increased. However, due to the narrow pitch between wires and the high drive voltage due to the fine wiring pattern, the metal in the wiring is ionized and moved when current flows through the wiring pattern, and it is not at the original wiring position. Migration that precipitates and accumulates, causing insulation deterioration between wirings and circuit short-circuiting easily occurs. Therefore, prevention of long-term migration is extremely important for ensuring the reliability of the semiconductor device.

  Epoxy resin compositions are frequently used as a sealing agent for semiconductor devices. In COF mounting, when a sealing agent is filled under a semiconductor chip (integrated circuit) and sealed, a solvent in the sealing agent is used. In order to prevent the formation of voids due to volatilization, a solventless epoxy resin composition is used. And there is a demand for lower viscosity of the solventless epoxy resin composition from the viewpoint of preventing the occurrence of migration due to the narrow gap and narrow pitch (for example, 30 μm or less) in recent years and the workability at the time of mounting. strong.

  When an acid anhydride is used as a curing agent, the viscosity of the epoxy resin composition can be reduced. However, in COF mounting, the lack of moisture resistance, particularly migration resistance, affecting the reliability of COF type semiconductor devices has been highlighted. . Moreover, when a phenol novolac resin is used as a curing agent, the viscosity of the epoxy resin composition tends to increase, and workability may be reduced.

  Aromatic amines as curing agents are easy to lower the viscosity of epoxy resin compositions and have good workability, and provide excellent adhesion, heat resistance, and moisture resistance. In short, there is a problem that migration resistance is not good. Attempts have been made to add imidazole, tertiary amines, etc. in order to increase the curing speed, but one-part properties such as reduced workability due to thickening and reduced reactivity due to moisture absorption are likely to occur. It may cause an increase in ionic impurities and deterioration of moisture resistance. Since the ionic impurities and moisture may cause ion migration, selection of a curing catalyst, precise process control and quality control during preparation of the composition are newly required.

  Additives for preventing migration of the epoxy resin composition have been proposed. For example, a sealing resin composition (Patent Document 1) in which polyvinyl paraphenol, 2-vinyl-4,6-diamino-s-triazine and an imidazole compound are blended with an epoxy resin, or a solder resist (such as an epoxy resin). A sealing resin composition (Patent Document 2) containing benzotriazoles, triazines, and these isocyanuric acid adducts as metal ion binders has been proposed.

However, when these migration inhibitors are solid or powder, it is difficult to uniformly disperse them in the epoxy resin even if the particle size and particle size are adjusted precisely. When the migration inhibitor is not uniformly dispersed, the expected migration prevention effect cannot be obtained even when the sealing resin composition is applied to a semiconductor device.
When the migration inhibitor is liquid or solution, uniform dispersion is possible, but since the uniformity with the epoxy resin is increased, the reaction proceeds quickly and it is difficult to use as a one-pack type sealing resin composition. There was a serious problem.

  As described above, in order to prevent migration, there are proposals such as selection of a curing agent, use of a curing catalyst, use of a migration inhibitor, etc., but with low viscosity (workability) that is strictly required in recent COF mounting. The present condition is that there is no epoxy resin composition that can achieve both migration resistance.

JP 61-12722 A JP 2005-333085 A

  The present invention relates to a semiconductor having both moisture resistance and migration resistance, particularly a COF type semiconductor sealing epoxy resin composition, which the conventional epoxy resin composition for semiconductor sealing did not have at the same time. A semiconductor device used as a sealing agent, particularly a COF type semiconductor device, and a semiconductor device using the composition, particularly a semiconductor device mounted with a semiconductor chip on a COF type semiconductor device, particularly a method for manufacturing a COF type semiconductor device. The purpose is to provide.

  The present invention includes an epoxy resin (A), an aromatic amine (B), a metal complex (C), a coupling agent (D), and a silane compound (E). The epoxy resin (A) and the aromatic amine (B) The metal complex (C) is 0.2 to 3.0 parts by mass, the coupling agent (D) and the silane compound (E) are combined in an amount of 3.0 to 5.5 parts by mass with respect to 100 parts by mass of the total amount of A low-viscosity epoxy resin composition for semiconductor encapsulation.

  In the low-viscosity epoxy resin composition for semiconductor encapsulation of the present invention, the mass ratio of the silane coupling agent (D) and the silane compound (E) is preferably 65/35 to 35/65.

  In the low-viscosity epoxy resin composition for semiconductor encapsulation of the present invention, the metal complex (C) is preferably aluminum trisacetylacetonate.

  In the low-viscosity epoxy resin composition for semiconductor encapsulation of the present invention, the aromatic amine (B) is preferably an aromatic amine having an alkylenedianiline structure and having at least one substituent on the aromatic ring.

  In the low-viscosity epoxy resin composition for semiconductor encapsulation of the present invention, the aromatic amine (B) is preferably 4,4'-methylenebis (2-ethylaniline).

  In the low-viscosity epoxy resin composition for semiconductor encapsulation of the present invention, the coupling agent (D) is hydrolytic condensation of 3 (or 2) -triethoxysilyl-N- (1,3-dimethylbutylidene) propylamine. And / or N- (1,3-dimethylbutylidene) -3- (triethoxysilyl) -1-propanamine.

  In the low viscosity semiconductor sealing epoxy resin composition of the present invention, the silane compound (E) is preferably diphenyl dialkoxysilane.

  It is preferable that the epoxy resin composition for semiconductor encapsulation according to the present invention has a viscosity at 100 ° C. of 0.5 to 70.0 mPa · s.

  Moreover, this invention is a semiconductor device formed by sealing with one of the low-viscosity epoxy resin compositions for sealing a semiconductor.

  Moreover, this invention is a manufacturing method of the semiconductor which seals a COF type | mold semiconductor using the epoxy resin composition for semiconductor sealing of the said low viscosity in any one of the said.

  The epoxy resin composition for semiconductor encapsulation of the present invention has a low viscosity and is excellent in adhesiveness, heat resistance, moisture resistance and the like. In addition, since the composition is solventless and has a low viscosity, there is no influence on the environment especially when a COF type semiconductor element is mounted, no voids are generated, and the workability is excellent. In addition, since a semiconductor device mounted using the composition is excellent in moisture resistance and migration resistance, there is no insulation deterioration between wirings and no circuit short circuit. There is no problem of poor appearance.

(Epoxy resin composition)
The main components of the epoxy resin composition for semiconductor encapsulation of the present invention are an epoxy resin (A), an aromatic amine (B), a metal complex (C), a coupling agent (D), and a silane compound (E). The viscosity of the epoxy resin composition is 0.5 to 70.0 mPa · s at 100 ° C., preferably 0.5 to 65.0 mPa · s, and more preferably 0.5 to 60.0 mPa · s. When it is 70.0 mPa · s or more, the injection time becomes too long, or an uninjected portion is generated, resulting in a decrease in production efficiency and a deterioration in appearance and reliability. When the pressure is less than 0.5 mPa · s, the flow out of the injection portion and the shape retention force are reduced, and contamination, appearance, and reliability are deteriorated.

  The silane compound (E) does not contain a silane coupling agent. Therefore, even when a silane coupling agent is used as the coupling agent (D), the silane compound (E) is indispensable. That is, only when the three of the metal complex (C), the silane coupling agent (D), and the silane compound (E) coexist, the curing of the epoxy resin (A) with the aromatic amine (B) is promoted. Not only did the viscosity of the composition be lowered and the aromatic amine (B) exhibited a number of desirable properties that the cured epoxy resin had, but it finally achieved migration resistance. The mass ratio of the silane coupling agent (D) and the silane compound (E) is 65/35 to 35/65, preferably 55/45 to 45/55.

(Epoxy resin)
The epoxy resin (A) is the main component and base of the composition for semiconductor encapsulation. The epoxy resin (A) may be either liquid or solid as long as the composition can be adjusted to a viscosity that can penetrate into the narrow pitch wiring part and the narrow gap part, but it is preferably a liquid resin that is easily reduced in viscosity. . The epoxy resin (A) can be used alone or in combination.

  Specifically, bisphenol type epoxy resins that are glycidyl ethers such as bisphenol A and bisphenol F: liquid glycidyl amine type epoxy resins such as diglycidyl aniline, diglycidyl orthotoluidine, paraaminophenol type epoxy resin; (3 ′, 4 ′ An alicyclic epoxy resin such as -epoxycyclohexane) methyl-3,4-epoxycyclohexylcarboxylate, 1-methyl-4- (2-methyloxiranyl) -7-oxabicyclo [4,1,0] heptane; Hydrogenated epoxy resins such as 2,2-bis (4-hydroxycyclohexyl) propane diglycidyl ether, 1,3-bis (3-glycidoxypropyl) -1,1,3,3-tetramethyldisiloxane, etc. Cyclohexane oligomer having an epoxy group Novolak type epoxy resins and the like. Preferred are a liquid bisphenol type epoxy resin, a liquid glycidylamine type epoxy resin, and a cyclohexane oligomer having an epoxy group, and particularly preferred are a liquid bisphenol A epoxy resin, a liquid bisphenol F epoxy resin, a liquid paraaminophenol type epoxy resin, 3-bis (3-glycidoxypropyl) -1,1,3,3-tetramethyldisiloxane, hydride of liquid bisphenol A epoxy resin, (3 ′, 4′-epoxycyclohexane) methyl-3,4- Examples thereof include epoxy cyclohexyl carboxylate and 1,2: 8,9-diepoxyne.

(Aromatic amine)
The aromatic amine (B) is a curing agent for the epoxy resin. The aromatic amine (B) may be liquid or solid as long as the composition can be adjusted to a viscosity capable of penetrating into the narrow pitch wiring portion or narrow gap portion. It is preferably a liquid aromatic amine that is easily viscous. The aromatic amine (B) is preferably an aromatic amine having an alkylenedianiline structure and having at least one substituent on the aromatic ring. The substituent is preferably an alkyl group such as a methyl group or an ethyl group, or an alkoxy group such as a methoxy group. The aromatic amine (B) may contain an oligomer or the like by-produced when it is produced. The aromatic amine (B) can be used alone or in combination.

  Specifically, amines with one aromatic ring such as metaphenylenediamine, 1,3-toluenediamine, 1,4-toluenediamine, 2,4-toluenediamine, diethyltoluenediamine, 2,4-diaminoanisole; 2 , 4-Diaminodiphenylmethane, 4,4-diaminodiphenylsulfone, 4,4-diaminodiphenylsulfone, 4,4′-methylenebis (2-ethylaniline), 3,3′-diethyl-4,4′-diaminophenylmethane , 3,3 ′, 5,5′-tetramethyl-4,4′-diaminophenylmethane, 3,3 ′, 5,5′-tetraethyl-4,4′-diaminophenylmethane, Examples include amines and aromatic amines such as polytetramethylene oxide diparaaminobenzoate. Since these exemplified aromatic amines are solid, it is preferable to liquefy them by heating and mix with the epoxy resin. Particularly preferred is 4,4'-methylenebis (2-ethylaniline) from the viewpoint of reactivity.

  The aromatic amine (B) has an amino group in a ratio of 0.8 to 1.5 equivalents, preferably 0.9 to 1.2 equivalents per 1 equivalent of the epoxy group of the epoxy resin (A). Blended. If it is outside this range, problems such as a decrease in the adhesive strength of the epoxy resin composition to the semiconductor element and a decrease in the glass transition point may occur.

(Metal complex)
The metal complex is a catalyst component that accelerates the curing of (C) the epoxy resin (A). The metal complex is not particularly limited as long as it has a hardening accelerating action, but it preferably exhibits a hardening accelerating action at a desired heating temperature, can be used as a one-part composition, and does not inhibit migration resistance. . Examples of the metal include aluminum, iron, cobalt, nickel, copper and the like, and aluminum is preferable.
Examples of the ligand include acetylacetonate, pyridine, triphenylphosphine, ethylenediamine, and ethylenediaminetetraacetic acid. Acetylacetonate is preferable.

  Specific examples include aluminum acetylacetonate complexes such as aluminum trisacetylacetonate, aluminum tris (octadecylacetylacetonate), aluminum tris (hexadecylacetylacetonate), and aluminum ethylacetylacetonate. Aluminum trisacetylacetonate is preferred from the standpoint of one-component.

  The metal complex (C) is 0.2 to 3.0 parts by mass, preferably from 0.1 to 3.0 parts by mass from the viewpoint of curability and one-component stability with respect to 100 parts by mass of the total amount of the epoxy resin (A) and the aromatic amine (B). Is preferably blended in an amount of 0.3 to 1.5 parts by mass. When the amount is less than the range, the curability of the epoxy resin composition is inferior. When the amount is more than the range, the stability of the epoxy resin composition is deteriorated.

(Coupling agent)
The coupling agent (D) mainly acts as one component of the catalyst that accelerates the curing of the epoxy resin (A). The coupling agent (D) is not particularly limited as long as it does not impair the appearance such as blistering of the cured product of the epoxy resin composition or the stability of the one component, and a silane coupling agent, a titanium coupling agent, or the like is used. It is done. The silane coupling agent preferably has a ketimine structure. Of course, a coupling agent (D) can be used together.

  Specifically, γ-glycidoxytrimethoxysilane, γ-glycidyloxypropyltrimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, γ-aminopropyltrimethoxysilane, 3 (or 2) -triethoxysilyl -N- (1,3-dimethylbutylidene) propylamine hydrolysis condensate, N- (1,3-dimethylbutylidene) -3- (triethoxysilyl) -1-propanamine, isopropyltri (N- Aminoethyl) titanate and the like. Particularly preferred is a hydrolysis condensate of γ-glycidoxytrimethoxysilane, γ-aminopropyltrimethoxysilane, 3 (or 2) -triethoxysilyl-N- (1,3-dimethylbutylidene) propylamine, isopropyl Tri (N-aminoethyl) titanate and the like are used in combination.

  The coupling agent (D) is combined with the silane compound (E) from the viewpoint of curability, one-component stability, etc. with respect to 100 parts by mass of the total amount of the epoxy resin (A) and the aromatic amine (B). 5 to 5.5 parts by mass are blended. When the amount is less than the range, the curability of the epoxy resin composition is inferior. When the amount is more than the range, the curability of the epoxy resin composition and the cured product are swollen or voided.

(Silane compound)
The silane compound (E) mainly acts as one component of a catalyst that accelerates the curing of the epoxy resin (A). The silane compound (E) is not particularly limited as long as it does not impair the appearance defect such as swelling of the cured product of the epoxy resin composition and the stability of the one liquid, but contains a silane compound having a phenyl group and an alkoxy group Silane compounds are preferred. In addition, this silane compound (E) does not contain a silane coupling agent. Of course, you may use a silane compound (E) together.

  Specifically, phenyl having alkoxy such as diphenyldimethoxysilane, triphenylmethoxysilane, triphenylethoxysilane, diphenylmethylmethoxysilane, diphenyldiethoxysilane, tri (paramethoxyphenyl) methoxysilane, paramethylbenzyltrimethoxysilane A silane compound is mentioned. Preferred is diphenyldimethoxysilane.

The silane compound (E) is combined with the silane coupling agent (D) from the viewpoint of curability and one-component stability with respect to 100 parts by mass of the total amount of the epoxy resin (A) and the aromatic amine (B). .5 to 5.5 parts by weight are blended. When the amount is less than the range, the curability of the epoxy resin composition is inferior. When the amount is more than the range, the curability of the epoxy resin composition and the cured product are swollen or voided.
The mass ratio of the coupling agent (D) to the silane compound (E) is 65/35 to 35/65, preferably 55/45 to 45/55. When the mass ratio is deviated, the curability of the epoxy resin composition is lowered, and the appearance of the semiconductor device is deteriorated and the storage stability is lowered.

(Other compounds)
A leveling agent, a coloring agent, an ion trap agent, an antifoaming agent, a filler, etc. can be mix | blended with the epoxy resin composition containing the said essential components (A)-(E). The type and amount of each compound are as usual. Further, thermosetting resins such as okitacene, acrylate, bismaleimide, thermoplastic resins, elastomers, and the like may be blended.

(Preparation of composition)
The epoxy resin composition of the present invention is prepared by mixing components (A) to (E) and other blends and stirring them. Although mixing and stirring can be performed using a roll mill, of course, it is not limited to this. When the epoxy resin (A) is solid, it is preferably liquefied or fluidized and mixed by heating.
Even if the components are mixed at the same time, some components may be mixed first, and the remaining components may be mixed later.

(Semiconductor device)
In the semiconductor device, as shown in a cross-sectional view of one example in FIG. 1, a plurality of wirings 5 (consisting of a barrier layer 2, a conductor layer 3, and a tin plating layer 4) are arranged on a base material (flexible film) 1. The basic structure is a structure in which a wiring substrate 6 and a semiconductor chip 7 mounted on the wiring substrate 6 are combined with a sealant 8. The wiring board 6 has a structure in which a plurality of wirings 5 and a solder resist 9 are laminated in this order on the base material 1, and one end of the wiring 5 can be connected to the semiconductor chip 7 to be mounted and the other end can be connected to an external device. Yes. The solder resist 9 covers the wiring 5 on the base material 1 to protect it, thereby preventing a short circuit or disconnection. The case where the substrate 1 is a flexible film is COF.

(Semiconductor chip mounting)
For example, the semiconductor chip is mounted in the following procedure.
(1) The flexible wiring board 6 is bonded to the semiconductor chip 7 having the gold bump (projection electrode) 10. Note that the solder resist 9 covers and protects the portion of the surface of the wiring 5 that is not involved in the bonding with the semiconductor chip 7.
(2) After the joining, the semiconductor device 11 is manufactured by filling a sealing agent 8 (an epoxy resin composition for sealing) between the semiconductor chip 7 and the flexible wiring substrate 6 and curing by heating.

(Examples 1-8, Comparative Examples 1-12)
The components shown in Table 1 were weighed out in the amounts shown in Table 1, and the mixture that was mixed at once was kneaded with a three-roll mill to obtain a uniform epoxy resin composition. Next, the composition was placed under reduced pressure to remove bubbles in the composition, and used as a sample for evaluation. The stability, migration resistance and appearance of the composition and the cured product (semiconductor device) of the composition were evaluated using the following apparatuses and methods. The migration resistance was substituted and evaluated with insulation.

(Stability)
Using an E-type viscometer (Model TVE-22H, manufactured by Toki Sangyo Co., Ltd.), the viscosity of the sample for evaluation was measured at a liquid temperature of 25 ° C. and 10 rpm. Thereafter, the sample for evaluation was left in a sealed container at room temperature (25 ° C.) for 24 hours. The viscosity of the sample for evaluation was measured again. The viscosity increase ratio was determined from the viscosity before and after the standing. When the thickening ratio was less than 2.0, the stability was good and passed (◯), and when it was 2.0 or more, the stability was poor and failed (x).

(Curable)
10 mg of the sample for evaluation is applied so as to be in contact with the long side surface of the silicon chip (2 × 20 × 0.75 mm) mounted on the polyimide film, and the sample for evaluation is injected and sealed under the silicon chip. A test piece was produced. The test piece was placed in an oven and heated at 150 ° C. to cure the epoxy resin. The test piece after heating was set up vertically, and the sagging state of the sample for evaluation was visually observed. When the time was less than 10 minutes, the curability was considered good (O), and when the time was 10 minutes or more, the curability was regarded as unacceptable (X).

(Insulation)
An evaluation sample was applied on a comb-shaped electrode (material: tin plating on copper, pattern pitch: 30 μm, electrode width: 15 μm) formed on a polyimide film, and heated at 150 ° C. for 90 minutes, A test piece was produced by curing. The test piece after heating was put into a tank (manufactured by ESPEC Co., Ltd., model SH-641) having a temperature of 85 ° C. and a humidity of 85%, and a DC voltage of 60 V was applied between the electrodes to measure the resistance between the electrodes. When the resistance is 1 × 10 ⁸ Ω or more and lasts for 500 hours or more, the insulation is considered good (○), and when the resistance is 1 × 10 ⁸ Ω or more and less than 500 hours, the insulation is poor. It was considered as rejected (×). And when the insulation was a pass, it was determined that there was an insulation retention characteristic that would not hinder actual use.

(appearance)
About 5 g of the sample for evaluation was weighed into a metal case (50 mmφ), heated at 150 ° C. for 90 minutes, and cured to prepare a test piece. The cured state (wax, void) of the test piece was visually observed.
A glass substrate was laminated with a gap of 50 μm, and a sample for evaluation was injected into the gap by capillary action, and then heated and cured at 150 ° C. for 90 minutes to prepare a test piece. The cured state of the test piece was visually observed to confirm the presence or absence of voids. In any case, the case where there were no wrinkles and voids was judged as acceptable (◯) when the appearance was good, and the case where there were wrinkles and voids on either side was regarded as a failure (×) when the appearance was bad.

From the comparison between Example 1 and Comparative Example 1, it is clear that the presence or absence of silane (E) makes a difference in the appearance of the cured product.
From the comparison between Example 1 and Comparative Example 2, it is clear that the presence or absence of silane (E) makes a difference in the stability and curability of the composition.
From the comparison between Example 1 and Comparative Examples 3 to 4, it is clear that the presence or absence of silane (E) makes a difference in the curability of the composition.
From the comparison between Example 1 and Comparative Example 5, it is clear that the presence or absence of the coupling agent (D) makes a difference in the appearance of the cured product.

From the comparison between Example 4 and Comparative Example 8, it is clear that when the total amount of coupling agent (D) and silane (E) is small, the curability and insulation of the composition are poor.
From the comparison between Example 5 and Comparative Example 6, it is clear that when the amount of the metal complex (C) is small, the curability and insulation of the composition are poor.
From the comparison between Example 6 and Comparative Example 7, it is apparent that the stability of the composition is inferior when the amount of the metal complex (C) is large.

From the comparison between Example 7 and Comparative Example 9, it is clear that when the total amount of the coupling agent (D) and silane (E) is large, the appearance of the cured product is inferior.
From the comparison between Example 8 and Comparative Example 10, it is clear that the presence or absence of silane (E) causes a difference in the curability of the composition.
From the comparison between Example 8 and Comparative Example 11, it is clear that the presence or absence of silane (E) causes a difference in the curability and insulation of the composition.
From the comparison between Example 8 and Comparative Example 12, it is clear that the presence or absence of the aromatic amine (B) and the metal complex (C) causes a difference in the stability and insulation of the composition.

  The epoxy resin composition of the present invention is suitable as a sealant for semiconductor devices. It is particularly suitable for COF mounting.

It is sectional drawing of an example of the semiconductor device of this invention.

Explanation of symbols

1 Base material (flexible film)
5 Wiring 6 Wiring board 7 Semiconductor chip (element)
8 Epoxy resin composition (sealing agent)
9 Solder resist

Claims (10)

  Total amount of epoxy resin (A) and aromatic amine (B) including epoxy resin (A), aromatic amine (B), metal complex (C), coupling agent (D) and silane compound (E) 100 The metal complex (C) is 0.2 to 3.0 parts by mass, the coupling agent (D) and the silane compound (E) are 3.0 to 5.5 parts by mass with respect to parts by mass. Epoxy resin composition for semiconductor encapsulation.   The low-viscosity epoxy resin composition for semiconductor encapsulation according to claim 1, wherein the mass ratio of the silane coupling agent (D) and the silane compound (E) is 65/35 to 35/65.   The low viscosity resin epoxy resin composition for semiconductor encapsulation according to claim 1 or 2, wherein the metal complex (C) is aluminum triacetylacetonate.   The low-viscosity epoxy resin for semiconductor encapsulation according to any one of claims 1 to 3, wherein the aromatic amine (B) is an aromatic amine having an alkylenedianiline structure and having at least one substituent on the aromatic ring. Composition.   The low-viscosity epoxy resin composition for semiconductor encapsulation according to claim 4, wherein the aromatic amine (B) is 4,4'-methylenebis (2-ethylaniline).   Coupling agent (D) is a hydrolysis condensate of 3 (or 2) -triethoxysilyl-N- (1,3-dimethylbutylidene) propylamine and / or N- (1,3-dimethylbutylidene)- The low-viscosity epoxy resin composition for semiconductor encapsulation according to claim 1, which is 3- (triethoxysilyl) -1-propanamine.   The low-viscosity epoxy resin composition for semiconductor encapsulation according to any one of claims 1 to 6, wherein the silane compound (E) is diphenyl dialkoxysilane.   A low-viscosity epoxy resin composition for semiconductor encapsulation, wherein the epoxy resin composition for semiconductor encapsulation according to any one of claims 1 to 7 has a viscosity at 100 ° C of 0.5 to 70.0 mPa · s.   A semiconductor device sealed with the low-viscosity epoxy resin composition for sealing a semiconductor according to claim 1.   The manufacturing method of the semiconductor which seals a COF type semiconductor using the epoxy resin composition for semiconductor sealing of the low viscosity in any one of Claims 1-8.

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