JP2008252823A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator Download PDF

Info

Publication number
JP2008252823A
JP2008252823A JP2007094944A JP2007094944A JP2008252823A JP 2008252823 A JP2008252823 A JP 2008252823A JP 2007094944 A JP2007094944 A JP 2007094944A JP 2007094944 A JP2007094944 A JP 2007094944A JP 2008252823 A JP2008252823 A JP 2008252823A
Authority
JP
Japan
Prior art keywords
lid
integrated circuit
circuit element
concave
concave container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007094944A
Other languages
Japanese (ja)
Inventor
Tomoji Onda
友治 恩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2007094944A priority Critical patent/JP2008252823A/en
Publication of JP2008252823A publication Critical patent/JP2008252823A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To enhance productivity by coping with miniaturization. <P>SOLUTION: A piezoelectric oscillator comprises a hollow type container having a hollow type space portion formed, external connection terminals formed at four corner portions of the hollow type container on a surface on the opposite side from a bottom surface of the hollow type space part, a lid body made of ceramic to airtightly seal the hollow type space portion, a piezoelectric vibrating element mounted on the lid body in the hollow type space portion, and an integrated circuit element electrically connected to the piezoelectric vibrating element through the lid body and connected to the external connection terminal through the lid body and hollow type container, and mounted on a main surface of the lid body facing the opposite side to the hollow type space portion. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は携帯用通信機器等の電子機器に用いられる圧電発振器に関する。   The present invention relates to a piezoelectric oscillator used in an electronic device such as a portable communication device.

従来から、携帯用通信機器等の電子機器に圧電発振器が用いられている。例えば図6に示すように、従来の圧電発振器200は、凹形状容器210と圧電振動素子220と蓋体230と集積回路素子240とから主に構成されている。   Conventionally, piezoelectric oscillators have been used in electronic devices such as portable communication devices. For example, as shown in FIG. 6, the conventional piezoelectric oscillator 200 mainly includes a concave container 210, a piezoelectric vibration element 220, a lid 230, and an integrated circuit element 240.

集積回路素子240は、基板体に壁部が一体で形成された凹形状容器210の内部底面に搭載されている。また、圧電振動素子220は、蓋体230の集積回路素子240側を向く面に搭載されている。この圧電振動素子220が搭載された蓋体230を集積回路素子240が搭載された凹形状容器210に接合して、圧電振動素子220と集積回路素子240とを凹形状容器210内に気密封止している(例えば、特許文献1参照)。   The integrated circuit element 240 is mounted on the inner bottom surface of the concave container 210 whose wall is formed integrally with the substrate body. The piezoelectric vibration element 220 is mounted on the surface of the lid 230 facing the integrated circuit element 240 side. The lid 230 on which the piezoelectric vibration element 220 is mounted is joined to the concave container 210 on which the integrated circuit element 240 is mounted, and the piezoelectric vibration element 220 and the integrated circuit element 240 are hermetically sealed in the concave container 210. (For example, refer to Patent Document 1).

このような構造の圧電発振器200は、マザーボード等の外部配線基板上に搭載され、前記凹形状容器210の凹部底面の裏側の面に設けられている外部接続用端子を外部配線基板の配線に、例えば半田接合することで実装される。ここで、凹形状容器210は、通常、セラミック材料によって形成されており、その内部や表面には配線導体が形成され、従来から周知のセラミックグリーンシート積層法等を用いて形成される。   The piezoelectric oscillator 200 having such a structure is mounted on an external wiring board such as a mother board, and external connection terminals provided on the back surface of the concave bottom surface of the concave container 210 are connected to the wiring of the external wiring board. For example, it is mounted by soldering. Here, the concave container 210 is usually formed of a ceramic material, and a wiring conductor is formed inside or on the surface thereof, and is formed using a conventionally known ceramic green sheet laminating method or the like.

また、前記集積回路素子240の内部には、圧電振動素子220の温度特性に応じて作成された温度補償データに基づいて、圧電発振器200の発振周波数を補正する温度補償回路が設けられている場合もあり、圧電発振器200を組み立てた後に、前記の温度補償データを集積回路素子240のメモリ内に格納するために、前記凹形状容器210の凹部底面の反対側の面や外側面等に温度補償データ書込用の温度補償制御端子が設けられている。この温度補償制御端子に温度補償データ書込装置のプローブ針を当て、集積回路素子240内のメモリに温度補償データを入力することで、温度補償データが集積回路素子240のメモリ内に格納される。   In addition, a temperature compensation circuit that corrects the oscillation frequency of the piezoelectric oscillator 200 based on the temperature compensation data created according to the temperature characteristics of the piezoelectric vibration element 220 is provided in the integrated circuit element 240. In order to store the temperature compensation data in the memory of the integrated circuit element 240 after the piezoelectric oscillator 200 is assembled, temperature compensation is performed on the surface opposite to the bottom surface of the concave portion of the concave container 210 or the outer surface. A temperature compensation control terminal for writing data is provided. The temperature compensation data is stored in the memory of the integrated circuit element 240 by applying the probe needle of the temperature compensation data writing device to the temperature compensation control terminal and inputting the temperature compensation data to the memory in the integrated circuit element 240. .

特開2000-134037号公報JP 2000-134037 A

しかしながら、集積回路素子240を凹形状容器210の内部に収容する構造の従来の圧電発振器200では、この外形寸法を更に小型化する場合、集積回路素子240を収容できるだけの空間を確保する必要があるため、圧電発振器200の強度を確保するために凹形状容器210の壁となる部分の厚さを確保しなくてはならず、圧電発振器200の小型化に限界があった。また、この壁となる部分の厚さを薄くしていくと、圧電発振器200の強度が保てず、衝撃等で破損する恐れもある。
また、集積回路素子240を凹形状容器210の内部に収容するため、集積回路素子より後に搭載する圧電振動素子220に不良があった場合に、集積回路素子240も含めて破棄しなければならず、生産性が悪いという問題がある。
However, in the conventional piezoelectric oscillator 200 having a structure in which the integrated circuit element 240 is accommodated inside the concave container 210, it is necessary to secure a space that can accommodate the integrated circuit element 240 when the external dimensions are further reduced. Therefore, in order to ensure the strength of the piezoelectric oscillator 200, the thickness of the portion that becomes the wall of the concave container 210 must be ensured, and there is a limit to downsizing the piezoelectric oscillator 200. Further, when the thickness of the wall portion is reduced, the strength of the piezoelectric oscillator 200 cannot be maintained, and there is a risk of damage due to impact or the like.
Further, since the integrated circuit element 240 is accommodated in the concave container 210, when the piezoelectric vibration element 220 mounted after the integrated circuit element is defective, the integrated circuit element 240 and the integrated circuit element 240 must be discarded. There is a problem that productivity is bad.

そこで本発明は、前記した問題を解決し、小型化に対応し、生産性を向上させる圧電発振器を提供することを課題とする。   Therefore, an object of the present invention is to provide a piezoelectric oscillator that solves the above-described problems, copes with downsizing, and improves productivity.

前記課題を解決するため、本発明は、凹形状空間部が形成された凹形状容器と、該凹形状空間部の底面とは反対側の面であって該凹形状容器の四つの隅部に形成された外部接続用端子と、セラミックからなり該凹形状空間部を気密封止する蓋体と、前記凹形状空間部内であって前記蓋体に搭載される圧電振動素子と、前記蓋体を介して該圧電振動素子と電気的に接続されかつ前記蓋体と前記凹形状容器とを介して外部接続用端子と接続され前記蓋体の前記凹形状空間部とは反対側を向く主面に搭載される集積回路素子と、を備えることを特徴とする。   In order to solve the above problems, the present invention provides a concave container in which a concave space portion is formed, and a surface opposite to the bottom surface of the concave space portion at four corners of the concave container. The formed external connection terminal, a lid made of ceramic and hermetically sealing the concave space, a piezoelectric vibration element mounted on the lid within the concave space, and the lid A main surface that is electrically connected to the piezoelectric vibration element via the lid and the external connection terminal via the concave container and facing the opposite side of the concave space of the lid. And an integrated circuit element to be mounted.

また、本発明は、上記構成において、前記凹形状容器と前記蓋体とを接合する異方性導電性樹脂層を備えて構成されることを特徴とする。   Moreover, this invention is characterized by comprising the anisotropic conductive resin layer which joins the said concave container and the said cover body in the said structure.

さらに、本発明は、該蓋体と該集積回路素子との間にアンダーフィルを設けたことを特徴とする。   Furthermore, the present invention is characterized in that an underfill is provided between the lid and the integrated circuit element.

このような本発明の圧電発振器によれば、凹形状容器の外側に集積回路素子を搭載するので、凹形状容器を小型にしても凹形状容器の壁部を薄くする必要がなく、凹形状容器体の強度を維持させることができる。   According to such a piezoelectric oscillator of the present invention, since the integrated circuit element is mounted on the outside of the concave container, there is no need to make the wall of the concave container thin even if the concave container is downsized. The strength of the body can be maintained.

また、凹形状容器と蓋体とを接合し導通する異方性導電性樹脂層を備えたので、凹形状容器内を気密封止することができ、かつ、外部接続端子を介して集積回路素子や圧電振動素子の導通を確保することができる。   Further, since the anisotropic conductive resin layer that joins and conducts the concave container and the lid is provided, the inside of the concave container can be hermetically sealed, and the integrated circuit element can be connected via the external connection terminal. In addition, conduction of the piezoelectric vibration element can be ensured.

また、蓋体と、蓋体の表面上に搭載された前記集積回路素子との間にアンダーフィルが充填されるので、不具合の原因となる導電性の異物が前記隙間に入ることが無くなり、信頼性の高い圧電発振器を得ることができる。また、集積回路素子に異物が付着していた場合、この異物をアンダーフィル内に閉じ込めておくことができるので、異物を起因とするトラブルを回避することができる。   In addition, since the underfill is filled between the lid and the integrated circuit element mounted on the surface of the lid, the conductive foreign matter that causes the malfunction does not enter the gap, and the reliability A high-performance piezoelectric oscillator can be obtained. Further, when foreign matter is attached to the integrated circuit element, the foreign matter can be confined in the underfill, so that troubles caused by the foreign matter can be avoided.

以下、発明を実施するための最良の形態(以下、「実施形態」という。)を添付図面に基づいて詳細に説明する。   Hereinafter, the best mode for carrying out the invention (hereinafter referred to as “embodiment”) will be described in detail with reference to the accompanying drawings.

図1は本発明の実施形態に係る圧電発振器の一例を示す断面図である。図2は、集積回路素子の集積回路素子側電極パッドに金属バンプを設けた状態を示す図である。図3(a)は集積回路素子搭載パッドが設けられた蓋体の一方の主面の一例を示す図であり、(b)は振動子搭載パッドが設けられた蓋体の他方の主面の一例を示す図である。図4(a)は、凹形状容器側接続端子が設けられた側の凹形状容器の一例を示す図であり、(b)は外部接続用端子が設けられた凹形状容器の主面の一例を示す図である。図5は蓋体に圧電振動素子を搭載した一例を示す図である。   FIG. 1 is a sectional view showing an example of a piezoelectric oscillator according to an embodiment of the present invention. FIG. 2 is a diagram illustrating a state in which metal bumps are provided on the integrated circuit element side electrode pads of the integrated circuit element. FIG. 3A is a diagram illustrating an example of one main surface of the lid body provided with the integrated circuit element mounting pad, and FIG. 3B is a diagram illustrating the other main surface of the lid body provided with the vibrator mounting pad. It is a figure which shows an example. FIG. 4A is a view showing an example of the concave container on the side where the concave container side connection terminal is provided, and FIG. 4B is an example of the main surface of the concave container provided with the external connection terminal. FIG. FIG. 5 is a diagram illustrating an example in which a piezoelectric vibration element is mounted on a lid.

図1に示すように、本発明の実施形態に係る圧電発振器100は、凹形状容器10、圧電振動素子20、蓋体30、集積回路素子40から主に構成されている。この圧電発振器100は、蓋体30に圧電振動素子20が搭載されており、この圧電振動素子20が凹形状容器10の凹形状空間部Kの内部に納まるように凹形状容器10の凹形状空間部Kを蓋体30で気密封止され、この蓋体30に集積回路素子40が搭載された構造となっている。   As shown in FIG. 1, the piezoelectric oscillator 100 according to the embodiment of the present invention mainly includes a concave container 10, a piezoelectric vibration element 20, a lid 30, and an integrated circuit element 40. In the piezoelectric oscillator 100, the piezoelectric vibration element 20 is mounted on the lid body 30, and the concave space of the concave container 10 is arranged so that the piezoelectric vibration element 20 is accommodated in the concave space portion K of the concave container 10. The portion K is hermetically sealed with a lid 30, and the integrated circuit element 40 is mounted on the lid 30.

圧電振動素子20は、例えば水晶からなり、所定の結晶軸でカットした圧電板21の両主面に一対の励振用電極22を被着・形成されて構成されており、外部からの変動電圧が、前記一対の励振用電極22を介して圧電振動素子20に印加されると所定の周波数で厚みすべり振動を起こすようになっている。   The piezoelectric vibration element 20 is made of, for example, quartz, and is configured by attaching and forming a pair of excitation electrodes 22 on both main surfaces of a piezoelectric plate 21 cut along a predetermined crystal axis. When applied to the piezoelectric vibration element 20 via the pair of excitation electrodes 22, thickness shear vibration is caused at a predetermined frequency.

集積回路素子40は、例えば、矩形状に形成されたフリップチップ型となっており、その表面の回路形成面に、周囲の温度状態を検知する感温素子と、後述する凹形状容器10に設けられた書込端子Wからの温度補償データに基づいて、圧電振動素子20の振動特性を温度変化に応じて補正する温度補償回路と、この温度補償回路に接続されて所定の発振出力を生成する発振回路等が設けられている。ここで、発振回路で生成された発振出力は、圧電発振器100の外部に出力された後、例えばクロック信号等の基準信号として利用される。
図2に示すように、この集積回路素子40の一方の主面には集積回路素子側電極パッド41が設けられており、この集積回路素子側電極パッド41に金属バンプTが設けられた状態となっている。
The integrated circuit element 40 is, for example, a flip chip type formed in a rectangular shape, and is provided on a circuit forming surface on the surface of the integrated circuit element 40 in a temperature-sensitive element that detects an ambient temperature state and a concave container 10 described later. Based on the temperature compensation data from the written terminal W, a temperature compensation circuit for correcting the vibration characteristics of the piezoelectric vibration element 20 according to a temperature change, and a predetermined oscillation output is generated by being connected to the temperature compensation circuit. An oscillation circuit or the like is provided. Here, the oscillation output generated by the oscillation circuit is output to the outside of the piezoelectric oscillator 100 and then used as a reference signal such as a clock signal.
As shown in FIG. 2, an integrated circuit element side electrode pad 41 is provided on one main surface of the integrated circuit element 40, and the metal bump T is provided on the integrated circuit element side electrode pad 41. It has become.

前記のとおり、凹形状容器10は、図1及び図4に示すように、凹形状空間部Kが形成されており、凹形状容器10の下面、つまり、凹形状空間部Kの底面とは反対側の面であってその四隅部に外部接続用端子13が設けられている(図4(b)参照)。なお、隣り合う外部接続用端子13,13の間であってその長辺側には書込端子W(図1及び図5参照)が設けられている。   As described above, the concave container 10 is formed with the concave space K as shown in FIGS. 1 and 4, and is opposite to the bottom surface of the concave container 10, that is, the bottom surface of the concave space K. External connection terminals 13 are provided at the four corners on the side surface (see FIG. 4B). A write terminal W (see FIGS. 1 and 5) is provided between the adjacent external connection terminals 13 and 13 on the long side.

この凹形状容器10は、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料からなる。また、図4(a)に示すように、凹形状容器10の凹形状空間部Kの開口上縁部には、後述する集積回路素子40と導通を取るための凹形状容器側接続端子11が設けられている。
また、図1に示すように、凹形状容器10内には、凹形状容器内部配線12が設けられており、凹形状容器側接続端子11と外部接続用端子13に接続している。また、書込端子Wとも接続し、集積回路素子40に書き込みができるようになっている。
The concave container 10 is made of a ceramic material such as glass-ceramic or alumina ceramic. Further, as shown in FIG. 4A, a concave container side connection terminal 11 for conducting electrical connection with an integrated circuit element 40 described later is provided at the upper edge of the opening of the concave space K of the concave container 10. Is provided.
As shown in FIG. 1, a concave container internal wiring 12 is provided in the concave container 10 and is connected to the concave container side connection terminal 11 and the external connection terminal 13. Further, it is also connected to a write terminal W so that writing to the integrated circuit element 40 is possible.

蓋体30は、凹形状容器10と同様にセラミックから形成され、凹形状容器10の凹形状空間部Kを気密封止しつつ、圧電振動素子20と集積回路素子40とを電気的に接続し、また、集積回路素子40と凹形状容器10に設けられた外部接続端子13との導通を確保する役割を果たす。   The lid 30 is made of ceramic in the same manner as the concave container 10 and electrically connects the piezoelectric vibration element 20 and the integrated circuit element 40 while hermetically sealing the concave space K of the concave container 10. Also, it plays a role of ensuring electrical connection between the integrated circuit element 40 and the external connection terminal 13 provided in the concave container 10.

この蓋体30は、図1及び図3に示すように、その一方の主面に圧電振動素子20を搭載するための振動子搭載パッド33(図3(b)参照)が設けられ、他方の主面に集積回路素子40を搭載するための集積回路素子搭載パッド31(図3(a)参照)が設けられ、振動子搭載パッド33と同一面上であって、凹形状容器10に設けられる凹形状容器側接続端子11と対応した位置に蓋体側接続端子32が設けられ、内部に蓋体内部配線34が設けられている。   As shown in FIGS. 1 and 3, the lid 30 is provided with a vibrator mounting pad 33 (see FIG. 3B) for mounting the piezoelectric vibration element 20 on one main surface thereof, and the other side. An integrated circuit element mounting pad 31 (see FIG. 3A) for mounting the integrated circuit element 40 is provided on the main surface, and is provided on the concave container 10 on the same plane as the vibrator mounting pad 33. A lid side connection terminal 32 is provided at a position corresponding to the concave container side connection terminal 11, and a lid internal wiring 34 is provided therein.

なお、振動子搭載パッド33に圧電振動素子20を搭載する場合は、図1及び図5に示すように、導電性接着剤Dが用いられ、これにより、水晶振動素子20と振動子搭載パッド33とが電気的・機械的に接続された状態となる。   When the piezoelectric vibration element 20 is mounted on the vibrator mounting pad 33, as shown in FIGS. 1 and 5, the conductive adhesive D is used, whereby the crystal vibration element 20 and the vibrator mounting pad 33 are used. Are electrically and mechanically connected.

この蓋体内部配線34は、蓋体側接続端子32と集積回路素子搭載パッド31とに接続し、また、振動子搭載パッド33と集積回路素子搭載パッド31とに接続している。   The lid internal wiring 34 is connected to the lid side connection terminal 32 and the integrated circuit element mounting pad 31, and is connected to the vibrator mounting pad 33 and the integrated circuit element mounting pad 31.

蓋体30と凹形状容器10との接合には、図1に示すように、異方性導電性樹脂Sが用いられる。異方性導電性樹脂Sは、電気絶縁樹脂に導電フィラーが分散させたものが知られており、硬化前は粘性をもった状態で、加熱により硬化するようになっている。   For joining the lid 30 and the concave container 10, an anisotropic conductive resin S is used as shown in FIG. 1. The anisotropic conductive resin S is known in which a conductive filler is dispersed in an electrically insulating resin. The anisotropic conductive resin S is cured by heating in a viscous state before curing.

この異方性導電性樹脂Sは、凹形状空間部Kを気密封止する際の接合材として用いられ、また、凹形状容器10と蓋体30との電気的導通に用いられ、凹形状容器10の開口上縁部と蓋体30との間に設けられる。   The anisotropic conductive resin S is used as a bonding material when the concave space K is hermetically sealed, and is used for electrical conduction between the concave container 10 and the lid 30. 10 is provided between the upper edge of the opening 10 and the lid 30.

例えば、異方性導電性樹脂Sは、凹形状容器10の開口上縁部に全面わたりに塗布され、蓋体30の蓋体側接続端子32と凹形状容器10側の凹形状容器側接続端子11とを対面させた状態で、これらの間に異方性導電性樹脂Sが挟み込まれて加熱および加圧され硬化されることで蓋体30と凹形状容器10とが接合された状態となる。   For example, the anisotropic conductive resin S is applied over the entire upper edge of the opening of the concave container 10, and the lid side connection terminal 32 of the lid 30 and the concave container side connection terminal 11 on the concave container 10 side. With the anisotropic conductive resin S sandwiched between them and being heated, pressurized and cured, the lid 30 and the concave container 10 are joined.

これにより、異方性導電性樹脂Sは、隣接する蓋体側接続端子32,32又は隣接する凹形状容器側接続端子11,11の間では導電性をもたず、加圧方向の凹形状容器側接続端子11と蓋体側接続端子32とで挟み込まれた方向の部分のみに導電性を有する。このように、異方性導電性樹脂Sの性質を利用して前記の気密封止と電気的導通が同時に実現される。   Thereby, the anisotropic conductive resin S does not have conductivity between the adjacent lid-side connection terminals 32 and 32 or the adjacent concave container-side connection terminals 11 and 11, and the concave container in the pressurizing direction. Only the portion in the direction sandwiched between the side connection terminal 11 and the lid side connection terminal 32 has conductivity. As described above, the hermetic sealing and the electrical conduction are realized at the same time by utilizing the property of the anisotropic conductive resin S.

また、図1に示すように、集積回路素子40と蓋体30との間にアンダーフィルFで充填された構造となっている。これにより、集積回路素子40と蓋体30との間に異物が入り込むのを防ぐことができる。   Also, as shown in FIG. 1, the structure is filled with an underfill F between the integrated circuit element 40 and the lid 30. As a result, foreign matter can be prevented from entering between the integrated circuit element 40 and the lid 30.

このように、本発明の実施形態に係る圧電発振器100の特徴部分は、図1に示すように、集積回路素子40が、凹形状空間部Kを塞ぐように載置された蓋体30の凹形状空間部Kの反対側の表面上に搭載された構造で、かつ、この蓋体30に圧電振動素子20を搭載した構造であるので、集積回路素子40の大きさを凹形状容器10までの大きさとすることができる。したがって、本発明の実施形態に係る圧電発振器100の構造により、凹形状容器10の内部底面大きさで集積回路素子40は制限されることが無く、また、壁厚を薄く形成されることも無いので、凹形状容器10の壁の機械的強度を弱めることのない圧電発振器100を得ることができる。また、本発明の実施形態に係る圧電発振器100の蓋体30は平板状のセラミックから出来ている為に、蓋体30が薄く厚みが小さくとも、確実に蓋体内部配線34が蓋体30内部に形成され、かつ気密封止がなされる。さらに蓋体30を境に、蓋体30の凹形状空間部K側の主面に圧電振動素子20を搭載し、凹形状空間部Kとは反対側を向く主面に集積回路素子40を搭載した構成であるため、圧電振動素子20と集積回路素子40との感知する温度差を小さくすることができる。つまり、集積回路素子40の起動時発熱による影響を受けにくい圧電発振器を得ることができる。   As described above, the characteristic part of the piezoelectric oscillator 100 according to the embodiment of the present invention is that the integrated circuit element 40 is recessed in the lid 30 placed so as to close the recessed space K as shown in FIG. Since the structure is mounted on the surface on the opposite side of the shape space K and the piezoelectric vibration element 20 is mounted on the lid 30, the size of the integrated circuit element 40 is reduced to the size of the concave container 10. It can be a size. Therefore, according to the structure of the piezoelectric oscillator 100 according to the embodiment of the present invention, the integrated circuit element 40 is not limited by the size of the inner bottom surface of the concave container 10, and the wall thickness is not reduced. Therefore, the piezoelectric oscillator 100 that does not weaken the mechanical strength of the wall of the concave container 10 can be obtained. In addition, since the lid 30 of the piezoelectric oscillator 100 according to the embodiment of the present invention is made of a plate-like ceramic, the lid internal wiring 34 is reliably connected to the inside of the lid 30 even if the lid 30 is thin and thin. And hermetically sealed. Further, with the lid 30 as a boundary, the piezoelectric vibration element 20 is mounted on the main surface of the lid 30 on the concave space K side, and the integrated circuit element 40 is mounted on the main surface facing away from the concave space K. With this configuration, the temperature difference sensed between the piezoelectric vibration element 20 and the integrated circuit element 40 can be reduced. That is, it is possible to obtain a piezoelectric oscillator that is not easily affected by heat generated when the integrated circuit element 40 is activated.

なお、本発明は前記の実施形態に限定されるものでは無く、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。例えば、集積回路素子40と蓋体30との間にアンダーフィルFが塗布充填された構造とされているが、アンダーフィルFが塗布充填されず、集積回路素子40と蓋体30との隙間の周辺部分だけにわたってアンダーフィルFが塗布された構造としても構わない。
また、蓋体30と集積回路素子40との接合に異方性導電性樹脂を用いても良い。これにより、気密封止にもちいられる材料と同じになるので、蓋体30の反りを防ぐことができる。
The present invention is not limited to the above-described embodiment, and various changes and improvements can be made without departing from the gist of the present invention. For example, the underfill F is applied and filled between the integrated circuit element 40 and the lid 30, but the underfill F is not applied and filled, and the gap between the integrated circuit element 40 and the lid 30 is not filled. A structure in which the underfill F is applied only to the peripheral portion may be used.
An anisotropic conductive resin may be used for joining the lid 30 and the integrated circuit element 40. Thereby, since it becomes the same as the material used for airtight sealing, the curvature of the cover body 30 can be prevented.

本発明の実施形態に係る圧電発振器の一例を示す断面図である。It is sectional drawing which shows an example of the piezoelectric oscillator which concerns on embodiment of this invention. 集積回路素子の集積回路素子側電極パッドに金属バンプを設けた状態を示す図である。It is a figure which shows the state which provided the metal bump in the integrated circuit element side electrode pad of the integrated circuit element. (a)は集積回路素子搭載パッドが設けられた蓋体の一方の主面の一例を示す図であり、(b)は振動子搭載パッドが設けられた蓋体の他方の主面の一例を示す図である。(A) is a figure which shows an example of one main surface of the cover body in which the integrated circuit element mounting pad was provided, (b) is an example of the other main surface of the cover body in which the vibrator mounting pad was provided. FIG. (a)は凹形状容器側接続端子が設けられた側の凹形状容器の一例を示す図であり、(b)は外部接続用端子が設けられた凹形状容器の主面の一例を示す図である。(A) is a figure which shows an example of the concave container of the side in which the concave container side connection terminal was provided, (b) is a figure which shows an example of the main surface of the concave container in which the terminal for external connection was provided. It is. 蓋体に圧電振動素子を搭載した一例を示す図である。It is a figure which shows an example which mounted the piezoelectric vibration element in the cover body. 従来の圧電発振器の一例を示す断面図である。It is sectional drawing which shows an example of the conventional piezoelectric oscillator.

符号の説明Explanation of symbols

100 圧電発振器
10 凹形状容器
11 凹形状容器側接続端子
12 凹形状容器内部配線
13 外部接続用端子
20 圧電振動素子
21 圧電板
22 励振用電極
30 蓋体
31 集積回路素子搭載パッド
32 蓋体側接続端子
33 振動子搭載パッド
34 蓋体内部配線
40 集積回路素子
41 集積回路素子側電極パッド
F アンダーフィル
K 凹形状空間部
S 異方性導電性樹脂
T 金属バンプ
W 書込端子
DESCRIPTION OF SYMBOLS 100 Piezoelectric oscillator 10 Concave container 11 Concave container side connection terminal 12 Concave container internal wiring 13 External connection terminal 20 Piezoelectric vibration element 21 Piezoelectric plate 22 Excitation electrode 30 Cover body 31 Integrated circuit element mounting pad 32 Cover body side connection terminal 33 Vibrator Mounting Pad 34 Lid Internal Wiring 40 Integrated Circuit Element 41 Integrated Circuit Element Side Electrode Pad F Underfill K Concave Space S Anisotropic Conductive Resin T Metal Bump W Writing Terminal

Claims (3)

凹形状空間部が形成された凹形状容器と、
該凹形状空間部の底面とは反対側の面であって該凹形状容器の四つの隅部に形成された外部接続用端子と、
セラミックからなり該凹形状空間部を気密封止する蓋体と、
前記凹形状空間部内であって前記蓋体に搭載される圧電振動素子と、
前記蓋体を介して該圧電振動素子と電気的に接続されかつ前記蓋体と前記凹形状容器とを介して外部接続用端子と接続され前記蓋体の前記凹形状空間部とは反対側を向く主面に搭載される集積回路素子と、
を備えることを特徴とする圧電発振器。
A concave container in which a concave space is formed;
An external connection terminal formed on the four corners of the concave container on the opposite side of the bottom surface of the concave space portion;
A lid made of ceramic and hermetically sealing the concave space;
A piezoelectric vibration element mounted in the lid body in the concave space portion;
It is electrically connected to the piezoelectric vibration element through the lid and is connected to an external connection terminal through the lid and the concave container, and is opposite to the concave space portion of the lid. An integrated circuit element mounted on the main surface facing;
A piezoelectric oscillator comprising:
前記凹形状容器と前記蓋体とを接合する異方性導電性樹脂層を備えて構成されることを特徴とする請求項1に記載の圧電発振器。   The piezoelectric oscillator according to claim 1, comprising an anisotropic conductive resin layer that joins the concave container and the lid. 該蓋体と該集積回路素子との間にアンダーフィルを設けたことを特徴とする請求項1又は請求項2に記載の圧電発振器。   The piezoelectric oscillator according to claim 1, wherein an underfill is provided between the lid and the integrated circuit element.
JP2007094944A 2007-03-30 2007-03-30 Piezoelectric oscillator Pending JP2008252823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007094944A JP2008252823A (en) 2007-03-30 2007-03-30 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007094944A JP2008252823A (en) 2007-03-30 2007-03-30 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JP2008252823A true JP2008252823A (en) 2008-10-16

Family

ID=39977191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007094944A Pending JP2008252823A (en) 2007-03-30 2007-03-30 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JP2008252823A (en)

Similar Documents

Publication Publication Date Title
US8941445B2 (en) Piezoelectric module
JP2008219206A (en) Piezoelectric oscillator
JP2008263564A (en) Temperature-compensated piezoelectric oscillator
JP2007324933A (en) Piezoelectric oscillator and its manufacturing method
JP2007235289A (en) Piezoelectric oscillator
JP2008252823A (en) Piezoelectric oscillator
JP2007103994A (en) Piezoelectric oscillator
JP2008193154A (en) Method for manufacturing piezoelectric oscillator
JP2007124513A (en) Temperature compensated piezoelectric oscillator
JP2004228894A (en) Piezoelectric oscillator and its manufacturing method
JP5451266B2 (en) Electronic devices
JP2007158464A (en) Piezoelectric oscillator
JP2008035175A (en) Piezoelectric oscillator
JP5337635B2 (en) Electronic devices
JP2007214739A (en) Piezoelectric oscillator and electronic apparatus
JP2007013721A (en) Piezoelectric oscillator
JP2007266829A (en) Piezoelectric device
JP2007067135A (en) Substrate having land pattern shape and piezo-electric component mounted thereon
JP4986529B2 (en) Crystal oscillator
JP2007180994A (en) Piezoelectric oscillator
JP2008187629A (en) Temperature compensated piezoelectric oscillator
JP2008035176A (en) Piezoelectric oscillator
JP2003347442A (en) Electronic device
JP2008219123A (en) Temperature compensation piezoelectric oscillator
JP2007036808A (en) Piezoelectric oscillator