JP2008249297A - Carriable heating device and method - Google Patents

Carriable heating device and method Download PDF

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JP2008249297A
JP2008249297A JP2007093533A JP2007093533A JP2008249297A JP 2008249297 A JP2008249297 A JP 2008249297A JP 2007093533 A JP2007093533 A JP 2007093533A JP 2007093533 A JP2007093533 A JP 2007093533A JP 2008249297 A JP2008249297 A JP 2008249297A
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heating
transport
carrier
heated
conveying
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Hidekazu Mori
英一 森
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NEC Corp
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NEC Corp
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<P>PROBLEM TO BE SOLVED: To provide a carriable heating device and a method capable of highly accurately and uniformly heating a heating object, in a small and simple carriable heating system capable of carrying and heating the heating object. <P>SOLUTION: A first conveyor 3 continuously carries a carrying carrier 2 mounted with a plurality of heating objects 1 at a constant speed. A second conveyor 6 is arranged on the downstream side of the first conveyor 3, and intermittently carries the carrying carrier 2 with every specific distance. A transfer device 9 transfers the carrying carrier 2 to a supply position 7 of the second conveyor 6 from great number days 5 of the first conveyor 3. In a first heating system 10, heating units 11 and 14 heat the heating object 1, and in a second heating system 17, heating units 18, 21 and 14 heat the heating object 1. In this case, the heating object 1 is heated in the heating units 18, 21 and 24 of the second heating system 17 in a state of being shut up by shutters 29, 32, 35 and 38. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、回路基板及びリードフレーム等の電気部品を、搬送しながら加熱処理を行う搬送式加熱装置に関する。   The present invention relates to a conveyance type heating apparatus that performs heat treatment while conveying electric components such as a circuit board and a lead frame.

従来の搬送式加熱炉の搬送システムとしては、連続送り搬送システムと間欠送り搬送システムに大別される。特許文献1には、前者の連続送り搬送システムを適用した従来の搬送式加熱炉(チッソリフロー装置)が開示されている。図3に示すように、この従来の加熱装置は、コンベア100の上方に加熱室101が配置されており、この加熱室101は、その入り口104側から出口105に向けて、仕切壁106により予熱ゾーンT1、均熱ゾーンT2、リフローゾーンT3に仕切られている。また、出口105側の端部には、冷却ゾーンT4を構成する冷却室110が配置されている。各ゾーン内には、ファン108が設置され、予熱ゾーンT1、均熱ゾーンT2及びリフローゾーンT3には、ヒータ109が設置されている。窒素ガス供給源107から窒素ガスが各ゾーンT1〜T3に供給されるようになっている。そして、電子部品103が搭載された基板102をコンベア100上に載置して入り口104から出口105まで連続的に搬送する間に、被加熱対象物が複数個の加熱ゾーンを一定速度で通過することになり、被加熱対象物に所定の温度プロファイルが与えられる。   Conventional transfer heating furnace transfer systems are roughly classified into a continuous feed transfer system and an intermittent feed transfer system. Patent Document 1 discloses a conventional transfer heating furnace (chisso reflow device) to which the former continuous feed transfer system is applied. As shown in FIG. 3, in this conventional heating apparatus, a heating chamber 101 is disposed above the conveyor 100, and this heating chamber 101 is preheated by a partition wall 106 from the entrance 104 side toward the exit 105. It is divided into zone T1, soaking zone T2, and reflow zone T3. Moreover, the cooling chamber 110 which comprises the cooling zone T4 is arrange | positioned at the edge part by the side of the exit 105. FIG. A fan 108 is installed in each zone, and a heater 109 is installed in the preheating zone T1, the soaking zone T2, and the reflow zone T3. Nitrogen gas is supplied from the nitrogen gas supply source 107 to the zones T1 to T3. And while the board | substrate 102 with which the electronic component 103 was mounted is mounted on the conveyor 100 and it conveys continuously from the entrance 104 to the exit 105, a to-be-heated target passes a several heating zone at a constant speed. That is, a predetermined temperature profile is given to the object to be heated.

一方、後者の間欠送り搬送システムを適用した従来の搬送式加熱炉は、被加熱対象物を各々が温度制御された複数個の加熱ゾーン群を間欠送り動作と各ゾーンでの静止を繰り返して通過させることにより、所定の温度プロファイルを与えていた。   On the other hand, the conventional transfer furnace using the latter intermittent feed transfer system repeatedly passes the object to be heated through a plurality of heating zone groups, each of which is temperature-controlled, by intermittent feed operation and stationary in each zone. To give a predetermined temperature profile.

その他、特許文献2には、コンベア上を被加熱対象物が搬送され、コンベアを囲むように設けられた前室と、加熱室と、後室とが被加熱対象物の搬送方向に配置され、各室の間がシャッタにより仕切ることができる半田付け用加熱炉が開示されている。但し、この従来技術においては、ヒータが設けられた加熱炉は、仕切られておらず、特許文献1と同様である。   In addition, in Patent Document 2, an object to be heated is conveyed on a conveyor, a front chamber provided so as to surround the conveyor, a heating chamber, and a rear chamber are arranged in the conveyance direction of the object to be heated, There is disclosed a soldering heating furnace in which the chambers can be partitioned by a shutter. However, in this prior art, the heating furnace provided with the heater is not partitioned and is the same as in Patent Document 1.

また、特許文献3には、複数の加熱源が間仕切り壁により仕切られて区画毎に独立し、区画毎に温度制御可能である基板熱処理装置が開示されている。この特許文献3に記載された基板熱処理装置は、間欠送り搬送システムを備えたものである。   Patent Document 3 discloses a substrate heat treatment apparatus in which a plurality of heat sources are partitioned by a partition wall and independent for each section, and the temperature can be controlled for each section. The substrate heat treatment apparatus described in Patent Document 3 includes an intermittent feed conveyance system.

特開平06−007924号公報(図3)Japanese Patent Laid-Open No. 06-007924 (FIG. 3) 特開平5−13949号公報(図4)JP-A-5-13949 (FIG. 4) 特開2004−333074号公報JP 2004-333074 A

しかしながら、従来の連続送り搬送システムにおいては、各加熱ゾーン間が連絡貫通しているため、各ゾーンの雰囲気温度が互いに干渉することにより、被加熱対象物の面上範囲で加熱温度のばらつきが大きくなり、温度制御を高精度で、且つ均一性良く行うことができないという問題点がある。   However, in the conventional continuous feeding and conveying system, since the heating zones communicate with each other, the atmospheric temperature of each zone interferes with each other, so that the variation in the heating temperature is large in the surface range of the object to be heated. Therefore, there is a problem that temperature control cannot be performed with high accuracy and good uniformity.

また、間欠送り搬送システムでは、被加熱対象物が間欠送りを終了した直後から加熱手段により急速に加熱されるため、緩やかな温度上昇がプロセス上で必要にもかかわらず、急激に温度が上昇し、品質不良を発生させていた。例えば、接着用樹脂を硬化させるプロセスでは、接着用樹脂に含まれている溶剤が急速に活性化し、ボイド及び樹脂飛散を発生させていた。   In addition, in the intermittent feed conveyance system, the object to be heated is rapidly heated by the heating means immediately after the intermittent feed is completed, so that the temperature rises suddenly even though a moderate temperature rise is necessary in the process. Was causing poor quality. For example, in the process of curing the adhesive resin, the solvent contained in the adhesive resin is rapidly activated, generating voids and resin scattering.

本発明はかかる問題点に鑑みてなされたものであって、被加熱対象物を搬送して加熱できる小型でシンプルな搬送式加熱システムであって、被加熱対象物を高精度で且つ均一に加熱することができる搬送式加熱炉を提供することを目的とする。   The present invention has been made in view of such problems, and is a small and simple transport heating system capable of transporting and heating an object to be heated, and heating the object to be heated with high accuracy and uniformity. It is an object of the present invention to provide a conveying furnace that can be used.

本発明に係る搬送式加熱装置は、被加熱対象物を複数個搭載した搬送用キャリアを一定速度で連続搬送する第1次搬送手段と、前記第1次搬送手段の下流側に配置され前記搬送用キャリアを一定距離毎に間欠搬送する第2次搬送手段と、前記第1次搬送手段と前記第2次搬送手段との間に配置され前記搬送用キャリアを前記第1次搬送手段の終端位置から前記第2次搬送手段の始端位置まで移送する移送手段と、前記第1次搬送手段の上方に設けられて下方を通過する前記被加熱対象物を加熱する第1次加熱手段と、前記第2次搬送手段の上方に設けられて下方に位置する前記被加熱対象物を加熱する第2次加熱手段と、前記第2次搬送手段の搬送域を前記搬送用キャリアの搬送方向の長さよりも大きな間隔で複数個の帯域に分割して仕切る開閉可能の複数個のシャッタと、を有することを特徴とする。   The transport heating apparatus according to the present invention includes a primary transport means for continuously transporting a transport carrier carrying a plurality of objects to be heated at a constant speed, and a transport mechanism disposed downstream of the primary transport means. A secondary transport means for intermittently transporting the carrier for every fixed distance, and an end position of the primary transport means arranged between the primary transport means and the secondary transport means A transfer means for transferring from the first transfer means to a starting end position of the secondary transfer means, a primary heating means for heating the object to be heated that is provided above the primary transfer means and passes below, A secondary heating unit that is provided above the secondary transport unit and that heats the object to be heated; and a transport area of the secondary transport unit is longer than a length in the transport direction of the transport carrier. Divide and divide into multiple bands at large intervals Characterized by having a a plurality of shutter can close.

前記第1次加熱手段は、例えば、前記搬送用キャリアの搬送方向に配置され独立して温度制御可能な複数個の加熱ユニットを有し、前記各加熱ユニットは、加熱器及び送風機を備えている。   The primary heating means has, for example, a plurality of heating units that are arranged in the transport direction of the transport carrier and can be independently controlled in temperature, and each of the heating units includes a heater and a blower. .

また、前記第2次加熱手段は、例えば、前記シャッタにより仕切られた複数個の室内に夫々加熱ユニットが配置されており、各加熱ユニットは独立して温度制御可能な加熱器及び送風機を有する。   The secondary heating means includes, for example, a heating unit disposed in each of a plurality of rooms partitioned by the shutter, and each heating unit includes a heater and a blower capable of independently controlling the temperature.

更に、本発明は、前記第2次搬送手段の搬送域を前記搬送用キャリアの前記搬送用キャリアの搬送方向の長さよりも大きな間隔で複数個の帯域に分割する固定壁を有し、前記固定壁は、前記搬送用キャリア及び前記被加熱対象物の通過は許容するように前記第2次搬送手段から離隔して配置され、前記シャッタは前記固定壁と前記第2次搬送手段との間の間隙を開閉するものであることが好ましい。   Furthermore, the present invention has a fixed wall that divides the transport area of the secondary transport means into a plurality of bands at intervals larger than the transport direction length of the transport carrier. The wall is spaced apart from the secondary transport means so as to allow the transport carrier and the object to be heated to pass, and the shutter is disposed between the fixed wall and the secondary transport means. It is preferable to open and close the gap.

本発明に係る搬送式加熱方法は、被加熱対象物を複数個搭載した搬送用キャリアを第1次搬送手段により一定速度で連続搬送しつつ第1次加熱手段により加熱する第1次搬送工程と、次いで、前記第1次搬送手段の下流側に配置された第2次搬送手段により前記搬送用キャリアを一定距離毎に間欠搬送して、前記第2次搬送手段の搬送方向に複数個の帯域になるように仕切られた室内に前記搬送用キャリアを順次搬入すると共に、各室内で前記被加熱対象物を第2次加熱手段により加熱する第2次搬送工程と、を有し、前記各室の仕切壁に設けられたシャッタを開にして前記搬送用キャリアを通過させ、前記シャッタを閉にして前記搬送用キャリアを各室内に閉じこめることを特徴とする。   The transport heating method according to the present invention includes a primary transport step in which a transport carrier carrying a plurality of objects to be heated is heated by a primary heating means while being continuously transported at a constant speed by a primary transport means. Next, the transport carrier is intermittently transported at regular intervals by a secondary transport unit disposed downstream of the primary transport unit, and a plurality of bands are formed in the transport direction of the secondary transport unit. A second transport step of sequentially transporting the carrier for transport into the compartments partitioned so as to become, and heating the object to be heated by a secondary heating means in each of the chambers. A shutter provided on the partition wall is opened to pass the carrier for transportation, and the shutter is closed to confine the carrier for transportation in each chamber.

本発明においては、第1次搬送手段の開始位置に供給された搬送用キャリアは、前記第1次搬送手段の作動により連続搬送される。この間、搬送用キャリアに搭載された加熱対象物は、搬送用キャリアの送り進度に対応して第1次加熱手段の加熱ユニットにより所定の温度プロファイルで加熱される。   In the present invention, the carrier for conveyance supplied to the starting position of the primary conveying means is continuously conveyed by the operation of the primary conveying means. During this time, the object to be heated mounted on the carrier for conveyance is heated with a predetermined temperature profile by the heating unit of the primary heating means corresponding to the advancement degree of the carrier for conveyance.

次いで、搬送用キャリアが第1次搬送手段の終端位置に到着すると、間仕切り用シャッタが開状態に作動し、移送手段の作用により、第2次搬送手段の始端位置に移送され、間仕切り用シャッタが閉状態に作動する。その後、所定の加熱時間が経過すると、間仕切り用シャッタが開状態に作動し、第2次搬送手段の間欠送りが作動し、搬送用キャリアは1ピッチ距離分送られる。その後、間仕切り用シャッタが閉状態に作動する。この間、搬送用キャリアに搭載された加熱対象物は、間仕切り用シャッタ間による閉じられた雰囲気内で、第2次加熱手段の加熱ユニット群で所定の温度プロファイルで加熱される。   Next, when the transport carrier arrives at the end position of the primary transport means, the partition shutter operates in the open state, and is transferred to the start end position of the secondary transport means by the action of the transport means. Operates in the closed state. Thereafter, when a predetermined heating time elapses, the partition shutter operates in an open state, the intermittent transport of the secondary transport unit operates, and the transport carrier is transported by one pitch distance. Thereafter, the partition shutter operates in a closed state. During this time, the object to be heated mounted on the carrier for conveyance is heated with a predetermined temperature profile by the heating unit group of the secondary heating means in an atmosphere closed by the partition shutters.

このようにして、本発明の搬送式加熱装置は、初期の第1次搬送手段の搬送域では緩やかに加熱が行われ、次いで、第2次搬送手段の搬送域では均一に且つ精度良く加熱することができる。従って、ボイド及び樹脂飛散の発生による品質不良を発生させず、精度良く所定の温度プロファイルで加熱することができる。   In this way, the transport type heating apparatus of the present invention heats gently in the transport area of the initial primary transport means, and then heats uniformly and accurately in the transport area of the secondary transport means. be able to. Therefore, it is possible to heat accurately with a predetermined temperature profile without causing quality defects due to the occurrence of voids and resin scattering.

本発明によれば、連続送り搬送の搬送域においては、搬送用キャリアの進行にともない温度上昇が行われることにより、緩やかな温度勾配が得られ、間欠送り搬送の搬送域においては、仕切られた複数個の各加熱帯域が間仕切り用シャッタで閉鎖されることにより、各加熱帯域の恒温特性が向上し、高精度の温度制御できると共に、被加熱対象物の加熱温度を均温化することができる。   According to the present invention, in the conveyance area of continuous feed conveyance, a gradual temperature gradient is obtained by increasing the temperature as the conveyance carrier advances, and in the conveyance area of intermittent feed conveyance, it is partitioned. By closing each of the plurality of heating zones with a partition shutter, the constant temperature characteristics of each heating zone can be improved, temperature control with high accuracy can be performed, and the heating temperature of the object to be heated can be equalized. .

次に、本発明の実施形態に係る搬送式加熱装置について、添付の図面を参照して具体的に説明する。図1は本発明の実施形態に係る搬送式加熱装置を示す断面図、図2は被加熱対象物の加熱パターンを示す図である。本実施形態においては、搬送用キャリア2に、回路基板及びリードフレーム等の電気部品からなる被加熱対象物1が複数個搭載されており、この搬送用キャリア2は、搬送用キャリア2を一定速度で連続搬送する第1次搬送手段としての第1コンベア3の供給位置4に供給される。第1コンベア3の搬送方向下流側には、搬送用キャリア2を一定距離毎に間欠搬送する第2次搬送手段としての第2コンベア6が配置されている。そして、この第1コンベア3と第2コンベア6との間には、移送手段としての移送装置9が配置されており、移送装置9は、第1コンベア3の終端位置5に到達した搬送用キャリア2を、第1コンベア3から第2コンベア6の始端位置7に移し替える。第2コンベア6はこの始端位置7に移し替えられた搬送用キャリア2を間欠的に一定距離だけ搬送し、取り出し位置8まで間欠的に移動させる。   Next, a conveyance type heating apparatus according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. FIG. 1 is a cross-sectional view showing a conveyance type heating apparatus according to an embodiment of the present invention, and FIG. 2 is a view showing a heating pattern of an object to be heated. In this embodiment, a plurality of objects to be heated 1 made of electrical components such as a circuit board and a lead frame are mounted on the carrier 2 for transportation, and the carrier 2 for transportation is transported at a constant speed. Is supplied to the supply position 4 of the first conveyor 3 as the primary conveying means for continuous conveyance. On the downstream side of the first conveyor 3 in the conveyance direction, a second conveyor 6 is arranged as a secondary conveyance means for intermittently conveying the carrier 2 for conveyance at regular intervals. A transfer device 9 as transfer means is disposed between the first conveyor 3 and the second conveyor 6, and the transfer device 9 reaches the end position 5 of the first conveyor 3. 2 is transferred from the first conveyor 3 to the starting end position 7 of the second conveyor 6. The second conveyor 6 intermittently conveys the carrier for transfer 2 transferred to the starting end position 7 by a fixed distance, and intermittently moves it to the take-out position 8.

第1コンベア3の上方には、第1コンベア3上の被加熱対象物1を加熱する第1次加熱手段としての第1加熱装置10が配置されている。この第1加熱装置10においては、第1コンベア3の搬送方向に第1前段加熱ユニット11と第1後段加熱ユニット14とがこの順に配置されており、第1コンベア3上の被加熱対象物1は、第1前段加熱ユニット11と第1後段加熱ユニット14とにより順次加熱される。各ユニット11,14には、夫々、加熱器12及び送風器13と、加熱器15及び送風器16とが配置されており、各ユニット11,14は、第1コンベア3上の被加熱対象物1を相互に独立して加熱制御できるようになっている。また、各送風機13,16は、加熱器12,15により加熱された雰囲気を送風・循環させるものである。   Above the first conveyor 3, a first heating device 10 is arranged as a primary heating means for heating the object 1 to be heated on the first conveyor 3. In the first heating device 10, the first front heating unit 11 and the first rear heating unit 14 are arranged in this order in the transport direction of the first conveyor 3, and the object 1 to be heated on the first conveyor 3 is arranged. Are heated sequentially by the first pre-stage heating unit 11 and the first post-stage heating unit 14. Each unit 11, 14 is provided with a heater 12 and a blower 13, a heater 15 and a blower 16, and each unit 11, 14 is an object to be heated on the first conveyor 3. 1 can be heated and controlled independently of each other. Further, each of the blowers 13 and 16 blows and circulates the atmosphere heated by the heaters 12 and 15.

第2コンベア6の上方には、第2コンベア6上の被加熱対象物1を加熱する第2次加熱手段としての第2加熱装置17が配置されている、この第2加熱装置17においては、第2前段加熱ユニット18,第2中段加熱ユニット21及び第3後段加熱ユニット24が、搬送方向にこの順に配置されており、各加熱ユニット18,21,24内には、夫々、加熱器19及び送風機20と、加熱器22と送風機23と、加熱器25及び送風機26とが配置されている。これらの送風機20,23,26も、加熱器19,22、25により加熱された雰囲気を送風・循環させるものである。   Above the second conveyor 6, a second heating device 17 is arranged as a secondary heating means for heating the object 1 to be heated on the second conveyor 6. In this second heating device 17, The second front heating unit 18, the second middle heating unit 21, and the third rear heating unit 24 are arranged in this order in the transport direction. In each heating unit 18, 21, 24, a heater 19 and The air blower 20, the heater 22, the air blower 23, the heater 25, and the air blower 26 are arrange | positioned. These blowers 20, 23, and 26 also blow and circulate the atmosphere heated by the heaters 19, 22, and 25.

前端加熱ユニット18の前端部及び後段加熱ユニット24の後端部と各加熱ユニットの相互間には、固定壁30a、33a、36a、39aが配置されており、各ユニットを加熱室として仕切る壁となっている。これらの固定壁30a、33a、36a、39aと、第2コンベア6との間は、被加熱対象物1を搭載した搬送用キャリア2を通過させるために、空間(第1空間30,第2空間33,第3空間36及び第4空間39)となっている。そして、この空間(第1空間30,第2空間33,第3空間36及び第4空間39)は、夫々第1シャッタ29,第2シャッタ32,第3シャッタ35及び第4シャッタ38により開閉可能になっている。これらのシャッタ29,32,35及び38が開のときに、搬送用キャリア2の通過移動が可能となり、シャッタ29,32,35及び38が閉のときに、各加熱ユニット18,21,24は固定壁30a等とシャッタ29等により閉じられた空間となり、搬送用キャリア2上の被加熱対象物1はこの閉じられた空間内で加熱される。なお、第2コンベア6へ搬送用キャリア2を供給するときの供給位置7は最も上流側に配置された第2前段加熱ニット18の中央である。   Fixed walls 30a, 33a, 36a, 39a are arranged between the front end portion of the front end heating unit 18 and the rear end portion of the rear stage heating unit 24 and the respective heating units, and walls that partition each unit as a heating chamber; It has become. Between these fixed walls 30a, 33a, 36a, 39a and the second conveyor 6, a space (the first space 30, the second space) is used in order to pass the carrier 2 for carrying the object 1 to be heated. 33, a third space 36 and a fourth space 39). This space (the first space 30, the second space 33, the third space 36, and the fourth space 39) can be opened and closed by the first shutter 29, the second shutter 32, the third shutter 35, and the fourth shutter 38, respectively. It has become. When these shutters 29, 32, 35 and 38 are open, the transport carrier 2 can be moved through. When the shutters 29, 32, 35 and 38 are closed, the heating units 18, 21, 24 are The space is closed by the fixed wall 30a and the shutter 29 and the like, and the object 1 to be heated on the carrier 2 for transportation is heated in the closed space. In addition, the supply position 7 when supplying the carrier 2 for conveyance to the 2nd conveyor 6 is the center of the 2nd front | former stage heating knit 18 arrange | positioned most upstream.

これらの各加熱ユニット18,21,24は、その固定壁30a、33a、36a、39aの相互間の間隔及びシャッタ29,32,35,38の相互間の間隔が、搬送用キャリア2の搬送方向の長さよりも大きい。このため、シャッタ29,32,35,38が閉じたときには、搬送用キャリア2は各ユニット18,21,24の室内に閉じこめられる。そして、第2コンベア6は、この各ユニット18,21,24の配置ピッチだけ、1回の間欠動作で移動する。従って、第2のコンベア6が1回間欠動作すると、第2のコンベア6上の搬送用キャリア2が隣のユニットに移動する。   Each of these heating units 18, 21, and 24 has a spacing between the fixed walls 30 a, 33 a, 36 a, and 39 a and a spacing between the shutters 29, 32, 35, and 38, so that the transport direction of the transport carrier 2 is Greater than the length of. For this reason, when the shutters 29, 32, 35, 38 are closed, the transport carrier 2 is confined in the chambers of the units 18, 21, 24. The second conveyor 6 moves in a single intermittent operation by the arrangement pitch of the units 18, 21 and 24. Accordingly, when the second conveyor 6 is intermittently operated once, the carrier 2 for conveyance on the second conveyor 6 moves to the adjacent unit.

なお、前述の各加熱ユニットは、図示しない温度制御ユニットに夫々接続され、各加熱ユニット単位で所定の温度状態に温度制御することが可能になっている。   Each heating unit described above is connected to a temperature control unit (not shown), and the temperature can be controlled to a predetermined temperature state for each heating unit.

また、間仕切り用シャッタ群27は、第1シャッタユニット28と、第2シャッタユニット31と、第3シャッタユニット34と、第4シャッタユニット37とから構成されている。第1シャッタユニット28は、搬送用キャリア2が被加熱対象物1を搭載した形態で通過可能な第1空間30を開閉する第1シャッタ29を備えており、他のシャッタユニット31,34も同様の構成となっており、前述の如く、各シャッタ29,32,35,38の設置間隔は、適用する搬送用キャリア2の送り方向寸法より大きな距離で等間隔に配置されている。また、前述の如く、第2コンベア6での搬送用キャリア2の間欠送り距離は、各シャッタの設置間隔寸法と同一寸法である。   The partition shutter group 27 includes a first shutter unit 28, a second shutter unit 31, a third shutter unit 34, and a fourth shutter unit 37. The first shutter unit 28 includes a first shutter 29 that opens and closes a first space 30 through which the carrier 2 for transportation can be mounted in a form in which the object 1 to be heated is mounted, and the other shutter units 31 and 34 are also the same. As described above, the installation intervals of the shutters 29, 32, 35, and 38 are arranged at equal intervals with a distance larger than the feed direction dimension of the carrier 2 to be applied. Further, as described above, the intermittent feed distance of the carrier 2 for conveyance on the second conveyor 6 is the same as the installation interval dimension of each shutter.

次に、図1及び図2を参照して本実施形態の動作について説明する。先ず、第1次加熱手段としての第1加熱装置10及び第2次加熱手段としての第2加熱装置17を作動させ、炉の内部の雰囲気温度を所定の温度状態に昇温する。次に、前工程から図示しない搬送手段により、被加熱対象物1を複数個搭載した搬送用キャリア2を第1コンベア3の供給位置4に供給し、この被加熱対象物1を複数個搭載した搬送用キャリア2は、第1コンベア3の作動により図1に示す矢印方向へ連続的に搬送される。この間、搬送用キャリア2に搭載された加熱対象物1は、搬送用キャリア2の送り進度に対応して第1加熱装置17の加熱作用により所定の温度プロファイルで加熱される。   Next, the operation of this embodiment will be described with reference to FIGS. First, the 1st heating apparatus 10 as a primary heating means and the 2nd heating apparatus 17 as a secondary heating means are operated, and the atmospheric temperature inside a furnace is raised to a predetermined temperature state. Next, the carrier 2 for carrying a plurality of objects to be heated 1 is supplied to the supply position 4 of the first conveyor 3 by a conveying means (not shown) from the previous step, and a plurality of objects to be heated 1 are loaded. The carrier 2 for conveyance is continuously conveyed in the arrow direction shown in FIG. 1 by the operation of the first conveyor 3. During this time, the heating object 1 mounted on the carrier 2 for transportation is heated with a predetermined temperature profile by the heating action of the first heating device 17 corresponding to the advancement degree of the carrier 2 for transportation.

次いで、搬送用キャリア2が第1加熱装置10の終端位置5に到着すると、間仕切り用シャッタ群27(シャッタ29,32,35,38)が開状態に作動し、移送装置9の作動により、第2コンベア6の始端位置7に移送され、間仕切り用シャッタ群27が閉状態に作動する。その後、所定の加熱時間が経過すると、間仕切り用シャッタ群27が開状態に作動し、第2コンベア6の間欠送りが作動し、搬送用キャリア2は1ピッチ距離分送られ、間仕切り用シャッタ群27が閉状態に作動する。以後、搬送用キャリア2が第2コンベア6の取り出し位置8に到達するまで、同様な作動を繰り返し行う。   Next, when the transport carrier 2 arrives at the end position 5 of the first heating device 10, the partition shutter group 27 (shutters 29, 32, 35, and 38) is activated, and the transfer device 9 is activated to 2 is transferred to the start position 7 of the conveyor 6, and the partition shutter group 27 is operated in the closed state. Thereafter, when a predetermined heating time elapses, the partition shutter group 27 is operated in an open state, the intermittent feed of the second conveyor 6 is operated, the transport carrier 2 is fed by one pitch distance, and the partition shutter group 27 is operated. Operates in the closed state. Thereafter, the same operation is repeated until the transport carrier 2 reaches the take-out position 8 of the second conveyor 6.

この間、搬送用キャリア2に搭載された加熱対象物1は、間仕切り用シャッタ群27の各シャッタ間の閉じられた雰囲気内において、第2加熱装置17で所定の温度プロファイルで加熱される。このように、搬送用キャリア2に複数個搭載された被加熱対象物1は、供給位置4から取出位置8へ順次搬送される間において、所要の温度条件に予め設定されている第1加熱装置10及び第2次加熱装置17から発生する熱により所定の温度条件・プロファイルで加熱される。   During this time, the heating object 1 mounted on the carrier 2 is heated with a predetermined temperature profile by the second heating device 17 in a closed atmosphere between the shutters of the partition shutter group 27. In this way, the first heating device that is set in advance to the required temperature conditions while the plurality of objects to be heated 1 mounted on the carrier 2 for conveyance are sequentially conveyed from the supply position 4 to the extraction position 8. 10 and the secondary heating device 17 are heated by a predetermined temperature condition / profile by heat generated from the secondary heating device 17.

これにより、例えば、図2に示すように、搬送キャリア2上の被加熱対象物1は、第1加熱装置10の範囲では、ボイド及び樹脂飛散を発生させない緩やかな温度勾配(昇温温度勾配)で加熱され、第2加熱装置17の範囲では、温度が高精度で制御され、温度均一性が優れた加熱特性が得られる。   Thereby, for example, as shown in FIG. 2, the object 1 to be heated on the transport carrier 2 has a gentle temperature gradient (temperature increase temperature gradient) that does not cause voids and resin scattering in the range of the first heating device 10. In the range of the second heating device 17, the temperature is controlled with high accuracy, and a heating characteristic with excellent temperature uniformity is obtained.

本発明によれば、回路基板、リードフレームなどの電気部品の加熱工程に、好適に適用することができる。   The present invention can be suitably applied to the heating process of electrical components such as circuit boards and lead frames.

本発明の実施形態に係る搬送式加熱装置を示す図である。It is a figure which shows the conveyance heating apparatus which concerns on embodiment of this invention. 本実施形態の温度プロファイルを示す図である。It is a figure which shows the temperature profile of this embodiment. 従来の搬送式加熱装置を示す図である。It is a figure which shows the conventional conveyance type heating apparatus.

符号の説明Explanation of symbols

1 被加熱対象物
2 搬送用キャリア
3 第1コンベア
4 供給位置
5 終端位置
6 第2コンベア
7 供給位置
8 取出位置
9 移送装置
10 第1加熱装置
11 第1前段加熱ユニット
12、15,19、22、25 加熱器
13、16,20、23、26 送風器
14 第1後段加熱ユニット
17 第2加熱装置
18 第2前段加熱ユニット
21 第2中段加熱ユニット
24 第2後段加熱ユニット
27 間仕切りシャッタ群
28、31,34,37 シャッタユニット
29、32,35,38 シャッタ
30、33,36,39 空間
100 コンベア
101 加熱室
102 基板
103 部品
104 入り口
105 出口
DESCRIPTION OF SYMBOLS 1 Object to be heated 2 Carrier for conveyance 3 1st conveyor 4 Supply position 5 Termination position 6 2nd conveyor 7 Supply position 8 Extraction position 9 Transfer device 10 1st heating device 11 1st front | former heating unit 12, 15, 19, 22 , 25 Heater 13, 16, 20, 23, 26 Blower 14 First second-stage heating unit 17 Second heating device 18 Second first-stage heating unit 21 Second middle-stage heating unit 24 Second second-stage heating unit 27 Partition shutter group 28, 31, 34, 37 Shutter unit 29, 32, 35, 38 Shutter 30, 33, 36, 39 Space 100 Conveyor 101 Heating chamber 102 Substrate 103 Parts 104 Inlet 105 Outlet

Claims (5)

被加熱対象物を複数個搭載した搬送用キャリアを一定速度で連続搬送する第1次搬送手段と、前記第1次搬送手段の下流側に配置され前記搬送用キャリアを一定距離毎に間欠搬送する第2次搬送手段と、前記第1次搬送手段と前記第2次搬送手段との間に配置され前記搬送用キャリアを前記第1次搬送手段の終端位置から前記第2次搬送手段の始端位置まで移送する移送手段と、前記第1次搬送手段の上方に設けられて下方を通過する前記被加熱対象物を加熱する第1次加熱手段と、前記第2次搬送手段の上方に設けられて下方に位置する前記被加熱対象物を加熱する第2次加熱手段と、前記第2次搬送手段の搬送域を前記搬送用キャリアの搬送方向の長さよりも大きな間隔で複数個の帯域に分割して仕切る開閉可能の複数個のシャッタと、を有することを特徴とする搬送式加熱装置。 A primary transport means for continuously transporting a transport carrier carrying a plurality of objects to be heated at a constant speed, and an intermittent transport of the transport carrier arranged at a certain distance on the downstream side of the primary transport means. A secondary transport means, and the transport carrier disposed between the primary transport means and the secondary transport means from the end position of the primary transport means to the start end position of the secondary transport means A transfer means for transferring the object to be heated, a primary heating means for heating the object to be heated which is provided above the primary transfer means and passes below, and provided above the secondary transfer means. A secondary heating means for heating the object to be heated located below; and a transport area of the secondary transport means is divided into a plurality of zones at intervals larger than the length of the transport carrier in the transport direction. A plurality of openable and closable shutters, Conveying heating device characterized in that it comprises. 前記第1次加熱手段は、前記搬送キャリアの搬送方向に配置され独立して温度制御可能な複数個の加熱ユニットを有し、前記各加熱ユニットは、加熱器及び送風機を備えていることを特徴とする請求項1に記載の搬送式加熱装置。 The primary heating means includes a plurality of heating units which are arranged in the transport direction of the transport carrier and can be independently temperature controlled, and each heating unit includes a heater and a blower. The conveyance heating apparatus according to claim 1. 前記第2次加熱手段は、前記シャッタにより仕切られた複数個の室内に夫々加熱ユニットが配置されており、各加熱ユニットは独立して温度制御可能な加熱器及び送風機を有することを特徴とする請求項1又は2に記載の搬送式加熱装置。 The secondary heating means has a heating unit disposed in each of a plurality of rooms partitioned by the shutter, and each heating unit has a heater and a blower capable of independently controlling the temperature. The conveyance heating apparatus according to claim 1 or 2. 前記第2次搬送手段の搬送域を前記搬送用キャリアの前記搬送用キャリアの搬送方向の長さよりも大きな間隔で複数個の帯域に分割する固定壁を有し、前記固定壁は、前記搬送用キャリア及び前記被加熱対象物の通過は許容するように前記第2次搬送手段から離隔して配置され、前記シャッタは前記固定壁と前記第2次搬送手段との間の間隙を開閉することを特徴とする請求項1乃至3のいずれか1項の記載の搬送式加熱装置。 A fixing wall that divides the conveying area of the secondary conveying means into a plurality of bands at intervals larger than the length of the conveying carrier in the conveying direction of the conveying carrier, and the fixed wall is used for the conveying A carrier and the object to be heated are arranged so as to be separated from the secondary conveying means so as to allow the passage, and the shutter opens and closes a gap between the fixed wall and the secondary conveying means. The conveyance heating apparatus according to any one of claims 1 to 3, wherein 被加熱対象物を複数個搭載した搬送用キャリアを第1次搬送手段により一定速度で連続搬送しつつ第1次加熱手段により加熱する第1次搬送工程と、次いで、前記第1次搬送手段の下流側に配置された第2次搬送手段により前記搬送用キャリアを一定距離毎に間欠搬送して、前記第2次搬送手段の搬送方向に複数個の帯域になるように仕切られた室内に前記搬送用キャリアを順次搬入すると共に、各室内で前記被加熱対象物を第2次加熱手段により加熱する第2次搬送工程と、を有し、前記各室の仕切壁に設けられたシャッタを開にして前記搬送用キャリアを通過させ、前記シャッタを閉にして前記搬送用キャリアを各室内に閉じこめることを特徴とする搬送式加熱方法。 A first conveying step of heating a carrier for carrying a plurality of objects to be heated by the first heating unit while continuously conveying the carrier at a constant speed by the first conveying unit; The transporting carrier is intermittently transported at regular intervals by a secondary transporting means disposed on the downstream side, and the chamber is partitioned into a plurality of zones in the transporting direction of the secondary transporting means. And a second transfer step of heating the object to be heated by secondary heating means in each room, and opening a shutter provided on the partition wall of each chamber. The transport heating method is characterized in that the transport carrier is passed through, the shutter is closed, and the transport carrier is enclosed in each chamber.
JP2007093533A 2007-03-30 2007-03-30 Carriable heating device and method Pending JP2008249297A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60159586A (en) * 1984-01-27 1985-08-21 大同特殊鋼株式会社 Heat recovery type continuous furnace
JPS63180076A (en) * 1987-01-20 1988-07-25 中外炉工業株式会社 Continuous type roller hearth type baking furnace
JPH01252886A (en) * 1988-03-31 1989-10-09 Central Glass Co Ltd Heat working furnace and heat treatment effected thereby
JPH067924A (en) * 1992-06-04 1994-01-18 Matsushita Electric Ind Co Ltd Nitrogen reflow apparatus
JP2000208053A (en) * 1999-01-12 2000-07-28 Daido Plant Kogyo Kk Baking furnace for plasma display panel
JP2001153564A (en) * 1999-09-17 2001-06-08 Ngk Insulators Ltd Continuous heating furnace for substrate, utilizing radiant tube burner
JP2004006175A (en) * 2002-06-03 2004-01-08 Matsushita Electric Ind Co Ltd Manufacturing method and baking device of plasma display panel (pdp)
JP2004333074A (en) * 2003-05-12 2004-11-25 Ishikawajima Harima Heavy Ind Co Ltd Base plate heat-treatment apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60159586A (en) * 1984-01-27 1985-08-21 大同特殊鋼株式会社 Heat recovery type continuous furnace
JPS63180076A (en) * 1987-01-20 1988-07-25 中外炉工業株式会社 Continuous type roller hearth type baking furnace
JPH01252886A (en) * 1988-03-31 1989-10-09 Central Glass Co Ltd Heat working furnace and heat treatment effected thereby
JPH067924A (en) * 1992-06-04 1994-01-18 Matsushita Electric Ind Co Ltd Nitrogen reflow apparatus
JP2000208053A (en) * 1999-01-12 2000-07-28 Daido Plant Kogyo Kk Baking furnace for plasma display panel
JP2001153564A (en) * 1999-09-17 2001-06-08 Ngk Insulators Ltd Continuous heating furnace for substrate, utilizing radiant tube burner
JP2004006175A (en) * 2002-06-03 2004-01-08 Matsushita Electric Ind Co Ltd Manufacturing method and baking device of plasma display panel (pdp)
JP2004333074A (en) * 2003-05-12 2004-11-25 Ishikawajima Harima Heavy Ind Co Ltd Base plate heat-treatment apparatus

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