JP2008241987A - Continuous exposure apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a continuous exposure apparatus which has dimensional accuracy not degraded due to continuous exposure for a long period and can perform uniform exposure without deteriorating picture quality. <P>SOLUTION: The continuous exposure apparatus includes at least a transparent cylinder, an LED light source arranged in the transparent cylinder, and a diffusion plate arranged between the transparent cylinder and the LED light source. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a continuous exposure apparatus for forming an image pattern on a substrate. More specifically, the present invention relates to a continuous exposure apparatus capable of continuously exposing and winding a roll-shaped conductive material precursor, which can be exposed by a so-called roll-to-roll.

  In recent years, with the rapid development of the information-oriented society, technologies related to information-related devices have rapidly advanced and become popular. In these information-related devices, many conductive films are used to reduce the size and weight. In the flat display device, a transparent conductive film is used for electromagnetic wave shielding.

  As a method for producing these conductive films, a conductive metal such as silver, copper, nickel, and indium is formed by a thin metal film on the film by sputtering, ion plating, ion beam assist, vacuum deposition, or wet coating. The method of forming is generally used. In recent years, a demand for conductive films is increasing, and a manufacturing method with low cost and high productivity is demanded.

  In view of the above circumstances, a method (silver complex diffusion transfer method) in which metallic silver is deposited on a physical development nucleus layer by development processing to form a conductive pattern (silver complex diffusion transfer method) is disclosed in Japanese Patent Publication Nos. 42-23745 and 2003-77350. It is disclosed in the publication. Furthermore, it is disclosed in the pamphlet of International Publication No. 2004/007810 that metal plating is performed using a conductive pattern made of metallic silver as a catalyst. In these methods, an original material (precursor) used to form a conductive pattern is prepared in the form of a roll, which is exposed to light and developed, and then wound into a roll. Productivity is improved because continuous processing is possible with rolls.

  As a continuous exposure apparatus that performs an exposure process without stopping the conveyance of a roll-shaped precursor, an original cylinder having a mask pattern on the outer peripheral surface of a transparent cylindrical base material is synchronized with the conveyance speed of the precursor, and the original cylinder An apparatus for performing exposure from the inside of a body is disclosed in JP-A-2-293754, JP-A-2000-35677, JP-A-2000-75497 (Patent Documents 1 to 3) and the like.

  In these exposure apparatuses, mercury lamps, fluorescent lamps, and the like are used as light sources. However, since exposure is continuously performed using a roll-shaped precursor, only light from the light source is applied to the document cylinder being exposed. Not only heat is constantly added. Then, the original cylindrical body expands when heated, and the mask pattern on the outer peripheral surface of the original cylindrical body may expand, and the dimensional accuracy of the mask pattern may be impaired.

  When a dimensional accuracy defect as described above occurs, for example, when a mesh pattern used for an electromagnetic shielding film or the like is produced, the mesh conductivity (electromagnetic wave shielding characteristics) and light transmittance are caused by expansion and contraction of the mesh pattern. This is a problem.

As the light source, it is preferable to use a light source with good straightness, and the contour of the image to be exposed becomes sharper, which is preferable in terms of image quality. On the other hand, diffusing light and exposing uniformly makes exposure unevenness. It is preferable in order not to generate it. Thus, since the image quality and the uniformity of exposure are in a trade-off relationship, it is desirable to use a light source that can perform uniform exposure while minimizing the deterioration of the image quality.
JP-A-2-293754 JP 2000-35677 A JP 2000-75497 A

  An object of the present invention is to provide a continuous exposure apparatus capable of achieving both image quality and uniform exposure without losing dimensional accuracy even by continuous exposure for a long time.

The object of the present invention was basically achieved by the following apparatus.
1) A continuous exposure apparatus comprising at least a transparent cylindrical body, an LED light source disposed inside the transparent cylindrical body, and a diffusion plate disposed between the transparent cylindrical body and the LED light source.
2) The continuous exposure apparatus according to 1), wherein the diffusion plate has a diffusion angle of 50 ° or less.

  With the apparatus of the present invention, it is possible to provide a continuous exposure apparatus capable of performing uniform exposure without losing dimensional accuracy by performing continuous exposure and without deteriorating image quality.

  The continuous exposure apparatus of the present invention has a roll-shaped precursor unwinding section and a continuous exposure section that exposes the precursor while transporting it for the purpose of roll-to-roll processing. And a winding part for winding the precursor into a roll. Here, the treatment by roll-to-roll is a method in which a precursor wound in a roll shape is continuously unwound, exposed, and then wound again in a roll shape.

  The continuous exposure apparatus of the present invention can be directly connected to the development processing apparatus by synchronizing the transport speed with an apparatus for developing the precursor (hereinafter referred to as a development processing apparatus). When connected to the development processing apparatus, the precursor is exposed in the continuous exposure unit, developed in the development processing unit, removed unnecessary components, dried, and then wound up in a roll shape in the winding unit.

  The precursor targeted by the apparatus of the present invention is a precursor capable of obtaining a conductive pattern through the steps of exposure, development, and removal of unnecessary components. For example, the above-mentioned Japanese Patent Publication No. 42-23745 No. 5, JP-A-2003-77350, WO 2004/007810, etc., precursors using silver halide light-sensitive materials, JP-A-5-29395, JP-A-9-172041 The precursor etc. which have a metal thin film layer and a photocrosslinking cured resin layer in this order on the base material described in the gazette etc. are mentioned. In particular, a precursor having at least a physical development nucleus layer and a silver halide emulsion layer in this order on a substrate is preferable because of its excellent image quality.

  The continuous exposure apparatus of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic sectional side view showing a continuous exposure unit of the continuous exposure apparatus of the present invention. 2 and 3 are schematic views showing exposure images of LED light sources used in the continuous exposure apparatus of the present invention. FIG. 4 is a schematic sectional side view of one embodiment of the continuous exposure apparatus of the present invention. In the description, the upstream side means the unwinding shaft 11 side, and the downstream side means the winding shaft 61 side.

  As shown in FIG. 4, the unwinding part A includes an unwinding shaft 11 and tension control means 13, and a roll-shaped precursor 12 is mounted on the unwinding shaft 11. And the roll-shaped precursor 12 is conveyed in the direction of the arrow. The roll-shaped precursor 12 is internally wound (winded with the photosensitive layer side face inside). A tension control means 13 (for example, a powder brake) is connected to the unwinding shaft 11, and the tension applied to the precursor F is controlled. The tension control means 13 applies a certain tension to the precursor F in order to suppress the meandering of the precursor F, and the range of 40 N / m to 150 N / m is appropriate. The roll-shaped precursor 12 is provided with a lead film having a length corresponding to the entire length of the conveying path of the pattern forming apparatus at the uppermost winding and the lowermost winding, and the product portion of the precursor F is always conveyed. It is conveyed with the speed and tension controlled.

  The precursor F delivered from the roll-shaped precursor 12 is brought into contact with the adhesive roller 15 so that the dust adhering to both the front and back surfaces is removed by adhesion, and then sent to the continuous exposure unit E. And the dust adhering to the adhesive roller 15 is periodically removed by a cleaning means (not shown) (for example, an adhesive roller whose surface can be peeled once every round) to prevent the dust from adhering to the precursor F again. . Other methods may be used as long as dust attached to the precursor F can be removed. For example, dust may be sucked and removed by a suction nozzle.

  The continuous exposure unit E of the apparatus of the present invention includes an original cylinder 1, an LED light source L as an exposure source, a diffuser plate 5, a contact roller 23, transport rollers 9a and 9b, a cleaning roller 16, and a contact roller, as shown in FIG. It consists of a roller 23. As shown in FIG. 1, the original cylindrical body 1 has a mask pattern M attached to the outer peripheral surface of the transparent cylindrical base material 4. There are various methods for attaching the mask pattern M to the transparent cylindrical base material 4. For example, carbon black is applied to the outer peripheral surface of the transparent cylindrical base material 4, and unnecessary portions are removed by a laser ablation apparatus to form the mask pattern M. And a method of winding an original film on which the mask pattern M is drawn on the outer peripheral surface of the transparent cylindrical substrate 4.

  As shown in FIG. 1, an LED light source L and a diffusion plate 5, which are features of the present invention, are arranged inside the original cylindrical body 1. The LED light source L is obtained by arranging light emitting diodes of point light sources in a line shape in the width direction of the original cylindrical body 1. The light emitted from the LED light source L is irradiated from the inside of the original cylindrical body 1 toward the original cylindrical body 1, and the precursor F is exposed at a portion whose range is designated as an exposure area in FIG. The LED light source L is connected to an exposure amount adjusting means (not shown) so that the exposure amount can be increased or decreased. As a light emitting diode used for the LED light source L, any light emitting diode that emits light having a wavelength that sensitizes the precursor F may be used. However, in consideration of image quality, a light emitting diode that emits light having a wavelength of 435 nm or less is used. It is preferable to use it. The amount of radiant energy is preferably 10 mW / sr or more, and more preferably 30 mW / sr or more. For example, OSSV 5111A, OSSV 8131A, etc. manufactured by OptoSupply can be suitably used.

  The LED light source L emits light by applying a DC voltage. Since most of the power consumption is converted into light energy and radiated as heat energy is very small, the original cylinder 1 is hardly heated during exposure. For this reason, even if the exposure process is continuously performed by roll-to-roll, the original cylinder does not thermally expand, and exposure can always be performed with stable dimensional accuracy. Moreover, since most of the power consumption of the LED light source L is converted into light energy, energy efficiency is high, and obtaining similar light energy is preferable because it saves energy compared to mercury lamps, fluorescent lamps, and the like.

  The light emitted from the light emitting diodes constituting the LED light source L is emitted with good straightness. Therefore, the edge portion of the mask pattern M included in the original cylindrical body 1 can be exposed sharply. When the fine line pattern is exposed, the resistance value of the patterned conductor is higher than that when exposed by a light source such as a fluorescent lamp. Is preferable. However, since the straightness of the light emitted from the light emitting diode is good, the light is reduced between the adjacent light emitting diodes, resulting in uneven exposure. For this reason, the diffusion plate 5 is inserted between the LED light source L and the original cylindrical body 1, and the light from each of the adjacent light emitting diodes of the LED light source L is overlapped to make the exposure distribution uniform.

  The diffusion plate 5 only needs to have a diffusion angle that can overlap the light from each of the adjacent light emitting diodes of the LED light source L, but the light emitted from the light emitting diode with a very large diffusion angle. When the light is diffused, the straightness characteristic of the light emitting diode is impaired, so that the diffusion angle is preferably 50 ° or less. Further, it is more preferable that the light emitted from the light emitting diode is diffused only in the direction in which the light emitting diodes are adjacent to each other (the width direction of the original cylinder 1). That is, it is preferable that the circumferential diffusion angle of the original cylinder is smaller than the diffusion angle in the width direction of the original cylinder 1. As the material of the diffusion plate 5, acrylic resin, polyester resin, polycarbonate resin, glass or the like is preferably used. As the diffusion plate 5, for example, Light Shaping Diffusers manufactured by Optical Solutions are preferably used.

  The original cylinder 1 is rotatably disposed on the transport rollers 9a and 9b. A contact roller 23 is disposed on the outer periphery of the original cylinder 1. The precursor F is wound around the outer periphery of the original cylindrical body 1 through the lower side of the transport roller 9a, and is transported to the winding unit through the lower side of the transport roller 9b. Then, the original cylinder 1 is pressed against the conveying rollers 9a and 9b by the tension applied to the precursor F, and the original cylinder 1 is rotated in accordance with the movement of the precursor F, and is irradiated with light. The precursor F is continuously exposed like the image of the mask pattern M in the exposure area of the outer peripheral surface 1. The contact roller 23 is a roller for bringing the precursor F into close contact with the original cylinder 1, and the precursor F is conveyed by holding the precursor F between the original cylinder 1 and the contact roller 23. The adhesion between F and the original cylinder 1 is improved. In order to improve the adhesion between the precursor F and the original cylinder 1, it is preferable to provide a plurality of adhesion rollers 23. The transparent cylindrical base material 4 that is the base material of the original cylindrical body 1 is only required to transmit light having a desired wavelength. For example, acrylic resin, glass, or the like is used. The transport rollers 9a and 9b and the contact roller 23 may have a surface quality that does not cause the precursor F to slip and damage the precursor F. For example, a roller made of nitrile rubber (NBR) is preferably used. .

  The exposure by the LED light source L, which is a feature of the present invention, will be described in detail with reference to FIG. FIG. 2A shows an exposure image of light from the LED light source L when the screen 31 is exposed from the vertical direction. 2B is a side view when FIG. 2A is a front view, and corresponds to the width direction of the original cylindrical body 1. FIG. 2C is a front view of FIG. FIG. 6 is a top view of the original cylindrical body 1 corresponding to the circumferential direction of the original cylindrical body 1. In the continuous exposure apparatus of the present invention, the light from the LED light source L is exposed to the original cylindrical body 1, but in FIG. 2, in order to show the exposure image from the LED light source L, exposure to the screen 31 is schematically performed. It is represented by an image.

  The light emitting diodes L1 and L2 constituting the LED light source L are point light sources, and the light travels straight while diffusing in a conical shape. 2A, the light emitted from the light emitting diodes L1 and L2 of FIG. 2B is further diffused by the diffusion plate 5a, and the screen 31 exposes the light emitting diodes L1 and L2. There are overlapping parts of the image. The diffusion plate 5a can diffuse light emitted from the light emitting diodes L1 and L2 isotropically. For this reason, the exposure image 32 projected on the screen 31 is an image in which two circles overlap. The diffusing plate 5a diffuses light emitted from the light emitting diodes L1 and L2 isotropically, so that the diffusing plate 5a is viewed from the side surface shown in FIG. 2B and the top surface shown in FIG. The diffusion angles β1 are equal values, and in this case, a diffusion angle of 50 ° or less is preferably used. The lower limit diffusion angle when α1 and β1 are equal is 10 °. As the material of the diffusion plate 5a, acrylic resin, polyester resin, polycarbonate resin, glass, or the like is preferably used. As the circular diffusion plate 5a, for example, Light Solution Diffusers manufactured by Optical Solutions, LSD30PC10-10, or the like is preferably used.

  With reference to FIG. 3, the exposure using the LED light source L and the diffusion plate 5b, which is more preferably used in the present invention, will be described in detail. FIG. 3A shows an exposure image of light from the LED light source L when exposed from a direction perpendicular to the screen 31. 3B is a side view when FIG. 3A is a front view, corresponding to the width direction of the original cylindrical body 1, and FIG. 3C is a front view of FIG. 3A. FIG. 6 is a top view of the original cylindrical body 1 corresponding to the circumferential direction of the original cylindrical body 1. In the continuous exposure apparatus of the present invention, the light from the LED light source 2 is exposed to the original cylinder 1, but in FIG. 3, in order to show the exposure image from the LED light source L, exposure to the screen 31 is schematically performed. It is represented by an image.

  In FIG. 3, light from the light emitting diodes L1 and L2 travels straight while diffusing, and is exposed on the screen 31 in an elliptical shape through the diffusion plate 5b, as in FIG. For this reason, the value of the diffusion angle α2 seen from the side surface shown in FIG. 3B and the value of the diffusion angle β2 seen from the top surface shown in FIG.

  In the LED light source L, the diffusion angle α2 where the light emitting diodes are adjacent to each other (the positional relationship of the light emitting diodes in FIG. 3B) is widened so that the light from each light emitting diode is overlapped so as not to deteriorate the image quality. However, it is preferable because unevenness in exposure can be eliminated, but the diffusion angle β2 where the light-emitting diodes are not adjacent to each other (the positional relationship of the light-emitting diodes in FIG. 3C) should be kept straight. It is more preferable because the image quality can be improved. That is, it is more preferable that the diffusion angle β2 is smaller than the diffusion angle α2. The range of the diffusion angle α2 is preferably 50 ° or less, and the lower limit diffusion angle is 10 °. The range of the diffusion angle β2 is preferably 40 ° or less, and more preferably 10 ° or less. The lower limit is preferably close to 0 °, but practically it is 0.1 °. In addition, as a material of the diffusion plate 5b, an acrylic resin, a polyester resin, a polycarbonate resin, glass, or the like is preferably used. As the diffusion plate 5b, for example, Light Solution Diffusers manufactured by Optical Solutions, LSD40 × 0.2PC10-10, or the like is preferably used.

  As shown in FIG. 1, a cleaning roller 16 is disposed in contact with a portion of the outer periphery of the original cylindrical body 1 where the precursor F is not wound, and dust attached to the original cylindrical body 1 and the mask pattern M is removed. It has been removed. And the cleaning mechanism similar to the thing used for the above-mentioned adhesive roller 15 is attached.

  As shown in FIG. 4, a nip roller 18a is arranged on the upstream side of the conveying roller 9a, and a nip roller pair 18b is arranged on the downstream side of the conveying roller 9b, and the precursor F is sandwiched between the nip roller pair 18a and the nip roller pair 18b. By being timed, the precursor F is prevented from meandering while being displaced in the roll width direction of the nip roller pair 18a and the nip roller pair 18b. A drive motor 19 is connected to one roller of the nip roller pair 18b, and the precursor F is conveyed by driving the drive motor 19.

  The continuous exposure apparatus of the present invention is preferably covered with a dust-free box (clean box) 17. The dust-free box 17 is provided with a blower (not shown) and a HEPA (High Efficiency Particulate Air) filter, and clean air is fed into the dust-free box 17 so that the inside of the dust-free box 17 is kept at a positive pressure, and dust is not collected from the outside. Prevents contamination. In addition, air curtains (not shown) for taking in and out the roll-shaped precursor 12 and the take-up roll 62 are provided on both side surfaces of the dust-free box 17.

  The exposed precursor F is wound up in a roll shape by a winding shaft 61. A tension control means 63 (for example, a torque motor) capable of driving and rotating the shaft is attached to the winding shaft 61. The tension control means 63 applies a high tension to the precursor F in order to suppress meandering of the precursor F, and a range of 40 N / m to 150 N / m is appropriate. Reference numeral 62 is a substrate in which a conductive pattern is formed and wound into a roll.

EXAMPLES Hereinafter, although an Example and a comparative example demonstrate this invention further in detail, it is not limited to this.

A polyethylene terephthalate film having a thickness of 175 μm was used as a substrate, and an undercoat layer made of vinylidene chloride was applied to the film, and a base layer having a gelatin content of 50 mg / m ² was coated thereon and dried. Next, a physical development nucleus layer made of palladium sulfide prepared as described below was applied and dried.

<Preparation of palladium sulfide sol>
Liquid A Palladium chloride 5g
Hydrochloric acid 40ml
1000ml distilled water
B liquid sodium sulfide 8.6g
1000ml distilled water
Liquid A and liquid B were mixed with stirring, and 30 minutes later, the solution was passed through a column filled with an ion exchange resin to obtain palladium sulfide sol.

<Preparation of physical development nucleus layer coating solution>
50 ml of palladium sulfide sol
20% 1% gelatin solution
Surfactant 0.2g
Glutaraldehyde 300mg
Antihalation dye (following formula 1) 5g
Add water to make a total volume of 2000 ml.
This physical development nucleus layer coating solution was applied on the base layer so that the palladium sulfide had a solid content of 0.4 mg / m ² and dried.

Subsequently, a silver halide emulsion layer was coated on the physical development nucleus layer. The silver halide emulsion was prepared by a general double jet mixing method for photographic silver halide emulsions. This silver halide emulsion was prepared such that 90 mol% of silver chloride and 10 mol% of silver bromide had an average particle size of 0.2 μm. The silver (silver nitrate) / gelatin mass ratio of the silver halide emulsion layer is 2.5. The silver halide emulsion layer contains 0.2 g / m ² of a surfactant and 50 mg / m ² of the following dyes to enable handling under a yellow fluorescent lamp. This silver halide emulsion layer was applied so that the amount of silver halide (converted to silver nitrate) was 4 g / m ² and dried to prepare a roll precursor having a width of 700 mm and a winding of 300 m.

A manuscript film on which a mesh pattern (a mesh pattern of 300 μm mesh, a mesh pattern having a mesh line width of 25 μm, a pattern for a transparent conductive film) was drawn was wound around a transparent acrylic pipe to produce a manuscript cylinder. The original cylinder is attached as the original cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and 150 LED light sources (manufactured by OptoSupply, OSSV5111A are arranged in a row) as the LED light source L in the original cylinder. And a diffusion plate (manufactured by Optical Solutions, Light Shaping Diffusers, LSD60PC10-10, diffusion angle α1 = β1 = 60 °) was attached as the diffusion plate 5. And by the continuous exposure apparatus of this invention, the said roll-shaped precursor (700 mm width, 300m winding) is continuously exposed (amount of energy applied to the precursor, 1.6 mJ / cm ² ) at a conveyance speed of 2.5 m / min. This exposure process was performed continuously for 24 hours. The exposure time per roll is approximately 2 hours, and the roll replacement is approximately 15 minutes. Thereafter, it is immersed in the following alkaline solution (developer for silver complex salt diffusion transfer) at 15 ° C. for 60 seconds, and then the silver halide emulsion layer is washed and removed by water, dried, and a mesh having a mesh line width of 25 μm and a mesh spacing of 300 μm. A patterned silver film was formed.

<Alkaline solution>
Sodium hydroxide 20g
Hydroquinone 20g
1-phenyl-3-pyrazolidone 2g
Sodium sulfite 30g
N-methylethanolamine 10g
Adjust the total volume to 1000 ml with water. Adjust pH to 13.

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Attachment In place of the diffusion plate 5 used in Example 1, a diffusion plate (manufactured by Optical Solutions, Light Shaping Diffusers, LSD40PC10-10, diffusion angle α1 = β1 = 40 °) was attached as the diffusion plate 5. Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Attachment In place of the diffusion plate 5 used in Example 1, a diffusion plate (manufactured by Optical Solutions, Light Shaping Diffusers, LSD20PC10-10, diffusion angle α1 = β1 = 20 °) was attached as the diffusion plate 5. Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Attachment In place of the diffusion plate 5 used in Example 1, a diffusion plate (manufactured by Optical Solutions, Light Shaping Diffusers, LSD10PC10-10, diffusion angle α1 = β1 = 10 °) was attached as the diffusion plate 5. Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Mounting, instead of the diffusion plate 5 used in Example 1, a diffusion plate as a diffusion plate 5 (manufactured by Optical Solutions, Light Shaping Diffusers, LSD 60 × 10PC10-10, diffusion angle α2 = 60 °, diffusion angle β2 = 10 °) Attached. Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Mounting, instead of the diffusion plate 5 used in Example 1, a diffusion plate as a diffusion plate 5 (manufactured by Optical Solutions, Light Shaping Diffusers, LSD30 × 5PC10-10, diffusion angle α2 = 30 °, diffusion angle β2 = 5 °) Attached. Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

  A document cylinder similar to that of the first embodiment is attached as the document cylinder 1 to the continuous exposure apparatus of the present invention shown in FIG. 4, and an LED light source similar to that of the first embodiment is used as the LED light source L in the document cylinder. Mounting, instead of the diffuser plate 5 used in Example 1, a diffuser plate (manufactured by Optical Solutions, Light Shaping Diffusers, LSD40 × 0.2PC10-10, diffuser angle α2 = 40 °, diffuser angle β2 = 0) .2 °). Then, the amount of light was finely adjusted (the voltage applied to the LED light source was adjusted) so that the total light transmittance was the same as that of the metal mesh pattern film produced in Example 1, and the same processing as in Example 1 was performed. .

(Comparative example)
The LED light source and diffusion plate of the continuous exposure apparatus of the present invention shown in FIG. 4 were replaced with fluorescent lamps. Around the fluorescent lamp, a light shielding member for restricting the light of the fluorescent lamp to the exposure region of FIG. 4 was attached. Then, the same original cylindrical body as that of Example 1 is used as the original cylinder 1 and the same precursor as that of Example 1 is used so that the total light transmittance is the same as that of the metal mesh pattern film manufactured in Example 1. The amount of light was finely adjusted and the same processing as in Example 1 was performed.

Evaluation was performed as follows.
Among the metal mesh pattern films produced in Examples 1 to 7 and Comparative Example 1, the mesh pattern of the conductive pattern film obtained at the start and end of the treatment was converted into a digital microscope (Hilox Co., Ltd.). Manufactured by KH-3000), and the mesh interval was measured. Then, a difference from the mesh interval of the original film was calculated, and the value was taken as a dimensional error.

  Then, by visually observing the obtained metal mesh pattern film, an object that is not visible with unevenness of exposure (in the underexposed part, the fine line of the mesh pattern becomes thick and the light and shade appear in the mesh pattern of the metal mesh pattern film) Although there was no problem in practical use as a transparent conductive pattern film, an object with slight exposure unevenness was evaluated as Δ, and an object with clear exposure unevenness was determined as ×. Moreover, in order to evaluate the image quality of a metal mesh pattern, the surface resistance value of the metal mesh pattern produced in Examples 1-7 and the comparative example 1 was used for the resistivity meter (Dia Instruments Co., Ltd. Lorestar GP). Measured. A metal mesh pattern with a low surface resistance value has a larger amount of precipitated silver, or a fine mesh wire with a higher density of precipitated silver, even with the same total light transmittance. In order to guess, it was judged that it had better image quality.

  As shown in Table 1, the conductive pattern of the comparative example was continuously exposed for 24 hours, so that the mesh interval was extended by 5 μm and the dimensional error was deteriorated. In the mesh pattern film, no change in the mesh interval appeared.

  Evaluation results of exposure unevenness of the metal mesh pattern film were ◯ in Examples 1, 2, 5 to 7 and the comparative example, and were not seen at all. In Examples 3 and 4 as well, although exposure unevenness was slightly visible, it was at a level where there was no practical problem as a transparent conductive mesh film.

  As is clear from the results of Table 1, regarding the surface resistance value of the metal mesh pattern, the continuous exposure apparatuses of Examples 2 to 4 and Examples 6 and 7 having a diffusion angle of 50 ° or less have lower surface resistance. The metal mesh pattern having a value was obtained, and the continuous exposure apparatus was excellent in image quality. Further, the continuous exposure apparatuses of Embodiments 6 and 7 in which the diffusion angle β2 in the circumferential direction of the original cylinder is smaller than the diffusion angle α2 in the width direction of the original cylinder are metal mesh patterns excellent in image quality and image uniformity. was gotten.

  The conductive pattern obtained by developing the roll-shaped precursor exposed by the continuous exposure apparatus of the present invention can be used for a transparent conductive film used for applications such as an electromagnetic shielding film and a touch panel.

Schematic side sectional view showing a continuous exposure part of the processing apparatus of the present invention Schematic which shows the exposure image of the LED light source used for the continuous exposure apparatus of this invention Schematic which shows the exposure image of the LED light source used for the continuous exposure apparatus of this invention The schematic sectional side view of one embodiment of the processing apparatus of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Original cylindrical body 4 Transparent cylindrical base material 5 Diffusion board 5a Diffusion board 5b Diffusion board 12 Roll-shaped precursor 19 Drive motor 62 Winding roll L LED light source L1, L2 Light emitting diode F Precursor M Mask pattern

Claims (2)

  A continuous exposure apparatus comprising at least a transparent cylindrical body, an LED light source disposed inside the transparent cylindrical body, and a diffusion plate disposed between the transparent cylindrical body and the LED light source.   2. The continuous exposure apparatus according to claim 1, wherein the diffusion angle of the diffusion plate is 50 [deg.] Or less.

Images