JP2008224262A5 - - Google Patents

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Publication number
JP2008224262A5
JP2008224262A5 JP2007059449A JP2007059449A JP2008224262A5 JP 2008224262 A5 JP2008224262 A5 JP 2008224262A5 JP 2007059449 A JP2007059449 A JP 2007059449A JP 2007059449 A JP2007059449 A JP 2007059449A JP 2008224262 A5 JP2008224262 A5 JP 2008224262A5
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JP
Japan
Prior art keywords
counter electrode
axis
acceleration
parallel
opposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007059449A
Other languages
English (en)
Japanese (ja)
Other versions
JP5631529B2 (ja
JP2008224262A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007059449A priority Critical patent/JP5631529B2/ja
Priority claimed from JP2007059449A external-priority patent/JP5631529B2/ja
Priority to EP08720344A priority patent/EP2110672B1/en
Priority to US12/529,675 priority patent/US8413510B2/en
Priority to PCT/JP2008/000458 priority patent/WO2008111291A1/ja
Publication of JP2008224262A publication Critical patent/JP2008224262A/ja
Publication of JP2008224262A5 publication Critical patent/JP2008224262A5/ja
Application granted granted Critical
Publication of JP5631529B2 publication Critical patent/JP5631529B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007059449A 2007-03-09 2007-03-09 加速度センサ Active JP5631529B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007059449A JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ
EP08720344A EP2110672B1 (en) 2007-03-09 2008-03-06 Acceleration sensor
US12/529,675 US8413510B2 (en) 2007-03-09 2008-03-06 Acceleration sensor
PCT/JP2008/000458 WO2008111291A1 (ja) 2007-03-09 2008-03-06 加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007059449A JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ

Publications (3)

Publication Number Publication Date
JP2008224262A JP2008224262A (ja) 2008-09-25
JP2008224262A5 true JP2008224262A5 (https=) 2010-02-25
JP5631529B2 JP5631529B2 (ja) 2014-11-26

Family

ID=39759235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007059449A Active JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ

Country Status (4)

Country Link
US (1) US8413510B2 (https=)
EP (1) EP2110672B1 (https=)
JP (1) JP5631529B2 (https=)
WO (1) WO2008111291A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5293187B2 (ja) * 2006-11-14 2013-09-18 パナソニック株式会社 センサ
US8117914B2 (en) * 2007-02-20 2012-02-21 Panasonic Corporation Inertia force sensor and composite sensor for detecting inertia force
DE102009001847B4 (de) 2009-03-25 2022-07-28 Robert Bosch Gmbh Mikromechanisches Bauteil, Sensorvorrichtung mit einem mikromechanischen Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils
US20170266056A1 (en) 2016-03-15 2017-09-21 The Procter & Gamble Company Method and Apparatus for Manufacturing an Absorbent Article Including an Ultra Short Pulse Laser Source

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2773460B2 (ja) * 1991-03-05 1998-07-09 日本電気株式会社 半導体加速度センサ
JP3124710B2 (ja) 1995-07-28 2001-01-15 住友精密工業株式会社 静電容量の変化を利用したセンサ用信号処理回路
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
US5806365A (en) * 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
JPH10177034A (ja) 1996-12-17 1998-06-30 Sumitomo Precision Prod Co Ltd 静電容量型加速度センサとその製造方法
JPH11248741A (ja) * 1998-02-26 1999-09-17 Omron Corp 静電容量型多軸加速度センサ
WO2002018875A1 (en) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer

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