JP2008211876A - Actuator - Google Patents

Actuator Download PDF

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JP2008211876A
JP2008211876A JP2007044566A JP2007044566A JP2008211876A JP 2008211876 A JP2008211876 A JP 2008211876A JP 2007044566 A JP2007044566 A JP 2007044566A JP 2007044566 A JP2007044566 A JP 2007044566A JP 2008211876 A JP2008211876 A JP 2008211876A
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movable
magnetic
magnetic pole
magnetic member
leg
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JP5118359B2 (en
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Yuya Hasegawa
祐也 長谷川
Yoshio Mitsutake
義雄 光武
Tomohiro Ota
智浩 太田
Katsuhiro Hirata
勝弘 平田
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator that makes it possible to sway one movable magnetic member in any direction, is efficient, and can be reduced in size. <P>SOLUTION: The movable magnetic member 4 has a movable magnetic pole portion opposed to the magnetic pole faces of the leg portions 51 of a fixed magnetic member 5 with a gap in-between. The movable magnetic member is provided in the movable magnetic pole portion with permanent magnetic bodies 41 magnetized in directions opposite the magnetic pole faces of the leg portions 51. The following two flux paths are thereby separated: a flux path (I) where magnetic flux produced by exciting the exciting coil portions 61 to 64 wound on the respective leg portions 51 flows through the fixed magnetic member 5 and the movable magnetic member 4; and a flux path (II) where magnetic flux produced by the permanent magnet bodies 51 flows through the movable magnetic member 4 and the fixed magnetic member 5. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、多次元の方向に駆動可能なアクチュエータに関するものである。   The present invention relates to an actuator that can be driven in multidimensional directions.

従来、多次元の方向に駆動可能なアクチュエータは、例えば特許文献1に開示されているような一方向のみ駆動可能なアクチュエータを組み合わせて実現していた。
特開2003−88089号公報(段落0004)
Conventionally, actuators that can be driven in multi-dimensional directions have been realized by combining actuators that can be driven only in one direction as disclosed in, for example, Patent Document 1.
JP 2003-88089 A (paragraph 0004)

上述のように多次元の方向に駆動可能なアクチュエータを構成する場合、特許文献1に開示されてような一方向のみ駆動可能なアクチュエータを組み合わせて実現していたため、アクチュエータの形状が大型となるという問題点があった。   When an actuator that can be driven in a multidimensional direction as described above is configured by combining an actuator that can be driven in only one direction as disclosed in Patent Document 1, the shape of the actuator is large. There was a problem.

本発明は、上記問題点に鑑みて為されたもので、その目的とするところは、一つの可動側磁性部材を任意の方向に揺動でき、しかも高効率で且つ小型化が可能なアクチュエータを提供することにある。   The present invention has been made in view of the above problems, and an object of the present invention is to provide an actuator that can swing one movable-side magnetic member in an arbitrary direction, and that can be highly efficient and downsized. It is to provide.

上述の目的を達成するために、請求項1の発明では、両側脚部及び該両側脚部の一端間を橋絡する中央部からなる複数のコ字状の磁性体を、前記中央部の中心を軸として所定の角度で交差させた形状に構成される固定側磁性部材と、前記固定側磁性部材の各脚部に巻回して両側脚部の他端を互に異なる磁極となるように励磁される励磁コイル部と、前記脚部の他端上方に配されて前記中心と同軸の出力軸を中心として上面視で全方向に揺動自在に支持された可動側磁性部材とを備えてなり、前記可動側磁性部材は前記脚部の磁極面にギャップを介して対向する可動側磁極部を有するとともに、各可動側磁極部に前記脚部の磁極面に対して対向方向に着磁された永久磁石体を備え、前記励磁コイル部の励磁により生じる磁束が前記固定側磁性部材と前記可動側磁性部材とを介して流れる磁路と、前記永久磁石体により生じる磁束が前記可動側磁性部材と前記固定側磁性部材とを介して流れる磁路とを分離させて成ることを特徴とする。   In order to achieve the above object, according to the first aspect of the present invention, a plurality of U-shaped magnetic bodies comprising both leg portions and a central portion bridging between one ends of the both leg portions are arranged at the center of the central portion. A fixed-side magnetic member configured in a shape intersecting at a predetermined angle with the axis as an axis, and energized so that the other ends of both leg portions have different magnetic poles by winding around each leg portion of the fixed-side magnetic member And a movable side magnetic member that is disposed above the other end of the leg portion and is supported so as to be swingable in all directions when viewed from above with an output shaft coaxial with the center. The movable-side magnetic member has a movable-side magnetic pole portion opposed to the magnetic pole surface of the leg portion via a gap, and is magnetized in the opposite direction to the magnetic pole surface of the leg portion by each movable-side magnetic pole portion. A magnetic flux generated by excitation of the excitation coil unit is provided with a permanent magnet body, and the fixed-side magnetic unit And a magnetic path flowing through the movable side magnetic member and a magnetic path in which a magnetic flux generated by the permanent magnet body flows through the movable side magnetic member and the fixed side magnetic member is separated. And

請求項1の発明によれば、固定側磁性部材の磁極により生成される磁界の向きを容易に制御することができ、そのため簡単な構成で一つの可動側磁性部材を広域に揺動させることができ、小型化が可能なアクチュエータを提供でき、特に永久磁石体により生じる磁路と、励磁コイル部の励磁により生じる磁路を分離し、透磁率の低い永久磁石体を励磁コイル部の励磁による磁束を通さないため、高効率化が図れ、強い駆動力が得られる。   According to the first aspect of the present invention, the direction of the magnetic field generated by the magnetic poles of the fixed-side magnetic member can be easily controlled, so that one movable-side magnetic member can be swung over a wide area with a simple configuration. The magnetic path generated by the permanent magnet body and the magnetic path generated by excitation of the excitation coil section are separated, and a permanent magnet body having a low magnetic permeability is generated by exciting the excitation coil section. Since it does not pass, high efficiency can be achieved and a strong driving force can be obtained.

請求項2の発明では、請求項1の発明において、前記永久磁石体の磁極面は、前記可動側磁極部の磁極面が前記脚部の磁極面に対面したときに一部のみが前記脚部の磁極面に対向することを特徴とする。   According to a second aspect of the present invention, in the first aspect of the invention, only a part of the magnetic pole surface of the permanent magnet body is the leg portion when the magnetic pole surface of the movable magnetic pole portion faces the magnetic pole surface of the leg portion. It faces the magnetic pole surface.

請求項2の発明によれば、励磁コイル部の励磁による磁束が流れる磁路を容易に形成することができる。   According to invention of Claim 2, the magnetic path through which the magnetic flux by the excitation of an exciting coil part can be formed easily.

請求項3の発明では、請求項1又は2の発明において、前記永久磁石体は円環状に形成されて前記脚部の磁極面に対向する可動側磁極部に亘るように可動側磁性部材に配されることを特徴とする。   According to a third aspect of the present invention, in the first or second aspect of the present invention, the permanent magnet body is formed in an annular shape and arranged on the movable magnetic member so as to extend over the movable magnetic pole portion facing the magnetic pole surface of the leg portion. It is characterized by being.

請求項3の発明によれば、一つの永久磁石体で各可動側磁極部の永久磁石体を構成することができる上に、配置角度のずれの影響などがなく、また永久磁石体の作成や組み込みが容易な上に特性も安定し、更に腕片を中心から放射状に突出させて各可動側磁極部に先部を配置するような十字状で切り込みを必要とする永久磁石体に比べて磁束のロスがないという効果がある。   According to the invention of claim 3, the permanent magnet body of each movable-side magnetic pole part can be configured with one permanent magnet body, and there is no influence of the displacement of the arrangement angle, and the creation of the permanent magnet body It is easy to incorporate and stable in characteristics, and has a magnetic flux compared to a permanent magnet body that requires a cut in a cross shape in which the arm pieces protrude radially from the center and the tip is placed on each movable magnetic pole. There is an effect that there is no loss.

請求項4の発明では、請求項1乃至4の何れかの発明において、前記脚部の磁極面と、該磁極面と対向する前記可動側磁極部の磁極面とを、同心の凹球面と、凸球面とで形成していることを特徴とする。   According to a fourth aspect of the present invention, in any one of the first to fourth aspects, the magnetic pole surface of the leg portion and the magnetic pole surface of the movable magnetic pole portion facing the magnetic pole surface are concentric concave spherical surfaces, It is formed by a convex spherical surface.

請求項4の発明によれば、固定側磁性部材の磁極と可動側磁性部材の磁極との間のギャップを小さくすることができ、その結果、磁気効率が上がってアクチュエータの効率を向上することができる。   According to the invention of claim 4, the gap between the magnetic pole of the fixed side magnetic member and the magnetic pole of the movable side magnetic member can be reduced. As a result, the magnetic efficiency can be increased and the efficiency of the actuator can be improved. it can.

本発明は、固定側磁性部材の磁極により生成される磁界の向きを容易に制御することができ、そのため簡単な構成で一つの可動側磁性部材を広域に揺動させることができ、小型化が可能なアクチュエータを提供でき、特に永久磁石体により生じる磁路と、励磁コイル部の励磁により生じる磁路を分離し、透磁率の低い永久磁石体を励磁コイル部の励磁による磁束を通さないため、高効率化が図れ、強い駆動力を得ることができる。   The present invention can easily control the direction of the magnetic field generated by the magnetic poles of the fixed-side magnetic member, so that one movable-side magnetic member can be swung over a wide area with a simple configuration, and the size can be reduced. In particular, a magnetic path generated by the permanent magnet body and a magnetic path generated by excitation of the excitation coil portion are separated, and a permanent magnet body having a low magnetic permeability is not allowed to pass the magnetic flux generated by excitation of the excitation coil portion. High efficiency can be achieved and a strong driving force can be obtained.

以下本発明を図1に示す一実施形態により説明する。   Hereinafter, the present invention will be described with reference to an embodiment shown in FIG.

本実施形態のアクチュエータ1は、図1(a)に示すようにケース2内に収容され、出力軸であるシャフト3をケース2の一面から外部に突出させているもので、シャフト3と、可動側磁性部材4と、固定側磁性部材5と、励磁コイル部61〜64等で構成される。   The actuator 1 of the present embodiment is housed in a case 2 as shown in FIG. 1A, and a shaft 3 that is an output shaft protrudes from one surface of the case 2 to the outside. The side magnetic member 4, the fixed side magnetic member 5, and exciting coil portions 61 to 64 are configured.

固定側磁性部材5は、図1(b)に示すように両側脚部及び該両側脚部の一端間を橋絡する中央部からなる2組のコ字状の磁性体を、前記中央部の中心を軸として90°の角度で交差させた形状に構成されるもので、十字型の基部50と、該基部50の各端部より図において上向きに同一高さで突出して先端面を磁極面とする4つの脚部51とからなり、各脚部51には各別に励磁電流を流すことができるように励磁コイル部61〜64を巻回している。   As shown in FIG. 1 (b), the fixed-side magnetic member 5 includes two sets of U-shaped magnetic bodies composed of both side leg portions and a center portion bridging between the ends of the both side leg portions. Consists of a shape that intersects at an angle of 90 ° with the center as an axis, and forms a cross-shaped base 50 and each end of the base 50 projecting upward at the same height in the figure with the tip surface facing the magnetic pole surface Exciting coil portions 61 to 64 are wound around each leg portion 51 so that an exciting current can flow separately.

各脚部51の磁極面は、共通の凹球面の一部を為す形の球面に形成されている。磁性体4の着磁方向は上下方向とし、例えば下面側をN極の磁極面としている。   The magnetic pole surface of each leg 51 is formed into a spherical surface that forms a part of a common concave spherical surface. The magnetization direction of the magnetic body 4 is the vertical direction. For example, the lower surface side is an N-pole magnetic pole surface.

可動側磁性部材4は、図1(b)に示すように、十字状基部40a及びこの基部40aの下面に一体に形成された突出部40bからなる磁性体40と、突出部40bの下面部に形成された下向き段部40cに接着した永久磁石体41と、この永久磁石体41の下面に接着した磁性体42とで構成され、突出部41及び磁性体43の下向き外周面を連続延長させた面を凸球面とし、この凸球面を可動側磁極部の磁極面としているいる。   As shown in FIG. 1B, the movable-side magnetic member 4 includes a magnetic body 40 including a cross-shaped base portion 40a and a protruding portion 40b integrally formed on the lower surface of the base portion 40a, and a lower surface portion of the protruding portion 40b. The permanent magnet body 41 is bonded to the formed downward stepped portion 40c, and the magnetic body 42 is bonded to the lower surface of the permanent magnet body 41. The protrusion 41 and the downward outer peripheral surface of the magnetic body 43 are continuously extended. The surface is a convex spherical surface, and this convex spherical surface is the magnetic pole surface of the movable-side magnetic pole portion.

永久磁石体41の外側下端は磁性体42の外側端と磁性体40の突出部40bの下端との間のごく僅かなギャップgから外側に臨んでいる。また磁性体40の基部40aの上面中心には上述のシャフト3の一端を連結固定している。   The outer lower end of the permanent magnet body 41 faces the outer side from a very small gap g between the outer end of the magnetic body 42 and the lower end of the protrusion 40b of the magnetic body 40. One end of the shaft 3 is connected and fixed to the center of the upper surface of the base portion 40a of the magnetic body 40.

而してケース2の底面に配置固定された固定側磁性部材5の上方に、固定側磁性部材5の基部50の中心軸と可動側磁性部材4の中心軸とが一致するように可動側磁性部材4を配置し、可動側磁性部材4の中心からみて90°間隔の4箇所の外周面に一端を結合したコイルばね8をケース2の対応する4方の内面に結合して可動側磁性部材4を上面視で全方向に揺動時在にケース2に支持させるとともにシャフト3の先部をケース2の蓋部2aの中心に貫設している軸受部7を介して外部に突出させる。   Thus, above the fixed side magnetic member 5 arranged and fixed on the bottom surface of the case 2, the movable side magnetism is such that the central axis of the base 50 of the fixed side magnetic member 5 and the central axis of the movable side magnetic member 4 coincide. A movable side magnetic member is formed by arranging a member 4 and coupling coil springs 8 having one end coupled to four outer peripheral surfaces at intervals of 90 ° when viewed from the center of the movable side magnetic member 4 to the corresponding four inner surfaces of the case 2. 4 is supported by the case 2 while swinging in all directions when viewed from above, and the tip portion of the shaft 3 is projected to the outside through a bearing portion 7 penetrating in the center of the lid portion 2a of the case 2.

ここで固定側磁性部材5の各脚部51の磁極面を構成する凹球面は、可動側磁性部材4が揺動した際に僅かなギャップを介して可動側磁性部材4の下向きの凸球面からなる磁極面と対向し、またこの対向時において、脚部51の磁極面に対し可動側磁性部材4の永久磁石体42の一部、つまりその外側端部が対向し、この対向部位から外側の部位に磁性体40の突出部40bの凸球面が対向するようなっている。   Here, the concave spherical surface constituting the magnetic pole surface of each leg 51 of the fixed-side magnetic member 5 is separated from the downward convex spherical surface of the movable-side magnetic member 4 through a slight gap when the movable-side magnetic member 4 swings. In this case, a part of the permanent magnet body 42 of the movable-side magnetic member 4, that is, the outer end thereof is opposed to the magnetic pole surface of the leg portion 51, and the outer side from the opposed portion is outside. The convex spherical surface of the protrusion 40b of the magnetic body 40 is opposed to the part.

尚図示していないが、励磁コイル部61〜64に励磁電流を流すためのコイル端子(図示せず)をケース2から外部に導出している。   Although not shown, a coil terminal (not shown) for flowing an exciting current through the exciting coil portions 61 to 64 is led out from the case 2 to the outside.

また図1(a)の断面図では励磁コイル部64を巻回している脚部51の図示を省略している。   In addition, in the cross-sectional view of FIG. 1A, illustration of the leg portion 51 around which the exciting coil portion 64 is wound is omitted.

次に本実施形態の動作を説明する。   Next, the operation of this embodiment will be described.

まず、図1(a)に示すように固定側磁性部材5の対向する脚部51,51の励磁コイル部61,63に各脚部51の磁極面の極性が異なるよう、例えば図において左側の脚部51の磁極がN極、右側の磁極がS極となるように電流を流して励磁すると、この励磁によって発生する磁束は、図示する磁路(I)に流れる。つまり左側の脚部51→対向する可動側磁性部材4の磁性体40の突出部40b→基部40a→右側の脚部51に対向する可動側磁性部材4の磁性体40の突出部40b→右側の脚部51→中央部50→左側の脚部50の磁路で流れることになる。   First, as shown in FIG. 1A, the polarity of the magnetic pole surface of each leg portion 51 is different from that of the exciting coil portions 61 and 63 of the opposing leg portions 51 and 51 of the fixed-side magnetic member 5, for example, on the left side in the figure. When excitation is performed by applying a current so that the magnetic pole of the leg 51 is N-pole and the right-side magnetic pole is S-pole, the magnetic flux generated by this excitation flows in the magnetic path (I) shown in the figure. That is, the left leg 51 → the protruding portion 40b of the magnetic body 40 of the movable member 4 facing the opposite side → the base 40a → the protruding portion 40b of the magnetic body 40 of the movable member 4 facing the right leg 51 → the right side of the protruding portion 40b. It flows in the magnetic path of the leg 51 → the central part 50 → the left leg 50.

一方、可動側磁性部材4の各永久磁石体41の磁束は図示する磁路(II)に流れる。つまり永久磁石体41→磁性体42→対向する脚部51→磁性体40の突出部40b→永久磁石体41の磁路で流れることになる。   On the other hand, the magnetic flux of each permanent magnet body 41 of the movable magnetic member 4 flows in the magnetic path (II) shown in the figure. That is, it flows in the magnetic path of the permanent magnet body 41 → the magnetic body 42 → the opposing leg portion 51 → the protruding portion 40 b of the magnetic body 40 → the permanent magnet body 41.

これにより励磁コイル部61,63の励磁による磁束は透磁率の低い永久磁石体41を通らない磁路を流れることになり、これにより高効率化が図れることになる。   As a result, the magnetic flux generated by the excitation of the exciting coil sections 61 and 63 flows through a magnetic path that does not pass through the permanent magnet body 41 having a low magnetic permeability, thereby achieving high efficiency.

ここで図1(b)に示すX方向側の脚部51,51の励磁コイル部61,63と、Y方向側の励磁コイル部62,64に励磁電流を流すために印加する電源電圧の周波数の比と位相差を制御することで、可動側磁性部材4をコイルばね8のばね力に抗した任意の方向に推力を与えて揺動させることができ、その結果シャフト3を通じて被駆動体を多様に駆動できる。   Here, the frequency of the power supply voltage applied in order to flow the excitation current through the exciting coil portions 61 and 63 of the X-direction side legs 51 and 51 and the Y-direction exciting coil portions 62 and 64 shown in FIG. By controlling the ratio and the phase difference, the movable-side magnetic member 4 can be swung by applying a thrust in an arbitrary direction against the spring force of the coil spring 8, and as a result, the driven body can be swung through the shaft 3. Can be driven in various ways.

尚図2は上述の周波数の比と、位相差を組み合わせによって得られ軌跡の例を示す。   FIG. 2 shows an example of a locus obtained by combining the above-described frequency ratio and phase difference.

ところで、図1(a),(b)に示す可動側磁性部材4は十字状の基部40aを持つ磁性体40を用いていたが、図3(a)、(b)に示すように円盤状の基部40a’及びこの円盤状の基部40a’の下面に一体に形成された環状の突出部40b’からなる磁性体40’と、環状突出部40bの下面部に形成された環状の下向き段部40c’に接着した円環状の永久磁石体41’と、この永久磁石体41’の下面に接着した環状の磁性体42’とで構成しても良い。この場合円環状の永久磁石体41’を用いるので、配置角度のずれなどを考慮する必要もなく、また一つの永久磁石体で、脚部51に対向する磁極を形成することができるので、永久磁石体数の削減が図れる上に組み込みも容易となり、更に永久磁石体の作成も容易で、可動側磁極部側に先端を配置するように十字状に形成した永久磁石体のように切り込みを設ける場合に比べて、磁束のロスも少なく、特性も安定してアクチュエータ1の性能向上も図れる。   By the way, the movable-side magnetic member 4 shown in FIGS. 1A and 1B uses a magnetic body 40 having a cross-shaped base 40a. However, as shown in FIGS. A magnetic body 40 'formed of an annular protrusion 40b' integrally formed on the lower surface of the base 40a 'and the disk-shaped base 40a', and an annular downward stepped portion formed on the lower surface of the annular protrusion 40b. You may comprise by the annular | circular shaped permanent magnet body 41 'adhere | attached on 40c', and the cyclic | annular magnetic body 42 'adhere | attached on the lower surface of this permanent magnet body 41'. In this case, since the annular permanent magnet body 41 ′ is used, there is no need to consider the displacement of the arrangement angle, and the magnetic pole facing the leg portion 51 can be formed with one permanent magnet body. The number of magnet bodies can be reduced, and assembling is easy, and the creation of permanent magnet bodies is also easy, and a notch is provided like a permanent magnet body formed in a cross shape so that the tip is arranged on the movable magnetic pole part side. Compared to the case, the loss of magnetic flux is small, the characteristics are stable, and the performance of the actuator 1 can be improved.

(a)は実施形態のケースに入れた状態の正面断面図、(b)はアクチュエータ部位の拡大斜視図である。(A) is front sectional drawing of the state put in the case of embodiment, (b) is an expansion perspective view of an actuator site | part. 実施形態の動作例の説明図である。It is explanatory drawing of the operation example of embodiment. (a)は可動側磁性部材の別の例を示す固定側磁性部材と可動側磁性部材の斜視図、(b)は同上の断面図である。(A) is a perspective view of the fixed side magnetic member and movable side magnetic member which show another example of a movable side magnetic member, (b) is sectional drawing same as the above.

符号の説明Explanation of symbols

1 アクチュエータ
2 ケース
3 シャフト
4 可動側磁性部材
40 磁性体
40a 基部
40b 突出部
40c 段部
41 永久磁石体
42 磁性体
5 固定側磁性部材
50 基部
51 脚部
61〜64 励磁コイル部
7 軸受部
8 コイルばね
DESCRIPTION OF SYMBOLS 1 Actuator 2 Case 3 Shaft 4 Movable side magnetic member 40 Magnetic body 40a Base part 40b Projection part 40c Step part 41 Permanent magnet body 42 Magnetic body 5 Fixed side magnetic member 50 Base part 51 61-64 Excitation coil part 7 Bearing part 8 Coil Spring

Claims (4)

両側脚部及び該両側脚部の一端間を橋絡する中央部からなる複数のコ字状の磁性体を、前記中央部の中心を軸として所定の角度で交差させた形状に構成される固定側磁性部材と、
前記固定側磁性部材の各脚部に巻回して両側脚部の他端を互に異なる磁極となるように励磁される励磁コイル部と、
前記脚部の他端上方に配されて前記中心と同軸の出力軸を中心として上面視で全方向に揺動自在に支持された可動側磁性部材とを備えてなり、
前記可動側磁性部材は前記脚部の磁極面にギャップを介して対向する可動側磁極部を有するとともに、各可動側磁極部に前記脚部の磁極面に対して対向方向に着磁された永久磁石体を備え、
前記励磁コイル部の励磁により生じる磁束が前記固定側磁性部材と前記可動側磁性部材とを介して流れる磁路と、前記永久磁石体により生じる磁束が前記可動側磁性部材と前記固定側磁性部材とを介して流れる磁路とを分離させて成ることを特徴とするアクチュエータ。
A fixed configuration in which a plurality of U-shaped magnetic bodies composed of both leg portions and a central portion bridging between the ends of both leg portions are crossed at a predetermined angle with the center of the central portion as an axis. A side magnetic member;
An exciting coil portion that is wound around each leg portion of the fixed-side magnetic member and is excited so that the other end of each side leg portion has a different magnetic pole,
A movable-side magnetic member disposed above the other end of the leg and supported so as to be swingable in all directions when viewed from above with an output shaft coaxial with the center;
The movable-side magnetic member has a movable-side magnetic pole portion opposed to the magnetic pole surface of the leg portion through a gap, and is permanently magnetized in a direction opposite to the magnetic pole surface of the leg portion by each movable-side magnetic pole portion. With a magnet body,
A magnetic path in which magnetic flux generated by excitation of the excitation coil portion flows through the fixed-side magnetic member and the movable-side magnetic member, and magnetic flux generated by the permanent magnet body includes the movable-side magnetic member and the fixed-side magnetic member, An actuator characterized by being separated from a magnetic path that flows through the.
前記永久磁石体の磁極面は、前記可動側磁極部の磁極面が前記脚部の磁極面に対面したときに一部のみが前記脚部の磁極面に対向することを特徴とする請求項1記載のアクチュエータ。 2. The magnetic pole surface of the permanent magnet body is only partially opposed to the magnetic pole surface of the leg portion when the magnetic pole surface of the movable magnetic pole portion faces the magnetic pole surface of the leg portion. The actuator described. 前記永久磁石体は円環状に形成されて前記脚部の磁極面に対向する可動側磁極部に亘るように可動側磁性部材に配されることを特徴とする請求項1又は2記載のアクチュエータ。 3. The actuator according to claim 1, wherein the permanent magnet body is formed in an annular shape and disposed on the movable side magnetic member so as to extend over the movable side magnetic pole portion facing the magnetic pole surface of the leg portion. 前記脚部の磁極面と、前記可動側磁極部の磁極面とを、同心の凹球面と、凸球面とで形成していることを特徴とする請求項1乃至4の何れか1項に記載のアクチュエータ。 The magnetic pole surface of the said leg part and the magnetic pole surface of the said movable side magnetic pole part are formed with the concentric concave spherical surface and the convex spherical surface, The any one of Claim 1 thru | or 4 characterized by the above-mentioned. Actuator.
JP2007044566A 2007-02-23 2007-02-23 Actuator Expired - Fee Related JP5118359B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015149843A (en) * 2014-02-07 2015-08-20 Nec東芝スペースシステム株式会社 Two-axis stepper apparatus
JP2018110529A (en) * 2018-04-17 2018-07-12 ミネベアミツミ株式会社 Vibration generator

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033654A (en) * 1989-05-29 1991-01-09 Seibu Electric & Mach Co Ltd Articular motion actuator
JP2000133091A (en) * 1998-10-29 2000-05-12 Matsushita Electric Works Ltd Switch with reset function
JP2000152597A (en) * 1998-11-16 2000-05-30 Shinko Electric Co Ltd Three-phase pulse motor
JP2003304676A (en) * 2002-04-09 2003-10-24 Shindengen Mechatronics Co Ltd Two-axle actuator and circuit and method for driving the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033654A (en) * 1989-05-29 1991-01-09 Seibu Electric & Mach Co Ltd Articular motion actuator
JP2000133091A (en) * 1998-10-29 2000-05-12 Matsushita Electric Works Ltd Switch with reset function
JP2000152597A (en) * 1998-11-16 2000-05-30 Shinko Electric Co Ltd Three-phase pulse motor
JP2003304676A (en) * 2002-04-09 2003-10-24 Shindengen Mechatronics Co Ltd Two-axle actuator and circuit and method for driving the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015149843A (en) * 2014-02-07 2015-08-20 Nec東芝スペースシステム株式会社 Two-axis stepper apparatus
JP2018110529A (en) * 2018-04-17 2018-07-12 ミネベアミツミ株式会社 Vibration generator

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