JP2008202959A5 - - Google Patents

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Publication number
JP2008202959A5
JP2008202959A5 JP2007036411A JP2007036411A JP2008202959A5 JP 2008202959 A5 JP2008202959 A5 JP 2008202959A5 JP 2007036411 A JP2007036411 A JP 2007036411A JP 2007036411 A JP2007036411 A JP 2007036411A JP 2008202959 A5 JP2008202959 A5 JP 2008202959A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007036411A
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JP2008202959A (ja
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Publication date
Application filed filed Critical
Priority to JP2007036411A priority Critical patent/JP2008202959A/ja
Priority claimed from JP2007036411A external-priority patent/JP2008202959A/ja
Priority to US12/068,397 priority patent/US20080225274A1/en
Publication of JP2008202959A publication Critical patent/JP2008202959A/ja
Publication of JP2008202959A5 publication Critical patent/JP2008202959A5/ja
Pending legal-status Critical Current

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JP2007036411A 2007-02-16 2007-02-16 振動検出装置 Pending JP2008202959A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007036411A JP2008202959A (ja) 2007-02-16 2007-02-16 振動検出装置
US12/068,397 US20080225274A1 (en) 2007-02-16 2008-02-06 Vibration detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007036411A JP2008202959A (ja) 2007-02-16 2007-02-16 振動検出装置

Publications (2)

Publication Number Publication Date
JP2008202959A JP2008202959A (ja) 2008-09-04
JP2008202959A5 true JP2008202959A5 (ja) 2008-10-16

Family

ID=39762326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007036411A Pending JP2008202959A (ja) 2007-02-16 2007-02-16 振動検出装置

Country Status (2)

Country Link
US (1) US20080225274A1 (ja)
JP (1) JP2008202959A (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275515A (ja) * 2007-05-01 2008-11-13 Sony Corp 振動検出装置
JP4715872B2 (ja) * 2008-06-10 2011-07-06 横河電機株式会社 遅延干渉計
WO2010029509A1 (en) 2008-09-12 2010-03-18 Nxp B.V. Transducer system
JP2010203860A (ja) * 2009-03-02 2010-09-16 Optical Comb Inc 振動計測装置及び振動計測方法
JP5336921B2 (ja) * 2009-05-11 2013-11-06 株式会社 光コム 振動計測装置及び振動計測方法
JP5363231B2 (ja) * 2009-07-28 2013-12-11 株式会社 光コム 振動計測装置及び振動計測方法
JP5531171B2 (ja) * 2009-09-11 2014-06-25 学校法人福岡大学 Ｍｅｍｓ測定装置
CN101865726B (zh) * 2010-04-30 2011-09-28 太原理工大学 一种迈克尔逊干涉仪的干涉条纹计数器
CN104101420B (zh) * 2013-04-01 2017-02-08 北京师范大学 振动样品内部反射点的微小振幅测量方法
US9456288B2 (en) * 2014-10-03 2016-09-27 Regal Beloit America, Inc. System and method for use in analyzing vibrations
US9992581B2 (en) * 2016-03-25 2018-06-05 Northrop Grumman Systems Corporation Optical microphone system
CN106052840B (zh) * 2016-05-25 2018-10-23 清华大学深圳研究生院 一种基于量子弱测量的声检测装置及声检测方法
CN105928605B (zh) * 2016-05-30 2018-10-23 清华大学深圳研究生院 一种检测水中声场信息的方法、装置及水下声传感器
JP6866723B2 (ja) * 2017-03-28 2021-04-28 沖電気工業株式会社 振動検知光ファイバセンサ及び振動検知方法
US11079230B2 (en) 2019-05-10 2021-08-03 Northrop Grumman Systems Corporation Fiber-optic gyroscope (FOG) assembly
US20240107239A1 (en) * 2022-09-26 2024-03-28 Aac Acoustic Technologies (Shenzhen) Co., Ltd. Mems optical microphone

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7187449B2 (en) * 2002-04-26 2007-03-06 Sony Precision Technology Inc. Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
US7315381B2 (en) * 2004-10-26 2008-01-01 Mitutoyo Corporation Monolithic quadrature detector
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer
US7379187B2 (en) * 2006-03-31 2008-05-27 Mitutoyo Corporation Detector configuration for interferometric distance measurement

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