JP2008198626A - 有機el装置 - Google Patents
有機el装置 Download PDFInfo
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- JP2008198626A JP2008198626A JP2008135169A JP2008135169A JP2008198626A JP 2008198626 A JP2008198626 A JP 2008198626A JP 2008135169 A JP2008135169 A JP 2008135169A JP 2008135169 A JP2008135169 A JP 2008135169A JP 2008198626 A JP2008198626 A JP 2008198626A
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- 238000004519 manufacturing process Methods 0.000 claims description 16
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
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- 239000004215 Carbon black (E152) Substances 0.000 description 2
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- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 2
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- 230000006866 deterioration Effects 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
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- 229910052700 potassium Inorganic materials 0.000 description 2
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- 230000008569 process Effects 0.000 description 2
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- 239000004332 silver Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- CMSGUKVDXXTJDQ-UHFFFAOYSA-N 4-(2-naphthalen-1-ylethylamino)-4-oxobutanoic acid Chemical compound C1=CC=C2C(CCNC(=O)CCC(=O)O)=CC=CC2=C1 CMSGUKVDXXTJDQ-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000733 Li alloy Inorganic materials 0.000 description 1
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- YRITVODHCMDVSY-VEGPOJNRSA-N [(2r,3s,5r)-5-(6-aminopurin-9-yl)-2-(phosphonooxymethyl)oxolan-3-yl] [(2r,3s)-3-hydroxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methyl hydrogen phosphate Chemical compound O=C1NC(=O)C(C)=CN1C1O[C@H](COP(O)(=O)O[C@@H]2[C@H](O[C@H](C2)N2C3=NC=NC(N)=C3N=C2)COP(O)(O)=O)[C@@H](O)C1 YRITVODHCMDVSY-VEGPOJNRSA-N 0.000 description 1
- JFBZPFYRPYOZCQ-UHFFFAOYSA-N [Li].[Al] Chemical compound [Li].[Al] JFBZPFYRPYOZCQ-UHFFFAOYSA-N 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- XOUJXRJKQZJMEW-UHFFFAOYSA-N lithium scandium Chemical compound [Li].[Sc] XOUJXRJKQZJMEW-UHFFFAOYSA-N 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
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- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Abstract
【解決手段】本発明の有機電界発光素子の陰極は、陰極下層13−1及び陰極上層13−2から成る2層積層構造を有しており、陰極上層13−2は陰極下層13−1が表面に露出しないように、その上面及び周縁面を含む全体を被覆するように成膜されている。
【選択図】図1
Description
本発明の有機電界発光素子の製造方法は、陰極下層及び陰極上層から成る2層積層構造を有する陰極を備えた有機電界発光素子の製造方法において、陰極下層及び陰極上層のそれぞれを異なるマスクを用いてパターン形成する際に、陰極上層が表面に露出しないように陰極上層が陰極下層を被覆するように形成する工程を備えることを特徴とする。
また、同図(A)に示すように、封止剤14はドライバ領域18と平面的に重複するように設けられることが好ましい。かかる構造では、ドライバ領域18に封止剤が重複することによりドライバ領域への水分や不純物の混入が有効に防止され表示パネルの安定した良好な駆動が確保される。更に、封止剤14は、ドライバ領域18に対する外部からの実装接続部と平面的に重複することが好ましい。かかる構造では接続部の損傷が防止される。
(実施例)
次に、図2を参照して有機ELパネルの製造工程について説明する。
陰極上層13−2はドライバ領域18と平面的に重複しないように封止剤14はドライバ領域18と平面的に重複されるようにパターニングされることが好ましい。
Claims (9)
- 陰極下層及び陰極上層から成る2層積層構造を有する陰極を備えた有機電界発光素子において、当該陰極上層は陰極下層が表面に露出しないように被覆成膜されていることを特徴とする有機電界発光素子。
- 前記陰極下層の仕事関数は陰極上層の仕事関数よりも小さいことを特徴とする請求項1に記載の有機電界発光素子。
- 請求項1又は請求項2に記載の有機電界発光素子を備えた表示パネルであって、前記陰極上層を被覆する封止剤を設けたことを特徴とする表示パネル。
- 請求項1乃至請求項2のうち何れか1項に記載の有機電界発光素子を各画素毎に備えた表示パネルであって、前記陰極上層が形成される領域は、各画素の駆動制御を行うドライバが形成される領域に対して平面的に重複しない範囲に形成されることを特徴とする表示パネル。
- 前記陰極上層を被覆する封止剤が設けられていることを特徴とする請求項4記載のパネル。
- 前記陰極上層を被覆する封止剤が設けられ、該封止剤が前記ドライバが形成される領域に対して平面的に重複するように形成されることを特徴とする請求項4記載の表示パネル。
- 前記が画素の夫々がアクティブマトリクス方式により制御されることを特徴とする請求項4乃至6のいずれかに記載の表示パネル。
- 陰極下層及び陰極上層から成る2層積層構造を有する陰極を備えた有機電界発光素子の製造方法において、陰極下層及び陰極上層のそれぞれを異なるマスクを用いてパターン形成する際に、陰極下層が表面に露出しないように陰極上層が陰極下層を被覆するように形成する工程を備えた有機電界発光素子の製造方法。
- 陰極下層及び陰極上層から成る2層積層構造を有する陰極を備えた有機電界発光素子の製造方法において、シャドーマスク法を利用して有機薄膜が表面に露出しないようにその上に陰極下層をパターン形成し、さらに、フォトリソグラフィーを利用して陰極下層が表面に露出しないようにその上に陰極上層をパターン形成する工程を備えた有機電界発光素子の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008135169A JP2008198626A (ja) | 2008-05-23 | 2008-05-23 | 有機el装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008135169A JP2008198626A (ja) | 2008-05-23 | 2008-05-23 | 有機el装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21805099A Division JP4172105B2 (ja) | 1999-07-30 | 1999-07-30 | 表示パネル |
Publications (1)
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JP2008198626A true JP2008198626A (ja) | 2008-08-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008135169A Pending JP2008198626A (ja) | 2008-05-23 | 2008-05-23 | 有機el装置 |
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JP (1) | JP2008198626A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022130108A1 (ja) * | 2020-12-18 | 2022-06-23 | 株式会社半導体エネルギー研究所 | 表示装置および表示装置の作製方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140088U (ja) * | 1984-02-24 | 1985-09-17 | 富士通株式会社 | 表示装置の構造 |
JPH1165487A (ja) * | 1997-08-21 | 1999-03-05 | Seiko Epson Corp | アクティブマトリクス型表示装置 |
JPH1174073A (ja) * | 1997-08-29 | 1999-03-16 | Seiko Epson Corp | アクティブマトリクス型表示装置 |
-
2008
- 2008-05-23 JP JP2008135169A patent/JP2008198626A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140088U (ja) * | 1984-02-24 | 1985-09-17 | 富士通株式会社 | 表示装置の構造 |
JPH1165487A (ja) * | 1997-08-21 | 1999-03-05 | Seiko Epson Corp | アクティブマトリクス型表示装置 |
JPH1174073A (ja) * | 1997-08-29 | 1999-03-16 | Seiko Epson Corp | アクティブマトリクス型表示装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022130108A1 (ja) * | 2020-12-18 | 2022-06-23 | 株式会社半導体エネルギー研究所 | 表示装置および表示装置の作製方法 |
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