JP2008192776A5 - - Google Patents

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Publication number
JP2008192776A5
JP2008192776A5 JP2007024911A JP2007024911A JP2008192776A5 JP 2008192776 A5 JP2008192776 A5 JP 2008192776A5 JP 2007024911 A JP2007024911 A JP 2007024911A JP 2007024911 A JP2007024911 A JP 2007024911A JP 2008192776 A5 JP2008192776 A5 JP 2008192776A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2007024911A
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JP2008192776A (ja
JP4965273B2 (ja
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Priority to JP2007024911A priority Critical patent/JP4965273B2/ja
Priority claimed from JP2007024911A external-priority patent/JP4965273B2/ja
Priority to KR1020080006794A priority patent/KR100935485B1/ko
Priority to US12/020,655 priority patent/US8113084B2/en
Publication of JP2008192776A publication Critical patent/JP2008192776A/ja
Publication of JP2008192776A5 publication Critical patent/JP2008192776A5/ja
Application granted granted Critical
Publication of JP4965273B2 publication Critical patent/JP4965273B2/ja
Active legal-status Critical Current
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JP2007024911A 2007-02-02 2007-02-02 載置装置 Active JP4965273B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007024911A JP4965273B2 (ja) 2007-02-02 2007-02-02 載置装置
KR1020080006794A KR100935485B1 (ko) 2007-02-02 2008-01-22 탑재장치
US12/020,655 US8113084B2 (en) 2007-02-02 2008-01-28 Mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007024911A JP4965273B2 (ja) 2007-02-02 2007-02-02 載置装置

Publications (3)

Publication Number Publication Date
JP2008192776A JP2008192776A (ja) 2008-08-21
JP2008192776A5 true JP2008192776A5 (ja) 2009-12-24
JP4965273B2 JP4965273B2 (ja) 2012-07-04

Family

ID=39675083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007024911A Active JP4965273B2 (ja) 2007-02-02 2007-02-02 載置装置

Country Status (3)

Country Link
US (1) US8113084B2 (ja)
JP (1) JP4965273B2 (ja)
KR (1) KR100935485B1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9273761B2 (en) * 2012-05-03 2016-03-01 Mau-Hsiang Wu XYθ precision alignment platform
CN104440810B (zh) * 2014-10-29 2015-09-16 哈尔滨工业大学 基于平面正交解耦的航空发动机装配测量系统二维驱动装置
CN208507710U (zh) * 2018-07-23 2019-02-15 苏州迈为科技股份有限公司 一种太阳能电池片贴片装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6470734A (en) * 1987-07-14 1989-03-16 Mitsubishi Electric Corp Z-theta fine adjustment table
US5198752A (en) * 1987-09-02 1993-03-30 Tokyo Electron Limited Electric probing-test machine having a cooling system
JP3086005B2 (ja) * 1991-05-14 2000-09-11 オリンパス光学工業株式会社 位置決めステージ装置
US5489853A (en) * 1993-05-19 1996-02-06 Tokyo Electron Limited Testing apparatus and connection method for the testing apparatus
US6140828A (en) * 1997-05-08 2000-10-31 Tokyo Electron Limited Prober and probe method
JP4490521B2 (ja) * 1999-01-29 2010-06-30 東京エレクトロン株式会社 回転駆動機構及び被検査体の載置機構並びに検査装置
JP4310504B2 (ja) * 1999-02-25 2009-08-12 Ｔｄｋ株式会社 ワーク搭載用テーブルのθ軸調整機構
JP4721247B2 (ja) * 2001-03-16 2011-07-13 東京エレクトロン株式会社 プローブ方法及びプローブ装置
JP4300003B2 (ja) * 2002-08-07 2009-07-22 東京エレクトロン株式会社 載置台の駆動装置及びプローブ方法
JP4391744B2 (ja) * 2002-12-27 2009-12-24 東京エレクトロン株式会社 移動式プローブカード搬送装置、プローブ装置及びプローブ装置へのプローブカードの搬送方法
JP2005189202A (ja) * 2003-12-26 2005-07-14 Hioki Ee Corp プローブ駆動機構

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