JP2008192747A - Carrying tool of article, apparatus and method for reversing article, and apparatus and method for manufacturing flat panel display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying tool of articles, capable of preventing displacement of the articles to be manufactured and protecting the articles not only at reversal but also at conveyance, and to provide a reversing apparatus of articles, a reversing method of articles, a manufacturing apparatus of a flat panel display, and a manufacturing method of a flat panel display. <P>SOLUTION: The carrying tool of articles clamps the articles by a pair of carrying members. The carrying tool comprises first and second carrying members that sandwich the articles while the articles stand oppositely; and a connection means that is provided at least at one periphery, in the first or second carrying member, and connects the first carrying member to the second one by sandwiching the articles. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an article transporter, an article inversion apparatus, an article inversion method, a flat panel display manufacturing apparatus, and a flat panel display manufacturing method.

  The manufacturing process of flat panel displays, the process of mounting electronic components on circuit boards, the process of processing game boards such as pachinko machines, and the process of painting and marking three-dimensional objects In order to process or process the front and back of an article to be processed, it is necessary to invert the article (see, for example, Patent Documents 1 and 2).

  Here, in the techniques disclosed in Patent Documents 1 and 2 and the like, the positional deviation of the article at the time of reversal is not taken into consideration, and the positioning has to be performed again during subsequent processing and processing. Also, protection of the article at the time of reversal is not taken into consideration, and there is a risk of damaging the article when, for example, a glass substrate used in a liquid crystal display device or the like is transported or reversed. It was.

  Therefore, a technique has been proposed in which an article to be manufactured is sandwiched between a pair of holding plates and reversed (for example, see Patent Document 3).

However, in the technique disclosed in Patent Document 3, the positional deviation of the article and the positional deviation of the holding plate itself in the conveyance before and after the reversing device are not considered. For this reason, there is a possibility that the substrate (article to be manufactured) sandwiched between the holding plates may be displaced during transportation and the position may be changed or the substrate may be damaged. In addition, it is difficult to accurately position the substrate (article to be manufactured) unless the position of the holding plate that is displaced during conveyance is repositioned.
JP-A-11-286325 Japanese Patent Laid-Open No. 2005-246091 JP 2002-302248 A

  The present invention relates to an article conveying tool, an article inversion device, an article inversion method, and a flat panel display capable of preventing or protecting the positional deviation of an article to be manufactured not only at the time of inversion but also at the time of conveyance. A manufacturing apparatus and a manufacturing method of a flat panel display are provided.

  According to one aspect of the present invention, there is provided an article transporter that sandwiches an article with a pair of transport members, the first transport member and the second transport member facing each other with the article sandwiched therebetween, and the first transport member Provided at a peripheral portion of at least one of the transport member or the second transport member, and provided with connection means for connecting the first transport member and the second transport member while sandwiching the article. An article transporter characterized by the above is provided.

  According to another aspect of the present invention, there is provided a reversing device for an article that grips a transporting tool sandwiching an article and rotates the transporting tool to invert the transporting tool. An article reversing device is provided, which is a transporter for any article.

  Further, according to another aspect of the present invention, any one of the above-described article transporters sandwiching the article is supported substantially horizontally, and the supported article transporter is gripped and rotated. An article reversal method is provided, wherein the article transporter is inverted.

  According to another aspect of the present invention, there is provided a flat panel display manufacturing apparatus including the above-described article inverting device.

  Furthermore, according to another aspect of the present invention, there is provided a method for manufacturing a flat panel display, characterized in that the method for inverting an article is used.

  ADVANTAGE OF THE INVENTION According to the present invention, an article transport tool, an article inversion device, an article inversion method, and a flat panel capable of preventing or protecting the positional deviation of an article to be manufactured not only at the time of inversion but also at the time of conveyance. A display manufacturing apparatus and a flat panel display manufacturing method are provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
Drawing 1 is a mimetic diagram for explaining transportation implement 1 concerning an embodiment of the invention.
In addition, this drawing shows a state in which the transport tool 1 including the first transport member 2 and the second transport member 3 is connected to each other while sandwiching the substrate G.
For convenience of explanation, an article to be manufactured will be described as a substrate G having a rectangular shape.

  The planar shape of the conveyance member 2 and the conveyance member 3 is substantially rectangular. In addition, the outer diameter of at least one of the transport member 2 and the transport member 3 is larger than the outer diameter of the substrate G. Therefore, when the conveyance member 2 and the conveyance member 3 are connected while holding the substrate G, the substrate G does not come out of the conveyance member 2 or the conveyance member 3 in a plane, and thus is protected from an external force or the like. Will be. In this case, the outer diameter dimensions of the transport member 2 and the transport member 3 may be substantially the same as the outer diameter dimension of the substrate G. However, from the viewpoint of emphasizing protection of the substrate G, it is preferable that the outer diameter dimensions of the transport member 2 and the transport member 3 exceed the outer diameter dimension of the substrate G. In addition, it is more preferable that the outer diameter dimensions of the transport member 2 and the transport member 3 are larger than the outer diameter dimension of the substrate G.

  Moreover, it is preferable that the surface with which at least one board | substrate G of the conveyance member 2 or the conveyance member 3 contact | abuts is flat. If at least one surface is flat, the substrate G can be protected because it is sandwiched in accordance with this. In addition, it is still more preferable if the surface where the board | substrate G of the conveyance member 2 and the conveyance member 3 contacts is flat. In addition, the surface of the substrate G can be protected by contacting with an elastic member or the like. In this case, you may make it provide an elastic member partially.

  Examples of the substrate G include various articles including a glass substrate for manufacturing a flat panel display, a wafer such as a semiconductor or dielectric for manufacturing an electronic component, and a game substrate such as a pachinko machine. it can. Further, for convenience of explanation, the planar shape of the conveying member 2 and the conveying member 3 is substantially rectangular, but the shape is not limited to this, and an arbitrary shape can be selected. Moreover, in FIG. 1, although the conveyance member 2 and the conveyance member 3 are made into the plate-shaped body, it is not necessarily limited to this and arbitrary shapes can be selected.

FIG. 2 is a schematic cross-sectional view for explaining the connection between the conveying member 2 and the conveying member 3.
As shown in FIG. 2, a groove 2c is provided on the peripheral edge of the conveying member 2, and a claw 4 is provided on the groove 2c. Further, a pin 5 is provided so as to protrude into the groove 2c, and the claw 4 can swing around the pin 5. An urging means 6 for urging one end of the claw 4 is provided in the groove 2c, and the other end of the claw 4 can be urged toward the conveying member 3 side. The urging means 6 can be exemplified by the compression spring shown in FIG. 2, but is not limited to this, as long as the other end of the claw 4 can be urged toward the conveying member 3. Good. Examples of such include springs such as a tension spring and a torsion coil spring, and elastic members such as rubber.

  In the vicinity of the end surface of the claw 4 on the conveying member 3 side, a contact surface 4 a substantially parallel to the main surface of the conveying member 3 is provided. The conveying member 3 is also provided with a contact surface 3c substantially parallel to the main surface. Therefore, the conveyance member 2 and the conveyance member 3 are mechanically connected by the contact surface 4a and the contact surface 3c contacting each other.

  The conveying member 2 is provided with a positioning hole 7a substantially perpendicular to the main surface thereof. A positioning pin 7 b is provided at a position facing the hole 7 a of the conveying member 3. Therefore, the relative positional relationship between the conveying member 2 and the conveying member 3 can be obtained by fitting the positioning pins 7b into the holes 7a. Note that the holes 7a and the positioning pins 7b are not necessarily required, but are preferably provided in consideration of misalignment caused by vibration during conveyance or reversal.

Next, connection and separation procedures of the conveying member 2 and the conveying member 3 will be described.
When the conveying member 2 and the conveying member 3 are separated from each other when they are brought close to each other for connection, the positioning pin 7b is fitted into the hole 7a so that the conveying member 2 and the conveying member 3 The relative positional relationship is determined. On the other hand, since the corner 3 d of the conveying member 3 contacts the inclined portion 4 b of the claw 4, the claw 4 is swung toward the outer side of the conveying member 3 against the action of the urging means 6. When the abutting portion passes the inclined portion 4b, the claw 4 swings toward the inner side of the conveying member 3 by the action of the biasing means 6, so that the abutting surface 4a and the abutting surface 3c are brought into contact with each other. The conveying member 2 and the conveying member 3 are mechanically connected to each other.

  When the claw 4 is pushed in the direction of the arrow B in the figure in a state where the conveyance member 2 and the conveyance member 3 are connected, the claw 4 swings in a direction in which the contact surface 4a and the contact surface 3c are separated from each other. . In this state, if the conveyance member 2 and the conveyance member 3 are moved in the direction of separating, the conveyance member 2 and the conveyance member 3 can be separated. Note that the force applied in the direction of the arrow B only needs to be larger than the urging force by the urging means 6, and for example, an air cylinder, a solenoid, or a device that rotates a plate cam with a motor is appropriately selected. Can do.

  Note that the mechanical connecting means described in FIG. 2 may be provided in pairs on opposite sides of the conveying member 2 and the conveying member 3, but the size of the conveying member 2 and the conveying member 3, and the necessary connection The number and the arrangement thereof can be appropriately selected in consideration of the strength and the like.

  The claw 4, the biasing means 6, and the pin 5 may be provided on at least one peripheral edge of the transport member 2 or the transport member 3. However, the structure of the conveyance member 2 and the conveyance member 3 can also be made the same by providing the claw 4, the biasing means 6, and the pin 5 in the conveyance member 2 and the conveyance member 3 without permission. By doing so, the conveyance tool can be shared.

  Further, the connection between the conveying member 2 and the conveying member 3 is not limited to that described with reference to FIG. 2. For example, a groove portion is provided in the positioning pin 7 b and the tip of the plunger is applied to the groove portion. Etc. can be appropriately changed. Further, the connection means itself is not limited to a mechanical one, and may use, for example, a magnetic force, an electromagnetic force, a vacuum adsorption force, or the like.

  In the present embodiment, since the transport member 2 and the transport member 3 are connected while sandwiching the substrate G, the positional deviation of the substrate G during transport or delivery can be prevented. For this reason, repositioning after transport can be omitted, and productivity can be improved.

  Moreover, since it can be made to convey so that both surfaces of the board | substrate G may be covered, the dust attached to a board | substrate can also be reduced.

  Next, an article conveying and reversing device according to an embodiment of the present invention will be described. For convenience of explanation, the conveyance reversing device 10 in the substrate cutting process of the liquid crystal display panel will be described as an example.

FIG. 3 is a schematic diagram for explaining the conveyance reversing device 10 according to the embodiment of the present invention.
FIG. 4 is a schematic diagram for explaining the arm portion of the transport device 11, and FIG. 5 is a schematic diagram for explaining the reversing device 12.
As shown in FIG. 3, the transport reversing device 10 is provided with a transport device 11 and a reversing device 12. A scribing device 15 is provided on the left side of the transport device 11, and a break device 16 is provided on the right side. On the surface of the scribing device 15 and break device 16 on the conveying device 11 side, a table 15 a and a table 16 a on which the conveying member 2 or the conveying member 3 can be placed are provided.

The scribing device 15 is a device for putting a half-cut scrub line on the substrate G using a laser or a diamond cutter. The break device 16 is a device for cutting the substrate G by pressing a tool from the surface opposite to the surface on which the scrub line is entered. In addition, the substrate G placed on the transport member 2 or the transport member 3 on the table 15 a and the table 16 a is carried into the apparatus, the substrate G is unloaded from the apparatus, and is placed on the transport member 2 or the transport member 3. A transfer device that can be placed is provided for each. Since known devices can be applied to the scribing device 15 and the break device 16, the description thereof is omitted.
The transport device 11 includes a rail portion 11a, a support portion 11b, and an arm portion 11c (see FIG. 4). As shown in FIG. 3, the table 15a, the reversing device 12, and the table 16a are provided on a straight line, and the rail portion 11a is provided so as to cross over the respective center positions. Moreover, both ends of the rail part 11a are supported by the support part 11b.

  The arm portion 11c is movably provided on the rail portion 11a, and can be moved and stopped at any position on the rail portion 11a by a driving means such as a ball screw and a motor (not shown). Further, the rail portion 11a can be moved while maintaining the posture of the arm portion 11c in the rotational direction by a guide mechanism (not shown). As the rail part 11a provided with the drive means which is not illustrated, a thing like the robot of 1 axis | shaft control can be illustrated, for example.

  The transport device 11 is not limited to the illustrated one, and a device having a transport function (for example, a SCARA robot) can be selected as appropriate.

  As shown in FIG. 4, gripping means 11d is provided near the lower end of the arm portion 11c. The gripping means 11d can grip the transport member 2 and the transport member 3 with the transport member 2 and the transport member 3 alone or with the substrate G interposed therebetween. 4A shows a case where the conveyance member 2 is gripped alone (the same applies when the conveyance member 3 is held alone), and FIG. 4B shows a case where the conveyance member 2 and the conveyance member sandwich the substrate G. 3 is a schematic view illustrating the case of gripping 3. FIG. The same applies to the conveyance member 20 and the conveyance member 30 described later (see FIG. 10).

  The gripping means 11d only needs to be able to grip the transport member 2 and the transport member 3, and examples thereof include a mechanical gripping means such as an air chuck, a gripping means using an electromagnet, and the like. Can do. Further, the gripping place is not limited to the peripheral portion of the transporting member 2 and the transporting member 3. For example, the transporting member 2 and the transporting member 3 are provided with a convex portion or a hole and gripped there. May be.

  A base portion 11e is provided at the upper end portion of the arm portion 11c, and the base portion 11e can move on the rail portion 11a. The base portion 11e is provided with lifting means (not shown) so that the arm portion 11c can be raised and lowered. Therefore, the conveying member 2 and the conveying member 3 can be moved up and down relatively, and the above-described connection or separation between the conveying member 2 and the conveying member 3 and the delivery in the table 15a, the reversing device 12, and the table 16a. And so on.

  As shown in FIG. 5, the reversing device 12 is provided with a reversing means 13 and a supporting means 14. The reversing unit 13 is provided with a pair of transporting members 2 and a gripping unit 13 a that can grip the transporting member 3 with the substrate G interposed therebetween. The claw portion 13b of the gripping means 13a can be opened and closed in the direction of the arrow Z1 with an air cylinder or the like, for example, and can grip the transport member 2 and the transport member 3 with the substrate G interposed therebetween. Further, the gripping means 13a can be moved in the direction of the arrow X by rotating the ball screw 13c with the motor 13d. For this reason, as will be described later, the transfer device 11 can retract the transfer member 2 and the transfer member 3 with the substrate G sandwiched in and out of the reversing device 12 so as not to get in the way. Then, the conveyance member 2 and the conveyance member 3 sandwiching the substrate G can be reversed by being rotated in the direction of the arrow R1 by the motor 13e.

  The support means 14 is provided with moving means capable of moving the support member 8 provided at the tip in the direction of the arrow Z2. As the moving means, for example, an air cylinder can be used. However, the present invention is not limited to this, and for example, one using a motor or one using a hydraulic cylinder can be selected as appropriate. By raising the support member 8 to a predetermined position, the transport member 2 or the transport member 3 located on the support means 14 side can be supported. Therefore, the conveyance member 2 and the conveyance member 3 sandwiching the substrate G can be supported horizontally.

  Further, it is only necessary that the transport member 2 and the transport member 3 sandwiching the substrate G can be supported substantially horizontally, and the support position is not limited to the central portion of the transport member 2 and the transport member 3. In that case, a support member 8 having a configuration suitable for the position to be supported may be provided at the tip of the support means 14.

  Further, if the transport member 2 and the transport member 3 sandwiching the substrate G can be supported substantially horizontally, it is not necessary to separately provide the support means 14. For example, among the claw portions 13b of the gripping means 13a, the transport member 2 and the transport member 3 that sandwich the substrate G with the lower claw portions may be supported substantially horizontally. In that case, the upper claw portion of the claw portion 13b of the gripping means 13a is released so that the transport member 2 and the transport member 3 sandwiching the substrate G can be carried out upward, and the transport including the substrate G is sandwiched. What is necessary is just to carry out the member 2 and the conveyance member 3 in a horizontal direction.

Next, the board | substrate parting process of the liquid crystal display panel using the conveying tool 1 concerning this Embodiment is demonstrated.
FIG. 6 is a schematic cross-sectional view for explaining a substrate which is an assembly of liquid crystal display panels. As shown in FIG. 6, the substrate G is formed by bonding the array 17 and the color filter 18 together. The array 17 is obtained by forming a pixel array having a plurality of pixels on the surface of a glass substrate made of clean alkali-free glass. The color filter 18 is formed by forming fine pixels of three primary colors of RGB (red, green, and blue) on a glass substrate.

FIG. 7 is a flowchart for explaining the substrate cutting step.
From the viewpoint of production efficiency, a single liquid crystal panel is manufactured by creating a substrate G that is an aggregate of a single liquid crystal panel and dividing it.
For example, first, as shown on the left side of FIG. Thereafter, the substrate G is cut into strips by the break device 16 along the scribe line L as shown in the center diagram of FIG. Thereafter, similarly, the strip-shaped substrate is divided into a single liquid crystal panel as shown on the right side of FIG. At this time, in the break device 16, the substrate is divided by pressing a tool from the surface opposite to the surface on which the scribe line L enters. Here, since both the scribing device 15 and the break device 16 are usually processed from the upper side of the substrate G, it is necessary to reverse the substrate G during the transfer between the scribing device 15 and the break device 16.

  For convenience of explanation, the substrate G is divided by a single scribing process and a break process. However, since two glass substrates (array 17 and color filter 18) are actually bonded, Dividing requires a total of two scribes and breaks.

FIG. 8 is a flowchart for explaining the procedure for dividing the substrate G into strips.
As shown in FIG. 8, first, scribing is performed on the surface of the substrate G carried into the scribing device 15 on the array 17 side. Then, the reversing device 12 performs reversal while the material is conveyed to the break device 16 that performs break processing. The substrate G from which the array 17 has been divided by the break processing is transferred to the scribing device 15, and this time, the surface on the color filter 18 side is subjected to scribing. Then, the reversing device 12 performs reversal while the material is conveyed to the break device 16 that performs break processing. Thereafter, the break device 16 performs break processing to divide the substrate G into strips.

FIG. 9 is a schematic diagram for explaining conveyance by the conveyance member 2 and the conveyance member 3.
First, as shown in FIG. 9A, the substrate G that has been subjected to the scribing process is unloaded from the scribing device 15 and placed on the transport member 3 placed on the table 15a.

  Next, as illustrated in FIG. 9B, the transport member 11 is moved onto the substrate G by the transport device 11 and the transport member 2 is lowered to connect the transport member 2 and the transport member 3. Then, after the transport member 2 is released, the transport member 2 and the transport member 3 sandwiching the substrate G are gripped. Thereafter, the transport device 11 raises the transport member 2 and the transport member 3 sandwiching the substrate G, and moves the transport member 2 and the reversing device 12 upward.

  Next, as shown in FIGS. 8C and 8D, the transport member 2 and the transport member 3 sandwiching the substrate G are lowered and transferred to the support means 14. The conveying member 2 and the conveying member 3 sandwiching the delivered substrate G are integrally rotated (reversed) by 180 ° by the reversing device 12.

The inversion operation in the inversion device 12 will be further described with reference to FIG.
When the carrying member 2 and the carrying member 3 sandwiching the substrate G are carried into the reversing device 12, the gripping means 13a is located on the motor 13e side so as not to get in the way. Moreover, the position of the support member 8 of the support means 14 exists in the raising end (position which can be handed over to the holding means 13a).

In such a state, the conveyance member 2 and the conveyance member 3 sandwiching the substrate G are lowered and transferred to the support member 8.
Next, the arm portion 11 c of the transport device 11 is retracted outside the rotation (reversal) radius of the reversing device 12. Further, the gripping means 13a is moved toward the transport members 2 and 3 and the claw portion 13b is closed to grip the transport members 2 and 3 sandwiching the substrate G.
Next, the support member 8 of the support means 14 and the conveyance tool 1b are separated from each other, and the support member 8 is retracted outside the rotation (reversal) radius of the reversing device 12.
Next, the motor 13e is operated to rotate (invert) the transport members 2 and 3 sandwiching the substrate G by 180 °.
Next, the support member 8 of the support means 14 is raised to support the transport members 2 and 3 sandwiching the substrate G. Thereafter, the claw portion 13b is opened, and the gripping means 13a is moved to the motor 13e side.
Next, the arm portion 11c of the transport device 11 is lowered, and the transport members 2 and 3 sandwiching the substrate G are gripped by the gripping means 11d.

Next, the arm part 11c is raised and the transport members 2 and 3 sandwiching the substrate G are moved onto the table 16a.
Next, as shown in FIGS. 8E and 8F, the arm portion 11c is lowered and the transport members 2 and 3 sandwiching the substrate G are placed on the table 16a. Then, the conveying member 3 is raised by the arm portion 11c while pushing the claw 4 in the direction of arrow B in FIG. The board | substrate G on the conveyance member 2 is carried in in the break apparatus 16, and a break process is performed. Thereby, the division of the surface on the array 17 side is completed.

  Next, the substrate G that has been subjected to the break processing is placed on the transport member 2 placed on the table 16a. Then, the conveying member 2 is lowered to connect the conveying member 2 and the conveying member 3. Then, after the transport member 2 is released, the transport member 2 and the transport member 3 sandwiching the substrate G are gripped.

  Next, the transport members 2 and 3 sandwiching the substrate G are moved and placed on the table 15a. Thereafter, the surface on the color filter 18 side is divided by the above-described procedure, and the substrate G is divided.

  Thereafter, if necessary, a liquid crystal display panel having a desired size can be obtained by repeating this.

  As described above, in the substrate dividing step of the liquid crystal display panel, the scribe-processed one or one of the glass substrates divided is conveyed or reversed. Therefore, it is easy to damage, and it is important to protect the substrate G that is being transferred and reversed.

  As described above, according to the present embodiment, since the substrate G can be transported and reversed while being sandwiched between the transport members 2 and 3, an external force is applied to the substrate G and the substrate G is damaged, Can be prevented from shifting. In particular, if the substrate G is sandwiched so that conveyance and reversal can be performed while maintaining flatness, the effect of preventing breakage and misalignment can be greatly improved. As a result, production efficiency and product yield can be greatly improved.

  Moreover, since it can be made to convey so that both surfaces of the board | substrate G may be covered, the dust attached to the board | substrate G can also be reduced.

  Further, since the substrate G can be conveyed and reversed while being sandwiched, the positional deviation of the substrate G itself can be reduced.

Next, the manufacturing method of the flat panel display which concerns on embodiment of this invention is demonstrated.
For convenience of explanation, a manufacturing process of a TFT (Thin Film Transistor) color liquid crystal display panel will be described.

  The manufacturing process of the TFT color liquid crystal display panel includes a TFT array forming process, a color filter forming process, an alignment film forming process, a substrate bonding process, a liquid crystal injection process, and a substrate cutting process.

  First, in the TFT array forming step, a pixel array having a plurality of pixels is formed on the surface of a glass substrate made of clean alkali-free glass. The pixels constituting this pixel array have a TFT transistor, a display electrode, and a storage capacitor, and can be formed using a lithography technique. Note that a known technique can be applied to the formation of the TFT transistor, the display electrode, the storage capacitor, etc., and the description thereof will be omitted.

  Next, in the color filter forming step, a color filter is formed on the surface of the glass substrate that forms a pair with the glass substrate on which the pixels are formed. The color filter forming method includes a printing method, an electrodeposition method, a patterning method, and the like, but since a known technique can be applied to these methods, description thereof is omitted.

  Next, in the alignment film forming step, a polyimide film (transparent electrode) is laminated on the pixel and the color filter using a CVD (Chemical Vapor Deposition) method or the like, and the polyimide film is formed using a rubbing roller or the like. An alignment film is formed by aligning in the direction. In addition, about the technique used for thin film formation, rubbing, etc., since a known technique is applicable, the description is abbreviate | omitted.

  Next, in the substrate bonding step, a sealing agent is applied on the alignment film, and the glass on which the pixels are formed and the glass substrate on which the color filters are formed are bonded to each other. At this time, the alignment films are bonded so that the alignment directions are parallel to form a normally white. In addition, about the technique used for this board | substrate bonding, since a known technique can be applied, the description is abbreviate | omitted.

  Next, in the liquid crystal injection step, liquid crystal is injected into the gap between the two glass substrates formed in the above-described substrate bonding step. The liquid crystal injection method includes a vacuum injection method and the like, but since a known technique can be applied, description thereof is omitted.

  Through the above steps, an assembly of liquid crystal display panels in which the pixels and the color filter face each other with the liquid crystal interposed therebetween is formed. This is the substrate G described in FIG.

  Next, in the substrate dividing step described above, the aggregate of liquid crystal display panels is divided into liquid crystal display panels having a desired size.

This completes the production of the TFT color liquid crystal display panel.
According to the present embodiment, as described above, the breakage and the positional deviation of the substrate G in the substrate cutting step can be significantly suppressed. As a result, production efficiency and product yield can be greatly improved.

  Moreover, since it can be made to convey so that both surfaces of the board | substrate G may be covered, the dust attached to the board | substrate G can also be reduced.

  For convenience of explanation, the manufacturing method of the TFT color liquid crystal display panel has been described. However, the invention according to this embodiment is not limited to this, and other flat panel displays (for example, plasma display, field emission, etc.) The present invention can also be applied to a manufacturing method of a display.

  The invention according to the present embodiment can also be applied to a case where a mask is formed or processed on both surfaces of a wafer in a wafer manufacturing process (for example, an exposure process or an etching process).

  In addition, the process of mounting electronic components etc. on both sides of the circuit board, the process of painting on both sides of game boards such as pachinko machines, the process of painting and marking on the front and back of articles with a three-dimensional shape, etc. The present invention can be widely applied to the production of various articles.

  FIG. 10 is a schematic diagram for explaining a transport tool 40 according to another embodiment of the present invention. FIG. 10A shows a state in which the transport tool 40 is opened, and FIG. 10B shows a state in which the transport tool 40 is closed (a state in which the substrate G is sandwiched).

  The conveyance member 2 and the conveyance member 3 described in FIG. 1 are different in that both are connected by a hinge. That is, one end of the transport member 20 and the transport member 30 is rotatably connected by the hinge 25. For this reason, as shown in FIGS. 10A and 10B, the substrate G can be opened and closed with the substrate G placed thereon.

In FIG. 10A, the substrate G is placed on the transport member 30, but may be placed on the transport member 20.
Moreover, the nail | claw 4 etc. which were demonstrated in FIG. 2 can also be suitably provided in the surface on the side facing the surface in which the hinge 25 was provided.

In addition, in order to open and close the conveyance tool 40 provided with such a hinge, for example, a rotating arm having a suction means at the tip may be separately provided.
FIG. 11 is a schematic diagram for explaining a conveyance reversing device 110 according to another embodiment of the present invention.
FIG. 12 is a schematic diagram for explaining an arm portion of the conveyance reversing device 110.
The same parts as those described in FIGS. 3 and 4 are denoted by the same reference numerals, and the description thereof is omitted.
Since the transport reversing device 110 has a reversing function in the transport device, unlike the transport reversing device 10 described with reference to FIG. Therefore, the dimension between the scribing device 15 and the break device 16 can be reduced, and the entire installation space can be reduced.

  As shown in FIG. 12, gripping means 110d having a reversing function is provided in the vicinity of the lower end of the arm portion 110c. The gripping means 110d can grip the transport member 2 and the transport member 3 with the transport member 2 and the transport member 3 alone or with the substrate G interposed therebetween. 12A shows a case where the conveyance member 2 is gripped alone (the same applies when the conveyance member 3 is held alone), and FIG. 12B shows a case where the substrate G is sandwiched between the conveyance member 2 and the conveyance member. 3 is a schematic view illustrating the case of gripping 3. FIG. The same applies to the conveyance member 20 and the conveyance member 30.

  The gripping means 110d only needs to be able to grip the transport member 2 and the transport member 3, and examples thereof include a mechanical gripping means such as an air chuck, a gripping means using an electromagnet, and the like. Can do. Further, the gripping place is not limited to the peripheral portion of the transport member 20 and the transport member 30. For example, the transport member 20 and the transport member 30 are provided with a convex portion or a hole to be gripped. May be.

  Examples of the reversing function of the gripping means 110d include those using a control motor such as a servomotor. However, at least 180 ° reversal is possible, and an air cylinder, a solenoid, or the like can be used.

  In addition, since the effect | action of the conveyance inversion apparatus 110 is substantially the same as the case of the conveyance inversion apparatus 10, the description is abbreviate | omitted.

  The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples.

  As for the above-described specific examples, those skilled in the art appropriately modified the design are included in the scope of the present invention as long as they have the characteristics of the present invention.

  For example, the shape, size, material, arrangement, and the like of each element included in the conveyance members 2 and 3 and the conveyance reversing device 10 are not limited to those illustrated, but can be changed as appropriate.

  Moreover, although the conveyance of the board | substrate G showed in figure that it was substantially straight, it is not limited to this, U shape, a crank shape, etc. can be changed suitably.

  Moreover, each element with which each specific example mentioned above is provided can be combined as much as possible, and what combined these is also included in the scope of the present invention as long as the gist of the present invention is included.

It is a schematic diagram for demonstrating the conveyance tool which concerns on embodiment of this invention. It is a schematic cross section for demonstrating the connection of a conveyance tool. It is a schematic diagram for demonstrating the conveyance inversion apparatus concerning embodiment of this invention. It is a schematic diagram for demonstrating the arm part of a conveying apparatus. It is a schematic diagram for demonstrating an inversion apparatus. It is a schematic cross section for demonstrating the board | substrate which is an aggregate | assembly of a liquid crystal display panel. It is a flowchart for demonstrating a board | substrate cutting process. It is a flowchart for demonstrating the procedure which divides | segments a board | substrate into strip shape. It is a schematic diagram for demonstrating conveyance by a conveyance tool. It is a schematic diagram for demonstrating the conveying tool which concerns on other embodiment of this invention. It is a schematic diagram for demonstrating the conveyance inversion apparatus concerning other embodiment of this invention. It is a schematic diagram for demonstrating the arm part of a conveyance inversion apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Transport tool, 2 Transport member, 2c Groove part, 3 Transport member, 4 Claw, 5 Pin, 6 Energizing means, 10 Transport reverse device, 11 Transport device, 12 Reverse device, 15 Scribing device, 16 Break device, 17 Array, 18 color filter, 20 transport member, 30 transport member, 40 transport tool, 110 transport reversing device, G substrate

Claims (11)

An article conveying tool for holding an article between a pair of conveying members,
A first transport member and a second transport member facing each other across the article;
A connection provided on at least one peripheral portion of the first conveying member or the second conveying member, and connecting the first conveying member and the second conveying member while sandwiching the article. Means,
An article transporter characterized by comprising:   The article conveying tool according to claim 1, wherein an outer diameter of at least one of the first conveying member or the second conveying member is larger than an outer diameter of the article.   3. The article transport tool according to claim 1, wherein a surface of the first transport member or the second transport member on which at least one of the articles abuts is flat. The connection means includes a swingable claw and a biasing means for biasing the claw,
The article according to any one of claims 1 to 3, wherein the nail is provided with an abutting surface that abuts against the first conveying member or the second conveying member. Transport tool.   5. The article transport tool according to claim 1, wherein one end of the first transport member and the second transport member are connected by a hinge. . An article reversing device that grips a conveying tool that sandwiches an article and rotates the conveying tool to reverse the conveying tool,
6. The article reversing apparatus according to claim 1, wherein the carrier is the article carrier according to any one of claims 1 to 5. A moving means;
7. The article reversing device according to claim 6, wherein when the article transport tool is moved by the moving means, the article transport tool can be reversed. The article carrier according to any one of claims 1 to 5, wherein the article is sandwiched, is supported substantially horizontally,
A method for reversing an article, characterized in that the supported article transporter is gripped and rotated to reverse the article transporter.   9. The article reversing method according to claim 8, wherein when the article transport tool is moved by the moving means, the article transport tool is reversed.   A flat panel display manufacturing apparatus comprising the article reversing device according to claim 6.   A method for producing a flat panel display, comprising using the method for inverting an article according to claim 8 or 9.

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