JP2008191080A - Contact probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe capable of preventing breakage of a contact end of an electrode, and damages to an object body to be probed. <P>SOLUTION: The contact probe 1A in which a contact end of a center electrode 4a protrudes forward more than a contact end of an outer electrode 3a in a probing direction in a non-probing state comprises: the center electrode 4a and the outer electrode 3a that are disposed so as to allow movement relative with respect to a base part 2a in the probing directions (directions of the arrows A and B), and that are mutually insulated; a spring 6a that energizes the center electrode 4a and the outer electrode 3a in the directions opposite to the probing directions; a spring 5a that energizes the outer electrode 3a and a base part 2 in the directions opposite to the probing directions; and an oil damping mechanism 7a that decreases the moving speed of the outer electrode 3a with respect to the center electrode 4a in the probing direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a contact probe provided with a pair of electrodes of a first electrode and a second electrode.

  For example, in the measurement by the four-terminal method, a contact probe having a pair of electrodes of a voltage measurement electrode and a current measurement electrode that can be separately and independently contacted with a measurement object conductor (probing object) is used. As this type of contact probe, a spring-type contact probe is disclosed in JP-A-5-232137. The contact probe disclosed as the second conventional example in this publication is a voltage measuring pin (voltage measuring electrode) and a hollow (cylindrical) current measuring device configured to allow insertion of the voltage measuring pin. A pair of electrodes (pins for current measurement) is provided.

  In this case, in this contact probe, the voltage measurement pin measures the current through an insulator (cylinder made of an insulator: hereinafter also referred to as “cylindrical insulator”) disposed in the current measurement pin. It is slidably held with respect to the pins for use. Further, the current measuring pin and the voltage measuring pin are biased in opposite directions in the probing direction by the spring disposed in the cylindrical insulator. Furthermore, this contact probe is configured so that the current measuring pin can slide within a cylinder (hereinafter also referred to as a “base part” to distinguish it from the aforementioned cylindrical insulator) for holding the contact probe in the probing device. Has been. The current measuring pin and the base portion are biased in opposite directions in the probing direction by a spring disposed outside the current measuring pin.

  When probing using the contact probe, the contact probe is attached to the probing apparatus so that the holding portion of the moving mechanism holds the base portion. Next, when the start of probing is instructed, the moving mechanism moves the base portion toward the probing object (in the probing direction). In this case, first, the tip of the voltage measurement pin contacts the probing object, and in this state, the base portion is further moved, so that the voltage measurement pin is in the probing direction with respect to the current measurement pin. Is relatively moved in the opposite direction. At this time, when the spring in the cylindrical insulator is compressed, the tip of the voltage measuring pin is urged toward the surface of the probing object by the repulsive force.

Next, when the moving mechanism further moves the base part, the tip of the current measuring pin comes into contact with the probing object, and the base part is further moved from that state, so that the base part is used for current measurement. The pin is moved relative to the probing direction. At this time, the spring disposed outside the current measuring pin is pressed and contracted, whereby the tip of the current measuring pin is urged toward the surface of the probing object by the repulsive force. In this state, an electrical inspection using the voltage measurement pin and the current measurement pin that are in contact with the probing object is performed.
JP-A-5-232137 (2nd page, FIG. 3)

  However, the conventional contact probe has the following problems. That is, in the conventional contact probe, it is built into the cylindrical insulator from the time when the tip of the voltage measurement pin contacts the probing object until the time when the tip of the current measurement pin contacts the probing object. When the spring is elastically deformed, the repulsive force urges the tip of the voltage measuring pin toward the probing object and gradually decreases the moving speed of the current measuring pin relative to the voltage measuring pin. A configuration is adopted in which the impact applied to the probing object when the current measuring pin contacts is reduced. In this case, in the conventional contact probe, the current measurement pin is formed in a cylindrical shape so that the voltage measurement pin can be inserted, and the current measurement pin and the voltage measurement pin are insulated from each other, A cylindrical insulator that allows the voltage measurement pin to slide relative to the current measurement pin is attached to the inside of the current measurement pin. Therefore, in the conventional contact probe, the mass of the current measurement pin (the total mass of the mass of the current measurement pin and the mass of the cylindrical insulator) is very large.

  For this reason, the current measuring pin moves according to the law of inertia even though the elastic deformation of the spring built in the cylindrical insulator attempts to reduce the moving speed of the current measuring pin relative to the voltage measuring pin. Due to the large force to be continued, the current measuring pin comes into contact with the probing object prior to sufficiently lowering the moving speed, and the tip of the current measuring pin and the probing object A large force is applied to the contact portion. As a result, the contact portion of the current measurement pin on the surface of the probing object is large in the conventional contact probe because the tip of the current measurement pin is pressed against the probing object with an excessively strong force. There is a problem that dents (scratches) occur or the tip of the current measuring pin is damaged.

  In this case, in the case of a contact probe in which the current measurement pin is brought into contact with the probing object prior to the contact of the voltage measurement pin, and the contact probe of the type in which the mass of the voltage measurement pin is large, the current measurement pin The voltage measuring pin will continue to move in accordance with the law of inertia even if the voltage measuring pin is moved by the elastic deformation of the spring that biases the voltage measuring pin in the opposite direction. The voltage measuring pin comes into contact with the probing object prior to sufficiently lowering the moving speed due to the large force to make contact between the tip of the voltage measuring pin and the probing object. A large force is applied to the part. As a result, in the same manner as the conventional contact probe described above, even in this type of contact probe, the probing target object is caused by the fact that the tip of the voltage measuring pin is pressed against the probing object with an excessively strong force. There arises a problem that a large dent (scratch) is generated on the surface of the wire and that the tip of the voltage measuring pin is damaged.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a contact probe that can prevent damage to a contact side end portion of an electrode and damage to a probing target.

  In order to achieve the above object, the contact probe according to claim 1 is provided with a first electrode and a second electrode which are arranged so as to be relatively movable in a probing direction with respect to a base portion and are insulated from each other; A first urging member that urges one electrode and the second electrode in opposite directions in the probing direction; and a second urging member that urges the second electrode and the base portion in opposite directions in the probing direction. A contact probe in which the contact side end portion of the first electrode protrudes more toward the probing direction than the contact side end portion of the second electrode in a non-probing state, An attenuation mechanism is provided for reducing the moving speed of the second electrode in the probing direction.

  The contact probe according to claim 2 is the contact probe according to claim 1, comprising a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, and the outer electrode. The center electrode is inserted inside.

  The contact probe according to claim 3 is the contact probe according to claim 1, comprising a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, and the outer electrode. The center electrode is inserted inside.

  A contact probe according to a fourth aspect is the contact probe according to any one of the first to third aspects, further comprising an oil damper mechanism as the damping mechanism.

  The contact probe according to claim 1 is provided with an attenuation mechanism that reduces a moving speed of the second electrode in the probing direction with respect to the first electrode. Therefore, according to this contact probe, the repulsive force of the first biasing member is compared with the conventional contact probe in which the moving speed of the current measuring pin with respect to the voltage measuring pin is gradually decreased by the repulsive force of the spring. And the resistance generated in the attenuation mechanism can sufficiently reduce the moving speed of the second electrode relative to the first electrode before the second electrode contacts the probing object. Even if it is large, the situation where the tip of the second electrode is pressed against the probing object with an excessively strong force is avoided, and a large dent (scratch) is generated on the surface of the probing object, or the second electrode It is possible to surely avoid the situation that the tip of the glass is damaged.

  The contact probe according to claim 2 includes a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, and the center electrode is inserted into the outer electrode. Therefore, according to this contact probe, the tip portion of the first electrode and the tip portion of the second electrode are separately and independently brought into contact with each other within a very narrow range on the probing object, although the configuration is relatively simple. Can do.

  Furthermore, the contact probe according to claim 3 is provided with a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, and the center electrode is inserted into the outer electrode. Therefore, according to this contact probe, the tip portion of the first electrode and the tip portion of the second electrode are separately and independently brought into contact with each other within a very narrow range on the probing object, although the configuration is relatively simple. Can do.

  The contact probe according to claim 4 includes an oil damper mechanism as a damping mechanism. Therefore, according to this contact probe, while having a simple configuration, the moving speed of the second electrode relative to the first electrode can be sufficiently reduced during probing, and, for example, an attenuation mechanism using a sliding resistance or the like In contrast to this, even if a lot of probing is performed, a sufficient capability can be maintained for a long time without greatly reducing the damping capability of the damping mechanism (oil damper mechanism). Further, unlike a mechanical damping mechanism having a complicated configuration, it is possible to avoid an increase in the manufacturing cost of the contact probe.

  Hereinafter, the best mode of a contact probe according to the present invention will be described with reference to the accompanying drawings.

  First, the configuration of the contact probe 1A and its operating principle will be described with reference to the drawings.

  A contact probe 1A shown in FIG. 1 is an example of a contact probe according to the present invention, and includes a base portion (holder) 2a, an outer electrode 3a, a center electrode 4a, springs 5a and 6a, and an oil damper mechanism 7a as a whole. It is formed in the shape of an elongated bar. 2 and 4 to be referred later, the configuration of the contact probe 1A is conceptually illustrated in order to facilitate understanding of the contact probe according to the present invention. Therefore, the length of each member in these drawings, the position where the protrusions are formed, and the size thereof are different from those of the actual contact probe 1A (not shown). In addition, an insulator disposed between the outer electrode 3a and the center electrode 4a, a connection cable for electrically connecting the outer electrode 3a and the center electrode 4a to a probing device (not shown), and the like are illustrated. The description is omitted.

  The base portion 2a is a member for attaching the contact probe 1A to the moving mechanism in the probing apparatus (in order to hold the contact probe 1A in the holding portion of the moving mechanism), and the outer electrode 3a and the center electrode 4a are inserted inside thereof. It is possible to form a cylindrical shape as a whole. The outer electrode 3a is an example of the second electrode in the present invention, and is formed in a cylindrical shape as a whole so that the center electrode 4a and the spring 6a can be inserted therein. Further, the outer electrode 3a is formed with a contact side end in the present invention on one end side (the lower end side in the figure) and at the time of probing, the direction of the arrow A with respect to the base portion 2a by the spring 5a (probing) Direction).

  The center electrode 4a is an example of the first electrode in the present invention, and is formed into a pin shape (bar shape) as a whole and inserted into the outer electrode 3a. In this case, in the contact probe 1A, in the non-probing state (a state where both the outer electrode 3a and the center electrode 4a are not in contact with the probing object X) shown in FIG. The lower end portion in the figure protrudes in the probing direction (direction of arrow A) from the contact side end portion (lower end portion in the figure) of the outer electrode 3a. The spring 5a is an example of a second urging member in the present invention, and is composed of a compression-type string-wound spring and urges the base portion 2a and the outer electrode 3a in opposite directions. The spring 6a is an example of a first urging member in the present invention, and is configured by a compression-type string spring to urge the outer electrode 3a and the center electrode 4a in opposite directions.

  The oil damper mechanism 7a is an example of a damping mechanism in the present invention. In the contact probe 1A, as an example, the outer electrode 3a is a cylinder, the center electrode 4a is a piston, and the oil 13 is a resistor. An attenuation mechanism is configured to reduce the moving speed of the outer electrode 3a relative to 4a. Specifically, the center electrode 4a is formed with a flange portion 11a having an outer diameter substantially equal to the inner diameter of the outer electrode 3a, and the flange portion 11a has a plurality of extremely small pieces that allow passage of the oil 13. An orifice 12a is formed. Further, the viscosity of the oil 13 sealed in the outer electrode 3a is regulated so that the oil damper mechanism 7a can exhibit a damping force defined in advance according to the use of the contact probe 1A.

  When probing using the contact probe 1A, the contact probe 1A is mounted on the probing device so that the base portion 2a is held by a holding portion (not shown) of a moving mechanism in the probing device. Next, when the start of probing is instructed, the moving mechanism moves the base portion 2a toward the probing object X in the direction of arrow A. In this case, as shown in FIG. 2, first, the tip of the center electrode 4a abuts against the probing object X, and in this state, the base 2a is further moved in the direction of arrow A, The outer electrode 3a is moved in the probing direction (direction of arrow A) with respect to the electrode 4a.

  At this time, when the springs 5a and 6a are compressed, the tip of the center electrode 4a is urged toward the surface of the probing object X in the direction of arrow A by the repulsive force. Further, as the center electrode 4a is moved relative to the outer electrode 3a in the direction opposite to the probing direction (direction of arrow B) in the outer electrode 3a, the oil sealed in the outer electrode 3a 13 passes through each orifice 12a and flows into the space on the back side of the flange portion 11a (the space on the contact side end portion side in the outer electrode 3a). At this time, due to the flow resistance generated when the oil 13 passes through each orifice 12a and the repulsive force of the spring 6a, the moving speed of the outer electrode 3a in the probing direction (direction of arrow A) with respect to the center electrode 4a is reduced. It is done.

  Therefore, as shown in FIG. 3, when the tip of the outer electrode 3a comes into contact with the probing object X, the moving speed of the outer electrode 3a with respect to the center electrode 4a is sufficiently reduced, so the outer electrode 3a Is prevented from coming into contact with the probing object X at an excessively high speed. As a result, the force applied to the contact portion between the distal end portion of the outer electrode 3a and the probing object X is sufficiently small as compared with the conventional contact probe. In this case, the applicant applies an impact force applied to the surface of the probing object X when the outer electrode 3a (current measurement pin) contacts the contact probe 1A having the same size as the conventional contact probe. It is confirmed that it is about 1/2 to 1/3 compared with the probe.

  In this state, when the spring 6a is sufficiently compressed, the repulsive force biases the tip of the center electrode 4a toward the probing target body X in the probing direction (arrow A). Subsequently, when the base portion 2a is further moved by the moving mechanism, the base portion 2a is moved in the probing direction (direction of arrow A) with respect to the outer electrode 3a and the center electrode 4a as shown in FIG. . At this time, when the spring 5a is compressed and contracted, the tip of the outer electrode 3a is urged toward the probing object X in the probing direction (arrow A) by the repulsive force. In this state, an electrical inspection using the outer electrode 3a and the center electrode 4a that are in contact with the probing object X is performed.

  As described above, the contact probe 1A includes the oil damper mechanism 7a (attenuation mechanism) that reduces the moving speed of the outer electrode 3a (second electrode) in the probing direction with respect to the center electrode 4a (first electrode). Therefore, according to the contact probe 1A, the repulsive force and oil of the spring 6a are compared with the conventional contact probe in which the moving speed of the current measuring pin with respect to the voltage measuring pin is gradually decreased by the repulsive force of the spring. The resistance generated in the damper mechanism 7a (in this example, the flow resistance of the oil 13) sufficiently reduces the moving speed of the outer electrode 3a relative to the center electrode 4a before the outer electrode 3a contacts the probing object X. Therefore, even when the mass of the outer electrode 3a is large to some extent, a situation in which the tip of the outer electrode 3a is pressed against the probing target body X with an excessively strong force is avoided, and the surface of the probing target body X is avoided. Surely avoid situations where large dents (scratches) occur or the tip of the outer electrode 3a is damaged. Rukoto can.

  Further, the contact probe 1A includes a pin-shaped center electrode 4a as the first electrode in the present invention and a cylindrical outer electrode 3a as the second electrode in the present invention, and the center electrode is disposed in the outer electrode 3a. 4a is inserted. Therefore, according to the contact probe 1A, the tip portion of the outer electrode 3a and the tip portion of the center electrode 4a are separately and independently contacted within a very narrow range on the probing object X, although the configuration is relatively simple. Can be made.

  Further, the contact probe 1A includes an oil damper mechanism 7a as a damping mechanism in the present invention. Therefore, according to the contact probe 1A, while having a simple configuration, the moving speed of the outer electrode 3a with respect to the center electrode 4a can be sufficiently reduced during probing, and, for example, an attenuation mechanism using a sliding resistance is used. Unlike the above, even if many probing operations are performed, sufficient capability can be maintained over a long period of time without greatly reducing the damping capability of the oil damper mechanism 7a. Further, unlike the mechanical damping mechanism having a complicated configuration, it is possible to avoid an increase in the manufacturing cost of the contact probe 1A.

  Next, the configuration of the contact probe 1B and its operating principle will be described with reference to the drawings.

  A contact probe 1B shown in FIG. 5 is another example of a contact probe according to the present invention, and includes a base (holder) 2b, an outer electrode 3b, a center electrode 4b, springs 5b and 6b, and an oil damper mechanism 7b. It is formed in the shape of a long and narrow bar as a whole. 6 and 8 to be referred to later conceptually illustrate the configuration of the contact probe 1B in order to facilitate understanding of the contact probe according to the present invention. Therefore, the length of each member in these drawings, the position where the protrusions are formed, and the size thereof are different from those of the actual contact probe 1B (not shown). In addition, an insulator disposed between the outer electrode 3b and the center electrode 4b, a connection cable for electrically connecting the outer electrode 3b and the center electrode 4b to a probing device (not shown), and the like are illustrated. The description is omitted.

  The base portion 2b is a member for attaching the contact probe 1B to the moving mechanism in the probing apparatus (for holding the contact probe 1B in the holding portion of the moving mechanism). As an example, the base portion 2b is formed in a cylindrical shape and has a central electrode 4b. It is slidably attached to one end of the. The outer electrode 3b is another example of the first electrode according to the present invention, and is formed in a cylindrical shape as a whole so that the center electrode 4b can be inserted therein. Further, the outer electrode 3b is formed with a contact side end in the present invention on one end side (the lower end side in the figure), and at the time of probing, the direction of the arrow A (probing) with respect to the center electrode 4b by the spring 6b. Direction).

  The center electrode 4b is another example of the second electrode in the present invention, and is formed in a pin shape (bar shape) as a whole. In this case, in the contact probe 1B, in the non-probing state (a state in which both the outer electrode 3b and the center electrode 4b are not in contact with the probing target body X) shown in FIG. The lower end portion in the figure protrudes in the probing direction (direction of arrow A) from the contact side end portion (lower end portion in the figure) of the center electrode 4b. The spring 5b is an example of a second urging member in the present invention, and is composed of a compression-type string-wound spring and urges the base portion 2b and the center electrode 4b in opposite directions. The spring 6b is an example of a first urging member in the present invention, and is configured by a compression-type string spring to urge the outer electrode 3b and the center electrode 4b in opposite directions.

  The oil damper mechanism 7b is another example of the damping mechanism in the present invention. In the contact probe 1B, as an example, the outer electrode 3b is a cylinder, the center electrode 4b is a piston, and the oil 13 is a resistor. An attenuation mechanism is configured to reduce the moving speed of the center electrode 4b relative to the outer electrode 3b. Specifically, the center electrode 4b is formed with a flange portion 11b having an outer diameter substantially equal to the inner diameter of the outer electrode 3b, and the flange portion 11b has a plurality of extremely small pieces that allow the oil 13 to pass therethrough. An orifice 12b is formed. Further, the viscosity of the oil 13 sealed in the outer electrode 3b is regulated so that the oil damper mechanism 7b can exhibit a damping force defined in advance according to the use of the contact probe 1B.

  When probing using the contact probe 1B, the contact probe 1B is mounted on the probing device so that the base portion 2b is held by a holding portion (not shown) of a moving mechanism in the probing device. Next, when the start of probing is instructed, the moving mechanism moves the base portion 2b toward the probing object X in the direction of arrow A. In this case, as shown in FIG. 6, first, the distal end portion of the outer electrode 3b abuts on the probing object X, and in this state, the base portion 2b is further moved in the direction of the arrow A, thereby The center electrode 4b is moved with respect to the electrode 3b in the probing direction (direction of arrow A).

  At this time, the springs 5b and 6b are pressed and contracted, so that the repulsive force biases the tip of the outer electrode 3b toward the surface of the probing object X in the direction of arrow A. Further, as the center electrode 4b is moved in the probing direction (direction of arrow A) with respect to the outer electrode 3b in the outer electrode 3b, the oil 13 sealed in the outer electrode 3b passes through each orifice 12b. Then, it flows into the space on the back side of the flange portion 11b (the space on the base portion 2b side in the external electrode 3b). At this time, due to the flow resistance generated when the oil 13 passes through each orifice 12b and the repulsive force of the spring 6b, the moving speed of the center electrode 4b in the probing direction (direction of arrow A) with respect to the outer electrode 3b is reduced. It is done.

  Therefore, as shown in FIG. 7, when the tip of the center electrode 4b contacts the probing object X, the moving speed of the center electrode 4b with respect to the outer electrode 3b is sufficiently reduced, so that the center electrode 4b Is prevented from coming into contact with the probing object X at an excessively high speed. As a result, the force applied to the contact portion between the tip portion of the center electrode 4b and the probing object X is sufficiently smaller than that of the conventional contact probe. In this case, the applicant makes contact with the center electrode 4b (voltage measurement pin) as compared with a conventional contact probe that has the same configuration as the contact probe 1B and does not include an attenuation mechanism (oil damper mechanism 7b). It has been confirmed that the impact force applied to the surface of the probing object X is about 1/2 to 1/3 as compared with the conventional contact probe.

  In this state, when the spring 6b is sufficiently compressed, the tip of the outer electrode 3b is urged toward the probing object X in the probing direction (arrow A) by the repulsive force. Subsequently, when the base portion 2b is further moved by the moving mechanism, the base portion 2b is moved in the probing direction (direction of arrow A) with respect to the outer electrode 3b and the center electrode 4b as shown in FIG. . At this time, when the spring 5b is compressed and contracted, the tip of the center electrode 4b is urged toward the probing target body X in the probing direction (arrow A) by the repulsive force. In this state, an electrical inspection using the outer electrode 3b and the center electrode 4b that are in contact with the probing object X is performed.

  As described above, the contact probe 1B includes the oil damper mechanism 7b (attenuating mechanism) that reduces the moving speed of the center electrode 4b (second electrode) in the probing direction with respect to the outer electrode 3b (first electrode). Therefore, according to the contact probe 1B, the repulsive force and oil of the spring 6b are compared with the conventional contact probe in which the moving speed of the voltage measuring pin with respect to the current measuring pin is gradually decreased by the repulsive force of the spring. The resistance generated in the damper mechanism 7b (in this example, the flow resistance of the oil 13) sufficiently reduces the moving speed of the center electrode 4b relative to the outer electrode 3b before the center electrode 4b contacts the probing object X. Therefore, even when the mass of the center electrode 4b is large to some extent, a situation in which the tip of the center electrode 4b is pressed against the probing target body X with an excessively strong force is avoided, and the surface of the probing target body X is avoided. Surely avoid situations where large dents (scratches) occur or the tip of the center electrode 4b is damaged. Rukoto can.

  The contact probe 1B includes a cylindrical outer electrode 3b as a first electrode in the present invention and a pin-shaped center electrode 4b as a second electrode in the present invention. 4b is inserted. Therefore, according to the contact probe 1B, the tip portion of the outer electrode 3b and the tip portion of the center electrode 4b are separately and independently contacted within a very narrow range on the probing object X, although the configuration is relatively simple. Can be made.

  Further, the contact probe 1B includes an oil damper mechanism 7b as a damping mechanism in the present invention. Therefore, according to the contact probe 1B, while having a simple configuration, the moving speed of the center electrode 4b with respect to the outer electrode 3b can be sufficiently reduced during probing, and, for example, an attenuation mechanism using a sliding resistance is used. Unlike the above, even if many probing operations are performed, a sufficient capability can be maintained for a long time without greatly reducing the damping capability of the oil damper mechanism 7b. Further, unlike the mechanical damping mechanism having a complicated configuration, it is possible to avoid an increase in the manufacturing cost of the contact probe 1B.

  In addition, this invention is not limited to said structure. For example, the contact probes 1A and 1B using compression-type string-wound springs as the springs 5a, 5b, 6a, and 6b have been described. However, the configuration of each biasing member in the present invention is not limited to this, and for example, a tension spring (A spring that is elastically restored in the contraction direction) can be used. In the case of adopting this configuration, the arrangement position of each urging member, the position of the protruding portion with which the urging member is engaged, and the like are appropriately changed. In addition, each urging member in the present invention is not limited to an urging member such as a string-wound spring, and may be constituted by an elastic member such as foamed resin.

  Further, as the outer electrode 3a moves with respect to the center electrode 4a, the contact probe 1A having an oil damper mechanism 7a configured to allow the oil 13 to flow into the space on the contact side end side in the outer electrode 3a, and the center electrode with respect to the outer electrode 3b. Although the contact probe 1B having the oil damper mechanism 7b configured to allow the oil 13 to flow into the space on the base portion 2b side in the outer electrode 3b with the movement of 4b has been described, the configuration of the oil damper mechanism in the present invention is limited to this. Not. Specifically, instead of the oil damper mechanism 7a in the contact probe 1A, as the outer electrode 3a moves relative to the center electrode 4a, the oil 13 moves from the space on the contact side end side in the outer electrode 3a to the base portion 2a side. An oil damper mechanism configured to flow into the space is adopted, or instead of the oil damper mechanism 7b in the contact probe 1B, the oil 13 is moved to the base electrode 2b side in the outer electrode 3a as the center electrode 4b moves relative to the outer electrode 3b. An oil damper mechanism configured to flow from the space into the space on the contact side end side can be employed. In this case, the formation positions of the flange portions 11a and 11b are appropriately changed in the center electrodes 4a and 4b in the contact probes 1A and 1B.

  In addition, the oil damper mechanism in the present invention is not limited to the configuration in which the outer electrodes 3a and 3b are cylinders, the center electrodes 4a and 4b are pistons, and the oil 13 is a resistor, and is independent of the outer electrodes 3a and 3b. A piston separate from the center electrodes 4a and 4b is disposed in the cylinder, and the oil 13 is sealed to form an oil damper mechanism, and either the cylinder or the piston is connected to the first electrode, and A damping mechanism that reduces the moving speed of the second electrode relative to the first electrode by connecting the other to the second electrode can be configured. In addition, the damping mechanism in the present invention is not limited to the oil damper mechanism, and an air damper mechanism that uses air as a resistor instead of oil in the oil damper mechanism, or a force that acts in the deformation direction during compression deformation or expansion deformation. For example, a damping rubber mechanism or the like can be employed.

It is side surface sectional drawing of the contact probe 1A in a non-probing state. 4 is a side cross-sectional view of a contact probe 1A in a state in which a tip portion of a center electrode 4a is in contact with a probing target body X. FIG. FIG. 4 is a side cross-sectional view of the contact probe 1A in a state in which the tip of the outer electrode 3a and the tip of the center electrode 4a are in contact with the probing target body X. FIG. 4 is a side cross-sectional view of the contact probe 1A in a state where the tip of the outer electrode 3a and the tip of the center electrode 4a are urged toward the probing target body X. It is side surface sectional drawing of the contact probe 1B in a non-probing state. FIG. 4 is a side cross-sectional view of the contact probe 1B in a state where the tip of the outer electrode 3b is in contact with the probing target body X. FIG. 5 is a side cross-sectional view of the contact probe 1B in a state in which the distal end portion of the outer electrode 3b and the distal end portion of the center electrode 4b are in contact with the probing target body X. FIG. 4 is a side cross-sectional view of the contact probe 1B in a state where the distal end portion of the outer electrode 3b and the distal end portion of the center electrode 4b are urged toward the probing target body X.

Explanation of symbols

1A, 1B Contact probe 2a, 2b Base part 3a, 3b Outer electrode 4a, 4b Center electrode 5a, 5b, 6a, 6b Spring 7a, 7b Oil damper mechanism X Probing object

Claims (4)

A first electrode and a second electrode, which are arranged to be relatively movable in the probing direction with respect to the base portion and insulated from each other, and directions in which the first electrode and the second electrode are opposite to each other in the probing direction And a second urging member that urges the second electrode and the base portion in opposite directions in the probing direction, and in the non-probing state, the first electrode A contact probe in which a contact side end protrudes in the probing direction side from a contact side end in the second electrode,
A contact probe comprising an attenuation mechanism that reduces a moving speed of the second electrode in the probing direction with respect to the first electrode.   The contact probe according to claim 1, comprising a pin-shaped center electrode as the first electrode and a cylindrical outer electrode as the second electrode, wherein the center electrode is inserted into the outer electrode.   The contact probe according to claim 1, comprising a cylindrical outer electrode as the first electrode and a pin-shaped center electrode as the second electrode, wherein the center electrode is inserted into the outer electrode.   The contact probe according to claim 1, further comprising an oil damper mechanism as the damping mechanism.

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