JP2008185525A - Spectrometer - Google Patents

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JP2008185525A
JP2008185525A JP2007020919A JP2007020919A JP2008185525A JP 2008185525 A JP2008185525 A JP 2008185525A JP 2007020919 A JP2007020919 A JP 2007020919A JP 2007020919 A JP2007020919 A JP 2007020919A JP 2008185525 A JP2008185525 A JP 2008185525A
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light
exit slit
spectroscope
optical trap
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JP5194464B2 (en
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Tomomitsu Kobayashi
智光 小林
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce stray light as much as possible in a spectrometer wherein the F value of outgoing luminous flux is variable. <P>SOLUTION: A light trapping member 20 having a plurality of projecting pieces 21 along the direction of an optical axis C just before the exit slit 16 of the spectrometer is made replaceable and detachable, and can be replaced easily with a light trapping member 20 whose projecting pieces 21 are different in projection length. By attaching a member 20 having projecting pieces 21 of shorter projection lengths so as not to interrupt diffraction light when the F value of the outgoing luminous flux is small, and attaching a member 20 having projecting pieces 21 of longer projection lengths when the F value of the outgoing luminous flux is large, the clearance between the envelope of the luminous flux and the inner edge of each projecting piece 21 is narrowed to interrupt and prevent stray light from passing through this clearance. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、分光光度計などの光学装置に幅広く利用される分光器に関し、さらに詳しくは、分光器における迷光の低減技術に関する。   The present invention relates to a spectroscope widely used in an optical apparatus such as a spectrophotometer, and more particularly to a technique for reducing stray light in the spectroscope.

特定の波長を有する単色光を取り出すための分光器は、分光光度計などの光学装置に広く利用されている。図3は一般的な分光器の概略構成図である。   A spectroscope for taking out monochromatic light having a specific wavelength is widely used in optical devices such as a spectrophotometer. FIG. 3 is a schematic configuration diagram of a general spectroscope.

光源2から出射した様々な波長成分を含む光は入射光学系3を介して分光器1の入射ポート11に集光され、入口スリット12を通して分光器1の内部に取り込まれる。この光は反射鏡(コリメート鏡)13で反射されて、凹面回折格子(波長分散素子)14の格子面に収束される。凹面回折格子14で波長分散された光(回折光)は反射鏡(フォーカス鏡)15で反射されて出口スリット16に集光され、特定の波長を有する回折光が出口スリット16を通過して出射ポート17から出射される。   Light including various wavelength components emitted from the light source 2 is condensed to the incident port 11 of the spectrometer 1 through the incident optical system 3 and taken into the spectrometer 1 through the entrance slit 12. This light is reflected by the reflecting mirror (collimating mirror) 13 and converged on the grating surface of the concave diffraction grating (wavelength dispersion element) 14. The light (diffracted light) wavelength-dispersed by the concave diffraction grating 14 is reflected by the reflecting mirror (focus mirror) 15 and condensed on the exit slit 16, and the diffracted light having a specific wavelength passes through the exit slit 16 and exits. The light is emitted from the port 17.

こうした分光器1では、凹面回折格子14の回折式で規定された以外の不所望の波長の光、つまり迷光の出射をできるだけ抑えることが望ましい。このため、従来より、様々な方法によって迷光の低減が図られている。例えば、分光器の内部に設けられている反射鏡のエッジに当たった光が不所望の方向に反射して迷光となる場合がある。そこで、反射鏡のエッジに黒い遮光帯を設けることで不所望な方向への反射光を減らして迷光を低減することが行われている。また、分光器の内部において、例えば0次光など比較的大きな光量の不所望の光が当たる個所に光吸収率の高い物質を貼り付けた光トラップ板を設置することで迷光を低減することも行われている(例えば特許文献1など参照)。   In such a spectroscope 1, it is desirable to suppress as much as possible the emission of light having an undesired wavelength other than that defined by the diffraction formula of the concave diffraction grating 14, that is, stray light. For this reason, stray light has been conventionally reduced by various methods. For example, light that hits the edge of a reflector provided inside the spectroscope may be reflected in an undesired direction and become stray light. In view of this, it has been attempted to reduce stray light by reducing the reflected light in an undesired direction by providing a black shading band at the edge of the reflecting mirror. In addition, stray light may be reduced by installing an optical trap plate with a substance having a high light absorption rate attached to a portion where a relatively large amount of undesired light such as zero-order light strikes inside the spectrometer. (See, for example, Patent Document 1).

ところで、こうした分光器を利用した光学装置では、その測定の目的などに応じて分光器から取り出したい回折光の絞り(F値)を変えたい場合がある。例えば上記のような構成の分光器1では、入射光学系3のレンズなどを変えることにより、入射ポート11から分光器1内に取り込む光の絞りを変え、それに伴って出射ポート17から出射する回折光の絞りも変えることが可能である。もちろん、分光器1としての明るさ(つまりF値)の可変範囲は内部の光学素子の大きさや光路構成などによって異なる。   By the way, in an optical apparatus using such a spectroscope, there is a case where it is desired to change a diaphragm (F value) of diffracted light to be extracted from the spectroscope depending on the purpose of the measurement. For example, in the spectroscope 1 having the above-described configuration, by changing the lens of the incident optical system 3 or the like, the aperture of the light taken into the spectroscope 1 from the incident port 11 is changed, and accordingly the diffraction emitted from the output port 17. The aperture of the light can also be changed. Of course, the variable range of brightness (that is, F value) as the spectroscope 1 varies depending on the size of the internal optical element, the optical path configuration, and the like.

分析感度を高くしたい場合には、一般に回折光の絞りを緩め(F値を小さくし)光量を増加させることが好ましい。一方、分解能を上げるためには、一般に回折光を絞り込むことが行われる。しかしながら、入射光を絞ることにより回折光を絞り込んだ場合、迷光の量が同じであっても相対的に迷光の影響が大きくなり回折光のS/Nが下がることになる。したがって、本来は、取り出される回折光の絞りに応じて迷光の除去構造を変更することが望ましいが、こうした分光器は従来存在しなかった。   When it is desired to increase the analysis sensitivity, it is generally preferable to loosen the diffracted light aperture (decrease the F value) and increase the amount of light. On the other hand, in order to increase the resolution, the diffraction light is generally narrowed down. However, when the diffracted light is narrowed by narrowing the incident light, even if the amount of stray light is the same, the influence of the stray light is relatively increased, and the S / N of the diffracted light is lowered. Therefore, it is originally desirable to change the stray light removal structure in accordance with the extracted diffracted light aperture, but such a spectroscope has not existed in the past.

特開平2−254327号公報JP-A-2-254327

本発明は上記課題を解決するために成されたものであり、回折光の絞り(明るさ)に応じて迷光をより効果的に低減することで分析精度を向上させることができる分光器を提供することである。   The present invention has been made to solve the above problems, and provides a spectroscope capable of improving analysis accuracy by more effectively reducing stray light according to the diaphragm (brightness) of diffracted light. It is to be.

上記課題を解決するために成された本発明は、入口スリット、波長分散素子、出口スリットを具備し、入口スリットを通して入射される光の絞りを変えることにより出口スリットから出射する回折光の絞りを変えることが可能な分光器において、
前記出口スリットの直前の光路上に、光束の外縁外側から光軸方向に突出する突片を有する迷光遮蔽用の光トラップを備え、該光トラップの突片の突出長さが前記出口スリットから取り出される回折光の絞りに応じて変更可能な構造であることを特徴としている。
In order to solve the above problems, the present invention comprises an entrance slit, a wavelength dispersion element, and an exit slit, and the aperture of the diffracted light emitted from the exit slit is changed by changing the aperture of the light incident through the entrance slit. In a spectroscope that can be changed,
Provided on the optical path immediately before the exit slit is a stray light shielding optical trap having a projecting piece projecting in the optical axis direction from the outer edge of the luminous flux, and the projecting length of the projecting piece of the optical trap is taken out from the exit slit. It is characterized by a structure that can be changed according to the diffracted light aperture.

また本発明の具体的な一態様である分光器にあって、前記光トラップは分光器本体に着脱可能であって、前記出口スリットから取り出される回折光の絞りに応じて前記突片の突出長さが相違する光トラップに交換する構造とすることができる。   Further, in the spectroscope according to a specific aspect of the present invention, the optical trap is detachable from the spectroscope main body, and the protruding length of the protruding piece according to the stop of the diffracted light taken out from the exit slit It can be set as the structure exchanged for the optical trap from which length differs.

例えば分解能を上げるために回折光を暗くして、つまりは絞られた光を出口スリットから出射させる場合には、光トラップを通過する光の光束も小さくなるため、光軸方向への突出長さが大きな突片を有する光トラップを用いても回折光は遮られない。一方で、突片の突出長さを大きくすれば、出口スリットを通過し得る光の入射角度範囲が狭くなって迷光はそれだけ通過しにくくなり、迷光の除去性能が向上する。即ち、所望の回折光を遮ることなく、迷光の除去効果を上げることができる。   For example, when the diffracted light is darkened in order to increase the resolution, that is, when the focused light is emitted from the exit slit, the light flux passing through the optical trap is also reduced, so the projection length in the optical axis direction Even if an optical trap having a large protruding piece is used, the diffracted light is not blocked. On the other hand, if the projecting length of the projecting piece is increased, the incident angle range of light that can pass through the exit slit is narrowed and stray light is less likely to pass, and stray light removal performance is improved. That is, the stray light removal effect can be increased without blocking the desired diffracted light.

これに対し、例えば感度を上げるために回折光を明るくして、つまりは絞りが緩い回折光を出口スリットから出射させる場合には、光軸方向への突出長さが小さな突片を有する光トラップを用いることで、光トラップを通過する光束の大きな回折光が遮られることなく得られる。また、光トラップのない構造に比べれば、迷光除去の効果が得られS/Nも良好である。   On the other hand, for example, when the diffracted light is brightened to increase sensitivity, that is, when diffracted light with a loose aperture is emitted from the exit slit, an optical trap having a protrusion with a small protrusion length in the optical axis direction By using, diffracted light having a large luminous flux passing through the optical trap can be obtained without being blocked. Further, compared with a structure without an optical trap, the effect of removing stray light is obtained and the S / N is also good.

このようにして本発明に係る分光器によれば、分光器の出口スリットから取り出される回折光の明るさ(F値)に応じて、回折光を遮ることなく迷光の低減効果を高めることが可能となる。   Thus, according to the spectroscope according to the present invention, it is possible to increase the stray light reduction effect without blocking the diffracted light according to the brightness (F value) of the diffracted light extracted from the exit slit of the spectroscope. It becomes.

本発明の一実施例による分光器について図面を参照して説明する。本実施例による分光器1の基本的な構成は上述した図3と同じであるが、出口スリット16の直前の光路上、具体的には図3において点線Aで示す位置に、迷光を遮断するための光トラップ部材20を装着する。   A spectrometer according to an embodiment of the present invention will be described with reference to the drawings. The basic configuration of the spectrometer 1 according to the present embodiment is the same as that in FIG. 3 described above, but the stray light is blocked at the optical path immediately before the exit slit 16, specifically at the position indicated by the dotted line A in FIG. A light trap member 20 is attached.

図1はこの光トラップ部材20の構造と原理を示す概略断面図である。光トラップ部材20は、出口スリット16に向かって収束される光束の光軸Cに向かってその外周から突出する突片21を光軸Cの方向に複数(この例では3)有している。隣接する突片21の間は光軸Cに直交する方向に窪んだ凹部22になっている。突片21はそれ自体が光吸収率の高い材料から成るか、或いはその表面に光吸収率の高い部材が貼り付けられており、図1中に示すように、異なる方向から入射して来た迷光Lbは突片21に当たって反射を繰り返して凹部22の奥に進む間に吸収される。したがって、こうした迷光が出口スリット16を通り抜けてしまうことは回避される。   FIG. 1 is a schematic sectional view showing the structure and principle of the optical trap member 20. The optical trap member 20 has a plurality (three in this example) of projecting pieces 21 projecting from the outer periphery toward the optical axis C of the light beam converged toward the exit slit 16. Between adjacent projecting pieces 21, there is a recess 22 that is recessed in a direction perpendicular to the optical axis C. The projecting piece 21 itself is made of a material having a high light absorption rate, or a member having a high light absorption rate is attached to the surface thereof. As shown in FIG. The stray light Lb hits the projecting piece 21 and is repeatedly reflected and absorbed while proceeding to the back of the recess 22. Therefore, it is avoided that such stray light passes through the exit slit 16.

分光器1へ絞り込みの小さな(F値の小さな)光が入射された場合には、例えば図1中で「明るい(F値小)」として示すように相対的に大きな入射角度で以て出口スリット16に回折光が集光する。この場合、この回折光を遮らないようにするために、光トラップ部材20の突片21の突出長さを相対的に小さくしておく必要がある。   When light with a small aperture (small F value) is incident on the spectroscope 1, the exit slit is formed with a relatively large incident angle as shown, for example, as "bright (low F value)" in FIG. The diffracted light is condensed on 16. In this case, in order not to block the diffracted light, the protruding length of the protruding piece 21 of the optical trap member 20 needs to be relatively small.

一方、分光器1へ絞り込みの大きな(F値の大きな)光が入射された場合、例えば図1中で「暗い(F値大)」として示すように相対的に小さな入射角度で以て出口スリット16に回折光が集光する。この場合、上記のように突片21の突出長さが小さいと、回折光の光束の外縁と突片21の内側端との間の隙間が大きくなり、例えば迷光Laの矢印で示すように回折光の光束の外縁外側に位置する迷光が出口スリット16を通り抜けてしまう。そこで、このように回折光の入射角度が小さい場合には、図1中に点線で示すように突出長さの大きな突片21を有する光トラップ部材20を用いる。これにより、迷光Laを除去しながら、回折光は遮ることなく通過させることができる。   On the other hand, when light with a large aperture (a large F value) is incident on the spectroscope 1, for example, as shown as “dark (large F value)” in FIG. 1, the exit slit has a relatively small incident angle. The diffracted light is condensed on 16. In this case, if the protruding length of the projecting piece 21 is small as described above, a gap between the outer edge of the light beam of the diffracted light and the inner end of the projecting piece 21 is increased, and for example, as shown by the arrow of the stray light La The stray light located outside the outer edge of the light beam passes through the exit slit 16. Therefore, when the incident angle of the diffracted light is small as described above, an optical trap member 20 having a projecting piece 21 having a large projecting length as shown by a dotted line in FIG. 1 is used. Thereby, the diffracted light can be allowed to pass through without removing the stray light La.

図2は光トラップ部材20の装着構造を示す断面図である。分光器1の出射ポート17側のハウジング壁面31の外側には位置決めピン32が立設されており、光トラップ部材20に穿設された孔に位置決めピン32を挿入することで光トラップ部材20の位置が決まる。さらに、出口スリット16を内側に備えるスリット部材33に穿設された孔に位置決めピン32を挿入することでスリット部材33の位置も決まる。   FIG. 2 is a sectional view showing the mounting structure of the optical trap member 20. A positioning pin 32 is erected on the outside of the housing wall 31 on the emission port 17 side of the spectrometer 1, and the positioning pin 32 is inserted into a hole drilled in the optical trap member 20, thereby The position is determined. Furthermore, the position of the slit member 33 is also determined by inserting the positioning pin 32 into the hole formed in the slit member 33 provided with the exit slit 16 inside.

光トラップ部材20としては、例えば、光束の絞りに応じて、F値:3、F値:4、F値:8、F値:16用などの突片21の突出長さの相違する複数のものを用意しておき、ユーザーがそのときの分光器1の仕様に応じて光トラップ部材20を適宜交換する。図2(a)は出射光束のF値が小さい場合、図2(b)は出射光束のF値が大きい場合の例であり、光トラップ部材20のみを交換することで回折光を遮ることなく迷光を極力減らすことができる。   As the optical trap member 20, for example, a plurality of protrusion lengths of the projecting pieces 21 for F value: 3, F value: 4, F value: 8, F value: 16, and the like differ depending on the diaphragm of the light flux. Prepare a thing, and a user replaces | exchanges the optical trap member 20 suitably according to the specification of the spectrometer 1 at that time. 2A shows an example in which the F value of the outgoing light beam is small, and FIG. 2B shows an example in which the F value of the outgoing light beam is large. By replacing only the optical trap member 20, the diffracted light is not blocked. Stray light can be reduced as much as possible.

なお、上記実施例では、光トラップ部材20自体を交換することで突片21の突出長さを変えるようにしたが、例えば突片21をスライド移動可能な構造としておき、そのスライドによってユーザーが突出長さを変更可能としてもよい。   In the above embodiment, the protruding length of the protruding piece 21 is changed by exchanging the optical trap member 20 itself. However, for example, the protruding piece 21 is configured to be slidable and the user protrudes by sliding. The length may be changeable.

また、上記実施例は本発明の一例であるから、本発明の趣旨の範囲で変形、修正、追加を行っても本願特許請求の範囲に包含される。   Moreover, since the said Example is an example of this invention, even if it changes, corrects, and is added in the range of the meaning of this invention, it is included by the claim of this application.

本発明の一実施例による分光器における光トラップ部材の構造と原理を示す概略断面図。The schematic sectional drawing which shows the structure and principle of the optical trap member in the spectrometer by one Example of this invention. 本実施例の分光器における光トラップ部材の装着構造を示す断面図。Sectional drawing which shows the mounting structure of the optical trap member in the spectrometer of a present Example. 分光器の概略構成図。The schematic block diagram of a spectrometer.

符号の説明Explanation of symbols

1…分光器
11…入射ポート
12…入口スリット
13…反射鏡(コリメート鏡)
14…凹面回折格子
15…反射鏡(フォーカス鏡)
16…出口スリット
17…出射ポート
20…光トラップ部材
21…突片
22…凹部
2…光源
3…入射光学系
31…ハウジング壁面
32…位置決めピン
33…スリット部材
DESCRIPTION OF SYMBOLS 1 ... Spectroscope 11 ... Incident port 12 ... Entrance slit 13 ... Reflector (collimator mirror)
14 ... Concave diffraction grating 15 ... Reflector (focus mirror)
16 ... Exit slit 17 ... Output port 20 ... Light trap member 21 ... Projection piece 22 ... Recess 2 ... Light source 3 ... Incoming optical system 31 ... Housing wall surface 32 ... Positioning pin 33 ... Slit member

Claims (2)

入口スリット、波長分散素子、出口スリットを具備し、入口スリットを通して入射される光の絞りを変えることにより出口スリットから出射する回折光の絞りを変えることが可能な分光器において、
前記出口スリットの直前の光路上に、光束の外縁外側から光軸方向に突出する突片を有する迷光遮蔽用の光トラップを備え、該光トラップの突片の突出長さが前記出口スリットから取り出される回折光の絞りに応じて変更可能な構造であることを特徴とする分光器。
In a spectrometer that includes an entrance slit, a wavelength dispersion element, and an exit slit and can change the aperture of diffracted light emitted from the exit slit by changing the aperture of light incident through the entrance slit.
Provided on the optical path immediately before the exit slit is a stray light shielding optical trap having a projecting piece projecting in the optical axis direction from the outer edge of the luminous flux, and the projecting length of the projecting piece of the optical trap is taken out from the exit slit. A spectroscope having a structure that can be changed according to the diaphragm of the diffracted light.
前記光トラップは分光器本体に着脱可能であって、前記出口スリットから取り出される回折光の絞りに応じて前記突片の突出長さが相違する光トラップに交換する構造であることを特徴とする請求項1に記載の分光器。   The optical trap can be attached to and detached from the spectroscope main body, and the optical trap has a structure that is replaced with an optical trap having a different protrusion length of the protruding piece according to the diaphragm of the diffracted light extracted from the exit slit. The spectroscope according to claim 1.
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Cited By (8)

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CN102792135A (en) * 2010-04-19 2012-11-21 台湾超微光学股份有限公司 Micro spectrometer with stray light filtering structure
EP2602645A1 (en) * 2011-12-09 2013-06-12 Agency For Defense Development Beam dump for particle counter or fluorescence detector
CN103759826A (en) * 2010-04-19 2014-04-30 台湾超微光学股份有限公司 Micro spectrometer with stray light filtering structure
CN104457984A (en) * 2014-12-30 2015-03-25 中国科学院长春光学精密机械与物理研究所 Low-stray-light small monochrometer
JP2017223494A (en) * 2016-06-14 2017-12-21 株式会社島津製作所 Spectroscope and incident light restriction member used for the same
JP2018009885A (en) * 2016-07-14 2018-01-18 株式会社島津製作所 Spectrometer
US10641656B1 (en) 2018-12-20 2020-05-05 Shimadzu Corporation Spectrometer and incident light limiting member to be used for the same
US11169090B2 (en) * 2017-10-19 2021-11-09 Konica Minolta, Inc. Diffracted light removal slit and optical sample detection system using same

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102792135A (en) * 2010-04-19 2012-11-21 台湾超微光学股份有限公司 Micro spectrometer with stray light filtering structure
CN103759826A (en) * 2010-04-19 2014-04-30 台湾超微光学股份有限公司 Micro spectrometer with stray light filtering structure
US8717561B2 (en) 2010-04-19 2014-05-06 Oto Photonics, Inc. Miniature spectrometer with stray light filtering structure
EP2602645A1 (en) * 2011-12-09 2013-06-12 Agency For Defense Development Beam dump for particle counter or fluorescence detector
CN104457984A (en) * 2014-12-30 2015-03-25 中国科学院长春光学精密机械与物理研究所 Low-stray-light small monochrometer
JP2017223494A (en) * 2016-06-14 2017-12-21 株式会社島津製作所 Spectroscope and incident light restriction member used for the same
JP2018009885A (en) * 2016-07-14 2018-01-18 株式会社島津製作所 Spectrometer
US11169090B2 (en) * 2017-10-19 2021-11-09 Konica Minolta, Inc. Diffracted light removal slit and optical sample detection system using same
US10641656B1 (en) 2018-12-20 2020-05-05 Shimadzu Corporation Spectrometer and incident light limiting member to be used for the same

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