KR102491141B1 - Apertureless sprctrometer - Google Patents

Abstract

The hard aperture-less spectrometer according to the present embodiment includes a housing, a collimator for collimating light provided from the soft aperture of the target, a diffraction grating for splitting the collimated light, a concentrator for condensing the split light, and An optical detector receiving the light output from the concentrator and detecting a desired feature is included.

Description

APERTURELESS SPRCTROMETER}

The present technology relates to an upper process spectrometer.

A spectrometer refers to an instrument that decomposes light, that is, electromagnetic waves absorbed or emitted by a target material according to a difference in wavelength and measures an intensity distribution for each wavelength.

In order to perform spectroscopy using a spectrometer, an aperture is formed so that target light is introduced. However, the aperture degrades the quality of the spectral light by limiting the characteristics of light, and there is a difficulty in that the size of the spectrometer cannot be reduced by the aperture.

One of the problems to be solved by this embodiment is to solve the above-mentioned difficulties of the prior art. That is, one of the problems to be solved by the present embodiment is to provide a small spectrometer without deteriorating the spectral quality due to not including an aperture.

The hard aperture-less spectrometer according to the present embodiment includes a housing, a collimator for collimating light provided from the soft aperture of the target, a diffraction grating for splitting the collimated light, a concentrator for condensing the split light, and An optical detector receiving the light output from the concentrator and detecting a desired feature is included.

According to one aspect of this embodiment, the soft aperture is formed by providing excitation light to the target.

According to one aspect of this embodiment, the spectrometer further includes an excitation light source providing excitation light to a target to form a soft aperture.

According to one aspect of this embodiment, the excitation light source is located outside the collimator.

According to one aspect of this embodiment, a spectrometer wherein a collimator, a diffraction grating, a concentrator and a light detector are housed within the housing.

According to one aspect of this embodiment, the collimator is located outside the housing.

According to one aspect of this embodiment, the spectrometer provides light provided from the soft aperture of the target to a collimator, and further includes a beam delivery device including a plurality of lenses.

According to one aspect of this embodiment, the excitation light source is located inside the spectrometer, the spectrometer further includes any one of a dichroic mirror and a beam splitter, and the excitation light provided by the excitation light source is any one of the dichroic mirror and the beam splitter. It is provided to the target through one to form a soft aperture.

The hard aperture-less Raman spectrometer according to the present embodiment includes an excitation light source for providing excitation light, a housing, and a collimator for collimating Raman light formed by providing the excitation light to the soft aperture of the target. , a diffraction grating that splits the collimated Raman light, a concentrator that collects the split Raman light, and an optical detector that receives the light output from the concentrator and detects a target feature.

According to one aspect of this embodiment, the soft aperture is formed by providing excitation light to the target.

According to one aspect of this embodiment, the Raman spectrometer further includes an excitation light source providing excitation light to a target to form a soft aperture.

According to one aspect of this embodiment, the excitation light source is located outside the Raman spectrometer.

According to one aspect of this embodiment, the Raman spectrometer also has a collimator, diffraction grating, concentrator and photodetector housing within the housing.

According to one aspect of this embodiment, in the Raman spectrometer, the collimator is located outside the housing.

According to one aspect of this embodiment, the Raman spectrometer provides light provided from the soft aperture of the target to a collimator, and further includes a beam delivery device including a plurality of lenses.

According to one aspect of this embodiment, the excitation light source is located inside the Raman spectrometer, the Raman spectrometer further includes any one of a dichroic mirror and a beam splitter, and the excitation light provided by the excitation light source is transmitted through the dichroic mirror and the beam splitter. is provided to the target through any one of them to form a soft aperture.

According to one aspect of this embodiment, the Raman spectrometer includes at least one of a band pass filter, a long pass filter, and a short pass filter for selectively filtering only Raman light.

According to the present embodiment, since a hard aperture that limits the characteristics of light is not included, the characteristics of light are not limited, and the size of the spectrometer can be miniaturized.

1 is a diagram showing the outline of a hard apertureless spectrometer (100a) according to this embodiment.
2 is a diagram showing the outline of a spectrometer 100b according to another embodiment.
3 is a diagram showing the outline of a spectrometer 100c according to another embodiment.
4 is a diagram showing the outline of a spectrometer 100d according to another embodiment.
5 is a diagram showing the outline of a spectrometer 100e according to another embodiment.

Since the description of the present invention is only an embodiment for structural or functional description, the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, since the embodiment can be changed in various ways and can have various forms, it should be understood that the scope of the present invention includes equivalents capable of realizing the technical idea.

Meanwhile, the meaning of terms described in this application should be understood as follows.

Singular expressions should be understood to include plural expressions unless the context clearly dictates otherwise, and terms such as “comprise” or “having” refer to a described feature, number, step, operation, component, part, or It is intended to specify that a combination exists, but it should be understood that it does not preclude the possibility of existence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

Each step may occur in a different order than the specified order unless the specific order is clearly stated in the context. That is, each step may occur in the same order as specified, may be performed substantially simultaneously, or may be performed in the reverse order.

The drawings referred to to describe the embodiments of the present disclosure are intentionally exaggerated in size, height, thickness, etc. for convenience of description and ease of understanding, and are not enlarged or reduced in proportion. Also, certain elements shown in the drawings may be intentionally reduced and expressed, and other elements may be intentionally enlarged and expressed.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs, unless defined otherwise. Terms such as those defined in commonly used dictionaries should be interpreted as consistent with the meanings in the context of the related art, and cannot be interpreted as having ideal or excessively formal meanings unless explicitly defined in this application. .

In the embodiment shown below, all lenses can be replaced with mirrors, and a convex lens can be replaced with a concave mirror and a concave lens can be replaced with a convex mirror according to a curved surface, for example. Diffraction gratings can be used for both transmission and reflection types.

1 is a diagram showing the outline of a hard apertureless spectrometer (100a) according to this embodiment. Referring to FIG. 1 , the spectrometer 100a according to the present embodiment does not have a hard aperture for determining wavelength resolution and only has a hole for guiding light into the spectrometer. The spectrometer 100a according to this embodiment includes a collimator 120 that forms collimated light from incident light, a diffraction grating 130 that disperses and provides collimated light, and spatially spread light after dispersion. It includes a condenser 140 for collecting and a photodetector 150 for detecting a desired characteristic in the light condensed by the condenser 140.

Conventionally, a slit or aperture is formed at the entrance of a spectrometer in order to secure a parallel light separation margin and obtain dispersion resolution. Since the aperture formed in the spectrometer according to the prior art physically exists, it is hereinafter referred to as a hard-aperture. The size of the hard aperture determines the dispersion resolution and/or wavelength resolution of the spectrometer because it defines the minimum value of the spatial size of each wavelength region that appears dispersed. At this time, the hard aperture corresponds to a spatial filter through which incident light passes.

Such a hard aperture restricts the properties of light provided to the spectrometer, and there is a problem in that the spectrometer cannot be made small by the hard aperture. However, the spectroscope according to this embodiment uses a soft aperture without introducing a hard aperture to solve the above-mentioned difficulties of the prior art.

This embodiment relates to a spectrometer using a soft aperture 110. According to this embodiment, a simple spectrometer can be formed by adopting the soft aperture 110. A soft aperture 110 is an aperture virtually formed in a spectroscopic area of a target requiring spectroscopy. Hereinafter, the term soft aperture 110 is used as a concept contrasting with a physically existing hard aperture.

A soft aperture 110 refers to a focal region or imaging region formed on a target and transmitted to a collimator 120 of the spectrometer 100 . The soft aperture 110 may include an area imaged on a target by a beam delivery device located outside the collimator.

For spectroscopy, light generated in the soft aperture 110 area is transmitted to the inside of the spectrometer 100a. The transmitted light is converted into parallel light by the collimator 120 inside the spectrometer 100a and is split into light of different wavelengths by passing through or reflecting it through the diffraction grating 130, and spatially spreading light into a condenser ( 140), and the detector 150 detects a desired characteristic.

The target T is an object to be spectralized. The soft aperture 110 formed by dp of the target T may have various shapes such as a prismatic shape such as a triangle or a square, a circular shape, an elliptical shape, or a straight line. In one embodiment, excitation light provided by a light source 200 is irradiated onto the target T to form a soft aperture 110 region. The excitation light source 200 may form a focus on the target T using a lens (not shown) or a mirror 210 (see FIG. 5). The focal point serves as a soft aperture 110 that forms a target area required for spectroscopy and guides the light generated from the target T to the spectrometer. For example, the excitation light source 200 may be located outside the spectrometer as illustrated in FIGS. 1 to 4 . As another example, the excitation light source 200 may be located inside the spectrometer as illustrated in FIG. 5 .

The excitation light source 200 may adjust the wavelength and intensity of the excitation light provided, and the size and shape of the soft aperture 110 region. In one embodiment, the size of the soft aperture 110 may be determined by the focal size of the excitation light. The shape of the soft aperture 110 can be arbitrarily formed, such as circular, elliptical, or rectangular, by installing a spatial filter on an optical path until excitation light reaches the target.

2 is a diagram showing the outline of a spectrometer 100b according to another embodiment. Hereinafter, for concise and clear description, descriptions of the same or similar elements as those in the above-described embodiment may be omitted. Referring to FIG. 2 , since the collimator 120 is located outside the spectrometer 100b, values such as a focal length and a diameter can be freely changed as needed.

Optical elements such as a collimator in the prior art spectrometer use a fixed optical system. However, unlike the prior art, the present embodiment has the advantage of being able to more effectively transfer the area to be spectroscopic formed in the soft aperture 110 of the target T to the spectrometer 100b by selecting and using an appropriate collimator 120. do.

In one embodiment, there is a hole at the entrance of the spectrometer 100b for passing collimated light generated in the spectroscopic region of the target, leading the light to be spectroscopic into the spectrometer.

Since the light collimated as collimated light by the collimator 120 is guided to the spectrometer, the size of the light is determined by the size of the collimator 120. Therefore, since the size of the hole in this embodiment may be larger than the size of the hole illustrated in FIG. 1 , external light may penetrate into the spectrometer.

In order to minimize the effect of such stray light, a bellows box-shaped lens barrel is placed in the optical path around the hole to scatter and remove the stray light, or a band pass filter, long pass filter and By arranging one or more types of short pass filters, the effect of miscellaneous light penetrating into the spectrometer can be minimized.

3 is a diagram showing the outline of a spectrometer 100c according to another embodiment. Hereinafter, for concise and clear description, descriptions of the same or similar elements as those in the above-described embodiment may be omitted. Referring to FIG. 3 , a collimator 120 is located in a hall that is an entrance of a spectrometer. According to the present embodiment, one of several collimators can be selected and combined with the spectrometer 100c as needed, so that the focal length, diameter, and the like can be freely changed.

As in the embodiment illustrated in FIG. 3 and the embodiment illustrated in FIG. 2 , the size of the light is determined by the size of the collimator 120 . Similarly, in order to minimize the effect of stray light penetrating into the collimator, a bellows box-shaped lens barrel is placed in the optical path around the hole to scatter and remove the stray light, or a band pass filter or long pass filter is used. It is possible to minimize the effect of miscellaneous light penetrating into the spectrometer by arranging at least one of various types of filters, such as a filter and a short pass filter. As another example, the collimator 120 may be coated with a filter material so that the collimator 120 can function as such a filter.

4 is a diagram showing the outline of a spectrometer 100d according to another embodiment. Hereinafter, for concise and clear description, descriptions of the same or similar elements as those in the above-described embodiment may be omitted. Referring to FIG. 4 , the spectrometer 100d may further include a beam delivery device 160 . The beam delivery device 160 is an optical system that transmits the light formed in the soft aperture 110 to the collimator 120 inside the spectrometer, and may include a plurality of lenses. For example, the beam delivery device may be an imaging device. According to this embodiment, light transmission efficiency to the spectrometer 100d is improved by the beam delivery device 160 .

5 is a diagram showing the outline of a spectrometer 100e according to another embodiment. Hereinafter, for concise and clear description, descriptions of the same or similar elements as those in the above-described embodiment may be omitted. Referring to FIG. 5 , the excitation light source 200 is positioned inside the spectrometer 100e. The excitation light provided by the excitation light is reflected by a dichroic mirror 210 and provided to the target T to form the soft aperture 110 . According to an embodiment not shown, the excitation light provided by the excitation light is provided to the target T by a beam splitter (not shown) to form the soft aperture 110 .

Another example of a spectrometer using an excitation light may be a Raman spectrometer. The Raman spectrometer uses a region formed in the target by the excitation light as the first order light or Raman light of the second order light of a different wavelength formed by the first order light as the soft aperture 110, and the spectrometer according to this embodiment uses the Raman light It can function as a collimator. At this time, an optical filter such as a bandpass filter, a long pass filter, and/or a short pass filter capable of filtering only Raman light is installed inside or outside the spectrometer. can be located

Although it has been described with reference to the embodiments shown in the drawings to aid understanding of the present invention, this is an embodiment for implementation and is only exemplary, and those having ordinary knowledge in the field can make various modifications and equivalents therefrom. It will be appreciated that other embodiments are possible. Therefore, the true technical scope of protection of the present invention will be defined by the appended claims.

100a, 100b, 100c, 100d, 100e: hard apertureless spectrometers
110: soft aperture 120: collimator
130: diffraction grating 140: concentrator
150: photo detector 160: beam delivery device
200 excitation light source 210 dichroic mirror

Claims (19)

housing;
a collimator for collimating light provided from the soft aperture of the target;
a diffraction grating that splits the collimated light;
a concentrator condensing the split light; and
Receiving the light output by the concentrator,
The soft aperture is formed by providing excitation light to the target,
A hard apertureless spectrometer that includes a photodetector to detect the desired feature. delete According to claim 1,
The spectrometer,
and an excitation light source providing excitation light to the target to form the soft aperture. According to claim 3,
The excitation light source is located outside the spectrometer. According to claim 1,
The spectrometer,
in the housing
A spectrometer housing the collimator, the diffraction grating, the concentrator and the photodetector. According to claim 1,
The spectrometer,
A collimator in which the collimator is located outside the housing. According to claim 1,
The spectrometer,
The spectrometer further comprising a beam delivery device including a plurality of lenses to provide the light provided from the soft aperture of the target to the collimator. According to claim 1,
the excitation light source is located inside the collimator;
the spectrometer
Further comprising a dichroic mirror,
The excitation light provided by the excitation light source is provided to the target through one of the dichroic mirror and the beam splitter to form a soft aperture. According to claim 1,
the housing,
A hole through which the light provided from the soft aperture is introduced;
In the hall,
At least one filter of a pleated box-shaped lens barrel, a band pass filter, a long pass filter, and a short pass filter is further disposed,
A collimator coated with a filter material on the collimator. an excitation light source providing excitation light;
housing;
a collimator for collimating Raman light formed by providing the excitation light to a soft aperture of a target;
a diffraction grating that splits the collimated Raman light;
a concentrator for condensing the split Raman light; and
Receiving the light output by the concentrator,
The soft aperture is formed by providing excitation light to the target,
A hard apertureless Raman spectrometer that includes a photodetector to detect the desired feature.
delete According to claim 10,
The Raman spectrometer,
The Raman spectrometer further includes an excitation light source providing excitation light to the target to form the soft aperture. According to claim 12,
The excitation light source is a Raman spectrometer located outside the Raman spectrometer. According to claim 10,
The Raman spectrometer,
in the housing
A Raman spectrometer housing the collimator, the diffraction grating, the concentrator, and the photodetector. According to claim 10,
The Raman spectrometer,
A Raman spectrometer in which the collimator is located outside the housing. According to claim 10,
The Raman spectrometer,
The Raman spectrometer further comprises a beam delivery device including a plurality of lenses to provide the light provided from the soft aperture of the target to the collimator. According to claim 10,
The excitation light source is located inside the Raman spectrometer,
The Raman spectrometer
Further comprising any one of a dichroic mirror and a beam splitter,
Excitation light provided by the excitation light source is provided to the target through one of the dichroic mirror and the beam splitter to form a soft aperture. According to claim 10,
The Raman spectrometer,
A Raman spectrometer comprising at least one of a band pass filter, a long pass filter, and a short pass filter for selectively filtering only the Raman light. According to claim 10,
the housing,
A hole through which the light provided from the soft aperture is introduced;
In the hole, one or more filters of a bellows box type barrel, a band pass filter, a long pass filter, and a short pass filter are further disposed,
A Raman spectrometer coated with a filter material on the collimator.

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