JP2008176095A5 - - Google Patents
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- Publication number
- JP2008176095A5 JP2008176095A5 JP2007009926A JP2007009926A JP2008176095A5 JP 2008176095 A5 JP2008176095 A5 JP 2008176095A5 JP 2007009926 A JP2007009926 A JP 2007009926A JP 2007009926 A JP2007009926 A JP 2007009926A JP 2008176095 A5 JP2008176095 A5 JP 2008176095A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- mask
- forming
- etching
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims 10
- 238000005530 etching Methods 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 6
- 230000001678 irradiating effect Effects 0.000 claims 4
- 230000031700 light absorption Effects 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007009926A JP2008176095A (ja) | 2007-01-19 | 2007-01-19 | パターン形成方法及び薄膜トランジスタの作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007009926A JP2008176095A (ja) | 2007-01-19 | 2007-01-19 | パターン形成方法及び薄膜トランジスタの作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008176095A JP2008176095A (ja) | 2008-07-31 |
| JP2008176095A5 true JP2008176095A5 (https=) | 2010-01-21 |
Family
ID=39703160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007009926A Withdrawn JP2008176095A (ja) | 2007-01-19 | 2007-01-19 | パターン形成方法及び薄膜トランジスタの作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008176095A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6961326B2 (ja) * | 2016-03-30 | 2021-11-05 | 古河電気工業株式会社 | レーザ光遮蔽材 |
| GB2590428B (en) * | 2019-12-17 | 2024-08-14 | Flexenable Tech Limited | Semiconductor devices |
| CN112271195A (zh) * | 2020-10-22 | 2021-01-26 | Oppo广东移动通信有限公司 | 发光元件及其制备方法、显示屏和电子设备 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0535207A (ja) * | 1991-08-02 | 1993-02-12 | Fuji Xerox Co Ltd | Ｅｌ駆動装置 |
| JP4781066B2 (ja) * | 2004-09-30 | 2011-09-28 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| JP4698998B2 (ja) * | 2004-09-30 | 2011-06-08 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
| JP2006148082A (ja) * | 2004-10-19 | 2006-06-08 | Semiconductor Energy Lab Co Ltd | 配線基板及び半導体装置の作製方法 |
| JP5238132B2 (ja) * | 2005-02-03 | 2013-07-17 | 株式会社半導体エネルギー研究所 | 半導体装置、モジュール、および電子機器 |
| JP5116251B2 (ja) * | 2005-05-20 | 2013-01-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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2007
- 2007-01-19 JP JP2007009926A patent/JP2008176095A/ja not_active Withdrawn