JP2008174402A - Die for molding glass substrate, method of manufacturing glass substrate, method of manufacturing glass substrate for information recording medium, and method of manufacturing information recording medium - Google Patents

Die for molding glass substrate, method of manufacturing glass substrate, method of manufacturing glass substrate for information recording medium, and method of manufacturing information recording medium Download PDF

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JP2008174402A
JP2008174402A JP2007006914A JP2007006914A JP2008174402A JP 2008174402 A JP2008174402 A JP 2008174402A JP 2007006914 A JP2007006914 A JP 2007006914A JP 2007006914 A JP2007006914 A JP 2007006914A JP 2008174402 A JP2008174402 A JP 2008174402A
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glass substrate
molding surface
molding
glass
information recording
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Hideki Kawai
秀樹 河合
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Konica Minolta Opto Inc
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/088Flat discs

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  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a die for producing a glass substrate to be used in an information recording medium by press-molding molten glass, wherein the die can suppress sticking of a glass substrate when it is released from the die to prevent development of break and cracks of the glass substrate. <P>SOLUTION: The die for molding a glass substrate comprises a lower die having a first molding surface for receiving molten glass and an upper die having a second molding surface for pressurizing the molten glass between the second molding surface and the first molding surface. At least one of the first molding surface and the second molding surface is convex, and the gap distance between the first molding surface and the second molding surface at the time of pressurizing the molten glass is minimum at a position becoming as the center of the glass substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、溶融ガラスをプレス成形して情報記録媒体に用いるガラス基板を製造するためのガラス基板成形用金型、該成形用金型を用いたガラス基板の製造方法、該製造方法で製造したガラス基板を用いた情報記録媒体用ガラス基板の製造方法及び情報記録媒体の製造方法に関する。   The present invention relates to a glass substrate molding die for producing a glass substrate used for an information recording medium by press molding molten glass, a method for producing a glass substrate using the molding die, and the production method. The present invention relates to a method for manufacturing a glass substrate for an information recording medium using a glass substrate and a method for manufacturing an information recording medium.

磁気、光、光磁気等の性質を利用した記録層を有する情報記録媒体のなかで、代表的なものとして磁気ディスクがある。磁気ディスク用基板として、従来アルミニウム基板が広く用いられていた。しかし、近年、記録密度向上のための磁気ヘッド浮上量の低減の要請に伴い、アルミニウム基板よりも表面の平滑性に優れ、しかも表面欠陥が少ないことから磁気ヘッド浮上量の低減を図ることができるガラス基板を磁気ディスク用基板として用いる割合が増えてきている。   Among information recording media having a recording layer utilizing properties such as magnetism, light, and magnetomagnetism, a typical example is a magnetic disk. Conventionally, aluminum substrates have been widely used as magnetic disk substrates. However, in recent years, with the demand for a reduction in the flying height of the magnetic head for improving the recording density, the surface smoothness is superior to that of an aluminum substrate and the surface defects are few, so that the flying height of the magnetic head can be reduced. The proportion of using glass substrates as magnetic disk substrates is increasing.

このような磁気ディスク等の情報記録媒体用ガラス基板は、ブランク材と呼ばれるガラス基板に研磨加工等を施すことによって製造される。ガラス基板は、プレス成形によって製造する方法や、フロート法等によって作製された板ガラスを切断して製造する方法等が知られている。これらの方法うち、溶融ガラスを直接プレス成形することによってガラス基板を製造する方法は、特に高い生産性が期待できることから注目されている。   Such a glass substrate for an information recording medium such as a magnetic disk is manufactured by subjecting a glass substrate called a blank material to polishing. A method for producing a glass substrate by press molding, a method for producing a glass substrate by cutting a plate glass produced by a float method, and the like are known. Among these methods, a method of producing a glass substrate by directly press-molding molten glass is attracting attention because it can be expected to have particularly high productivity.

しかし、プレス成形によってガラス基板を製造する方法においては、上下の金型でプレス成形した後、成形されたガラス基板が金型に強く張り付いてしまい、離型の際にガラス基板が割れたり、クラックが発生する場合があるという問題があった。   However, in the method of producing a glass substrate by press molding, after the press molding with the upper and lower molds, the molded glass substrate strongly sticks to the mold, and the glass substrate is broken at the time of mold release, There was a problem that cracks may occur.

溶融ガラスをプレス成形する方法ではなく、ガラス素材を加熱・軟化させてプレス成形し、ガラス基板を成形する方法においては、上型に設けた直径1mm程度の貫通孔から不活性気体等を供給してガラス基板を離型する方法が提案されている(例えば、特許文献1を参照。)。
特開2002−187727号公報
In the method of press molding by heating and softening a glass material, not by the method of press molding molten glass, and molding the glass substrate, an inert gas or the like is supplied from a through hole with a diameter of about 1 mm provided in the upper mold. A method of releasing the glass substrate has been proposed (see, for example, Patent Document 1).
JP 2002-187727 A

しかしながら、溶融ガラスを直接プレス成形してガラス基板を製造する方法は、ガラス素材を加熱・軟化させてプレス成形する方法と比較して、プレス開始時点のガラスの粘性が非常に低いという特徴がある。そのため、溶融ガラスを直接プレス成形してガラス基板を製造する方法において上記のような貫通孔を有する金型を用いると、貫通孔に溶融ガラスが入り込むためガラス基板に凸部が生じてしまい、研磨等の後工程に余分な時間と労力を要するという問題があった。また、貫通孔に入り込んだガラスが起点となってガラス基板に割れやクラックが発生し易いという問題もあった。   However, the method of directly press-molding molten glass to produce a glass substrate is characterized in that the viscosity of the glass at the start of pressing is very low compared to the method of press-molding by heating and softening a glass material. . Therefore, if a mold having a through-hole as described above is used in a method for producing a glass substrate by directly press-molding molten glass, the molten glass enters the through-hole, resulting in a convex portion on the glass substrate, and polishing. There is a problem that extra time and labor are required for the subsequent processes. In addition, there is a problem that the glass that has entered the through-hole is a starting point, and the glass substrate is easily cracked or cracked.

本発明は上記のような技術的課題に鑑みてなされたものであり、本発明の目的は、溶融ガラスをプレス成形して情報記録媒体に用いるガラス基板を製造するためのガラス基板成形用金型において、離型の際のガラス基板の張り付きを抑制し、ガラス基板の割れやクラックの発生を防止することができるガラス基板成形用金型を提供することである。更に、本発明の別の目的は、該ガラス基板成形用金型を用いたガラス基板の製造方法、該製造方法で製造したガラス基板を用いた情報記録媒体用ガラス基板の製造方法及び情報記録媒体の製造方法を提供することである。   The present invention has been made in view of the technical problems as described above, and an object of the present invention is to provide a glass substrate molding die for producing a glass substrate used for an information recording medium by press molding molten glass. In other words, it is to provide a glass substrate molding die capable of suppressing the sticking of the glass substrate at the time of mold release and preventing the glass substrate from cracking or cracking. Furthermore, another object of the present invention is to provide a method for producing a glass substrate using the mold for molding a glass substrate, a method for producing a glass substrate for an information recording medium using the glass substrate produced by the production method, and an information recording medium. It is to provide a manufacturing method.

上記の課題を解決するために、本発明は以下の特徴を有するものである。   In order to solve the above problems, the present invention has the following features.

1. 溶融ガラスを受容する第1の成形面を有する下型と、前記第1の成形面との間で前記溶融ガラスを加圧するための第2の成形面を有する上型とを備え、前記溶融ガラスをプレス成形して情報記録媒体に用いるガラス基板を製造するためのガラス基板成形用金型において、前記第1の成形面及び前記第2の成形面の少なくとも一方は凸面であり、前記溶融ガラスを加圧する時点における前記第1の成形面と前記第2の成形面との間隙量が、前記ガラス基板の中心部となる位置で最小となることを特徴とするガラス基板成形用金型。   1. A lower mold having a first molding surface for receiving molten glass; and an upper mold having a second molding surface for pressing the molten glass between the first molding surface and the molten glass. In a glass substrate molding die for producing a glass substrate used for an information recording medium by press molding, at least one of the first molding surface and the second molding surface is a convex surface, and the molten glass is A glass substrate molding die, wherein a gap amount between the first molding surface and the second molding surface at the time of pressurization is minimized at a position which is a central portion of the glass substrate.

2. 前記ガラス基板の最外周部となる位置における前記間隙量と、中心部となる位置における前記間隙量との差が3μm〜100μmであることを特徴とする前記1に記載のガラス基板成形用金型。   2. 2. The mold for molding a glass substrate according to 1 above, wherein a difference between the gap amount at a position serving as the outermost peripheral portion of the glass substrate and the gap amount at a position serving as a central portion is 3 μm to 100 μm. .

3. 溶融ガラスを受容する第1の成形面を有する下型と、前記第1の成形面との間で前記溶融ガラスを加圧するための第2の成形面を有する上型とを備えたガラス基板成形用金型を用いて情報記録媒体に用いるガラス基板を製造するガラス基板の製造方法において、前記下型が有する第1の成形面に溶融ガラスを供給する溶融ガラス供給工程と、前記第1の成形面及び前記第2の成形面で前記溶融ガラスを加圧しながら冷却してガラス基板を得る加圧工程と、前記加圧工程の後、前記ガラス基板への加圧を解除して型開きを行う離型工程と、を有し、前記第1の成形面及び前記第2の成形面の少なくとも一方は凸面であり、前記溶融ガラスを加圧する時点における前記第1の成形面と前記第2の成形面との間隙量が、前記ガラス基板の中心部となる位置で最小となることを特徴とするガラス基板の製造方法。   3. Glass substrate molding comprising a lower mold having a first molding surface for receiving molten glass and an upper mold having a second molding surface for pressing the molten glass between the first molding surfaces In the manufacturing method of the glass substrate which manufactures the glass substrate used for an information recording medium using the metal mold | die, the molten glass supply process which supplies a molten glass to the 1st shaping | molding surface which the said lower mold has, and said 1st shaping | molding A pressing step for obtaining a glass substrate by cooling the molten glass while pressing the molten glass on the surface and the second molding surface; and after the pressing step, releasing the pressure on the glass substrate to perform mold opening A mold release step, wherein at least one of the first molding surface and the second molding surface is a convex surface, and the first molding surface and the second molding at the time of pressurizing the molten glass. The amount of gap with the surface becomes the center of the glass substrate. Method for producing a glass substrate, characterized in that the minimum position.

4. 前記ガラス基板の最外周部となる位置における前記間隙量と、中心部となる位置における前記間隙量との差が5μm〜100μmであることを特徴とする前記3に記載のガラス基板の製造方法。   4). 4. The method for producing a glass substrate according to 3 above, wherein a difference between the gap amount at a position serving as the outermost peripheral portion of the glass substrate and the gap amount at a position serving as a central portion is 5 μm to 100 μm.

5. 前記3又は4に記載のガラス基板の製造方法により製造されたガラス基板を研磨する工程を有することを特徴とする情報記録媒体用ガラス基板の製造方法。   5. 5. A method for producing a glass substrate for an information recording medium, comprising a step of polishing a glass substrate produced by the method for producing a glass substrate according to 3 or 4 above.

6. 前記5に記載の情報記録媒体用ガラス基板の製造方法により製造された情報記録媒体用ガラス基板に記録層を形成する工程を有することを特徴とする情報記録媒体の製造方法。   6). 6. A method for producing an information recording medium, comprising a step of forming a recording layer on the glass substrate for information recording medium produced by the method for producing a glass substrate for information recording medium described in 5 above.

本発明によれば、溶融ガラスの中心部分の冷却速度を速めることができ、その結果、ガラス基板の張り付きを抑制することができる。従って、溶融ガラスをプレス成形して情報記録媒体に用いるガラス基板を製造する方法において、離型の際のガラス基板の割れやクラックの発生を防止することができる。   ADVANTAGE OF THE INVENTION According to this invention, the cooling rate of the center part of molten glass can be accelerated | stimulated, As a result, sticking of a glass substrate can be suppressed. Therefore, in the method for producing a glass substrate used for an information recording medium by press molding molten glass, it is possible to prevent the glass substrate from being cracked or cracked during release.

以下、本発明の実施の形態について図面を参照しながら詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(ガラス基板成形用金型)
図1は、本発明のガラス基板成形用金型の例を示す図である。ガラス基板成形用金型10は、溶融ガラスを受容する第1の成形面13を有する下型11と、第1の成形面との間で溶融ガラスを加圧するための第2の成形面を有する上型12とを備えている。
(Glass for glass substrate molding)
FIG. 1 is a view showing an example of a glass substrate molding die of the present invention. The glass substrate molding die 10 has a lower mold 11 having a first molding surface 13 for receiving molten glass and a second molding surface for pressing the molten glass between the first molding surface. An upper mold 12 is provided.

ガラス基板成形用金型10は、下型11の第1の成形面13が平面、上型12の第2の成形面14が凸面であり、溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dが、ガラス基板の中心部となる位置で最小(d0)となる。そのため、成形によるガラス基板の張り付きを抑制することができ、離型の際のガラス基板の割れやクラックの発生を防止することができる。   In the glass substrate molding die 10, the first molding surface 13 of the lower mold 11 is a flat surface, the second molding surface 14 of the upper mold 12 is a convex surface, and the first molding surface 13 at the time of pressurizing molten glass is used. And the second molding surface 14 have a minimum amount (d0) at a position that is the center of the glass substrate. Therefore, it is possible to suppress sticking of the glass substrate due to molding, and it is possible to prevent the glass substrate from being cracked or cracked during release.

このように、第1の成形面13及び第2の成形面14の少なくとも一方を凸面とし、溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dが、ガラス基板の中心部となる位置で最小となるようにした金型を用いることでガラス基板の貼り付きを抑制することができる理由を説明する。   Thus, at least one of the first molding surface 13 and the second molding surface 14 is a convex surface, and the gap amount d between the first molding surface 13 and the second molding surface 14 at the time of pressurizing the molten glass is as follows. The reason why sticking of the glass substrate can be suppressed by using a mold that is minimized at the position of the center of the glass substrate will be described.

溶融ガラスをプレス成形することによってガラス基板を製造する方法においては、所定温度に保たれた金型に、金型よりも高温の溶融ガラスが供給される。高温の溶融ガラスは、上下金型で加圧される間に変形すると同時に放熱し、冷却固化してガラス基板が形成される。このときの放熱の大部分は金型との接触面から行われる。   In a method for producing a glass substrate by press molding molten glass, molten glass having a temperature higher than that of the mold is supplied to a mold maintained at a predetermined temperature. The hot molten glass is deformed while being pressed by the upper and lower molds, and simultaneously dissipates heat and solidifies by cooling to form a glass substrate. Most of the heat dissipation at this time is performed from the contact surface with the mold.

本発明者は、鋭意検討を重ね、冷却固化した後のガラス基板が金型に強く貼り付くのは、ガラス基板の中心部分と周辺部分とで冷却速度に差があり、中心部分が遅れて固化することが原因となっていることを突き止めた。図6は、従来の金型40でプレス成形した場合のガラス基板24の状態を示す断面図である。金型40は、下型41に形成された第1の成形面43と、上型42に形成された第2の成形面44がいずれも平面であり、溶融ガラスを加圧する時点における第1の成形面43と第2の成形面44との間隙量dは位置によらず均一である。この場合、ガラス基板24は中心部分よりも周辺部分の方が冷却速度が速く、先に固化する。周辺部分が先に固化して流動性を失った後のガラス基板の厚み方向の熱収縮量は、周辺部分よりも中心部分の方が大きくなる。そのため、ガラス基板の中心部分の肉厚が周辺部分の肉厚より薄くなり、金型との間に空隙45が生じる。この空隙45によってガラス基板24が真空吸着されたような状態となり、ガラス基板24が金型に強く張り付いてしまうのである。   The present inventor has made extensive studies and the glass substrate after cooling and solidification is strongly stuck to the mold because the cooling rate is different between the central part and the peripheral part of the glass substrate, and the central part is delayed and solidified. I found out that it was the cause. FIG. 6 is a cross-sectional view showing a state of the glass substrate 24 when it is press-molded with a conventional mold 40. In the mold 40, the first molding surface 43 formed on the lower mold 41 and the second molding surface 44 formed on the upper mold 42 are both flat, and the first molding point at the time when the molten glass is pressurized is used. The gap amount d between the molding surface 43 and the second molding surface 44 is uniform regardless of the position. In this case, the glass substrate 24 has a higher cooling rate in the peripheral portion than in the central portion, and solidifies first. The amount of heat shrinkage in the thickness direction of the glass substrate after the peripheral portion solidifies first and loses fluidity is greater in the central portion than in the peripheral portion. For this reason, the thickness of the central portion of the glass substrate is thinner than the thickness of the peripheral portion, and a gap 45 is formed between the glass substrate and the mold. The gap 45 causes the glass substrate 24 to be vacuum-sucked, and the glass substrate 24 strongly sticks to the mold.

これに対し、本発明のガラス基板成形用金型10は、下型11に形成された第1の成形面13は平面、上型12に形成された第2の成形面14は凸面となっている。図2は、本発明のガラス基板成形用金型10でプレス成形した場合のガラス基板26の状態を示す断面図である。溶融ガラスの冷却は金型との接触面からの放熱によるものが大部分であるが、冷却速度はガラス基板の肉厚に影響され、肉厚が薄いほど速く冷却が進む。ガラス基板成形用金型10は、第2の成形面14が凸面、第1の成形面13が平面であり、溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dが、ガラス基板の中心部となる位置で最小(d0)となっている。そのため、ガラス基板26の中心部分の肉厚が薄くなり、中心部分の冷却速度を速めることができる。その結果、中心部分の冷却速度が周辺部分と同等、あるいは周辺部分よりも速くなるため、図6の場合のような空隙45が生じることはなく、逆に周辺部分において金型からガラス基板が離れやすくなり、ガラス基板の貼り付きを抑制することができるのである。   In contrast, in the glass substrate molding die 10 of the present invention, the first molding surface 13 formed on the lower mold 11 is a flat surface, and the second molding surface 14 formed on the upper mold 12 is a convex surface. Yes. FIG. 2 is a cross-sectional view showing a state of the glass substrate 26 when press-molding with the glass substrate molding die 10 of the present invention. Although most of the cooling of the molten glass is due to heat radiation from the contact surface with the mold, the cooling rate is affected by the thickness of the glass substrate, and the cooling proceeds faster as the thickness is thinner. In the glass substrate molding die 10, the second molding surface 14 is a convex surface, the first molding surface 13 is a flat surface, and the first molding surface 13 and the second molding surface 14 at the time of pressing the molten glass The gap amount d is minimum (d0) at the position that is the center of the glass substrate. Therefore, the thickness of the central portion of the glass substrate 26 is reduced, and the cooling rate of the central portion can be increased. As a result, the cooling rate of the central portion is equal to or faster than that of the peripheral portion, so that the air gap 45 does not occur as in the case of FIG. 6, and conversely, the glass substrate is separated from the mold in the peripheral portion. It becomes easy and sticking of a glass substrate can be suppressed.

第1の成形面13及び第2の成形面14は、少なくとも一方が凸面であり、溶融ガラスを加圧する時点における間隙量dが、ガラス基板の中心部となる位置で最小となるような形状であれば良い。第1の成形面13が平面で第2の成形面が凸面であっても良いし、逆に第1の成形面13が凸面で第2の成形面が平面であっても良い。また、第1の成形面と第2の成形面の両方が凸面であっても良い。更に、何れか一方の面を凸面とし、他方の面をそれよりゆるやかな凹面とすることもできる。   At least one of the first molding surface 13 and the second molding surface 14 is a convex surface, and the gap amount d at the time of pressurizing the molten glass is such that the gap amount d is minimized at the center portion of the glass substrate. I just need it. The first molding surface 13 may be a flat surface and the second molding surface may be a convex surface. Conversely, the first molding surface 13 may be a convex surface and the second molding surface may be a flat surface. Further, both the first molding surface and the second molding surface may be convex surfaces. Furthermore, either one of the surfaces can be a convex surface, and the other surface can be a more concave concave surface.

図3は、本発明のガラス基板成形用金型10の変形例であるガラス基板成形用金型10a、10bでプレス成形した場合のガラス基板26a、26bの状態を示す断面図である。図3(a)に示すガラス基板成形用金型10aは、下型11aと上型12aとを有し、第1の成形面13aと第2の成形面14aの両方が凸面である。間隙量dはガラス基板の中心部となる位置で最小(d0)となっている。また、図3(b)に示すガラス基板成形用金型10bは、下型11bと上型12bとを有し、第2の成形面14bが凸面、第1の成形面13bがそれよりゆるやかな凹面である。この場合も、溶融ガラスを加圧する時点における間隙量dは、ガラス基板の中心部となる位置で最小(d0)となっている。   FIG. 3 is a cross-sectional view showing the state of the glass substrates 26a and 26b when the glass substrate forming molds 10a and 10b, which are modifications of the glass substrate forming mold 10 of the present invention, are press-molded. A glass substrate molding die 10a shown in FIG. 3A includes a lower mold 11a and an upper mold 12a, and both the first molding surface 13a and the second molding surface 14a are convex surfaces. The gap amount d is minimum (d0) at the position that is the center of the glass substrate. 3B has a lower mold 11b and an upper mold 12b, the second molding surface 14b is a convex surface, and the first molding surface 13b is gentler than that. It is concave. Also in this case, the gap amount d at the time of pressurizing the molten glass is the minimum (d0) at the position that is the center of the glass substrate.

金型の加工が容易であるという観点からは、凸面は球面形状とすることが好ましい。しかし、球面に限定されるものではなく、周辺部分よりも中心部分が高くなっている形状であれば、円錐形状や放物面形状等でも良い。また、連続的に高さが変化する形状に限らず、階段状に不連続に高さが変化する形状であっても良い。   From the viewpoint of easy processing of the mold, the convex surface is preferably a spherical shape. However, the shape is not limited to a spherical surface, and may be a conical shape or a parabolic shape as long as the central portion is higher than the peripheral portion. Further, the shape is not limited to a shape whose height changes continuously, but may be a shape whose height changes discontinuously in a staircase pattern.

溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dはガラス基板の中心部となる位置で最小となれば良く、ガラス基板の最外周部となる位置における間隙量(d1)と、中心部となる位置における間隙量(d0)との差に特に制限はない。実際には、ガラス基板の中心部分の冷却速度が周辺部分と同等、あるいは周辺部分よりも速くなるように、製造するガラス基板の外径や肉厚、ガラスの種類、金型の材質や温度等に応じて適宜設定すれば良い。通常、張り付きを十分に抑制する効果を得るためには、d1とd0との差を3μm以上とすることが好ましく、5μm以上とすることが更に好ましい。一方、d1とd0との差が100μmを超えると、得られたガラス基板を研磨して高い平面度を有する情報記録媒体用ガラス基板を製造するための加工工程に余分な時間が必要となる場合がある。このような観点から、ガラス基板の最外周部となる位置における間隙量(d1)と中心部となる位置における間隙量(d0)との差は、3μm〜100μmであることが好ましく、5μm〜100μmであることが更に好ましい。   The gap amount d between the first molding surface 13 and the second molding surface 14 at the time of pressurizing the molten glass may be minimized at the position that becomes the center of the glass substrate, and the position that becomes the outermost periphery of the glass substrate. There is no particular limitation on the difference between the gap amount (d1) at and the gap amount (d0) at the center position. Actually, the outer diameter and thickness of the glass substrate to be manufactured, the type of glass, the material and temperature of the mold, etc., so that the cooling rate of the central part of the glass substrate is equal to or faster than the peripheral part. What is necessary is just to set suitably according to. Usually, in order to obtain the effect of sufficiently suppressing the sticking, the difference between d1 and d0 is preferably 3 μm or more, more preferably 5 μm or more. On the other hand, when the difference between d1 and d0 exceeds 100 μm, extra time is required for the processing step for polishing the obtained glass substrate to produce a glass substrate for information recording medium having high flatness. There is. From such a viewpoint, the difference between the gap amount (d1) at the position serving as the outermost peripheral portion of the glass substrate and the gap amount (d0) at the position serving as the central portion is preferably 3 μm to 100 μm, and 5 μm to 100 μm. More preferably.

図2に示したガラス基板成形用金型10は、第1の成形面13が平面で、第2の成形面14が凸面となっている。この場合、第2の成形面14におけるガラス基板の最外周部となる位置と中心部となる位置との高さの差(h2)が、d1とd0との差に等しくなる。また、図3(a)に示したガラス基板成形用金型10aのように第1の成形面13aと第2の成形面14aの両方が凸面の場合には、第1の成形面13aにおけるガラス基板の最外周部となる位置と中心部となる位置との高さの差(h1)と、第2の成形面14aにおける高さの差(h2)の合計(h1+h2)が、d1とd0との差に等しくなる。更に、図3(b)に示したガラス基板成形用金型10bのように第1の成形面13bが凹面で、第2の成形面14bが凸面の場合、第2の成形面14bにおける高さの差(h2)の方が第1の成形面13bにおける高さの差(h1)よりも大きいことが必要であり、h2とh1との差(h2−h1)が、d1とd0との差に等しくなる。何れの場合においても、d1とd0との差が、好ましくは3μm〜100μm、更に好ましくは5μm〜100μmとなるように、h1やh2の大きさを決定すれば良い。   In the glass substrate molding die 10 shown in FIG. 2, the first molding surface 13 is a flat surface, and the second molding surface 14 is a convex surface. In this case, the height difference (h2) between the position of the outermost peripheral portion of the glass substrate and the position of the central portion on the second molding surface 14 is equal to the difference between d1 and d0. When both the first molding surface 13a and the second molding surface 14a are convex like the glass substrate molding die 10a shown in FIG. 3A, the glass on the first molding surface 13a. The sum (h1 + h2) of the height difference (h1) between the position that becomes the outermost peripheral portion and the position that becomes the central portion of the substrate and the height difference (h2) on the second molding surface 14a is d1 and d0. Is equal to the difference. Further, when the first molding surface 13b is concave and the second molding surface 14b is convex as in the glass substrate molding die 10b shown in FIG. 3B, the height at the second molding surface 14b. Difference (h2) is required to be larger than the height difference (h1) on the first molding surface 13b, and the difference between h2 and h1 (h2−h1) is the difference between d1 and d0. Is equal to In any case, the size of h1 and h2 may be determined so that the difference between d1 and d0 is preferably 3 μm to 100 μm, more preferably 5 μm to 100 μm.

第1の成形面13及び第2の成形面14の少なくとも一方は、ガラス基板と接触する全ての領域で凸面となっていることが最も好ましい。但し、凸面となっている領域は、必ずしもガラス基板と接触する全ての領域である必要はなく、本発明の効果が得られる範囲で、ガラス基板と接触する領域よりも小さい領域であっても良い。通常はガラス基板と接触する領域の直径の70%以上の直径の領域を凸面とすることが好ましく、80%以上の直径の領域を凸面とすることが更に好ましい。   Most preferably, at least one of the first molding surface 13 and the second molding surface 14 is a convex surface in all regions in contact with the glass substrate. However, the region which is a convex surface does not necessarily need to be the entire region in contact with the glass substrate, and may be a region smaller than the region in contact with the glass substrate as long as the effect of the present invention is obtained. . Usually, a region having a diameter of 70% or more of the diameter of a region in contact with the glass substrate is preferably a convex surface, and a region having a diameter of 80% or more is more preferably a convex surface.

本発明のガラス基板成形用金型10の材質は、各種の耐熱性ステンレス鋼、炭化タングステンを主成分とする超硬材料、炭化珪素、窒化珪素、窒化アルミニウム、カーボンなど、ガラス基板成形用金型の材質として公知の材料の中から適宜選択して用いることができる。また、耐熱性、耐酸化性等の向上のため、これらの材料の表面に各種金属やセラミックス、カーボンなどの保護膜を形成したものを用いることもできる。下型11と上型12とを同一の材料で構成しても良いし、それぞれ別の材料で構成しても良い。   The glass substrate molding die 10 of the present invention is made of various heat resistant stainless steels, super hard materials mainly composed of tungsten carbide, silicon carbide, silicon nitride, aluminum nitride, carbon, and the like. These materials can be appropriately selected from known materials. In addition, in order to improve heat resistance, oxidation resistance, etc., it is also possible to use a material in which a protective film such as various metals, ceramics, or carbon is formed on the surface of these materials. The lower mold 11 and the upper mold 12 may be made of the same material, or may be made of different materials.

なお、本発明のガラス基板成形用金型10は、1つの上型12に対して1つの下型11が組になった物であっても良いし、何れか一方、又は両方が複数であっても良い。例えば、1つの上型12に対して2つ以上の下型11が組となった物や、2つ以上の上型12と2つ以上の下型11が組になった物であっても良い。更に他の部材、例えば、ガラス基板の外径端面を形成するための外径規制部材等を備えていても良い。   The glass substrate molding die 10 of the present invention may be a product in which one lower die 11 is paired with one upper die 12, and one or both of them are plural. May be. For example, even if two or more lower molds 11 are combined with one upper mold 12 or two or more upper molds 12 and two or more lower molds 11 are combined. good. Furthermore, you may provide the other member, for example, the outer-diameter regulation member for forming the outer-diameter end surface of a glass substrate.

(ガラス基板の製造方法)
本発明におけるガラス基板の製造方法は、第1の成形面13を有する下型と11第2の成形面14を有する上型12とを備えたガラス基板成形用金型10を用いて、溶融ガラスをプレス成形してガラス基板を製造する方法であり、第1の成形面13に溶融ガラスを供給する溶融ガラス供給工程と、第1の成形面13及び第2の成形面14で溶融ガラスを加圧しながら冷却してガラス基板を得る加圧工程と、加圧工程の後、ガラス基板への加圧を解除して型開きを行う離型工程とを有している。第1の成形面13及び第2の成形面14の少なくとも一方は凸面であり、加圧工程において溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dが、ガラス基板の中心部となる位置で最小となる。
(Glass substrate manufacturing method)
The method for producing a glass substrate according to the present invention uses a glass substrate molding die 10 having a lower mold having a first molding surface 13 and an upper mold 12 having a second molding surface 14, and a molten glass. In which a molten glass is added to the first molding surface 13 by the molten glass supply step, and the first molding surface 13 and the second molding surface 14 add the molten glass. It has the pressurization process which obtains a glass substrate by cooling while pressing, and the mold release process which releases the pressurization to a glass substrate and performs mold opening after a pressurization process. At least one of the first molding surface 13 and the second molding surface 14 is a convex surface, and the gap amount d between the first molding surface 13 and the second molding surface 14 at the time when the molten glass is pressed in the pressing step. However, it becomes the minimum at the position which becomes the center of the glass substrate.

(溶融ガラス供給工程)
溶融ガラス供給工程は、下型11が有する第1の成形面13に溶融ガラスを供給する工程である。図4は、溶融ガラス供給工程における下型11と溶融ガラス23等を示す模式図である。ここでは、第1の成形面13が平面の場合の例を示している。先ず、流出ノズル21から溶融ガラス23を流出して下型11に供給する(図4(a))。その後、溶融ガラスが所定量に達するとブレード22によって溶融ガラス23を切断し、溶融ガラス23を分離する(図4(b))。
(Molten glass supply process)
The molten glass supply step is a step of supplying molten glass to the first molding surface 13 of the lower mold 11. FIG. 4 is a schematic diagram showing the lower mold 11, the molten glass 23, and the like in the molten glass supply process. Here, an example in which the first molding surface 13 is a plane is shown. First, the molten glass 23 flows out from the outflow nozzle 21 and is supplied to the lower mold 11 (FIG. 4A). Thereafter, when the molten glass reaches a predetermined amount, the molten glass 23 is cut by the blade 22 and the molten glass 23 is separated (FIG. 4B).

下型11は予め所定温度に加熱しておく。下型11の温度に特に制限はなく、ガラスの種類やガラス基板のサイズ等によって適宜決定すればよい。下型11の温度が低すぎるとガラス基板の平面度が悪化したり、転写面へのしわの発生等の問題が起こる。逆に、必要以上に温度を高くしすぎると、ガラスとの融着が発生したり、金型の劣化が著しくなることから好ましくない。通常は、成形するガラスのTg(ガラス転移点)−200℃からTg+100℃程度の温度範囲とすることが好ましい。   The lower mold 11 is heated in advance to a predetermined temperature. There is no restriction | limiting in particular in the temperature of the lower mold | type 11, What is necessary is just to determine suitably by the kind of glass, the size of a glass substrate, etc. If the temperature of the lower mold 11 is too low, the flatness of the glass substrate deteriorates, and problems such as generation of wrinkles on the transfer surface occur. On the other hand, if the temperature is set higher than necessary, it is not preferable because fusion with glass occurs or the mold deteriorates significantly. Usually, it is preferable to make it the temperature range of Tg (glass transition point) -200 degreeC of glass to shape | mold to Tg + 100 degreeC.

下型11の加熱手段にも特に制限はなく、公知の加熱手段の中から適宜選択して用いることができる。例えば、下型11の内部に埋め込んで使用するカートリッジヒーターや、下型11の外側に接触させて使用するシート状のヒーターなどを用いることができる。また、赤外線加熱装置や、高周波誘導加熱装置を用いて加熱することもできる。   There is no restriction | limiting in particular also in the heating means of the lower mold | type 11, It can select suitably from well-known heating means and can be used. For example, a cartridge heater that is used by being embedded inside the lower mold 11, a sheet heater that is used while being in contact with the outside of the lower mold 11, and the like can be used. Moreover, it can also heat using an infrared heating apparatus or a high frequency induction heating apparatus.

(加圧工程)
加圧工程は、第1の成形面13及び第2の成形面14で、溶融ガラスを加圧しながら冷却してガラス基板26を得る工程である。
(Pressure process)
The pressurizing step is a step of obtaining the glass substrate 26 by cooling the molten glass while applying pressure on the first molding surface 13 and the second molding surface 14.

図2を参照しながら説明する。溶融ガラス供給工程において溶融ガラス23が供給された下型11は、上型12と対向する位置まで水平移動する。その後、下型11の第1の成形面13と、上型12の第2の成形面14とで溶融ガラスを加圧する。溶融ガラスは第1の成形面13及び第2の成形面14との接触面から放熱することによって冷却・固化し、ガラス基板26となる。   This will be described with reference to FIG. The lower mold 11 supplied with the molten glass 23 in the molten glass supply process moves horizontally to a position facing the upper mold 12. Thereafter, the molten glass is pressurized with the first molding surface 13 of the lower mold 11 and the second molding surface 14 of the upper mold 12. The molten glass is cooled and solidified by dissipating heat from the contact surface with the first molding surface 13 and the second molding surface 14, and becomes a glass substrate 26.

上述のように、本発明の製造方法においては、第1の成形面13及び第2の成形面14の少なくとも一方が凸面であり、加圧工程において溶融ガラスを加圧する時点における第1の成形面13と第2の成形面14との間隙量dが、ガラス基板の中心部となる位置で最小となるガラス基板成形用金型10を使用する。そのため、ガラス基板26の中心部分の冷却速度が速くなり、ガラス基板の張り付きを抑制することができる。その結果、離型の際のガラス基板の割れやクラックの発生を防止することができる。   As described above, in the manufacturing method of the present invention, at least one of the first molding surface 13 and the second molding surface 14 is a convex surface, and the first molding surface at the time when the molten glass is pressed in the pressing step. A glass substrate molding die 10 is used in which the gap amount d between the first molding surface 13 and the second molding surface 14 is minimized at a position that is the center of the glass substrate. Therefore, the cooling rate of the central part of the glass substrate 26 is increased, and sticking of the glass substrate can be suppressed. As a result, it is possible to prevent the glass substrate from being cracked or cracked during release.

なお、上型12は、下型11と同様に所定温度に加熱されている。加熱温度や加熱手段については上述の下型11の場合と同様である。加熱温度は下型11と同じであっても良いし異なっていても良い。   The upper mold 12 is heated to a predetermined temperature similarly to the lower mold 11. The heating temperature and heating means are the same as in the case of the lower mold 11 described above. The heating temperature may be the same as or different from the lower mold 11.

下型11と上型12に荷重を負荷して溶融ガラスを加圧するための加圧手段は、公知の加圧手段を適宜選択して用いることができる。例えば、エアシリンダ、油圧シリンダ、サーボモータを用いた電動シリンダ等が挙げられる。   As a pressurizing means for applying a load to the lower mold 11 and the upper mold 12 to pressurize the molten glass, a known pressurizing means can be appropriately selected and used. For example, an air cylinder, a hydraulic cylinder, an electric cylinder using a servo motor, and the like can be given.

(離型工程)
離型工程は、加圧工程の後、ガラス基板への加圧を解除して型開きを行う工程である。本発明の製造方法においては、加圧工程で得られたガラス基板が金型に強く張り付くことはなく、型開きの際のガラス基板の割れやクラックの発生が防止されている。型開きの後は、真空吸着等、一般的な回収方法によってガラス基板を回収すれば良い。
(Release process)
The mold release step is a step of releasing the pressurization to the glass substrate after the pressurizing step and performing mold opening. In the production method of the present invention, the glass substrate obtained in the pressurizing step does not strongly stick to the mold, and the occurrence of cracks and cracks in the glass substrate during mold opening is prevented. After the mold opening, the glass substrate may be recovered by a general recovery method such as vacuum suction.

(情報記録媒体用ガラス基板の製造方法)
上述の製造方法によって製造されたガラス基板(ブランク材)に、研磨工程等を施すことにより情報記録媒体用ガラス基板を製造することができる。図5は、本発明の情報記録媒体用ガラス基板の製造方法によって製造した情報記録媒体用ガラス基板の1例を示す図である。図5(a)は斜視図、図5(b)は断面図である。情報記録媒体用ガラス基板30は中心穴33が形成された円板状のガラス基板であって、主表面31、外周端面34、内周端面35を有している。外周端面34と内周端面35には、それぞれ面取り部36、37が形成されている。
(Method for producing glass substrate for information recording medium)
A glass substrate for an information recording medium can be manufactured by subjecting the glass substrate (blank material) manufactured by the above-described manufacturing method to a polishing process or the like. FIG. 5 is a view showing an example of a glass substrate for information recording medium manufactured by the method for manufacturing a glass substrate for information recording medium of the present invention. FIG. 5A is a perspective view, and FIG. 5B is a cross-sectional view. The information recording medium glass substrate 30 is a disk-shaped glass substrate in which a central hole 33 is formed, and has a main surface 31, an outer peripheral end surface 34, and an inner peripheral end surface 35. Chamfered portions 36 and 37 are formed on the outer peripheral end surface 34 and the inner peripheral end surface 35, respectively.

研磨工程は、プレス成形によって得られたガラス基板(ブランク材)の主表面を研磨する工程であり、最終的に情報記録媒体用ガラス基板として要求される平滑性に仕上げる工程である。研磨の方法は、情報記録媒体用ガラス基板の製造方法として用いられる公知の方法をそのまま用いることができる。例えば、対向配置した2つの回転可能な定盤の対向する面にパッドを貼り付け、2つのパッド間にガラス基板を配置し、ガラス基板表面にパッドを接触させながら回転させると同時に、ガラス基板表面に研磨剤を供給する方法で行うことができる。また、研磨剤の粒度やパッドの種類を変えて、粗研磨工程、精密研磨工程といったように複数の工程に分けて研磨を行うことも好ましい。   A grinding | polishing process is a process of grind | polishing the main surface of the glass substrate (blank material) obtained by press molding, and is a process finally finished to the smoothness requested | required as a glass substrate for information recording media. As a polishing method, a known method used as a method for producing a glass substrate for an information recording medium can be used as it is. For example, a pad is pasted on the opposing surface of two rotatable surface plates placed opposite to each other, a glass substrate is placed between the two pads, and the glass substrate surface is rotated simultaneously with the pad contacting the glass substrate surface. It can carry out by the method of supplying an abrasive | polishing agent to. Further, it is also preferable to perform polishing in a plurality of steps such as a rough polishing step and a precision polishing step by changing the particle size of the abrasive and the type of pad.

研磨剤としては、例えば、酸化セリウム、酸化ジルコニウム、酸化アルミニウム、酸化マンガン、コロイダルシリカ、ダイヤモンドなどが挙げられる。この中でも、ガラスとの反応性が高く、短時間で平滑な研磨面が得られる酸化セリウムを用いることが好ましい。   Examples of the abrasive include cerium oxide, zirconium oxide, aluminum oxide, manganese oxide, colloidal silica, and diamond. Among these, it is preferable to use cerium oxide which has high reactivity with glass and can obtain a smooth polished surface in a short time.

パッドは硬質パッドと軟質パッドとに分けられるが、必要に応じて適宜選択して用いることができる。硬質パッドとしては、硬質ベロア、ウレタン発泡、ピッチ含有スウェード等を素材とするパッドが挙げられ、軟質パッドとしては、スウェードやベロア等を素材とするパッドが挙げられる。   The pad is divided into a hard pad and a soft pad, but can be appropriately selected and used as necessary. Examples of the hard pad include pads made of hard velor, urethane foam, pitch-containing suede, etc., and examples of the soft pad include pads made of suede, velor, etc.

また、本発明の情報記録媒体用ガラス基板の製造方法においては、ガラス基板の主表面を研磨する研磨工程の他、内外周加工工程やラッピング工程を行うことが好ましい。内外周加工工程は、中心孔の穿孔加工、外周端面や内周端面の形状や寸法精度確保のための研削加工、内外周端面の研磨加工等を行う工程であり、ラッピング工程は、記録層が形成される面の平面度、厚み、平行度等を満足させるため、研磨工程の前にラッピング加工を行う工程である。更に、ガラス基板の材料として化学強化ガラスや結晶化ガラスを用いる場合には、加熱された化学強化処理液にガラス基板を浸漬してイオン交換を行う化学強化工程や、熱処理によって結晶化を行う結晶化工程等を必要に応じて適宜行うことができる。これらの内外周加工工程、ラッピング工程、化学強化工程、結晶化工程等の各工程は、情報記録媒体用ガラス基板の製造方法として通常用いられている方法により行うことができる。   Moreover, in the manufacturing method of the glass substrate for information recording media of this invention, it is preferable to perform an inner and outer periphery processing process and a lapping process other than the grinding | polishing process which grind | polishes the main surface of a glass substrate. The inner and outer peripheral machining process is a process of drilling the center hole, grinding to ensure the shape and dimensional accuracy of the outer peripheral end face and inner peripheral end face, polishing the inner and outer peripheral end faces, etc. In order to satisfy the flatness, thickness, parallelism, etc. of the surface to be formed, this is a step of lapping before the polishing step. Furthermore, when using chemically strengthened glass or crystallized glass as the material of the glass substrate, a crystal strengthening process in which the glass substrate is immersed in a heated chemical strengthening treatment solution to perform ion exchange, or a crystal to be crystallized by heat treatment. The conversion step or the like can be appropriately performed as necessary. Each process such as the inner and outer peripheral processing step, the lapping step, the chemical strengthening step, and the crystallization step can be performed by a method that is usually used as a method for manufacturing a glass substrate for information recording media.

なお、本発明の情報記録媒体用ガラス基板の製造方法においては、上記以外の種々の工程を有していても良い。例えば、ガラス基板の内部歪みを緩和するための熱処理を行うアニール工程、ガラス基板の強度の信頼性確認のためのヒートショック工程、ガラス基板の表面に残った研磨剤や化学強化処理液等の異物を除去する洗浄工程、種々の検査・評価工程等を有していても良い。   In addition, in the manufacturing method of the glass substrate for information recording media of this invention, you may have various processes other than the above. For example, annealing process for heat treatment to relieve internal distortion of the glass substrate, heat shock process for confirming the reliability of the strength of the glass substrate, foreign materials such as abrasives and chemical strengthening treatment liquid remaining on the surface of the glass substrate It may have a cleaning process for removing, various inspection / evaluation processes, and the like.

ガラス基板の材料に特に制限はなく、情報記録媒体用ガラス基板の材料として用いられる材料を適宜選択して用いることができる。中でも、化学強化ガラスや結晶化ガラスは、耐衝撃性や耐振動性に優れるため好ましい。化学強化が可能なガラス材料としては、例えば、SiO2、Na2O、CaOを主成分としたソーダライムガラス;SiO2、Al23、R2O(R=K、Na、Li)を主成分としたアルミノシリケートガラス;ボロシリケートガラス;Li2O−SiO2系ガラス;Li2O−Al23−SiO2系ガラス;R’O−Al23−SiO2系ガラス(R’=Mg、Ca、Sr、Ba)などが挙げられる。 There is no restriction | limiting in particular in the material of a glass substrate, The material used as a material of the glass substrate for information recording media can be selected suitably, and can be used. Among these, chemically strengthened glass and crystallized glass are preferable because they are excellent in impact resistance and vibration resistance. Examples of glass materials that can be chemically strengthened include soda lime glass mainly composed of SiO 2 , Na 2 O, and CaO; SiO 2 , Al 2 O 3 , R 2 O (R = K, Na, Li). Aluminosilicate glass as main component; borosilicate glass; Li 2 O—SiO 2 glass; Li 2 O—Al 2 O 3 —SiO 2 glass; R′O—Al 2 O 3 —SiO 2 glass (R '= Mg, Ca, Sr, Ba) and the like.

ガラス基板の大きさにも特に制限はない。例えば、外径が2.5インチ、1.8インチ、1インチ、0.8インチ等種々の大きさのガラス基板を用いることができる。また、ガラス基板の厚みにも制限はない。例えば、1mm、0.64mm、0.4mm等種々の厚みのガラス基板を用いることができる。   There is no restriction | limiting in particular also in the magnitude | size of a glass substrate. For example, glass substrates having various sizes such as 2.5 inches, 1.8 inches, 1 inch, and 0.8 inches in outer diameter can be used. Moreover, there is no restriction | limiting also in the thickness of a glass substrate. For example, glass substrates having various thicknesses such as 1 mm, 0.64 mm, and 0.4 mm can be used.

(情報記録媒体の製造方法)
本発明の情報記録媒体用ガラス基板に、少なくとも記録層を形成することで情報記録媒体を製造することができる。記録層は特に限定されず、磁気、光、光磁気等の性質を利用した種々の記録層を用いることができるが、特に磁性層を記録層として用いた情報記録媒体(磁気ディスク)の製造に好適である。
(Method of manufacturing information recording medium)
An information recording medium can be produced by forming at least a recording layer on the glass substrate for information recording medium of the present invention. The recording layer is not particularly limited, and various recording layers utilizing properties such as magnetism, light, and magnetomagnetism can be used. In particular, for the production of an information recording medium (magnetic disk) using the magnetic layer as a recording layer. Is preferred.

磁性層に用いる磁性材料としては、特に制限はなく公知の材料を適宜選択して用いることができる。例えば、Coを主成分とするCoPt、CoCr、CoNi、CoNiCr、CoCrTa、CoPtCr、CoNiPt、CoNiCrPt、CoNiCrTa、CoCrPtTa、CoCrPtSiOなどが挙げられる。また、磁性層を非磁性膜(例えば、Cr、CrMo、CrVなど)で分割してノイズの低減を図った多層構成としてもよい。   There is no restriction | limiting in particular as a magnetic material used for a magnetic layer, A well-known material can be selected suitably and can be used. Examples thereof include CoPt, CoCr, CoNi, CoNiCr, CoCrTa, CoPtCr, CoNiPt, CoNiCrPt, CoNiCrTa, CoCrPtTa, and CoCrPtSiO containing Co as a main component. The magnetic layer may be divided by a nonmagnetic film (for example, Cr, CrMo, CrV, etc.) to have a multilayer structure in which noise is reduced.

磁性層として、上記のCo系材料の他、フェライト系や鉄−希土類系の材料や、SiO2、BNなどからなる非磁性膜中にFe、Co、CoFe、CoNiPt等の磁性粒子が分散された構造のグラニュラーなどを用いることもできる。磁性層は、面内型、垂直型の何れであっても良い。 As the magnetic layer, in addition to the above-mentioned Co-based material, ferrite or iron - and material of the rare earth-based, Fe, Co, CoFe, magnetic particles such CoNiPt are dispersed in a non-magnetic film made of SiO 2, BN A granular structure can also be used. The magnetic layer may be either an in-plane type or a vertical type.

磁性膜の形成方法としては、公知の方法を用いることができる。例えば、スパッタリング法、無電解メッキ法、スピンコート法などが挙げられる。   As a method for forming the magnetic film, a known method can be used. For example, a sputtering method, an electroless plating method, a spin coating method, and the like can be given.

磁気ディスクには、更に必要により下地層、保護層、潤滑層等を設けても良い。これらの層はいずれも公知の材料を適宜選択して用いることができる。下地層の材料としては、例えば、Cr、Mo、Ta、Ti、W、V、B、Al、Niなどが挙げられる。保護層の材料としては、例えば、Cr、Cr合金、C、ZrO2、SiO2などが挙げられる。また、潤滑層としては、例えば、パーフロロポリエーテル(PFPE)等からなる液体潤滑剤を塗布し、必要に応じ加熱処理を行ったものなどが挙げられる。 The magnetic disk may further be provided with an underlayer, a protective layer, a lubricating layer, and the like as necessary. Any of these layers can be used by appropriately selecting a known material. Examples of the material for the underlayer include Cr, Mo, Ta, Ti, W, V, B, Al, and Ni. Examples of the material for the protective layer include Cr, Cr alloy, C, ZrO 2 , and SiO 2 . Moreover, as a lubrication layer, the thing etc. which apply | coated the liquid lubricant which consists of perfluoro polyether (PFPE) etc., and heat-processed as needed are mentioned, for example.

(実施例1〜5)
金型として、下型11の第1の成形面13が平面、上型12の第2の成形面14が凸面(球面)のガラス基板成形用金型10を用意した。上型12は、第2の成形面14におけるガラス基板の最外周部となる位置(直径φ70mmの位置)と中心部となる位置との高さの差(h2)が、表1に示すように種々異なる上型12を用意した。それぞれの上型12を用いた場合の、ガラス基板の最外周部となる位置と中心部となる位置との間隙量dの差は、3μm(実施例1)、5μm(実施例2)、10μm(実施例3)、50μm(実施例4)、100μm(実施例5)となる。上型12及び下型11の材質はSUS310Sとした。
(Examples 1-5)
As the mold, a glass substrate molding mold 10 was prepared in which the first molding surface 13 of the lower mold 11 was flat and the second molding surface 14 of the upper mold 12 was convex (spherical). As shown in Table 1, the upper mold 12 has a height difference (h2) between a position (the diameter of 70 mm in diameter) and a center position on the second molding surface 14 as the outermost peripheral portion of the glass substrate. Different upper molds 12 were prepared. When each upper mold 12 is used, the difference in the gap amount d between the position that becomes the outermost peripheral portion and the position that becomes the central portion of the glass substrate is 3 μm (Example 1), 5 μm (Example 2), and 10 μm. (Example 3), 50 μm (Example 4), and 100 μm (Example 5). The material of the upper mold 12 and the lower mold 11 was SUS310S.

下型11と上型12を共に400℃に加熱し、溶融ガラスを下型11の第1の成形面13に供給した後、上型12の第2の成形面14との間でプレス成形を行った。ガラス材料はボロシリケートガラスを用いた。3秒間加圧した後、型開きを行ってガラス基板を回収した。これをそれぞれの金型について1000回ずつ繰り返し、得られたガラス基板の割れの発生の有無を目視検査により確認した。ここでは、割れの発生が1000枚中20枚未満の場合を良好(判定:○)、10枚未満の場合を非常に良好(判定:◎)と判断した。また、割れの発生が20枚以上の場合を問題有り(判定:×)とした。なお、ガラス基板の外径は70mm、厚みは1mmであった。   Both the lower mold 11 and the upper mold 12 are heated to 400 ° C., and molten glass is supplied to the first molding surface 13 of the lower mold 11, and then press-molded with the second molding surface 14 of the upper mold 12. went. As the glass material, borosilicate glass was used. After pressurizing for 3 seconds, the mold was opened to recover the glass substrate. This was repeated 1000 times for each mold, and the presence or absence of cracks in the obtained glass substrate was confirmed by visual inspection. Here, the case where the occurrence of cracks was less than 20 out of 1000 sheets was judged as good (determination: ◯), and the case where it was less than 10 was judged as very good (determination: ◎). Moreover, the case where the occurrence of cracks was 20 or more was regarded as problematic (judgment: x). The glass substrate had an outer diameter of 70 mm and a thickness of 1 mm.

結果を表1に示す。いずれも割れの発生が20枚未満であり良好であった。特に、ガラス基板の最外周部となる位置と中心部となる位置との間隙量dの差が5μm以上の場合(実施例2〜5)は、割れの発生が10枚未満と非常に良好であった。   The results are shown in Table 1. In all cases, the occurrence of cracks was less than 20 sheets, which was good. In particular, when the difference in the gap amount d between the position that becomes the outermost peripheral portion and the position that becomes the central portion of the glass substrate is 5 μm or more (Examples 2 to 5), the occurrence of cracks is very good at less than 10 sheets. there were.

Figure 2008174402
Figure 2008174402

(比較例1)
上型12として、第2の成形面14が平面のものを用いた以外は実施例1〜5と同様にガラス基板の成形と評価を行った。結果を表1に併せて示す。
(Comparative Example 1)
As the upper mold 12, a glass substrate was molded and evaluated in the same manner as in Examples 1 to 5, except that the second molding surface 14 was flat. The results are also shown in Table 1.

比較例1の場合は、成形開始から20枚目の成形まで全てのガラス基板で割れが発生し、良好なガラス基板を得ることができなかった。実験はその時点で中止した。   In the case of Comparative Example 1, cracks occurred in all glass substrates from the start of molding to the 20th molding, and a good glass substrate could not be obtained. The experiment was stopped at that time.

(実施例6〜9)
上型12の第2の成形面14は、凸面(球面)で、ガラス基板の最外周部となる位置(直径φ70mmの位置)と中心部となる位置との高さの差(h2)が20μmのものを用意した。下型11は、表2に示すように、第1の成形面13が凹面(球面)、平面、凸面(球面2種類)の合計4種類のものを用意した。それぞれの下型11の第1の成形面13におけるガラス基板の最外周部となる位置(直径φ70mmの位置)と中心部となる位置との高さの差(h1)は表2に示したとおりである。それぞれの場合の、ガラス基板の最外周部と中心部との間隙量dの差は、10μm(実施例6)、20μm(実施例7)、30μm(実施例8)、40μm(実施例9)となる。
(Examples 6 to 9)
The second molding surface 14 of the upper mold 12 is a convex surface (spherical surface), and the height difference (h2) between the position that becomes the outermost peripheral portion of the glass substrate (position with a diameter of 70 mm) and the position that becomes the central portion is 20 μm. I prepared one. As shown in Table 2, four types of lower molds 11 were prepared in which the first molding surface 13 was a concave surface (spherical surface), a flat surface, and a convex surface (two types of spherical surfaces). Table 2 shows the difference in height (h1) between the position of the outermost peripheral part of the glass substrate (position of diameter φ70 mm) and the position of the central part on the first molding surface 13 of each lower mold 11. It is. In each case, the difference in the gap amount d between the outermost peripheral part and the central part of the glass substrate is 10 μm (Example 6), 20 μm (Example 7), 30 μm (Example 8), 40 μm (Example 9). It becomes.

これらの金型を用いて実施例1〜5と同様にガラス基板の成形と評価を行った。結果を表2に示す。いずれも組み合わせにおいても、割れの発生が10枚未満と非常に良好であった。   Using these molds, the glass substrate was molded and evaluated in the same manner as in Examples 1-5. The results are shown in Table 2. In any combination, the occurrence of cracks was very good at less than 10 sheets.

Figure 2008174402
Figure 2008174402

(比較例2)
下型11として、第1の成形面13が凹面(球面)で、ガラス基板の最外周部となる位置(直径φ70mmの位置)と中心部となる位置との高さの差(h1)が20μm(中心部の方が20μm低い)のものを用意した。上型12は、実施例6〜9と同じものを使用した。この場合、第1の成形面13と第2の成形面14との間隙量dは均一で、ガラス基板の最外周部となる位置と中心部となる位置との間隙量dに差はない。このような金型を用いて実施例6〜9と同様にガラス基板の成形と評価を行った。結果を表2に併せて示す。
(Comparative Example 2)
As the lower mold 11, the first molding surface 13 is a concave surface (spherical surface), and the height difference (h1) between the position that becomes the outermost peripheral portion of the glass substrate (position with a diameter of 70 mm) and the position that becomes the central portion is 20 μm. (The center is 20 μm lower). The upper mold 12 was the same as in Examples 6-9. In this case, the gap amount d between the first molding surface 13 and the second molding surface 14 is uniform, and there is no difference in the gap amount d between the outermost peripheral portion and the central portion of the glass substrate. Using such a mold, the glass substrate was molded and evaluated in the same manner as in Examples 6 to 9. The results are also shown in Table 2.

比較例2の場合は、成形開始から20枚目の成形まで全てのガラス基板で割れが発生し、良好なガラス基板を得ることができなかった。実験はその時点で中止した。   In the case of Comparative Example 2, cracks occurred in all the glass substrates from the start of molding to the 20th molding, and a good glass substrate could not be obtained. The experiment was stopped at that time.

本発明のガラス基板成形用金型の例を示す図である。It is a figure which shows the example of the metal substrate shaping die of this invention. 本発明のガラス基板成形用金型10でプレス成形した場合のガラス基板26の状態を示す断面図である。It is sectional drawing which shows the state of the glass substrate 26 at the time of press-molding with the glass substrate shaping die 10 of this invention. 本発明のガラス基板成形用金型10の変形例であるガラス基板成形用金型10a、10bでプレス成形した場合のガラス基板26a、26bの状態を示す断面図である。It is sectional drawing which shows the state of glass substrate 26a, 26b at the time of press-molding with the glass substrate shaping | molding metal mold | die 10a, 10b which is a modification of the glass substrate shaping die 10 of this invention. 溶融ガラス供給工程における下型と溶融ガラス等を示す模式図である。It is a schematic diagram which shows the lower mold | type, a molten glass, etc. in a molten glass supply process. 本発明の情報記録媒体用ガラス基板の製造方法によって製造した情報記録媒体用ガラス基板の1例を示す図である。It is a figure which shows one example of the glass substrate for information recording media manufactured by the manufacturing method of the glass substrate for information recording media of this invention. 従来の金型40でプレス成形した場合のガラス基板24の状態を示す断面図である。It is sectional drawing which shows the state of the glass substrate 24 at the time of press-molding with the conventional metal mold | die 40. FIG.

符号の説明Explanation of symbols

10、10a、10b ガラス基板成形用金型
11、11a、11b 下型
12、12a、12b 上型
13、13a、13b 第1の成形面
14、14a、14b 第2の成形面
23 溶融ガラス
26、26a、26b ガラス基板
30 情報記録媒体用ガラス基板
d 間隙量
d0 ガラス基板の中心部となる位置における間隙量
d1 ガラス基板の最外周部となる位置における間隙量
10, 10a, 10b Glass substrate molding die 11, 11a, 11b Lower mold 12, 12a, 12b Upper mold 13, 13a, 13b First molding surface 14, 14a, 14b Second molding surface 23 Molten glass 26, 26a, 26b Glass substrate 30 Glass substrate for information recording medium d Gap amount d0 Gap amount at the center portion of the glass substrate d1 Gap amount at the position of the outermost peripheral portion of the glass substrate

Claims (6)

溶融ガラスを受容する第1の成形面を有する下型と、
前記第1の成形面との間で前記溶融ガラスを加圧するための第2の成形面を有する上型とを備え、
前記溶融ガラスをプレス成形して情報記録媒体に用いるガラス基板を製造するためのガラス基板成形用金型において、
前記第1の成形面及び前記第2の成形面の少なくとも一方は凸面であり、
前記溶融ガラスを加圧する時点における前記第1の成形面と前記第2の成形面との間隙量が、前記ガラス基板の中心部となる位置で最小となることを特徴とするガラス基板成形用金型。
A lower mold having a first molding surface for receiving molten glass;
An upper mold having a second molding surface for pressurizing the molten glass with the first molding surface;
In a glass substrate molding die for producing a glass substrate used for an information recording medium by press molding the molten glass,
At least one of the first molding surface and the second molding surface is a convex surface,
A glass substrate molding metal, wherein a gap amount between the first molding surface and the second molding surface at the time of pressurizing the molten glass is minimized at a position which is a central portion of the glass substrate. Type.
前記ガラス基板の最外周部となる位置における前記間隙量と、中心部となる位置における前記間隙量との差が3μm〜100μmであることを特徴とする請求項1に記載のガラス基板成形用金型。   2. The glass substrate molding gold according to claim 1, wherein a difference between the gap amount at a position that is the outermost peripheral portion of the glass substrate and the gap amount at a position that is a central portion is 3 μm to 100 μm. Type. 溶融ガラスを受容する第1の成形面を有する下型と、
前記第1の成形面との間で前記溶融ガラスを加圧するための第2の成形面を有する上型とを備えたガラス基板成形用金型を用いて情報記録媒体に用いるガラス基板を製造するガラス基板の製造方法において、
前記下型が有する第1の成形面に溶融ガラスを供給する溶融ガラス供給工程と、
前記第1の成形面及び前記第2の成形面で前記溶融ガラスを加圧しながら冷却してガラス基板を得る加圧工程と、
前記加圧工程の後、前記ガラス基板への加圧を解除して型開きを行う離型工程と、を有し、
前記第1の成形面及び前記第2の成形面の少なくとも一方は凸面であり、
前記溶融ガラスを加圧する時点における前記第1の成形面と前記第2の成形面との間隙量が、前記ガラス基板の中心部となる位置で最小となることを特徴とするガラス基板の製造方法。
A lower mold having a first molding surface for receiving molten glass;
A glass substrate used for an information recording medium is manufactured using a glass substrate molding die having an upper mold having a second molding surface for pressing the molten glass between the first molding surface and the first molding surface. In the method for producing a glass substrate,
A molten glass supply step of supplying molten glass to the first molding surface of the lower mold;
A pressurizing step of obtaining a glass substrate by cooling while pressing the molten glass on the first molding surface and the second molding surface;
After the pressurizing step, having a mold release step of releasing the pressurization to the glass substrate and performing mold opening,
At least one of the first molding surface and the second molding surface is a convex surface,
A method for producing a glass substrate, wherein a gap amount between the first molding surface and the second molding surface at the time of pressurizing the molten glass is minimized at a position which is a central portion of the glass substrate. .
前記ガラス基板の最外周部となる位置における前記間隙量と、中心部となる位置における前記間隙量との差が5μm〜100μmであることを特徴とする請求項3に記載のガラス基板の製造方法。   The method for producing a glass substrate according to claim 3, wherein a difference between the gap amount at a position that is the outermost peripheral portion of the glass substrate and the gap amount at a position that is a central portion is 5 μm to 100 μm. . 請求項3又は4に記載のガラス基板の製造方法により製造されたガラス基板を研磨する工程を有することを特徴とする情報記録媒体用ガラス基板の製造方法。   A method for producing a glass substrate for an information recording medium, comprising the step of polishing a glass substrate produced by the method for producing a glass substrate according to claim 3. 請求項5に記載の情報記録媒体用ガラス基板の製造方法により製造された情報記録媒体用ガラス基板に記録層を形成する工程を有することを特徴とする情報記録媒体の製造方法。   A method for producing an information recording medium, comprising the step of forming a recording layer on the glass substrate for information recording medium produced by the method for producing a glass substrate for information recording medium according to claim 5.
JP2007006914A 2007-01-16 2007-01-16 Die for molding glass substrate, method of manufacturing glass substrate, method of manufacturing glass substrate for information recording medium, and method of manufacturing information recording medium Pending JP2008174402A (en)

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