JP2008168202A - Dust remover - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dust remover which enables easy replacing of a rotary brush by miniaturizing the whole device. <P>SOLUTION: The dust remover 1 comprises the rotary brush 11 which removes dust sticking to a workpiece W, a motor 15 which is a power source for the rotary brush 11, a rotating power transmission mechanism 13 which conveys power from a motor 15 to the rotary brush 11 and rotates the rotary brush 11 pivoting at an axial center, and a reciprocating power transmission mechanism 14 which reciprocates the rotary brush 11 in the axial direction by changing the power of the motor 15 to the reciprocating motion of the rotary brush 11. In addition, the motor 15, the rotating power transmission mechanism 13 and the reciprocating power transmission mechanism 14, are arranged on one end side, in the axial direction, of the rotary brush 11. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a dust removing device that removes dust attached to a workpiece such as a glass substrate.

2. Description of the Related Art Conventionally, there is known a dust removing device that removes dust adhered to a work by bringing a rotating brush into contact with the work to be conveyed (see, for example, Patent Documents 1 and 2). The dust removing device described in Patent Document 2 reciprocates the rotating brush in the axial direction with another motor while rotating the rotating brush around its axis with a motor dedicated to rotation. In this dust removing device, the rotary brush receives rotational power from one end side in the axial direction, and receives reciprocating power from the other end side in the axial direction. Specifically, a rotation-dedicated motor and a spline that transmits the rotational power are arranged on one end side of the rotating brush, while a reciprocating motor and a reciprocating slider crank mechanism that transmits the reciprocating power are provided on the rotating brush. Arranged on the other end side.
JP 2003-334499 A Japanese Patent Laying-Open No. 2005- 211722 (FIG. 3)

  By the way, since the rotating brush can be worn by use, it is desirable to replace it periodically. However, in the conventional dust removing device, replacement of the rotating brush has not been sufficiently studied. In particular, since there is a power transmission mechanism on both sides of the rotating brush in the axial direction, it is easy to replace the rotating brush. Further, the space on both sides in the axial direction of the rotating brush is largely occupied by the power transmission mechanism, and as a result, the apparatus is easily increased in size in the axial direction of the rotating brush. Furthermore, since two dedicated motors are provided for rotating and reciprocating the rotating brush, the size and cost are increased.

  An object of the present invention is to provide a dust removing device that can easily replace a rotating brush while reducing the size of the entire device.

  The dust removing device of the present invention includes a rotating brush that removes dust adhered to a work, a motor that is a power source of the rotating brush, power transmitted from the motor to the rotating brush, and the rotating brush is centered on its axis. A rotating power transmission mechanism that rotates the power, and a reciprocating power transmission mechanism that converts power from the motor into reciprocating motion of the rotating brush to reciprocate the rotating brush in the axial direction. And a motor, a rotational power transmission mechanism, and a reciprocating power transmission mechanism are arrange | positioned at the one end side of the axial direction of a rotating brush.

  According to this configuration, the motor, the rotational power transmission mechanism, and the reciprocating power transmission mechanism can be concentrated on one end side in the axial direction of the rotating brush. Thereby, it is not necessary to secure a large installation space on the other end side in the axial direction of the rotating brush, and the apparatus can be miniaturized. Further, by arranging them in a concentrated manner, rotational and reciprocating power can be input from one end side in the axial direction of the rotating brush. Thereby, compared with the case where rotational and reciprocating power is input from each side of the axial direction of a rotating brush, the exchangeability of a rotating brush can be improved. Furthermore, since it is such a power input mode, the torsional moment acting on the rotating brush is relieved structurally compared to the conventional case. Thereby, damage to the shaft of the rotating brush can be suppressed. Furthermore, since the single motor serves for both the rotation and reciprocation of the rotating brush, the entire apparatus can be reduced in size and cost compared to the case where a dedicated motor is provided.

  Here, examples of the type of work include a printed wiring board, a liquid crystal glass substrate, a flexible substrate, a ceramic substrate, a plastic plate, a liquid crystal display panel, a vacuum tray, a lens, a light guide plate, a film, and paper. The outer shape of the workpiece may be a rectangular shape or a disk shape such as a wafer.

  Preferably, the dust removing device of the present invention may further include a clamp mechanism that removably supports the rotating brush, the motor, the rotating power transmission mechanism, and the reciprocating power transmission mechanism as one unit.

  According to this configuration, since the rotating brush can be attached / detached in units, maintenance and the like in units can be facilitated as well as replacement of the rotating brush.

  More preferably, the clamp mechanism supports the unit movably in the axial direction of the rotating brush, and the unit is moved to one of the axial directions of the rotating brush in a state where the support by the clamping mechanism is released, It may be configured to be removed from the clamping mechanism.

  According to this configuration, the unit mounting / removal direction is directed by the clamp mechanism, so that the unit mounting / removal operation is facilitated.

  More preferably, the clamp mechanism may include a stopper that restricts the movement of the unit in the axial direction of the rotating brush so that the unit is supported at the mounting position.

  According to this configuration, when the unit is mounted, the user can place the unit at the mounting position by moving the unit so as to abut against the stopper. Thereby, a unit can be arrange | positioned to an attachment position simply and reliably.

  Preferably, the unit may include a subunit including a motor, a rotational power transmission mechanism, and a reciprocating power transmission mechanism, and a coupling that detachably connects the subunit and the rotating brush.

  According to this configuration, it is possible to easily remove only the rotating brush having a higher replacement frequency than other elements such as a motor by effectively using the coupling.

  Preferably, the reciprocating power transmission mechanism includes a clamped member that is removably supported by the clamp mechanism, a cam follower fixed to the clamped member, and a cylindrical cam having a cam portion that guides the cam follower. . The cam follower may convert the rotation into a reciprocating motion of the cylindrical cam while allowing the rotation of the cylindrical cam. The cylindrical cam may be coaxially connected to the rotating brush so as to rotate integrally with the rotating brush and reciprocate with the power of the motor.

  According to this configuration, when the motor rotates, the rotating brush and the cylindrical cam rotate, and the cylindrical cam reciprocates integrally with the rotating brush by the cam follower. Thus, the rotating brush can be rotated and reciprocated with a single motor by a simple mechanism called a cam mechanism using a cylindrical cam. Further, the cam follower can be fixed by effectively using the clamped member.

  More preferably, a motor is fixed to the member to be clamped.

  According to this configuration, the clamped member can be used more effectively.

  Preferably, the rotational power transmission mechanism allows reciprocation of the rotating brush, and the reciprocating power transmission mechanism allows rotation of the rotating brush.

  Preferably, the dust removing device of the present invention may further include a detection device that detects the degree of wear of the rotating brush.

  According to this configuration, it is possible to objectively determine the replacement time of the rotating brush.

  More preferably, the rotating brush has a brush body and conductive fibers that are implanted on the peripheral surface of the brush body and come into contact with the workpiece. And a detection apparatus is good to be comprised with the photoelectric sensor which faces a conductive fiber.

  According to this configuration, a decrease due to wear of the conductive fibers can be confirmed by the amount of light received by the photoelectric sensor.

  According to the dust removing device of the present invention, dust can be effectively removed, the entire device can be downsized, and the exchangeability of the rotating brush can be improved.

  Hereinafter, a dust removing device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. This dust removing apparatus uses various types of substrates as a workpiece to remove dust, dust, dust and the like adhering to the surface (upper surface) of the workpiece with a brush. Hereinafter, a general term for this type of dust will be described as “dust”.

FIG. 1 is a view showing a main part of the dust removing device, and is a front view showing a part thereof in cross section. FIG. 2 is a plan view showing a main part of the dust removing device.
The dust removing device 1 has a lower base 2 on a gantry (not shown). On the upper side of the lower base 2, a work processing area for performing a dust removing operation on the work W (substrate) is configured.

  Examples of the type of the work W include a printed wiring board, a liquid crystal glass substrate, a flexible substrate, a ceramic substrate, a plastic plate, a liquid crystal display panel, a vacuum tray, a lens, a light guide plate, a film, and paper. Here, a workpiece W having a rectangular outer shape as a whole is used.

  A first support stand 3 and a second support stand 4 are disposed on the lower base 2 so as to be separated from each other in the left-right direction. An upper base 5 is positioned on the upper part between the first support stand 3 and the second support stand 4 so as to be bridged between them. The upper base 5 has a main body base 51 extending in the left-right direction. A vertical base 52 is fixed to the lower right surface of the main body base 51 so as to hang down. A holder 111 of a clamp mechanism 16 described later is fixed to the lower left surface of the main body base 51.

  The first support stand 3 and the second support stand 4 have a recess 3a and a recess 4a on the inner wall on the work processing area side, and the recess 3a and the recess 4a guide the vertical base 52 and the holder 111 to slide in the vertical direction. To do. The 1st support stand 3 and the 2nd support stand 4 have the height adjustment mechanisms 6 and 6 attached to the upper end part, respectively. The height adjusting mechanisms 6 and 6 move the upper base 5 in the vertical direction while guiding the left and right ends of the main body base 51, the vertical base 52 and the holder 111 to the recesses 3 a and 4 a. Accordingly, various parts (for example, a rotating brush 11 described later) assembled to the upper base 5 can be adjusted in the vertical position according to the thickness of the workpiece W.

  In the work processing area, a rotary brush 11, a work transport mechanism 12, a rotational power transmission mechanism 13, a reciprocating power transmission mechanism 14, a motor 15, and a clamp mechanism 16 are disposed. As will be described later, the rotating brush 11, the rotational power transmission mechanism 13, the reciprocating power transmission mechanism 14, and the motor 15 are detachably supported as a unit by the clamp mechanism 16.

  In the dust removing operation by the dust removing device 1, the work W is transported in the direction of arrow A by the work transport mechanism 12, and the rotary brush 11 is brought into contact with the work W from above. The motor 15 serves as a common drive source for the rotational power transmission mechanism 13 and the reciprocating power transmission mechanism 14. The rotating brush 11 is rotated by the rotational power transmission mechanism 13 and the rotating brush 11 is rotated by the reciprocating power transmission mechanism 14. Reciprocate in the direction of arrow B. By such dust removing operation, dust is removed over the entire surface of the workpiece W.

  Here, the arrow B direction is the axial direction and the reciprocating direction of the rotating brush 11. The arrow A direction and the arrow B direction are orthogonal to each other, but may intersect at an angle other than 90 degrees. During the dust removal operation, air is blown to the work W by blow (not shown), and the blown air is sucked and discharged out of the work processing area together with dust.

  The rotating brush 11 removes dust adhering to the workpiece W. The rotating brush 11 is made of a so-called conductive brush, and is formed by implanting conductive fibers having a diameter of, for example, about several tens of micrometers on the peripheral surface of a brush body made of a substantially cylindrical shape. In the rotary brush 11, the flocked portion is brought into contact with the surface of the workpiece W to remove dust adhering to the surface of the workpiece W so as to remove static electricity from the surface of the workpiece W.

  The rotating brush 11 is adjusted in height (gap) by the height adjusting mechanisms 6 and 6 and can appropriately cope with different thicknesses of the workpiece W. Further, the rotary brush 11 extends in the left-right direction so as to be able to handle a wide workpiece W. The rotating brush 11 has shaft portions 41 and 42 at the left and right ends of the brush body. The shaft portions 41 and 42 are projecting portions having a diameter smaller than that of the brush body, and are positioned at the axis of the rotating brush 11. Rotational power is transmitted to the shaft portion 42 by the rotational power transmission mechanism 13 and reciprocating power is transmitted by the reciprocating power transmission mechanism 14.

  As shown in FIG. 3, the shaft portion 41 is rotatably supported by the bearing 21. The bearing 21 is constituted by a spherical bearing so that the shaft portion 41 can be easily inserted when the dust removing device 1 is assembled or the rotating brush 11 is replaced. The bearing 21 is fixed to a vertical base 52 bolted to the main body base 51 with two bolts 22 and 23. The bearing 21 supports the shaft portion 41 so as to be slidable in the B direction within the reciprocating range of the rotating brush 11 in the B direction. On the other hand, when the rotary brush 11 is slid to the left in FIG. 3 by a predetermined length or more beyond the reciprocating range, the shaft portion 41 is removed from the bearing 21. The case where the rotating brush 11 is slid beyond the reciprocating range is, for example, a case where the rotating brush 11 is replaced.

1 and 2 again, the workpiece transfer mechanism 12 will be described.
The workpiece conveyance mechanism 12 conveys the workpiece W in one direction (arrow A direction) in synchronization with the motor 15. The workpiece transport mechanism 12 supports a pair of belt conveyors 34a and 34b that support both ends of the workpiece W and transports the workpiece W, and drive motors 35 and 35 that drive the belt conveyors 34a and 34b, respectively (described only in FIG. 2). ) And. The pair of belt conveyors 34 a and 34 b bring the workpiece W to the upper rotating brush 11 and convey the workpiece W so as to pass through the rotating brush 11 while contacting the workpiece W.

  The workpiece conveyance mechanism 12 has a workpiece width adjusting mechanism that adjusts the width between the belt conveyors 34a and 34b. The work width adjustment mechanism includes an adjustment knob 36 that moves the movable belt conveyor 34b relative to the fixed belt conveyor 34a, and rails 37 and 37 on the lower base 2 that guide the movement of the belt conveyor 34b. By arbitrarily operating the adjustment knob 36, the width between the belt conveyors 34, 34b can be adapted to the width of the workpiece W. Instead of the manual adjustment knob 36, the width between the belt conveyors 34, 34b may be adjusted by driving a motor.

  In another embodiment, the workpiece W may be a disk-shaped disk medium such as a silicon semiconductor wafer or a CD (Compact Disk). In this case, a work rotation mechanism that rotates the work W around its axis may be provided instead of the work transport mechanism 12. Alternatively, the workpiece W may be set in a fixed state at a predetermined position, and the rotating brush 11 may be rotated and reciprocated in response to the workpiece W.

The motor 15 will be described with reference to FIGS. 4 and 5.
The motor 15 includes a DC motor with a commutator / brush or a stepping motor. The output shaft 61 of the motor 15 extends to the outside of the motor housing 62 and is fixed to the coupling 63. The coupling 63 connects the output shaft 61 coaxially with a spline shaft 74 described later. The end surface of the motor housing 62 is fixed to the mounting plate 65 via a bar-shaped bracket 64.

  The mounting plate 65 is bolted to the bracket 64 via bolt holes 66a formed through the four corners. The mounting plate 65 has an opening 67 in the center, and the spline boss 73 of the rotational power transmission mechanism 13 is inserted through the opening 67. The attachment plate 65 has an annular recess 68 concentric with the opening 67, and bolt holes 66 b are formed through the front, rear, left and right of the recess 68. A bearing 70 that rotatably supports the spline boss 73 is attached to the recess 68. The bearing 70 is formed with four bolt holes 70a at positions corresponding to the four bolt holes 66b. The mounting plate 65 and the bearing 70 are fastened together with the drive frame 80 by bolts (not shown) through the bolt holes 66b and the bolt holes 70a. With such a configuration, the motor 15 is integrated with the drive frame 80.

The rotational power transmission mechanism 13 will be described with reference to FIG.
The rotary power transmission mechanism 13 transmits power from the motor 15 to the rotary brush 11 and rotates the rotary brush 11 around its axis. The rotational power transmission mechanism 13 is disposed on one end side in the axial direction of the rotary brush 11. Specifically, the rotational power transmission mechanism 13 includes the coupling 63 described above, a spline boss 73 bolted to the coupling 63, a spline shaft 74 fitted to the spline boss 73, and the spline shaft 74 coaxially. And a transmission shaft 75 disposed. The transmission shaft 75 is supported by a bush 77 fixed to the drive frame 80 so as to be rotatable and slidable in the axial direction.

  One end of the spline shaft 74 is fixed in the cylindrical cam 81 by a mounting shaft 78. Similarly, one end of the transmission shaft 75 is fixed in the cylindrical cam 81 by the mounting shaft 79, while the other end of the transmission shaft 75 is detachably fixed to the coupling 76. The coupling 76 removably fixes the shaft portion 42 of the rotating brush 11. The tip end portion 42 a of the shaft portion 42 has a cross-sectional shape obtained by cutting off a part of a circle, that is, a so-called D-cut shape, and is attached and fixed to the stepped portion 76 a of the coupling 76. As a result, the shaft portion 42 is fixed to the coupling 76 in a stopped state.

  With such a configuration, the rotation of the motor 15 is transmitted from the output shaft 61 to the coupling 63, and further transmitted to the square spline including the spline boss 73 and the spline shaft 74, the cylindrical cam 81, and the transmission shaft 75. Then, it is transmitted to the rotating brush 11 through the coupling 76. With this power transmission, the rotating brush 11 rotates. Further, the square spline allows the reciprocating power transmission mechanism 14 to reciprocate in the axial direction of the rotating brush 11 while the rotating brush 11 is rotating.

  Of course, a ball spline may be used instead of the square spline. Further, the spline shaft 74 and the transmission shaft 75 may not be configured separately, but may be configured by one shaft member. However, the assembly work of the shaft member, the cylindrical cam 81 and the rotating brush 11 can be facilitated by using two shaft members.

Next, the reciprocating power transmission mechanism 14 will be described with reference to FIG.
The reciprocating power transmission mechanism 14 is disposed on one end side in the axial direction of the rotating brush 11, similarly to the rotational power transmission mechanism 13 and the motor 15 described above. The reciprocating power transmission mechanism 14 converts the power from the motor 15 into the reciprocating motion of the rotating brush 11 to reciprocate the rotating brush 11 in the axial direction. The reciprocating power transmission mechanism 14 includes the drive frame 80 described above, a cylindrical cam 81, an attachment 82 fixed to the drive frame 80, and a pin-like cam follower 83 fixed to the attachment 81.

  The cylindrical cam 81 is positioned so as to be housed inside the drive frame 80. A spline shaft 74 and a transmission shaft 75 are inserted into and fixed to the shaft center inside the cylindrical cam 81. That is, the cylindrical cam 81 also functions as a coupling that connects the two spline shafts 74 and the transmission shaft 75, and rotates integrally with the spline shaft 74 and the transmission shaft 75. A cam groove (cam portion) 84 for guiding the cam follower 83 is formed on the peripheral surface of the cylindrical cam 81. The cylindrical cam 81 and the cam follower 83 constitute a cam mechanism. Note that the cam portion may be constituted by a protrusion instead of the cam groove 84.

  As the material of the cylindrical cam 81 and the cam follower 83, hard resin or various metals can be applied. For example, both the cylindrical cam 81 and the cam follower 83 may be formed of plastic such as nylon, and one of them may be formed of metal such as stainless steel. If plastic is used as the material, the operation noise of the apparatus can be reduced. However, from the viewpoint of suppressing wear of the cam groove 84, it is preferable that both the cylindrical cam 81 and the cam follower 83 are made of stainless steel.

  As shown in FIG. 6, the drive frame 80 (member to be clamped) is formed of a cylindrical member as a whole and has an anodized surface. At one end of the drive frame 80, a step 91 for mounting a part of the bearing 70 is formed, and four bolt holes 80a are formed. The bolt hole 80a is at a position corresponding to the bolt holes 66b and 70a described above. The drive frame 80 is integrated with the mounting plate 65 and the bearing 70 by screwing bolts (not shown) into the bolt holes 66b, 70a, and 80a. An opening 92 into which a part of the bush 77 is inserted is formed through the other end of the drive frame 80, and a bolt hole 80b for bolting the bush 77 is formed.

  A shallow groove 94 for mounting the fixture 81 is formed in a part of the outer peripheral surface of the drive frame 80. At the bottom of the shallow groove 94, two bolt holes 94a, 94a for bolting the fixture 81 are formed through, and a window 95 is formed between the two bolt holes 94a, 94a. The window 95 is configured such that a part of the fixture 81 is fitted with almost no gap, and the cam follower 83 fixed to the fixture 81 protrudes to the inside of the drive frame 80 through the window 95. The cam groove 84 is engaged. As will be described later, the drive frame 80 is detachably supported by the holder 111 in an integrated state with the fixture 81.

  With such a configuration, the cam follower 83 is fixed at a non-moving position so as not to move even if the motor 15 rotates. When the motor 15 rotates, the cam follower 83 is guided in the cam groove 84 and converts the rotation into the reciprocating motion of the cylindrical cam 81 while allowing the rotation of the cylindrical cam 81. As a result, the cylindrical cam 81 rotates integrally with the rotary brush 11 and reciprocates.

  The cam groove 84 is set so that the number of rotations of the cylindrical cam 81 and the number of reciprocating amplitudes (number of reciprocations) are the same, and the cylindrical cam 81 and the rotating brush 11 perform one reciprocating motion each time they rotate. It is supposed to be performed once.

FIG. 7 is a diagram showing the reciprocating motion of the rotating brush 11 in terms of time, and is a schematic cross-sectional view similar to FIG.
In the initial state shown in FIG. 7A, when the motor 15 rotates 1/4, the cylindrical cam 81 and the rotating brush 11 move to the right while rotating, and move to the position shown in FIG. 7B. . When the motor 15 further rotates 1/4, the cylindrical cam 81 and the rotating brush 11 advance to the right as much as possible while rotating, and move to the position shown in FIG. When the motor 15 further rotates, the rotating brush 11 and the cylindrical cam 81 start to advance in the left direction while rotating. When the motor 15 rotates 1/2 in the state shown in FIG. 7C, the cylindrical cam 81 and the rotating brush 11 advance to the left as much as possible after passing through the position shown in FIG. 7B while rotating. Then, the position returns to the position shown in FIG.

  As described above, according to the dust removing device 1, the rotary brush 11 is attached to the workpiece W in order to reciprocate the rotary brush 11 in the axial direction while rolling the rotary brush 11 on the surface of the workpiece W being conveyed. Dust can be removed suitably. In particular, the advance / retreat number (the number of reciprocations) of the rotating brush 11 can be made the same as the number of revolutions, and the dust removal effect can be enhanced. Further, the rotation brush 11 can be rotated and reciprocated by one motor 15, and the entire apparatus can be reduced in size and cost compared to the case where a dedicated motor is provided.

Subsequently, the clamp mechanism 16 will be described with reference to FIGS. 4 and 8.
The clamp mechanism 16 includes a holder 111 that supports the drive frame 80 together with the fixture 81, a lever 112 attached to the lower portion of the holder 111, and a stopper 114 attached to one end surface 113 of the holder 111.

  The lever 112 includes an operation unit 116 operated by a user or an operator, a male screw unit 117 connected to one end of the operation unit 116, and a contact unit 118 provided on the base side of the male screw unit 117. . The male screw portion 117 extends in a direction orthogonal to the transmission shaft 75 and is formed at the lower portion of the holder 111 so as to be screwed into the screw portion 121. The contact portion 118 is configured to be able to be separated from and contacted with the side surface 119 of the holder 111.

  The holder 111 is made of a substantially cylindrical metal member. The holder 111 has a bolt hole 111a on the upper surface, and is fixed to the main body base 51 by a bolt 122 inserted into the bolt hole 111a. The holder 111 has a substantially hook-shaped opening 123 formed so as to penetrate the center portion. The opening 123 includes a circular opening 125, a rectangular opening 126 that is continuous below the opening 125, and a vertically long opening 127 that is continuous below the rectangular opening 126.

  The circular opening 125 is formed so that the drive frame 80 can be inserted. A transmission shaft 75 and a bush 77 are located in the center of the circular opening 125. The rectangular opening 126 is formed so that the fixture 82 can be inserted therethrough. The vertically long opening 127 is formed so as to straddle the female screw portion 122, and one end of the vertically long opening 127 is open on the lower surface of the holder 111. The circular opening 125 and the rectangular opening 126 are formed slightly larger than the outer shape of the drive frame 80 and the fixture 82, and the edge of the circular opening 125 and the square opening 126 is between the drive frame 80 and the fixture 82. There is a slight gap. The gap is filled by operating the lever 112.

  Specifically, when the lever 112 is operated in the direction in which the screw is tightened, the male screw portion 117 is screwed into the female screw portion 121 and the abutting portion 118 hits the side surface 119. When the lever 112 is further operated from this state, the gap between the vertically long openings 127 is reduced, and the substantially entire edges of the circular openings 125 and the rectangular openings 126 (the inner peripheral surface of the holder 111) are formed on the drive frame 80 and the fixture. Close to the outer surface of 82. As a result, the holder 111 supports the drive frame 80 and the attachment tool 82 in a retaining state.

  On the other hand, when the lever 112 is operated in the reverse direction, the support in the retaining state is released. As a result, the drive frame 80 and the attachment tool 82 can be detached from the holder 111. Reference numeral 129 shown in FIG. 4 is a slit formed on the peripheral surface of the holder 111. The slit 129 enables the holder 111 to be deformed without difficulty when the diameter of the holder 111 is reduced by operating the lever 112.

  The stopper 114 is made of a plate-like member and faces only the upper part of the circular opening 125 at one end of the holder 111. The lower surface 131 of the stopper 114 has a semi-circular shape so as to escape the transmission shaft 75 and the bush 77. For this reason, the stopper 114 is configured to be able to contact only the upper part of the end face of the drive frame 80. The stopper 114 is configured so that the drive frame 80 is supported by the holder 111 at a predetermined mounting position, that is, in this case, at a position where the end face of the drive frame 80 is flush with the end face 113. Abut. For this reason, when the drive frame 80 is inserted into the holder 111 in a state in which the support in the retaining state is released, the movement of the drive frame 80 in the axial direction is restricted to the mounting position by the stopper 114.

Here, replacement of the rotating brush 11 will be described with reference to FIGS. 9 and 10.
With the configuration described above, the rotary brush 11, the rotational power transmission mechanism 13, the reciprocating power transmission mechanism 14, and the motor 15 are detachably supported by the clamp mechanism 16 as one unit 200. The rotary brush 11 can be exchanged with the unit 200 as a unit.

  The state shown in FIG. 9 is a state in which the unit 200 is immovably supported by the holder 111 via a drive frame 80 that constitutes a part of the unit 200, and the dust removal operation to the workpiece W described above can be performed. It is possible. When removing the unit 200 from this state, first, the lever 112 is operated in the direction of the two-dot chain line in FIG. Then, the support by the holder 111 of the clamp mechanism 16 is released. As a result, the unit 200 can move in the axial direction of the rotating brush 11.

  Next, the unit 200 is moved to one side in the axial direction so that the shaft portion 41 of the rotating brush 11 is pulled out from the bearing 21. Then, the drive frame 80 and the attachment tool 82 are detached from the holder 111, and the unit 200 with the rotating brush 11 is detached from the clamp mechanism 16. Thereby, the unit 200 can be extracted from the work processing area, and the components included in the unit 200 can be maintained.

  When the rotating brush 11 is replaced, the rotating brush 11 may be removed from the coupling 76 and a new rotating brush 11 may be attached to the coupling 76 in the removed unit 200. From another viewpoint of the unit 200, the unit 200 includes the subunit 210 including the rotational power transmission mechanism 13, the reciprocating power transmission mechanism 14 and the motor 15, the rotational brush 11, the subunit 210 and the rotational brush 11. It can be said that it is comprised with the coupling 76 which connects together.

The effects of the dust removing device 1 of the present embodiment described above will be described.
First, the rotational power transmission mechanism 13, the reciprocating power transmission mechanism 14, and the motor 15 are concentrated on one end side in the axial direction of the rotating brush 11, so that a large space is not taken up on the other end side in the axial direction of the rotating brush 11. I'll do it. Thereby, it can use for size reduction of the dust removal apparatus 1. FIG.
Further, the centralized arrangement eliminates the need to arrange a rotary and reciprocating power transmission mechanism on one end side of the rotating brush 11. Thereby, when performing the exchange operation which removes the rotating brush 11, the operation | work of the one end side of the axial direction of the rotating brush 11 can be reduced.

  In addition, since the unit 200 is configured, not only replacement of the rotating brush 11 but also maintenance and the like for each unit 200 are facilitated. Further, when the unit 200 is mounted, the user or operator can place the unit 200 at a predetermined mounting position by moving the unit 200 so as to abut against the stopper 114, so that the replacement operation can be performed easily and reliably.

  Further, it is a mode in which rotational and reciprocating power is input only from one end side in the axial direction of the rotating brush 11, and the motor 15 is disposed in the vicinity of the cylindrical cam 81. Therefore, the torsional moment acting on the rotating brush 11 can be mitigated structurally compared to the opposite configuration. Thereby, damage to the shaft (brush main body) of the rotating brush 11 can be suppressed.

Next, the modification of the dust removal apparatus 1 of this embodiment is demonstrated.
In this modification, a detection device 300 that detects the degree of wear of the rotating brush 11 is provided. As shown in FIGS. 1 and 2, the detection device 300 is attached to the main body base 51, for example. Although the detection apparatus 300 is not particularly limited, a photoelectric sensor (photoconductive sensor) will be described here as an example.

11 to 13 are enlarged views showing the structure around the photoelectric sensor 300. FIG.
The photoelectric sensor 300 may be a transmissive type, but here is configured as a reflective type. The photoelectric sensor 300 includes a sensor head 310 including a light emitting element and a light receiving element, a reflection plate 320 that reflects light emitted from the light emitting element of the sensor head 310, and a cord 330 connected to the sensor head 310. . The sensor head 310 is attached to the main body base 51 via a bracket 335.

  The sensor head 310 and the reflection plate 320 are disposed to face each other with the rotating brush 11 in between in a direction orthogonal to the axial direction of the rotating brush 11. The center 340 of the optical axis of light emitted from the sensor head 310 is located across the surface of the rotating brush 11, that is, the conductive fiber of the rotating brush 11. The light receiving element of the sensor head 310 receives the light reflected by the reflecting plate 320. The degree of wear (degree of wear) of the conductive fibers is detected by the change in the amount of light received by the light receiving element. Specifically, when the amount of received light increases from the initial value, it is detected that the conductive fiber is being worn away. The cord 330 transmits a control signal and is connected to a control device.

  By providing such a photoelectric sensor 300 in the dust removing apparatus 1, it is possible to objectively determine the replacement time of the rotating brush 11. The user or operator can know from the detection result of the photoelectric sensor 300 that it is time to replace the rotary brush 11. Note that when the amount of light received by the photoelectric sensor 300 decreases from the initial value, it is possible that the attachment position of the rotary brush 11 or the like is deviated from the normal position or a foreign object has entered. . That is, in this case, it is detected by the photoelectric sensor 300 that the dust removing device 1 is abnormal.

FIG. 14 is a diagram illustrating a method for correcting the axis of the rotating brush 11 using the photoelectric sensor 300.
The control device 400 is connected to the cord 330 of the photoelectric sensor 300 and to the motor 15 and the height adjusting mechanism 6. Then, the control device 400 may control the height adjustment mechanism 6 based on the detection result of the photoelectric sensor 300.

  Specifically, when the amount of light received by the photoelectric sensor 300 increases, the conductive fibers are worn and reduced, and the distance between the rotating brush 11 and the workpiece W becomes larger than a predetermined value. In this case, the control device 400 controls the height adjusting mechanism 6 so that the distance between the increased rotating brush 11 and the workpiece W is restored to the original predetermined value, and the axis of the rotating brush 11 is moved downward. Lower it. Such control is useful when the rotating brush 11 cannot be replaced immediately.

  It is preferable that the photoelectric sensor 300 is disposed closer to the fixed belt conveyor 34a than to the movable belt conveyor 34b. This will be described in detail.

  The dust removing apparatus 1 can process a workpiece W having a plurality of widths. For this purpose, the workpiece conveying mechanism 12 is provided with a workpiece width adjusting mechanism. As described above, since the workpiece width adjusting mechanism adjusts the width with respect to one end side in the width direction of the workpiece W, all the workpieces W having a plurality of widths are transported in the area on the one end side serving as the reference. If it is the aspect of the above-mentioned workpiece conveyance mechanism 12, the area will be in the vicinity of the belt conveyor 34a on the fixed side. Since the portion of the rotating brush 11 in this area is used more frequently than the portion of the rotating brush 11 in the area near the movable belt conveyor 34b, for example, the conductive fibers are easily worn. Therefore, the degree of wear of the rotating brush 11 can be detected with high reliability by arranging the photoelectric sensor 300 in the area where the workpiece W of all widths is conveyed.

It is a front view of the dust removal apparatus concerning an embodiment. It is a top view of the dust removal apparatus concerning an embodiment. It is a fragmentary sectional view which expands and shows the one end part side of a rotating brush about the dust removal apparatus which concerns on embodiment. It is a fragmentary sectional view which expands and shows the other edge part side of a rotating brush about the dust removal apparatus which concerns on embodiment. It is a figure which shows the attachment plate of a motor, (A) is a front view, (B) is a side view. It is a figure which shows a drive frame (member to be clamped), (A) is a side view, (B) is front sectional drawing. It is principal part sectional drawing of the dust removal apparatus which shows the reciprocating motion of a rotating brush temporally, respectively, (A) The figure of an initial state, (B) The figure when a motor carries out 1/4 rotation from an initial state, c) It is a figure when a motor carries out 1/2 rotation from an initial state. It is the side view seen from the VIII-VIII line direction of FIG. It is principal part sectional drawing of the dust removal apparatus which concerns on embodiment, and is a figure which shows the state which supported the unit by the clamp mechanism. It is principal part sectional drawing of the dust removal apparatus which concerns on embodiment, and is a figure which shows the state which released | released the unit from the support by a clamp mechanism, and removed the unit. It is a side view of a photoelectric sensor. It is the front view seen from the XII direction of FIG. It is the front view seen from the XIII direction of FIG. FIG. 10 is a cross-sectional view illustrating a dust removing device according to a modification including a photoelectric sensor and a control device, and is a diagram illustrating a method for correcting the axis of a rotating brush using the photoelectric sensor.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Dust removal apparatus, 5 ... Base, 11 ... Rotating brush, 12 ... Work conveyance mechanism, 13 ... Rotational power transmission mechanism, 14 ... Reciprocating power transmission mechanism, 15 ... -Motor, 16 ... Clamp mechanism, 76 ... Coupling, 80 ... Drive frame (clamped member), 81 ... Cylindrical cam, 83 ... Cam follower, 84 ... Cam groove (Cam) Part), 114 ... stopper, 200 ... unit, 210 ... sub-unit, 300 ... photoelectric sensor, W ... work

Claims (10)

A rotating brush that removes dust adhering to the workpiece;
A motor that is a power source of the rotating brush;
A rotational power transmission mechanism for transmitting power from the motor to the rotating brush and rotating the rotating brush about its axis;
A reciprocating power transmission mechanism for converting power from the motor into reciprocating motion of the rotating brush and reciprocating the rotating brush in its axial direction;
The dust removing apparatus, wherein the motor, the rotational power transmission mechanism, and the reciprocating power transmission mechanism are arranged on one end side in the axial direction of the rotary brush.   The dust removing device according to claim 1, further comprising a clamp mechanism that removably supports the rotating brush, the motor, the rotating power transmission mechanism, and the reciprocating power transmission mechanism as one unit. The clamp mechanism supports the unit movably in the axial direction of the rotating brush,
The dust removal according to claim 2, wherein the unit is configured to be removed from the clamp mechanism by being moved to one of the axial directions of the rotary brush in a state where the support by the clamp mechanism is released. apparatus.   The dust removing apparatus according to claim 3, wherein the clamp mechanism has a stopper that restricts the movement of the unit toward the other side in the axial direction of the rotary brush so that the unit is supported at the attachment position. The unit is
A subunit comprising the motor, the rotational power transmission mechanism and the reciprocating power transmission mechanism;
The dust removing device according to any one of claims 2 to 4, further comprising a coupling that detachably connects the subunit and the rotating brush. The reciprocating power transmission mechanism is
A clamped member removably supported by the clamp mechanism;
A cam follower fixed to the clamped member;
A cam portion that guides the cam follower, and a cylindrical cam that rotates by the power of the motor;
The cam follower converts the rotation into a reciprocating motion of the cylindrical cam while allowing the rotation of the cylindrical cam.
6. The dust removing device according to claim 2, wherein the cylindrical cam is coaxially connected to the rotating brush so as to rotate integrally with the rotating brush and to reciprocate.   The dust removing device according to claim 6, wherein the motor is fixed to the clamped member. The rotational power transmission mechanism allows the rotary brush to reciprocate;
The dust removal apparatus according to any one of claims 1 to 7, wherein the reciprocating power transmission mechanism allows rotation of the rotary brush.   The dust removing device according to any one of claims 1 to 8, further comprising a detecting device that detects a degree of wear of the rotating brush. The rotating brush has a brush body, and conductive fibers that are planted on the peripheral surface of the brush body and come into contact with the workpiece,
The dust removing device according to claim 9, wherein the detection device is configured by a photoelectric sensor facing the conductive fiber.

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