JP2008159513A - Specimen holder for electron microscope - Google Patents

Specimen holder for electron microscope Download PDF

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JP2008159513A
JP2008159513A JP2006349195A JP2006349195A JP2008159513A JP 2008159513 A JP2008159513 A JP 2008159513A JP 2006349195 A JP2006349195 A JP 2006349195A JP 2006349195 A JP2006349195 A JP 2006349195A JP 2008159513 A JP2008159513 A JP 2008159513A
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sample
retainer
electron microscope
view
tip
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Koji Moriya
幸二 守谷
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Jeol Ltd
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Jeol Ltd
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Priority to JP2006349195A priority Critical patent/JP2008159513A/en
Priority to EP07255043A priority patent/EP1939923B1/en
Priority to US11/964,392 priority patent/US7800077B2/en
Publication of JP2008159513A publication Critical patent/JP2008159513A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a specimen holder for an electron microscope, to which the present invention relates, and which permits a field of view to be obtained at a tilt angle that is made as close as possible to 90° and can be manipulated easily. <P>SOLUTION: The specimen holder for the electron microscope has a bar-type rotating portion and a retainer 20 mounted at the front end of the rotating portion, wherein the retainer 20 has a member 15 provided with a hole 15a, providing a reference in searching the whole specimen for a desired field of view, around its front end, and a circular groove 15b that is formed in the member and used to position the specimen placed on the member 15, and is configured so as to have a shape without any member lying perpendicularly to a tilt axis at the position of the specimen. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は電子顕微鏡用試料ホルダーに関し、高傾斜角でも試料像を得ることができるようにした電子顕微鏡用試料ホルダーに関する。近年、主に生物分野でトモグラフィーという３次元像の構築技術が注目されている。トモグラフィーでは、傾斜させた試料情報を画像処理するもので、その情報が多ければより正確な３次元像を構築することができる。本発明は、その情報取得のために使用される電子顕微鏡用試料ホルダーに関するものである。   The present invention relates to a sample holder for an electron microscope, and more particularly to a sample holder for an electron microscope that can obtain a sample image even at a high tilt angle. In recent years, three-dimensional image construction technology called tomography has attracted attention mainly in the biological field. In tomography, tilted sample information is subjected to image processing. If there is a lot of information, a more accurate three-dimensional image can be constructed. The present invention relates to a sample holder for an electron microscope used for acquiring the information.

図５は従来の電子顕微鏡用試料ホルダーの外観構成例を示す図で、試料ホルダー全体を示している。図において、１は棒状の回転部、２は該回転部１を回転させるためのモータ、３は回転部１の先端に設けられた試料ホールド部分（リテーナ）である。４は該リテーナ３に取り付けられた試料、５は回転部１の回転軸である。図のＡは回転方向を示している。図に示すように、時計方向及び反時計方向に回転する。   FIG. 5 is a diagram showing an example of the external configuration of a conventional electron microscope sample holder, showing the entire sample holder. In the figure, 1 is a rod-shaped rotating part, 2 is a motor for rotating the rotating part 1, and 3 is a sample holding part (retainer) provided at the tip of the rotating part 1. Reference numeral 4 denotes a sample attached to the retainer 3, and 5 denotes a rotating shaft of the rotating unit 1. A in the figure indicates the direction of rotation. As shown in the figure, it rotates clockwise and counterclockwise.

図６は従来のリテーナの展開図である。図５と同一のものは、同一の符号を付して示す。図において、１０は試料４を取り付けるための部材（プレート）である。４は試料であり、径はφ３〜φ３．２ｍｍ程度であり、厚さは５０μｍ程度である。１０ａは部材１０の先端に設けられた穴であり、試料全体の視野探しの基準となる穴である。１０ｂは部材１０の先端に形成された円形の溝であり、試料の位置を決めるための溝である。１０ｃは部材１０の最先端に形成された溝であり、試料を取り出す際のピンセット先端の挿入口である。   FIG. 6 is a development view of a conventional retainer. The same components as those in FIG. 5 are denoted by the same reference numerals. In the figure, reference numeral 10 denotes a member (plate) for attaching the sample 4. Reference numeral 4 denotes a sample having a diameter of about φ3 to φ3.2 mm and a thickness of about 50 μm. Reference numeral 10a denotes a hole provided at the tip of the member 10, which is a reference for searching the visual field of the entire sample. Reference numeral 10b denotes a circular groove formed at the tip of the member 10, which is a groove for determining the position of the sample. Reference numeral 10c denotes a groove formed at the forefront of the member 10, and is an insertion port at the tip of the tweezers when taking out the sample.

１１は試料４を押さえるための板バネである。この板バネ１１は、ネジ１２により部材１０のネジ穴１０ｄに取り付けられるようになっている。このように構成された装置の試料の固定方法について説明する。   Reference numeral 11 denotes a leaf spring for holding the sample 4. The leaf spring 11 is attached to the screw hole 10 d of the member 10 by a screw 12. A method for fixing the sample of the apparatus configured as described above will be described.

先ず、試料４を部材１０に設けられた円形の溝１０ｂに沿って置く。次に、板バネ１１をネジ１２によって部材１０に固定する。この結果、板バネ１１のバネの力により試料４が部材１０に固定されることになる。   First, the sample 4 is placed along the circular groove 10 b provided in the member 10. Next, the leaf spring 11 is fixed to the member 10 with screws 12. As a result, the sample 4 is fixed to the member 10 by the spring force of the leaf spring 11.

従来のこの種の装置としては、カートリッジ本体の先端部にメッシュ状部を形成し、スライスされた試料等はこのメッシュ状部ですくいとるようにした構成が知られている（例えば特許文献１参照）。また、試験片チップは熱伝導性材料の試験片グリッドを含み、試験片グリッドはグリッド開口を形成するように交差する複数のグリッドバーを有し、グリッド開口の各々は長さ及び幅を有し、各グリッド開口の長さはホルダ本体の長手軸線に実質上垂直で当該グリッド開口の幅より大であり、試験片チップは水平から両方向に少なくとも約９０°の角度にわたって回転できるようにした試験片低温移送ホルダが知られている（例えば特許文献２参照）。
特開平８−１７３８１号公報（段落００１０、図１、図２） 特許第３６０５１１９号公報（第４頁第３２行〜第５頁第４行、第１図） As a conventional apparatus of this type, a configuration is known in which a mesh-like part is formed at the tip of the cartridge body, and a sliced sample or the like is scrubbed with this mesh-like part (see, for example, Patent Document 1). ). The test strip tip also includes a test strip grid of thermally conductive material, the test strip grid having a plurality of grid bars that intersect to form a grid aperture, each grid aperture having a length and a width. A test piece wherein the length of each grid opening is substantially perpendicular to the longitudinal axis of the holder body and greater than the width of the grid opening, so that the test specimen tip can be rotated from horizontal to at least about 90 ° in both directions. A low-temperature transfer holder is known (see, for example, Patent Document 2).
Japanese Patent Laid-Open No. 8-17381 (paragraph 0010, FIGS. 1 and 2) Japanese Patent No. 3605119 (page 4, line 32 to page 5, line 4, FIG. 1)

図７は従来のリテーナの傾斜時の有効視野の説明図である。図６と同一のものは、同一の符号を付して示す。（ｂ）がリテーナの観察方向である。（ａ）は傾斜角０°の場合の状態を示している。プレート（部材）１０の上に試料４が載置されており、その上から板バネ１１で試料４を固定している。そして、上方から電子線ＥＢを照射すると、蛍光板に像を結像する。Ｂは蛍光板上の像である。有効視野φ２ｍｍである。   FIG. 7 is an explanatory view of an effective visual field when the conventional retainer is inclined. The same components as those in FIG. 6 are denoted by the same reference numerals. (B) is an observation direction of the retainer. (A) has shown the state in case of inclination-angle 0 degree. A sample 4 is placed on a plate (member) 10, and the sample 4 is fixed by a leaf spring 11 from the top. When an electron beam EB is irradiated from above, an image is formed on the fluorescent screen. B is an image on the fluorescent screen. Effective field of view φ2 mm.

ここで、傾斜角が６０°になると、（ｃ）に示すように試料４が６０°傾斜し、この結果、得られる蛍光板上の像もＣに示すように楕円状の視野が確保できる。（ｄ）は傾斜角が８０°の場合である。この場合には、板バネ１１や円形溝１０ｂによって視界が遮られ、蛍光板上の像は見えなくなる。また、試料を取り出す時、ピンセットを試料の下に入れにくく、試料を傷つけてしまうという問題もあった。また、試料の装着位置出し及び着脱の作業性は簡単かつ確実でなければならない。   Here, when the tilt angle is 60 °, the sample 4 is tilted by 60 ° as shown in (c). As a result, an elliptical visual field can be secured as shown in C in the obtained image on the fluorescent screen. (D) is a case where an inclination | tilt angle is 80 degrees. In this case, the field of view is blocked by the leaf spring 11 and the circular groove 10b, and the image on the fluorescent screen becomes invisible. Further, when taking out the sample, there is a problem that it is difficult to put the tweezers under the sample and the sample is damaged. In addition, the workability for positioning and attaching the sample must be simple and reliable.

本発明はこのような課題に鑑みてなされたものであって、可能な限り９０°に近い傾斜角度で視野を得ることができ、また操作性のよい電子顕微鏡用試料ホルダーを提供することを目的としている。   The present invention has been made in view of such problems, and an object of the present invention is to provide a sample holder for an electron microscope that can obtain a field of view at an inclination angle as close to 90 ° as possible and has good operability. It is said.

（１）請求項１記載の発明は、棒状の回転部と、該回転部の先端部に設けられたリテーナよりなる電子顕微鏡用試料ホルダーにおいて、前記リテーナは、その先端に試料全体の視野探しの基準となる穴が設けられた部材と、該部材に設けられた試料の位置決めを行なう円形溝とを有し、試料位置での傾斜軸と直角方向の部材を無くした形状としたことを特徴とする。
（２）請求項２記載の発明は、試料保持部分の一部が試料の大きさよりも小さくなっていることを特徴とする。 (1) The invention according to claim 1 is a sample holder for an electron microscope comprising a rod-shaped rotating part and a retainer provided at the tip of the rotating part. The retainer searches for the field of view of the entire sample at the tip. It has a member provided with a reference hole and a circular groove for positioning the sample provided in the member, and has a shape in which a member perpendicular to the inclined axis at the sample position is eliminated. To do.
(2) The invention described in claim 2 is characterized in that a part of the sample holding portion is smaller than the size of the sample.

（１）請求項１記載の発明によれば、試料位置での傾斜軸と直角方向の部材を無くした形状とすることにより、可能な限り９０°に近い傾斜角度で視野を得ることができる。
（２）請求項２記載の発明によれば、試料を取り外す時の操作性が向上する。 (1) According to the first aspect of the invention, the field of view can be obtained at an inclination angle as close to 90 ° as possible by eliminating the member perpendicular to the inclination axis at the sample position.
(2) According to the invention described in claim 2, the operability when removing the sample is improved.

以下、図面を参照して本発明の実施の形態を詳細に説明する。図１は本発明のリテーナの一実施の形態を示す外観構成図である。図６と同一のものは、同一の符号を付して示す。試料の固定方法は、従来のものと同じである。図において、４は試料、２０はリテーナ、１５は部材、１１’は板バネ、１２は該板バネ１１’を部材１５に固定するためのネジ、２１はリテーナ２０の先端部に設けられた試料搭載部である。図より明らかなように、試料４の方が試料搭載部２１より大きいことが分かる。このように、試料保持部分の一部が試料の大きさよりも小さくなっていることにより、試料４をピンセットで容易に挟むことができ、試料を取り外す時の操作性が向上する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an external configuration diagram showing an embodiment of a retainer of the present invention. The same components as those in FIG. 6 are denoted by the same reference numerals. The sample fixing method is the same as the conventional one. In the figure, 4 is a sample, 20 is a retainer, 15 is a member, 11 'is a leaf spring, 12 is a screw for fixing the leaf spring 11' to the member 15, and 21 is a sample provided at the tip of the retainer 20. It is a mounting part. As can be seen from the figure, the sample 4 is larger than the sample mounting portion 21. Thus, since a part of the sample holding portion is smaller than the size of the sample, the sample 4 can be easily sandwiched with tweezers, and the operability when removing the sample is improved.

図２は本発明のリテーナの展開図である。図１、図６と同一のものは、同一の符号を付して示す。図において、１５は試料４を取り付けるための部材（プレート）である。４は試料であり、径はφ３〜φ３．２ｍｍ程度であり、厚さは５０μｍ程度である。１５ａは部材１５の先端に設けられた穴であり、試料全体の視野探しの基準となる穴である。１５ｂは部材１５の先端に形成された円形の溝であり、試料の位置を決めるための溝である。１５ｃは部材１５の最先端に形成された部材である。該部材１５ｃの幅は試料径よりも小さくして、傾斜時の障害となる部分を全て無くした形状にする。この結果、試料４をピンセットで摘み上げる作業を容易にする。穴１５ａ、円形溝１５ｂ及び部材１５ｃとで、試料搭載部２１を形成している。   FIG. 2 is a development view of the retainer of the present invention. 1 and 6 are denoted by the same reference numerals. In the figure, reference numeral 15 denotes a member (plate) for attaching the sample 4. Reference numeral 4 denotes a sample having a diameter of about φ3 to φ3.2 mm and a thickness of about 50 μm. Reference numeral 15a denotes a hole provided at the tip of the member 15, which is a reference for searching the visual field of the entire sample. Reference numeral 15b denotes a circular groove formed at the tip of the member 15, which is a groove for determining the position of the sample. 15 c is a member formed at the forefront of the member 15. The width of the member 15c is made smaller than the sample diameter so as to eliminate all the portions that become obstacles during tilting. As a result, the work of picking up the sample 4 with tweezers is facilitated. The sample mounting portion 21 is formed by the hole 15a, the circular groove 15b, and the member 15c.

１１´は試料４を押さえるための板バネであり、その先端は爪状になっている。この板バネ１１´は、ネジ１２により部材１５のネジ穴１０ｄに取り付けられるようになっている。このように構成された装置の試料の固定方法について説明する。   11 ′ is a leaf spring for holding the sample 4 and its tip is claw-shaped. The leaf spring 11 ′ is attached to the screw hole 10 d of the member 15 with a screw 12. A method for fixing the sample of the apparatus configured as described above will be described.

先ず、試料４を部材１５に設けられた円形の溝１５ｂに沿って置く。次に、板バネ１１´をネジ１２によって部材１５に固定する。この結果、板バネ１１´のバネの力により試料４が部材１５に固定されることになる。また、本発明によれば、試料位置での傾斜軸と直角方向の部材を無くした形状としている。このように構成することで、可能な限り９０°に近い傾斜角度で視野を得ることができる。また、本発明によれば、試料を取り外す時の操作性が向上する。   First, the sample 4 is placed along the circular groove 15 b provided in the member 15. Next, the leaf spring 11 ′ is fixed to the member 15 with the screw 12. As a result, the sample 4 is fixed to the member 15 by the spring force of the leaf spring 11 ′. In addition, according to the present invention, the shape perpendicular to the tilt axis at the sample position is eliminated. By comprising in this way, a visual field can be obtained at an inclination angle as close to 90 ° as possible. Further, according to the present invention, the operability when removing the sample is improved.

図３は本発明のリテーナの他の外観構成例を示す図である。図２と同一のものは、同一の符号を付して示す。図は、リテーナ２０に試料４が搭載された状態を示している。試料搭載部２１が試料４より小さいので、試料４を取り出す時に操作性がよいことが分かる。   FIG. 3 is a diagram showing another external configuration example of the retainer of the present invention. The same components as those in FIG. 2 are denoted by the same reference numerals. The figure shows a state in which the sample 4 is mounted on the retainer 20. Since the sample mounting portion 21 is smaller than the sample 4, it can be seen that the operability is good when the sample 4 is taken out.

図４は本発明のリテーナの傾斜時の有効視野の説明図である。図２と同一のものは、同一の符号を付して示す。板バネ１１´は視野カットに影響しないので省略している。（ｂ）がリテーナの観察方向である。（ａ）は傾斜角０°の場合の状態を示している。プレート（部材）１５の上に試料４が載置されており、その上から板バネ１１´（図示せず）で試料４を固定している。そして、上方から電子線ＥＢを照射すると、蛍光板に像を結像する。Ｄは蛍光板上の像である。有効視野φ２ｍｍである。   FIG. 4 is an explanatory view of an effective visual field when the retainer of the present invention is inclined. The same components as those in FIG. 2 are denoted by the same reference numerals. The leaf spring 11 'is omitted because it does not affect the field of view cut. (B) is an observation direction of the retainer. (A) has shown the state in case of inclination-angle 0 degree. A sample 4 is placed on a plate (member) 15, and the sample 4 is fixed by a leaf spring 11 ′ (not shown) from above. When an electron beam EB is irradiated from above, an image is formed on the fluorescent screen. D is an image on the fluorescent screen. Effective field of view φ2 mm.

ここで、傾斜角が６０°になると、（ｃ）に示すように試料４が６０°傾斜し、この結果、得られる蛍光板上の像もＥに示すように楕円状の視野が確保できる。（ｄ）は傾斜角が８０°の場合である。この場合でも、試料位置での傾斜軸と直角方向の部材を無くした形状としているので、板バネ１１´や円形溝１５ｂによって視界が遮られることがなく、蛍光板上の像はＦに示すように確保される。   Here, when the tilt angle is 60 °, the sample 4 is tilted by 60 ° as shown in (c), and as a result, an elliptical visual field can be secured as shown by E in the obtained image on the fluorescent screen. (D) is a case where an inclination | tilt angle is 80 degrees. Even in this case, since the member perpendicular to the tilt axis at the sample position is eliminated, the field of view is not obstructed by the leaf spring 11 'or the circular groove 15b, and the image on the fluorescent screen is as shown in F. Secured.

また、試料を取り出す時、ピンセットを操作性よく扱うことができ、試料４の装着位置出し及び着脱の作業性は簡単かつ確実となる。また、板バネ１１´は、従来のものに対して視野カットとなる部分を無くした形状となるが、バネにより確実に押さえられ、かつ切り口を角状にしていることにより、試料の回転やずれを抑制することができる。   Further, when taking out the sample, the tweezers can be handled with good operability, and the workability of attaching and detaching the sample 4 is simple and reliable. In addition, the leaf spring 11 'has a shape that eliminates the portion that cuts the field of view compared to the conventional one. Can be suppressed.

本発明の効果を列挙すれば、以下の通りである。
１）試料を中心として回転軸と直角方向にある部材形状をなくすことにより、試料着脱の作業性は維持した上で高傾斜まで視野を得ることができる。また、各傾斜位置での広い有効視野を得ることができる。
２）試料を部材からはみ出すように構成することにより、ピンセット等で容易に挟むことができ、試料を傷つけないようにすることができる。
３）押さえバネ（板バネ１１´）の先端を図に示すように爪状にすることにより、押さえる力と同時に試料回転等の動きを抑制することができる。 The effects of the present invention are enumerated as follows.
1) By eliminating the member shape perpendicular to the rotation axis with the sample as the center, it is possible to obtain a visual field up to a high inclination while maintaining the workability of attaching and detaching the sample. In addition, a wide effective field of view at each inclined position can be obtained.
2) By constituting the sample so as to protrude from the member, it can be easily sandwiched with tweezers and the like, and the sample can be prevented from being damaged.
3) By making the tip of the holding spring (leaf spring 11 ') claw-shaped as shown in the figure, it is possible to suppress movement such as sample rotation at the same time as pressing force.

本発明のリテーナの一実施の形態を示す外観構成図である。It is an appearance lineblock diagram showing one embodiment of a retainer of the present invention. 本発明のリテーナの展開図である。It is an expanded view of the retainer of this invention. 本発明のリテーナの他の外観構成例を示す図である。It is a figure which shows the other external appearance structural example of the retainer of this invention. 本発明のリテーナの傾斜時の有効視野の説明図である。It is explanatory drawing of the effective visual field at the time of the inclination of the retainer of this invention. 従来の電子顕微鏡用試料ホルダーの外観構成例を示す図である。It is a figure which shows the example of an external appearance structure of the conventional sample holder for electron microscopes. 従来のリテーナの展開図である。It is an expanded view of the conventional retainer. 従来のリテーナの傾斜時の有効視野の説明図である。It is explanatory drawing of the effective visual field at the time of the inclination of the conventional retainer.

符号の説明Explanation of symbols

４ 試料
１１´ 板バネ
１２ ネジ
１５ 部材
１５ａ 穴
１５ｂ 円形溝
１５ｃ 部材
２０ リテーナ
２１ 試料搭載部 4 Sample 11 ′ Leaf spring 12 Screw 15 Member 15a Hole 15b Circular groove 15c Member 20 Retainer 21 Sample mounting portion

Claims (2)

棒状の回転部と、該回転部の先端部に設けられたリテーナよりなる電子顕微鏡用試料ホルダーにおいて、
前記リテーナは、その先端に試料全体の視野探しの基準となる穴が設けられた部材と、該部材に設けられた試料の位置決めを行なう円形溝とを有し、試料位置での傾斜軸と直角方向の部材を無くした形状としたことを特徴とする電子顕微鏡用試料ホルダー。 In a sample holder for an electron microscope comprising a rod-shaped rotating part and a retainer provided at the tip of the rotating part,
The retainer has a member provided with a hole serving as a reference for searching the visual field of the entire sample at the tip thereof, and a circular groove for positioning the sample provided on the member, and is perpendicular to the tilt axis at the sample position. A sample holder for an electron microscope, characterized by having a shape with no directional member. 試料保持部分の一部が試料の大きさよりも小さくなっていることを特徴とする請求項１記載の電子顕微鏡用試料ホルダー。   The sample holder for an electron microscope according to claim 1, wherein a part of the sample holding portion is smaller than the size of the sample.
JP2006349195A 2006-12-26 2006-12-26 Specimen holder for electron microscope Withdrawn JP2008159513A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006349195A JP2008159513A (en) 2006-12-26 2006-12-26 Specimen holder for electron microscope
EP07255043A EP1939923B1 (en) 2006-12-26 2007-12-24 Specimen holder for electron microscope
US11/964,392 US7800077B2 (en) 2006-12-26 2007-12-26 Specimen holder for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006349195A JP2008159513A (en) 2006-12-26 2006-12-26 Specimen holder for electron microscope

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KR102080671B1 (en) * 2019-05-17 2020-02-25 (주)이엠아이티 Sample holding device and sample manufacturing method therefor
KR102649789B1 (en) * 2023-08-25 2024-03-22 한국표준과학연구원 Replaceable sample holder for electron microscope

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JP5532425B2 (en) * 2010-08-27 2014-06-25 株式会社日立ハイテクノロジーズ Sample holder for charged particle equipment
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KR102080671B1 (en) * 2019-05-17 2020-02-25 (주)이엠아이티 Sample holding device and sample manufacturing method therefor
KR102649789B1 (en) * 2023-08-25 2024-03-22 한국표준과학연구원 Replaceable sample holder for electron microscope

Also Published As

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US20090014664A1 (en) 2009-01-15
EP1939923A2 (en) 2008-07-02
US7800077B2 (en) 2010-09-21
EP1939923A3 (en) 2010-01-06
EP1939923B1 (en) 2012-02-22

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